CN109586611A - A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface - Google Patents
A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface Download PDFInfo
- Publication number
- CN109586611A CN109586611A CN201910062093.3A CN201910062093A CN109586611A CN 109586611 A CN109586611 A CN 109586611A CN 201910062093 A CN201910062093 A CN 201910062093A CN 109586611 A CN109586611 A CN 109586611A
- Authority
- CN
- China
- Prior art keywords
- work
- mover
- word
- foot
- axle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims abstract description 7
- 238000004904 shortening Methods 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims description 25
- 230000033001 locomotion Effects 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The present invention relates to a kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface, the driver are made of stator, pretightning force weighted platform, fixed pedestal, four part of mover.Wherein stator includes " work " word front-axle beam, " work " word attachment beam, " work " the word back rest, reset spring, right circular flexure hinge, piezoelectric stack and driving foot.It is provided with parallel-guiding in the driving foot, ensure that pre- next, driving still is face contact between foot and mover；Mover and the sufficient contact surface of driving make to rub and have directional dependence using nano-fabrication technique, and the frictional force generated when mover moves right is less than the frictional force generated when moving downward；The elongation and shortening for controlling piezoelectric stack make to drive the deformation to the right of foot alternating that mover is pushed to move right, to achieve the effect that alternately stepping.The present invention has the characteristics that control precision is high, simple and compact for structure, movement travel is big.
Description
Technical field
The present invention relates to a kind of alternating step piezoelectric stick-slip drivers of anisotropy friction surface, belong to Precision Piezoelectric drive
Dynamic field.
Background technique
In recent years, nanometer technique is developed rapidly, in Ultra-precision Turning, robot, optical engineering, calculating
Demand of the technical fields such as machine, aerospace science and technology, accurate measurement, modern medical service to precision actuation technology is growing, and micro-
Nanoscale precision actuation technology is then its key technology.Traditional driving device, such as servo motor, Pneumatic Transmission, hydraulic biography
Large-sized driving device such as dynamic, although the output compared with big load can be completed, its output accuracy is relatively low, cannot expire
Requirement of the sufficient modern science and technology to fine dimension and precision.People have developed many next-generation drives in this context, such as remember
Alloy electric machine, electrostriction motor and piezoelectric effect motor etc., wherein being to drive the driver of original part because of it with piezoelectric material
An important research direction of the advantages that structure is simple, and tolerance is strong as precise driving device in recent years.
Saw tooth excitation electric signal is mainly applied to piezoelectric element by the driving of piezoelectricity stick-slip, and excitation stator generates speed alternating
Motion deformation, control the mutual conversion between " viscous " and " cunning " two kinds of motion states of stator and mover, driven using frictional force
Dynamic mover realizes mechanical movement output.The current piezoelectricity stick-slip driver course of work can be divided into slowly deformation and Quick-return
Stage, frictional force during the two between stator and mover play different role, and slow deformation stage shows as friction and drives
Power, Quick-return stage show as frictional resistance, the influence due to frictional resistance to movement, so that working efficiency reduces.
Summary of the invention
In order to reach the movement effects of alternately stepping, while the delivery efficiency of driver is improved, the invention discloses one kind
The alternating step piezoelectric stick-slip driver of anisotropy friction surface.
The technical scheme adopted by the invention is that:
A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface, it is characterised in that the piezoelectricity stick-slip
Driver is made of stator (1), pretightning force weighted platform (2), fixed pedestal (3) and (4) four part of mover；Wherein stator (1)
It is fixedly mounted on pretightning force weighted platform (2), pretightning force weighted platform (2) is mounted on fixed pedestal (3), mover (4) peace
On fixed pedestal (3) and with drive sufficient Elastic Contact；The stator (1) includes " work " word front-axle beam (1-1), directly justifies flexible hinge
Chain (1-2), " work " word attachment beam (1-3), C-shaped reset spring (1-4), " work " the word back rest (1-5), mounting hole (1-6), inverted-C
Reset spring (1-7), piezoelectric stack (1-8), first drive foot (1-9), second to drive foot (1-10)；Stator (1) rigid element
In " I " fonts；It is provided with right circular flexure hinge (1-2) between " work " word front-axle beam (1-1) and " work " word attachment beam (1-3), is convenient for
" work " word front-axle beam (1-1) rotation；First drives foot (1-9) setting in the left end of " work " word front-axle beam (1-1), and second drives foot (1-
10) right end in " work " word front-axle beam (1-1) is set, and first, second drives foot (1-9,1-10) to be tilted to the right；Before " work " word
Beam (1-1) is connect with " work " the word back rest (1-5) right end by C-shaped reset spring (1-4)；" work " word front-axle beam (1-1) and " work " word
The back rest left end (1-5) is connected by inverted-C reset spring (1-7)；There are two mounting holes for the setting of " work " the word back rest both ends (1-5)
(1-6), for stator (1) to be fixed on pretightning force weighted platform (2)；Piezoelectric stack (1-8) is arranged in inverted-C reset spring
(1-7) and " work " word attachment beam (1-3) are intermediate；Driving foot with mover (4) friction surface have anisotropy, i.e., mover (4) to
The frictional force generated when right movement is less than the frictional force generated when moving downward；Apply triangular wave to piezoelectric stack (1-8), works as pressure
When electricity stacks (1-8) elongation, first drives foot (1-9) deformation to the right that mover (4) is pushed to move right；As piezoelectric stack (1-8)
When retraction, second drives foot (1-10) deformation to the right that mover (4) is pushed to move right, and alternately walks so that mover (4) be made to realize
Into effect.
