CN103175611B - Free-form optical device used for correcting astigmatism and coma aberration in spectrograph - Google Patents
Free-form optical device used for correcting astigmatism and coma aberration in spectrograph Download PDFInfo
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Abstract
本发明关于光谱仪器的改进,旨在提供一种用于校正光谱仪像散与彗差的自由曲面光学器件。光谱仪包括光源、入射狭缝、凹面准直镜、平面衍射光栅、凹面成像镜和光电探测器,该自由曲面光学器件位于凹面成像镜与光电探测器之间,自由曲面光学器件的上表面是自由曲面,下表面是平面,下表面与光电探测器叠放在一起。本发明设置在光谱仪的光电探测器(线性CCD阵列)上,本发明上表面的自由曲面曲率沿着色散方向和垂直于色散方向分别变化,分别校正光谱仪的子午彗差和像散,提高了集光效率,增加了光谱仪的灵敏度。
The invention relates to the improvement of the spectrometer and aims to provide a free-form surface optical device for correcting the astigmatism and coma of the spectrometer. The spectrometer includes a light source, an incident slit, a concave collimating mirror, a plane diffraction grating, a concave imaging mirror and a photodetector. The free-form optical device is located between the concave imaging mirror and the photodetector. The upper surface of the free-form optical device is free The curved surface, the lower surface is a plane, and the lower surface is stacked with photodetectors. The present invention is arranged on the photodetector (linear CCD array) of the spectrometer, and the curvature of the freeform surface on the upper surface of the present invention changes along the direction of dispersion and perpendicular to the direction of dispersion respectively, respectively correcting the meridional coma and astigmatism of the spectrometer, improving the collection Light efficiency increases the sensitivity of the spectrometer.
Description
技术领域 technical field
本发明是关于光谱仪器的改进,特别涉及一种用于同时校正光谱仪系统宽波段的子午彗差和像散的自由曲面光学器件。The invention relates to the improvement of the spectrometer, in particular to a free-form surface optical device for simultaneously correcting the meridional coma and astigmatism in the wide band of the spectrometer system.
背景技术 Background technique
光谱仪器一般是用来测定光源光谱组成的,包括光谱波长分布、强度响应和光谱带宽等。以传统的Czerny-Turner光谱仪为例,其包括入射狭缝、平面衍射光栅、准直镜、成像镜、光电探测器。准直镜是将入射光束准直并反射到衍射光栅,反射镜是将被衍射光栅色散的光束聚焦成像到探测器上,常用的光电探测器是线性CCD阵列,因此需要提高光谱仪的集光效率和分辨率。Spectroscopic instruments are generally used to determine the spectral composition of light sources, including spectral wavelength distribution, intensity response, and spectral bandwidth. Taking the traditional Czerny-Turner spectrometer as an example, it includes an incident slit, a plane diffraction grating, a collimating mirror, an imaging mirror, and a photodetector. The collimating mirror collimates the incident beam and reflects it to the diffraction grating, and the mirror focuses the beam dispersed by the diffraction grating onto the detector. The commonly used photodetector is a linear CCD array, so it is necessary to improve the light collection efficiency of the spectrometer and resolution.
在Czerny-Turner光谱仪系统中,光线经过离轴的准直镜和成像镜,到达像面的光程不同,与主光线的交点不同,因此产生像差。在子午面内,两侧的边缘光线被反射镜反射后与主光线交于不同的点,因此产生子午彗差。同时,光线被反射系统反射后,其在子午面内的光束与主光线的交点和弧矢面内的光束与主光线的交点不重合,因此得到像散。像散和彗差是影响CCD阵列集光效率和分辨率的主要因素,所以在光谱仪中需要矫正这两类像差。In the Czerny-Turner spectrometer system, the light passes through the off-axis collimating mirror and imaging mirror, the optical path to the image plane is different, and the intersection point with the chief ray is different, so aberration occurs. In the meridian plane, the marginal rays on both sides are reflected by the mirror and intersect with the chief ray at different points, thus producing meridional coma. At the same time, after the light is reflected by the reflection system, the intersection point of the beam in the meridian plane and the chief ray and the intersection point of the beam in the sagittal plane and the chief ray do not coincide, so astigmatism is obtained. Astigmatism and coma are the main factors affecting the light collection efficiency and resolution of the CCD array, so these two types of aberrations need to be corrected in the spectrometer.
