CN110534879B - Graphene antenna and manufacturing method thereof - Google Patents
Graphene antenna and manufacturing method thereof Download PDFInfo
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- H01Q1/364—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor
- H01Q1/368—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor using carbon or carbon composite
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Abstract
本发明公开了石墨烯天线及其制作方法。具体地，本发明提出了一种制作石墨烯天线的方法，包括：提供衬底；将氧化石墨和水混合，以便形成氧化石墨分散液；将所述氧化石墨分散液涂布在所述衬底上，在所述衬底的一侧形成氧化石墨薄膜；将形成有所述氧化石墨薄膜的所述衬底固定在工作台上；利用激光光源照射所述氧化石墨薄膜，被所述激光光源照射处的所述氧化石墨薄膜被还原形成石墨烯，控制所述激光光源移动或控制所述工作台移动，以便形成图案化的所述石墨烯天线。由此，该方法操作简便，石墨烯天线的图案容易控制，可复制性好，生产成本低，便于大规模生产，且制作的石墨烯天线电阻率低、精细度高，使用性能良好。
The invention discloses a graphene antenna and a manufacturing method thereof. Specifically, the present invention provides a method for fabricating a graphene antenna, including: providing a substrate; mixing graphite oxide and water to form a graphite oxide dispersion; coating the graphite oxide dispersion on the substrate forming a graphite oxide film on one side of the substrate; fixing the substrate formed with the graphite oxide film on a workbench; irradiating the graphite oxide film with a laser light source, and being irradiated by the laser light source The graphite oxide film at the place is reduced to form graphene, and the laser light source is controlled to move or the worktable is controlled to move, so as to form the patterned graphene antenna. Therefore, the method is easy to operate, the pattern of the graphene antenna is easy to control, the reproducibility is good, the production cost is low, the mass production is convenient, and the produced graphene antenna has low resistivity, high fineness, and good performance.
Description
Technical Field
The invention relates to the field of material processing, in particular to a graphene antenna and a manufacturing method thereof.
Background
Graphene (graphene) is a novel two-dimensional inorganic nanomaterial, and since its discovery, graphene materials have attracted much attention. The stable regular hexagonal lattice structure of graphene enables the graphene to have excellent conductivity, extremely high carrier concentration, controllable energy band gap and perfect charge interaction, so that the graphene material is considered as a key material of a next-generation microelectronic device. For example, graphene has an extremely high carrier concentration, and may exceed or even replace metal materials such as copper in the high-frequency field, and thus, graphene becomes a preferred material for preparing high-frequency devices. The antenna manufactured by utilizing the graphene has the advantages that due to the honeycomb structure of the graphene, the range of electronic surface waves generated on the surface of the graphene antenna is wide, the communication distance can be increased, and the graphene antenna also has the advantages of low cost, environmental friendliness and the like.
However, the graphene antenna and the preparation method thereof still need to be improved.
Disclosure of Invention
The present application is based on the discovery and recognition by the inventors of the following facts and problems:
the inventor finds that the existing method for preparing the graphene antenna has the problems of high production cost, difficulty in controlling pattern precision, poor reproducibility, poor service performance and the like. In the existing method for preparing graphene, for example, a vapor deposition method is adopted to prepare graphene, so that large-area growth of graphene can be realized, and the prepared graphene is relatively easy to transfer to various substrates for use, but the graphene prepared by the method has uneven thickness and relatively high resistance, cannot meet the requirements of graphene antennas, and cannot be used for manufacturing various graphene antennas with fine patterns according to the requirements. Some methods adopt a laser direct writing mode to prepare graphene, the method is simple to operate, the requirements of high fineness, high resolution and the like of the graphene antenna cannot be met, the graphene antenna with fine patterns cannot be customized according to requirements, and the reproducibility (namely repeatability) of the prepared graphene antenna is poor, so that the method is not beneficial to large-scale mass production and manufacturing. Therefore, if a new method for manufacturing a graphene antenna can be provided, the method is simple and convenient to operate, patterns of the graphene antenna are easy to design and control, reproducibility is good, production cost is low, the manufactured graphene antenna is high in fineness and good in service performance, and the problems can be solved to a great extent.