A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface, it is characterised in that described
It is provided with parallel-guiding (1-9-1,1-10-1) in first, second driving foot (1-9,1-10), ensure that pre- next, driving
It is still face contact between foot and mover (4).
A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface, it is characterised in that described
Mover (4) and first, second drive sufficient contact surface (4-1,1-9-2,1-10-2) to have friction using nano-fabrication technique
There are directional dependence, i.e. angle of friction α > β, the frictional force generated when mover (4) moves right, which is less than, to be generated when moving downward
Frictional force.
A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface, it is characterised in that:
It is appropriate before work to pre-tighten, so that first, second drives foot (1-9,1-10) and mover (4) to keep Elastic Contact；To piezo stack
Heap (1-8) applies triangular wave, controls the elongation and shortening of piezoelectric stack (1-8)；When piezoelectric stack (1-8) elongation, " work " word
Front-axle beam (1-1) is tilted to the right, and first drives foot (1-9) deformation to the right that mover (4) is pushed to move right, while the second driving foot
(1-10) is moved downward；When piezoelectric stack (1-8) retraction when, " work " word front-axle beam (1-1) C-shaped, inverted-C reset spring (1-4,
Restore horizontal under the action of 1-7), second drives foot (1-10) that mover (4) is pushed to move right, while first drives foot (1-9)
It moves downward.
The beneficial effects of the present invention are: structure is simple, compact, it is convenient to control, and controls the elongation and shortening of piezoelectric stack, makes
Alternately deformation to the right pushes mover to move right to driving foot, to achieve the effect that alternately stepping, improves the output of driver
Efficiency.
Detailed description of the invention
The following further describes the present invention with reference to the drawings, in attached drawing:
Fig. 1 is the piezoelectricity stick-slip activation configuration schematic diagram proposed by the present invention with anisotropy friction surface；
Fig. 2 is the stator structure signal of the piezoelectricity stick-slip driver proposed by the present invention with anisotropy friction surface
Figure；
Fig. 3 is anisotropy friction surface schematic diagram proposed by the present invention；
Fig. 4 is that foot is driven to pre-tighten front and back schematic diagram in stator structure of the present invention；
Fig. 5 is the working principle diagram of the piezoelectricity stick-slip driver proposed by the present invention with anisotropy friction surface.
Specific embodiment
Implementation method is further illustrated with reference to the accompanying drawing:
As shown in Figure 1, 2, the piezoelectricity stick-slip driver by stator (1), pretightning force weighted platform (2), fixed pedestal (3) and
(4) four part of mover composition；Wherein stator (1) is fixedly mounted on pretightning force weighted platform (2), pretightning force weighted platform (2)
Be mounted on fixed pedestal (3), mover (4) be mounted on fixed pedestal (3) and with drive sufficient Elastic Contact；The stator (1)
Including " work " word front-axle beam (1-1), right circular flexure hinge (1-2), " work " word attachment beam (1-3), C-shaped reset spring (1-4), " work "
The word back rest (1-5), mounting hole (1-6), inverted-C reset spring (1-7), piezoelectric stack (1-8), first drive foot (1-9), second
Drive foot (1-10)；Stator (1) rigid element is in " I " fonts；Between " work " word front-axle beam (1-1) and " work " word attachment beam (1-3)
It is provided with right circular flexure hinge (1-2), is rotated convenient for " work " word front-axle beam (1-1)；First drives foot (1-9) to be arranged before " work " word
The left end of beam (1-1), second drives foot (1-10) setting in the right end of " work " word front-axle beam (1-1), and the first, second driving is sufficient
(1-9,1-10) is tilted to the right；" work " word front-axle beam (1-1) and " work " the word back rest (1-5) right end pass through C-shaped reset spring (1-4)
Connection；" work " word front-axle beam (1-1) is connect with " work " the word back rest left end (1-5) by inverted-C reset spring (1-7)；After " work " word
There are two mounting hole (1-6) for the setting of the beam both ends (1-5), for stator (1) to be fixed on pretightning force weighted platform (2)；Piezoelectricity
It is intermediate in inverted-C reset spring (1-7) and " work " word attachment beam (1-3) to stack (1-8) setting；Driving foot rubs with mover (4)
Surface has anisotropy, i.e., the frictional force generated when mover (4) moves right is less than the frictional force generated when moving downward.
