CN110849845B - A device and method for online detection and control of composite microstructure array micro-molding - Google Patents
A device and method for online detection and control of composite microstructure array micro-moldingInfo
- Publication number
- CN110849845B CN110849845B CN201911134057.XA CN201911134057A CN110849845B CN 110849845 B CN110849845 B CN 110849845B CN 201911134057 A CN201911134057 A CN 201911134057A CN 110849845 B CN110849845 B CN 110849845B
- Authority
- CN
- China
- Prior art keywords
- micro
- workpiece
- microstructure
- light
- composite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention provides a device for controlling micro-forming of a composite microstructure array by on-line detection, wherein a hot-pressing system comprises a heating device, an upper template, a mould core fixing device, a microstructure mould core, an elastic micropore net, a workpiece positioning device and a lower template which are sequentially arranged from top to bottom; the invention further provides an online detection control composite microstructure array micro-forming method, which comprises the steps of controlling the light emitting device to emit light to the surface of a workpiece and controlling the light receiving device to receive diffuse reflection light, so as to realize detection of the forming condition of a composite microstructure on the surface of the workpiece or detection of the planar microstructure condition of the surface of the workpiece.
Description
Technical Field
The invention relates to the technical field of hot-pressing micro-molding on-line monitoring and intelligent fault diagnosis of a composite micro-structure array on the surface of a workpiece, in particular to a device and a method for controlling the micro-molding of the composite micro-structure array by utilizing the diffuse reflection principle on-line detection.
Background
The high-precision microstructure array can be applied to the fields of LED illumination, microfluidic chips, photovoltaic power generation, optical sensors, optical imaging systems, liquid crystal display screens, solar cells and the like. Compared with the planar microstructure array, the space composite microstructure has larger surface area ratio and shows more excellent performance. However, the manufacturing cost is high, the hot-pressing micro-forming technology of the composite microstructure array is low-cost manufacturing, and industrialization is possible. The key technology is how to quickly copy the micro-array structure morphology and even nano-array structure morphology to the surface of a workpiece with high precision, intelligently detect the composite microstructure forming morphology on line, and quickly feed back to a control center to realize intelligent manufacturing of the composite microstructure. At present, a physical probe method and a white light interferometry are adopted for detecting the microstructure array morphology, but if the molding accuracy of the micro array on the macroscopic surface is detected, the working efficiency is very low, and the micro array cannot be detected and identified on line. The space composite microstructure array needs to be subjected to three-dimensional detection, and the efficiency is lower.
However, increasingly developed personalized and diversified production brings requirements on different sizes of the compound micro-mechanism on the surface of the workpiece, and in the actual production process, the quality of the product is easily affected by weather temperature change, the size of the processed workpiece and vibration of equipment. Therefore, on-line detection is necessary in the production process of hot-pressing micro-molding of the composite microstructure array, and the hot-pressing micro-molding process parameters are adjusted in real time, so that the precise manufacturing of the macroscopic product of the composite microstructure array is realized.
Disclosure of Invention
The invention aims to overcome the defects and shortcomings in the prior art and provide the device for controlling the micro-forming of the composite microstructure array by online detection, which can rapidly and reliably realize online detection of the forming condition of the microstructure on the surface of a workpiece by using the diffuse reflection principle, thereby greatly improving the detection efficiency, shortening the detection period, reducing the time cost and providing basis for the production and adjustment of technological parameters of the subsequent process so as to improve the processing quality and efficiency. The invention also provides a high-efficiency and reliable online detection control method for micro-forming of the composite microstructure array, so as to realize the self-adaptive control of the hot-pressing process of the composite microstructure.
The device is characterized by comprising a hot pressing system and a diffuse reflection optical detection control system, wherein the hot pressing system comprises a heating device, an upper template, a die core fixing device, a microstructure die core, an elastic micropore net, a workpiece positioning device and a lower template which are sequentially arranged from top to bottom, the microstructure die core is fixed below the upper template through the die core fixing device, the upper template and the microstructure die core are heated through the heating device, the elastic micropore net is coated at the bottom of the microstructure die core, and the workpiece is fixed on the lower template through the workpiece positioning device and is arranged opposite to the microstructure die core;
the diffuse reflection optical detection control system comprises a light emitting device, a light receiving device and a light signal processing control module, wherein the light emitting device and the light receiving device are respectively positioned at two sides of the hot pressing system, and the light receiving device is in signal connection with the light information processing control module.
