CN110370031B - Centrosymmetric UVW platform - Google Patents
Centrosymmetric UVW platform Download PDFInfo
- Publication number
- CN110370031B CN110370031B CN201810327819.7A CN201810327819A CN110370031B CN 110370031 B CN110370031 B CN 110370031B CN 201810327819 A CN201810327819 A CN 201810327819A CN 110370031 B CN110370031 B CN 110370031B
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- Prior art keywords
- platform
- motion guide
- linear motion
- guide
- guide element
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/36—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission in which a servomotor forms an essential element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Machine Tool Units (AREA)
Abstract
The invention discloses a central symmetry UVW platform, which comprises a fixed platform and a driving mechanism; a movable platform is arranged above the fixed platform, and a guide mechanism is arranged between the fixed platform and the movable platform; the guide mechanism comprises three sets of guide components; the rotary motion guide elements in one set of guide assembly are connected with the geometric center of the movable platform, the first linear motion guide element in the guide assembly guides the movable platform in the X direction, the second linear motion guide element in the guide assembly guides the movable platform in the Y direction, the rotary motion guide elements in the other two sets of guide assemblies are respectively connected with the movable platform, the two rotary motion guide elements are symmetrical about the symmetry center of the movable platform, the first linear motion guide element in the two sets of guide assemblies guides the movable platform in the Y direction, and the second linear motion guide element in the two sets of guide assemblies guides the movable platform in the X direction, so that the phenomenon that the movable platform is stressed unevenly to cause inconsistent running errors on two sides of the movable platform when the movable platform moves along the Y direction is avoided.
Description
Technical Field
The invention relates to the technical field of UVW platforms, in particular to a central symmetry UVW platform.
Background
At present, high-precision alignment technology occupies an increasingly important position in the micro-machining manufacturing industry, and the alignment technology widely relates to the industries of semiconductor equipment, network printing equipment, LED or liquid crystal panel manufacturing, optical fiber butt joint, micro-mechanical electronic device processing packaging and the like. In order to improve the machining precision of parts and speed up the alignment efficiency, related industries put higher requirements on alignment technology, and the high-precision alignment technology depends on the high performance of a UVW platform.
The moving chain of the known UVW platform consists of 3 driving chains and 1 driven chain, the 4 moving chains being distributed at the four corners of its top stage or at the center of its four sides. If the direction of the platform with 2 driving chains is set as the X direction, and the direction of only 1 driving chain is set as the Y direction, then the Y direction is only one driving chain, and the driving chain is not on the central line of the moving platform, so when the moving platform operates in the Y direction, the movement error of the driving chain side in the Y direction is very easy to be smaller due to unbalanced stress of the moving platform, but the movement error of the driven chain side is larger.
It follows that the prior art has certain drawbacks.
Disclosure of Invention
In view of the above, in order to solve the problems in the prior art, the present invention provides a central-symmetrical UVW platform.
The invention solves the problems by the following technical means:
a central symmetry UVW platform comprises a fixed platform and a driving mechanism;
A movable platform is arranged above the fixed platform, the movable platform and the fixed platform are parallel to each other, a guide mechanism is arranged between the fixed platform and the movable platform, and the guide mechanism can enable the movable platform to move along the Y direction or the X direction relative to the fixed platform;
The guide mechanism comprises three sets of guide components;
The guide assembly comprises a first linear motion guide element, a second linear motion guide element and a rotary motion guide element, wherein the guide direction of the first linear motion guide element is mutually perpendicular to the guide direction of the second linear motion guide element, a fixed part in the first linear motion guide element is connected with a movable part of the second linear motion guide element, the movable part in the first linear motion guide element is connected with the movable platform through the rotary motion guide element, the rotary motion guide element can enable the movable platform to rotate around the axial lead of the rotary motion guide element relative to the movable part of the first linear motion guide element, the axial lead of the rotary motion guide element is parallel to the Z direction, and a fixed part of the second linear motion guide element is connected with the fixed platform;
The rotary motion guide element in one set of guide assembly is connected with the geometric center of the movable platform, the first linear motion guide element in the guide assembly guides the movable platform in the X direction, the second linear motion guide element in the guide assembly guides the movable platform in the Y direction, and the driving mechanism comprises three sets, wherein one set of driving mechanism drives the movable piece of the second linear motion guide element to move along the Y direction and further drives the movable platform to move along the Y direction;
The rotary motion guide elements in the other two sets of guide assemblies are respectively connected with the movable platform, the two sets of rotary motion guide elements are centrally symmetrical about the symmetry center of the movable platform, the first linear motion guide elements in the two sets of guide assemblies guide the movable platform in the Y direction, the second linear motion guide elements in the two sets of guide assemblies guide the movable platform in the X direction, and the other two sets of driving mechanisms respectively drive the movable piece of the second linear motion guide element to move in the X direction so as to drive the movable platform to move in the X direction.
