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CN110375851A - A kind of high signal to noise ratio wide spectrum double aperture slit spectrometer - Google Patents

A kind of high signal to noise ratio wide spectrum double aperture slit spectrometer Download PDF

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Publication number
CN110375851A
CN110375851A CN201910618873.1A CN201910618873A CN110375851A CN 110375851 A CN110375851 A CN 110375851A CN 201910618873 A CN201910618873 A CN 201910618873A CN 110375851 A CN110375851 A CN 110375851A
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mirror
free
noise ratio
slit
detector
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侯佳
王跃明
何志平
舒嵘
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • G01J2003/045Sequential slits; Multiple slits

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

本发明公开了一种高信杂比宽谱段双狭缝光谱仪,系统由双狭缝组件、准直自由曲面镜、曲面棱镜、成像自由曲面镜、分谱段折转镜、谱段一探测器和谱段二探测器组成。曲面棱镜在宽谱段内具有高的效率,折射率差色散分光具有高的信号光杂散光比例(信杂比),利用曲面棱镜加自由曲面镜实现物面处相互分离的双狭缝的分光成像于不同谱段的探测器焦面上。系统成像质量优良、结构简单,可以有效地解决光谱仪不同谱段信杂比和分辨率的矛盾。

The invention discloses a high-signal-to-noise ratio wide-spectrum double-slit spectrometer. The system consists of a double-slit assembly, a collimating free-form surface mirror, a curved prism, an imaging free-form surface mirror, a spectrum-segment folding mirror, and a spectrum-segment detection It consists of a detector and a spectrum two detector. The curved prism has high efficiency in a wide spectral range, and the refractive index difference dispersion beam has a high signal light stray light ratio (signal-to-noise ratio). The curved prism and the free-form mirror are used to realize the separation of the double slits at the object surface. Imaged on detector focal planes of different spectral bands. The system has excellent imaging quality and simple structure, and can effectively solve the contradiction between the signal-to-noise ratio and resolution of different spectral bands of the spectrometer.

Description

一种高信杂比宽谱段双狭缝光谱仪A high signal-to-noise ratio wide-band double-slit spectrometer

技术领域technical field

本发明涉及成像光谱仪领域,尤其涉及一种高信杂比宽谱段双狭缝光谱仪光学系统。The invention relates to the field of imaging spectrometers, in particular to an optical system of a high signal-to-noise ratio wide-spectrum double-slit spectrometer.

背景技术Background technique

分光技术一直是光谱仪系统的核心,光栅和棱镜是近年来的主流分光手段。光栅分光所用光学元件少,光谱线性好,缺点是光栅一般使用第一级光谱,光能利用率低,衍射效率在宽谱段内不能提高,导致系统光能利用率低,杂散光较严重。棱镜通过不同波段折射率差使不同波长的出射光有不同的角度,从而发生色散,具有一定的非线性,需要后期校正,但棱镜一般由普通的玻璃材料组成,在宽谱段内有较高的透过率,对光能利用率很高,信号光杂散光比例(信杂比)大,并且对光偏振性不敏感。Spectroscopic technology has always been the core of the spectrometer system, and gratings and prisms are the mainstream spectroscopic methods in recent years. The grating uses few optical components and has good spectral linearity. The disadvantage is that the grating generally uses the first-order spectrum, and the utilization rate of light energy is low. The prism makes the outgoing light of different wavelengths have different angles through the difference of refractive index in different wavelength bands, resulting in dispersion, which has a certain nonlinearity and requires post-correction. The transmittance has a high utilization rate of light energy, the signal light stray light ratio (signal-to-noise ratio) is large, and it is not sensitive to light polarization.

近年来随着超精密光学加工、制造和检测技术的显著进步,复杂的曲面棱镜和复杂的光学表面的高精度加工、检测和装调成为了可能,利用棱镜色散分光加上复杂光学表面大的设计自由度有效地校正光谱仪系统的各种成像像差和畸变,可构建性能优良的高信杂比宽谱段光谱仪系统。In recent years, with the remarkable progress of ultra-precision optical processing, manufacturing and inspection technology, the high-precision processing, inspection and adjustment of complex curved prisms and complex optical surfaces have become possible. The use of prism dispersion light dispersion plus complex optical surface large design The degree of freedom can effectively correct various imaging aberrations and distortions of the spectrometer system, and can build a high-signal-to-noise ratio wide-spectrum spectrometer system with excellent performance.