In the scheme, the device drives the workpiece to be clamped to the microstructure mold core coated with the elastic micropore net by controlling the lower mold plate, and maintains the pressure for a certain time, so that the surface of the workpiece is micro-molded to obtain a composite microstructure formed by compositing the surface of the microstructure mold core and the elastic micropore net, and controls the light emitting to emit light to the surface of the workpiece and the light receiving device to receive diffuse reflection light, so that the forming condition of the composite microstructure on the surface of the workpiece is detected, the forming condition of the microstructure on the surface of the workpiece is detected rapidly and reliably by utilizing the diffuse reflection principle, the detection efficiency is greatly improved, the time cost is reduced, and the basis is provided for the production and adjustment process parameters of the subsequent process, so that the processing quality and the processing efficiency are improved.
The incidence angle theta of the light beam emitted by the light emitting device and the surface of the workpiece is 10-80 degrees, and the relation between the number n of the light emitters in the light emitting device, the width d of the single light beam radiation workpiece and the width l of the workpiece is as follows:
The light receiving device is an illuminance sensor which is arranged in the theoretical direction of the incident light which is subjected to specular reflection on the surface of the workpiece.
The elastic microporous net is made of nylon wires or metal wires, or is formed by punching on the surface of the material by a laser punching method.
The microstructure mold core is made of stainless steel materials, ceramic materials or silicon carbide materials.
The aperture of the elastic micropore net is smaller than the surface microstructure size of the microstructure mold core, and the elastic micropore net coated at the bottom of the microstructure mold core is in a natural extension state.
A method for controlling micro-forming of a composite microstructure array by on-line detection is characterized in that a light emitting device is controlled to emit light to the surface of a workpiece and a light receiving device is controlled to receive diffuse reflection light, so that the forming condition of the composite microstructure on the surface of the workpiece is detected or the plane microstructure condition of the surface of the workpiece is detected;
the detection of the forming condition of the composite microstructure on the surface of the workpiece is as follows:
firstly, setting target forming height of a composite microstructure and hot-pressing technological parameters;
secondly, controlling a lower die plate to drive a workpiece to die a microstructure die core coated with an elastic micropore net, and maintaining the pressure for a certain time to enable the surface of the workpiece to be subjected to micro-forming to obtain a composite microstructure formed by compositing the surface of the microstructure die core and the elastic micropore net, wherein the composite microstructure comprises a micro-groove structure and a surface micro-lens structure;
then, in the process of driving the workpiece to release the film by the lower template, controlling the light emitting device to emit parallel light to the workpiece in a moving mode, adopting a single light emitter to receive diffuse reflection light, and adopting the light receiving device to realize point-by-point detection on the forming condition of the composite microstructure on the surface of the workpiece;
And meanwhile, analyzing the micro-forming reason of the composite microstructure, adjusting the levelness of workpiece fixation or hot-pressing process parameters according to the analysis result, so that the actual height of the hot-pressed composite microstructure gradually approaches the target forming height of the composite microstructure, and realizing the self-adaptive control of the hot-pressing process.
Specifically, the method for detecting the molding condition of the composite microstructure on the surface of the workpiece comprises the following steps:
1) Setting the target forming height of the composite microstructure and the hot-pressing process parameters, wherein the height h 1 of the microstructure of the composite microstructure is 1-1000 mu m, the height h 2 of the surface micro-lens structure is 1-200 mu m, the hot-pressing process parameters are that the hot-pressing pressure is 3-30 MPa, the dwell time is 0.1-20 s, the temperature of the microstructure mold core is 20-200 ℃, and the moving speed of a lower template is 0.1-10 mm/s;
2) The lower template is controlled to start to drive the workpiece to move away from the microstructure mold core at a constant speed along the negative Z-axis direction under the action of the hydraulic system, the light emitting device emits parallel light rays in the demolding process, and the incident angle of the light rays and the surface of the workpiece is theta, wherein theta is 10-80 degrees;
3) The light emitting device starts a single light emitter in the demolding process, and the forming condition of the composite microstructure on the surface of the workpiece is accurately detected point by utilizing the principle that an incident point of a light beam on the surface of the workpiece moves along the positive direction of the Y axis when the workpiece moves away from the mold core along the negative direction of the Z axis at a uniform speed;
4) When the workpiece retreats to a station and is static, the light emitting device starts all light emitters, and the emitted light irradiates the whole surface of the workpiece, so that the forming condition of the composite microstructure of the whole surface of the workpiece is rapidly detected;
5) The light receiving device receives light rays diffusely reflected by the surface of the workpiece, and finally carries out logic processing on the light information through the optical signal processing control module;
6) The optical signal processing control module calculates diffuse reflectance according to the ratio of the received diffuse reflection light flux to the emitted parallel light flux, compares the relationship between the diffuse reflectance in the experience database and the size of the composite microstructure, and judges the depth and quality of micro-molding of the micro-groove structure and the surface micro-lens structure of the composite microstructure;
7) The optical signal processing control module analyzes the forming reason of the composite microstructure, adjusts the levelness of workpiece fixation or the hot-pressing process parameters including hot-pressing pressure, dwell time, microstructure mold core temperature and lower mold plate movement speed according to the analysis result, transmits the parameters to the PLC of the hot-pressing system, carries out the next hot-pressing processing according to the adjusted process parameters, and circulates the steps to enable the actual height of the hot-pressed composite microstructure to gradually approach the target forming height of the composite microstructure, thereby realizing the self-adaptive control of the hot-pressing process.
