CN106168598B - One kind being based on YSZ and CoTa2O6Sensitive electrode blendes together electric potential type NO2Sensor, preparation method and applications - Google Patents
One kind being based on YSZ and CoTa2O6Sensitive electrode blendes together electric potential type NO2Sensor, preparation method and applications Download PDFInfo
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Abstract
一种基于YSZ和CoTa2O6敏感电极的混成电位型高温NO2传感器、制备方法及其在汽车尾气监测中的应用。传感器依次由带有Pt加热电极的Al2O3陶瓷板、YSZ基板、Pt参考电极和敏感电极组成;参考电极和敏感电极彼此分立且对称地制备在YSZ基板上表面的两端,YSZ基板下表面与带有Pt加热电极的Al2O3陶瓷板粘结在一起;敏感电极的材料为CoTa2O6。本发明以YSZ作为离子导电层,利用具有高电化学催化活性的CoTa2O6复合氧化物材料为敏感电极,通过不同煅烧温度(800℃~1200℃)来改变敏感电极的微观形貌,并分别构筑成传感器件,通过对比在高温下对NO2的响应值大小,获得具有更高敏感性能的器件。
A hybrid potentiometric high-temperature NO 2 sensor based on YSZ and CoTa 2 O 6 sensitive electrodes, its preparation method and its application in automobile exhaust gas monitoring. The sensor is sequentially composed of an Al2O3 ceramic plate with a Pt heating electrode, a YSZ substrate, a Pt reference electrode, and a sensitive electrode; the reference electrode and the sensitive electrode are separately and symmetrically prepared at both ends of the upper surface of the YSZ substrate, and under the YSZ substrate. The surface is bonded with an Al 2 O 3 ceramic plate with a Pt heating electrode; the material of the sensitive electrode is CoTa 2 O 6 . In the present invention, YSZ is used as the ion-conducting layer, CoTa 2 O 6 composite oxide material with high electrochemical catalytic activity is used as the sensitive electrode, and the microscopic morphology of the sensitive electrode is changed by different calcination temperatures (800°C-1200°C), and Construct sensor devices separately, and obtain devices with higher sensitivity performance by comparing the response value to NO 2 at high temperature.
Description
技术领域technical field
本发明属于气体传感器技术领域,具体涉及一种基于YSZ和CoTa2O6敏感电极的混成电位型高温NO2传感器、制备方法及其在汽车尾气监测中的应用。The invention belongs to the technical field of gas sensors, and in particular relates to a hybrid potential type high-temperature NO 2 sensor based on YSZ and CoTa 2 O 6 sensitive electrodes, a preparation method and its application in automobile exhaust gas monitoring.
背景技术Background technique
随着汽车保有量的不断增加,汽车尾气排放造成的环境污染和日益匮乏的资源问题已经成为了汽车工业持续发展所面临的两个主要挑战。因此,为了应对挑战,世界各国陆续提出了更严格的车辆排放标准来限制有毒有害尾气的排放。此外,为了提高燃料的燃烧效率,减少二氧化碳的排放,在稀薄燃烧或直喷发动机上安装NOx吸储型催化系统来弥补传统的三相催化系统的低NOx排除能力。然而,当催化剂对NOx的吸储能力达到饱和时,需要将高浓度的碳氢化合物供给催化剂来实现吸储能力的恢复。因此,低成本、高稳定、高强度和高敏感性能的 NOx传感器应该被安装在催化剂的前后两端来实时监测NOx的浓度,从而调整催化剂的再生时机。由于车载尾气后处理系统常常处于高温高湿的恶劣工作状态下,所以要求传感器应该能够承受高温高湿的环境。非常幸运的是,基于YSZ 和金属氧化物敏感电极的混成电位型气体传感器可以满足以上要求。With the increasing number of automobiles, the environmental pollution caused by automobile exhaust emissions and the increasingly scarce resources have become two major challenges for the sustainable development of the automobile industry. Therefore, in order to meet the challenge, countries around the world have successively proposed stricter vehicle emission standards to limit the emission of toxic and harmful exhaust gases. In addition, in order to improve fuel combustion efficiency and reduce carbon dioxide emissions, NO x storage catalytic systems are installed on lean-burn or direct injection engines to compensate for the low NO x removal capacity of traditional three-phase catalytic systems. However, when the NO x storage capacity of the catalyst reaches saturation, a high concentration of hydrocarbons needs to be supplied to the catalyst to restore the storage capacity. Therefore, low-cost, high-stability, high-strength and high-sensitivity NOx sensors should be installed at both ends of the catalyst to monitor the concentration of NOx in real time, so as to adjust the regeneration timing of the catalyst. Since the vehicle exhaust after-treatment system is often in the harsh working condition of high temperature and high humidity, it is required that the sensor should be able to withstand the environment of high temperature and high humidity. Fortunately, hybrid potentiometric gas sensors based on YSZ and metal oxide sensitive electrodes can meet the above requirements.
