CN109656015B - Method for improving wavefront distortion correction precision of optical system - Google Patents
Method for improving wavefront distortion correction precision of optical system Download PDFInfo
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- CN109656015B CN109656015B CN201910073386.1A CN201910073386A CN109656015B CN 109656015 B CN109656015 B CN 109656015B CN 201910073386 A CN201910073386 A CN 201910073386A CN 109656015 B CN109656015 B CN 109656015B
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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Abstract
The invention relates to a method for improving wavefront distortion correction precision of an optical system, belonging to the technical field of adaptive optics, wherein a deformable mirror driver array is divided into a central driver group and an edge driver group, the edge driver group is positioned at the periphery of the central driver group, the position of each optical element in the optical system is adjusted, an incident beam is ensured to be reflected to a wavefront sensor through the deformable mirror, the central driver group is used for correcting aberration of the central part of the caliber of the incident beam, and the edge driver group is used for correcting aberration of the marginal part of the caliber of the incident beam. The operation is convenient.
Description
Technical Field
The invention belongs to the technical field of adaptive optics, and particularly relates to a method for improving wavefront distortion correction precision of an optical system.
Background
The wave front distortion seriously affects the quality of laser beams, and in order to eliminate the wave front distortion, the adaptive optics technology is widely applied. The adaptive optical system is a system for real-time detecting and correcting random optical wavefront aberration, and is mainly composed of wavefront sensor (Hartmann wavefront sensor or curvature sensor, etc.), wavefront corrector (tilting mirror, deformable mirror, etc.) and wavefront controller, etc.. The wavefront sensor detects wavefront distortion information in real time, the wavefront controller converts signals detected by the wavefront sensor into voltage control signals of each driver of the wavefront corrector through a control algorithm, and the voltage control signals drive the wavefront corrector to change the surface shape of the mirror surface, so that real-time correction of wavefront distortion is realized. In order to improve the wavefront distortion Correction effect of the adaptive OPTICS system, especially to better correct the aberration at the edge of the aperture of the laser beam, the deformable mirror needs to have a circle of driver (first, Correction of low order using continuous deformable mirrors, OPTICS EXPRESS, vol.16,2008,2859-2866. second, Correction of annular and atmospheric waves, a complex of the performance of variable deformable mirrors, APPLIED OPTICS, vol.47,2008, 6550-6562.).
Disclosure of Invention
In order to solve the above problems, a method for improving the accuracy of wavefront distortion correction of an optical system has been proposed.
In order to achieve the purpose, the invention provides the following technical scheme:
a method for improving the accuracy of wavefront distortion correction of an optical system comprises the following steps:
s1: dividing a deformable mirror driver array into a central driver group and an edge driver group, wherein the edge driver group is positioned at the periphery of the central driver group;
s2: adjusting the position of each optical element in the optical system to ensure that the incident beam is reflected to the wavefront sensor through the deformable mirror;
s3: correcting aberration of the central part of the aperture of the incident beam by using a central driver group;
s4: and correcting the aberration of the aperture edge part of the incident beam by using the edge driver group.
Further, optical system includes spectroscope, reflector, wavefront sensor, distorting lens and controller, the spectroscope slope sets up, and spectroscope and distorting lens are with the optical axis setting, and incident beam transmits to distorting lens behind the spectroscope, divide into sampling beam and outgoing beam behind the spectroscope through the incident beam that distorting lens reflects back, reflector and wavefront sensor are with the optical axis setting, and reflector and spectroscope correspond the setting, and sampling beam incides to reflector and wavefront sensor in proper order, the controller is connected with wavefront sensor, distorting lens electricity respectively.
Furthermore, the included angles between the spectroscope and the horizontal plane and between the reflector and the horizontal plane are both 45 degrees.
Furthermore, a beam-shrinking assembly is further arranged between the reflector and the wavefront sensor and comprises a first lens and a second lens which are confocal, and the optical axis of the beam-shrinking assembly is overlapped with the optical axis of the wavefront sensor.
Furthermore, the reflecting mirror is plated with a reflection increasing film, and the first lens and the second lens are both plated with antireflection films.
Further, the center driver group is located in the middle of the deformable mirror driver array, the edge driver group is located at the edge of the deformable mirror driver array, and the deformable mirror driver array is N1×N2Center of gravityThe driver group is M1×M2And N is1-M1≥2，N2-M2Not less than 2, wherein N1Number of rows, N, representing an entire column of anamorphic mirror drivers2Number of columns, M, representing an entire column of anamorphic mirror drivers1Number of rows, M, representing central driver group2Indicating the number of columns in the central driver set.