In one aspect of the present invention, a method of fabricating a graphene antenna is provided. According to an embodiment of the invention, the method comprises: providing a substrate; mixing graphite oxide and water to form a graphite oxide dispersion; coating the graphite oxide dispersion liquid on the substrate to form a graphite oxide film on one side of the substrate; fixing the substrate on which the graphite oxide film is formed on a workbench; and irradiating the graphite oxide film by using a laser light source, reducing the graphite oxide film irradiated by the laser light source to form graphene, and controlling the laser light source to move or control the workbench so as to form the patterned graphene antenna. Therefore, the method is simple and convenient to operate, patterns of the graphene antenna are easy to control, reproducibility is good, production cost is low, large-scale production is facilitated, and the manufactured graphene antenna is low in resistivity, high in fineness and good in service performance.
According to an embodiment of the invention, the substrate comprises a rigid substrate or a flexible substrate. Therefore, the type of the substrate in the method is not particularly limited, the method is wide in application range, and the prepared graphene antenna is good in service performance.
According to an embodiment of the invention, the material forming the substrate comprises at least one of silicon, silicon dioxide, gadolinium gallium garnet, sapphire, magnesium oxide, polyimide, polyethylene terephthalate. Therefore, the service performance of the prepared graphene antenna is further improved.
According to an embodiment of the present invention, the concentration of the graphite oxide dispersion is 1wt% to 2 wt%. Therefore, when the concentration of the graphite oxide dispersion liquid is within the range, the graphite oxide dispersion liquid is uniformly coated on the substrate, the thickness of the formed graphite oxide film is moderate, and the service performance of the prepared graphene antenna is further improved.
According to the embodiment of the invention, the thickness of the graphite oxide thin film is 20 nm-2 μm. Therefore, when the thickness of the graphite oxide film is within the range, the graphite oxide film is conveniently etched by using a laser light source to form the graphene antenna, and the service performance of the prepared graphene antenna is further improved.
According to the embodiment of the invention, the line width of the formed graphene antenna is 30-60 mu m. Therefore, the graphene antenna prepared by the method is high in fineness, wide in application range and good in service performance.
According to an embodiment of the present invention, before the fixing the substrate on which the graphite oxide thin film is formed on a stage, the method further includes: and carrying out hydrophilic treatment on the substrate by using oxygen plasma. Therefore, the bonding force between the graphite oxide dispersion liquid and the substrate can be further improved, the graphite oxide film can be conveniently and accurately subjected to laser etching in the subsequent steps, and the service performance of the prepared graphene antenna is further improved.
According to an embodiment of the invention, the method further comprises: and controlling the power of the laser light source and the size of a light spot by using a control system, and controlling the moving direction and the moving distance of the laser light source or the workbench so as to form the graphene antenna. Therefore, the control system can better control the pattern of the finally formed graphene antenna, is simple and convenient to operate, is convenient for manufacturing the graphene antenna with various fine patterns, and is convenient for large-scale production.
According to an embodiment of the invention, the method further comprises: and the control system adjusts the laser light source and the workbench according to a preset standard antenna pattern, so that the formed graphene antenna is the same as the standard antenna pattern. Therefore, the graphite oxide film can be accurately subjected to laser etching according to a preset standard antenna pattern, so that the graphene antenna with high accuracy can be prepared, and the prepared graphene antenna is rich in patterns, good in reproducibility, low in production cost and convenient for large-scale production and manufacturing.
According to the embodiment of the invention, the reflection coefficient of the formed graphene antenna in a preset frequency band of the standard antenna pattern is not more than-10 dB, and the conductivity of the graphene antenna is 2 multiplied by 104～6×104And (5) S/m. . Therefore, the parameters of the graphene antenna prepared by the method are consistent with those of the preset standard antenna pattern, the prepared graphene antenna is high in accuracy and good in reproducibility, and the graphene antenna is low in conductivity and good in use performance.
