CN110534879A - Graphene antenna and preparation method thereof - Google Patents

Abstract

The invention discloses a graphene antenna and a manufacturing method thereof. Specifically, the present invention proposes a method for making a graphene antenna, comprising: providing a substrate; mixing graphite oxide and water to form a graphite oxide dispersion; coating the graphite oxide dispersion on the substrate On one side of the substrate, a graphite oxide film is formed; the substrate formed with the graphite oxide film is fixed on a workbench; a laser light source is used to irradiate the graphite oxide film, and it is irradiated by the laser light source The graphite oxide film at the location is reduced to form graphene, and the laser light source is controlled to move or the worktable is controlled to move, so as to form the patterned graphene antenna. Therefore, the method is easy to operate, the pattern of the graphene antenna is easy to control, the reproducibility is good, the production cost is low, and it is convenient for large-scale production, and the graphene antenna produced has low resistivity, high fineness, and good performance.

Description

Graphene antenna and manufacturing method thereof

technical field

The invention relates to the field of material processing, in particular to a graphene antenna and a manufacturing method thereof.

Background technique

Graphene is a new type of two-dimensional inorganic nanomaterials. Since its discovery, graphene materials have attracted much attention. The stable regular hexagonal lattice structure of graphene makes it have excellent electrical conductivity, and has extremely high carrier concentration, controllable energy band gap and perfect charge interaction. Therefore, graphene material is considered to be the next Key materials for a generation of microelectronic devices. For example, due to its extremely high carrier concentration, graphene may surpass or even replace metal materials such as copper in the high-frequency field, and become the material of choice for the preparation of high-frequency devices. The antenna made of graphene, due to the honeycomb structure of graphene, has a wide range of electronic surface waves generated on the surface of the graphene antenna, which can improve the communication distance, and the graphene antenna also has the advantages of low cost and environmental friendliness.

However, the current graphene antennas and their preparation methods still need to be improved.

Contents of the invention

This application is based on the inventor's discovery and recognition of the following facts and problems:

The inventors found that the current methods for preparing graphene antennas have problems such as high production costs, difficult control of pattern accuracy, poor reproducibility, and poor performance. In the current method for preparing graphene, such as preparing graphene by vapor phase deposition, large-area growth of graphene can be realized, and the prepared graphene is relatively easy to transfer to various substrates for use, but the thickness of graphene prepared by this method Inhomogeneity and high resistance cannot meet the needs of graphene antennas, and various graphene antennas with fine patterns cannot be produced according to needs. Some methods use laser direct writing to prepare graphene. This method is relatively simple to operate, but it still cannot meet the requirements of high fineness and high resolution of graphene antennas, and cannot customize graphene antennas with fine patterns according to requirements. The reproducibility (that is, repeatability) of graphene antenna is poor, which is not conducive to large-scale batch production. Therefore, if a new method for making a graphene antenna can be proposed, the method is easy to operate, the pattern of the graphene antenna is easy to design and control, the reproducibility is good, the production cost is low, and the fineness of the graphene antenna made High, good performance, will be able to solve the above problems to a large extent.

In one aspect of the invention, the invention proposes a method of making a graphene antenna. According to an embodiment of the present invention, the method includes: providing a substrate; mixing graphite oxide and water to form a graphite oxide dispersion; coating the graphite oxide dispersion on the substrate, A graphite oxide film is formed on one side of the graphite oxide film; the substrate formed with the graphite oxide film is fixed on a workbench; a laser light source is used to irradiate the graphite oxide film, and the graphite oxide film at the place irradiated by the laser light source is is reduced to form graphene, and the laser light source is controlled to move or the worktable is controlled so as to form the patterned graphene antenna. Therefore, the method is easy to operate, the pattern of the graphene antenna is easy to control, the reproducibility is good, the production cost is low, and it is convenient for large-scale production, and the graphene antenna produced has low resistivity, high fineness, and good performance.

According to an embodiment of the present invention, the substrate includes a rigid substrate or a flexible substrate. Therefore, the type of the substrate in the method is not particularly limited, the method has a wide range of applications, and the prepared graphene antenna has good performance.

According to an embodiment of the present invention, the material forming the substrate includes at least one of silicon, silicon dioxide, gadolinium gallium garnet, sapphire, magnesium oxide, polyimide, and polyethylene terephthalate. Thus, the performance of the prepared graphene antenna is further improved.