传统的宽谱段棱镜光谱仪的使用方案常有两种:一为对单狭缝分光成像,在接近焦面探测器位置利用分色片实现不同谱段的分离,然后在各自焦面处利用对应该谱段的探测器接收信号,该方案存在进入系统总能量有限并且分色片膜系曲线交界区域存在信噪比低的问题。二为双狭缝分光成像,利用两个光谱仪分别实现单个狭缝不同谱段的分光成像,并且通过狭缝处折转镜的折转实现两个后光路光谱仪的合理布置,该方案进入系统总能量加倍,也不存在分色片的交叠区域问题,但是系统的体积重量较为庞大、且复杂性较高。There are often two ways to use the traditional broad-spectrum prism spectrometer: one is for single-slit spectroscopic imaging, using a dichroic plate at the detector position close to the focal plane to separate different spectral bands, and then using a dichroic plate at each focal plane to separate the different spectral bands. The detector in the spectrum should receive the signal. This scheme has the problems of limited total energy entering the system and low signal-to-noise ratio in the boundary area of the dichroic film system curve. The second is dual-slit spectroscopic imaging. Two spectrometers are used to realize the spectroscopic imaging of different spectral bands of a single slit, and the reasonable arrangement of the two rear optical path spectrometers is realized by the folding of the folding mirror at the slit. The energy is doubled, and there is no problem of the overlapping area of the color separation sheets, but the volume and weight of the system are relatively large and the complexity is relatively high.

发明内容SUMMARY OF THE INVENTION

本发明提供了一种高信杂比宽谱段双狭缝光谱仪,利用曲面棱镜分光,自由曲面分别充当准直镜和成像镜,单个光谱仪实现处于物面位置相互分离一定距离的双狭缝的分光成像,在两狭缝各自的色散成像焦面位置,分别用不同的波段的探测器接收信号,实现不同谱段的光谱成像。The invention provides a double-slit spectrometer with high signal-to-noise ratio and wide spectrum. The curved prism is used for light splitting, and the free curved surface acts as a collimating mirror and an imaging mirror respectively. In spectroscopic imaging, at the respective dispersive imaging focal plane positions of the two slits, the detectors of different wavelength bands are used to receive signals respectively to realize the spectral imaging of different spectrum bands.

本发明一种高信杂比宽谱段双狭缝光谱仪包括双狭缝组件1、准直自由曲面镜2、曲面棱镜3、成像自由曲面镜4、分谱段折转镜5、谱段一探测器6和谱段二探测器7。地物目标反射的光线经过双狭缝组件1入射到准直自由曲面镜2,而后经准直自由曲面镜2反射至曲面棱镜3的前表面透射,在曲面棱镜3的后表面内反射,再次透射经过曲面棱镜3的前表面后在成像自由曲面镜4上反射聚焦。其中,经双狭缝组件1下方狭缝入射的光经分谱段折转镜5反射至谱段一探测器6接收,经双狭缝组件1上方狭缝入射的光直接入射至谱段二探测器7探测接收。A high-signal-to-noise ratio wide-spectrum double-slit spectrometer of the present invention comprises a double-slit assembly 1, a collimating free-form surface mirror 2, a curved-surface prism 3, an imaging free-form surface mirror 4, a spectral segment folding mirror 5, and a spectral segment 1 Detector 6 and Spectrum II Detector 7. The light reflected by the ground object is incident on the collimating free-form surface mirror 2 through the double slit assembly 1, and then is reflected by the collimating free-form surface mirror 2 to the front surface of the curved prism 3 for transmission, and is reflected in the back surface of the curved prism 3, and again The transmission passes through the front surface of the curved prism 3 and is reflected and focused on the imaging free-form curved mirror 4 . Among them, the light incident through the slit below the double slit assembly 1 is reflected by the sub-segment refraction mirror 5 to the detector 6 of the first spectrum, and the light incident through the slit above the double slit assembly 1 is directly incident on the second spectrum. The detector 7 detects reception.

所述的双狭缝组件1包含平行且相离一定距离的两条狭缝,根据不同的使用波段和不同的分辨率要求可以设置成不同的缝宽。The double slit assembly 1 includes two parallel slits separated by a certain distance, and can be set to different slit widths according to different operating bands and different resolution requirements.

所述的准直自由曲面镜2和成像自由曲面镜4为不具旋转对称,但为关于两狭缝的中心连线轴对称的光学表面。The collimating free-form surface mirror 2 and the imaging free-form surface mirror 4 are optical surfaces that do not have rotational symmetry, but are axis-symmetrical about the center line connecting the two slits.

根据使用的谱段,曲面棱镜材料选用高透过率的光学玻璃,不存在多级光谱,因而系统具有较宽的成像谱段和较高的信杂比,曲面棱镜的前后表面偏心设置,自由曲面准直镜和自由曲面成像镜为不具旋转对称的xy多项式光学表面,如公式1所示,采用金刚石单点车削加工,配以CGH补偿器进行高精度面型检测。According to the spectrum used, the curved prism material is made of optical glass with high transmittance, and there is no multi-level spectrum, so the system has a wider imaging spectrum and a higher signal-to-noise ratio. The front and rear surfaces of the curved prism are eccentrically set, free The curved collimating mirror and the free-form surface imaging mirror are xy polynomial optical surfaces without rotational symmetry. As shown in formula 1, they are processed by diamond single-point turning and matched with CGH compensator for high-precision surface inspection.

本发明中提到的系统,由于双狭缝的使用,避免使用分色片分光,不存在光谱重叠区域,系统全谱段内都具有较高的信杂比。并且双狭缝设置,不同波段可以使用不同的狭缝宽度,更加可以有效地解决光谱仪信杂比和分辨率的矛盾。利用光学自由曲面大的设计自由度,校正物方双狭缝分离带来的较大面视场的离轴像差、光谱畸变和谱线弯曲等,系统成像质量优良、结构简单。The system mentioned in the present invention, due to the use of double slits, avoids using a dichroic sheet for light splitting, there is no spectral overlap region, and the system has a high signal-to-noise ratio in the entire spectrum. In addition, with the double slit setting, different wavelength bands can use different slit widths, which can more effectively solve the contradiction between the signal-to-noise ratio and the resolution of the spectrometer. The large design freedom of the optical free-form surface is used to correct the off-axis aberration, spectral distortion and spectral line bending of the larger field of view caused by the separation of the double slits on the object side. The system has excellent imaging quality and simple structure.

附图说明Description of drawings

图1是实施例光谱仪示意图;1 is a schematic diagram of an embodiment spectrometer;

图中,1为双狭缝组件,2为准直自由曲面镜,3为曲面棱镜,4为成像自由曲面镜,5为分谱段折转镜,6为谱段一探测器焦面,7为谱段二探测器焦面。In the figure, 1 is a double slit assembly, 2 is a collimating free-form surface mirror, 3 is a curved prism, 4 is an imaging free-form surface mirror, 5 is a spectral-segment folding mirror, 6 is a spectral segment-detector focal plane, and 7 is the focal plane of the spectral band two detectors.

图2是实施例双狭缝组件的示意图;2 is a schematic diagram of an embodiment double slit assembly;

图3是实施例光谱仪系统的像质,各个视场在各谱段处的传递函数曲线;Fig. 3 is the image quality of the spectrometer system of the embodiment, the transfer function curve of each field of view at each spectral section;

图中,(a)和(b)分别为波长0.35um和1.0um处谱段一的两端处的传递函数,考察截止频率为33.33lp/mm,考察视场为狭缝组件下狭缝的视场;(c)和(d)分别为波长1.2um和2.5um处谱段二的中间波长和长波处的传递函数,考察截止频率为16.7lp/mm,考察视场为狭缝组件上狭缝的视场。In the figure, (a) and (b) are the transfer functions at the two ends of the first spectrum at wavelengths of 0.35um and 1.0um, respectively. The cut-off frequency is 33.33lp/mm, and the field of view is the width of the slit under the slit assembly. Field of view; (c) and (d) are the transfer functions at the middle wavelength and long wavelength of the second spectrum at wavelengths 1.2um and 2.5um, respectively. The cut-off frequency is 16.7lp/mm, and the field of view is the upper slit of the slit assembly. field of view.