Preferably, the guiding mechanism further comprises two sets of guiding components, the rotary motion guiding elements in the two sets of guiding components are respectively connected with the moving platform, the two sets of rotary motion guiding elements are symmetrical about the center of symmetry of the moving platform, the first linear motion guiding element in the two sets of guiding components guides the moving platform in the Y direction, and the second linear motion guiding element in the two sets of guiding components guides the moving platform in the X direction.
Preferably, the first linear motion guiding element and the second linear motion guiding element are rolling linear guide rail pairs, the moving parts of the first linear motion guiding element and the second linear motion guiding element are sliding blocks in the rolling linear guide rail pairs, the fixed parts of the first linear motion guiding element and the second linear motion guiding element are guide rails in the rolling linear guide rail pairs, the rotary motion guiding element is a crossed ball collar, the outer ring of the crossed ball collar is connected with the moving platform, and the inner ring of the crossed ball collar is connected with the moving part of the first linear motion guiding element.
Preferably, the driving mechanism comprises a servo motor, a ball screw pair, a connecting plate and two bearing seats;
two ends of a screw rod in the ball screw pair are respectively and rotatably connected with a bearing seat;
the servo motor is connected with the screw rod through a coupler;
One end of the connecting plate is connected with a nut in the ball screw pair, the other end of the connecting plate is connected with a sliding block of the first linear motion guiding element, and the servo motor drives the screw rod to rotate so as to drive the sliding block to linearly move on the guide rail.
Preferably, a vibration isolation table is arranged below the fixed platform, and the fixed platform is fixed on the vibration isolation table.
Preferably, the positioning platform is provided with a plurality of positioning holes, the shock insulation platform is provided with positioning pins with the quantity corresponding to that of the positioning holes, and the positioning pins are inserted into the corresponding positioning holes.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, the situation that the running errors on two sides of the movable platform are inconsistent due to unbalanced stress of the movable platform when the movable platform moves along the Y direction can be avoided.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the structure of the present invention;
Fig. 2 is a schematic structural view of the guide assembly.
Reference numerals illustrate:
1. A fixed platform; 2. a movable platform; 3. a guide assembly; 4. a first linear motion guide element; 5. a second linear motion guide member; 6. a rotary motion guide element; 7. a movable member; 8. and a fixing piece.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the following detailed description of the technical solution of the present invention refers to the accompanying drawings and specific embodiments. It should be noted that the described embodiments are only some embodiments of the present invention, and not all embodiments, and that all other embodiments obtained by persons skilled in the art without making creative efforts based on the embodiments in the present invention are within the protection scope of the present invention.
It should be appreciated that the orientation or positional relationship indicated by the terms "top," "bottom," and the like are based on the orientation or positional relationship shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or elements being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
The terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", or a third "may explicitly or implicitly include one or more such feature. In the description of the present invention, unless otherwise indicated, the meaning of "a group" is two or more.