The establishment of the experience database is based on an early-stage experiment, namely, firstly, the hot-pressing process parameters are changed, then the diffuse reflectance of the surface of a workpiece and the heights of the micro-groove structure and the surface micro-lens structure of the composite microstructure under the condition of different hot-pressing process parameters are recorded, then, the relation between the diffuse reflectance and the heights of the micro-groove structure and the surface micro-lens structure of the composite microstructure is established, and finally, the diffuse reflectance and the hot-pressing process parameters are associated;
the empirical formula of the height of the micro groove-shaped structure of the composite microstructure and the height and the diffuse reflectance m of the surface small micro lens structure is as follows:
h1=a1 m+b1;
h2=a2 m2+b2m+c2;
Wherein h 1 and h 2 respectively represent the height of the micro groove structure and the height of the surface micro lens structure, the unit is μm, m represents the diffuse reflectance, a 1、a2、b1、b2、c2 is a constant, and a 1≤1,5≤b1≤500,0.001≤a2≤0.002,0.01≤b2≤0.2,5≤c2 is more than or equal to 0.01 and less than or equal to 20.
The priority order of adjusting the technological parameters is dwell time, mold core temperature, hot pressing pressure and lower template moving speed.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. The invention reflects the change of the height of the composite microstructure array on the surface of the workpiece in real time by utilizing the diffuse reflection principle to induce the change of illuminance on line, and compared with the method for detecting the micro-array hot press molding by using a common macroscopic light source radiating around the space, the method is more accurate. The method can detect the planar microstructure array, the composite microstructure array, the transparent workpiece and the surface micro-forming of the opaque workpiece. In addition, compared with the detection of the outline shape of the composite microstructure by using a profiler, the detection efficiency is greatly improved, the detection period is shortened, and the time cost is reduced.
2. According to the invention, only a single light emitter is started in the demolding process, so that the forming condition of the composite microstructure on the surface of the workpiece can be accurately detected point by point. When the workpiece returns to the station to be static, all light emitters are started, and the micro-forming condition of the composite microstructure on the whole surface can be instantly and rapidly detected. Therefore, the method has the characteristics of convenient operation, flexibility, variability, high integration level and multifunction.
3. The invention utilizes the real-time analysis and diffuse reflection optical detection control system to perform data fusion, characterization and comparison on the composite microstructure height, diffuse reflectance and hot pressing parameter data, intelligently adjusts the process parameters in real time, realizes the self-adaptive closed-loop control on the micro-forming effect of the product macroscopic surface composite microstructure array, is beneficial to improving the anti-interference capability in the production process, and can meet the requirements of precise and rapid forming of diversified products, thereby reducing the production cost and improving the processing quality and efficiency.
Drawings
FIG. 1 is a schematic diagram of an apparatus for controlling the micro-molding of a composite microstructure array by on-line detection in accordance with the present invention;
FIG. 2 is a schematic diagram of specular reflection;
FIG. 3 is a schematic of diffuse reflection;
FIG. 4 is a graph of the microforming effect of the composite microstructure;
The device comprises a light source fixing device 1, an upper template 2, a heating device 3 (A) and 3 (B), a mold core fixing device 4, a microstructure mold core 5, an elastic micropore net 7, a receiver fixing device 8, a light receiving device 9, a lower template 10, a workpiece clamping device 11, a workpiece 12, a workpiece positioning device 13, a light emitting device 14 and a light signal processing control module.