稳定氧化锆基混成电位型NO2传感器的敏感机理是:气氛中NO2通过敏感电极层向三相反应界面扩散,在扩散过程中由于发生反应(1),NO2的浓度会逐渐降低,氧化物敏感电极的多孔性会决定NO2浓度的降低程度。在气体/敏感电极/YSZ的三相界面处,同时发生NO2的电化学还原反应和氧的电化学氧化反应,反应(2)和(3)构成一个局部电池,当两者反应速率相等时,反应达到平衡,在敏感电极上形成混成电位,它与参考电极的电位差作为传感器的检测信号。检测信号大小由电化学反应(2)和(3)的速率来决定,而反应速率取决于敏感电极材料的电化学和化学催化活性、电极材料微观结构(比如材料的多孔性、粒度、形貌等)。The sensitive mechanism of the stable zirconia-based mixed potential NO2 sensor is: NO2 in the atmosphere diffuses to the three-phase reaction interface through the sensitive electrode layer. During the diffusion process, the concentration of NO2 will gradually decrease due to the reaction (1), and the oxidation The porosity of the material sensitive electrode will determine the reduction degree of NO2 concentration. At the three-phase interface of gas/sensing electrode/YSZ, the electrochemical reduction reaction of NO and the electrochemical oxidation reaction of oxygen occur simultaneously, and the reactions ( 2 ) and (3) constitute a local battery, when both reaction rates are equal , the reaction reaches equilibrium, and a mixed potential is formed on the sensitive electrode, and the potential difference between it and the reference electrode is used as the detection signal of the sensor. The magnitude of the detection signal is determined by the rate of electrochemical reactions (2) and (3), and the reaction rate depends on the electrochemical and chemical catalytic activity of the sensitive electrode material, the microstructure of the electrode material (such as the porosity, particle size, and morphology of the material). Wait).
反应式如下:The reaction formula is as follows:
NO2→NO+1/2O2 (1)NO 2 →NO+1/2O 2 (1)
NO2+2e-→NO+O2- (2)NO 2 + 2e- →NO+O 2- (2)
O2-→1/2O2+2e- (3)O 2- → 1/2O 2 +2e - (3)
目前,为了制备更高敏感特性的传感器,国内外大多数研究者致力于敏感电极材料的研究。例如,本课题组制作的以Cr2O3-WO3为敏感电极材料的YSZ基混成电位型NO2传感器对100ppm NO2的混成电位值为52mV(Quan Diao, Chengguo Yin,Yingwei Liu,JianguoLi,Xun Gong,Xishuang Liang,Shiqi Yang, Hong Chen,Geyu Lu,Mixed-potential-typeNO2sensor using stabilized zirconia and Cr2O3-WO3nanocomposites,Sensor andActuators B 180(2013) 90-95)。此NO2传感器虽然具有可接受的敏感性能,但是继续开发可用于NO2气体检测的高电化学催化活性的敏感电极材料仍然非常必要。At present, in order to prepare sensors with higher sensitivity characteristics, most researchers at home and abroad are devoted to the research of sensitive electrode materials. For example, the YSZ-based mixed potential NO 2 sensor made by our research group with Cr 2 O 3 -WO 3 as the sensitive electrode material has a mixed potential value of 52mV for 100ppm NO 2 (Quan Diao, Chengguo Yin, Yingwei Liu, JianguoLi, Xun Gong, Xishuang Liang, Shiqi Yang, Hong Chen, Geyu Lu, Mixed-potential-type NO 2 sensor using stabilized zirconia and Cr 2 O 3 -WO 3 nanocomposites, Sensor and Actuators B 180(2013) 90-95). Although this NO2 sensor has acceptable sensitive performance, it is still very necessary to continue to develop sensitive electrode materials with high electrochemical catalytic activity for NO2 gas detection.
发明内容Contents of the invention
本发明的目的是提供一种基于YSZ和CoTa2O6敏感电极的混成电位型高温 NO2传感器、制备方法及其在汽车尾气监测中的应用。本发明所得到的传感器除了具有高灵敏度外,还具有较低的检测下限、很好的选择性、耐湿性和稳定性。The purpose of the present invention is to provide a hybrid potential type high-temperature NO 2 sensor based on YSZ and CoTa 2 O 6 sensitive electrodes, a preparation method and its application in automobile exhaust gas monitoring. In addition to high sensitivity, the sensor obtained by the invention also has lower detection limit, good selectivity, moisture resistance and stability.
本发明所涉及的NO2传感器是基于固体电解质YSZ和高电化学催化性能 CoTa2O6复合氧化物材料为敏感电极所构筑的新型高温NO2传感器,YSZ (ZrO2(掺杂质量分数8%的Y2O3))作为离子导电层。The NO2 sensor involved in the present invention is based on the solid electrolyte YSZ and high electrochemical catalytic performance CoTa2O6 composite oxide material is a novel high-temperature NO2 sensor constructed by the sensitive electrode, YSZ ( ZrO2 (doping mass fraction 8% Y 2 O 3 )) as the ion-conducting layer.