常用的方法是在光谱仪像面上增加柱面镜,但是柱面镜只能校正光谱仪的像散。校正光谱仪系统彗差的方法:调整光学系统的各参数,即选择合适的准直镜离轴角及曲率半径,成像镜离轴角及曲率半径,光线在光栅上的入射角和衍射角,使这些参数之间满足Shafer公式,来校正特定波长的彗差。但是该方法只能校正中心波长的彗差,整个光学系统的彗差随波长变化呈V字型分布。A common method is to add a cylindrical mirror on the image plane of the spectrometer, but the cylindrical mirror can only correct the astigmatism of the spectrometer. The method of correcting the coma of the spectrometer system: adjust the parameters of the optical system, that is, select the appropriate off-axis angle and radius of curvature of the collimating mirror, the off-axis angle and radius of curvature of the imaging mirror, and the incident angle and diffraction angle of the light on the grating, so that These parameters satisfy the Shafer formula to correct the coma at a specific wavelength. However, this method can only correct the coma at the central wavelength, and the coma of the entire optical system is distributed in a V shape as the wavelength changes.
为了得到光谱仪最大的分辨率和集光效率,需要有一个光学器件同时校正光谱仪的像散和宽波段子午彗差。In order to obtain the maximum resolution and light collection efficiency of the spectrometer, an optical device is required to simultaneously correct the astigmatism and broadband meridional coma of the spectrometer.
发明内容 Contents of the invention
本发明的主要目的在于克服现有技术中的不足,提供一种能同时校正现有光谱仪宽波段的子午彗差和像散的自由曲面光学器件。为解决上述技术问题,本发明的解决方案是:The main purpose of the present invention is to overcome the deficiencies in the prior art, and provide a free-form surface optical device capable of simultaneously correcting the meridional coma and astigmatism in the wide band of the existing spectrometer. In order to solve the problems of the technologies described above, the solution of the present invention is:
提供一种用于校正光谱仪像散与彗差的自由曲面光学器件,光谱仪包括光源、入射狭缝、凹面准直镜、平面衍射光栅、凹面成像镜和光电探测器,其特征在于,所述自由曲面光学器件位于凹面成像镜与光电探测器之间,自由曲面光学器件的上表面是自由曲面,下表面是平面,下表面与光电探测器叠放在一起;所述自由曲面通过以下方法确定:A free-form surface optical device for correcting astigmatism and coma of a spectrometer is provided, the spectrometer includes a light source, an incident slit, a concave collimator mirror, a plane diffraction grating, a concave imaging mirror and a photodetector, wherein the free-form surface The curved optical device is located between the concave imaging mirror and the photodetector, the upper surface of the free-form optical device is a free-form surface, the lower surface is a plane, and the lower surface is stacked with the photodetector; the free-form surface is determined by the following method:
A、计算出光束经过凹面准直镜、平面衍射光栅和凹面成像镜产生的总彗差:光束从入射狭缝入射光谱仪,经凹面准直镜反射至平面衍射光栅的光程函数可以表示为:A. Calculate the total coma generated by the beam passing through the concave collimator mirror, the plane diffraction grating and the concave imaging mirror: the light path function of the beam entering the spectrometer from the incident slit and reflected by the concave collimator mirror to the plane diffraction grating can be expressed as:
其中,F1为边缘光线从入射狭缝到凹面准直镜再到平面衍射光栅的光程,r,r’分别为主光线通过凹面准直镜前后的光程,ω为边缘光线在凹面准直镜上与主光线的距离,α,α'分别为主光线在凹面准直镜上的入射角和出射角,R1为凹面准直镜的曲率半径;Among them, F 1 is the optical path of the marginal ray from the incident slit to the concave collimator and then to the plane diffraction grating, r, r' are the optical paths before and after the main ray passes through the concave collimator, ω is the optical path of the marginal ray on the concave collimator The distance between the straight mirror and the chief ray, α, α' are the incident angle and exit angle of the chief ray on the concave collimator, respectively, and R1 is the radius of curvature of the concave collimator;
由于凹面准直镜之后的光线为平行光,所以r' = ∞;Since the light behind the concave collimator is parallel light, r' = ∞;
由光束的几何关系可得ω=ω′/cosα′, ;From the geometric relationship of the beam, we can get ω=ω′/cosα′, ;
其中,ω’为经过的凹面准直镜后的平行光束的半宽度,W为平面衍射光栅的宽度,αg为平行光束在平面衍射光栅上的入射角,因此式(1)可以做简化:Among them, ω' is the half-width of the parallel beam passing through the concave collimating mirror, W is the width of the plane diffraction grating, and α g is the incident angle of the parallel beam on the plane diffraction grating, so formula (1) can be simplified:
根据费马原理,即 ,可以得到:According to Fermat's principle, that is , you can get:
根据反射原理可以得到α = -α',式(2)第一项为零;According to the principle of reflection, α = -α' can be obtained, and the first item of formula (2) is zero;
取 使得式(2)第二项也为零,则式(2)可以表示为:Pick Make the second term of formula (2) also be zero, then formula (2) can be expressed as:
可以得到 ,即式(3)为光经过凹面准直镜产生的角像差,用∂α g表示光线经过凹面准直镜后的彗差;can get , that is, formula (3) is the angular aberration produced by the light passing through the concave collimator, and ∂α g represents the coma after the light passes through the concave collimator;
根据光栅方程mλ=d(sinαg+sinβg),其中,m为整数,λ为波长,d为光栅常数,βg为该波长光线在平面衍射光栅上的衍射角;According to the grating equation mλ=d(sinα g +sinβ g ), wherein, m is an integer, λ is the wavelength, d is the grating constant, and β g is the diffraction angle of light of this wavelength on the plane diffraction grating;
可以得到凹面准直镜产生的角像差经过平面衍射光栅衍射后变为:It can be obtained that the angular aberration produced by the concave collimator is diffracted by the plane diffraction grating and becomes:
其中,∂βg表示光线经过凹面准直镜和平面衍射光栅后的角像差,用∂βg表示光线经过平面衍射光栅后的彗差;Among them, ∂β g represents the angular aberration after the light passes through the concave collimator and the plane diffraction grating, and ∂β g represents the coma after the light passes through the plane diffraction grating;
同理可以推导出光线经过凹面成像镜后产生的彗差;In the same way, the coma aberration produced by light passing through the concave imaging mirror can be deduced;
设光线从平面衍射光栅到达凹面成像镜,再到达像面的光程函数为F2,则F2的推导过程与光线从入射狭缝到凹面准直镜到平面衍射光栅的推导过程一致,所以:Assuming that the light path function from the plane diffraction grating to the concave imaging mirror and then to the image plane is F 2 , then the derivation process of F 2 is consistent with the derivation process of light from the incident slit to the concave collimator to the plane diffraction grating, so :
其中,F2为边缘光线从平面衍射光栅到凹面成像镜再到像面的光程,β为主光线在凹面成像镜上的入射角,R2为凹面成像镜的曲率半径;Among them, F 2 is the optical path of the marginal ray from the plane diffraction grating to the concave imaging mirror and then to the image plane, β is the incident angle of the chief ray on the concave imaging mirror, and R 2 is the radius of curvature of the concave imaging mirror;
所以凹面准直镜、平面衍射光栅和凹面成像镜产生的总彗差Δt可以表示为:Therefore, the total coma Δt produced by the concave collimator, the plane diffraction grating and the concave imaging mirror can be expressed as:
B、计算出加自由曲面光学器件后每一波长的光束在光谱仪结构中产生的彗差:在光电探测器上方增加自由曲面光学器件,光束与自由曲面相交部分的曲率用R3代替,自由曲面光学器件的材料对应波长的折射率以n代替,B. Calculate the coma aberration generated by the beam of each wavelength in the spectrometer structure after adding the free-form surface optical device: add the free-form surface optical device above the photodetector, and replace the curvature of the intersection part of the beam with the free-form surface by R 3 , the free-form surface The refractive index of the material of the optical device corresponding to the wavelength is replaced by n,
光线从平面衍射光栅到凹面成像镜,再到自由曲面光学器件,最终到达像面的光程函数F30可以表示为:增加自由曲面前光线从平面衍射光栅到凹面成像镜到原像面的光程,减去增加自由曲面前自由曲面所在位置开始到原像面的光程,加上增加自由曲面后自由曲面所在位置开始到现像面的光程;F30可以表示为:The optical path function F30 of the light from the plane diffraction grating to the concave imaging mirror to the free-form surface optical device and finally to the image surface can be expressed as: increasing the light from the plane diffraction grating to the concave imaging mirror to the original image surface Subtract the optical path from the position of the free-form surface to the original image surface before adding the free-form surface, and add the optical path from the position of the free-form surface to the current image surface after adding the free-form surface; F 30 can be expressed as:
F30=F2+F3 (7)F 30 =F 2 +F 3 (7)
其中增加自由曲面前光线从平面衍射光栅到凹面成像镜到原像面的光程F2之前已经推导过,剩下部分的光程F3可以表示为:Among them, the optical path F 2 of the free-form front light from the plane diffraction grating to the concave imaging mirror to the original image plane has been deduced before, and the remaining optical path F 3 can be expressed as:
其中,F3表示增加自由曲面后,边缘光线从自由曲面光学器件到达像面的光程与增加自由曲面前的变化,ω3为光束在自由曲面光学器件上边缘光线离主光线的距离,r3和r′3分别为未增加自由曲面光学器件时和增加自由曲面光学器件后主光线从该位置起到像面的光程,β3和β′3分别为主光线在自由曲面光学器件上的入射角和折射角;Among them, F3 represents the change of the optical path of the marginal ray from the free-form surface optical device to the image plane after the free-form surface is added, and before the free-form surface is added, ω3 is the distance between the edge ray and the chief ray of the beam on the free-form surface optical device, r 3 and r′ 3 are respectively the optical path of the chief ray from this position to the image plane when the free-form surface optical device is not added and after the free-form surface optical device is added, and β 3 and β′ 3 are respectively the chief ray on the free-form surface optical device The angle of incidence and angle of refraction;
将式(8)对光束在凹面准直镜上的宽度ω求偏导,且根据折射原理sinβ3=nsinβ′3,光程差可以表示为:Calculate the partial guide of the width ω of the light beam on the concave collimator by formula (8), and according to the principle of refraction sinβ 3 =nsinβ′ 3 , the optical path difference can be expressed as:
选择r3,r3',R3,β3的条件使令式(9)中第一项为0,并结合几何关系,得到式(10)的关系:Select the conditions of r 3 , r 3 ', R 3 , and β 3 to make the first item in formula (9) equal to 0, and combine the geometric relationship to obtain the relationship of formula (10):
则自由曲面产生的彗差Δc可以表示为:Then the coma Δc produced by the free-form surface can be expressed as:
综上所述,增加自由曲面光学器件后每一波长的光束在光谱仪结构中产生的彗差Δ为:To sum up, the coma Δ generated by the beam of each wavelength in the spectrometer structure after adding the free-form surface optical device is:
Δ=Δt+Δc (12)Δ= Δt + Δc (12)
C、确定自由曲面:利用评价函数,使光谱仪在一定波段范围内子午彗差的和降到最低,以校正宽波段的彗差;C. Determine the free-form surface: use the evaluation function to minimize the sum of the meridional coma of the spectrometer within a certain band range, so as to correct the wide-band coma;
式(11)中β3、r3、R3、n四个变量是随波长变化的,某一波长对应的变量值计为β3λ,、r3λ、R3λ、nλ,其中,nλ为当前波长的折射率;先取合适的r30,表示中心波长主光线与自由曲面的交点位置;且规定自由曲面与子午面相交形成的曲线上每一点的曲率半径和曲率中心可以不同,但是曲率中心必须位于中心波长主光线所在的直线上,则对于每一个选定的R3λ,根据几何关系可以得到确定的β3λ,和r3λ,所以优化过程为在一定范围内寻找每一波长对应的R3λ,使得式(13)的评价函数最小;The four variables β 3 , r 3 , R 3 , and n in formula (11) vary with the wavelength, and the variable values corresponding to a certain wavelength are counted as β 3λ , r 3λ , R 3λ , n λ , where n λ is the refractive index of the current wavelength; first take the appropriate r 30 , which indicates the position of the intersection point between the principal ray of the central wavelength and the free-form surface; and it is stipulated that the radius of curvature and center of curvature of each point on the curve formed by the intersection of the free-form surface and the meridian surface can be different, but the curvature The center must be located on the straight line where the principal ray of the central wavelength is located, then for each selected R 3λ , the determined β 3λ and r 3λ can be obtained according to the geometric relationship, so the optimization process is to find the corresponding wavelength of each wavelength within a certain range R 3λ , making the evaluation function of formula (13) the smallest;
根据优化得到的变量值可以确定自由曲面在子午面内与每一波长的主光线的交点位置和曲率,将这些值拟合成一条曲线,该曲线即为自由曲面与子午面相交形成的曲线,再选择合适的垂直于子午面并与该曲线相交的曲线的曲率,以校正像散,即确定我们需要的自由曲面。According to the optimized variable value, the intersection position and curvature of the free-form surface and the chief ray of each wavelength in the meridian plane can be determined, and these values can be fitted into a curve, which is the curve formed by the intersection of the free-form surface and the meridian plane. Then choose the appropriate curvature of the curve perpendicular to the meridian plane and intersected with the curve to correct astigmatism, that is, to determine the free-form surface we need.
在本发明中,所述自由曲面光学器件的中心厚度为9.4mm。In the present invention, the central thickness of the free-form surface optical device is 9.4 mm.
在本发明中,所述自由曲面光学器件为材质是光学玻璃的光学器件。In the present invention, the free-form surface optical device is an optical device made of optical glass.
在本发明中,所述自由曲面的垂直于色散方向的曲率半径在4.5mm到5.5mm之间。In the present invention, the curvature radius of the free-form surface perpendicular to the dispersion direction is between 4.5 mm and 5.5 mm.
与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:
在光谱仪的光电探测器(线性CCD阵列)上加自由曲面光学器件,自由曲面光学器件的自由曲面曲率沿着色散方向和垂直于色散方向分别变化,分别校正光谱仪的子午彗差和像散,提高了集光效率,增加了光谱仪的灵敏度。A free-form surface optical device is added to the photodetector (linear CCD array) of the spectrometer. The free-form surface curvature of the free-form surface optical device changes along the dispersion direction and the direction perpendicular to the dispersion, respectively, and the meridian coma and astigmatism of the spectrometer are respectively corrected to improve The light collection efficiency is improved, and the sensitivity of the spectrometer is increased.
附图说明 Description of drawings
图1为本发明的结构图。Fig. 1 is a structural diagram of the present invention.
图2为本发明的横截面图。Figure 2 is a cross-sectional view of the present invention.
图3为本发明的侧面示意图。Fig. 3 is a schematic side view of the present invention.
图4为本发明的下表面示意图。Fig. 4 is a schematic diagram of the lower surface of the present invention.
图5为安装有本发明的光谱仪系统图。Fig. 5 is a system diagram of a spectrometer installed with the present invention.
图6为某一波长对应的一段自由曲面子午方向示意图。Fig. 6 is a schematic diagram of a meridional direction of a free-form surface corresponding to a certain wavelength.
图7为光谱仪中凹面准直镜的光路图。Fig. 7 is an optical path diagram of a concave collimating mirror in a spectrometer.
图中的附图标记为:1光源;2入射狭缝;3凹面准直镜;4平面衍射光栅;5凹面成像镜;6自由曲面光学器件的上表面;7自由曲面光学器件的下表面;8光电探测器;9入射光束;10准直光束;11成像光束。Reference signs in the figure are: 1 light source; 2 incident slit; 3 concave collimating mirror; 4 plane diffraction grating; 5 concave imaging mirror; 6 upper surface of free-form optical device; 7 lower surface of free-form optical device; 8 photodetector; 9 incident light beam; 10 collimated light beam; 11 imaging light beam.
具体实施方式 Detailed ways
下面结合附图与具体实施方式对本发明作进一步详细描述:Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
光谱仪包括光源1、入射狭缝2、凹面准直镜3、平面衍射光栅4、凹面成像镜5和光电探测器8,具体采用Czerny-Turner光谱仪。The spectrometer includes a light source 1, an incident slit 2, a concave collimator mirror 3, a plane diffraction grating 4, a concave imaging mirror 5, and a photodetector 8, specifically a Czerny-Turner spectrometer.
为了校正光谱仪系统宽波段的子午彗差,本发明在凹面成像镜5与光电探测器8之间放置一个自由曲面光学器件。如图1所示,该自由曲面光学器件的上表面6是自由曲面,沿着色散方向曲面的曲率随着与其相交的波长不同而发生变化,以校正每一波长的子午彗差。在垂直于色散方向,曲面也有一定的曲率,用于校正像散。自由曲面光学器件的下表面7是与光电探测器8贴合的,所以呈平面。自由曲面光学器件的中心厚度为9.4mm,自由曲面垂直于色散方向的曲率半径在4.5mm到5.5mm之间,自由曲面光学器件的材质是光学玻璃,可以选择K9等常用玻璃。In order to correct the meridional coma aberration of the wide band of the spectrometer system, the present invention places a free-form surface optical device between the concave imaging mirror 5 and the photodetector 8 . As shown in FIG. 1 , the upper surface 6 of the free-form surface optical device is a free-form surface, and the curvature of the curved surface along the dispersion direction changes with different wavelengths intersecting it, so as to correct the meridional coma of each wavelength. In the direction perpendicular to the dispersion, the curved surface also has a certain curvature, which is used to correct the astigmatism. The lower surface 7 of the free-form surface optical device is attached to the photodetector 8, so it is plane. The central thickness of the free-form surface optical device is 9.4mm, and the curvature radius of the free-form surface perpendicular to the dispersion direction is between 4.5mm and 5.5mm. The material of the free-form surface optical device is optical glass, and common glass such as K9 can be selected.
所述自由曲面通过以下方法确定:The freeform surface is determined by the following method:
A、计算出光束经过凹面准直镜3、平面衍射光栅4和凹面成像镜5产生的总彗差:光束从入射狭缝2入射光谱仪,经凹面准直镜3反射至平面衍射光栅4的光程函数可以表示为:A. Calculate the total coma generated by the light beam passing through the concave collimating mirror 3, the plane diffraction grating 4 and the concave imaging mirror 5: the light beam is incident on the spectrometer from the incident slit 2, and is reflected by the concave collimating mirror 3 to the light of the plane diffraction grating 4 The program function can be expressed as:
其中,F1为边缘光线从入射狭缝2到凹面准直镜3再到平面衍射光栅4的光程,r,r’分别为主光线通过凹面准直镜3前后的光程,ω为边缘光线在凹面准直镜3上与主光线的距离,α,α'分别为主光线在凹面准直镜3上的入射角和出射角,R1为凹面准直镜3的曲率半径。Among them, F 1 is the optical path of the marginal ray from the incident slit 2 to the concave collimator 3 and then to the plane diffraction grating 4, r and r' are the optical paths of the chief ray before and after passing through the concave collimator 3, ω is the edge The distance between the ray and the chief ray on the concave collimator 3, α, α' are the incident angle and the exit angle of the chief ray on the concave collimator 3 respectively, and R1 is the radius of curvature of the concave collimator 3.
由于凹面准直镜3之后的光线为平行光,所以r' = ∞;Since the light behind the concave collimator 3 is parallel light, r' = ∞;
由光束的几何关系可得ω=ω′/cosα′, ;From the geometric relationship of the beam, we can get ω=ω′/cosα′, ;
其中,ω’为经过的凹面准直镜3后的平行光束的半宽度,W为平面衍射光栅4的宽度,αg为平行光束在平面衍射光栅4上的入射角,因此式(1)可以做简化:Among them, ω' is the half-width of the parallel beam passing through the concave collimator 3, W is the width of the plane diffraction grating 4, and α g is the incident angle of the parallel beam on the plane diffraction grating 4, so formula (1) can be Do the simplification:
根据费马原理,即 ,可以得到:According to Fermat's principle, that is , you can get:
根据反射原理可以得到α = -α',式(2)第一项为零;According to the principle of reflection, α = -α' can be obtained, and the first item of formula (2) is zero;
取 使得式(2)第二项也为零,则式(2)可以表示为:Pick Make the second term of formula (2) also be zero, then formula (2) can be expressed as:
可以得到 ,即式(3)为光经过凹面准直镜3产生的角像差,用∂α g表示光线经过凹面准直镜3后的彗差。can get , that is, formula (3) is the angular aberration generated by the light passing through the concave collimator 3, and ∂α g represents the coma after the light passes through the concave collimator 3.