According to an embodiment of the present invention, the concentration of the graphite oxide dispersion liquid is 1wt%-2wt%. Thus, when the concentration of the graphite oxide dispersion is in the above-mentioned range, when it is coated on the substrate, what is coated is relatively uniform, and the thickness of the graphite oxide film formed is moderate, which further improves the prepared graphene antenna. Use performance.

According to an embodiment of the present invention, the thickness of the graphite oxide film is 20 nm˜2 μm. Therefore, when the thickness of the graphite oxide film is in the above range, it is convenient to use a laser light source to etch it to form a graphene antenna, which further improves the performance of the prepared graphene antenna.

According to an embodiment of the present invention, the line width of the formed graphene antenna is 30-60 μm. Therefore, the graphene antenna prepared by the method has high fineness, wide application range and good performance.

According to an embodiment of the present invention, before fixing the substrate on which the graphite oxide thin film is formed on the workbench, the method further includes: performing a hydrophilic treatment on the substrate with oxygen plasma. Thus, the binding force between the graphite oxide dispersion and the substrate can be further improved, which facilitates precise laser etching of the graphite oxide film in subsequent steps, and further improves the performance of the prepared graphene antenna.

According to an embodiment of the present invention, the method further includes: using a control system to control the power of the laser light source and the size of the spot, and control the moving direction and moving distance of the laser light source or the workbench, so as to form the Graphene antenna. Therefore, the control system can better control the pattern of the finally formed graphene antenna, and is easy to operate, which is convenient for making graphene antennas with various fine patterns and for large-scale production.

According to an embodiment of the present invention, the method further includes: the control system adjusts the laser light source and the workbench according to a preset standard antenna pattern, so that the formed graphene antenna and standard antenna The pattern is the same. Therefore, the graphite oxide film can be precisely laser-etched according to the preset standard antenna pattern, so that a graphene antenna with high precision can be prepared, and the prepared graphene antenna has rich patterns and good reproducibility. The cost is low, and it is convenient for mass production and manufacture.

According to an embodiment of the present invention, the reflection coefficient of the formed graphene antenna in the preset frequency band of the standard antenna pattern is not greater than -10dB, and the conductivity of the graphene antenna is 2×10 ⁴ ~6 ×10 ⁴ S/m. . Therefore, the parameters of the graphene antenna prepared by this method are relatively consistent with the preset standard antenna pattern, and the prepared graphene antenna has high precision and good reproducibility, and the graphene antenna has low conductivity and excellent performance. good.

In another aspect of the present invention, the present invention provides a graphene antenna. According to an embodiment of the present invention, the graphene antenna is prepared by the method described in any one of claims 1-9. Therefore, the graphene antenna has all the features and advantages of the graphene antenna prepared by the aforementioned method, which will not be repeated here. In general, the graphene antenna has fine and rich patterns, low resistivity, and good performance.

Description of drawings

Fig. 1 has shown the flow chart of the method for preparing graphene antenna in one embodiment of the present invention; And

Fig. 2 has shown the performance test diagram of the prepared graphene antenna according to one embodiment of the present invention.

Detailed ways

Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

In one aspect of the invention, the invention proposes a method of making a graphene antenna. In this method, a graphite oxide dispersion liquid is first coated on the substrate, and then a graphite oxide film is formed on the substrate, and then part of the graphite oxide on the graphite oxide film is reduced to graphene by laser irradiation, and the part that is reduced to graphene can be It is conductive and constitutes the graphene antenna, while the unreduced graphite oxide is still in an insulating state. Thereby, the graphene antenna can be easily obtained, the production cost is low, and it is convenient for large-scale production; and the method is easy to operate, by controlling the movement of the laser light source or the workbench, the position of the graphite oxide film etched by the laser can be easily controlled, and then the The position of the graphene antenna formed on the graphite oxide film is easily controlled, the pattern of the graphene antenna is easy to control, and the manufactured graphene antenna has high fineness, low resistivity, and good performance.

According to an embodiment of the present invention, with reference to Fig. 1, the method includes:

S100: Provide substrate

In this step, a substrate is provided. According to the embodiment of the present invention, the specific type of the substrate is not particularly limited, and the substrate may be a hard substrate or a flexible substrate. Specifically, the material forming the substrate may include silicon (Si), silicon dioxide (SiO ₂ ), gadolinium gallium garnet (GGG), sapphire (Al ₂ O ₃ ), magnesium oxide (MgO), polyimide ( PI), at least one of polyethylene terephthalate (PET). Specifically, the substrate may also be a composite substrate of multiple materials, for example, the substrate may be a Si/SiO ₂ substrate, a GGG/YIG substrate, or the like. Therefore, the types of substrates in the method are abundant, the method has a wide range of applications, and the prepared graphene antenna has good performance.