A kind of alternating step piezoelectric stick-slip driver work with anisotropy friction surface that present implementation provides
It is preceding that first driving foot is suitably pre-tightened, so that first, second drives foot (1-9,1-10) to keep elastic connecting with mover (4)
Touching；Apply triangular wave to piezoelectric stack (1-8), controls the elongation and shortening of piezoelectric stack (1-8).Fig. 5 is proposed by the present invention
The working principle diagram of piezoelectricity stick-slip driver with anisotropy friction surface, driving method carry out according to the following steps:
Step a: from t0To t1Moment, piezoelectric stack (1-8) elongation, " work " word front-axle beam (1-1) are tilted to the right, the first driving
Foot (1-9) deformation to the right increases the pretightning force between mover (4), so that mover (4) be pushed to generate a micro-displacement to the right
△L1, while second drives foot (1-10) to move downward.
Step b: from t1To t2Moment, piezoelectric stack (1-8) retraction, " work " word front-axle beam (1-1) reset bullet in C-shaped, inverted-C
Restore horizontal under the action of spring (1-4,1-7), second drives foot (1-10) that mover (4) is pushed to generate a micro-displacement △ to the right
L2, while first drives foot (1-9) to move downward.
In conclusion the present invention provides a kind of, the alternating step piezoelectric stick-slip with anisotropy friction surface is driven
Device makes friction have directional dependence using nano-fabrication technique, and the frictional force generated when mover moves right is less than to the left
The frictional force generated when movement improves the stability of output performance；Make to drive sufficient friendship by the elongation and retraction of piezoelectric stack
Mover is pushed to move right for deformation to the right, to achieve the effect that alternately stepping.The present invention has structure simple, compact, control
The features such as convenient is made, in accurate medical instrument, the micro-nano precision actuation such as optical precision instrument and semiconductor machining and positioning are led
It is had a good application prospect in domain.
Claims (4)
1. a kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface, it is characterised in that: the piezoelectricity stick-slip
Driver is made of stator (1), pretightning force weighted platform (2), fixed pedestal (3) and (4) four part of mover；Wherein stator (1)
It is fixedly mounted on pretightning force weighted platform (2), pretightning force weighted platform (2) is mounted on fixed pedestal (3), mover (4) peace
On fixed pedestal (3) and with drive sufficient Elastic Contact；The stator (1) includes " work " word front-axle beam (1-1), directly justifies flexible hinge
Chain (1-2), " work " word attachment beam (1-3), C-shaped reset spring (1-4), " work " the word back rest (1-5), mounting hole (1-6), inverted-C
Reset spring (1-7), piezoelectric stack (1-8), first drive foot (1-9), second to drive foot (1-10)；Stator (1) rigid element
In " I " fonts；It is provided with right circular flexure hinge (1-2) between " work " word front-axle beam (1-1) and " work " word attachment beam (1-3), is convenient for
" work " word front-axle beam (1-1) rotation；First drives foot (1-9) setting in the left end of " work " word front-axle beam (1-1), and second drives foot (1-
10) right end in " work " word front-axle beam (1-1) is set, and first, second drives foot (1-9,1-10) to be tilted to the right；Before " work " word
Beam (1-1) is connect with " work " the word back rest (1-5) right end by C-shaped reset spring (1-4)；" work " word front-axle beam (1-1) and " work " word
The back rest left end (1-5) is connected by inverted-C reset spring (1-7)；There are two mounting holes for the setting of " work " the word back rest both ends (1-5)
(1-6), for stator (1) to be fixed on pretightning force weighted platform (2)；Piezoelectric stack (1-8) is arranged in inverted-C reset spring
(1-7) and " work " word attachment beam (1-3) are intermediate；Drive has anisotropy with mover (4) friction surface enough, i.e. angle of friction α > β,
So that friction has directional dependence, the frictional force generated when mover (4) moves right is less than generation when moving downward
Frictional force；Apply triangular wave to piezoelectric stack (1-8), when piezoelectric stack (1-8) elongation, " work " word front-axle beam (1-1) is to the right
Inclination, first drives foot (1-9) deformation to the right that mover (4) is pushed to move right；When piezoelectric stack (1-8) retraction, " work " word
Front-axle beam (1-1) restores horizontal under the action of C-shaped, inverted-C reset spring (1-4,1-7), and second drives foot (1-10) shape to the right
Become and mover (4) is pushed to move right, so that mover (4) be made to realize the effect for replacing stepping.
