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CN110455889A - Hybrid Potential Acetaldehyde Sensor Based on YSZ and NiTiO3 Sensitive Electrode and Its Preparation Method - Google Patents

Hybrid Potential Acetaldehyde Sensor Based on YSZ and NiTiO3 Sensitive Electrode and Its Preparation Method Download PDF

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CN110455889A
CN110455889A CN201910747230.7A CN201910747230A CN110455889A CN 110455889 A CN110455889 A CN 110455889A CN 201910747230 A CN201910747230 A CN 201910747230A CN 110455889 A CN110455889 A CN 110455889A
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ysz
electrode
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刘方猛
王静
卢革宇
孙鹏
梁喜双
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Jilin University
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Abstract

一种基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器及其制备方法,属于气体传感器技术领域。从下至上依次由带有Pt加热电极的Al2O3陶瓷板、YSZ基板、Pt参考电极和NiTiO3敏感电极组成;Pt参考电极和NiTiO3敏感电极彼此分立且对称地制备在YSZ基板上表面的两端,YSZ基板下表面与带有Pt加热电极的Al2O3陶瓷板粘结在一起。本发明以稳定氧化锆(YSZ)作为离子导电层,利用具有高电化学催化活性的NiTiO3复合氧化物材料为敏感电极,通过不同煅烧温度(800℃~1200℃)来改变敏感电极层的微观形貌,达到提高乙醛敏感特性的目的。

A hybrid potential type acetaldehyde sensor based on YSZ and NiTiO sensitive electrodes and a preparation method thereof belong to the technical field of gas sensors. From bottom to top, it consists of an Al2O3 ceramic plate with a Pt heating electrode, a YSZ substrate, a Pt reference electrode, and a NiTiO3 sensitive electrode; the Pt reference electrode and the NiTiO3 sensitive electrode are separately and symmetrically prepared on the upper surface of the YSZ substrate At both ends of the YSZ substrate, the lower surface of the YSZ substrate is bonded with an Al2O3 ceramic plate with a Pt heating electrode. In the present invention, stabilized zirconia (YSZ) is used as the ion-conducting layer, NiTiO 3 composite oxide material with high electrochemical catalytic activity is used as the sensitive electrode, and the microcosm of the sensitive electrode layer is changed by different calcination temperatures (800°C-1200°C). Morphology, to achieve the purpose of improving the sensitivity of acetaldehyde.

Description

基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器及其制备 方法Hybrid Potential Acetaldehyde Sensor Based on YSZ and NiTiO3 Sensitive Electrode and Its Preparation method

技术领域technical field

本发明属于气体传感器技术领域,具体涉及一种基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器及其制备方法,其主要用于挥发性醛类的快速检测。The invention belongs to the technical field of gas sensors, and in particular relates to a hybrid potential type acetaldehyde sensor based on YSZ and NiTiO3 sensitive electrodes and a preparation method thereof, which is mainly used for rapid detection of volatile aldehydes.

背景技术Background technique

乙醛是挥发性有机化合物中最重要的醛类物质之一,无色且具有刺鼻的气味,在室内(建筑材料、木材清漆等)和室外(汽车和其他车辆的尾气)的燃烧和排放过程中都会产生乙醛。另外,乙醛被国际癌症研究机构(IARC)列为一级致癌物质,不仅在环境污染中起着重要作用,而且威胁着人类的健康。根据职业安全与健康管理局(OSHA)的规定,乙醛的最大允许暴露浓度为25ppm,工作时间为8h。长期暴露于乙醛中会产生多种有害健康的影响,如眼睛刺激、头痛、DNA损伤、红细胞结构改变等问题。因此,开发具有高灵敏度、高选择性和高稳定性的实时、快速、便携和低成本的乙醛气体传感器具有至关重要的意义。Acetaldehyde is one of the most important aldehydes in volatile organic compounds. It is colorless and has a pungent odor. It is burned and emitted indoors (building materials, wood varnishes, etc.) and outdoors (exhaust from automobiles and other vehicles) Acetaldehyde is produced in the process. In addition, acetaldehyde is listed as a first-class carcinogen by the International Agency for Research on Cancer (IARC), which not only plays an important role in environmental pollution, but also threatens human health. According to the regulations of the Occupational Safety and Health Administration (OSHA), the maximum allowable exposure concentration of acetaldehyde is 25ppm, and the working time is 8h. Long-term exposure to acetaldehyde can produce a variety of harmful health effects, such as eye irritation, headaches, DNA damage, changes in the structure of red blood cells, and other problems. Therefore, it is of great significance to develop real-time, fast, portable and low-cost acetaldehyde gas sensors with high sensitivity, high selectivity and high stability.