Further, the effective aperture of the deformable mirror is matched with the aperture of the incident beam.
The invention has the beneficial effects that:
the deformable mirror driver array is divided into the central driver group and the edge driver group, the central driver group is used for correcting the aberration of the central part of the aperture of the incident beam, the edge driver group is used for correcting the aberration of the edge part of the aperture of the incident beam, and finally high-precision correction of the aperture aberration of the whole incident beam is achieved, and the operation is convenient and fast.
Drawings
FIG. 1 is a schematic diagram of the structure of an optical system according to the present invention;
FIG. 2 is a schematic illustration of the aberrations of an incident beam before correction;
FIG. 3 is a schematic view of the aberration of an incident beam corrected using a central driver group;
FIG. 4 is a schematic diagram of the aberration of an incident beam corrected by an edge driver set.
In the drawings: 1-incident beam, 2-spectroscope, 3-deformable mirror, 4-reflector, 5-first lens, 6-second lens, 7-wavefront sensor, 8-controller, 9-emergent beam.
Detailed Description
In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
The first embodiment is as follows:
a method for improving the accuracy of wavefront distortion correction of an optical system comprises the following steps:
first, the anamorphic mirror driver array is divided into a center driver group located in the middle of the anamorphic mirror driver array and an edge driver group located at the edge of the anamorphic mirror driver array, that is, the edge driver group is located at the periphery of the center driver group. Setting an anamorphic mirror driver array to N1×N2The central driver group is M1×M2And N is1-M1≥2，N2-M2Not less than 2, wherein N1Number of rows, N, representing an entire column of anamorphic mirror drivers2Number of columns, M, representing an entire column of anamorphic mirror drivers1Number of rows, M, representing central driver group2Indicating the number of columns in the central driver set.
Secondly, the position of each optical element in the optical system is adjusted to ensure that the incident beam is reflected to the wavefront sensor through the deformable mirror, and the effective aperture of the deformable mirror is matched with the aperture of the incident beam.
Specifically, as shown in fig. 1, the optical system includes spectroscope 2, reflector 4, wavefront sensor 7, deformable mirror 3 and controller 8, spectroscope 2 inclines to set up, and spectroscope 2 and deformable mirror 3 are with the optical axis setting, and incident beam 1 transmits to deformable mirror 3 behind spectroscope 2, and the incident beam that reflects back through deformable mirror 3 divide into sampling beam and emergent beam 9 behind spectroscope 2, reflector 4 and wavefront sensor 7 are with the optical axis setting, and reflector 4 corresponds the setting with spectroscope 2, and sampling beam incides to reflector 4 and wavefront sensor 7 in proper order, controller 8 is connected with wavefront sensor 7, deformable mirror 3 electricity respectively. In this embodiment, the included angles between the spectroscope 2 and the reflective mirror 4 and the horizontal plane are both 45 °. Meanwhile, a beam-shrinking component is further arranged between the reflective mirror 4 and the wavefront sensor 7, the beam-shrinking component comprises a first lens 5 and a second lens 6 which are confocal, and the optical axis of the beam-shrinking component coincides with the optical axis of the wavefront sensor 7. The reflecting mirror 4 is plated with a reflection increasing film, and the first lens 5 and the second lens 6 are both plated with reflection increasing films.
Finally, the inventors have found in long-term practice: the wavefront aberrations of the central part and the edge part of the caliber of the light beam have different spatial characteristics, and the driver arrays of the central part and the edge part of the caliber of the incident light beam also have different spatial response characteristics due to the mechanical structure characteristics of the deformable mirror, so that the inventor firstly utilizes the central driver set to correct the aberration of the central part of the caliber of the incident light beam and then utilizes the edge driver set to correct the aberration of the edge part of the caliber of the incident light beam, thereby realizing the spatial characteristic matching of the driver array of the deformable mirror and the aberration of the light beam and improving the control precision of the wavefront distortion of the adaptive optical system.
Example two:
parts of this embodiment that are the same as those of the first embodiment are not described again, except that:
in this embodiment, the parameters of each optical element are as follows:
the aperture of the incident beam is 50 multiplied by 50mm, and the wavelength is 1053 nm; the aperture of the spectroscope is 100 multiplied by 100mm, the spectroscope is placed at 45 degrees, and the reflectivity of the spectroscope to 1053nm laser is 1 percent; the parameters of the deformable mirror are shown in table 1; the aperture of the reflector is 100 multiplied by 100mm, the reflector is placed at 45 degrees, and the reflectivity of the reflector to 1053nm laser is 99.95 percent; the aperture of the first lens is 100 multiplied by 100mm, and the focal length is 500 mm; the aperture of the second lens is 10 multiplied by 10mm, and the focal length is 50 mm; the parameters of the wavefront sensor are shown in table 2; the aperture of the emitted beam was 50X 50mm and the wavelength was 1053 nm.
