CN105443930A - XY precision positioning platform - Google Patents

Abstract

The invention discloses an XY precision positioning platform, which includes a base plate, on which an active guide rail movement subsystem and a supporting guide rail movement subsystem of X axes parallel to each other are installed along the X direction, and a Y axis movement subsystem is installed on the base plate along the Y direction. The active guide rail movement subsystem and the support guide rail movement subsystem, and the active guide rail movement subsystems of the X-axis and Y-axis have the same structure, and the support guide rail movement subsystems of the X-axis and Y-axis have the same structure; it also includes a two-dimensional position detection system, two The three-dimensional position detection system is jointly driven by the active guide rail movement subsystem of the X axis, the support guide rail movement subsystem, the active guide rail movement subsystem of the Y axis, and the support guide rail movement subsystem to realize the X and Y direction movements. The invention can avoid the stacked structure of two motion systems in the previous XY precise positioning platform, does not generate Abbe errors, and has high positioning accuracy.

Description

A XY precision positioning platform

technical field

The invention relates to the field of positioning platforms, in particular to an XY precision positioning platform.

Background technique

At present, the common XY positioning platforms are mostly stacked structures (that is, the X-axis and Y-axis motion mechanisms are stacked on top of each other). Under normal circumstances, since the Y-axis motion mechanism is installed above the X-axis motion mechanism, the force on the X-axis motion mechanism is increased, which seriously affects the positioning accuracy of the two-dimensional positioning platform. XY positioning platforms generally use long grating encoders as the detection system for motion displacement. Usually, in order to ensure the compactness of the entire positioning platform, the straight grating encoder is often installed in a position parallel to the motion mechanism, which violates the Abbe principle and produces Abbe errors. In addition, it is difficult to ensure the perpendicularity between the X and Y axes of movement during the assembly process of the movement mechanisms of the X and Y axes. Therefore, the existing XY positioning platform is difficult to achieve precise positioning.

SUMMARY OF THE INVENTION The object of the present invention is to provide an XY precision positioning platform to solve the problem that the existing XY positioning platform is difficult to achieve precise positioning.

In order to achieve the above object, the technical scheme adopted in the present invention is:

An XY precision positioning platform, including a base plate, is characterized in that: the active guide rail movement subsystem of the X axis parallel to each other and the supporting guide rail movement subsystem are installed on the base plate along the X direction, the active guide rail movement subsystem of the X axis, the X The active guide rail movement subsystem of the Y axis is installed on the substrate on one side between the supporting guide rail movement subsystems of the axis along the Y direction, and the other side between the active guide rail movement subsystem of the X axis and the supporting guide rail movement subsystem of the X axis The Y-axis supporting guide rail motion subsystem is installed along the Y direction on the base plate, and the X-axis active guide rail motion subsystem has the same structure as the Y-axis active guide rail motion subsystem, and the X-axis support guide rail motion subsystem has the same structure as the Y-axis The structure of the supporting rail motion subsystem is the same;

The active guide rail movement subsystem in each direction includes screw fixing seats and screw supporting seats installed on the base plate and arranged in a line along the direction. The screw fixing seats and the screw supporting seats are supported along the direction. The ball screw nut pair, the base plates on both sides of the ball screw nut pair are respectively provided with guide rails along the direction, the sliders are respectively slid and installed on the guide rails, and the connecting plate is fixedly installed between the two sliders, the bottom of the connecting plate and the ball wire The nut in the rod nut pair is fixedly connected, and a stepping motor is installed on the screw fixing seat, and the output shaft of the stepping motor is connected to the ball screw end of the ball screw nut pair through a coupling;

The supporting guide rail movement subsystem in each direction includes two guide rails arranged on the base plate along the direction, sliders are respectively slidably installed on the two guide rails, and a connecting plate is fixedly installed between the sliders on the two guide rails;

