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CN204758926U - Expand and restraint collimation optical system - Google Patents

Expand and restraint collimation optical system Download PDF

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CN204758926U
CN204758926U CN201520468124.2U CN201520468124U CN204758926U CN 204758926 U CN204758926 U CN 204758926U CN 201520468124 U CN201520468124 U CN 201520468124U CN 204758926 U CN204758926 U CN 204758926U
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collimation
group
mirror
beam expanding
optical system
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周建康
陈新华
陈宇恒
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Suzhou University
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Abstract

The utility model discloses an expand and restraint collimation optical system and preparation method. Optical system include that preceding group transmission is expanded and restraint collimation group and expand with back group reflection and restraint collimation group, press the light incidence orientation, the transmission is expanded and is restrainted collimation group including a biconcave burden mirror, a biconvex direct position of telescope and two curved month direct position of telescopes, the curved phototropic incident direction of camber of two curved month direct position of telescopes, the reflection is expanded bundle collimation group and including two paraboloidal mirrors that have the same focus position, is small -bore paraboloidal mirror and heavy -calibre paraboloidal mirror in proper order, and the shape of face of heavy -calibre paraboloidal mirror is the off -axis concave surface. The utility model provides an expand the collimation system of restrainting, can expand and restraint for the arbitrary laser wavelength of broadband within range or white light laser provide the collimation, and not need any removal compensating unit. Its compact structure, it is small, expand and restraint that the multiplying power is big, the collimation performance is high, can be used to fields such as holographic imaging, optical test, laser radar.

Description

一种扩束准直光学系统A Beam Expanding Collimation Optical System

技术领域 technical field

本实用新型涉及一种紧凑型的宽波段高倍率扩束准直光学系统。 The utility model relates to a compact wide-band high-magnification beam expansion collimation optical system.

背景技术 Background technique

在光学检测、光谱定标、激光雷达、安防等许多应用场合,需要对光束进行整形实现光束的极小角度发射,从而实现光束的长距离传输或者最佳耦合。目前光学的系统扩束准直可分为两种类型,一种是针对单个波段的激光束应用开发,其对应的扩束准直系统有透射式、反射式和两者的结合形式;另外一种是针对多个波长下激光器应用,这种结构在保持光学元件参数不变情况下,改变目镜和物镜的间距来适应不同的波长。前一种类型,因仅适用单个波长,很容易满足大倍率或者变换倍率的要求;后一种类型,针对多个波长的激光器,其大倍率扩束不容易实现,需要改变目镜和物镜间距来适应,即通过设计专门的调整机构或者加隔圈的办法可满足不同激光波长下的间距要求,如文献《多波长透射式扩束器设计》(J.红外与激光,vol37,No.7)采用复杂的透射式设计实现三个波长的的扩束准直。在调整物镜和目镜间距时,系统的间隔精度、平行度和同轴度等会带来误差,影响准直性能。且随着连续或者白光激光器的应用及其某些特殊应用场合,需要在宽波段范围对连续波长的激光光束适用的扩束准直光学系统,这种改变间距的办法就无法满足。 In many applications such as optical detection, spectral calibration, lidar, security, etc., it is necessary to shape the beam to emit the beam at a very small angle, so as to achieve long-distance transmission or optimal coupling of the beam. At present, the beam expansion and collimation of the optical system can be divided into two types, one is for the application and development of a single band of laser beam, and the corresponding beam expansion and collimation system has a transmission type, a reflection type and a combination of the two; the other is One is for the application of lasers at multiple wavelengths. This structure changes the distance between the eyepiece and the objective lens to adapt to different wavelengths while keeping the parameters of the optical components constant. The former type, because it is only applicable to a single wavelength, can easily meet the requirements of large magnification or variable magnification; the latter type, for lasers with multiple wavelengths, its large magnification beam expansion is not easy to achieve, and the distance between the eyepiece and the objective lens needs to be changed. Adaptation, that is, by designing a special adjustment mechanism or adding a spacer to meet the spacing requirements under different laser wavelengths, such as the document "Design of Multi-Wavelength Transmissive Beam Expander" (J. Infrared and Laser, vol37, No.7) A complex transmissive design is used to achieve beam expansion and collimation at three wavelengths. When adjusting the distance between the objective lens and the eyepiece, the system's spacing accuracy, parallelism and coaxiality will bring errors and affect the collimation performance. And with the application of continuous or white light lasers and some special applications, beam expanding and collimating optical systems suitable for continuous wavelength laser beams are required in a wide range of wavelengths, and this method of changing the pitch cannot be satisfied.