2. a kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface according to claim 1,
It is characterized in that being provided with parallel-guiding (1-9-1,1-10-1) in the first, second driving foot (1-9,1-10), guarantee
It is pre- next, it is still face contact between driving foot and mover (4).
3. a kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface according to claim 1,
It is characterized in that the mover (4) and sufficient contact surface (4-1,1-9-2,1-10-2) is driven to make to rub using nano-fabrication technique
With directional dependence, i.e. angle of friction α > β, the frictional force generated when mover (4) moves right is less than generation when moving downward
Frictional force.
4. a kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface according to claim 1,
It is characterized in that: suitably being pre-tightened before work, so that first, second drives foot (1-9,1-10) and mover (4) to keep elastic connecting
Touching；Apply triangular wave to piezoelectric stack (1-8), controls the elongation and shortening of piezoelectric stack (1-8)；When piezoelectric stack (1-8) is stretched
When long, " work " word front-axle beam (1-1) is tilted to the right, and first drives foot (1-9) deformation to the right that mover (4) is pushed to move right, simultaneously
Second drives foot (1-10) to move downward；When piezoelectric stack (1-8) retraction, " work " word front-axle beam (1-1) is resetted in C-shaped, inverted-C
Restore horizontal under the action of spring (1-4,1-7), second drives foot (1-10) that mover (4) is pushed to move right, while first drives
Action spot (1-9) moves downward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910062093.3A CN109586611B (en) | 2019-01-23 | 2019-01-23 | An alternating-stepping piezoelectric stick-slip actuator with anisotropic friction surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910062093.3A CN109586611B (en) | 2019-01-23 | 2019-01-23 | An alternating-stepping piezoelectric stick-slip actuator with anisotropic friction surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109586611A true CN109586611A (en) | 2019-04-05 |
| CN109586611B CN109586611B (en) | 2023-09-08 |
Family
ID=65917753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910062093.3A Active CN109586611B (en) | 2019-01-23 | 2019-01-23 | An alternating-stepping piezoelectric stick-slip actuator with anisotropic friction surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109586611B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109905052A (en) * | 2019-04-23 | 2019-06-18 | 苏州大学 | A self-adsorbing inertial stick-slip cross-scale precision motion platform based on interface effect |
| CN110061654A (en) * | 2019-04-25 | 2019-07-26 | 宁波大学 | A kind of change pretightning force stick-slip inertia linear actuator of abnormity texture friction regulation |
| CN110429860A (en) * | 2019-08-12 | 2019-11-08 | 吉林大学 | A kind of measurable stick-slip driver of contact force and its test method |
| CN113206615A (en) * | 2021-04-26 | 2021-08-03 | 天津大学 | Inchworm type linear driver with static self-locking function |
| CN114257124A (en) * | 2022-01-04 | 2022-03-29 | 长春工业大学 | Coupling type piezoelectric driving platform of bionic frog leg and driving method thereof |
| CN115313910A (en) * | 2022-08-17 | 2022-11-08 | 浙江师范大学 | An Asymmetric Mass Piezo Inertial Actuator |
| CN115502215A (en) * | 2022-10-31 | 2022-12-23 | 中国二十冶集团有限公司 | Transverse moving system and method for rotary hoisting device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101860256A (en) * | 2010-04-02 | 2010-10-13 | 大连理工大学 | High-precision adjustable speed linear micro-displacement worktable |
| US20120161671A1 (en) * | 2010-12-23 | 2012-06-28 | General Electric Company | Particle accelerators having electromechanical motors and methods of operating and manufacturing the same |
| CN105827141A (en) * | 2016-06-06 | 2016-08-03 | 长春工业大学 | Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof |
| CN108199615A (en) * | 2018-01-29 | 2018-06-22 | 长春工业大学 | Orthogonal Double drive-type precision piezoelectricity stick-slip line motor and its driving method |
-
2019
- 2019-01-23 CN CN201910062093.3A patent/CN109586611B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101860256A (en) * | 2010-04-02 | 2010-10-13 | 大连理工大学 | High-precision adjustable speed linear micro-displacement worktable |