迄今为止,在不同的应用中许多研究团队使用各种方法检测乙醛气体,如液相色谱法、安培电化学电池、分子印迹技术、半导体金属氧化物传感器。其中,固体电解质型气体传感器具有成本低、响应速度快、结构简单、化学和机械稳定性好等优点,被认为是最有潜力的检测技术。目前,基于稳定氧化锆(YSZ)和金属氧化物敏感电极的混成型固态电化学气体传感器已经被开发用于检测VOCs等有毒气体。然而,用于实现快速检测乙醛的基于混成电位型的YSZ基气体传感器尚未见报道,因此,开发和寻找一种适用于检测乙醛的敏感电极材料非常重要。To date, many research groups have used various methods for the detection of acetaldehyde gas in different applications, such as liquid chromatography, amperometric electrochemical cells, molecular imprinting techniques, and semiconducting metal oxide sensors. Among them, the solid electrolyte gas sensor has the advantages of low cost, fast response, simple structure, good chemical and mechanical stability, etc., and is considered to be the most potential detection technology. Currently, hybrid solid-state electrochemical gas sensors based on stabilized zirconia (YSZ) and metal oxide sensitive electrodes have been developed for the detection of toxic gases such as VOCs. However, the YSZ-based gas sensor based on the hybrid potential type for the rapid detection of acetaldehyde has not been reported. Therefore, it is very important to develop and find a sensitive electrode material suitable for the detection of acetaldehyde.

发明内容Contents of the invention

本发明的目的是提供一种基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器及其制备方法,以实现快速检测乙醛的需要,并有效提高传感器灵敏度、降低检测下限等性能,促进这种传感器在挥发性醛类检测领域的实用化应用。本发明所得到的传感器除了具有快速响应速度和高灵敏度外,还具有较低的检测下限、很好的选择性和稳定性。The purpose of the present invention is to provide a kind of mixed potential type acetaldehyde sensor based on YSZ and NiTiO3 sensitive electrode and its preparation method, to realize the needs of rapid detection of acetaldehyde, and effectively improve the performance of sensor sensitivity, lower detection limit and so on, promote this The practical application of this sensor in the field of volatile aldehyde detection. In addition to fast response speed and high sensitivity, the sensor obtained by the invention also has lower detection limit, good selectivity and stability.

本发明所涉及的超快响应的乙醛传感器是基于稳定氧化锆(YSZ)固体电解质和NiTiO3复合氧化物敏感电极所构建的新型混成电位型乙醛气体传感器,YSZ(氧化钇稳定氧化锆(8%mol Y2O3-ZrO2))作为离子导电层。The ultra-fast response acetaldehyde sensor involved in the present invention is a novel hybrid potential type acetaldehyde gas sensor constructed based on stable zirconia (YSZ) solid electrolyte and NiTiO composite oxide sensitive electrode, YSZ (yttria stabilized zirconia (Yttria stabilized zirconia ( 8 mol% Y 2 O 3 —ZrO 2 )) as ion-conducting layer.

本发明所述的基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器,如图1所示,从下至上依次由带有Pt加热电极的Al2O3陶瓷板、YSZ基板、Pt参考电极和敏感电极组成;参考电极和敏感电极彼此分立且对称地制备在YSZ基板上表面的两端,YSZ基板下表面与带有Pt加热电极的Al2O3陶瓷板粘结在一起;敏感电极材料为NiTiO3,该材料由如下方法制备得到,The hybrid potential type acetaldehyde sensor based on YSZ and NiTiO sensitive electrodes described in the present invention, as shown in Figure 1, consists of an Al 2 O 3 ceramic plate with a Pt heating electrode, a YSZ substrate, and a Pt reference electrode from bottom to top. and the sensitive electrode; the reference electrode and the sensitive electrode are separated from each other and symmetrically prepared at both ends of the upper surface of the YSZ substrate, and the lower surface of the YSZ substrate is bonded with an Al 2 O 3 ceramic plate with a Pt heating electrode; the sensitive electrode material is NiTiO 3 , which is prepared by the following method,