Table 1: main technical index parameter of deformable mirror
Table 2: main technical index parameter of wave-front sensor
The specific adjustment process is as follows:
1. the anamorphic mirror driver array includes 7 × 7 drivers, and the anamorphic mirror driver array is divided into a center driver group and an edge driver group, wherein the center driver group includes 5 × 5 drivers, and the edge driver group includes 24 drivers located at the periphery of the center driver group. The controller firstly corrects the aberration of the central part of the aperture of the incident beam by using 25 drivers of the central driver group, and the aberration of the incident beam before and after correction are respectively shown in fig. 2 and fig. 3, wherein the aberration PV of the incident beam before correction is 1.6 μm, and the aberration PV of the incident beam after correction is 0.6 μm.
2. The aberration of the edge portion of the incident beam aperture is continuously corrected by the 24 drivers of the edge driver group, and the corrected incident beam aberration is shown in fig. 4, wherein the corrected incident beam aberration PV value is 0.3 μm.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (6)
1. A method for improving the accuracy of wavefront distortion correction of an optical system is characterized by comprising the following steps:
s1: divide the deformable mirror driver array into central driver group and edge driver group, the central driver group is located in the middle of the deformable mirror driver array, the edge driver group is located at the periphery of the central driver group, the deformable mirror driver array is N1×N2The central driver group is M1×M2And N is1-M1≥2，N2-M2Not less than 2, wherein N1Number of rows, N, representing an entire column of anamorphic mirror drivers2Number of columns, M, representing an entire column of anamorphic mirror drivers1Indicating a central driveNumber of rows of groups, M2Representing the number of columns of the central driver group;
s2: adjusting the position of each optical element in the optical system to ensure that the incident beam is reflected to the wavefront sensor through the deformable mirror;
s3: correcting aberration of the central part of the aperture of the incident beam by using a central driver group;
s4: and correcting the aberration of the aperture edge part of the incident beam by using the edge driver group.
2. The method according to claim 1, wherein the optical system comprises a beam splitter, a reflective mirror, a wavefront sensor, a deformable mirror and a controller, the beam splitter is obliquely arranged, the beam splitter and the deformable mirror are coaxially arranged, an incident light beam is transmitted to the deformable mirror through the beam splitter, the incident light beam reflected back by the deformable mirror is divided into a sampling light beam and an emergent light beam through the beam splitter, the reflective mirror and the wavefront sensor are coaxially arranged, the reflective mirror and the beam splitter are arranged correspondingly, the sampling light beam is sequentially incident to the reflective mirror and the wavefront sensor, and the controller is electrically connected with the wavefront sensor and the deformable mirror respectively.
3. The method of claim 2, wherein the beam splitter and the mirror are each angled at 45 ° to the horizontal.
4. The method of claim 3, wherein a beam reduction assembly is further disposed between the mirror and the wavefront sensor, the beam reduction assembly including a first lens and a second lens that are confocal, and an optical axis of the beam reduction assembly being coincident with an optical axis of the wavefront sensor.
5. The method of claim 4, wherein the mirror is coated with an antireflection film, and wherein the first lens and the second lens are coated with antireflection films.
6. The method of claim 5, wherein the effective aperture of the deformable mirror matches the aperture of the incident beam.
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| DE102021112271A1 (en) | 2021-05-11 | 2022-11-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device and method for determining the beam quality |
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| CN110579873B (en) * | 2019-09-06 | 2024-04-02 | 中国人民解放军国防科技大学 | Array beam wavefront correction system and method based on integrated corrector |
| CN110718846B (en) * | 2019-10-28 | 2021-01-01 | 中国科学院上海光学精密机械研究所 | Compensation device and method for femtosecond laser pulse front and wavefront distortion |
| CN111175954B (en) * | 2020-02-21 | 2022-09-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Quick high-contrast image scanning microscopic imaging device based on Nipkow disk |
| CN116009242B (en) * | 2022-12-02 | 2024-08-06 | 中国工程物理研究院激光聚变研究中心 | Method and system for improving wavefront correction precision |
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