In another aspect of the present invention, a graphene antenna is provided. According to an embodiment of the present invention, the graphene antenna is prepared by the method of any one of claims 1 to 9. Therefore, the graphene antenna has all the characteristics and advantages of the graphene antenna prepared by the method, and details are not repeated herein. Generally speaking, the graphene antenna has fine and rich patterns, low resistivity and good service performance.
Drawings
Fig. 1 shows a flow chart of a method for manufacturing a graphene antenna according to an embodiment of the present invention; and
fig. 2 shows a performance test chart of a prepared graphene antenna according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In one aspect of the present invention, a method of fabricating a graphene antenna is provided. According to the method, firstly, graphite oxide dispersion liquid is coated on a substrate, then a graphite oxide film is formed on the substrate, then, part of graphite oxide on the graphite oxide film is reduced into graphene through laser irradiation, the part reduced into the graphene can be conductive, a graphene antenna is formed, and the unreduced graphite oxide is still in an insulating state. Therefore, the graphene antenna can be obtained simply and conveniently, the production cost is low, and large-scale production is facilitated; the method is simple and convenient to operate, the position of the graphite oxide film etched by the laser can be simply and conveniently controlled by controlling the movement of the laser light source or the workbench, the position of the graphene antenna formed on the graphite oxide film can be further simply and conveniently controlled, the pattern of the graphene antenna is easy to control, and the manufactured graphene antenna is high in fineness, low in resistivity and good in service performance.
According to an embodiment of the invention, with reference to fig. 1, the method comprises:
s100: providing a substrate
In this step, a substrate is provided. According to an embodiment of the present invention, a specific type of the substrate is not particularly limited, and the substrate may be a hard substrate or a flexible substrate. Specifically, the material forming the substrate may include silicon (Si), silicon dioxide (SiO)2) Gadolinium Gallium Garnet (GGG), sapphire (Al)2O3) At least one of magnesium oxide (MgO), Polyimide (PI), and polyethylene terephthalate (PET). Specifically, the substrate may be a composite substrate of a plurality of materials, for example, the substrate may be Si/SiO2The substrate may be a GGG/YIG substrate or the like. Therefore, the substrate in the method is rich in variety, the method is wide in application range, and the prepared graphene antenna is good in service performance.
According to embodiments of the present invention, the substrate may be subjected to a process such as washing, for example, Si/SiO2The substrate is placed into an acetone solution for ultrasonic treatment for 3-5 minutes, then is subjected to ultrasonic treatment for 3-5 minutes in absolute ethyl alcohol, and is washed clean by deionized water, so that the cleanness of the surface of the substrate can be ensured, and the adhesion of graphite oxide dispersion liquid in the following steps is facilitated.
According to an embodiment of the present invention, in order to further improve the service performance of the prepared graphene antenna, the method may further include:
the substrate is subjected to hydrophilic treatment using oxygen plasma. According to the embodiment of the invention, the substrate can be subjected to oxygen plasma (oxyplasma) treatment, so that the hydrophilicity of the surface of the substrate can be improved, the adhesion of graphite oxide dispersion liquid in the subsequent step is facilitated, the binding force between the graphite oxide dispersion liquid and the substrate can be further improved, and after the graphite oxide film is formed on one side of the substrate, the graphite oxide film can be conveniently subjected to accurate laser etching in the subsequent step (in the laser etching process, the graphite oxide film and the substrate are firmly bound, the dislocation and the like can not occur, the etching accuracy is not influenced), and the service performance of the prepared graphene antenna is further improved.