According to the embodiment of the present invention, the substrate can be washed and treated, for example, the Si/ _SiO2 substrate can be placed in an acetone solution for 3-5 minutes and then ultrasonicated for 3-5 minutes in absolute ethanol, and used The ionized water is rinsed clean, thus, the cleanliness of the substrate surface can be ensured, which is beneficial to the adhesion of the graphite oxide dispersion in the subsequent steps.

According to an embodiment of the present invention, in order to further improve the performance of the prepared graphene antenna, the method may further include:

The substrate is subjected to a hydrophilic treatment using oxygen plasma. According to the embodiments of the present invention, the substrate can be subjected to oxygen plasma (oxygen plasma) treatment, thus, the hydrophilicity of the substrate surface can be improved, which is beneficial to the adhesion of the graphite oxide dispersion in the subsequent steps, and can further improve The binding force between the graphite oxide dispersion and the substrate, after the graphite oxide film is formed on one side of the substrate, it is convenient for the graphite oxide film to be accurately laser etched in the subsequent steps (in the laser etching process, the graphite oxide film and the substrate The combination between the bottom and the bottom is firm, and there will be no dislocation, etc., which will affect the etching precision), which further improves the performance of the prepared graphene antenna.

S200: Form graphite oxide dispersion

In this step, graphite oxide and water are mixed to form a graphite oxide dispersion. According to an embodiment of the present invention, after graphite oxide and water are mixed, it can be subjected to ultrasonic treatment so that graphite oxide can be fully dispersed in water, for example, an ultrasonic machine with a power of 200W can be used for 15 minutes, and its After being coated on the surface of the substrate, a graphite oxide film with a relatively uniform thickness can be formed on the surface of the substrate, which improves the thickness uniformity of the prepared graphene antenna and further improves the performance of the prepared graphene antenna. Specifically, the concentration of the graphite oxide dispersion is 1 wt % to 2 wt %, for example, 1.5 wt % or the like. Thus, when the mass concentration of the graphite oxide dispersion is in the above range, when it is coated on the substrate, the coating is relatively uniform, and the thickness of the formed graphite oxide film is moderate, which further improves the prepared graphene antenna. performance. When the concentration of graphite oxide dispersion liquid is too small (such as being less than 1wt%), the graphene thin film square resistance that obtains is too large, and the usability of prepared graphene antenna is not good; When the concentration of graphite oxide dispersion liquid is too large (such as greater than 2wt%), the required laser power is too large when the graphene film is etched.

S300: coating the graphite oxide dispersion on the substrate to form a graphite oxide film

In this step, the graphite oxide dispersion liquid prepared in the previous step is coated on the substrate to form a graphite oxide film on one side of the substrate. Specifically, the graphite oxide dispersion can be coated on the substrate by spin coating or spray coating. The method of spray coating and spin coating can form a thin film with good uniformity on the substrate of any shape, and the operation is simple, the efficiency is high, the cost is low, and it is convenient for mass production. Specifically, the thickness of the formed graphite oxide film can be 20nm-2μm, for example, it can be 40nm, it can be 80nm, it can be 100nm, it can be 200nm, it can be 500nm, it can be 800nm, it can be 1μm, it can be 1.2μm , can be 1.5 μm, can be 1.8 μm, etc. Therefore, when the thickness of the graphite oxide film is in the above range, it is convenient to use a laser light source to irradiate and etch it to form a graphene antenna, and the thickness of the formed graphene antenna is relatively moderate, which further improves the performance of the prepared graphene antenna. When the thickness of the graphite oxide film is too large, the required laser power is too large; when the thickness of the graphite oxide film is too small, the square resistance of the obtained graphene film is too large.

S400: fixing the substrate on which the graphite oxide film is formed on the workbench

In this step, the substrate on which the graphite oxide thin film was formed in the previous step is fixed on the workbench. Specifically, the workbench can be fixed, or can move in three-dimensional directions, that is, the workbench can move up and down, forward and backward, and left and right. Therefore, when the workbench can be moved, the graphite oxide film can be easily driven to move by controlling the movement of the workbench in the subsequent steps, and then the position of the graphite oxide film etched by laser can be easily controlled, and then the position of the graphite oxide film can be easily controlled. The location of the graphene antenna formed on the graphite oxide film.

