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CN108226256A - With CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine sensor and preparation method thereof - Google Patents

With CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine sensor and preparation method thereof Download PDF

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CN108226256A
CN108226256A CN201810013685.1A CN201810013685A CN108226256A CN 108226256 A CN108226256 A CN 108226256A CN 201810013685 A CN201810013685 A CN 201810013685A CN 108226256 A CN108226256 A CN 108226256A
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卢革宇
刘方猛
王静
闫旭
梁喜双
高原
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Jilin University
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Abstract

一种以CoMoO4为敏感电极的稳定氧化锆基混成电位型三乙胺传感器及其制备方法,属于气体传感器技术领域。传感器依次由带有Pt加热电极的Al2O3陶瓷板、稳定氧化锆基板、Pt参考电极和CoMoO4敏感电极组成,CoMoO4敏感电极材料通过水热法制备;参考电极和敏感电极彼此分立且对称地制备在稳定氧化锆基板上表面的两端,稳定氧化锆基板下表面与带有Pt加热电极的Al2O3陶瓷板粘结在一起。本发明以稳定氧化锆作为离子导电层,利用具有高电化学催化活性的CoMoO4复合氧化物材料为敏感电极,通过不同煅烧温度(800℃~1100℃)来改变敏感电极层的微观形貌,达到提高三乙胺敏感特性的目的。

A stable zirconia-based mixed potential triethylamine sensor with CoMoO4 as a sensitive electrode and a preparation method thereof belong to the technical field of gas sensors. The sensor is sequentially composed of an Al2O3 ceramic plate with a Pt heating electrode, a stabilized zirconia substrate , a Pt reference electrode, and a CoMoO4 sensitive electrode material prepared by a hydrothermal method; the reference electrode and the sensitive electrode are separated from each other and Both ends of the upper surface of the stabilized zirconia substrate are symmetrically prepared, and the lower surface of the stabilized zirconia substrate is bonded with an Al 2 O 3 ceramic plate with a Pt heating electrode. In the present invention, stable zirconia is used as the ion-conducting layer, CoMoO 4 composite oxide material with high electrochemical catalytic activity is used as the sensitive electrode, and the microscopic morphology of the sensitive electrode layer is changed by different calcination temperatures (800°C-1100°C). Reach the purpose of improving the sensitivity characteristic of triethylamine.

Description

以CoMoO4为敏感电极的稳定氧化锆基混成电位型三乙胺传感 器及其制备方法Stable Zirconia-Based Hybrid Potentiometric Triethylamine Sensing Using CoMoO4 as Sensitive Electrode device and its preparation method

技术领域technical field

本发明属于气体传感器技术领域,具体涉及一种以CoMoO4为敏感电极的稳定氧化锆基混成电位型三乙胺(TEA)传感器及其制备方法,其主要用于挥发性有机胺的快速检测。The invention belongs to the technical field of gas sensors, and in particular relates to a stable zirconia-based mixed potential triethylamine (TEA) sensor with CoMoO4 as a sensitive electrode and a preparation method thereof, which is mainly used for the rapid detection of volatile organic amines.

背景技术Background technique

三乙胺(TEA)是最重要的挥发性有机胺之一,具有无色透明、易燃、易爆、剧毒、刺激性强的特点,已被广泛应用于工业生产过程,包括有机溶剂、阻聚剂、防腐剂、催化剂、合成染料等。同时,TEA也可能在死鱼和海洋生物的腐化过程中产生,而且气体浓度随着死亡程度的恶化而显着增加。更为重要的是,它会引起多种有害健康的影响,诸如:眼睛刺激、呼吸问题、肺水肿,甚至死亡。因此,开发具有高灵敏度、高选择性和高稳定性的实时、快速、便携和低成本的TEA 气体传感器具有至关重要的意义。Triethylamine (TEA) is one of the most important volatile organic amines. It is colorless, transparent, flammable, explosive, highly toxic, and highly irritating. It has been widely used in industrial production processes, including organic solvents, Inhibitors, preservatives, catalysts, synthetic dyes, etc. Meanwhile, TEA may also be produced during the decay of dead fish and marine organisms, and the gas concentration increases significantly with the degree of death. What's more, it can cause a variety of harmful health effects such as: eye irritation, breathing problems, pulmonary edema, and even death. Therefore, it is of great significance to develop real-time, fast, portable and low-cost TEA gas sensors with high sensitivity, high selectivity and high stability.