Examples
As shown in fig. 1-2, a central symmetrical UVW platform comprises a fixed platform 1 and a driving mechanism;
A movable platform 2 is arranged above the fixed platform 1, the movable platform 2 and the fixed platform 1 are parallel to each other, a guide mechanism is arranged between the fixed platform 1 and the movable platform 2, and the guide mechanism can enable the movable platform 2 to move along the Y direction or the X direction relative to the fixed platform 1;
the guide mechanism comprises three sets of guide assemblies 3;
The guide assembly 3 comprises a first linear motion guide element 4, a second linear motion guide element 5 and a rotary motion guide element 6, wherein the guide direction of the first linear motion guide element 4 is perpendicular to the guide direction of the second linear motion guide element 5, the first linear motion guide element 4 and the second linear motion guide element 5 comprise a fixed part 8 and a movable part 7, the movable part 7 can move linearly relative to the fixed part 8, the fixed part 8 in the first linear motion guide element 4 is connected with the movable part 7 of the second linear motion guide element 5, the movable part 7 in the first linear motion guide element 4 is connected with the movable platform 2 through the rotary motion guide element 6, the rotary motion guide element 6 can enable the movable platform 2 to rotate around the axial lead of the rotary motion guide element 6 relative to the movable part 7 of the first linear motion guide element 4, the axial lead of the rotary motion guide element 6 is parallel to the Z direction, and the fixed part 8 of the second linear motion guide element 5 is connected with the fixed platform 1;
Wherein, the rotary motion guiding element 6 in one guiding component 3 is connected with the geometric center of the movable platform 2, the first linear motion guiding element 4 in the guiding component 3 guides the movable platform 2 in X direction, the second linear motion guiding element 5 in the guiding component 3 guides the movable platform 2 in Y direction, the driving mechanism has three sets, one driving mechanism drives the movable piece 7 of the second linear motion guiding element 5 to move in Y direction, the first linear motion guiding element 4 and the rotary motion guiding element 6 move along with the Y direction, and then the movable platform 2 is driven to move in Y direction;
the rotary motion guide elements 6 in the other two sets of guide assemblies 3 are respectively connected with the movable platform 2, the rotary motion guide elements 6 are symmetrical about the center of symmetry of the movable platform 2, the first linear motion guide elements 4 in the two sets of guide assemblies 3 guide the movable platform 2 in the Y direction, the second linear motion guide elements 5 in the two sets of guide assemblies 3 guide the movable platform 2 in the X direction, and the other two sets of driving mechanisms respectively drive the movable piece 7 of the second linear motion guide elements 5 to move in the X direction, and the first linear motion guide elements 4 and the rotary motion guide elements 6 move along with the movable platform 2 in the X direction, so that the movable platform 2 is driven to move in the X direction. Therefore, the invention can avoid the condition of inconsistent running errors on two sides of the movable platform 2 caused by unbalanced stress of the movable platform 2 when the movable platform 2 moves along the Y direction.
Preferably, the guiding mechanism further comprises two sets of guiding components 3, the rotary motion guiding elements 6 in the two sets of guiding components 3 are respectively connected with the moving platform 2, the two sets of rotary motion guiding elements 6 are symmetrical about the center of symmetry of the moving platform 2, the first linear motion guiding elements 4 in the two sets of guiding components 3 conduct Y-direction guiding on the moving platform 2, and the second linear motion guiding elements 5 in the two sets of guiding components 3 conduct X-direction guiding on the moving platform 2. The two sets of guide components 3 are arranged at the other opposite angle of the movable platform 2, so that the rigidity of the platform is increased, and the load and the stability of the platform are enhanced.
Preferably, the first linear motion guiding element 4 and the second linear motion guiding element 5 are rolling linear guide pairs, the moving parts 7 of the first linear motion guiding element 4 and the second linear motion guiding element 5 are sliding blocks in the rolling linear guide pairs, the fixed parts 8 of the first linear motion guiding element 4 and the second linear motion guiding element 5 are guide rails in the rolling linear guide pairs, the rotary motion guiding element 6 is a crossed ball collar, the outer ring of the crossed ball collar is connected with the moving platform 2, and the inner ring of the crossed ball collar is connected with the moving parts 7 of the first linear motion guiding element 4. The height of the guide assembly 3 can be adjusted by adjusting the height of the shims on the cross ball collar.
Preferably, the driving mechanism comprises a servo motor, a ball screw pair, a connecting plate and two bearing seats;
two ends of a screw rod in the ball screw pair are respectively and rotatably connected with a bearing seat;
the servo motor is connected with the screw rod through a coupler;
One end of the connecting plate is connected with a nut in the ball screw pair, the other end of the connecting plate is connected with a sliding block of the first linear motion guiding element, and the servo motor drives the screw rod to rotate so as to drive the sliding block to linearly move on the guide rail.
Preferably, a vibration isolation table is arranged below the fixed platform 1, and the fixed platform 1 is fixed on the vibration isolation table.
Preferably, the positioning platform 1 is provided with a plurality of positioning holes, the shock insulation platform is provided with positioning pins with the number corresponding to that of the positioning holes, and the positioning pins are inserted into the corresponding positioning holes. The platform 1 is fixed on the shock insulation platform through the positioning Kong Jiangding. Not only the processing and assembly precision of the platform, but also the working environment where the platform is located, external environment noise and external vibration can have a certain influence on the alignment precision of the platform, so that the positioning error of the platform is reduced by the vibration isolation platform.