发明内容 Contents of the invention

本实用新型针对现有技术存在的不足,提供一种宽波段的高倍率扩束准直光学系统,该光学系统可适用于多个波长的激光器,而不用移动镜片从而调整透镜间距适应不同波长的扩束准直,具有高质量的准直性能外,且能够实现高光学透过率,为一种无调距机构的紧凑型宽波段高倍率扩束准直光学系统。 The utility model aims at the deficiencies in the prior art, and provides a wide-band high-magnification beam expansion collimation optical system, which can be applied to lasers with multiple wavelengths, without moving the lens to adjust the lens spacing to adapt to different wavelengths. Beam expander collimation has high-quality collimation performance and can achieve high optical transmittance. It is a compact wide-band high-magnification beam expander collimator optical system without a distance adjustment mechanism.

实现本实用新型目的的技术方案是提供一种扩束准直光学系统,它包括透射扩束准直组和反射扩束准直组;按光线入射方向,所述的透射扩束准直组包括由一块双凹负镜和一块双凸正镜组成的扩束分组,由第一块弯月正镜和第二块弯月正镜组成的准直分组,第一块和第二块弯月正镜的曲率均弯向光线入射方向;扩束分组的组合焦距为负值,准直分组的组合焦距为正值,透射扩束准直组的倍率为准直分组的焦距与扩束分组的焦距之比的绝对值;所述的反射扩束准直组包括两块具有相同焦点位置的抛物面镜,依次为小口径抛物面镜和大口径抛物面镜,大口径抛物面镜的面形为离轴凹面,反射扩束准直组的扩束准直倍率为大口径抛物面镜的顶点曲率半径与小口径抛物面镜的顶点曲率半径的比值。 The technical solution to realize the purpose of this utility model is to provide a beam expansion collimation optical system, which includes a transmission beam expansion collimation group and a reflection beam expansion collimation group; according to the incident direction of light, the transmission beam expansion collimation group includes A beam expander group composed of a double concave negative mirror and a double convex positive mirror, a collimation group composed of the first meniscus positive mirror and the second meniscus positive mirror, the first and second meniscus positive mirrors The curvature of the mirror is bent to the incident direction of the light; the combined focal length of the beam expansion group is a negative value, the combined focal length of the collimation group is a positive value, and the magnification of the transmission beam expansion collimation group is the focal length of the collimation group and the focal length of the beam expansion group The absolute value of the ratio; the reflective beam expansion collimation group includes two parabolic mirrors with the same focal position, followed by a small-diameter parabolic mirror and a large-diameter parabolic mirror, and the surface shape of the large-diameter parabolic mirror is an off-axis concave surface, The beam expansion and collimation magnification of the reflective beam expansion and collimation group is the ratio of the vertex curvature radius of the large-diameter parabolic mirror to the vertex curvature radius of the small-diameter parabolic mirror.

本实用新型中,透射扩束准直组的倍率为2x~10x;反射扩束准直组的倍率为8x~30x。 In the utility model, the magnification of the transmission beam expansion and collimation group is 2x to 10x; the magnification of the reflection beam expansion and collimation group is 8x to 30x.

本实用新型提供的光学系统由透射扩束准直组和反射扩束准直组构成,其原理如下: The optical system provided by the utility model is composed of a transmission beam expansion collimation group and a reflection beam expansion collimation group, and its principle is as follows:

透射扩束准直组实现光的小倍率扩束,采用双凹镜-双凸和弯月镜-弯月镜构成。由于扩束比较小,象差主要为球差和色差。通过优化面形实现球差校正,通过选择合适的玻璃材料组合实现宽波段波长的色差校正。反射扩束组由两片离轴抛物面反射镜构成,采用椭圆同心结构,实现小角度大倍率的扩束。经透射扩束准直组输出的光,入射到小口径离轴抛物面镜后,反射到大口径的离轴抛物面镜实现更大比率的扩束。 The transmission beam expander collimation group realizes small magnification beam expansion of light, and adopts double concave mirror-biconvex and meniscus mirror-meniscus mirror. Due to the relatively small beam expansion, the aberrations are mainly spherical aberration and chromatic aberration. Spherical aberration correction is realized by optimizing the surface shape, and chromatic aberration correction of wide-band wavelengths is realized by selecting a suitable combination of glass materials. The reflective beam expander group is composed of two off-axis parabolic mirrors, and adopts an elliptical concentric structure to achieve beam expansion at small angles and large magnifications. The light output by the transmitted beam expander and collimator group enters the small-diameter off-axis parabolic mirror, and then reflects to the large-diameter off-axis parabolic mirror to achieve a larger ratio of beam expansion.

本实用新型扩束准直光学系统的透射扩束准直组采用四片透镜构成,一般实现小于10倍以下的扩束准直。前两片构成镜扩束分组,第一片镜为双凹型式,采用色散相对高、折射率相对高的材料;第二片镜为双凸型式,采用低折射率和低色散性能的材料,它们的组合焦距为负;后两片构成准直分组,两片均为弯月正镜型式,其曲率都弯向光束入射方向,两个镜片的选用与前面两片的选用相反,即第一片弯月正镜选用低折射率和低色散性能的材料,第二片弯月正镜选用色散相对高、折射率相对高的材料。初始焦距和材料的选择按如下公式(1)、(2)和(3)确定: The transmission beam expansion and collimation group of the beam expansion and collimation optical system of the utility model is composed of four lenses, and generally realizes beam expansion and collimation less than 10 times. The first two mirrors form a mirror beam expander group. The first mirror is biconcave, using materials with relatively high dispersion and high refractive index; the second mirror is biconvex, using materials with low refractive index and low dispersion performance. Their combined focal length is negative; the latter two form a collimation group, both of which are meniscus positive mirrors, and their curvatures are bent toward the incident direction of the light beam. The selection of the two lenses is opposite to that of the first two, that is, the first The first meniscus positive mirror is made of materials with low refractive index and low dispersion performance, and the second meniscus positive mirror is made of materials with relatively high dispersion and relatively high refractive index. The initial focal length and material selection are determined according to the following formulas (1), (2) and (3):

;

其中,为透镜扩束准直组的扩束准直倍率,为扩束分组的焦距,为准直分组的焦距,分别为扩束分组中双凹负镜的焦距及其材料阿贝数,分别为扩束分组中双凸正镜镜的焦距及其材料阿贝数。同样,准直分组内的镜片的材料选择也按公式(1)、(2)和(3)得到。 in, is the beam expansion and collimation magnification of the lens beam expansion and collimation group, is the focal length of the expanded beam group, is the focal length of the collimation group, and are the focal length of the double-concave negative mirror in the beam expander group and its material Abbe number, respectively, and are the focal length of the biconvex positive mirror in the beam expander group and the Abbe number of its material, respectively. Similarly, the material selection of the lenses in the collimation group is also obtained according to formulas (1), (2) and (3).

本实用新型中后射扩束准直组采用同焦点位置的两个抛物面镜,可实现10x以上扩束准直。通过抛物面镜使光路离轴折返,可缩小光学系统结构长度。两个抛物面镜的其中一个焦点在相同位置,形成椭圆的同心结构,可校正除场曲外的其他几种象差,如球差,慧差,象散等。小口径抛物面镜和大口径抛物面镜具有相同的焦点位置,即两面的椭圆为同心结构。其顶点曲率比值为该组的扩束准直比,即公式(4): The beam expansion and collimation group in the utility model adopts two parabolic mirrors at the same focal point, which can realize beam expansion and collimation of more than 10x. The off-axis folding of the optical path through the parabolic mirror can reduce the structural length of the optical system. One of the focal points of the two parabolic mirrors is at the same position, forming an elliptical concentric structure, which can correct several aberrations other than field curvature, such as spherical aberration, coma, astigmatism, etc. The small-diameter parabolic mirror and the large-diameter parabolic mirror have the same focus position, that is, the ellipses on both sides are concentric structures. Its vertex curvature ratio is the beam expander collimation ratio of the group , namely formula (4):

(4); (4);

其中,为小口径抛物面镜的顶点曲率半径,为大口径抛物面镜的顶点曲率半径。当前透射扩束准直和后反射扩束准直组组合后,形成的扩束准直倍率比为公式(5): in, is the radius of curvature of the vertex of the small-diameter parabolic mirror, is the radius of curvature of the vertex of the large-aperture parabolic mirror. After the combination of the current transmission beam expansion collimation group and the rear reflection beam expansion collimation group, the formed beam expansion collimation magnification ratio is formula (5):

(5); (5);

由此可形成超过30倍以上的扩束准直倍率,甚至可达到200倍以上的扩束准直比。两者结合后可通过相互补偿来校正剩余的象差,如前透射组的剩余高级球差可在反射组中校正,而反射组中的剩余场曲可在透射组中进行补偿。由于采用的离轴折返光路,可以缩小系统体积,且在离轴空间能够放置透射扩束准直组,使透射扩束准直组不需要占用多余的空间,从而使系统更加紧凑。 As a result, a beam expansion and collimation ratio of more than 30 times can be formed, and even a beam expansion and collimation ratio of more than 200 times can be achieved. After the two are combined, the remaining aberrations can be corrected by mutual compensation. For example, the remaining advanced spherical aberration of the front transmission group can be corrected in the reflection group, and the remaining field curvature in the reflection group can be compensated in the transmission group. Due to the off-axis reentrant optical path, the volume of the system can be reduced, and the transmission beam expansion and collimation group can be placed in the off-axis space, so that the transmission beam expansion and collimation group does not need to occupy extra space, thus making the system more compact.

与现有技术相比,本实用新型的有益效果在于: Compared with the prior art, the utility model has the beneficial effects of:

1、本实用新型提供的扩束准直系统,不需要设置元件调整机构或者象差补偿部件就可以实现宽波段光束的大倍率扩束准直。本实用新型提出的实现方法除能应用在可见近红外波段,在其余波段,如紫外、中波、长波红外波段也同样适用。 1. The beam expansion and collimation system provided by the utility model can realize large-magnification beam expansion and collimation of wide-band light beams without setting element adjustment mechanisms or aberration compensation components. The realization method proposed by the utility model can not only be applied to the visible and near-infrared bands, but also applicable to other bands, such as ultraviolet, medium-wave and long-wave infrared bands.

2、本实用新型提供的宽波段高倍率的紧凑型扩束准直系统,可为宽波段范围内的任意激光波长或者白光激光器提供扩束准直,而不需要任何移动补偿部件,结构紧凑,体积小,扩束倍率大、准直性能高,可用于全息成像、光学测试、激光雷达等方面。 2. The wide-band and high-magnification compact beam expansion collimation system provided by the utility model can provide beam expansion and collimation for any laser wavelength or white light laser within the wide-band range without any moving compensation parts, and the structure is compact. Small in size, large in beam expansion magnification, and high in collimation performance, it can be used in holographic imaging, optical testing, laser radar, etc.

附图说明 Description of drawings

图1为本实用新型实施例提供的一种用于宽波段高倍率扩束准直光学系统结构示意图; Fig. 1 is a schematic structural diagram of a wide-band high-magnification beam expansion collimation optical system provided by an embodiment of the present invention;

图2为本实用新型实施例提供的一种用于宽波段高倍率扩束准直光学系统在632.8nm处的波前图; Figure 2 is a wavefront diagram at 632.8nm for a wide-band high-magnification beam expansion collimation optical system provided by the embodiment of the present invention;

图3为本实用新型实施例提供的一种用于宽波段高倍率扩束准直光学系统在1064nm处的波前图; Figure 3 is a wavefront diagram at 1064nm for a wide-band high-magnification beam expansion collimation optical system provided by an embodiment of the present invention;

图4为本实用新型实施例提供的一种用于宽波段高倍率扩束准直光学系统的出射光束经200mm理想透镜成像后的MTF曲线图; Fig. 4 is the MTF curve diagram of the outgoing light beam of a wide-band high-magnification beam expansion collimation optical system provided by the embodiment of the present invention after being imaged by a 200mm ideal lens;

图5为本实用新型另一个实施例提供的一种用于宽波段高倍率扩束准直光学系统结构示意图; Fig. 5 is a schematic structural diagram of a wide-band high-magnification beam expansion collimation optical system provided by another embodiment of the present invention;

图中,1、双凹负透镜;2、双凸正透镜;3、第一块弯月透镜;4、第二块弯月透镜;5、小口径抛物面镜;6、大口径抛物面镜。 In the figure, 1, a double-concave negative lens; 2, a double-convex positive lens; 3, the first meniscus lens; 4, the second meniscus lens; 5, a small-diameter parabolic mirror; 6, a large-diameter parabolic mirror.

具体实施方式 Detailed ways

下面结合附图和实施例对本实用新型技术方案作进一步的阐述。 The technical solution of the utility model will be further elaborated below in conjunction with the accompanying drawings and embodiments.

实施例1: Example 1:

本实施例待加工扩束准直光学系统的设计要求:入射光束为1.5mm,发散角度为22mrad,实现33x的扩束准直,经扩束准直后出射光发散角不大于0.7mrad,能够适用的波长范围为488nm~1064m。 The design requirements of the beam expanding and collimating optical system to be processed in this embodiment: the incident light beam is 1.5mm, the divergence angle is 22mrad, and the beam expanding and collimating of 33x is realized. The applicable wavelength range is 488nm~1064m.

参见附图1,它是本实施例提供的一种用于宽波段高倍率扩束准直光学系统结构示意图;它包括透射扩束准直组和反射扩束准直组;所述的透射扩束准直组,按光线入射方向,包括由一块双凹负镜1和一块双凸正镜2组成的扩束分组,由第一块弯月正镜3和第二块弯月正镜4组成的准直分组;扩束分组的组合焦距为负,两块弯月正镜的曲率弯向光线入射方向,准直分组的组合焦距为正,透射扩束准直组的倍率为准直分组的焦距与扩束分组的焦距之比的绝对值;反射扩束准直组包括两块具有相同焦点位置的抛物面镜,依次为小口径抛物面镜5和大口径抛物面镜6,大口径抛物面镜的面形为离轴凹面,小口径抛物面镜的面形为离轴凸面,后组的扩束准直倍率为大口径抛物面镜6的顶点曲率半径与小口径抛物面镜5的顶点曲率半径的比值。 Referring to accompanying drawing 1, it is a kind of optical system structure schematic diagram that is used for broadband high-magnification beam expansion collimation that the present embodiment provides; It comprises transmission beam expansion collimation group and reflection beam expansion collimation group; Described transmission expansion collimation group The beam collimation group, according to the incident direction of the light, includes a beam expansion group composed of a double concave negative mirror 1 and a double convex positive mirror 2, and is composed of the first meniscus positive mirror 3 and the second meniscus positive mirror 4 The collimation group; the combined focal length of the beam expansion group is negative, the curvature of the two meniscus positive mirrors is bent to the light incident direction, the combined focal length of the collimation group is positive, and the magnification of the transmission beam expansion collimation group is the collimation group The absolute value of the ratio of the focal length to the focal length of the beam expander group; the reflective beam expander collimation group includes two parabolic mirrors with the same focal position, which are the small-diameter parabolic mirror 5 and the large-diameter parabolic mirror 6 in turn, and the surface of the large-diameter parabolic mirror The shape is an off-axis concave surface, and the surface shape of the small-diameter parabolic mirror is an off-axis convex surface. The beam expansion collimation magnification of the rear group is the ratio of the vertex radius of curvature of the large-diameter parabolic mirror 6 to the vertex radius of curvature of the small-diameter parabolic mirror 5.

本实施例制备宽波段高倍率扩束准直光学系统的具体步骤流程图,步骤如下: The flow chart of specific steps for preparing a wide-band high-magnification beam expansion collimation optical system in this embodiment, the steps are as follows:

1、依据待加工扩束准直光学系统的设计要求,如体积、波长范围、扩束准直倍率或输入、输出角度等,分配透射扩束准直组与反射扩束准直组之间的扩束准直倍率,使前透射扩束准直组的扩束倍率在2x~10x之间,使后反射扩束准直组的倍率在8x以上,达到所需要的扩束准直倍率。 1. According to the design requirements of the beam expansion collimation optical system to be processed, such as volume, wavelength range, beam expansion collimation magnification or input and output angles, etc., allocate the transmission beam expansion collimation group and the reflection beam expansion collimation group Beam expansion and collimation magnification, so that the beam expansion magnification of the front transmission beam expansion collimation group is between 2x and 10x, and the magnification of the rear reflection beam expansion collimation group is above 8x to achieve the required beam expansion and collimation magnification.

2、初始焦距和材料的选择按如下公式(1)、(2)和(3)确定: 2. The initial focal length and material selection are determined according to the following formulas (1), (2) and (3):

;

其中,为透镜扩束准直组的扩束准直倍率,为扩束分组的焦距,为准直分组的焦距,分别为扩束分组中双凹负镜的焦距及其材料阿贝数,分别为扩束分组中双凸正镜镜的焦距及其材料阿贝数。同样,准直分组内的镜片的材料选择也按公式(1)、(2)和(3)得到。 in, is the beam expansion and collimation magnification of the lens beam expansion and collimation group, is the focal length of the expanded beam group, is the focal length of the collimation group, and are the focal length of the double-concave negative mirror in the beam expander group and its material Abbe number, respectively, and are the focal length of the biconvex positive mirror in the beam expander group and the Abbe number of its material, respectively. Similarly, the material selection of the lenses in the collimation group is also obtained according to formulas (1), (2) and (3).

利用光学模拟软件Zemax或CodeV对透镜扩束准直组内的前两镜组成的扩束分组与后两镜组成的准直分组分别进行色差校正,球差优化、焦距选取,然后组合扩束分组和准直分组进行综合象差校正。 Use the optical simulation software Zemax or CodeV to perform chromatic aberration correction, spherical aberration optimization, and focal length selection on the beam expander group composed of the first two mirrors and the collimation group composed of the rear two mirrors in the lens beam expander collimation group, and then combine the beam expander group and collimation group for comprehensive aberration correction.

3、对后反射扩束准直组的曲率、间距或离轴量进行优选;两块抛物面镜的顶点曲率比值为该组的扩束准直比,即公式(4): 3. Optimizing the curvature, spacing or off-axis amount of the rear reflective beam expander collimation group; the ratio of the curvature of the vertices of the two parabolic mirrors is the beam expander collimation ratio of the group , namely formula (4):

(4); (4);

其中,为小口径抛物面镜的顶点曲率半径,为大口径抛物面镜的顶点曲率半径。 in, is the radius of curvature of the vertex of the small-diameter parabolic mirror, is the radius of curvature of the vertex of the large-aperture parabolic mirror.

4、组合透射扩束准直组与反射扩散准直组,当前透射扩束准直和后反射扩束准直组组合后,形成的扩束准直倍率比为公式(5): 4. Combine the transmission beam expansion collimation group and the reflection diffusion collimation group. After the current transmission beam expansion collimation group and the rear reflection beam expansion collimation group are combined, the formed beam expansion collimation ratio is formula (5):

(5); (5);

对系统的象差和准直性能总体优化,得到系统的各项参数。 The aberration and collimation performance of the system are generally optimized, and various parameters of the system are obtained.

判断所得到的结果是否满足要求,若由于反射镜加工难度大或体积尺寸限制不能达到预期要求,则按步骤1的方法调整两组倍率,返回步骤2再重新进行设计,以平衡系统横向和纵向尺寸;反之,执行步骤5。 Judging whether the obtained results meet the requirements, if the mirror processing difficulty or volume size limit cannot meet the expected requirements, then adjust the two groups of magnifications according to the method of step 1, return to step 2 and redesign to balance the system horizontally and vertically size; otherwise, go to step 5.

5、在能够满足扩束准直性能和加工工艺要求等情况下,进行系统的加工、组装与测试,得到一种扩束准直光学系统。 5. Under the conditions that the beam expander collimation performance and processing technology requirements can be met, the system processing, assembly and testing are carried out to obtain a beam expander collimation optical system.

按上述的实施步骤,得到的具体参数如表1所示。 According to the above implementation steps, the specific parameters obtained are shown in Table 1.

表1 Table 1

.

本实用新型的实施例中,透射扩束准直组置于反射扩束准直组的离轴倾斜反射留下空间位置,使整个系统体积更加紧凑,整个光学系统长度为85mm,宽度为65mm。 In the embodiment of the utility model, the transmission beam expansion collimation group is placed in the space left by the off-axis oblique reflection of the reflection beam expansion collimation group, which makes the whole system more compact. The length of the entire optical system is 85 mm, and the width is 65 mm.

本实施例中前透射扩束准直组中的透镜,负镜1在前,正双凸镜2在后,负镜1和正双凸镜2构成负镜组。负镜1采用高色散高折射率的火石玻璃ZF2,正双凸镜2采用低折射率低色散的冕牌玻璃K9。镜3和镜4构成正镜组,都采用正弯月形式,曲率弯向光入射方向,两镜分别采用K9和ZF2。 In this embodiment, the lens in the front transmission beam expander collimation group, the negative mirror 1 is in front, and the positive lenticular mirror 2 is behind, and the negative mirror 1 and the positive lenticular mirror 2 form a negative lens group. Negative mirror 1 uses flint glass ZF2 with high dispersion and high refractive index, and positive lenticular mirror 2 uses crown glass K9 with low refractive index and low dispersion. Mirror 3 and mirror 4 constitute a positive mirror group, both of which are in the form of a positive meniscus, and the curvature is bent toward the light incident direction, and the two mirrors are respectively K9 and ZF2.

本实施例中后组的反射镜5采用凸抛物面面形,离轴量为6mm,抛物镜4采样凹抛物面面形,离轴量为40mm,两个抛面镜的焦点位置重合。 In this embodiment, the reflecting mirror 5 of the rear group adopts a convex paraboloid surface shape, and the off-axis distance is 6 mm. The parabolic mirror 4 samples a concave paraboloid surface shape, and the off-axis distance is 40 mm. The focal positions of the two parabolic mirrors coincide.

根据当前工艺,本实用新型所给扩束准直光学系统在488nm~1064nm波段可以透过90%以上,发散角度为22mrad的入射光束,经准直扩束后得到出射光束的发散角小于0.7mrad,扩束倍率在33x。 According to the current technology, the beam expanding and collimating optical system given by the utility model can transmit more than 90% of the incident beam with a divergence angle of 22mrad in the 488nm-1064nm band, and the divergence angle of the outgoing beam obtained after collimation and expansion is less than 0.7mrad , the beam expansion magnification is 33x.