迄今为止,基于SnO2、ZnO、α-Fe2O3、α-MoO3、Zn2SnO4和NiFe2O4的金属氧化物半导体(MOS)型TEA传感器由于制作成本低、便携性好、传感特性好、灵敏度高等优点,已经被广泛研究。但大多数MOS气体传感器缺乏快速响应和选择性。相比之下,固态电解质型气体传感器由于对各种危险、易燃、易爆气体具有优异的传感性能而备受关注。其中,基于氧化钇稳定氧化锆(YSZ)电解质的混合电位型气体传感器由于其具有更好的环境稳定性和优异的选择性而被认为是最有潜力的备选器件。到目前为止,已经开发出了多种YSZ气体传感器,用于检测NO2、NH3、SO2、H2S、VOCs和碳氢化合物。然而,用于实现快速检测TEA的基于混成电位模型的YSZ基气体传感器尚未见报道。So far, metal-oxide-semiconductor (MOS) TEA sensors based on SnO 2 , ZnO, α-Fe 2 O 3 , α-MoO 3 , Zn 2 SnO 4 , and NiFe 2 O 4 have been used due to their low fabrication cost, good portability, The advantages of good sensing characteristics and high sensitivity have been extensively studied. But most MOS gas sensors lack fast response and selectivity. In contrast, solid-state electrolyte gas sensors have attracted much attention due to their excellent sensing performance for various dangerous, flammable, and explosive gases. Among them, mixed-potential gas sensors based on yttria-stabilized zirconia (YSZ) electrolytes are considered to be the most potential candidate devices due to their better environmental stability and excellent selectivity. So far, a variety of YSZ gas sensors have been developed for the detection of NO 2 , NH 3 , SO 2 , H 2 S, VOCs and hydrocarbons. However, YSZ-based gas sensors based on the hybrid potential model for realizing rapid detection of TEA have not been reported yet.

稳定氧化锆基混成电位型气体传感器的敏感机理是:气氛中待测气体TEA 通过敏感电极层向三相反应界面扩散,在扩散过程中由于发生反应(1),待测气体TEA的浓度会逐渐降低,氧化物敏感电极的多孔性决定待测气体TEA浓度的降低程度。在气体/YSZ导电层/敏感电极的三相界面处,同时发生电化学还原反应和电化学氧化反应,反应(2)和(3)构成一个局部电池,当两者反应速率相等时,反应达到平衡,在敏感电极上形成混成电位,它与参考电极的电位差作为传感器的检测信号。检测信号大小由电化学反应(2)和(3)的速率来决定,而反应速率取决于敏感电极材料的电化学和化学催化活性、电极材料微观结构 (比如材料的多孔性、粒度、形貌等)。因此,开发可用于TEA检测的高电化学催化活性的敏感电极材料来构建高性能的TEA气体传感器非常必要。The sensitive mechanism of the stable zirconia-based mixed potential gas sensor is: the TEA gas to be measured in the atmosphere diffuses to the three-phase reaction interface through the sensitive electrode layer, and the concentration of the TEA to be measured will gradually increase due to the reaction (1) during the diffusion process. The porosity of the oxide sensitive electrode determines the degree of reduction of the TEA concentration of the gas to be measured. At the three-phase interface of gas/YSZ conductive layer/sensitive electrode, electrochemical reduction reaction and electrochemical oxidation reaction occur simultaneously, reactions (2) and (3) constitute a local battery, when the two reaction rates are equal, the reaction reaches Balanced, a mixed potential is formed on the sensitive electrode, and the potential difference between it and the reference electrode is used as the detection signal of the sensor. The magnitude of the detection signal is determined by the rate of electrochemical reactions (2) and (3), and the reaction rate depends on the electrochemical and chemical catalytic activity of the sensitive electrode material, the microstructure of the electrode material (such as the porosity, particle size, and morphology of the material). Wait). Therefore, it is necessary to develop sensitive electrode materials with high electrochemical catalytic activity for TEA detection to construct high-performance TEA gas sensors.

反应式如下:The reaction formula is as follows:

2C6H15N+39/2O2→12CO2+N2+15H2O (1)2C 6 H 15 N+39/2O 2 →12CO 2 +N 2 +15H 2 O (1)

39/2O2+78e-→39O2- (2)39/2O 2 +78e - → 39O 2- (2)

2C6H15N+39O2-→12CO2+N2+15H2O+78e- (3)2C 6 H 15 N+39O 2- → 12CO 2 +N 2 +15H 2 O+78e - (3)

发明内容Contents of the invention

本发明的目的是提供一种以CoMoO4为敏感电极的稳定氧化锆基混成电位型三乙胺传感器及其制备方法,以实现快速检测三乙胺的需要,并有效提高传感器灵敏度、降低检测下限等性能,促进这种传感器在挥发性有机胺检测领域的实用化。本发明所得到的传感器除了具有快速响应速度和高灵敏度外,还具有较低的检测下限、很好的选择性、耐湿性和稳定性。The purpose of the present invention is to provide a stable zirconia-based mixed potentiometric triethylamine sensor with CoMoO4 as a sensitive electrode and its preparation method, in order to realize the needs of rapid detection of triethylamine, and effectively improve the sensitivity of the sensor and reduce the lower limit of detection And other properties, promote the practical application of this sensor in the field of volatile organic amine detection. In addition to fast response speed and high sensitivity, the sensor obtained by the invention also has lower detection limit, good selectivity, moisture resistance and stability.