The two-dimensional position detection system consists of X-axis support guide rail, X-axis support slider, Y-axis support guide rail, Y-axis support slider, worktable, two-dimensional plane grating fixed support, two-dimensional plane grating, reading head bracket, two-dimensional The planar grating reading head is composed of two ends of the Y-axis support guide rail, which are respectively fixed on the connecting plate in the active guide rail movement subsystem of the X-axis and the connection plate in the X-axis support guide rail movement subsystem, and the Y-axis support slider is slidably installed on the Y-axis On the shaft support guide rail, the two-dimensional plane grating fixed support is fixed at the bottom of the Y-axis support slider, the two-dimensional plane grating reading head is fixed on the bottom surface of the two-dimensional plane grating fixed support through the reading head bracket, and the X-axis support guide rail It is erected above the Y-axis support slider, and the two ends of the X-axis support guide rail are respectively fixed on the connecting plate in the active guide rail movement subsystem of the Y-axis and the connection plate in the Y-axis support guide rail movement subsystem, and the X-axis support slider slides Installed on the X-axis support guide rail, the bottom of the X-axis support slide block is fixedly connected with the top of the Y-axis support slide block, and the workbench is fixed on the top of the X-axis support slide block.

The described XY precision positioning platform is characterized in that: the stepping motor is installed on the screw fixing seat through the motor mounting support, the output shaft of the stepping motor is connected with the ball in the ball screw nut pair through the coupling One end of the screw rod is connected by transmission.

The XY precision positioning platform described above is characterized in that: the Y-axis supporting slider is in an inverted U shape, and the Y-axis supporting slider is slidably installed on the Y-axis supporting guide rail through the U-shaped opening, and the Y-axis supporting slider The block is fixedly sleeved with an inverted U-shaped connecting block 1, and the two-dimensional planar grating fixed support is fixed on the Y-axis supporting slider and the bottom of the connecting block 1; the X-axis supporting slider is in an inverted U-shape. And the X-axis supporting slider is slidably installed on the X-axis supporting guide rail through the U-shaped opening, and the X-axis supporting slider is fixedly sleeved with a U-shaped connecting block 2, and the connecting block 2 and the connecting block 1 are arranged in a cross , the bottom of the second connecting block is fixedly connected with the top of the first connecting block, and the workbench is fixed on the X-axis support slider and the top of the second connecting block.

The advantages of the present invention are:

1. The X-axis and Y-axis motion systems of the present invention adopt a non-stacked structure to connect with the substrate, avoiding the stacked structure of two motion systems in the previous XY precision positioning platform.

2. The XY precision positioning platform of the present invention uses a two-dimensional planar grating encoder as a motion position detection system, which will not generate Abbe errors.

3. The XY precision positioning platform of the present invention adopts a structure in which the active guide rail movement subsystem and the supporting guide rail movement subsystem cooperate to move, which can ensure the perpendicularity between the X movement axis and the Y movement axis, and has high positioning accuracy.

Description of drawings

Figure 1 is a structural diagram of the XY precision positioning platform.

Figure 2 is an exploded view of the drive shaft of the XY precision positioning platform.

Figure 3 is an exploded view of the grating installation position of the XY precision positioning platform.

Figure 4 is a schematic diagram of the XY precision positioning platform.

detailed description

As shown in Figures 1 to 4, an XY precision positioning platform includes a base plate 1, and the active guide rail movement subsystem 2 of the X-axis parallel to each other and the supporting guide rail movement subsystem of the X-axis are installed on the base plate 1 along the X direction. 5, X-axis active guide rail movement subsystem 2, X-axis support guide rail movement subsystem 5, Y-axis active guide rail movement subsystem 3 is installed on the substrate 1 along the Y direction between X-axis support guide rail movement subsystems 5, X-axis active guide rail movement On the substrate 1 on the other side between the subsystem 2 and the X-axis support guide rail movement subsystem 5, a Y-axis support guide rail movement subsystem 6 is installed along the Y direction, and the X-axis active guide rail movement subsystem 2 is connected to the Y-axis The structure 3 of the active guide rail motion subsystem is the same, and the support guide rail motion subsystem 5 of the X axis is the same as the support guide rail motion subsystem structure 6 of the Y axis;