Detailed Description
The invention is described in further detail below with reference to the drawings and the detailed description.
Example 1
As shown in FIG. 1, the device for controlling the micro-forming of the composite microstructure array through on-line detection comprises a hot pressing system and a diffuse reflection optical detection control system, wherein the hot pressing system comprises a heating device 4, an upper template 2, a die core fixing device 3 (A) and 3 (B), a microstructure die core 5, an elastic micropore net 6, a workpiece 11, a workpiece positioning device 12 and a lower template 9 which are sequentially arranged from top to bottom, the microstructure die core 5 is fixed below the upper template 2 through the die core fixing device 3 (A) and 3 (B), the upper template 2 and the microstructure die core 5 are heated through the heating device 4, the elastic micropore net 6 is wrapped at the bottom of the microstructure die core 5, and the workpiece 11 is fixed on the lower template 9 through the workpiece positioning device 12 and is arranged opposite to the microstructure die core 5. The diffuse reflection optical detection control system comprises a light emitting device 13, a light receiving device 8 and a light signal processing control module 14, wherein the light emitting device 13 and the light receiving device 8 are respectively fixed on two sides of the hot pressing system through a light source fixing device 1 and a receiver fixing device 7, and the light receiving device 8 is in signal connection with the light information processing control module 14.
In this embodiment, the incident angle θ between the light beam emitted by the light emitting device 13 and the surface of the workpiece 11 is 45 °, and the number n of light emitters in the light emitting device 13 can be determined by the formulaThe width l of the workpiece in this embodiment is 20mm, the width d of the single beam irradiated workpiece is 5mm, and the number n of light emitters can be calculated to be 4.
The light receiving device 8 of the present invention is an illuminance sensor provided in a theoretical direction in which incident light is specularly reflected on the surface of the workpiece 11. The elastic microporous mesh 6 of this example was woven from nylon yarn, and the elastic microporous mesh 6 had a pore diameter of 20 μm and a height of 30. Mu.m. The workpiece 11 in this embodiment is made of acrylic material, the microstructure mold core 5 is made of stainless steel, the height of the surface micro-groove structure is 100 μm, the width is 375 μm, the periphery of the elastic micro-pore net 6 is fixed with the side wall of the microstructure mold core 5, and the elastic micro-pore net 6 coated at the bottom of the microstructure mold core 5 is in a natural extension state.
The method adopted by the on-line detection control composite microstructure array micro-forming device in the embodiment is that the detection of the forming condition of the composite microstructure on the surface of the workpiece 11 is realized by controlling the light emitting device 13 to emit light to the surface of the workpiece 11 and controlling the light receiving device 8 to receive the light after diffuse reflection, specifically:
firstly, setting target forming height of a composite microstructure and hot-pressing technological parameters;
Secondly, controlling the lower template 9 to drive the workpiece 11 to clamp the microstructure mold core 5 coated with the elastic micropore net 6, and maintaining the pressure for a certain time to enable the surface of the workpiece 11 to be subjected to micro-molding to obtain a composite microstructure formed by compositing the surface of the microstructure mold core 5 and the elastic micropore net 6, wherein the composite microstructure comprises a micro-groove structure and a surface small micro-lens structure;
Then, in the process that the lower template 9 drives the workpiece 11 to form a film, the light emitting device 13 is controlled to emit parallel light to the workpiece 11 in a moving mode, a single light emitter is adopted to receive diffuse reflection light, and the light receiving device 8 is adopted to receive diffuse reflection light, so that the forming condition of the composite microstructure on the surface of the workpiece 11 is detected point by point;
finally, calculating diffuse reflectance according to the ratio of the received diffuse reflection light flux to the emitted parallel light flux, comparing the relationship between the diffuse reflectance and the composite microstructure size in an empirical database, judging the micro-forming depth and quality of the micro-groove structure and the surface micro-lens structure of the composite microstructure, analyzing the micro-forming reason of the composite microstructure, and adjusting the fixed levelness of the workpiece 11 or the hot-press process parameters according to the analysis result, so that the actual height of the hot-press formed composite microstructure gradually approaches the target forming height of the composite microstructure, and realizing the self-adaptive control of the hot-press process.