将Ni(NO3)2·6H2O溶解于乙醇中,室温下搅拌溶解;将钛酸四丁酯加入到上述溶液中,继续搅拌均匀,再加入柠檬酸和水,室温下搅拌至形成均匀溶胶,静置20~30小时得到凝胶;Ni(NO3)2·6H2O、钛酸四丁酯、柠檬酸的用量摩尔比为1:1:2;将得到的凝胶在80~90℃真空条件下烘干12~24小时得到干凝胶,最后将干凝胶在800~1200℃下烧结1~3h,从而得到本发明所述的NiTiO3敏感电极材料;Dissolve Ni(NO 3 ) 2 ·6H 2 O in ethanol, stir to dissolve at room temperature; add tetrabutyl titanate to the above solution, continue to stir evenly, then add citric acid and water, and stir at room temperature until a uniform Sol, stand still for 20-30 hours to get gel; the molar ratio of Ni(NO 3 ) 2 ·6H 2 O, tetrabutyl titanate, and citric acid is 1:1:2; Drying under vacuum at 90°C for 12 to 24 hours to obtain the dry gel, and finally sintering the dry gel at 800 to 1200°C for 1 to 3 hours to obtain the NiTiO sensitive electrode material of the present invention;

本发明所述的一种基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器的制备方法,其步骤如下:A kind of preparation method based on YSZ and NiTiO sensitive electrode of the present invention mixed potential type acetaldehyde sensor, its steps are as follows:

(1)制作Pt参考电极:在YSZ基板上表面的一端使用Pt浆制作15~20μm厚的Pt参考电极,同时将一根Pt丝对折后粘在参考电极中间位置上作为电极引线,然后将YSZ基板在90~120℃条件下烘烤1~2小时,再将YSZ基板在1000~1100℃下烧结1~2小时,排除铂浆中的松油醇,最后降至室温;(1) Making a Pt reference electrode: Use Pt paste on one end of the upper surface of the YSZ substrate to make a 15-20 μm thick Pt reference electrode, and at the same time fold a Pt wire in half and stick it to the middle of the reference electrode as an electrode lead, and then connect the YSZ The substrate is baked at 90-120°C for 1-2 hours, and then the YSZ substrate is sintered at 1000-1100°C for 1-2 hours to remove terpineol in the platinum paste, and finally lower to room temperature;

(2)制作NiTiO3敏感电极:将NiTiO3敏感电极材料用去离子水调成浆料,质量浓度为2~20%;用NiTiO3浆料在与参考电极对称的YSZ基板上表面的另一端制备20~30μm厚的敏感电极,同样将一根铂丝对折后粘在敏感电极上作为电极引线;(2) Make NiTiO 3 sensitive electrode: adjust NiTiO 3 sensitive electrode material into slurry with deionized water, the mass concentration is 2-20%; use NiTiO 3 slurry on the other end of the upper surface of the YSZ substrate symmetrical to the reference electrode Prepare a sensitive electrode with a thickness of 20-30 μm, and also fold a platinum wire in half and stick it on the sensitive electrode as the electrode lead;

(3)将步骤(2)制备有参考电极和敏感电极的YSZ基板在800~1000℃条件下烧结1~3小时;高温烧结时的升温速率为1~2℃/min;(3) Sintering the YSZ substrate prepared in step (2) with the reference electrode and the sensitive electrode at 800-1000°C for 1-3 hours; the heating rate during high-temperature sintering is 1-2°C/min;

(4)制备无机粘合剂:量取水玻璃(Na2SiO3·9H2O)2~4mL,并称取Al2O3粉体0.7~1.0g,将水玻璃与Al2O3粉体混合并搅拌均匀,制得无机粘合剂;(4) Preparation of inorganic binder: Measure 2-4 mL of water glass (Na 2 SiO 3 ·9H 2 O), weigh 0.7-1.0 g of Al 2 O 3 powder, mix water glass and Al 2 O 3 powder Mix and stir evenly to obtain an inorganic binder;

(5)使用无机粘合剂将YSZ基板下表面和带有Pt加热电极的Al2O3陶瓷板粘结在一起;(5) Use an inorganic adhesive to bond the lower surface of the YSZ substrate and the Al2O3 ceramic plate with a Pt heating electrode ;

其中,带有Pt加热电极的Al2O3陶瓷板是在Al2O3陶瓷板上通过丝网印刷Pt得到,带有Pt加热电极的Al2O3陶瓷板作为传感器的加热板使用;Among them, the Al 2 O 3 ceramic plate with Pt heating electrode is obtained by screen printing Pt on the Al 2 O 3 ceramic plate, and the Al 2 O 3 ceramic plate with Pt heating electrode is used as the heating plate of the sensor;

(6)将步骤(5)得到器件进行焊接、封装,从而得到本发明所述的基于YSZ和NiTiO3敏感电极的混成电位型乙醛传感器。(6) The device obtained in step (5) is welded and packaged, thereby obtaining the mixed potential type acetaldehyde sensor based on YSZ and NiTiO sensitive electrodes of the present invention.