S500: Use a laser light source to irradiate graphite oxide film, control the movement of the laser light source or control the movement of the workbench, so as to form a graphene antenna

In this step, laser light is used to irradiate the graphite oxide film fixed on the workbench in the previous step, while controlling the movement of the laser light source or the movement of the workbench, so as to form the graphene antenna. Specifically, the laser light source can be connected with a stepping motor, thus, the stepping motor can easily control the precise movement of the laser light source in the three-dimensional direction, and can easily control the position of the graphite oxide film etched by the laser, and then can easily The position of the graphene antenna formed on the graphite oxide film can be accurately controlled, and the pattern of the graphene antenna is easy to control and has high precision. Similarly, the laser light source can also be fixed to control the three-dimensional movement of the workbench.

According to an embodiment of the present invention, this step may further include: using a control system to control the power of the laser light source and the size of the spot, and control the moving direction and moving distance of the laser light source or the worktable, so as to form a graphene antenna. That is to say, in this step, the power of the laser light source and the size of the spot, the moving direction and moving distance of the laser light source and the worktable can be intelligently adjusted through the control system. The power of the laser light source will affect the etching depth, etching time, etc. The size of the laser light spot will affect the fineness of etching, that is, the width and resolution of the graphene antenna, etc.; the moving direction and movement of the laser light source and the worktable The distance will affect the position of the laser light source for etching, and affect the pattern of the graphene antenna that is finally formed. Therefore, through the control system, the pattern of the finally formed graphene antenna can be well controlled, and the operation is simple, it is convenient to manufacture graphene antennas with various fine patterns, and the reproducibility is high, which is convenient for mass production.

Specifically, the control system can adjust the laser light source and the worktable according to the preset standard antenna pattern, so that the formed graphene antenna is the same as the standard antenna pattern. For example, the structural data (i.e. the standard antenna pattern) of the required graphene antenna can be designed by programming, etc., for example, the target frequency band, reflection coefficient, etc. of the standard antenna pattern can be designed as required, and then the structural data is converted into a control system ( For example, the control data of a computer), the control system (such as a computer) can control parameters such as the power of the laser light source and the spot size according to the control data, and control the moving direction and moving distance of the laser light source or the workbench, etc. (such as the control system through stepping The stepping accuracy of the motor controls the moving direction and moving distance of the laser light source or the worktable, etc.) in order to transfer the preset standard antenna pattern to the graphite oxide film, that is, the formed graphene antenna is the same as the standard antenna pattern. Thus, the graphite oxide film can be precisely laser-etched according to the preset standard antenna pattern, so that a graphene antenna with high precision can be prepared, and the prepared graphene antenna has rich patterns, and any shape can be prepared. Antenna patterns designed in advance, such as planar or even 3D structures, have simple processes, good reproducibility, low cost, and are convenient for mass production.

According to a specific embodiment of the present invention, the standard antenna pattern can be simulated and calculated by HFSS software, for example, the power of the laser light source can be defined on the computer operating software according to the parameters such as the impedance, reflection coefficient and shape of the graphene antenna required , step length and spot size, etc. Then the control system can use the laser light source to precisely etch the graphite oxide film, and finally get the required graphene antenna.

According to an embodiment of the present invention, the graphene antenna formed in the method may have a line width of 30-60 μm. For example, it may be 40 μm, may be 50 μm, may be 55 μm, or the like. Therefore, the graphene antenna prepared by the method has high fineness, wide application range and good performance.

According to an embodiment of the present invention, the reflection coefficient of the graphene antenna formed in the frequency band of the preset standard antenna pattern is not greater than -10dB, thus, the graphene antenna prepared by the method and the preset standard antenna pattern The parameters are relatively consistent, and the prepared graphene antenna has high precision and good reproducibility. Specifically, the conductivity of the formed graphene antenna may be 2×10 ⁴ -6×10 ⁴ S/m, for example, 4×10 ⁴ S/m or the like. Therefore, the resistivity of the graphene antenna prepared by the method is low, and the performance is good.

In another aspect of the present invention, the present invention provides a graphene antenna. According to an embodiment of the present invention, the graphene antenna is prepared by the method described above. Therefore, the graphene antenna has all the features and advantages of the graphene antenna prepared by the aforementioned method, which will not be repeated here. In general, the graphene antenna has fine and rich patterns, low resistivity, and good performance.

The solutions of the present invention will be explained below in conjunction with examples. Those skilled in the art will understand that the following examples are only for illustrating the present invention and should not be considered as limiting the scope of the present invention. If no specific technique or condition is indicated in the examples, it shall be carried out according to the technique or condition described in the literature in this field or according to the product specification. The reagents or instruments used were not indicated by the manufacturer, and they were all conventional products that could be purchased from the market.