Specifically, the method comprises the following steps:
1) Setting the target forming height of the composite microstructure and the hot-pressing process parameters, wherein the height h 1 of the micro-groove structure of the composite microstructure is 70 mu m, the height h 2 of the surface micro-lens structure is 30 mu m, the hot-pressing process parameters are that the hot-pressing pressure is 10MPa, the dwell time is 2s, the temperature of the micro-structure mold core is 118 ℃, the moving speed of a lower template is 3mm/s, the lower template 9 is controlled to drive the workpiece 11 to clamp the micro-structure mold core 5 coated with the elastic micro-pore net 6 under the action of a hydraulic system, and the surface of the workpiece 11 is subjected to pressure holding for 2 seconds to micro-forming to obtain the composite microstructure formed by compositing the surface of the micro-structure mold core and the elastic micro-pore net, wherein the composite microstructure comprises the micro-groove structure and the surface micro-lens structure;
2) The lower die plate 9 is controlled to start to drive the workpiece 11 to move away from the microstructure die core 5 at a constant speed along the negative Z-axis direction under the action of the hydraulic system, the light emitting device 13 emits parallel light rays in the demolding process, and the incident angle of the light rays and the surface of the workpiece is theta, wherein theta is 45 degrees;
3) The light emitting device 13 starts a single light emitter in the demolding process, and the principle that the incident point of the light beam on the surface of the workpiece 11 moves uniformly along the positive direction of the Y axis when the workpiece 11 moves uniformly along the negative direction of the Z axis away from the mold core is utilized to realize the point-by-point accurate detection of the forming condition of the composite microstructure on the surface of the workpiece 11;
4) When the workpiece 11 is returned to the station and is static, the light emitting device 13 starts all light emitters, and the emitted light irradiates the surface of the whole workpiece 11, so that the forming condition of the composite microstructure on the surface of the whole workpiece 11 is rapidly detected;
5) The light receiving device 8 receives the light diffusely reflected by the surface of the workpiece 11 and finally carries out logic processing on the light information through the light signal processing control module 14;
6) The optical signal processing control module 14 calculates the diffuse reflectance according to the ratio of the received diffuse reflection light flux to the emitted parallel light flux, and compares the relationship between the diffuse reflectance and the composite microstructure size in the empirical database to judge the depth and quality of micro-molding of the micro-groove structure and the surface micro-lens structure of the composite microstructure.
7) The optical signal processing control module 14 analyzes the forming reason of the composite microstructure, adjusts the levelness of workpiece fixation or the hot-pressing process parameters including the hot-pressing pressure, the dwell time, the microstructure mold core temperature and the lower mold plate moving speed according to the analysis result, transmits the parameters to the PLC of the hot-pressing system, carries out the next hot-pressing processing according to the adjusted process parameters, and circulates the steps to enable the actual height of the hot-pressed composite microstructure to gradually approach the target forming height of the composite microstructure, thereby realizing the self-adaptive control of the hot-pressing process.
The establishment of the experience database is based on an early-stage experiment, namely, firstly, changing hot-pressing process parameters, then recording diffuse reflectance of the surface of a workpiece 11 and heights of a micro-groove structure and a surface micro-lens structure of a composite micro-structure under different hot-pressing process parameters, then establishing a relation between the diffuse reflectance and the heights of the micro-groove structure and the surface micro-lens structure of the composite micro-structure, and finally associating the diffuse reflectance and the hot-pressing process parameters;
the empirical formula of the height of the micro groove-shaped structure of the composite microstructure and the height and the diffuse reflectance m of the surface small micro lens structure is as follows:
h1=a1 m+b1;
h2=a2 m2+b2m+c2;
Wherein h 1 and h 2 respectively represent the height of the micro groove structure and the height of the surface micro lens structure, the unit is μm, m represents the diffuse reflectance, a 1、a2、b1、b2、c2 is a constant, and a 1≤1,5≤b1≤500,0.001≤a2≤0.002,0.01≤b2≤0.2,5≤c2 is more than or equal to 0.01 and less than or equal to 20.
The priority order of adjusting the technological parameters is dwell time, mold core temperature, hot pressing pressure and lower template moving speed.