S200: forming a graphite oxide dispersion
In this step, graphite oxide and water are mixed to form a graphite oxide dispersion. According to the embodiment of the invention, after the graphite oxide and the water are mixed, the graphite oxide can be subjected to ultrasonic treatment, so that the graphite oxide is sufficiently and uniformly dispersed in the water, for example, an ultrasonic machine with the power of 200W can be used for carrying out ultrasonic treatment for 15 minutes, and after the graphite oxide is coated on the surface of the substrate in the subsequent steps, a graphite oxide film with uniform thickness can be formed on the surface of the substrate, so that the thickness uniformity of the prepared graphene antenna is improved, and the service performance of the prepared graphene antenna is further improved. Specifically, the concentration of the graphite oxide dispersion may be 1wt% to 2wt%, for example, 1.5 wt%. Therefore, when the mass concentration of the graphite oxide dispersion liquid is within the range, the graphite oxide dispersion liquid is uniformly coated on the substrate, the thickness of the formed graphite oxide film is moderate, and the service performance of the prepared graphene antenna is further improved. When the concentration of the graphite oxide dispersion liquid is too low (for example, less than 1 wt%), the sheet resistance of the obtained graphene film is too high, and the service performance of the prepared graphene antenna is poor; when the concentration of the graphite oxide dispersion is too high (for example, more than 2 wt%), the laser power required for etching the graphene film is too high.
S300: coating the graphite oxide dispersion liquid on a substrate to form a graphite oxide film
In this step, the graphite oxide dispersion prepared in the previous step is coated on a substrate, and a graphite oxide thin film is formed on one side of the substrate. Specifically, the graphite oxide dispersion may be applied to the substrate by spin coating or spray coating. The spraying and spin coating method can form a film with good uniformity on a substrate with any shape, and has the advantages of simple operation, high efficiency, low cost and convenient mass production. Specifically, the thickness of the formed graphite oxide thin film may be 20nm to 2 μm, for example, 40nm, 80nm, 100nm, 200nm, 500nm, 800nm, 1 μm, 1.2 μm, 1.5 μm, 1.8 μm, or the like. Therefore, when the thickness of the graphite oxide film is within the range, the graphene antenna can be conveniently formed by irradiating and etching the graphite oxide film by using a laser light source, the thickness of the formed graphene antenna is moderate, and the service performance of the prepared graphene antenna is further improved. When the thickness of the graphite oxide film is too large, the required laser power is too large; when the thickness of the graphite oxide film is too small, the sheet resistance of the obtained graphene film is too large.
S400: fixing the substrate on which the thin film of the graphite oxide is formed on a table
In this step, the substrate on which the graphite oxide thin film was formed in the previous step was fixed on a stage. Specifically, the worktable may be fixed or may move in a three-dimensional direction, that is, the worktable may move up and down, back and forth, and left and right. Therefore, when the workbench can move, the graphite oxide film can be simply and conveniently driven to move by controlling the movement of the workbench in the subsequent step, the position of the laser-etched graphite oxide film can be simply and conveniently controlled, and the position of the graphene antenna formed on the graphite oxide film can be simply and conveniently controlled.
S500: irradiating the graphite oxide film by using a laser light source, and controlling the laser light source to move or the workbench to move so as to form the graphene antenna
In this step, the graphite oxide film fixed on the stage in the previous step is irradiated with laser while controlling the movement of the laser light source or the movement of the stage, so as to form the graphene antenna. Specifically, the laser light source can be connected with the stepping motor, so that the laser light source can be simply and conveniently controlled to accurately move in the three-dimensional direction through the stepping motor, the position of the laser-etched graphite oxide film can be simply and conveniently controlled, the position of the graphene antenna formed on the graphite oxide film can be simply and conveniently controlled, the pattern of the graphene antenna is easy to control, and the fineness is high. Similarly, the laser light source may be fixed, and the stage may be controlled to move in the three-dimensional direction.