本发明以稳定氧化锆(YSZ)作为离子导电层,利用具有高电化学催化活性的NiTiO3复合氧化物材料为敏感电极,通过不同煅烧温度(800℃~1200℃)来改变敏感电极层的微观形貌,达到提高乙醛敏感特性的目的。In the present invention, stabilized zirconia (YSZ) is used as the ion-conducting layer, NiTiO 3 composite oxide material with high electrochemical catalytic activity is used as the sensitive electrode, and the microcosm of the sensitive electrode layer is changed by different calcination temperatures (800°C-1200°C). Morphology, to achieve the purpose of improving the sensitivity of acetaldehyde.

本发明的优点:Advantages of the present invention:

(1)利用典型的固体电解质--稳定氧化锆(YSZ),具有良好的热稳定性和化学稳定性,可在复杂环境中检测乙醛;(1) Using a typical solid electrolyte - stabilized zirconia (YSZ), which has good thermal and chemical stability, it can detect acetaldehyde in complex environments;

(2)采用简单溶胶凝胶方法制备高性能复合氧化物NiTiO3作为传感器敏感电极,制备方法简单,利于批量化的工业生产。(2) The high-performance composite oxide NiTiO 3 is prepared by a simple sol-gel method as a sensor sensitive electrode, and the preparation method is simple, which is conducive to mass industrial production.

(3)通过改变材料的不同煅烧温度(800℃~1200℃),获得具有不同孔道结构的敏感电极层,从而优化敏感电极的微观结构,利于待测气体快速到达三相界面参与电化学反应,从而提高传感器的响应速度和灵敏度。(3) By changing the different calcination temperatures (800°C to 1200°C) of the material, a sensitive electrode layer with a different pore structure is obtained, thereby optimizing the microstructure of the sensitive electrode, which is beneficial for the gas to be measured to quickly reach the three-phase interface to participate in the electrochemical reaction, Thereby improving the response speed and sensitivity of the sensor.

附图说明Description of drawings

图1:本发明所述的YSZ基混成电位型乙醛传感器的结构示意图。Figure 1: Schematic diagram of the structure of the YSZ-based hybrid potentiometric acetaldehyde sensor of the present invention.

各部分名称:Pt丝1、NiTiO3敏感电极2、YSZ基板3、Pt参考电极4、Pt点(用于粘电极引线)5、无机粘合剂6、带有Pt加热电极的Al2O3陶瓷板7。Names of each part: Pt wire 1, NiTiO 3 sensitive electrode 2, YSZ substrate 3, Pt reference electrode 4, Pt dots (for sticking electrode leads) 5, inorganic adhesive 6, Al 2 O 3 with Pt heating electrode Ceramic plate7.

图2:本发明不同烧结温度所制得的NiTiO3敏感电极材料的XRD图(其中,横坐标为角度,纵坐标为强度)。Figure 2: XRD patterns of NiTiO 3 sensitive electrode materials prepared at different sintering temperatures in the present invention (wherein, the abscissa is the angle, and the ordinate is the intensity).

如图2所示,为不同烧结温度NiTiO3敏感电极材料的XRD图,通过与标准谱图对比,烧结得到的材料均与NiTiO3标准卡片JCPDS(File No.76-334)一致。表明我们发明制备的敏感电极材料为NiTiO3材料。As shown in Figure 2, it is the XRD patterns of NiTiO 3 sensitive electrode materials at different sintering temperatures. By comparing with the standard spectra, the sintered materials are consistent with the NiTiO 3 standard card JCPDS (File No. 76-334). It shows that the sensitive electrode material prepared by our invention is NiTiO 3 material.

图3:本发明不同烧结温度所制备的敏感电极材料的SEM图。Figure 3: SEM images of sensitive electrode materials prepared at different sintering temperatures in the present invention.

如图3所示,a:800℃,b:1000℃,c:1200℃烧结的NiTiO3敏感电极材料的SEM图,从图中可以看出,随着烧结温度的升高,颗粒大小逐渐增大,改变敏感材料的烧结温度能够改变敏感电极的微观形貌,形成疏松多孔的结构,电极的多孔性利于气体的扩散。As shown in Figure 3, a: 800°C, b: 1000°C, c: SEM images of NiTiO 3 sensitive electrode materials sintered at 1200°C. It can be seen from the figure that the particle size gradually increases with the increase of sintering temperature. Large, changing the sintering temperature of the sensitive material can change the microscopic morphology of the sensitive electrode, forming a loose and porous structure, and the porosity of the electrode is conducive to the diffusion of gas.

图4:利用分别在800℃、1000℃和1200℃下烧结的NiTiO3作为敏感电极材料的传感器对50ppm乙醛的响应值曲线(其中,横坐标为时间,纵坐标为电势差值)。Figure 4: Response curves of sensors using NiTiO 3 sintered at 800°C, 1000°C and 1200°C as sensitive electrode materials to 50ppm acetaldehyde (where the abscissa is time and the ordinate is potential difference).