In this embodiment, the diffuse reflectance of the composite microstructure formed at three positions on the surface of the workpiece 11 by using a single light emitter is 33%,30% and 33%, respectively. The method for controlling the micro-forming of the composite micro-structure array through online detection can judge the composite micro-structure height of the surface edge of the workpiece 11, wherein the micro-groove structure height h 1 is 66.5 mu m, the surface micro-lens structure height h 2 is 27.49 mu m, the middle composite micro-structure height is 65 micro-groove structure height h 1, and the surface micro-lens structure height h 2 is 25 mu m. Thus, the adjustment is stepwise by extending the hot press time, lowering the microstructure core temperature, or adjusting the levelness of the workpiece 11 fixation until the target composite microstructure is formed. Finally, the hot pressing process parameters are hot pressing pressure of 10MPa, dwell time of 4s, mold core temperature of 115 ℃ and lower die plate moving speed of 3mm. The surface morphology of the hot-pressed micro-formed composite microstructure is shown in fig. 4. If the target size of the composite microstructure on the surface of the workpiece changes or the weather temperature changes greatly, the size of the processed workpiece changes, the vibration of the equipment is obvious, and the like, the parameters are readjusted intelligently.
Example two
The embodiment is different from the embodiment only in that the method for controlling the micro-forming of the composite microstructure array by the online detection of the embodiment is to detect the planar microstructure condition of the surface of the workpiece by controlling the light emitting device to emit light to the surface of the workpiece and controlling the light receiving device to receive diffuse reflection light.
The embodiment is carried out according to the following steps:
As shown in fig. 1, an acryl workpiece 11 is placed over a workpiece positioning device 12 and clamped by a workpiece clamping device 10. The light emitting device 13 and the light receiving device 8 are respectively fixed on the left side and the right side of the hot pressing system through the light source fixing device 1 and the receiver fixing device 7, and the light receiving device 8 is connected with the light information processing control module 14.
The workpiece 11 is not subjected to hot press forming, the light emitting device 13 starts all light emitters, emitted light irradiates the surface of the whole workpiece 11, and the light receiving device 8 can almost receive all light reflected by the surface of the workpiece 11 due to the fact that the original surface to be processed of the acrylic workpiece 11 is smooth, wherein the principle of specular reflection and diffuse reflection is shown in fig. 2 and 3. According to the method, the situation of the surface plane microstructure of the acrylic workpiece 11 which is not subjected to hot press forming can be comprehensively detected, so that the detection efficiency is greatly improved, the detection period is shortened, and the time cost is reduced.
The above examples are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above examples, and any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principle of the present invention should be made in the equivalent manner, and the embodiments are included in the protection scope of the present invention.
Claims (8)
1. A method for controlling micro-forming of a composite microstructure array by on-line detection is characterized in that a light emitting device is controlled to emit light to the surface of a workpiece and a light receiving device is controlled to receive diffuse reflection light, so that the forming condition of the composite microstructure on the surface of the workpiece is detected;
The method for detecting the forming condition of the composite microstructure on the surface of the workpiece comprises the following steps:
1) Setting the target forming height of the composite microstructure and the hot-pressing process parameters, wherein the height h 1 of the microstructure of the composite microstructure is 1-1000 mu m, the height h 2 of the surface micro-lens structure is 1-200 mu m, the hot-pressing process parameters are that the hot-pressing pressure is 3-30 MPa, the dwell time is 0.1-20 s, the temperature of the microstructure mold core is 20-200 ℃, and the moving speed of a lower template is 0.1-10 mm/s;
2) The lower template is controlled to start to drive the workpiece to move away from the microstructure mold core at a constant speed along the negative Z-axis direction under the action of the hydraulic system, the light emitting device emits parallel light rays in the demolding process, and the incident angle of the light rays and the surface of the workpiece is theta, wherein theta is 10-80 degrees;
3) The light emitting device starts a single light emitter in the demolding process, and the forming condition of the composite microstructure on the surface of the workpiece is accurately detected point by utilizing the principle that an incident point of a light beam on the surface of the workpiece moves along the positive direction of the Y axis when the workpiece moves away from the mold core along the negative direction of the Z axis at a uniform speed;