| US20120161671A1 (en) * | 2010-12-23 | 2012-06-28 | General Electric Company | Particle accelerators having electromechanical motors and methods of operating and manufacturing the same |
| CN105827141A (en) * | 2016-06-06 | 2016-08-03 | 长春工业大学 | Oblique-trapezoid motion transfer type precise piezoelectric stick-slip linear motor and driving method thereof |
| CN108199615A (en) * | 2018-01-29 | 2018-06-22 | 长春工业大学 | Orthogonal Double drive-type precision piezoelectricity stick-slip line motor and its driving method |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109905052A (en) * | 2019-04-23 | 2019-06-18 | 苏州大学 | A self-adsorbing inertial stick-slip cross-scale precision motion platform based on interface effect |
| CN110061654A (en) * | 2019-04-25 | 2019-07-26 | 宁波大学 | A kind of change pretightning force stick-slip inertia linear actuator of abnormity texture friction regulation |
| CN110429860A (en) * | 2019-08-12 | 2019-11-08 | 吉林大学 | A kind of measurable stick-slip driver of contact force and its test method |
| CN113206615A (en) * | 2021-04-26 | 2021-08-03 | 天津大学 | Inchworm type linear driver with static self-locking function |
| CN114257124A (en) * | 2022-01-04 | 2022-03-29 | 长春工业大学 | Coupling type piezoelectric driving platform of bionic frog leg and driving method thereof |
| CN115313910A (en) * | 2022-08-17 | 2022-11-08 | 浙江师范大学 | An Asymmetric Mass Piezo Inertial Actuator |
| CN115502215A (en) * | 2022-10-31 | 2022-12-23 | 中国二十冶集团有限公司 | Transverse moving system and method for rotary hoisting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109586611B (en) | 2023-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109586611A (en) | A kind of alternating step piezoelectric stick-slip driver with anisotropy friction surface | |
| CN107147328B (en) | It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver | |
| CN109586612B (en) | Alternate stepping piezoelectric stick-slip driver with bionic wheat-awn friction surface | |
| CN208782740U (en) | An Asymmetric Piezoelectric Linear Actuator with Plow Structure | |
| CN102647107A (en) | Large-stroke micro-nano-scale linear actuator based on the principle of parasitic motion | |
| CN110601591A (en) | Linkage adjustable precise piezoelectric stick-slip driving device and control method thereof | |
| CN112803829B (en) | Friction asymmetric inertia piezoelectric linear drive device and method | |
| CN104362890A (en) | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement | |
| CN109818527A (en) | Isosceles Trapezoid Stick-Slip Piezo Linear Actuator | |
| CN111711381A (en) | A stick-slip piezoelectric driver and control method for realizing bidirectional driving | |
| CN113258825B (en) | Piezoelectric driver control method based on stick-slip and impact principle coupling | |
| CN108111052A (en) | Couple the bionical piezoelectricity locating platform and control method with parasitic motion principle of looper | |
| CN110798094B (en) | Piezoelectric linear precision driving device based on parasitic inertia principle | |
| CN210490748U (en) | A Piezoelectric Stick-Slip Actuator Based on L-shaped Flexible Hinges | |
| CN110752771A (en) | A novel high-efficiency piezoelectric rotary precision drive platform based on the principle of parasitic inertia | |
| CN110912444B (en) | A bionic crawling piezoelectric driver | |
| CN110768571B (en) | Bionic creeping type piezoelectric precision driving device based on parasitic inertia principle | |
| CN112865593A (en) | Bionic impact piezoelectric driver with high output performance and control method thereof | |
| CN209313746U (en) | An Alternating Step Piezoelectric Stick-Slip Actuator with Anisotropic Friction Surface | |
| CN110855179B (en) | Creeping type piezoelectric precision driving device | |
| CN209389958U (en) | Device for Active Suppression of Parasitic Motion Principle Piezoelectric Actuator Retraction Motion | |
| CN2365816Y (en) | Creeping piezoelectric/electrostrictive micro-feeding positioning apparatus | |
| CN111193435A (en) | a rotary actuator | |
| CN109951101B (en) | Piezoelectric-driven ultra-precise four-degree-of-freedom positioning and posture adjusting mechanism and excitation method thereof | |
| CN110855181A (en) | A Rotary Piezoelectric Drive Device Based on Asymmetric Triangular Hinged Mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |