CN118624025A - A high-resolution spectrometer with multiple gratings - Google Patents
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Abstract
本发明涉及一种多光栅的高分辨率光谱仪，包括依次排布的光源、准直元件、多光栅色散元件、聚焦透镜组和光电探测器，多光栅色散元件包括一块第一透射光栅、至少一块第二透射光栅，第一透射光栅靠近准直元件，第二透光光栅靠近聚集透镜组，光源发射的光依次通过准直元件、一块第一透射光栅、一块第二透光光栅、一组聚焦透镜组处理后照射到一台光电探测器上。有益效果是：通过设置包括一块第一透射光栅、至少一块第二透射光栅的多光栅色散元件，使光线两次通过多光栅色散元件进行双重色散，提高光谱分辨率，解决了传统级联型光谱仪系统的体积与重量的局限性；本多光栅的光谱仪可以使连续波段分开，进行双波段或多波段同时测量。
The present invention relates to a multi-grating high-resolution spectrometer, comprising a light source, a collimating element, a multi-grating dispersive element, a focusing lens group and a photoelectric detector arranged in sequence, wherein the multi-grating dispersive element comprises a first transmission grating and at least a second transmission grating, wherein the first transmission grating is close to the collimating element, and the second light-transmitting grating is close to the focusing lens group, and the light emitted by the light source is sequentially processed by the collimating element, a first transmission grating, a second light-transmitting grating, and a group of focusing lens groups before being irradiated onto a photoelectric detector. The beneficial effects are as follows: by setting a multi-grating dispersive element comprising a first transmission grating and at least a second transmission grating, the light passes through the multi-grating dispersive element twice for double dispersion, thereby improving the spectral resolution and solving the volume and weight limitations of the traditional cascade type spectrometer system; the multi-grating spectrometer can separate continuous bands and perform dual-band or multi-band simultaneous measurement.
Description
技术领域Technical Field
本发明涉及光谱仪领域，尤其涉及一种多光栅的高分辨率光谱仪。The invention relates to the field of spectrometers, and in particular to a multi-grating high-resolution spectrometer.
背景技术Background Art
光谱仪可以获取被测对象的特性信息，在科学研究和物质检测等领域发挥着重要作用。更高的光谱分辨率意味着光谱仪可以获得更精细的特征光谱峰，从而提高光谱仪区分不同物质的能力。高分辨率光谱仪的发展带动了基于光谱仪的频域光学相干断层成像等技术领域的快速发展。不仅在成像检测领域，天文学领域中，使用高光谱分辨率能检测和测量行星大气中的次级成分和同位素成分。高分辨率光谱技术还被广泛应用于大气监测的紫外波段微弱光谱信号的探测和收集，这些都需要高灵敏度的光谱仪。Spectrometers can obtain characteristic information of the object being measured and play an important role in scientific research and material detection. Higher spectral resolution means that the spectrometer can obtain finer characteristic spectral peaks, thereby improving the spectrometer's ability to distinguish different substances. The development of high-resolution spectrometers has led to the rapid development of technical fields such as frequency-domain optical coherence tomography based on spectrometers. Not only in the field of imaging detection, but also in the field of astronomy, the use of high spectral resolution can detect and measure secondary components and isotopic compositions in planetary atmospheres. High-resolution spectroscopy technology is also widely used in the detection and collection of weak spectral signals in the ultraviolet band for atmospheric monitoring, all of which require highly sensitive spectrometers.
光谱仪的类型可以分为三种：色散型、干涉型、滤波型。色散型光谱仪的色散元件一般是棱镜或者光栅。相比于棱镜，光栅的色散能力更强。在大多数光栅光谱仪的光路设计中，光源只通过光栅一次，因此只对被测光进行一次色散。典型的光谱仪结构是Czerny-Turner，它只有两个球面镜和一个平面光栅，测量光只被光栅分散一次。就目前可用的光栅刻线密度极限而言，这种类型的光谱分辨率通常在纳米级。There are three types of spectrometers: dispersive, interferometric, and filtering. The dispersive element of a dispersive spectrometer is generally a prism or a grating. Compared to a prism, a grating has a stronger dispersion capability. In the optical path design of most grating spectrometers, the light source only passes through the grating once, so the measured light is only dispersed once. The typical spectrometer structure is Czerny-Turner, which has only two spherical mirrors and a plane grating, and the measured light is only dispersed once by the grating. In terms of the currently available grating line density limit, the spectral resolution of this type is usually at the nanometer level.
光谱分辨率与设备尺寸之间也存在权衡，因为这种类型的高分辨率光谱仪须使用大尺寸光栅或长焦距透镜。另一种获得更高分辨率的方法是对信号光进行多次分散，可以将两台或三台光谱仪串联起来，形成级联型光谱仪。然而级联光谱仪系统不仅体积大、结构复杂，而且价格昂贵，无法满足便携性的要求。另一方面，为了获得更宽的光谱范围，级联光谱仪中的光栅必须同时旋转，这对控制系统提出了很高的要求。There is also a trade-off between spectral resolution and device size, because this type of high-resolution spectrometer requires the use of large-size gratings or long focal length lenses. Another way to obtain higher resolution is to disperse the signal light multiple times, and two or three spectrometers can be connected in series to form a cascade spectrometer. However, the cascade spectrometer system is not only large in size and complex in structure, but also expensive and cannot meet the requirements of portability. On the other hand, in order to obtain a wider spectral range, the gratings in the cascade spectrometer must rotate simultaneously, which places high demands on the control system.
发明内容Summary of the invention
本发明的目的在于克服现有技术存在的以上问题，提供一种多光栅的高分辨率光谱仪。The purpose of the present invention is to overcome the above problems existing in the prior art and to provide a multi-grating high-resolution spectrometer.
为实现上述技术目的，达到上述技术效果，本发明通过以下技术方案实现：In order to achieve the above technical objectives and the above technical effects, the present invention is implemented through the following technical solutions:
一种多光栅的高分辨率光谱仪，包括依次排布的光源、准直元件、多光栅色散元件、聚焦透镜组和光电探测器，所述多光栅色散元件包括一块第一透射光栅、至少一块第二透射光栅，所述第一透射光栅靠近准直元件，所述第二透光光栅靠近聚集透镜组，所述光源发射的光依次通过准直元件、一块第一透射光栅、一块第二透光光栅、一组聚焦透镜组处理后照射到一台光电探测器上。A multi-grating high-resolution spectrometer comprises a light source, a collimating element, a multi-grating dispersion element, a focusing lens group and a photoelectric detector arranged in sequence, wherein the multi-grating dispersion element comprises a first transmission grating and at least one second transmission grating, the first transmission grating is close to the collimating element, and the second light-transmitting grating is close to the focusing lens group. Light emitted by the light source is processed by the collimating element, a first transmission grating, a second light-transmitting grating and a group of focusing lenses in sequence and then irradiated onto a photoelectric detector.
其中，所述准直元件为消色差双胶合透镜。Wherein, the collimating element is an achromatic doublet lens.
其中，所述第一透射光栅和第二透射光栅的刻线密度相同，所述第一透射光栅和第二透射光栅的刻线方向相同。The first transmission grating and the second transmission grating have the same line density, and the first transmission grating and the second transmission grating have the same line direction.
作为一种优选方式，所述第二透射光栅为一块时，所述第一透射光栅所在平面与第二透射光栅所在平面相交。As a preferred embodiment, when the second transmission grating is one piece, the plane where the first transmission grating is located intersects with the plane where the second transmission grating is located.
作为另一种优选方式，所述第二透射光栅为两块时，所述第一透射光栅所在平面与每一块第二透射光栅所在平面相交，一块第二透射光栅所在平面与另一块第二透射光栅所在平面相交。As another preferred embodiment, when there are two second transmission gratings, the plane where the first transmission grating is located intersects with the plane where each second transmission grating is located, and the plane where one second transmission grating is located intersects with the plane where another second transmission grating is located.
其中，根据光栅方程和光的衍射原理，多光栅色散元件的角色散满足以下公式：According to the grating equation and the diffraction principle of light, the angular dispersion of the multi-grating dispersion element satisfies the following formula:
其中，i1是第一透射光栅的入射角，θ1是第一透射光栅的衍射角，i2是第二透射光栅的入射角，θ2是第二透射光栅的衍射角，由于第二透射光栅的入射角与第一透射光栅的入射角，第二透射光栅的衍射角与第一透射光栅的衍射角，即i1＝i2、θ1＝θ2，因此公式可简化为：Wherein, i1 is the incident angle of the first transmission grating, θ1 is the diffraction angle of the first transmission grating, i2 is the incident angle of the second transmission grating, θ2 is the diffraction angle of the second transmission grating. Since the incident angle of the second transmission grating is equal to the incident angle of the first transmission grating, and the diffraction angle of the second transmission grating is equal to the diffraction angle of the first transmission grating, i1 = i2 and θ1 = θ2 , the formula can be simplified as follows:
当i1＝θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比等于2；When i 1 =θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution of light after being processed by the single-grating dispersive element is equal to 2;
当i1<θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比大于2；When i 1 <θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution after being processed by the single grating dispersive element is greater than 2;
当i1>θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比小于2且大于1。When i 1 >θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution of light after being processed by the single grating dispersive element is less than 2 and greater than 1.
其中，所述聚焦透镜组包括依次排布的第一单透镜、第二单透镜、平场透镜，并且所述第一单透镜、第二单透镜、平场透镜同轴。The focusing lens group includes a first single lens, a second single lens, and a field-flattening lens arranged in sequence, and the first single lens, the second single lens, and the field-flattening lens are coaxial.
其中，所述光电探测器为CCD线性阵列探测器。Wherein, the photoelectric detector is a CCD linear array detector.
本发明的有益效果是：通过设置包括一块第一透射光栅、至少一块第二透射光栅的多光栅色散元件，使光线两次通过多光栅色散元件进行双重色散，提高光谱分辨率，解决了传统级联型光谱仪系统的体积与重量的局限性；本多光栅的光谱仪可以使连续波段分开，进行双波段或多波段同时测量。The beneficial effects of the present invention are as follows: by providing a multi-grating dispersion element including a first transmission grating and at least one second transmission grating, light is made to pass through the multi-grating dispersion element twice for double dispersion, thereby improving the spectral resolution and solving the volume and weight limitations of a traditional cascade spectrometer system; the multi-grating spectrometer can separate continuous bands and perform dual-band or multi-band simultaneous measurement.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
此处所说明的附图用来提供对本发明的进一步理解，构成本申请的一部分，本发明的示意性实施例及其说明用于解释本发明，并不构成对本发明的不当限定。在附图中：The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:
图1是本发明实施例一中高分辨率光谱仪的结构示意图；FIG1 is a schematic diagram of the structure of a high-resolution spectrometer in Embodiment 1 of the present invention;
图2是本发明实施例一中高分辨率光谱仪的光路仿真图；FIG2 is a light path simulation diagram of a high-resolution spectrometer in Embodiment 1 of the present invention;
图3是本发明实施例一中825nm、870nm、900nm光经多光栅色散元件处理的光斑图；FIG3 is a spot diagram of 825 nm, 870 nm, and 900 nm light processed by a multi-grating dispersion element in Embodiment 1 of the present invention;
图4是本发明实施例一中多光栅光谱仪模型对光进行处理后在870nm和870.07nm的光斑图；FIG4 is a light spot diagram at 870 nm and 870.07 nm after the multi-grating spectrometer model in Example 1 of the present invention processes light;
图5是使用单光栅光谱仪模型对光进行处理后在870nm和870.07nm的光斑图；FIG5 is a light spot diagram at 870 nm and 870.07 nm after light is processed using a single grating spectrometer model;
图6是本发明实施例二中高分辨率光谱仪的结构示意图；FIG6 is a schematic diagram of the structure of a high-resolution spectrometer in Embodiment 2 of the present invention;
图中标号说明：光源1、准直元件2、多光栅色散元件3、第一透射光栅31、第二透射光栅32、聚焦透镜组4、第一单透镜41、第二单透镜42、平场透镜43、光电探测器5。Description of the numbers in the figure: light source 1, collimating element 2, multi-grating dispersion element 3, first transmission grating 31, second transmission grating 32, focusing lens group 4, first single lens 41, second single lens 42, flat field lens 43, photodetector 5.