本发明所涉及的超快响应的三乙胺传感器是基于稳定氧化锆(YSZ)固体电解质和CoMoO4复合氧化物敏感电极所构建的新型混成电位型三乙胺气体传感器,YSZ(Y2O3摩尔掺杂浓度为8%的ZrO2)作为离子导电层。The ultra-fast response triethylamine sensor involved in the present invention is a novel mixed potential triethylamine gas sensor constructed on the basis of a stable zirconia (YSZ) solid electrolyte and a CoMoO 4 composite oxide sensitive electrode, YSZ (Y 2 O 3 ZrO 2 with a molar doping concentration of 8% was used as the ion-conducting layer.

本发明所述的稳定氧化锆基混成电位型三乙胺传感器,如图1所示,从下至上依次由带有Pt加热电极的Al2O3陶瓷板、稳定氧化锆基板、Pt参考电极和敏感电极组成;参考电极和敏感电极彼此分立且对称地制备在稳定氧化锆基板上表面的两端,稳定氧化锆基板下表面与带有Pt加热电极的Al2O3陶瓷板粘结在一起;敏感电极材料为CoMoO4,其由如下方法制备得到:The stabilized zirconia-based mixed potentiometric triethylamine sensor of the present invention, as shown in Figure 1, consists of an Al2O3 ceramic plate with a Pt heating electrode, a stabilized zirconia substrate , a Pt reference electrode and The composition of the sensitive electrode; the reference electrode and the sensitive electrode are separated from each other and symmetrically prepared at both ends of the upper surface of the stabilized zirconia substrate, and the lower surface of the stabilized zirconia substrate is bonded to an Al 2 O 3 ceramic plate with a Pt heating electrode; The sensitive electrode material is CoMoO 4 , which is prepared by the following method:

CoMoO4敏感电极材料通过简单的水热法合成。在磁力搅拌下,将0.5mmol Co(NO3)2·6H2O和0.5mmol Na2MoO4·2H2O溶于30~50mL去离子水、乙醇和乙二醇的混合溶液中;然后,将得到的溶液在160~200℃条件下水热反应5~8 小时,反应产物经离心、洗涤后收集沉淀,所得沉淀在60~90℃的真空条件下干燥;最后将干燥产物分别在800~1100℃下烧结1~3h,从而得到本发明所述的 CoMoO4敏感电极材料;其中去离子水、乙醇和乙二醇的体积比为(1~2):1: (1~2)。 CoMoO4 sensitive electrode materials were synthesized by a facile hydrothermal method. Under magnetic stirring, 0.5 mmol Co(NO 3 ) 2 ·6H 2 O and 0.5 mmol Na 2 MoO 4 ·2H 2 O were dissolved in 30-50 mL of a mixed solution of deionized water, ethanol and ethylene glycol; then, The obtained solution is hydrothermally reacted at 160-200°C for 5-8 hours, the reaction product is centrifuged and washed, and the precipitate is collected, and the obtained precipitate is dried under vacuum at 60-90°C; finally, the dried product is separated at 800-1100 Sintering at °C for 1-3 hours to obtain the CoMoO 4 sensitive electrode material of the present invention; wherein the volume ratio of deionized water, ethanol and ethylene glycol is (1-2):1: (1-2).

本发明所述的三乙胺传感器的制备方法,其步骤如下:The preparation method of triethylamine sensor of the present invention, its steps are as follows:

(1)制作Pt参考电极:在YSZ基板上表面的一端使用Pt浆制作15~20μm 厚的Pt参考电极,同时将一根Pt丝对折后粘在参考电极中间位置上作为电极引线,然后将YSZ基板在90~120℃条件下烘烤1~2小时,再将YSZ基板在 1000~1100℃下烧结1~2小时,排除铂浆中的松油醇,最后降至室温;(1) Making a Pt reference electrode: Use Pt paste on one end of the upper surface of the YSZ substrate to make a 15-20 μm thick Pt reference electrode, and at the same time fold a Pt wire in half and stick it to the middle of the reference electrode as an electrode lead, and then connect the YSZ The substrate is baked at 90-120°C for 1-2 hours, and then the YSZ substrate is sintered at 1000-1100°C for 1-2 hours to remove terpineol in the platinum paste, and finally lower to room temperature;

(2)制作CoMoO4敏感电极:将CoMoO4敏感电极材料用去离子水调成浆料,质量浓度为2~20%;用CoMoO4浆料在与参考电极对称的YSZ基板上表面的另一端制备20~30μm厚的敏感电极,同样将一根铂丝对折后粘在敏感电极上作为电极引线;(2) Make a CoMoO 4 sensitive electrode: adjust the CoMoO 4 sensitive electrode material into a slurry with deionized water, with a mass concentration of 2-20%; use the CoMoO 4 slurry on the other end of the upper surface of the YSZ substrate symmetrical to the reference electrode Prepare a sensitive electrode with a thickness of 20-30 μm, and also fold a platinum wire in half and stick it on the sensitive electrode as the electrode lead;

(3)将步骤(2)制备有参考电极和敏感电极的YSZ基板在800~1000℃条件下烧结1~3小时;高温烧结时的升温速率为1~2℃/min;(3) Sintering the YSZ substrate prepared in step (2) with the reference electrode and the sensitive electrode at 800-1000°C for 1-3 hours; the heating rate during high-temperature sintering is 1-2°C/min;