本发明所述的一种基于YSZ和CoTa2O6敏感电极的混成电位型NO2传感器,如图1所示,依次由带有Pt加热电极的Al2O3陶瓷板、YSZ基板、Pt参考电极和敏感电极组成;参考电极和敏感电极彼此分立且对称地制备在YSZ基板上表面的两端,YSZ基板下表面与带有Pt加热电极的Al2O3陶瓷板粘结在一起;敏感电极的材料为CoTa2O6,其由如下方法制备得到:A hybrid potential NO2 sensor based on YSZ and CoTa2O6 sensitive electrodes according to the present invention, as shown in Figure 1, consists of an Al2O3 ceramic plate with a Pt heating electrode, a YSZ substrate, a Pt reference Composition of electrodes and sensitive electrodes; the reference electrode and the sensitive electrode are separated from each other and symmetrically prepared at both ends of the upper surface of the YSZ substrate, and the lower surface of the YSZ substrate is bonded with an Al 2 O 3 ceramic plate with a Pt heating electrode; the sensitive electrode The material is CoTa 2 O 6 , which is prepared by the following method:
称取0.5~2mmol的Ta2O5,将其溶解于30~60mL、质量分数40~50%的氢氟酸的水溶液中,在60~90℃下搅拌12~24小时;将15~20mL、质量浓度 25~28%的氨水逐滴滴加到以上溶液中,调节反应体系的pH值为8~10,陈化 12~14小时,经过滤、洗涤到中性,得到白色沉淀;将以上白色沉淀溶解于柠檬酸的水溶液中,在60~80℃下继续搅拌1~2小时,加入CoCl2·6H2O水溶液继续搅拌至凝胶;将得到的凝胶在80~90℃真空条件下烘干12~24小时得到干凝胶,最后将得到的干凝胶在800~1200℃条件下煅烧2~4小时,得到CoTa2O6敏感电极材料;其中CoCl2·6H2O和Ta2O5的用量摩尔比为1:1,柠檬酸与Ta2O5的用量摩尔比为2~5:1。Weigh 0.5-2 mmol of Ta 2 O 5 , dissolve it in 30-60 mL of hydrofluoric acid aqueous solution with a mass fraction of 40-50%, stir at 60-90°C for 12-24 hours; mix 15-20 mL, Add ammonia water with a mass concentration of 25-28% dropwise to the above solution, adjust the pH value of the reaction system to 8-10, age for 12-14 hours, filter and wash to neutrality, and obtain a white precipitate; the above white Dissolve the precipitate in the aqueous solution of citric acid, continue to stir at 60-80°C for 1-2 hours, add CoCl 2 ·6H 2 O aqueous solution and continue to stir until it becomes a gel; bake the obtained gel under vacuum at 80-90°C Dry for 12-24 hours to obtain a xerogel, and finally calcinate the obtained xerogel at 800-1200°C for 2-4 hours to obtain a CoTa 2 O 6 sensitive electrode material; where CoCl 2 6H 2 O and Ta 2 O The molar ratio of 5 is 1:1, and the molar ratio of citric acid and Ta 2 O 5 is 2-5:1.
本发明所述的NO2传感器的制备步骤如下: NO of the present invention The preparation steps of the sensor are as follows:
(1)制作Pt参考电极:在YSZ基板上表面的一端使用Pt浆制作15~20μm 厚的Pt参考电极,同时将一根Pt丝对折后粘在参考电极中间位置上作为电极引线,然后将YSZ基板在90~120℃条件下烘烤1~2小时,再将YSZ基板在 1000~1200℃下煅烧1~2小时,排除铂浆中的松油醇,最后降至室温;(1) Making a Pt reference electrode: Use Pt paste on one end of the upper surface of the YSZ substrate to make a 15-20 μm thick Pt reference electrode, and at the same time fold a Pt wire in half and stick it to the middle of the reference electrode as an electrode lead, and then connect the YSZ The substrate is baked at 90-120°C for 1-2 hours, and then the YSZ substrate is calcined at 1000-1200°C for 1-2 hours to remove terpineol in the platinum slurry, and finally lower to room temperature;
(2)制作CoTa2O6敏感电极:将CoTa2O6敏感电极材料用去离子水调成浆料,质量浓度为2~20%;将该浆料在与参考电极对称的YSZ基板上表面的另一端连接铂丝的铂点上制备20~30μm厚的敏感电极;(2) Make a CoTa 2 O 6 sensitive electrode: adjust the CoTa 2 O 6 sensitive electrode material into a slurry with deionized water, with a mass concentration of 2 to 20%; place the slurry on the upper surface of the YSZ substrate symmetrical to the reference electrode A sensitive electrode with a thickness of 20-30 μm is prepared on the platinum point connected to the other end of the platinum wire;
(3)将上述制备有参考电极和敏感电极的YSZ基板在800~1000℃下煅烧 1~3小时;优选的高温煅烧时的升温速率为1~2℃/min;(3) Calcining the above-mentioned YSZ substrate prepared with the reference electrode and the sensitive electrode at 800-1000°C for 1-3 hours; the preferred heating rate during high-temperature calcination is 1-2°C/min;
(4)制备无机粘合剂:量取水玻璃(Na2SiO3·9H2O)2~4mL,并称取Al2O3粉体0.7~1.0g,将水玻璃与Al2O3粉体混合并搅拌均匀,制得所需无机粘合剂;(4) Preparation of inorganic binder: Measure 2-4 mL of water glass (Na 2 SiO 3 ·9H 2 O), weigh 0.7-1.0 g of Al 2 O 3 powder, mix water glass and Al 2 O 3 powder Mix and stir evenly to obtain the desired inorganic binder;
(5)使用无机粘合剂将YSZ基板下表面和带有Pt加热电极的Al2O3陶瓷板粘结在一起; ( 5) Use an inorganic adhesive to bond the lower surface of the YSZ substrate and the Al2O3 ceramic plate with a Pt heating electrode;
其中,带有Pt加热电极的Al2O3陶瓷板是在Al2O3陶瓷板上通过丝网印刷 Pt得到,带有Pt加热电极的Al2O3陶瓷板一同作为器件的加热板使用;Among them, the Al 2 O 3 ceramic plate with Pt heating electrode is obtained by screen printing Pt on the Al 2 O 3 ceramic plate, and the Al 2 O 3 ceramic plate with Pt heating electrode is used together as the heating plate of the device;
(6)将粘合好的器件进行焊接、封装,从而制备得到本发明所述的基于YSZ 和CoTa2O6敏感电极的混成电位型NO2传感器。(6) Welding and packaging the bonded devices, so as to prepare the hybrid potential NO 2 sensor based on YSZ and CoTa 2 O 6 sensitive electrodes of the present invention.
本发明以YSZ作为离子导电层,利用具有高电化学催化活性的CoTa2O6复合氧化物材料为敏感电极,通过不同煅烧温度(800℃~1200℃)来改变敏感电极的微观形貌,并分别构筑成传感器件,通过对比在高温下对NO2的响应值大小,获得具有更高敏感性能的器件。In the present invention, YSZ is used as the ion-conducting layer, CoTa 2 O 6 composite oxide material with high electrochemical catalytic activity is used as the sensitive electrode, and the microscopic morphology of the sensitive electrode is changed by different calcination temperatures (800°C-1200°C), and Construct sensor devices separately, and obtain devices with higher sensitivity performance by comparing the response value to NO 2 at high temperature.
本发明的优点:Advantages of the present invention:
(1)传感器利用典型的固体电解质——稳定氧化锆(YSZ),具有良好的热稳定性和化学稳定性,可在严酷的环境中检测NO2;(1) The sensor uses a typical solid electrolyte - stabilized zirconia (YSZ), which has good thermal and chemical stability and can detect NO 2 in harsh environments;
(2)采用溶胶-凝胶法制备高性能复合氧化物CoTa2O6作为传感器敏感电极,制备方法简单,利于批量化的工业化生产。(2) The high-performance composite oxide CoTa 2 O 6 was prepared by the sol-gel method as the sensitive electrode of the sensor, the preparation method is simple, and it is conducive to mass industrial production.
(3)通过改变不同的煅烧温度(800℃~1200℃),获得具有不同孔道结构的敏感电极层,从而优化敏感电极的微观结构,通过不同煅烧温度敏感电极材料构筑的传感器性能对比发现,1000℃煅烧CoTa2O6为敏感电极的YSZ基混成电位型器件在高温下对NO2表现出了最高的响应,且具有较低的检测下限、很好的灵敏度、选择性、重复性、耐湿性和稳定性,在汽车尾气监测方面具有潜在的应用前景。(3) By changing different calcination temperatures (800°C to 1200°C), sensitive electrode layers with different pore structures are obtained, thereby optimizing the microstructure of the sensitive electrodes. By comparing the performance of sensors constructed with different calcination temperature-sensitive electrode materials, it is found that 1000 The YSZ-based hybrid potential device with calcined CoTa 2 O 6 as the sensitive electrode shows the highest response to NO 2 at high temperature, and has a lower detection limit, good sensitivity, selectivity, repeatability, and humidity resistance and stability, and has potential application prospects in automobile exhaust monitoring.
附图说明Description of drawings
图1:本发明所述的YSZ基混成电位型NO2传感器(a)和加热板(b)的结构示意图。Figure 1: Schematic diagram of the structure of the YSZ-based hybrid potentiometric NO sensor (a) and heating plate (b) according to the present invention.
各部分名称:CoTa2O6敏感电极1、YSZ基板2、Pt参考电极3、Pt丝4、 Pt点5、带有Pt加热电极的Al2O3陶瓷板6、无机粘合剂7。Names of each part: CoTa 2 O 6 sensitive electrode 1, YSZ substrate 2, Pt reference electrode 3, Pt wire 4, Pt point 5, Al 2 O 3 ceramic plate with Pt heating electrode 6, inorganic binder 7.
图2:本发明所制得的三种敏感电极材料的XRD图。(其中,横坐标为角度,纵坐标为强度)Figure 2: XRD patterns of three sensitive electrode materials prepared in the present invention. (Wherein, the abscissa is the angle, and the ordinate is the intensity)
如图2所示,为不同煅烧温度下CoTa2O6敏感电极材料的XRD图,通过与标准谱图对比,合成的三种敏感电极材料均与标准卡片JCPDS(File No. 84-2063)一致,为四方晶系三金红石结构复合氧化物。表明我们发明制备的敏感电极材料为CoTa2O6材料。As shown in Figure 2, it is the XRD patterns of CoTa 2 O 6 sensitive electrode materials at different calcination temperatures. By comparing with the standard spectra, the three synthesized sensitive electrode materials are all consistent with the standard card JCPDS (File No. 84-2063) , is a tetragonal three-rutile structure composite oxide. It shows that the sensitive electrode material prepared by our invention is CoTa 2 O 6 material.
图3:本发明所制备的不同煅烧温度下的敏感电极材料的SEM图。Figure 3: SEM images of sensitive electrode materials prepared by the present invention at different calcination temperatures.
如图3所示,a:800℃,b:1000℃,c:1200℃煅烧的CoTa2O6敏感电极材料的SEM图,从图中可以看出,随着煅烧温度的升高,颗粒大小和孔道大小逐渐增大,由此可以看出,改变敏感材料的煅烧温度能够改变敏感电极的微观形貌,电极的多孔性利于气体的扩散。As shown in Figure 3, a: 800°C, b: 1000°C, c: SEM images of CoTa 2 O 6 sensitive electrode materials calcined at 1200°C, it can be seen from the figure that with the increase of calcination temperature, the particle size It can be seen that changing the calcination temperature of the sensitive material can change the microscopic morphology of the sensitive electrode, and the porosity of the electrode is conducive to the diffusion of gas.
图4:分别利用800、1000和1200℃煅烧的CoTa2O6作为敏感电极材料构筑的传感器对100ppm NO2的响应值大小对比。(其中,横坐标为电势差值,纵坐标为不同的电极材料,工作温度为650度)Figure 4: Comparison of the response value of the sensor to 100ppm NO 2 using CoTa 2 O 6 calcined at 800, 1000 and 1200°C as the sensitive electrode material. (The abscissa is the potential difference, the ordinate is different electrode materials, and the working temperature is 650 degrees)
器件的敏感性能测试采用静态测试方法(具体过程如实施例中所示),传感器的响应值用ΔV=VNO2-V空气表示。如图4所示,为实施例1、2、3所制作的器件对100ppm NO2的响应值对比图,从图中可以看出,实施例1、2、3所制得的器件对100ppm NO2的响应值分别为93、62和54mV。由此可见,1000℃煅烧的CoTa2O6作为敏感电极材料的YSZ基混成电位型NO2传感器具有最高的响应值。The sensitive performance test of the device adopts a static test method (the specific process is shown in the embodiment), and the response value of the sensor is represented by ΔV=V NO2 −V air . As shown in Figure 4, it is a comparison chart of the response values of the devices made in Examples 1, 2, and 3 to 100ppm NO 2 . The responses for 2 are 93, 62 and 54mV, respectively. It can be seen that the YSZ-based hybrid potentiometric NO sensor with CoTa 2 O 6 calcined at 1000 °C as the sensitive electrode material has the highest response value.
图5:利用1000℃煅烧的CoTa2O6作为敏感电极材料的传感器对NO2的灵敏度曲线。(其中,横坐标为NO2浓度,纵坐标为电势差值,工作温度为650 度,插图为当前传感器对0.5~5ppm NO2的灵敏度曲线图)。Figure 5: Sensitivity curves of the sensor to NO2 using CoTa2O6 calcined at 1000 °C as the sensitive electrode material. (Wherein, the abscissa is the NO 2 concentration, the ordinate is the potential difference, the working temperature is 650 degrees, and the inset is the sensitivity curve of the current sensor to 0.5-5ppm NO 2 ).
传感器的灵敏度为传感器在一定测量浓度范围内的响应值与相应的浓度对数的线性关系的斜率。如图5所示,为利用1000℃煅烧的CoTa2O6作为敏感电极材料的传感器对NO2的灵敏度曲线图,从图中可以看出,器件对5~500ppm NO2的灵敏度为80mV/decade,最低可以检测500ppb的NO2,此传感器表现出了很好的灵敏度和很低的检测下限。The sensitivity of the sensor is the slope of the linear relationship between the sensor's response value and the corresponding concentration logarithm within a certain measurement concentration range. As shown in Figure 5, it is the sensitivity curve of the sensor to NO 2 using CoTa 2 O 6 calcined at 1000°C as the sensitive electrode material. It can be seen from the figure that the sensitivity of the device to 5-500ppm NO 2 is 80mV/decade , the minimum can detect 500ppb NO 2 , this sensor shows good sensitivity and low detection limit.
图6:利用1000℃煅烧的CoTa2O6作为敏感电极材料的传感器的选择性。 (其中,横坐标为电势差值,纵坐标为测试气体,插图为对乙烯、甲烷和氢气的放大图) Figure 6: Selectivity of the sensor utilizing CoTa2O6 calcined at 1000 °C as the sensitive electrode material. (Wherein, the abscissa is the potential difference, the ordinate is the test gas, and the illustration is an enlarged view of ethylene, methane and hydrogen)
如图6所示,为1000℃煅烧的CoTa2O6作为敏感电极材料的传感器的选择性,从图中可以看出,器件对50和100ppm NO2表现出了最高的响应值,对其他气体的响应值均较低,由此可见,器件具有很好的选择性。As shown in Figure 6, the selectivity of the sensor for 1000°C calcined CoTa2O6 as a sensitive electrode material, it can be seen from the figure that the device exhibited the highest response value for 50 and 100ppm NO2 , and for other gases The response values are all low, which shows that the device has good selectivity.
图7:以1000℃煅烧的CoTa2O6作为敏感电极材料的传感器的湿度影响。 (其中,横坐标为相对湿度,纵坐标为电势差值)Figure 7: Humidity effect of the sensor with CoTa2O6 calcined at 1000 °C as the sensitive electrode material. (Wherein, the abscissa is the relative humidity, and the ordinate is the potential difference)
传感器湿度测试是指器件在不同湿度下(20~98%湿度范围内)对100ppm NO2的响应值变化。如图7所示,为以1000℃煅烧的CoTa2O6作为敏感电极材料的器件在不同湿度下对100ppm NO2的响应,从图中可以看出,器件在 20~98%的湿度范围内,对100ppm NO2的响应变化小于10.7%,表明了传感器具有很好的耐湿性。The sensor humidity test refers to the change of the response value of the device to 100ppm NO2 under different humidity (in the range of 20-98% humidity). As shown in Figure 7, it is the response of the device with CoTa 2 O 6 calcined at 1000°C as the sensitive electrode material to 100ppm NO 2 at different humidity. It can be seen from the figure that the device is in the humidity range of 20-98%. , the change in response to 100ppm NO2 is less than 10.7%, indicating that the sensor has good humidity resistance.
图8:以1000℃煅烧的CoTa2O6作为敏感电极材料的传感器的稳定性。(其中,横坐标为时间,纵坐标分别为电势差值和电势差改变量)Figure 8: Stability of the sensor with CoTa2O6 calcined at 1000 ° C as the sensitive electrode material. (Wherein, the abscissa is time, and the ordinate is the potential difference value and potential difference change amount respectively)
器件的稳定性测试是将传感器保持在650度的工作温度下,经过20天持续高温条件下测试对50、100和200ppm NO2的响应值作为标准,测试过程中每隔两天取一个点,来记录20天内的变化。如图8所示,为以1000℃煅烧的 CoTa2O6作为敏感电极材料的器件在20天内的稳定性测试,从图中可以看出,器件在20天内,器件对50、100和200ppm NO2响应值的波动范围小于10.2%,表明器件具有很好的稳定性。The stability test of the device is to keep the sensor at a working temperature of 650 degrees. After 20 days of continuous high temperature testing, the response values to 50, 100 and 200 ppm NO 2 are used as standards. During the test, a point is taken every two days. to record changes over a 20-day period. As shown in Figure 8, it is the stability test of the device using CoTa 2 O 6 calcined at 1000°C as the sensitive electrode material within 20 days. 2 The fluctuation range of the response value is less than 10.2%, indicating that the device has good stability.
具体实施方式Detailed ways
实施例1:Example 1:
用溶胶-凝胶法制备CoTa2O6材料,将制得的CoTa2O6进行1000℃煅烧作为敏感电极材料制作YSZ基混成电位型传感器,并测试传感器对NO2的气敏性能,具体过程如下:The CoTa 2 O 6 material was prepared by the sol-gel method, and the prepared CoTa 2 O 6 was calcined at 1000°C as a sensitive electrode material to make a YSZ-based hybrid potentiometric sensor, and the gas-sensing performance of the sensor to NO 2 was tested. The specific process as follows:
1.制作Pt参考电极:在长宽2×2mm、厚度0.2mm的YSZ基板上表面的一端使用Pt浆制作一层0.5mm×2mm大小、15μm厚的Pt参考电极,同时用一根Pt丝对折后粘在参考电极中间位置上引出电极引线;然后将YSZ基板在 100℃条件下烘烤1.5小时,再将YSZ基板在1000℃下煅烧1小时,从而排除铂浆中的松油醇,最后降至室温。1. Make a Pt reference electrode: use Pt slurry to make a Pt reference electrode with a size of 0.5mm×2mm and a thickness of 15μm on one end of the upper surface of the YSZ substrate with a length and width of 2×2mm and a thickness of 0.2mm, and fold it in half with a Pt wire Then stick the electrode lead wire on the middle position of the reference electrode; then bake the YSZ substrate at 100°C for 1.5 hours, then calcinate the YSZ substrate at 1000°C for 1 hour, so as to eliminate the terpineol in the platinum paste, and finally reduce the to room temperature.