具体实施方式DETAILED DESCRIPTION
下面将参考附图并结合实施例，来详细说明本发明。The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
如图1和2所示的实施例一，一种多光栅的高分辨率光谱仪，包括依次排布的光源1、准直元件2、多光栅色散元件3、聚焦透镜组4和光电探测器5。As shown in FIG. 1 and FIG. 2 , the first embodiment is a multi-grating high-resolution spectrometer, comprising a light source 1, a collimating element 2, a multi-grating dispersion element 3, a focusing lens group 4 and a photodetector 5 which are arranged in sequence.
本实施例中：准直元件2为消色差双胶合透镜；聚焦透镜组4包括依次排布的第一单透镜41、第二单透镜42、平场透镜43，并且第一单透镜41、第二单透镜42、平场透镜43同轴；光电探测器5为CCD线性阵列探测器。In this embodiment: the collimating element 2 is an achromatic doublet lens; the focusing lens group 4 includes a first single lens 41, a second single lens 42, and a flat field lens 43 arranged in sequence, and the first single lens 41, the second single lens 42, and the flat field lens 43 are coaxial; the photodetector 5 is a CCD linear array detector.
多光栅色散元件3包括一块第一透射光栅31、一块第二透射光栅32，第一透射光栅靠近准直元件，第二透光光栅靠近聚集透镜组，第一透射光栅和第二透射光栅的刻线密度相同，第一透射光栅和第二透射光栅的刻线方向相同；第一透射光栅所在平面与第二透射光栅所在平面相交。The multi-grating dispersion element 3 includes a first transmission grating 31 and a second transmission grating 32. The first transmission grating is close to the collimating element, and the second transmission grating is close to the focusing lens group. The first transmission grating and the second transmission grating have the same engraved line density and the same engraved line direction. The plane where the first transmission grating is located intersects with the plane where the second transmission grating is located.
光源发射的光依次通过准直元件、一块第一透射光栅、一块第二透光光栅、一组聚焦透镜组处理后照射到一台光电探测器上。The light emitted by the light source is sequentially processed by a collimating element, a first transmission grating, a second transmission grating, and a group of focusing lenses, and then irradiates a photoelectric detector.
根据光栅方程和光的衍射原理，多光栅色散元件的角色散满足以下公式：According to the grating equation and the principle of light diffraction, the angular dispersion of the multi-grating dispersion element satisfies the following formula:
其中，i1是第一透射光栅的入射角，θ1是第一透射光栅的衍射角，i2是第二透射光栅的入射角，θ2是第二透射光栅的衍射角，由于第二透射光栅的入射角与第一透射光栅的入射角，第二透射光栅的衍射角与第一透射光栅的衍射角，即i1＝i2、θ1＝θ2，因此公式可简化为：Wherein, i1 is the incident angle of the first transmission grating, θ1 is the diffraction angle of the first transmission grating, i2 is the incident angle of the second transmission grating, θ2 is the diffraction angle of the second transmission grating. Since the incident angle of the second transmission grating is equal to the incident angle of the first transmission grating, and the diffraction angle of the second transmission grating is equal to the diffraction angle of the first transmission grating, i1 = i2 and θ1 = θ2 , the formula can be simplified as follows:
当i1＝θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比等于2；When i 1 =θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution of light after being processed by the single-grating dispersive element is equal to 2;
当i1<θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比大于2；When i 1 <θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution after being processed by the single grating dispersive element is greater than 2;
当i1>θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比小于2且大于1。When i 1 >θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution of light after being processed by the single grating dispersive element is less than 2 and greater than 1.
如图3所示，利用本发明实施例一中多光栅光谱仪模型对波长范围为825nm-900nm的光进行处理后在中心波长和边缘波长的光斑图，这张图表明在波长范围内的光斑质量良好，光斑图表明中心波长和边缘波长都已接近衍射极限，模型优化的效果也比较好。As shown in FIG3 , the light spot diagram at the center wavelength and the edge wavelength is obtained after the light in the wavelength range of 825 nm-900 nm is processed by the multi-grating spectrometer model in the first embodiment of the present invention. This figure shows that the light spot quality within the wavelength range is good. The light spot diagram shows that both the center wavelength and the edge wavelength are close to the diffraction limit, and the effect of model optimization is also relatively good.
如图4所示，利用本发明实施例一中多光栅光谱仪模型对波长范围为870nm左右的光进行处理后形成870nm和870.07nm光斑图，表明分辨率可以达到70pm。As shown in FIG. 4 , the multi-grating spectrometer model in the first embodiment of the present invention is used to process light with a wavelength range of about 870 nm to form 870 nm and 870.07 nm spot diagrams, indicating that the resolution can reach 70 pm.
如图5所示，利用现有技术中的单光栅光谱仪模型对波长范围为870nm左右的光进行处理后形成870nm和870.07nm的光斑图，能够清除的看到分辨率达不到70pm。As shown in FIG5 , the single grating spectrometer model in the prior art is used to process light with a wavelength range of about 870 nm to form spot diagrams of 870 nm and 870.07 nm. It can be clearly seen that the resolution does not reach 70 pm.
通过如图3至图5的对比可知，多光栅光谱仪方案的光学分辨率明显优于单光栅光谱仪。From the comparison of Figures 3 to 5, it can be seen that the optical resolution of the multi-grating spectrometer solution is significantly better than that of the single grating spectrometer.
工作原理：Working principle:
准直透镜组2将光源1发出的光准直为平行光。The collimating lens group 2 collimates the light emitted by the light source 1 into parallel light.
第一透射光栅31和第二透射光栅32按照一定的角度交错排列，以接收不同角度的入射光和出射光。The first transmission grating 31 and the second transmission grating 32 are arranged alternately at a certain angle to receive incident light and outgoing light at different angles.
第一透射光栅31和第二透射光栅32的刻线密度相同、方向相同，第一透射光栅31和第二透射光栅32之间相隔一定的距离，使光在经过第一透射光栅31发生衍射后，分散的衍射光入射到第二透射光栅32上进行二次衍射。经过两次衍射的光由聚焦透镜组4聚焦到探测器5，不同波长的光聚焦在探测器不同的位置以获得光谱数据。The first transmission grating 31 and the second transmission grating 32 have the same line density and direction, and are separated by a certain distance, so that after the light is diffracted by the first transmission grating 31, the scattered diffracted light is incident on the second transmission grating 32 for secondary diffraction. The light diffracted twice is focused by the focusing lens group 4 to the detector 5, and the light of different wavelengths is focused on different positions of the detector to obtain spectral data.