(4)制备无机粘合剂:量取水玻璃(Na2SiO3·9H2O)2~4mL,并称取Al2O3粉体0.7~1.0g,将水玻璃与Al2O3粉体混合并搅拌均匀,制得无机粘合剂;(4) Preparation of inorganic binder: Measure 2-4 mL of water glass (Na 2 SiO 3 ·9H 2 O), weigh 0.7-1.0 g of Al 2 O 3 powder, mix water glass and Al 2 O 3 powder Mix and stir evenly to obtain an inorganic binder;

(5)使用无机粘合剂将YSZ基板下表面和带有Pt加热电极的Al2O3陶瓷板粘结在一起; ( 5) Use an inorganic adhesive to bond the lower surface of the YSZ substrate and the Al2O3 ceramic plate with a Pt heating electrode;

其中,带有Pt加热电极的Al2O3陶瓷板是在Al2O3陶瓷板上通过丝网印刷 Pt得到,带有Pt加热电极的Al2O3陶瓷板一同作为器件的加热板使用;Among them, the Al 2 O 3 ceramic plate with Pt heating electrode is obtained by screen printing Pt on the Al 2 O 3 ceramic plate, and the Al 2 O 3 ceramic plate with Pt heating electrode is used together as the heating plate of the device;

(6)将步骤(5)得到器件进行焊接、封装,从而得到本发明所述的以CoMoO4为敏感电极的YSZ基混成电位型三乙胺传感器。(6) Welding and packaging the device obtained in step (5), so as to obtain the YSZ-based hybrid potentiometric triethylamine sensor with CoMoO4 as the sensitive electrode of the present invention.

本发明以稳定氧化锆作为离子导电层,利用具有高电化学催化活性的 CoMoO4复合氧化物材料为敏感电极,通过不同煅烧温度(800℃~1100℃)来改变敏感电极层的微观形貌,达到提高三乙胺敏感特性的目的。In the present invention, stable zirconia is used as the ion-conducting layer, CoMoO 4 composite oxide material with high electrochemical catalytic activity is used as the sensitive electrode, and the microscopic morphology of the sensitive electrode layer is changed by different calcination temperatures (800°C-1100°C). Reach the purpose of improving the sensitivity characteristic of triethylamine.

本发明的优点:Advantages of the present invention:

(1)利用典型的固体电解质--稳定氧化锆(YSZ),具有良好的热稳定性和化学稳定性,可在复杂环境中检测三乙胺;(1) Using a typical solid electrolyte - stabilized zirconia (YSZ), which has good thermal and chemical stability, it can detect triethylamine in complex environments;

(2)采用简单水热合成方法制备高性能复合氧化物CoMoO4作为传感器敏感电极,制备方法简单,利于批量化的工业生产。(2) The high-performance composite oxide CoMoO 4 is prepared by a simple hydrothermal synthesis method as a sensor sensitive electrode, and the preparation method is simple, which is conducive to mass industrial production.

(3)通过改变材料的不同煅烧温度(800℃~1100℃),获得具有不同孔道结构的敏感电极层,从而优化敏感电极的微观结构,利于待测气体快速到达三相界面参与电化学反应,从而提高传感器的响应速度和灵敏度。(3) By changing the different calcination temperatures (800°C to 1100°C) of the material, a sensitive electrode layer with a different pore structure is obtained, thereby optimizing the microstructure of the sensitive electrode, which is beneficial for the gas to be measured to quickly reach the three-phase interface to participate in the electrochemical reaction, Thereby improving the response speed and sensitivity of the sensor.

附图说明Description of drawings

图1:本发明所述的YSZ基混成电位型三乙胺传感器的结构示意图。Figure 1: Schematic diagram of the structure of the YSZ-based hybrid potentiometric triethylamine sensor of the present invention.

各部分名称:Al2O3陶瓷板1、Pt加热电极2、无机粘合剂3、YSZ基板4、 Pt丝5、Pt参考电极6、CoMoO4敏感电极7。Names of each part: Al 2 O 3 ceramic plate 1, Pt heating electrode 2, inorganic binder 3, YSZ substrate 4, Pt wire 5, Pt reference electrode 6, CoMoO 4 sensitive electrode 7.

图2:本发明所制得的不同烧结温度CoMoO4敏感电极材料的XRD图(其中,横坐标为角度,纵坐标为强度)。Figure 2: XRD patterns of CoMoO 4 sensitive electrode materials prepared by the present invention with different sintering temperatures (wherein, the abscissa is the angle, and the ordinate is the intensity).

如图2所示,为不同烧结温度CoMoO4敏感电极材料的XRD图,通过与标准谱图对比,烧结得到的材料均与CoMoO4标准卡片JCPDS(File No.14-587) 一致。表明我们发明制备的敏感电极材料为CoMoO4材料。As shown in Figure 2, it is the XRD pattern of CoMoO 4 sensitive electrode materials at different sintering temperatures. By comparing with the standard spectrum, the sintered materials are consistent with the CoMoO 4 standard card JCPDS (File No.14-587). It shows that the sensitive electrode material prepared by our invention is CoMoO 4 material.