According to an embodiment of the present invention, the step may further comprise: and controlling the power of the laser light source and the size of a light spot by using a control system, and controlling the moving direction and the moving distance of the laser light source or the workbench so as to form the graphene antenna. That is, in this step, the power of the laser source and the size of the light spot, and the moving direction and the moving distance of the laser source and the worktable can be intelligently adjusted by the control system. The size of the laser source power can affect the etching depth, the etching time and the like, and the size of the laser source light spot can affect the etching fineness, namely the width, the resolution and the like of the graphene antenna; the moving direction and the moving distance of the laser light source and the workbench influence the etching position of the laser light source, and influence patterns of the finally formed graphene antenna and the like. Therefore, the control system can better control the pattern of the finally formed graphene antenna, is simple and convenient to operate, is convenient to manufacture the graphene antenna with various fine patterns, has high reproducibility and is convenient for large-scale production.
Specifically, the control system may adjust the laser light source and the workbench according to a preset standard antenna pattern, so that the formed graphene antenna is identical to the standard antenna pattern. For example, the structure data (i.e., the standard antenna pattern) of the desired graphene antenna may be designed by programming or the like, for example, the target frequency band, the reflection coefficient, and the like of the standard antenna pattern may be designed as required, and then the structure data is converted into the control data of the control system (e.g., a computer), and the control system (e.g., the computer) may control the parameters such as the power and the spot size of the laser light source according to the control data, and control the moving direction and the moving distance of the laser light source or the worktable (e.g., the control system controls the moving direction and the moving distance of the laser light source or the worktable through the stepping precision of the stepping motor), so as to transfer the preset standard antenna pattern to the graphite oxide film, that is, the formed graphene antenna is identical to the standard antenna pattern. Therefore, the graphite oxide film can be accurately subjected to laser etching according to the preset standard antenna pattern, so that the graphene antenna with higher accuracy can be prepared, the prepared graphene antenna has rich patterns, the antenna pattern which is designed in advance and has any shape can be prepared, such as a plane, even a 3D structure and the like, the process is simple, the reproducibility is good, the cost is low, and the large-scale production and manufacturing are facilitated.
According to an embodiment of the present invention, the standard antenna pattern may be obtained by using HFSS software simulation, for example, the power, step length, and spot size of the laser light source may be defined on computer operating software according to the required parameters such as impedance, reflection coefficient, and shape of the graphene antenna. And then the control system can utilize a laser light source to accurately etch the graphite oxide film, and finally the required graphene antenna is obtained.
According to the embodiment of the invention, the line width of the graphene antenna formed in the method can be 30-60 μm. For example, it may be 40 μm, 50 μm, 55 μm, or the like. Therefore, the graphene antenna prepared by the method is high in fineness, wide in application range and good in service performance.
According to the embodiment of the invention, the reflection coefficient of the formed graphene antenna in the frequency band of the preset standard antenna pattern is not more than-10 dB, so that the parameters of the graphene antenna prepared by the method are consistent with those of the preset standard antenna pattern, and the prepared graphene antenna has high accuracy and good reproducibility. Specifically, the graphene antenna may be formed to have a conductivity of 2 × 104～6×104S/m, for example, may be 4X 104S/m, and the like. Therefore, the graphene antenna prepared by the method is low in resistivity and good in service performance.
In another aspect of the present invention, a graphene antenna is provided. According to an embodiment of the present invention, the graphene antenna is prepared by the method described above. Therefore, the graphene antenna has all the characteristics and advantages of the graphene antenna prepared by the method, and details are not repeated herein. Generally speaking, the graphene antenna has fine and rich patterns, low resistivity and good service performance.
The scheme of the invention will be explained with reference to the examples. It will be appreciated by those skilled in the art that the following examples are illustrative of the invention only and should not be taken as limiting the scope of the invention. The examples, where specific techniques or conditions are not indicated, are to be construed according to the techniques or conditions described in the literature in the art or according to the product specifications. The reagents or instruments used are not indicated by manufacturers, and are all conventional products available on the market.