4) When the workpiece retreats to a station and is static, the light emitting device starts all light emitters, and the emitted light irradiates the whole surface of the workpiece, so that the forming condition of the composite microstructure of the whole surface of the workpiece is rapidly detected;
5) The light receiving device receives light rays diffusely reflected by the surface of the workpiece, and finally carries out logic processing on the light information through the optical signal processing control module;
6) The optical signal processing control module calculates diffuse reflectance according to the ratio of the received diffuse reflection light flux to the emitted parallel light flux, compares the relationship between the diffuse reflectance in the experience database and the size of the composite microstructure, and judges the depth and quality of micro-molding of the micro-groove structure and the surface micro-lens structure of the composite microstructure;
7) The optical signal processing control module analyzes the forming reason of the composite microstructure, adjusts the levelness of workpiece fixation or the hot-pressing process parameters including hot-pressing pressure, dwell time, microstructure mold core temperature and lower mold plate movement speed according to the analysis result, transmits the parameters to the PLC of the hot-pressing system, and carries out the next hot-pressing processing according to the adjusted process parameters;
The establishment of the experience database comprises the steps of firstly, changing hot-pressing process parameters, then recording diffuse reflectance of the surface of a workpiece and heights of a micro-groove structure and a surface micro-lens structure of a composite micro-structure under different hot-pressing process parameters, then establishing a relation between the diffuse reflectance and the heights of the micro-groove structure and the surface micro-lens structure of the composite micro-structure, and finally associating the diffuse reflectance and the hot-pressing process parameters;
the empirical formula of the height of the micro groove-shaped structure of the composite microstructure and the height and the diffuse reflectance m of the surface small micro lens structure is as follows:
h1=a1 m+b1;
h2=a2 m2+b2m+c2;
Wherein h 1 and h 2 respectively represent the height of the micro groove structure and the height of the surface micro lens structure, the unit is μm, m represents the diffuse reflectance, a 1、a2、b1、b2、c2 is a constant, and a 1≤1,5≤b1≤500,0.001≤a2≤0.002,0.01≤b2≤0.2,5≤c2 is more than or equal to 0.01 and less than or equal to 20.
2. The method for controlling micro-molding of a composite micro-structure array according to claim 1, wherein the priority order of the process parameters is adjusted to be dwell time, mold core temperature, hot pressing pressure and lower die plate movement speed.
3. The device for controlling the micro-forming of the composite microstructure array through on-line detection is characterized by adopting the method for controlling the micro-forming of the composite microstructure array through on-line detection according to claim 1 to detect, wherein the device for controlling the micro-forming of the composite microstructure array through on-line detection comprises a hot pressing system and a diffuse reflection optical detection control system, wherein the hot pressing system comprises a heating device, an upper template, a mould core fixing device, a microstructure mould core, an elastic micropore net, a workpiece positioning device and a lower template which are sequentially arranged from top to bottom, the microstructure mould core is fixed below the upper template through the mould core fixing device, the upper template and the microstructure mould core are heated through the heating device, and the elastic micropore net is coated at the bottom of the microstructure mould core;
the diffuse reflection optical detection control system comprises a light emitting device, a light receiving device and a light signal processing control module, wherein the light emitting device and the light receiving device are respectively positioned at two sides of the hot pressing system, and the light receiving device is in signal connection with the light information processing control module.
4. The device for controlling micro-molding of the composite microstructure array by on-line detection as claimed in claim 3, wherein the incidence angle θ of the light beam emitted by the light emitting device and the surface of the workpiece is 10 ° to 80 °, and the relationship between the number n of light emitters in the light emitting device and the widths d and l of the single beam radiation workpiece is:
5. The device for controlling micro-molding of the composite microstructure array by on-line detection as claimed in claim 3, wherein the light receiving device is an illuminance sensor, and the illuminance sensor is arranged in a theoretical direction in which incident light is specularly reflected on the surface of the workpiece.
6. The device for controlling micro-molding of composite microstructure array according to claim 3, wherein the elastic micro-pore net is made of nylon wire or metal wire, or is formed by punching holes on the surface of the material by laser punching.
7. The apparatus for controlling micro-molding of a composite micro-structure array according to claim 3, wherein the micro-structure mold core is made of stainless steel material, ceramic material or silicon carbide material.