图3:本发明所制备的不同烧结温度下的敏感电极材料的SEM图。Figure 3: SEM images of sensitive electrode materials prepared by the present invention at different sintering temperatures.

如图3所示,a:800℃,b:1000℃,c:1100℃烧结的CoMoO4敏感电极材料的SEM图,从图中可以看出,随着烧结温度的升高,颗粒大小逐渐增大,改变敏感材料的烧结温度能够改变敏感电极的微观形貌,形成疏松多孔的结构,电极的多孔性利于气体的扩散。As shown in Figure 3, a: 800 ° C, b: 1000 ° C, c: 1100 ° C sintered SEM images of CoMoO 4 sensitive electrode materials, it can be seen from the figure that with the increase of sintering temperature, the particle size gradually increases Large, changing the sintering temperature of the sensitive material can change the microscopic morphology of the sensitive electrode, forming a loose and porous structure, and the porosity of the electrode is conducive to the diffusion of gas.

图4:利用分别在800℃、1000℃和1100℃下烧结的CoMoO4作为敏感电极材料的传感器对100ppm三乙胺的响应值对比曲线(其中,横坐标为时间,纵坐标为电势差值)。Figure 4: The response curves of sensors using CoMoO 4 sintered at 800°C, 1000°C and 1100°C as sensitive electrode materials to 100ppm triethylamine (where the abscissa is time and the ordinate is potential difference).

如图4所示,为实施例1、2、3所制作器件对100ppm三乙胺的电势差ΔV (器件的响应值用电势差ΔV表示),从图中可以看出,实施例1、2、3对100ppm 三乙胺的响应值分别为-48、-102和-58mV。由此可见,1000℃下烧结的CoMoO4作为敏感电极材料的YSZ基混成电位型三乙胺传感器具有最高的响应值。As shown in Figure 4, it is the potential difference ΔV (response value of device is expressed with potential difference ΔV) of the device made for embodiment 1,2,3 to 100ppm triethylamine, as can be seen from the figure, embodiment 1,2,3 The responses to 100 ppm triethylamine were -48, -102 and -58 mV, respectively. It can be seen that the YSZ-based hybrid potentiometric triethylamine sensor with CoMoO4 sintered at 1000 °C as the sensitive electrode material has the highest response value.

图5:利用1000℃下烧结的CoMoO4作为敏感电极材料的传感器连续响应曲线(a,b)(其中,横坐标为时间,纵坐标为电势差值。工作温度为600度)和灵敏度曲线(c)(其中,横坐标为TEA浓度,纵坐标为电势差值。工作温度为 600度)。Figure 5: Continuous response curve (a,b) of the sensor using CoMoO 4 sintered at 1000°C as a sensitive electrode material (where the abscissa is time and the ordinate is potential difference. The working temperature is 600°C) and sensitivity curve (c ) (wherein, the abscissa is the concentration of TEA, and the ordinate is the potential difference. The working temperature is 600 degrees).

如图5所示,为CoMoO4(1000℃)器件的连续响应曲线,从图中可以看出,器件对100ppm三乙胺的响应值为-102mV,响应时间为1s,最低可以检测 100ppb的三乙胺,此传感器表现出了超快的响应速度和较低的检测下限。As shown in Figure 5, it is the continuous response curve of the CoMoO 4 (1000°C) device. It can be seen from the figure that the response value of the device to 100ppm triethylamine is -102mV, the response time is 1s, and the lowest can detect 100ppb triethylamine. Ethylamine, the sensor exhibited an ultrafast response and a low detection limit.

图6:利用1000℃下烧结的CoMoO4作为敏感电极材料的传感器的选择性条形图。(其中,横坐标为电势差值,纵坐标为测试气体:从上到下分别为二氧化氮,一氧化碳,氢气,甲烷,氨气,三乙胺,丙酮,甲醛,苯,甲苯,二甲苯)Figure 6: Selectivity bar graph of the sensor utilizing CoMoO4 sintered at 1000 °C as the sensitive electrode material. (The abscissa is the potential difference, and the ordinate is the test gas: nitrogen dioxide, carbon monoxide, hydrogen, methane, ammonia, triethylamine, acetone, formaldehyde, benzene, toluene, xylene from top to bottom)

如图6所示,为CoMoO4(1000℃)器件的选择性,从图中可以看出,器件对三乙胺表现出了最大的敏感特性,其他干扰气体响应均较低,由此可见,器件具有很好的选择性。As shown in Figure 6, it is the selectivity of the CoMoO 4 (1000°C) device. It can be seen from the figure that the device shows the greatest sensitivity to triethylamine, and the response of other interfering gases is low. It can be seen that, The device has very good selectivity.

图7:利用1000℃下烧结的CoMoO4作为敏感电极材料的传感器的湿度影响曲线(其中,横坐标为相对湿度,纵坐标为电势差值)。Figure 7: Humidity influence curve of a sensor using CoMoO 4 sintered at 1000°C as a sensitive electrode material (where the abscissa is the relative humidity, and the ordinate is the potential difference).