根据光栅方程mλ=d(sinα g+sinβg),其中,m为整数,λ为波长,d为光栅常数,βg为该波长光线在平面衍射光栅4上的衍射角;According to the grating equation mλ=d( sinαg + sinβg ), wherein, m is an integer, λ is a wavelength, d is a grating constant, and βg is the diffraction angle of light of this wavelength on the plane diffraction grating 4;
可以得到凹面准直镜3产生的角像差经过平面衍射光栅4衍射后变为:It can be obtained that the angular aberration generated by the concave collimator 3 is diffracted by the plane diffraction grating 4 and becomes:
其中,∂βg表示光线经过凹面准直镜3和平面衍射光栅4后的角像差,用∂βg表示光线经过平面衍射光栅4后的彗差。Among them, ∂β g represents the angular aberration of the light after passing through the concave collimator 3 and the plane diffraction grating 4 , and ∂β g represents the coma aberration of the light after passing through the plane diffraction grating 4 .
同理可以推导出光线经过凹面成像镜5后产生的彗差;In the same way, it can be deduced that the coma generated after the light passes through the concave imaging mirror 5;
设光线从平面衍射光栅4到达凹面成像镜5,再到达像面的光程函数为F2,则F2的推导过程与光线从入射狭缝2到凹面准直镜3到平面衍射光栅4的推导过程一致,所以:Assuming that the optical path function of the light from the plane diffraction grating 4 to the concave imaging mirror 5 and then to the image plane is F2 , then the derivation process of F2 is the same as that of the light from the incident slit 2 to the concave collimator 3 to the plane diffraction grating 4 The derivation process is consistent, so:
其中,F2为边缘光线从平面衍射光栅4到凹面成像镜5再到像面的光程,β为主光线在凹面成像镜5上的入射角,R2为凹面成像镜5的曲率半径。Among them, F2 is the optical path of the marginal ray from the plane diffraction grating 4 to the concave imaging mirror 5 and then to the image plane, β is the incident angle of the chief ray on the concave imaging mirror 5, and R2 is the radius of curvature of the concave imaging mirror 5.
所以凹面准直镜3、平面衍射光栅4和凹面成像镜5产生的总彗差Δt可以表示为:Therefore, the total coma Δt produced by the concave collimator 3, the plane diffraction grating 4 and the concave imaging mirror 5 can be expressed as:
B、计算出加自由曲面光学器件后每一波长的光束在光谱仪结构中产生的彗差:在光电探测器8上方增加自由曲面光学器件,光束与自由曲面相交部分的曲率用R3代替,自由曲面光学器件的材料对应波长的折射率以n代替。B. Calculate the coma aberration produced by the light beam of each wavelength in the spectrometer structure after adding the free-form surface optical device: increase the free-form surface optical device above the photodetector 8, and the curvature of the intersecting part of the light beam and the free-form surface is replaced by R 3 , free The refractive index of the material of the curved optical device corresponding to the wavelength is replaced by n.
光线从平面衍射光栅4到凹面成像镜5,再到自由曲面光学器件,最终到达像面的光程函数F30可以表示为:增加自由曲面前光线从平面衍射光栅4到凹面成像镜5到原像面的光程,减去增加自由曲面前自由曲面所在位置开始到原像面的光程,加上增加自由曲面后自由曲面所在位置开始到现像面的光程;F30可以表示为:The light from the plane diffraction grating 4 to the concave imaging mirror 5, and then to the free-form surface optical device, finally reaches the optical path function F30 of the image plane, which can be expressed as: increasing the free-form front light from the plane diffraction grating 4 to the concave imaging mirror 5 to the original The optical path of the image surface, minus the optical path from the position of the free-form surface to the original image surface before adding the free-form surface, plus the optical path from the position of the free-form surface to the existing image surface after adding the free-form surface; F 30 can be expressed as:
F30=F2+F3 (7)F 30 =F 2 +F 3 (7)
其中增加自由曲面前光线从平面衍射光栅4到凹面成像镜5到原像面的光程F2之前已经推导过,剩下部分的光程F3可以表示为:Among them, the optical path F2 of the free-form front light from the plane diffraction grating 4 to the concave imaging mirror 5 to the original image plane has been deduced before, and the remaining optical path F3 can be expressed as:
其中,F3表示增加自由曲面后,边缘光线从自由曲面光学器件到达像面的光程与增加自由曲面前的变化,ω3为光束在自由曲面光学器件上边缘光线离主光线的距离,r3和r′3分别为未增加自由曲面光学器件时和增加自由曲面光学器件后主光线从该位置起到像面的光程,β3和β′3分别为主光线在自由曲面光学器件上的入射角和折射角。Among them, F3 represents the change of the optical path of the marginal ray from the free-form surface optical device to the image plane after the free-form surface is added, and before the free-form surface is added, ω3 is the distance between the edge ray and the chief ray of the beam on the free-form surface optical device, r 3 and r′ 3 are respectively the optical path of the chief ray from this position to the image plane when the free-form surface optical device is not added and after the free-form surface optical device is added, and β 3 and β′ 3 are respectively the chief ray on the free-form surface optical device angle of incidence and angle of refraction.