如图4所示,为实施例1、2、3所制作器件对50ppm乙醛的电势差ΔV(器件的响应值用电势差ΔV表示),从图中可以看出,实施例1、2、3对50ppm乙醛的响应值分别为-16mV、-43mV和-3mV。由此可见,1000℃下烧结的NiTiO3作为敏感电极材料的YSZ基混成电位型乙醛传感器具有最高的响应值。As shown in Figure 4, it is the potential difference ΔV (response value of the device is represented by potential difference ΔV) of the device made for embodiment 1,2,3 to 50ppm acetaldehyde, as can be seen from the figure, embodiment 1,2,3 is to 50ppm acetaldehyde The response values of 50ppm acetaldehyde were -16mV, -43mV and -3mV respectively. It can be seen that the YSZ-based hybrid potentiometric acetaldehyde sensor with NiTiO 3 sintered at 1000 °C as the sensitive electrode material has the highest response value.

图5:利用1000℃下烧结的NiTiO3作为敏感电极材料的传感器连续响应曲线(a)(其中,横坐标为时间,纵坐标为电势差值。工作温度为575度)和灵敏度曲线(b、c)(其中,横坐标为乙醛浓度,纵坐标为电势差值。工作温度为575度)。Figure 5: The continuous response curve (a) of the sensor using NiTiO 3 sintered at 1000°C as the sensitive electrode material (where the abscissa is time and the ordinate is potential difference. The working temperature is 575 degrees) and sensitivity curve (b, c ) (wherein, the abscissa is the acetaldehyde concentration, and the ordinate is the potential difference. The working temperature is 575 degrees).

如图5所示,为NiTiO3(1000℃)器件的连续响应曲线,从图中可以看出,器件对50ppm乙醛的响应值为-43mV,最低可以检测200ppb的乙醛,此传感器表现出了超快的响应速度和较低的检测下限。As shown in Figure 5, it is the continuous response curve of the NiTiO 3 (1000°C) device. It can be seen from the figure that the response value of the device to 50ppm acetaldehyde is -43mV, and the minimum can detect 200ppb acetaldehyde. This sensor shows Ultrafast response and low detection limit.

图6:利用1000℃下烧结的NiTiO3作为敏感电极材料的传感器的选择性条形图。(其中,横坐标为电势差值,纵坐标为测试气体:从上到下分别为乙烯,一氧化氮,氨气,二氧化氮,一氧化碳,苯,甲苯,乙酸,二甲苯,甲醛,乙醇,甲醇,正丁醛);Figure 6: Selectivity bar graph of the sensor utilizing NiTiO3 sintered at 1000 °C as the sensitive electrode material. (Wherein, the abscissa is the potential difference, and the ordinate is the test gas: from top to bottom are ethylene, nitric oxide, ammonia, nitrogen dioxide, carbon monoxide, benzene, toluene, acetic acid, xylene, formaldehyde, ethanol, methanol , n-butyraldehyde);

如图6所示,为NiTiO3(1000℃)器件的选择性,从图中可以看出,器件对乙醛表现出了最大的敏感特性,由此可见,器件具有很好的选择性。As shown in Figure 6, it is the selectivity of the NiTiO 3 (1000°C) device. It can be seen from the figure that the device shows the greatest sensitivity to acetaldehyde, so it can be seen that the device has good selectivity.

图7:利用1000℃下烧结的NiTiO3作为敏感电极材料的传感器的湿度影响曲线(其中,横坐标为相对湿度,纵坐标为电势差值)。Figure 7: Humidity influence curve of a sensor using NiTiO 3 sintered at 1000°C as a sensitive electrode material (where the abscissa is the relative humidity, and the ordinate is the potential difference).

如图7所示,为NiTiO3(1000℃)器件在不同湿度下对100ppm乙醛的响应,从图中可以看出,器件在20~98%的湿度范围内,对100ppm乙醛的响应变化较小,表明了传感器具有很好的耐湿性。As shown in Figure 7, it is the response of NiTiO 3 (1000°C) devices to 100ppm acetaldehyde at different humidity. It can be seen from the figure that the response of the device to 100ppm acetaldehyde changes in the humidity range of 20% to 98%. Smaller, indicating that the sensor has good moisture resistance.