2.制作CoTa2O6敏感电极:首先用溶胶-凝胶法制备CoTa2O6材料。称取 1mmolTa2O5,将其溶解于50mL的氢氟酸的水溶液中(质量分数为40%)中,在80℃下搅拌24小时;将氨水(质量浓度为25%)逐滴滴加到以上溶液中,调节pH值到9,陈化14小时,经过滤、洗涤到中性,得到白色沉淀;将以上白色沉淀溶解于0.6304g柠檬酸和10mL水配成的水溶液中,在80℃下继续搅拌2小时,加入0.2379g CoCl2·6H2O继续搅拌至凝胶。将得到的凝胶状物质在80℃真空干燥箱中烘干12小时得到干凝胶,最后在马弗炉中1000℃条件下煅烧2小时,得到0.465g CoTa2O6敏感电极材料。2. Fabrication of CoTa 2 O 6 sensitive electrodes: First, CoTa 2 O 6 materials were prepared by sol-gel method. Weigh 1mmolTa 2 O 5 , dissolve it in 50mL of hydrofluoric acid aqueous solution (mass fraction is 40%), stir at 80°C for 24 hours; ammoniacal water (mass concentration is 25%) is added dropwise to In the above solution, adjust the pH value to 9, age for 14 hours, filter and wash to neutrality, and obtain a white precipitate; dissolve the above white precipitate in an aqueous solution made of 0.6304g citric acid and 10mL water, at 80°C Stirring was continued for 2 hours, and 0.2379 g of CoCl 2 ·6H 2 O was added and stirring was continued until gel. The obtained gel-like substance was dried in a vacuum oven at 80° C. for 12 hours to obtain a xerogel, and finally calcined in a muffle furnace at 1000° C. for 2 hours to obtain 0.465 g of CoTa 2 O 6 sensitive electrode material.
取5mg CoTa2O6粉末用100mg去离子水调成浆料,将CoTa2O6浆料在与参考电极对称的YSZ基板上表面的另一端连接铂丝的铂点上涂覆一层 0.5mm×2mm大小、20μm厚的敏感电极,同样用一根铂丝对折后粘在敏感电极上引出电极引线。Take 5mg of CoTa 2 O 6 powder and adjust it with 100 mg of deionized water to make a slurry, and coat the CoTa 2 O 6 slurry with a layer of 0.5mm The sensitive electrode with a size of ×2mm and a thickness of 20μm is also folded in half with a platinum wire and glued to the sensitive electrode to lead out the electrode lead.
将制作好的带有参考电极和敏感电极的YSZ基板以2℃/min的升温速率升温至800℃并保持2h后降至室温。The prepared YSZ substrate with the reference electrode and the sensitive electrode was heated to 800°C at a heating rate of 2°C/min and kept for 2h before cooling down to room temperature.
3.粘结具有加热电极的陶瓷板。使用无机粘合剂(Al2O3和水玻璃 Na2SiO3·9H2O,质量约比5:1配制)将YSZ基板的下表面(未涂覆电极的一侧)与同样尺寸的带有Pt加热电极的Al2O3陶瓷板(长宽2×2mm、厚度0.2mm) 进行粘结;3. Bonding ceramic plates with heating electrodes. Use an inorganic binder (Al 2 O 3 and water glass Na 2 SiO 3 9H 2 O, prepared in a mass ratio of about 5:1) to bond the lower surface of the YSZ substrate (the side that is not coated with electrodes) with a tape of the same size Al 2 O 3 ceramic plates (length and width 2×2mm, thickness 0.2mm) with Pt heating electrodes are bonded;
4.器件焊接、封装。将器件焊接在六角管座上,套上防护罩,制作完成混成电位型NO2传感器。4. Device welding and packaging. Weld the device on the hexagonal socket, put on the protective cover, and complete the hybrid potential NO 2 sensor.
实施例2:Example 2:
以800℃煅烧的CoTa2O6复合材料作为敏感电极材料,制作NO2传感器,其制作过程为:The CoTa 2 O 6 composite material calcined at 800°C was used as the sensitive electrode material to fabricate the NO 2 sensor. The fabrication process is as follows:
800℃煅烧的CoTa2O6敏感电极材料制备过程和器件制作过程与实施例1 相同。The preparation process of the CoTa 2 O 6 sensitive electrode material calcined at 800°C and the device fabrication process are the same as those in Example 1.