由于信号光在多光栅色散元件3的第一透射光栅31和第二透射光栅32内进行两次色散分光，经过第一透射光栅31后产生不同级次衍射光的出射角，当在经过第一透射光栅31后产生的不同级次衍射光的出射角再次通过第二透射光栅32后，出射角差会在二次传播过程中进一步扩大。Since the signal light is dispersed and split twice in the first transmission grating 31 and the second transmission grating 32 of the multi-grating dispersion element 3, the emission angles of diffracted lights of different orders are generated after passing through the first transmission grating 31. When the emission angles of diffracted lights of different orders generated after passing through the first transmission grating 31 pass through the second transmission grating 32 again, the emission angle difference will be further expanded in the secondary propagation process.
该光谱仪系统在单个系统中集成了两个呈一定角度战略性排列的第一透射光栅31和第二透射光栅32，这种布置能使光线两次通过色散元件进而产生双重色散。在大多数光栅光谱仪的光路设计中，被测光只通过光栅一次，只对被测光进行一次色散。The spectrometer system integrates two first transmission gratings 31 and second transmission gratings 32 strategically arranged at a certain angle in a single system. This arrangement enables light to pass through the dispersion element twice to produce double dispersion. In the optical path design of most grating spectrometers, the measured light only passes through the grating once and is dispersed only once.
采用多光栅色散元件3不仅大大提高了光谱仪的性能，而且缩小了整体尺寸，减轻了重量，这解决了传统级联型光谱仪系统的体积与重量的局限性。与具有相同光栅参数的单光栅光谱仪相比，多光栅色散元件3的角色散能力至少提高了一倍，这使得光谱仪的光谱分辨率至少提高了一倍，可以达到皮米量级。The use of multi-grating dispersion element 3 not only greatly improves the performance of the spectrometer, but also reduces the overall size and weight, which solves the volume and weight limitations of the traditional cascade spectrometer system. Compared with a single grating spectrometer with the same grating parameters, the angular dispersion capability of the multi-grating dispersion element 3 is at least doubled, which makes the spectral resolution of the spectrometer at least doubled, reaching the picometer level.
本光谱仪中采用包括单透镜41、单透镜42和平场透镜43的聚焦透镜组。由于光栅可以进行分光，无需使用消色差双胶合透镜进行额外的色差校正；使用单透镜41和单透镜42配合可以分散焦点功率，这种设计可以减少像差；利用平场透镜43放置在单透镜2之后可以减小场曲，确保中心波长和边缘波长的成像质量都能达到衍射极限。The spectrometer uses a focusing lens group including a single lens 41, a single lens 42 and a flat field lens 43. Since the grating can split light, there is no need to use an achromatic doublet lens for additional chromatic aberration correction; the use of a single lens 41 and a single lens 42 can disperse the focus power, and this design can reduce aberrations; the flat field lens 43 placed after the single lens 2 can reduce the field curvature and ensure that the imaging quality of the center wavelength and the edge wavelength can reach the diffraction limit.
如图6所示的实施例二，一种多光栅的高分辨率光谱仪，包括依次排布的光源、准直元件、多光栅色散元件、聚焦透镜组和光电探测器，As shown in the second embodiment of FIG. 6 , a multi-grating high-resolution spectrometer includes a light source, a collimating element, a multi-grating dispersion element, a focusing lens group and a photodetector arranged in sequence.
本实施例中：准直元件为消色差双胶合透镜；聚焦透镜组包括依次排布的第一单透镜、第二单透镜、平场透镜，并且所述第一单透镜、第二单透镜、平场透镜同轴；光电探测器为CCD线性阵列探测器。In this embodiment: the collimating element is an achromatic doublet lens; the focusing lens group includes a first single lens, a second single lens, and a flat field lens arranged in sequence, and the first single lens, the second single lens, and the flat field lens are coaxial; the photodetector is a CCD linear array detector.