图8:利用1000℃下烧结的NiTiO3作为敏感电极材料的传感器的稳定性曲线。(其中,横坐标为时间,上下两图的纵坐标分别为电势差值和电势差改变量)Figure 8: Stability curves of sensors utilizing NiTiO3 sintered at 1000 °C as the sensitive electrode material. (Wherein, the abscissa is time, and the ordinates of the upper and lower graphs are the potential difference and the change in potential difference respectively)

如图8所示,为NiTiO3(1000℃)器件在20天内的稳定性测试,从图中可以看出,器件在20天内,响应值的波动范围较小,表明此器件具有很好的稳定性。As shown in Figure 8, it is the stability test of the NiTiO 3 (1000°C) device within 20 days. It can be seen from the figure that the fluctuation range of the response value of the device within 20 days is small, indicating that the device has good stability. sex.

具体实施方式Detailed ways

实施例1:Example 1:

用溶胶-凝胶法制备NiTiO3材料,将1000℃烧结的NiTiO3(1000℃)作为敏感电极材料制作YSZ基混成电位型乙醛传感器,并测试传感器气敏性能,具体过程如下:The NiTiO 3 material was prepared by the sol-gel method, and the NiTiO 3 (1000 °C) sintered at 1000 °C was used as a sensitive electrode material to make a YSZ-based hybrid potential type acetaldehyde sensor, and the gas-sensing performance of the sensor was tested. The specific process is as follows:

1.制作Pt参考电极:在长宽2×2mm、厚度0.2mm的YSZ基板上表面的一端使用Pt浆制作一层0.5mm×2mm大小、15μm厚的Pt参考电极,同时用一根Pt丝对折后粘在参考电极中间位置上引出电极引线;然后将YSZ基板在100℃条件下烘烤1.5小时,再将YSZ基板在1000℃下烧结1小时,从而排除铂浆中的松油醇,最后降至室温。1. Make a Pt reference electrode: use Pt slurry to make a Pt reference electrode with a size of 0.5mm×2mm and a thickness of 15μm on one end of the upper surface of the YSZ substrate with a length and width of 2×2mm and a thickness of 0.2mm, and fold it in half with a Pt wire Then stick the electrode lead wire on the middle position of the reference electrode; then bake the YSZ substrate at 100°C for 1.5 hours, and then sinter the YSZ substrate at 1000°C for 1 hour, so as to eliminate the terpineol in the platinum paste, and finally reduce the to room temperature.

2.制作NiTiO3敏感电极:称取5mmol的Ni(NO3)2·6H2O,溶解于15mL的乙醇中,室温搅拌至溶解;将5mmol的钛酸四丁酯加到以上溶液中,继续搅拌均匀,加入10mmol柠檬酸和15mL的水,室温搅拌至形成均匀溶胶,静置24小时;将得到的凝胶在80℃真空条件下烘干24小时得到干凝胶,最后在1000℃条件下烧结3小时,得到NiTiO3敏感电极材料。2. Make NiTiO 3 sensitive electrode: weigh 5mmol of Ni(NO 3 ) 2 6H 2 O, dissolve in 15mL of ethanol, stir at room temperature until dissolved; add 5mmol of tetrabutyl titanate to the above solution, continue Stir well, add 10mmol citric acid and 15mL water, stir at room temperature until a uniform sol is formed, and let it stand for 24 hours; dry the obtained gel under vacuum at 80°C for 24 hours to obtain a dry gel, and finally dry it at 1000°C Sintered for 3 hours to obtain NiTiO 3 sensitive electrode material.

取5mg NiTiO3粉末用去离子水100mg调成浆料,将NiTiO3浆料在与参考电极对称的YSZ基板上表面的另一端涂覆一层0.5mm×2mm大小、20μm厚的敏感电极,同样用一根铂丝对折后粘在敏感电极上引出电极引线。Take 5mg of NiTiO 3 powder and make a slurry with 100 mg of deionized water, and coat the NiTiO 3 slurry with a sensitive electrode with a size of 0.5mm×2mm and a thickness of 20μm on the other end of the upper surface of the YSZ substrate symmetrical to the reference electrode. Use a platinum wire to fold in half and stick to the sensitive electrode to lead out the electrode lead.

将制作好的带有参考电极和敏感电极的YSZ基板以2℃/min的升温速率升温至800℃并保持2h后降至室温。The prepared YSZ substrate with the reference electrode and the sensitive electrode was heated to 800°C at a heating rate of 2°C/min and kept for 2h before cooling down to room temperature.

3.粘结具有加热电极的陶瓷板。使用无机粘合剂(Al2O3和水玻璃Na2SiO3·9H2O,质量体积比为1g:4mL)将YSZ基板的下表面(未涂覆电极的一侧)与同样尺寸的带有Pt加热电极的Al2O3陶瓷板(长宽2×2mm、厚度0.2mm)进行粘结。3. Bonding ceramic plates with heating electrodes. Using an inorganic binder ( Al2O3 and water glass Na2SiO3 9H2O with a mass volume ratio of 1 g : 4 mL) bond the lower surface of the YSZ substrate (the side not coated with the electrodes) with a tape of the same size Al 2 O 3 ceramic plates (length and width 2×2mm, thickness 0.2mm) with Pt heating electrodes were bonded.

4.器件焊接、封装。将器件焊接在六角管座上,套上防护罩,制作完成混成电位型乙醛传感器。4. Device welding and packaging. Weld the device on the hexagonal socket, put on the protective cover, and complete the hybrid potential type acetaldehyde sensor.

实施例2:Example 2:

以800℃烧结的NiTiO3材料作为敏感电极材料,制作乙醛传感器,其制作过程为:The NiTiO 3 material sintered at 800°C is used as the sensitive electrode material to make an acetaldehyde sensor. The manufacturing process is as follows:

将前述方法所制备的NiTiO3在马弗炉里800℃烧结得到敏感电极材料NiTiO3(800℃),器件制作过程与实施例1相同。The NiTiO 3 prepared by the aforementioned method was sintered in a muffle furnace at 800° C. to obtain the sensitive electrode material NiTiO 3 (800° C.) . The device manufacturing process is the same as that of Example 1.

实施例3:Example 3:

以1200℃烧结的NiTiO3材料作为敏感电极材料,制作乙醛传感器,其制作过程为:The NiTiO 3 material sintered at 1200°C is used as the sensitive electrode material to make an acetaldehyde sensor. The manufacturing process is as follows:

将前述方法所制备的NiTiO3在马弗炉里1200℃烧结得到敏感电极材料NiTiO3(1200℃),器件制作过程与实施例1相同。The NiTiO 3 prepared by the aforementioned method was sintered in a muffle furnace at 1200° C. to obtain the sensitive electrode material NiTiO 3 (1200° C.) . The device manufacturing process is the same as that of Example 1.

将传感器连接在Rigol信号测试仪上,分别将传感器置于空气、200ppb乙醛、500ppb乙醛、1ppm乙醛、2ppm乙醛、5ppm乙醛、10ppm乙醛、20ppm乙醛、50ppm乙醛、100ppm乙醛、200ppm乙醛的气氛中进行电压信号测试。器件的响应值大小用ΔV表示,其值为V待测气体-V空气Connect the sensor to the Rigol signal tester, place the sensor in air, 200ppb acetaldehyde, 500ppb acetaldehyde, 1ppm acetaldehyde, 2ppm acetaldehyde, 5ppm acetaldehyde, 10ppm acetaldehyde, 20ppm acetaldehyde, 50ppm acetaldehyde, 100ppm The voltage signal test is carried out in the atmosphere of acetaldehyde and 200ppm acetaldehyde. The response value of the device is represented by ΔV, and its value is V gas to be tested - V air .

表1:以NiTiO3(800℃)、NiTiO3(1000℃)和NiTiO3(1200℃)为敏感电极材料的传感器对50ppm乙醛响应值数据Table 1: Response data of sensors using NiTiO 3 (800°C) , NiTiO 3 (1000°C) and NiTiO 3 (1200°C) as sensitive electrode materials to 50ppm acetaldehyde

表2:以NiTiO3(1000℃)为敏感电极材料的传感器的ΔV随乙醛浓度的变化数据Table 2: Variation data of ΔV with acetaldehyde concentration for sensors using NiTiO 3 (1000°C) as sensitive electrode material

乙醛的浓度(ppm)Acetaldehyde concentration (ppm) 敏感电极与参考电极电势差ΔV(mV)Sensitive electrode and reference electrode potential difference ΔV (mV) 0.20.2 -4.5-4.5 0.50.5 -7.5-7.5 11 -3.5-3.5 灵敏度(mV/decade)Sensitivity (mV/decade) -3-3 11 -3.5-3.5 22 -9-9 55 -12-12 1010 -25-25 2020 -34-34 5050 -43-43 100100 -54.5-54.5 200200 -62.5-62.5 灵敏度(mV/decade)Sensitivity (mV/decade) -26.5-26.5

表1中列出了分别以NiTiO3(800℃)、NiTiO3(1000℃)和NiTiO3(1200℃)为敏感电极材料的传感器对50ppm乙醛响应值大小。从表中可以看到,三种器件均对乙醛具有良好的响应特性,其中使用NiTiO3(1000℃)为敏感电极材料的器件的响应值最高,为-43mV。此外,从表2可以看出,NiTiO3(1000℃)器件对乙醛的检测下限达到200ppb。对0.2-1ppm和1-200ppm乙醛的灵敏度为-3mV/decade和-26.5mV/decade。由此可见,当前构筑的混成电位型传感器对乙醛表现出了很好的敏感特性,在大气环境检测领域具有很好的潜在应用前景。Table 1 lists the response values of sensors using NiTiO 3 (800°C) , NiTiO 3 (1000°C) and NiTiO 3 (1200°C) as sensitive electrode materials to 50ppm acetaldehyde. It can be seen from the table that all three devices have good response characteristics to acetaldehyde, and the device using NiTiO 3 (1000°C) as the sensitive electrode material has the highest response value, which is -43mV. In addition, it can be seen from Table 2 that the detection limit of NiTiO 3 (1000°C) device to acetaldehyde reaches 200ppb. The sensitivity to 0.2-1ppm and 1-200ppm acetaldehyde is -3mV/decade and -26.5mV/decade. It can be seen that the currently constructed hybrid potentiometric sensor shows good sensitivity to acetaldehyde, and has a good potential application prospect in the field of atmospheric environment detection.

Claims (4)

1. one kind is based on YSZ and NiTiO3Sensitive electrode blendes together electric potential type acetaldehyde sensor, from bottom to up successively by adding with Pt The Al of thermode2O3Ceramic wafer, YSZ substrate, Pt reference electrode and sensitive electrode composition;Reference electrode and sensitive electrode divide each other It stands and symmetrically prepares in the both ends of YSZ upper surface of base plate, YSZ base lower surface and the Al with Pt heating electrode2O3Ceramic wafer It is bonded together;Sensitive electrode material is NiTiO3, which is prepared by the following method,
By Ni (NO3)2·6H2O is dissolved in ethyl alcohol, at room temperature stirring and dissolving;Butyl titanate is added in above-mentioned solution, Continue to stir evenly, add citric acid and water, is stirred at room temperature to uniform colloidal sol is formed, stand 20~30 hours and coagulated Glue;Ni(NO3)2·6H2O, butyl titanate, citric acid dosage molar ratio be 1:1:2;By obtained gel at 80~90 DEG C It is dried 12~24 hours under vacuum condition and obtains xerogel, xerogel is finally sintered to 1~3h at 800~1200 DEG C, thus Obtain NiTiO3Sensitive electrode material.
2. described in claim 1 a kind of based on YSZ and NiTiO3The preparation side for blending together electric potential type acetaldehyde sensor of sensitive electrode Method, its step are as follows:
(1) Pt reference electrode is made: in one end of YSZ upper surface of base plate using the Pt of Pt slurry 15~20 μ m-thicks of production with reference to electricity Pole, while will be sticked to after a Pt doublings on reference electrode middle position as contact conductor, then by YSZ substrate 90~ It is toasted 1~2 hour under the conditions of 120 DEG C, then YSZ substrate is sintered 1~2 hour at 1000~1100 DEG C, excluded in platinum slurry Terpinol is finally down to room temperature;
(2) NiTiO is made3Sensitive electrode: by NiTiO3Sensitive electrode material is slurred material with deionized water, and mass concentration is 2~ 20%;Use NiTiO3Slurry is in the sensitivity for preparing 20~30 μ m-thicks with the other end of the symmetrical YSZ upper surface of base plate of reference electrode Electrode will be equally sticked on sensitive electrode as contact conductor after a platinum filament doubling;
(3) the YSZ substrate that step (2) is prepared with reference electrode and sensitive electrode is sintered 1~3 under the conditions of 800~1000 DEG C Hour;
(4) it prepares inorganic bond: measuring 2~4mL of waterglass, and weigh Al2O30.7~1.0g of powder, by waterglass and Al2O3 Powder is mixed and stirred for uniformly, inorganic bond being made;
(5) Al of electrode is heated using inorganic bond by YSZ base lower surface and with Pt2O3Ceramic wafer is bonded together;
(6) step (5) is obtained device to be welded, encapsulate, to obtain based on YSZ and NiTiO3Sensitive electrode blendes together electricity Bit-type acetaldehyde sensor.
3. as claimed in claim 2 a kind of based on YSZ and NiTiO3The preparation for blending together electric potential type acetaldehyde sensor of sensitive electrode Method, it is characterised in that: heating rate when step (3) high temperature is sintered is 1~2 DEG C/min.
4. as claimed in claim 2 a kind of based on YSZ and NiTiO3The preparation for blending together electric potential type acetaldehyde sensor of sensitive electrode Method, it is characterised in that: the Al with Pt heating electrode in step (5)2O3Ceramic wafer is in Al2O3Pass through silk screen on ceramic wafer Printing Pt is obtained, the Al with Pt heating electrode2O3Ceramic wafer is used as the heating plate of sensor.
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