The active guide rail movement subsystem in each direction includes screw fixing base 11 and screw supporting base 17 installed on the base plate 1 and arranged in a line along the direction, between the screw fixing base 11 and screw supporting base 17 A ball screw nut pair is supported along the direction. The base plate 1 on both sides of the ball screw nut pair is respectively provided with guide rails 14A along the direction. Sliders 13A are respectively slidably installed on the guide rails 14A, and fixedly installed between the two sliders 13A. There is a connecting plate 12A, the bottom of the connecting plate 12A is fixedly connected with the nut 16 in the ball screw nut pair, and the stepping motor 8 is installed on the screw fixing seat 11, and the output shaft of the stepping motor 8 is connected with the ball screw in the ball screw nut pair. One end of the rod 15 is connected by transmission;

The supporting guide rail movement subsystem in each direction includes two guide rails 14B arranged on the base plate 1 along the direction. Sliders 13B are respectively slidably installed on the two guide rails 14B, and a connection is fixedly installed between the sliders 13B on the two guide rails 14B. plate 12B;

The two-dimensional position detection system 4 consists of X-axis support guide rail 20, X-axis support slider 19, Y-axis support guide rail 22, Y-axis support slider 23, workbench 18, two-dimensional plane grating fixed support 24, two-dimensional plane grating 25. The reading head bracket 26 and the two-dimensional planar grating reading head 27 are composed, wherein the two ends of the Y-axis support guide rail 22 are respectively fixed on the connecting plate in the X-axis active guide rail movement subsystem 2 and the X-axis support guide rail movement subsystem 5 On the connecting plate, the Y-axis support slider 23 is slidably installed on the Y-axis support guide rail 22, the two-dimensional plane grating fixed support 24 is fixed on the bottom of the Y-axis support slider 23, and the two-dimensional plane grating reading head 27 passes through the reading head bracket 26 Fixed on the bottom surface of the two-dimensional planar grating fixed support 24, the X-axis support guide rail 20 is erected above the Y-axis support slider 23, and the two ends of the X-axis support guide rail 20 are respectively fixed on the connecting plate in the Y-axis active guide rail motion subsystem 3 On the connecting plate of the Y-axis support rail movement subsystem 6, the X-axis support slider 19 is slidably installed on the X-axis support guide rail 20, and the bottom of the X-axis support slider 19 is fixedly connected with the top of the Y-axis support slider 23, and the working The table 18 is fixed on the top of the X-axis supporting slide block 19 .

The stepper motor 8 is installed on the screw mandrel holder 11 through the motor mounting support 9, and the output shaft of the stepper motor 8 is connected with the ball screw 15 in the ball screw nut pair by a coupling 10.

The Y-axis support slider 23 is in an inverted U shape, and the Y-axis support slider 23 is slidably installed on the Y-axis support guide rail 22 through the U-shaped opening, and the Y-axis support slider 23 is fixedly sleeved with an inverted U-shaped connection. Block 1 21A, the two-dimensional planar grating fixed support 24 is fixed on the bottom of the Y-axis support slider 23 and the connecting block 1 21A; the X-axis support slider 19 is in an inverted U shape, and the X-axis support slider 19 passes through the U-shaped opening Slidingly installed on the X-axis support guide rail 20, the X-axis support slider 19 is fixedly sleeved with a U-shaped connection block 2 21B, the connection block 2 21B and the connection block 1 21A are arranged in a cross, and the bottom of the connection block 21B is connected to the The top of the first connecting block 21A is fixedly connected, and the workbench 18 is fixed on the top of the X-axis supporting slide block 19 and the second connecting block 21B.