多光栅色散元件包括一块第一透射光栅、两块第二透射光栅，第一透射光栅靠近准直元件，第二透光光栅靠近聚集透镜组，第一透射光栅和第二透射光栅的刻线密度相同，第一透射光栅和第二透射光栅的刻线方向相同；第一透射光栅所在平面与每一块第二透射光栅所在平面相交，一块第二透射光栅所在平面与另一块第二透射光栅所在平面相交。The multi-grating dispersion element comprises a first transmission grating and two second transmission gratings, the first transmission grating is close to the collimating element, the second transmission grating is close to the focusing lens group, the first transmission grating and the second transmission grating have the same engraved line density, and the first transmission grating and the second transmission grating have the same engraved line direction; the plane where the first transmission grating is located intersects with the plane where each of the second transmission gratings is located, and the plane where one of the second transmission gratings is located intersects with the plane where another second transmission grating is located.
光源发射的光依次通过准直元件、一块第一透射光栅、一块第二透光光栅、一组聚焦透镜组处理后照射到一台光电探测器上。The light emitted by the light source is sequentially processed by a collimating element, a first transmission grating, a second transmission grating, and a group of focusing lenses, and then irradiates a photoelectric detector.
根据光栅方程和光的衍射原理，多光栅色散元件的角色散满足以下公式：According to the grating equation and the principle of light diffraction, the angular dispersion of the multi-grating dispersion element satisfies the following formula:
其中，i1是第一透射光栅的入射角，θ1是第一透射光栅的衍射角，i2是第二透射光栅的入射角，θ2是第二透射光栅的衍射角，由于第二透射光栅的入射角与第一透射光栅的入射角，第二透射光栅的衍射角与第一透射光栅的衍射角，即i1＝i2、θ1＝θ2，因此公式可简化为：Wherein, i1 is the incident angle of the first transmission grating, θ1 is the diffraction angle of the first transmission grating, i2 is the incident angle of the second transmission grating, θ2 is the diffraction angle of the second transmission grating. Since the incident angle of the second transmission grating is equal to the incident angle of the first transmission grating, and the diffraction angle of the second transmission grating is equal to the diffraction angle of the first transmission grating, i1 = i2 and θ1 = θ2 , the formula can be simplified as follows:
当i1＝θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比等于2；When i 1 =θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution of light after being processed by the single-grating dispersive element is equal to 2;
当i1<θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比大于2；When i 1 <θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution after being processed by the single grating dispersive element is greater than 2;
当i1>θ1时，光通过多光栅色散元件处理后的角分辨率与通过单光栅色散元件处理后的角分辨率之比小于2且大于1。When i 1 >θ 1 , the ratio of the angular resolution of light after being processed by the multi-grating dispersive element to the angular resolution of light after being processed by the single grating dispersive element is less than 2 and greater than 1.
第一透光光栅分别与两块第二透射光栅按照一定的角度交错排列并相隔一定的纵向距离，并且两块第二透射光栅按照一定的角度交错排列并相隔一定的横向距离，以接收不同角度和不同波段的入射光和出射光。双波段的信号光经过两次衍射由聚焦透镜组4聚焦到探测器5，不同波长的光聚焦在探测器不同的位置以获得光谱数据。在本实施例二中的高分辨率光谱仪可以使连续波段分开，进行双波段同时测量，对于特定场景的特定双波段并行测量具有重要意义。The first light-transmitting grating is staggered with the two second light-transmitting gratings at a certain angle and separated by a certain longitudinal distance, and the two second light-transmitting gratings are staggered at a certain angle and separated by a certain lateral distance to receive incident light and outgoing light of different angles and different bands. The signal light of the dual-band is focused by the focusing lens group 4 to the detector 5 after two diffractions, and the light of different wavelengths is focused at different positions of the detector to obtain spectral data. The high-resolution spectrometer in the second embodiment can separate continuous bands and perform dual-band simultaneous measurement, which is of great significance for the parallel measurement of specific dual-bands in specific scenes.
以上显示和描述了本发明的基本原理、主要特征和本发明的优点。本行业的技术人员应该了解，本发明不受上述实施例的限制，上述实施例和说明书中描述的只是说明本发明的原理，在不脱离本发明精神和范围的前提下，本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.
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