具体实施方式Detailed ways

下面结合附图和实施例对本发明作进一步的详细说明:如图1所示,本发明一种高信杂比宽谱段双狭缝光谱仪,双狭缝组件置于前望远镜焦面上(前望远镜不在本发明的讨论范围),透过双狭缝的光,经准直自由曲面镜反射,经曲面棱镜前表面一次透射、后表面内反射、前表面二次透射分光,经成像自由曲面镜会聚成像,在谱段一的焦面前通过分谱段折转镜实现不同谱段到不同探测器焦面的分离接收探测。本发明的实施例的整个工作宽谱段为0.35-2.5um,波段0.35-1.0um对应谱段一,对应的狭缝为图1中的下狭缝,狭缝尺寸为0.015mm*80mm,波段0.9-2.5um对应谱段二,对应狭缝为图1中的上狭缝,狭缝尺寸为0.030mm*80mm。图2为实施例双狭缝组件的侧视图,其上下狭缝分离为20mm,既能满足谱段一和谱段二的探测器的不干涉布置,又能权衡系统平衡轴外像差的能力,其上下狭缝与图1中的上下狭缝对应。实施例的光谱仪的系统设计指标如表1所示,光谱仪设计参数如表2所示。Below in conjunction with accompanying drawing and embodiment, the present invention is described in further detail: as shown in Figure 1, a kind of high-signal-to-noise ratio wide-spectrum double-slit spectrometer of the present invention, double-slit assembly is placed on the focal plane of the front telescope (front The telescope is not within the scope of the present invention), the light passing through the double slits is reflected by the collimated free-form surface mirror, firstly transmitted through the front surface of the curved prism, internally reflected on the back surface, and twice transmitted on the front surface, and then passes through the imaging free-form surface mirror. Convergence imaging, in the focal plane of the first spectrum band, the separate receiving and detection of different spectrum bands to different detector focal planes are realized through the sub-spectrum folding mirror. The entire working wide spectral range of the embodiment of the present invention is 0.35-2.5um, the wavelength band 0.35-1.0um corresponds to the first spectrum, the corresponding slit is the lower slit in FIG. 1, the size of the slit is 0.015mm*80mm, and the wavelength band 0.9-2.5um corresponds to the second spectrum, the corresponding slit is the upper slit in Figure 1, and the size of the slit is 0.030mm*80mm. Fig. 2 is a side view of the double slit assembly of the embodiment. The upper and lower slits are separated by 20mm, which can not only satisfy the non-interference arrangement of the detectors in the first and second spectrums, but also balance the ability of the system to balance the off-axis aberration. , and its upper and lower slits correspond to the upper and lower slits in FIG. 1 . The system design indexes of the spectrometer of the embodiment are shown in Table 1, and the design parameters of the spectrometer are shown in Table 2.

表1、实施例系统设计指标Table 1. Design indicators of the embodiment system

表2、光谱仪设计参数Table 2. Spectrometer design parameters

Claims (3)

1. a kind of high signal to noise ratio wide spectrum double aperture slit spectrometer, including double aperture slit component (1), collimation free-form curved mirror (2), curved surface Prism (3), imaging free-form curved mirror (4), open score section are turned back mirror (5), one detector of spectral coverage (6) and two detector of spectral coverage (7), It is characterized in that:
The light of ground object target reflection is incident on collimation free-form curved mirror (2) by double aperture slit component (1), then collimated freedom Curved mirror (2) reflexes to the front surface transmission of curved surface prism (3), and in the rear surface internal reflection of curved surface prism (3), transmission is passed through again Focusing is reflected in imaging free-form curved mirror (4) after crossing the front surface of curved surface prism (3).Wherein, through below double aperture slit component (1) The light of slit incidence reflexes to one detector of spectral coverage (6) and receives through open score section mirror (5) of turning back, through narrow above double aperture slit component (1) It sews up the light penetrated and is directly transmitted to two detector of spectral coverage (7) detection reception.
2. a kind of high signal to noise ratio wide spectrum double aperture slit spectrometer according to claim 1, it is characterised in that: described is double narrow Stitching component (1) includes two slits parallel and that phase is with a certain distance from, is wanted using wave band with different resolution ratio according to different It asks and different slit widths can be set into.
3. a kind of high signal to noise ratio wide spectrum double aperture slit spectrometer according to claim 1, it is characterised in that: the collimation Free-form curved mirror (2) and imaging free-form curved mirror (4) are the line of centres axial symmetry about two slits not have rotational symmetry Optical surface.
CN201910618873.1A 2019-07-10 2019-07-10 A kind of high signal to noise ratio wide spectrum double aperture slit spectrometer Pending CN110375851A (en)

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CN210268900U (en) * 2019-07-10 2020-04-07 中国科学院上海技术物理研究所 High signal-to-noise ratio wide-band double-slit spectrometer

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CN110780432A (en) * 2019-11-18 2020-02-11 中国科学院上海技术物理研究所 Non-coaxial total reflection type active zooming relay optical system without moving element
CN110780432B (en) * 2019-11-18 2023-07-04 中国科学院上海技术物理研究所 A non-coaxial total reflection active zoom relay optical system without moving components
CN116046168A (en) * 2023-02-11 2023-05-02 中国科学院长春光学精密机械与物理研究所 Aperture Multiplexed Ultra-Wide Spectrum Freeform Surface Imaging Method and Device

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