As shown in Figure 1, the base plate 1 is used to fix the two motion systems of the X-axis motion system and the Y-axis motion system; four threaded holes 7 are evenly distributed around the base plate, and are fixedly connected to the vibration-isolation workbench through four threaded holes . The X-axis motion system consists of the X-axis active guide rail motion subsystem 2 and the X-axis support guide rail motion subsystem 5; similarly, the Y-axis motion system consists of the Y-axis active guide rail motion subsystem 3 and the Y-axis support guide rail motion subsystem 6 constitute. The two-dimensional position detection system 4 is fixed by using the active guide rail motion subsystem of the X axis, the X-axis support guide rail motion subsystem, the active guide rail motion subsystem of the Y axis, and the Y-axis support guide rail motion subsystem. The two-dimensional position detection system can realize XY In-plane position measurement.

As shown in Figure 2, the active guide rail movement subsystem of the X axis consists of a stepping motor 8, a motor mounting support 9, a coupling 10, a screw fixing seat 11, a connecting plate 12, a slider 13, a guide rail 14, and a ball wire Rod 15, screw mandrel attachment 16 and screw mandrel support seat 17 constitute. The motor mounting bracket is used to fix the stepping motor; the stepping motor and the ball screw are connected through a coupling; the connecting plate is used to connect the slider and the screw attachment; the slider and the guide rail constitute a kinematic pair; The motor-driven ball screw can drive the connecting plate to move along the X-axis direction; similarly, the Y-axis active guide rail movement subsystem constitutes the same X-axis active guide rail movement subsystem.

As shown in FIG. 3 , the Y-axis support guide rail movement subsystem is composed of a connecting plate 12 , slider 13 and guide rail 14 ; the X-axis support guide rail movement subsystem constitutes the same Y-axis support guide rail movement subsystem. The two-dimensional position detection system consists of a workbench 18, an X-axis support slider 19, an X-axis support guide rail 20, a connecting block 21, a Y-axis support guide rail 22, a Y-axis slider 23, a two-dimensional plane grating fixed support 24, a two-dimensional The planar grating 25, the reading head bracket 26 and the two-dimensional planar grating reading head are composed; the two ends of the X-axis support guide rail are fixedly connected with the active guide rail movement subsystem of the Y-axis and the connecting plate of the Y-axis support guide rail movement subsystem; The two ends of the Y-axis support rail are fixedly connected to the connecting plates of the X-axis active guide rail motion subsystem and the X-axis support rail motion subsystem; connect the workbench and the X-axis slider, and then connect the connecting block Connect with the workbench, the two-dimensional plane grating fixed support and the Y-axis slider respectively; the two-dimensional plane grating fixed support is used to fix the two-dimensional plane grating; the two-dimensional plane grating reading head is fixed by the reading head bracket; the above is Can constitute a two-dimensional position detection system.

The present invention includes an X-axis motion system, a Y-axis motion system and a motion position detection system. The X and Y-axis motion systems respectively include two pairs of guide rails, one of which is an active guide rail, and the other is a supporting guide rail. The active guide rail consists of The stepper motor is driven by a screw rod to rotate the slider, and the supporting guide rail is realized by driving the slider on the supporting guide rail through the active guide rail; the active guide rail and the supporting guide rail are connected by a connecting guide rail. The X-axis and Y-axis motion systems are fixedly connected to the substrate respectively, avoiding the stacked structure of the two motion systems in the previous XY precision positioning platform. In the X-axis and Y-axis motion system, two connecting guide rails are connected by a cross-type slider. A worktable is installed on the upper end of the cross-type slider, and a 100 (mm) × 100 (mm) is installed on the lower end. ) Square connection plate, the square connection plate is used to fix the scale of the two-dimensional planar grating encoder. The movement of the cross slider can drive the movement of the scale of the two-dimensional planar grating encoder. The reading head of the two-dimensional planar grating encoder is connected to the substrate through the reading head bracket. The reading head bracket needs to be installed at the center of the substrate to ensure that the reading head of the grating when the center of the encoder scale moves to the center of the substrate can read exactly as the encoder. The center position of the ruler. As shown in Figure 4, the center position of the two-dimensional plane grating is used as the origin of the XY precision positioning platform; when the X-axis motion system and the Y-axis motion system are working, the worktable can be driven to move in the XY plane; at the same time, through the two-dimensional plane The position coordinates of the grating detection specific movement .

Claims (3)

1. an XY precisely locating platform, include substrate, it is characterized in that: along X to the active guide rail movement subtense angle and the supporting guide motion subsystem that are provided with the X-axis be parallel to each other on substrate, the active guide rail movement subtense angle of X-axis, between the supporting guide motion subsystem of X-axis side substrate on the active guide rail movement subtense angle of Y-axis is installed along Y-direction, the active guide rail movement subtense angle of X-axis, between the supporting guide motion subsystem of X-axis opposite side substrate on the supporting guide motion subsystem of Y-axis is installed along Y-direction, and the active guide rail movement subtense angle of X-axis is identical with the active guide rail movement subsystem structure of Y-axis, the supporting guide motion subsystem of X-axis is identical with the supporting guide motion subsystem structure of Y-axis,

Active guide rail movement subtense angle on each direction comprises respectively and to be arranged on substrate and along the screw mandrel fixed base of direction, place word order, screw mandrel supporting base, screw mandrel fixed base, ballscrew nut fitting is supported with along direction, place between screw mandrel supporting base, the substrate of ballscrew nut fitting both sides is provided with guide rail along direction, place respectively, guide rail is slidably fitted with slide block respectively, connecting plate is installed with between two slide blocks, be fixedly connected with nut in ballscrew nut fitting bottom connecting plate, screw mandrel fixed base is provided with stepper motor, the output shaft of stepper motor is in transmission connection by ball screw one end in coupling and ballscrew nut fitting,

Supporting guide motion subsystem on each direction comprises two guide rails be arranged on along direction, place on substrate respectively, and two guide rails are separately installed with slide block, is connected between two guide rail top slide blocks by connecting plate, two-dimensional position detection system is by X-axis supporting guide, X-axis supporting slider, Y-axis supporting guide, Y-axis supporting slider, worktable, two-dimensional grating fixed bearing, two-dimensional grating, read head support, two-dimensional grating read head is formed, wherein Y-axis supporting guide two ends to be separately fixed in the supporting guide motion subsystem of connecting plate and X-axis in the active guide rail movement subtense angle of X-axis on connecting plate, Y-axis supporting slider is slidably mounted on Y-axis supporting guide, described two-dimensional grating fixed bearing is fixed on bottom Y-axis supporting slider, two-dimensional grating read head is fixed on two-dimensional grating fixed bearing bottom surface by read head support, described X-axis supporting guide is erected at above Y-axis supporting slider, and X-axis supporting guide two ends to be separately fixed in the supporting guide motion subsystem of connecting plate and Y-axis in the active guide rail movement subtense angle of Y-axis on connecting plate, X-axis supporting slider is slidably mounted on X-axis supporting guide, be fixedly connected with Y-axis supporting slider top bottom X-axis supporting slider, described worktable is fixed on X-axis supporting slider top.

2. a kind of XY precisely locating platform according to claim 1, it is characterized in that: described stepper motor is arranged on screw mandrel fixed base by motor erection support, stepper motor is in transmission connection by ball screw one end in coupling and ballscrew nut fitting.

3. a kind of XY precisely locating platform according to claim 1, it is characterized in that: described Y-axis supporting slider is inverted U-shaped, and Y-axis supporting slider is slidably mounted on Y-axis supporting guide by U-shaped mouth, on Y-axis supporting slider, fixed cover is connected to the contiguous block one in inverted U-shape, and described two-dimensional grating fixed bearing is fixed on bottom Y-axis supporting slider, contiguous block one; Described X-axis supporting slider is inverted U-shaped, and X-axis supporting slider is slidably mounted on X-axis supporting guide by U-shaped mouth, on X-axis supporting slider, fixed cover is connected to the contiguous block two taken the shape of the letter U, described contiguous block two is crisscross arranged in cross with contiguous block one, be fixedly connected with contiguous block one top bottom contiguous block two, described worktable is fixed on X-axis supporting slider, contiguous block two top.