如图7所示,为CoMoO4(1000℃)器件在不同湿度下对100ppm三乙胺的响应,从图中可以看出,器件在20~98%的湿度范围内,对100ppm三乙胺的响应变化小于6%,表明了传感器具有很好的耐湿性。As shown in Figure 7, it is the response of CoMoO 4 (1000°C) devices to 100ppm triethylamine at different humidity. The change in response is less than 6%, indicating that the sensor has good moisture resistance.

图8:利用1000℃下烧结的CoMoO4作为敏感电极材料的传感器的稳定性曲线。(其中,横坐标为时间,纵坐标分别为电势差值和电势差改变量)Figure 8: Stability curves of the sensor utilizing CoMoO4 sintered at 1000 °C as the sensitive electrode material. (Wherein, the abscissa is time, and the ordinate is the potential difference value and potential difference change amount respectively)

如图8所示,为CoMoO4(1000℃)器件在20天内的稳定性测试,从图中可以看出,器件在20天内,响应值的波动范围小于4.4%,表明次器件具有很好的稳定性。As shown in Figure 8, it is the stability test of the CoMoO 4 (1000°C) device within 20 days. It can be seen from the figure that the fluctuation range of the response value of the device within 20 days is less than 4.4%, indicating that the secondary device has a good stability.

具体实施方式Detailed ways

实施例1:Example 1:

用溶胶-凝胶法制备CoMoO4材料,将800℃烧结的CoMoO4(800℃)作为敏感电极材料制作YSZ基混成电位型三乙胺传感器,并测试传感器气敏性能,具体过程如下:The CoMoO 4 material was prepared by the sol-gel method, and CoMoO 4 (800 °C) sintered at 800 °C was used as a sensitive electrode material to fabricate a YSZ-based mixed potential type triethylamine sensor, and the gas-sensing performance of the sensor was tested. The specific process is as follows:

1.制作Pt参考电极:在长宽2×2mm、厚度0.2mm的YSZ基板上表面的一端使用Pt浆制作一层0.5mm×2mm大小、15μm厚的Pt参考电极,同时用一根Pt丝对折后粘在参考电极中间位置上引出电极引线;然后将YSZ基板在 100℃条件下烘烤1.5小时,再将YSZ基板在1000℃下烧结1小时,从而排除铂浆中的松油醇,最后降至室温。1. Make a Pt reference electrode: use Pt slurry to make a Pt reference electrode with a size of 0.5mm×2mm and a thickness of 15μm on one end of the upper surface of the YSZ substrate with a length and width of 2×2mm and a thickness of 0.2mm, and fold it in half with a Pt wire Then stick the electrode lead wire on the middle position of the reference electrode; then bake the YSZ substrate at 100°C for 1.5 hours, and then sinter the YSZ substrate at 1000°C for 1 hour, so as to eliminate the terpineol in the platinum paste, and finally reduce the to room temperature.

2.制作CoMoO4敏感电极:首先用水热合成法制备CoMoO4材料。称取 0.5mmol Co(NO3)2·6H2O和0.5mmol Na2MoO4·2H2O,将其分别溶于30mL 去离子水、乙醇和乙二醇混合溶液中(去离子水、乙醇和乙二醇的体积比为1: 1:1)。然后,将上述得到的溶液转移到50mL聚四氟乙烯衬里的不锈钢高压釜中,并在180℃条件下反应6小时。经离心、洗涤(去离子水和无水乙醇)后收集沉淀,在80℃的真空干燥箱中干燥。最后将干燥产物在800℃下烧结2h,得到CoMoO4敏感电极材料,产物质量是0.65g。2. Fabrication of CoMoO 4 sensitive electrodes: First, CoMoO 4 materials were prepared by hydrothermal synthesis. Weigh 0.5mmol Co(NO 3 ) 2 6H 2 O and 0.5mmol Na 2 MoO 4 2H 2 O and dissolve them in 30mL deionized water, ethanol and ethylene glycol mixed solution (deionized water, ethanol The volume ratio to ethylene glycol is 1: 1: 1). Then, the solution obtained above was transferred to a 50 mL polytetrafluoroethylene-lined stainless steel autoclave, and reacted at 180° C. for 6 hours. After centrifugation and washing (deionized water and absolute ethanol), the precipitate was collected and dried in a vacuum oven at 80°C. Finally, the dried product was sintered at 800 °C for 2 h to obtain a CoMoO 4 sensitive electrode material with a product mass of 0.65 g.

取5mg CoMoO4粉末用去离子水100mg调成浆料,将CoMoO4浆料在与参考电极对称的YSZ基板上表面的另一端涂覆一层0.5mm×2mm大小、20μm 厚的敏感电极,同样用一根铂丝对折后粘在敏感电极上引出电极引线。Take 5 mg of CoMoO 4 powder and make a slurry with 100 mg of deionized water, and coat the CoMoO 4 slurry on the other end of the upper surface of the YSZ substrate symmetrical to the reference electrode with a layer of sensitive electrode with a size of 0.5 mm × 2 mm and a thickness of 20 μm. Use a platinum wire to fold in half and stick to the sensitive electrode to lead out the electrode lead.