参见附图2,给出了本实施例在632.8nm处中心视场和边缘发散视场的波前图,其中,(a)图为PV值,(b)图为RMS值;由图可以看到,在0视场时PV值为0.093波长,RMS值为0.02波长,在边缘视场时PV值为0.086波长,RMS值为0.020波长。 Referring to accompanying drawing 2, the wavefront diagram of the central field of view and the edge divergence field of view at 632.8nm is given in this embodiment, wherein, (a) the picture is the PV value, (b) the picture is the RMS value; it can be seen from the figure It is found that the PV value is 0.093 wavelength and the RMS value is 0.02 wavelength at 0 field of view, and the PV value is 0.086 wavelength and RMS value is 0.020 wavelength at the edge field of view.

参见附图3,给出了本实施例在1064nm处中心视场和边缘发散视场的波前图,其中,(a)图为PV值,(b)图为RMS值;由图可以看到,在0视场时PV值为0.078波长,RMS值为0.14波长,在边缘视场时PV值为0.091波长,RMS值为0.015波长。 Referring to accompanying drawing 3, the wavefront diagram of the central field of view and the edge divergence field of view at 1064nm is given in this embodiment, wherein, (a) the picture is the PV value, (b) the picture is the RMS value; it can be seen from the figure , at 0 field of view, the PV value is 0.078 wavelength, the RMS value is 0.14 wavelength, and at the edge field of view, the PV value is 0.091 wavelength, and the RMS value is 0.015 wavelength.

参见附图4,它为采用200mm理想透镜对本实施例提供的扩束准直系统聚焦成像后的调制传递函数(MTF)曲线。由图5可知,在22mrad发散角入射下经本实用新型的光学系统扩束准直,再经理想透镜成像,得到的MTF下接近衍射极限,能够说明本实用新型的扩束准直光学系统具有良好的扩束准性能。 Referring to FIG. 4 , it is a modulation transfer function (MTF) curve after focusing and imaging the beam expander collimation system provided by this embodiment with a 200mm ideal lens. As can be seen from Fig. 5, under the incidence of 22mrad divergence angle, through the beam expansion and collimation of the optical system of the present utility model, and then manage the imaging of the ideal lens, the MTF obtained is close to the diffraction limit, which can illustrate that the beam expansion and collimation optical system of the present utility model has Good beam expander quasi-performance.

实施例2 Example 2

参见附图5,本实施例提供的一种用于宽波段高倍率扩束准直光学系统结构示意图;本实施例采用与实施例1相同的透射扩散准直组,反射扩束准直组中采用了小口径的凹面抛物面镜。 Referring to accompanying drawing 5, this embodiment provides a schematic structural diagram of a wide-band high-magnification beam expansion collimation optical system; this embodiment uses the same transmission and diffusion collimation group as in Embodiment 1, and the reflection beam expansion A small diameter concave parabolic mirror is used.

本实施例中的小口径凹抛物面镜5,其顶点曲率与实施例1中的凸抛物镜的顶点曲率数值大小一样,符号相反,即把表1中元件5的曲率半径改为中-20.1。由于使用小凹抛物面镜会形成中间实焦点,从而使系统整体长度变长,而当使用实施例1中的小口径凸面抛物面镜时形成的是虚焦点,长度会变短。本实施例中的小口径凹抛物面镜在使用时,离轴方向与实施例1中的小口径凸抛物面镜也相反,即离轴量为-6mm。 The small-diameter concave parabolic mirror 5 in the present embodiment has the same apex curvature value as that of the convex parabolic mirror in embodiment 1, and the sign is opposite, that is, the radius of curvature of the element 5 in Table 1 is changed to -20.1. Since the use of a small concave parabolic mirror will form an intermediate real focal point, the overall length of the system will become longer, while when using the small-diameter convex parabolic mirror in Embodiment 1, a virtual focal point will be formed, and the length will be shortened. When the small-diameter concave parabolic mirror in this embodiment is in use, the off-axis direction is opposite to that of the small-diameter convex parabolic mirror in Embodiment 1, that is, the off-axis distance is -6mm.

本实施例中,入射到小型凹反射镜的光束后,会首先汇聚成一点,此点即为抛物面镜5和抛物面镜6的共同焦点。汇聚后的光束发散入射到大口径的抛物面上实现准直。 In this embodiment, after the light beam incident on the small concave reflector, it will first converge to a point, which is the common focus of the parabolic mirror 5 and the parabolic mirror 6 . The converged light beam diverges and is incident on a large-diameter paraboloid to achieve collimation.