实施例3:Example 3:
以1200℃煅烧的CoTa2O6复合材料作为敏感电极材料,制作NO2传感器,其制作过程为:The CoTa 2 O 6 composite material calcined at 1200°C is used as the sensitive electrode material to make the NO 2 sensor, and the manufacturing process is as follows:
1200℃煅烧的CoTa2O6敏感电极材料制备过程和器件制作过程与实施例1 相同。The preparation process of the CoTa 2 O 6 sensitive electrode material calcined at 1200°C and the device fabrication process are the same as those in Example 1.
将传感器连接在Rigol信号测试仪上,将传感器置于空气、500ppb NO2、 1ppm NO2、2ppm NO2、5ppm NO2、10ppm NO2、20ppm NO2、50ppm NO2、 100ppm NO2、200ppm NO2、300ppmNO2和500ppm NO2的气氛中进行电压信号测试。器件的测试方法采用传统的静态测试法,具体过程如下:Connect the sensor to the Rigol signal tester, place the sensor in air, 500ppb NO 2 , 1ppm NO 2 , 2ppm NO 2 , 5ppm NO 2 , 10ppm NO 2 , 20ppm NO 2 , 50ppm NO 2 , 100ppm NO 2 , 200ppm NO 2 , 300ppm NO 2 and 500ppm NO 2 atmosphere for voltage signal test. The test method of the device adopts the traditional static test method, and the specific process is as follows:
1.将传感器连接在Rigol信号测试仪上,器件置于充满空气容积为1L的测试瓶中达到稳定,即为器件在空气中的电动势值(V空气)。1. Connect the sensor to the Rigol signal tester, and place the device in a test bottle filled with air with a volume of 1L to achieve stability, which is the electromotive force value ( Vair ) of the device in air.
2.将传感器迅速转移至装有待测浓度NO2气体的测试瓶中,直到响应信号达到稳定,即为器件在NO2中的电动势值(VNO2)。2. Quickly transfer the sensor to a test bottle containing NO 2 gas at the concentration to be measured, until the response signal reaches a stability, which is the electromotive force value (V NO2 ) of the device in NO 2 .
3.将器件重新转移回空气瓶中,直到达到稳定,器件完成一次响应恢复过程。器件在NO2和空气中的电动势差值(ΔV=VNO2-V空气)即为器件对该浓度NO2的响应值。传感器在一定测量浓度范围内的响应值与相应的浓度对数的线性关系的斜率即为该传感器的灵敏度。3. Transfer the device back to the air bottle until it reaches a stable state, and the device completes a response recovery process. The electromotive force difference (ΔV=V NO2 -V air ) of the device in NO 2 and air is the response value of the device to the concentration of NO 2 . The slope of the linear relationship between the response value of the sensor in a certain measurement concentration range and the corresponding concentration logarithm is the sensitivity of the sensor.
表1中列出了分别以800、1000和1200℃煅烧的CoTa2O6为敏感电极的 YSZ基混成电位型传感器对100ppm NO2的响应值。从表中可以看出,以 1000℃煅烧的CoTa2O6为敏感电极的器件表现出了最高的响应值,为93mV。Table 1 lists the response values of YSZ-based hybrid potentiometric sensors to 100ppm NO 2 using CoTa 2 O 6 calcined at 800, 1000 and 1200°C as sensitive electrodes. It can be seen from the table that the device with CoTa 2 O 6 calcined at 1000°C as the sensitive electrode exhibited the highest response value, which was 93mV.
表2中列出了以1000℃煅烧的CoTa2O6为敏感电极材料制作的YSZ基混成电位型传感器在不同浓度NO2气氛中的电动势和在空气中的电动势的差值随 NO2浓度的变化值。从表中可以看到,器件的灵敏度(斜率)为80mV/decade。由此可见,我们开发的1000℃煅烧的新型CoTa2O6敏感电极材料构成的器件对 NO2表现出了很好的敏感特性,得到了具有高灵敏度的YSZ基混成电位型NO2传感器。Table 2 lists the electromotive force of the YSZ-based hybrid potentiometric sensor made of CoTa 2 O 6 calcined at 1000°C as the sensitive electrode material in the atmosphere of different concentrations of NO 2 and the difference of the electromotive force in the air with the concentration of NO 2 change value. As can be seen from the table, the sensitivity (slope) of the device is 80mV/decade. It can be seen that the device composed of the new CoTa 2 O 6 sensitive electrode material calcined at 1000 ℃ developed by us showed good sensitivity to NO 2 , and a YSZ-based hybrid potentiometric NO 2 sensor with high sensitivity was obtained.
表1以800、1000和1200℃煅烧的CoTa2O6为敏感电极材料的传感器对100ppm NO2的响应值对比Table 1 Comparison of the response values of sensors to 100ppm NO 2 using CoTa 2 O 6 calcined at 800, 1000 and 1200 °C as sensitive electrode materials
表2以1000℃煅烧的CoTa2O6为敏感电极的器件的ΔV随NO2浓度的变化Table 2 Variation of ΔV with NO concentration for devices using CoTa 2 O 6 calcined at 1000°C as sensitive electrodes
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