将制作好的带有参考电极和敏感电极的YSZ基板以2℃/min的升温速率升温至800℃并保持2h后降至室温。The prepared YSZ substrate with the reference electrode and the sensitive electrode was heated to 800°C at a heating rate of 2°C/min and kept for 2h before cooling down to room temperature.

3.粘结具有加热电极的陶瓷板。使用无机粘合剂(Al2O3和水玻璃 Na2SiO3·9H2O,质量体积比为1g:4mL)将YSZ基板的下表面(未涂覆电极的一侧)与同样尺寸的带有Pt加热电极的Al2O3陶瓷板(长宽2×2mm、厚度 0.2mm)进行粘结。3. Bonding ceramic plates with heating electrodes. The lower surface of the YSZ substrate (the side not coated with electrodes) was bonded to the same size ribbon using an inorganic binder ( Al2O3 and water glass Na2SiO3 9H2O , mass volume ratio 1 g: 4 mL). Al 2 O 3 ceramic plates (length and width 2×2mm, thickness 0.2mm) with Pt heating electrodes were bonded.

4.器件焊接、封装。将器件焊接在六角管座上,套上防护罩,制作完成混成电位型三乙胺传感器。4. Device welding and packaging. The device is welded on the hexagonal socket, and the protective cover is put on to complete the mixed potential triethylamine sensor.

实施例2:Example 2:

以1100℃烧结的CoMoO4材料作为敏感电极材料,制作三乙胺传感器,其制作过程为:The CoMoO 4 material sintered at 1100°C is used as the sensitive electrode material to make a triethylamine sensor. The manufacturing process is as follows:

将前述方法所制备的CoMoO4在马弗炉里1100℃烧结得到敏感电极材料CoMoO4(1100℃),器件制作过程与实施例1相同。The CoMoO 4 prepared by the aforementioned method was sintered in a muffle furnace at 1100° C. to obtain the sensitive electrode material CoMoO 4 (1100° C.) , and the device manufacturing process was the same as in Example 1.

实施例3:Example 3:

以1000℃烧结的CoMoO4材料作为敏感电极材料,制作三乙胺传感器,其制作过程为:The CoMoO 4 material sintered at 1000°C is used as the sensitive electrode material to make a triethylamine sensor. The manufacturing process is as follows:

将前述方法所制备的CoMoO4在马弗炉里1000℃烧结得到敏感电极材料CoMoO4(1000℃),器件制作过程与实施例1相同。The CoMoO 4 prepared by the aforementioned method was sintered in a muffle furnace at 1000° C. to obtain the sensitive electrode material CoMoO 4 (1000° C.) , and the device fabrication process was the same as in Example 1.

将传感器连接在Rigol信号测试仪上,分别将传感器置于空气、100ppb三乙胺、200ppb三乙胺、500ppb三乙胺、1ppm三乙胺、2ppm三乙胺、5ppm 三乙胺、10ppm三乙胺、20ppm三乙胺、50ppm三乙胺、100ppm三乙胺、 200ppm三乙胺的气氛中进行电压信号测试。器件的响应值大小用ΔV表示,其值为V待测气体-V空气Connect the sensor to the Rigol signal tester, place the sensor in air, 100ppb triethylamine, 200ppb triethylamine, 500ppb triethylamine, 1ppm triethylamine, 2ppm triethylamine, 5ppm triethylamine, 10ppm triethylamine The voltage signal test was carried out in the atmosphere of amine, 20ppm triethylamine, 50ppm triethylamine, 100ppm triethylamine, and 200ppm triethylamine. The response value of the device is represented by ΔV, and its value is V gas to be tested - V air .

表1中列出了分别以CoMoO4(800℃)、CoMoO4(1000℃)和CoMoO4(1100℃)为敏感电极材料的传感器对100ppm三乙胺响应值大小。从表中可以看到,三种器件均对三乙胺具有良好的响应特性,其中使用CoMoO4(1000℃)为敏感电极材料的器件的响应值最高,为-102mV。此外,从表2可以看出,CoMoO4(1000℃)器件对5-200ppm三乙胺的灵敏度为-53mV/decade。由此可见,当前构筑的混成电位型传感器对三乙胺表现出了很好的敏感特性,在大气环境检测领域具有很好的潜在应用前景。Table 1 lists the response values of sensors using CoMoO 4 (800°C) , CoMoO 4 (1000°C) and CoMoO 4 (1100°C) as sensitive electrode materials to 100ppm triethylamine respectively. It can be seen from the table that all three devices have good response characteristics to triethylamine, and the device using CoMoO 4 (1000°C) as the sensitive electrode material has the highest response value, which is -102mV. In addition, it can be seen from Table 2 that the sensitivity of the CoMoO 4 (1000°C) device to 5-200ppm triethylamine is -53mV/decade. It can be seen that the currently constructed hybrid potentiometric sensor shows good sensitivity to triethylamine, and has a good potential application prospect in the field of atmospheric environment detection.