将式(8)对光束在凹面准直镜3上的宽度ω求偏导,且根据折射原理sinβ3=nsinβ′3,光程差可以表示为:Calculate the deflection of the beam width ω on the concave collimating mirror 3 by formula (8), and according to the principle of refraction sinβ 3 =nsinβ′ 3 , the optical path difference can be expressed as:
选择r3,r3',R3,β3的条件使令式(9)中第一项为0,并结合几何关系,得到式(10)的关系:Select the conditions of r 3 , r 3 ', R 3 , and β 3 to make the first item in formula (9) equal to 0, and combine the geometric relationship to obtain the relationship of formula (10):
则自由曲面产生的彗差Δc可以表示为:Then the coma Δc produced by the free-form surface can be expressed as:
综上所述,增加自由曲面光学器件后每一波长的光束在光谱仪结构中产生的彗差Δ为:To sum up, the coma Δ generated by the beam of each wavelength in the spectrometer structure after adding the free-form surface optical device is:
Δ=Δt+Δc (12)Δ= Δt + Δc (12)
C、确定自由曲面:利用评价函数,使光谱仪在一定波段范围内子午彗差的和降到最低,以校正宽波段的彗差;C. Determine the free-form surface: use the evaluation function to minimize the sum of the meridional coma of the spectrometer within a certain band range, so as to correct the wide-band coma;
式(11)中β3、r3、R3、n四个变量是随波长变化的,某一波长对应的变量值计为β3λ,、r3λ、R3λ、nλ,其中,nλ为当前波长的折射率;先取合适的r30,表示中心波长主光线与自由曲面的交点位置;且规定自由曲面与子午面相交形成的曲线上每一点的曲率半径和曲率中心可以不同,但是曲率中心必须位于中心波长主光线所在的直线上,则对于每一个选定的R3λ,根据几何关系可以得到确定的β3λ,和r3λ,所以优化过程为在一定范围内寻找每一波长对应的R3λ,使得式(13)的评价函数最小。The four variables β 3 , r 3 , R 3 , and n in formula (11) vary with the wavelength, and the variable values corresponding to a certain wavelength are counted as β 3λ , r 3λ , R 3λ , n λ , where n λ is the refractive index of the current wavelength; first take the appropriate r 30 , which indicates the position of the intersection point between the principal ray of the central wavelength and the free-form surface; and it is stipulated that the radius of curvature and center of curvature of each point on the curve formed by the intersection of the free-form surface and the meridian surface can be different, but the curvature The center must be located on the straight line where the principal ray of the central wavelength is located, then for each selected R 3λ , the determined β 3λ and r 3λ can be obtained according to the geometric relationship, so the optimization process is to find the corresponding wavelength of each wavelength within a certain range R 3λ , making the evaluation function of formula (13) the smallest.
根据优化得到的变量值可以确定自由曲面在子午面内与每一波长的主光线的交点位置和曲率,将这些值拟合成一条曲线,该曲线即为自由曲面与子午面相交形成的曲线,再选择合适的垂直于子午面并与该曲线相交的曲线的曲率,以校正像散,即确定我们需要的自由曲面。According to the optimized variable value, the intersection position and curvature of the free-form surface and the chief ray of each wavelength in the meridian plane can be determined, and these values can be fitted into a curve, which is the curve formed by the intersection of the free-form surface and the meridian plane. Then choose the appropriate curvature of the curve perpendicular to the meridian plane and intersected with the curve to correct astigmatism, that is, to determine the free-form surface we need.
由上表面是所确定的自由曲面制成的自由曲面光学器件设置在光电探测器8上,即可用于同时校正现有光谱仪宽波段的子午彗差和像散。The free-form surface optical device made of the determined free-form surface on the upper surface is arranged on the photodetector 8, which can be used to simultaneously correct the meridional coma and astigmatism in the wide band of the existing spectrometer.
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