Example 1

(1) According to the HFSS software simulation calculation, the antenna design is obtained, that is, the standard antenna pattern is obtained;

(2) Select Si/SiO ₂ as the substrate, put the Si/SiO ₂ substrate into acetone solution for 3 to 5 minutes, and anhydrous ethanol for 3 to 5 minutes, repeat twice before and after, and then rinse with deionized water. After drying, dry it for later use; use oxygen plasma to treat the substrate with hydrophilicity, so that the graphite oxide solution is easy to attach;

(3) Get a certain mass of graphite oxide and disperse it in water, then use ultrasonic power of 200W for 15 minutes to obtain a stable suspension of graphite oxide dispersion, the concentration of graphite oxide dispersion is 1.5wt%;

(4) Subsequently, in combination with spin coating method or spray coating method, graphite oxide dispersion liquid is used to prepare a certain thickness of graphite oxide film on the substrate, the thickness is generally 20nm～2um;

(5) The substrate containing the graphite oxide film is fixed on the workbench of the laser direct writing system;

(6) Set the parameters of the laser direct writing equipment through computer software, and define the power of the direct writing laser as 200mW, the step length as 10μm, and the spot size as 10μm on the operating software on the computer. Moving, the pre-designed standard antenna pattern is transferred onto the graphite oxide substrate by laser to obtain the graphene antenna.

Performance Testing

Utilize network analyzer to test the impedance and reflection coefficient of the graphene antenna prepared in embodiment 1.

On the quartz substrate, after the graphene antenna prepared in Example 1 was bound to the SMA head, it was tested using a network analyzer, and the test results refer to FIG. 2 . As can be seen from Figure 2, the reflection coefficient of the graphene antenna obtained in embodiment 1 in the frequency band of the preset standard antenna pattern is all lower than -10dB, the graphene antenna prepared by this method and the preset standard antenna pattern The parameters are relatively consistent, and the prepared graphene antenna has high precision and good reproducibility.

It is also measured that the electrical conductivity of the graphene antenna prepared in Example 1 is 40000 S/m, which proves that the electrical conductivity of the graphene antenna prepared by this method is relatively low and has good performance.

In the description of this specification, descriptions with reference to the terms "one embodiment", "some embodiments" and the like mean that a specific feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment of the present invention or example. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

Claims (10)

1. a kind of method for making graphene antenna characterized by comprising

Substrate is provided；

Graphite oxide and water are mixed, to form graphite oxide dispersion；

Over the substrate by graphite oxide dispersion coating, graphite oxide film is formed in the side of the substrate；

The substrate for being formed with the graphite oxide film is fixed on the table；

The graphite oxide film is irradiated using laser light source, by the graphite oxide film quilt at the laser light source irradiation Reduction forms graphene, controls the laser light source movement or the control movable workbench, patterned described to be formed Graphene antenna.

2. the method according to claim 1, wherein the substrate includes hard substrates or flexible substrate；

Optionally, the material for forming the substrate includes silicon, silica, Gd-Ga garnet, sapphire, magnesia, polyamides Asia At least one of amine, polyethylene terephthalate.

3. the method according to claim 1, wherein the concentration of the graphite oxide dispersion be 1wt%~ 2wt%.

4. the method according to claim 1, wherein the graphite oxide film with a thickness of 20nm~2 μm.

5. the method according to claim 1, wherein the line width of the graphene antenna formed is 30~60 μ m。

6. the method according to claim 1, wherein the lining that the graphite oxide film will be formed with Before bottom is fixed on the table, the method further includes:

Hydrophilic treated is carried out to the substrate using oxygen plasma.

7. the method according to claim 1, wherein the method further includes:

The power of the laser light source and the size of hot spot are controlled using control system, and control the laser light source or described The moving direction and moving distance of workbench, to form the graphene antenna.

8. the method according to the description of claim 7 is characterized in that the method further includes:

The control system adjusts the laser light source and the workbench according to preset standard antenna pattern Section, enables the graphene antenna of formation identical with standard antenna pattern.

9. according to the method described in claim 8, it is characterized in that, the graphene antenna formed is preset described Reflection coefficient in the frequency range of standard antenna pattern is not more than -10dB, and the conductivity of the graphene antenna is 2 × 10⁴~6 × 10⁴S/m。

10. a kind of graphene antenna, which is characterized in that the graphene antenna is by side according to any one of claims 1 to 9 Method preparation.