表1:以CoMoO4(800℃)、CoMoO4(1000℃)和CoMoO4(1100℃)为敏感电极材料的传感器对100ppm 三乙胺响应值数据Table 1: Response data of sensors using CoMoO 4 (800°C) , CoMoO 4 (1000°C) and CoMoO 4 (1100°C) as sensitive electrode materials to 100ppm triethylamine

表2:以CoMoO4(1000℃)为敏感电极材料的传感器的ΔV随三乙胺浓度的变化数据Table 2: Variation data of ΔV with the concentration of triethylamine for the sensor using CoMoO 4 (1000°C) as the sensitive electrode material

三乙胺的浓度(ppm)Concentration of triethylamine (ppm) 敏感电极与参考电极电势差ΔV(mV)Sensitive electrode and reference electrode potential difference ΔV (mV) 0.10.1 -3-3 0.20.2 -4.5-4.5 0.50.5 -7.5-7.5 11 -12.5-12.5 22 -19.5-19.5 灵敏度(mV/decade)Sensitivity (mV/decade) -14-14 55 -27-27 1010 -37-37 2020 -68-68 5050 -80-80 100100 -102-102 200200 -106.5-106.5 灵敏度(mV/decade)Sensitivity (mV/decade) -53 -53

Claims (6)

1. one kind is with CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine sensor, from bottom to up successively By the Al for carrying Pt heating electrodes2O3Ceramic wafer, stabilizing zirconia substrate, Pt reference electrodes and sensitive electrode composition;Reference electrode It is separate with sensitive electrode and symmetrically prepare in the both ends of stabilizing zirconia upper surface of base plate, stabilizing zirconia substrate following table Face and the Al with Pt heating electrodes2O3Ceramic wafer is bonded together;It is characterized in that:Sensitive electrode material is CoMoO4, by Following method is prepared,
Under magnetic stirring, by 0.5mmol Co (NO3)2·6H2O and 0.5mmol Na2MoO4·2H2O is dissolved in 30~50mL and goes In the mixed solution of ionized water, ethyl alcohol and ethylene glycol;Then, by obtained solution under the conditions of 160~200 DEG C hydro-thermal reaction 5 ~8 hours, reaction product collected precipitation after centrifuging, washing, and gained is deposited under 60~90 DEG C of vacuum condition dry;Finally Desciccate product is sintered to 1~3h at 800~1100 DEG C respectively, so as to obtain CoMoO of the present invention4Sensitive electrode Material.
2. one kind as described in claim 1 is with CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine biography Sensor, it is characterised in that:The volume ratio of deionized water, ethyl alcohol and ethylene glycol is (1~2):1:(1~2).
3. one kind described in claims 1 or 2 is with CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine biography The preparation method of sensor, its step are as follows:
(1) Pt reference electrodes are made:The Pt of 15~20 μ m-thicks is made with reference to electricity using Pt slurries in one end of YSZ upper surface of base plate Pole, while will be sticked on reference electrode centre position after a Pt doublings as contact conductor, then by YSZ substrates 90~ It is toasted 1~2 hour under the conditions of 120 DEG C, then YSZ substrates is sintered 1~2 hour at 1000~1100 DEG C, excluded in platinum slurry Terpinol is finally down to room temperature;
(2) CoMoO is made4Sensitive electrode:By CoMoO4Sensitive electrode material is slurred expecting with deionized water, mass concentration for 2~ 20%;Use CoMoO4Slurry is in the sensitivity that 20~30 μ m-thicks are prepared with the other end of the symmetrical YSZ upper surface of base plate of reference electrode Electrode will be equally sticked on sensitive electrode after a platinum filament doubling as contact conductor;
(3) the YSZ substrates of reference electrode and sensitive electrode are sintered 1~3 under the conditions of 800~1000 DEG C step (2) preparation Hour;
(4) Al of electrode is heated using inorganic bond by YSZ base lower surfaces and with Pt2O3Ceramic wafer is bonded together;
(5) step (4) is obtained device to be welded, encapsulate, so as to obtain with CoMoO4YSZ bases for sensitive electrode blend together electricity Bit-type triethylamine sensor.
4. one kind as claimed in claim 3 is with CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine biography The preparation method of sensor, it is characterised in that:Heating rate when step (3) high temperature is sintered is 1~2 DEG C/min.
5. one kind as claimed in claim 3 is with CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine biography The preparation method of sensor, it is characterised in that:It is to measure 2~4mL of waterglass, and weigh Al2O30.7~1.0g of powder, by waterglass With Al2O3Powder is mixed and stirred for uniformly, inorganic bond being made.
6. one kind as claimed in claim 3 is with CoMoO4Stabilizing zirconia base for sensitive electrode blendes together electric potential type triethylamine biography The preparation method of sensor, it is characterised in that:Al with Pt heating electrodes2O3Ceramic wafer is in Al2O3Pass through silk screen on ceramic wafer Printing Pt is obtained.
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CN113219011B (en) * 2021-05-19 2022-08-09 吉林大学 Co-doped SnO 2 Formaldehyde-acetone gas sensor and preparation method thereof
CN114813880A (en) * 2022-04-28 2022-07-29 安徽大学 Integrated electrochemical gas sensor and preparation process thereof

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Application publication date: 20180629