Example 1
(1) Obtaining an antenna design according to HFSS software simulation calculation, namely obtaining a standard antenna pattern;
(2) selection of Si/SiO2As a substrate, willSi/SiO2And (3) putting the substrate into an acetone solution for 3-5 minutes, carrying out ultrasonic treatment on the substrate with absolute ethyl alcohol for 3-5 minutes, repeating the ultrasonic treatment twice, and then washing the substrate with deionized water. Drying for later use after drying; carrying out hydrophilic treatment on the substrate by using oxygen plasma to enable the graphite oxide solution to be easily attached;
(3) dispersing a certain mass of graphite oxide in water, and then carrying out ultrasonic treatment for 15 minutes at the power of 200W to obtain a stably suspended graphite oxide dispersion liquid, wherein the concentration of the graphite oxide dispersion liquid is 1.5 wt%;
(4) then, combining a spin-coating method or a spraying method, preparing a graphite oxide film with a certain thickness on the substrate by using the graphite oxide dispersion liquid, wherein the thickness is generally 20 nm-2 um;
(5) fixing a substrate containing a graphite oxide film on a workbench of a laser direct writing system;
(6) the method comprises the steps of setting parameters of laser direct writing equipment through computer software, defining the power of direct writing laser on the computer through operation software to be 200mW, the stepping length to be 10 microns and the light spot size to be 10 microns, and transferring a pre-designed standard antenna pattern to graphite oxide on a substrate through laser by utilizing the movement of a stepping motor and a fixed platform to obtain the graphene antenna.
Performance testing
The graphene antenna prepared in example 1 was tested for impedance and reflection coefficient by using a network analyzer.
After the graphene antenna prepared in example 1 is bonded to an SMA head on a quartz substrate, a network analyzer is used to perform a test, and a test result refers to fig. 2. As can be seen from fig. 2, the reflection coefficients of the graphene antenna obtained in example 1 in the frequency band of the preset standard antenna pattern are all lower than-10 dB, the parameters of the graphene antenna prepared by the method are consistent with those of the preset standard antenna pattern, and the prepared graphene antenna has high accuracy and good reproducibility.
The conductivity of the graphene antenna prepared in example 1 is also measured to be 40000S/m, which proves that the graphene antenna prepared by the method has lower conductivity and good use performance.
In the description herein, references to the description of "one embodiment," "some embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Claims (9)
1. A method for manufacturing a graphene antenna, comprising:
providing a substrate;
mixing graphite oxide and water to form a graphite oxide dispersion, wherein the concentration of the graphite oxide dispersion is 1-2 wt%;
coating the graphite oxide dispersion liquid on the substrate to form a graphite oxide film on one side of the substrate, wherein the thickness of the graphite oxide film is 20 nm-2 microns;
fixing the substrate on which the graphite oxide film is formed on a workbench;
and irradiating the graphite oxide film by using a laser light source, reducing the graphite oxide film irradiated by the laser light source to form graphene, and controlling the laser light source to move or controlling the workbench to move so as to form the patterned graphene antenna.
2. The method of claim 1, wherein the substrate comprises a rigid substrate or a flexible substrate.
3. The method of claim 1, wherein the substrate is formed from a material comprising at least one of silicon, silicon dioxide, gadolinium gallium garnet, sapphire, magnesium oxide, polyimide, polyethylene terephthalate.
4. The method according to claim 1, wherein the formed graphene antenna has a line width of 30-60 μm.
5. The method according to claim 1, wherein before the fixing the substrate on which the graphite oxide thin film is formed on a stage, the method further comprises:
and carrying out hydrophilic treatment on the substrate by using oxygen plasma.
6. The method of claim 1, further comprising:
and controlling the power of the laser light source and the size of a light spot by using a control system, and controlling the moving direction and the moving distance of the laser light source or the workbench so as to form the graphene antenna.
7. The method of claim 6, further comprising:
the control system adjusts the laser light source and the workbench according to a preset standard antenna pattern, and the formed graphene antenna is identical to the standard antenna pattern.
8. The method as claimed in claim 7, wherein the graphene antenna is formed to have a reflection coefficient of not more than-10 dB in a predetermined frequency band of the standard antenna pattern, and has an electrical conductivity of 2 x 104~6×104S/m。
9. A graphene antenna prepared by the method of any one of claims 1 to 8.
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