8. The device for controlling micro-molding of the composite microstructure array according to claim 3, wherein the aperture of the elastic micropore net is smaller than the surface microstructure size of the microstructure mold core, and the elastic micropore net coated at the bottom of the microstructure mold core is in a natural extension state.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911134057.XA CN110849845B (en) | 2019-11-19 | A device and method for online detection and control of composite microstructure array micro-molding |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911134057.XA CN110849845B (en) | 2019-11-19 | A device and method for online detection and control of composite microstructure array micro-molding |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110849845A CN110849845A (en) | 2020-02-28 |
CN110849845B true CN110849845B (en) | 2025-04-01 |
Family
ID=
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1314580A (en) * | 2000-03-17 | 2001-09-26 | 赫尔穆特费舍电子及测量技术有限及两合公司研究所 | Method for setting measured object position in measuring thin layer thickness by x-ray fluorescent light |
CN106950911A (en) * | 2017-04-06 | 2017-07-14 | 华南理工大学 | A kind of hot-forming real-time control apparatus of macroscopical photoinduction microarray and method |
CN107599458A (en) * | 2017-09-20 | 2018-01-19 | 华南理工大学 | A kind of compound micro- array of spherical lenses non-isothermal heat pressing forming device and method |
CN110146040A (en) * | 2019-06-14 | 2019-08-20 | 李筱穗 | A kind of non-contact type steel strip plate profile instrument |
CN211856356U (en) * | 2019-11-19 | 2020-11-03 | 佛山科学技术学院 | A device for online detection and control of composite microstructure array microforming |
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1314580A (en) * | 2000-03-17 | 2001-09-26 | 赫尔穆特费舍电子及测量技术有限及两合公司研究所 | Method for setting measured object position in measuring thin layer thickness by x-ray fluorescent light |
CN106950911A (en) * | 2017-04-06 | 2017-07-14 | 华南理工大学 | A kind of hot-forming real-time control apparatus of macroscopical photoinduction microarray and method |
CN107599458A (en) * | 2017-09-20 | 2018-01-19 | 华南理工大学 | A kind of compound micro- array of spherical lenses non-isothermal heat pressing forming device and method |
CN110146040A (en) * | 2019-06-14 | 2019-08-20 | 李筱穗 | A kind of non-contact type steel strip plate profile instrument |
CN211856356U (en) * | 2019-11-19 | 2020-11-03 | 佛山科学技术学院 | A device for online detection and control of composite microstructure array microforming |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN115302375B (en) | An efficient and high-precision composite processing equipment and method for diamond wafers | |
CN109387523A (en) | A kind of burr detection machine and its detection method | |
CN202591611U (en) | Movable preheating device for laser rapid prototyping | |
US20170210071A1 (en) | Three-dimensional printing device and three-dimensional printing method | |
CN102305988A (en) | Automatic focusing device for projective bulb based on light spot detection and use method thereof | |
CN110836641B (en) | Method and equipment for detecting three-dimensional size of special-shaped surface microstructure of part | |
CN210548098U (en) | Powder spreader mechanism and metal additive manufacturing device that can check quality online | |
CN110849845B (en) | A device and method for online detection and control of composite microstructure array micro-molding | |
CN1209619C (en) | Method for bonding and encapsulating plastic biochip and its device | |
CN211955242U (en) | Object defect observation device | |
CN107589513A (en) | Optics module assemble method and device | |
CN104849796A (en) | Micro-lens array light guide plate with adaptive spacing | |
CN201677132U (en) | Automatic focusing device of laser processor | |
CN116921855A (en) | Device and method for adaptively thinning and stripping semiconductor material by laser | |
CN211856356U (en) | A device for online detection and control of composite microstructure array microforming | |
CN101554778A (en) | Method and device for light curring high-rate forming of surface entity | |
CN107186349A (en) | Laser scribing device | |
CN203567383U (en) | Micro-contact printing device based on voice coil motors | |
CN207366467U (en) | A kind of surface defect real-time detection apparatus for increasing material manufacturing | |
CN110849845A (en) | Device and method for on-line detection and control of micro-forming of composite microstructure array | |
KR101554389B1 (en) | Laser processing apparatus | |
JP6694629B2 (en) | Real-time control apparatus and method for macro hot embossing of photosensitive microarray | |
CN106077218A (en) | A kind of devices and methods therefor of laser flexible loading and shaping high accuracy dish part | |
CN108680263B (en) | A non-contact glass temperature measurement system and method based on laser interference | |
CN109561248A (en) | A kind of infant industry camera vision laser lighting imaging device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Country or region after: China Address after: No.33, Guangyun Road, Nanhai District, Foshan City, Guangdong Province, 528200 Applicant after: Foshan University Address before: No.33, Guangyun Road, Nanhai District, Foshan City, Guangdong Province, 528200 Applicant before: FOSHAN University Country or region before: China |
|
GR01 | Patent grant |