The foregoing examples illustrate only a few embodiments of the invention and are described in detail herein without thereby limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (6)
1. The central symmetry UVW platform is characterized by comprising a fixed platform and a driving mechanism;
A movable platform is arranged above the fixed platform, the movable platform and the fixed platform are parallel to each other, a guide mechanism is arranged between the fixed platform and the movable platform, and the guide mechanism can enable the movable platform to move along the Y direction or the X direction relative to the fixed platform;
The guide mechanism comprises three sets of guide components;
The guide assembly comprises a first linear motion guide element, a second linear motion guide element and a rotary motion guide element, wherein the guide direction of the first linear motion guide element is mutually perpendicular to the guide direction of the second linear motion guide element, a fixed part in the first linear motion guide element is connected with a movable part of the second linear motion guide element, the movable part in the first linear motion guide element is connected with the movable platform through the rotary motion guide element, the rotary motion guide element can enable the movable platform to rotate around the axial lead of the rotary motion guide element relative to the movable part of the first linear motion guide element, the axial lead of the rotary motion guide element is parallel to the Z direction, and a fixed part of the second linear motion guide element is connected with the fixed platform;
The rotary motion guide element in one set of guide assembly is connected with the geometric center of the movable platform, the first linear motion guide element in the guide assembly guides the movable platform in the X direction, the second linear motion guide element in the guide assembly guides the movable platform in the Y direction, and the driving mechanism comprises three sets, wherein one set of driving mechanism drives the movable piece of the second linear motion guide element to move along the Y direction and further drives the movable platform to move along the Y direction;
The rotary motion guide elements in the other two sets of guide assemblies are respectively connected with the movable platform, the two sets of rotary motion guide elements are centrally symmetrical about the symmetry center of the movable platform, the first linear motion guide elements in the two sets of guide assemblies guide the movable platform in the Y direction, the second linear motion guide elements in the two sets of guide assemblies guide the movable platform in the X direction, and the other two sets of driving mechanisms respectively drive the movable piece of the second linear motion guide element to move in the X direction so as to drive the movable platform to move in the X direction.
2. The center-symmetrical UVW platform of claim 1, wherein the guide mechanism further comprises two sets of guide assemblies, the pivoting motion guide elements of the two sets of guide assemblies are respectively connected to the moving platform, and the two pivoting motion guide elements are center-symmetrical about the center of symmetry of the moving platform, the first linear motion guide element of the two sets of guide assemblies guides the moving platform in the Y-direction, and the second linear motion guide element of the two sets of guide assemblies guides the moving platform in the X-direction.
3. The UVW platform of claim 1 or 2 in which the first and second linear motion guide elements are rolling linear guide pairs, the movable parts of the first and second linear motion guide elements are slides in the rolling linear guide pairs, the fixed parts of the first and second linear motion guide elements are guides in the rolling linear guide pairs, the rotary motion guide element is a cross ball collar, an outer ring of the cross ball collar is connected to the movable platform, and an inner ring of the cross ball collar is connected to the movable part of the first linear motion guide element.
4. The center-symmetrical UVW platform of claim 3, wherein the drive mechanism comprises a servo motor, a ball screw pair, a connection plate, and two bearing seats;
two ends of a screw rod in the ball screw pair are respectively and rotatably connected with a bearing seat;
the servo motor is connected with the screw rod through a coupler;
One end of the connecting plate is connected with a nut in the ball screw pair, the other end of the connecting plate is connected with a sliding block of the first linear motion guiding element, and the servo motor drives the screw rod to rotate so as to drive the sliding block to linearly move on the guide rail.
5. The central symmetry UVW platform of claim 1, wherein the shock isolation platform is disposed below the stationary platform and the stationary platform is secured to the shock isolation platform.
6. The central-symmetry UVW platform of claim 5, wherein the positioning platform is provided with a plurality of positioning holes, the shock insulation platform is provided with a plurality of positioning pins corresponding to the positioning holes, and the positioning pins are inserted into the corresponding positioning holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810327819.7A CN110370031B (en) | 2018-04-12 | 2018-04-12 | Centrosymmetric UVW platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810327819.7A CN110370031B (en) | 2018-04-12 | 2018-04-12 | Centrosymmetric UVW platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110370031A CN110370031A (en) | 2019-10-25 |
| CN110370031B true CN110370031B (en) | 2024-05-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810327819.7A Active CN110370031B (en) | 2018-04-12 | 2018-04-12 | Centrosymmetric UVW platform |
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