本实施例涉及的扩束准直系统的性能指标与实施例1一致。 The performance index of the beam expander collimation system involved in this embodiment is consistent with that of Embodiment 1.

本实用新型的扩束准直系统不需要设置元件调整机构或者象差补偿部件就可以实现宽波段光束的大倍率扩束准直。本实用新型提出的实现方法除能应用在可见近红外波段,在其余波段,如紫外、中波、长波红外波段也同样适用。 The beam expander collimation system of the utility model can realize large-magnification beam expander collimation of a wide-band beam without setting an element adjustment mechanism or an aberration compensation component. The realization method proposed by the utility model can not only be applied to the visible and near-infrared bands, but also applicable to other bands, such as ultraviolet, medium-wave and long-wave infrared bands.

Claims (2)

1. A beam expanding collimating optical system, comprising: the device comprises a transmission beam expanding collimation group and a reflection beam expanding collimation group; according to the incident direction of light rays, the transmission beam expanding collimation group comprises a beam expanding group consisting of a biconcave negative lens (1) and a biconvex positive lens (2), and a collimation group consisting of a first meniscus positive lens (3) and a second meniscus positive lens (4), wherein the curvatures of the first meniscus positive lens and the second meniscus positive lens are both bent towards the incident direction of the light rays; the combined focal length of the expanded beam grouping is a negative value, the combined focal length of the collimation grouping is a positive value, and the multiplying power of the transmission expanded beam collimation group is the absolute value of the ratio of the focal length of the collimation grouping to the focal length of the expanded beam grouping; the reflection beam expanding collimation group comprises two parabolic mirrors with the same focus position, a small-caliber parabolic mirror (5) and a large-caliber parabolic mirror (6) in sequence, the surface shape of the large-caliber parabolic mirror is an off-axis concave surface, and the beam expanding collimation magnification of the reflection beam expanding collimation group is the ratio of the vertex curvature radius of the large-caliber parabolic mirror (6) to the vertex curvature radius of the small-caliber parabolic mirror (5).
2. The beam expanding collimating optical system of claim 1, wherein: the multiplying power of the transmission beam expanding collimation group is 2 x-10 x; the multiplying power of the reflection beam expanding collimation group is 8 x-30 x.
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Cited By (6)

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CN104977720A (en) * 2015-07-02 2015-10-14 苏州大学 Beam-expanding collimating optical system and preparation method thereof
CN105449507A (en) * 2016-01-06 2016-03-30 中国科学院上海光学精密机械研究所 Compensation device and method for pulse-front distortion in femtosecond laser pulse amplification system
CN106017360A (en) * 2016-08-07 2016-10-12 哈尔滨工业大学 Portable array zero setting high-frequency-response large-working-distance auto-collimation device and method
CN109804287A (en) * 2016-08-17 2019-05-24 纳米精密产品股份有限公司 Optical connector ferrule component with the bireflectance surface for beam spread and the extension light beam connector including it
CN110824680A (en) * 2019-11-28 2020-02-21 合肥工业大学 Beam expanding device of catadioptric interferometer
CN115597483A (en) * 2022-09-30 2023-01-13 南京理工大学(Cn) An interferometer beam expander collimation device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104977720A (en) * 2015-07-02 2015-10-14 苏州大学 Beam-expanding collimating optical system and preparation method thereof
CN105449507A (en) * 2016-01-06 2016-03-30 中国科学院上海光学精密机械研究所 Compensation device and method for pulse-front distortion in femtosecond laser pulse amplification system
CN105449507B (en) * 2016-01-06 2018-07-13 中国科学院上海光学精密机械研究所 It is a kind of to be used for the compensation device and compensation method that pulse front edge distorts in femto-second laser pulse amplification system
CN106017360A (en) * 2016-08-07 2016-10-12 哈尔滨工业大学 Portable array zero setting high-frequency-response large-working-distance auto-collimation device and method
CN109804287A (en) * 2016-08-17 2019-05-24 纳米精密产品股份有限公司 Optical connector ferrule component with the bireflectance surface for beam spread and the extension light beam connector including it
CN110824680A (en) * 2019-11-28 2020-02-21 合肥工业大学 Beam expanding device of catadioptric interferometer
CN115597483A (en) * 2022-09-30 2023-01-13 南京理工大学(Cn) An interferometer beam expander collimation device
CN115597483B (en) * 2022-09-30 2024-02-06 南京理工大学 Interferometer beam expansion collimation device

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