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CN109518184B - Hf-BHfN-BHfNC composite coating cutter and preparation method thereof - Google Patents

Hf-BHfN-BHfNC composite coating cutter and preparation method thereof Download PDF

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CN109518184B
CN109518184B CN201811406259.0A CN201811406259A CN109518184B CN 109518184 B CN109518184 B CN 109518184B CN 201811406259 A CN201811406259 A CN 201811406259A CN 109518184 B CN109518184 B CN 109518184B
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coating
bhfn
bhfnc
cutter
transition layer
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CN109518184A (en
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吴泽
赵国龙
邢佑强
黄鹏
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Southeast University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635Carbides
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/54Electroplating: Baths therefor from solutions of metals not provided for in groups C25D3/04 - C25D3/50

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Abstract

The invention belongs to the technical field of cutter coating materials, and relates to a Hf-BHfN-BHfNC composite coating cutter and a preparation method thereof. The base material of the cutter is a high-speed steel material, and the coating comprises a Hf transition layer, a BHfN hard coating and a BHfNC hard coating from inside to outside in sequence. The Hf transition layer of the coated cutter is prepared by electroplating and heat treatment processes, and the BHfN layer and the BHfNC layer are both prepared by a reactive magnetron sputtering method. The transition layer material of the coated cutter and the base material of the cutter are deeply diffused, the coating and the base have higher bonding strength, and the surface coating has high hardness and good wear resistance. The cutter can be widely applied to cutting processing of low-hardness metal materials, and the service life and the cutting processing efficiency of the cutter are improved.

Description

一种Hf-BHfN-BHfNC复合涂层刀具及其制备方法A kind of Hf-BHfN-BHfNC composite coating tool and preparation method thereof

技术领域technical field

本发明涉及一种Hf-BHfN-BHfNC复合涂层刀具及其制备方法,属于刀具涂层材料技术领域。The invention relates to an Hf-BHfN-BHfNC composite coating tool and a preparation method thereof, belonging to the technical field of tool coating materials.

背景技术Background technique

机械制造业为整个国民经济提供技术装备,是国民经济和社会发展以及国防建设的物质基础,其发展水平是国家综合实力的重要标志。切削加工技术是机械制造业中应用最广泛的基础技术,而切削刀具技术的进步则是切削加工技术快速发展的关键。近年来,为满足干切削、高速切削等对切削刀具提出的新的要求,金属切削工具行业在不断尝试开发新型耐磨刀具材料、刀具涂层以及开展刀具几何结构的优化设计,这些方法均在一定程度上解决了限制切削技术发展的瓶颈问题。在这些方法中,其中以涂层的适用性最为广泛,但涂层与基体材料之间的结合问题成为了制约其性能发挥的一大因素,尤其是涂层与刀具基体结合部分的过渡层的结合性能至关重要。为此,开发新型的高结合强度的涂层刀具对促进涂层刀具应用范围的扩大以及切削加工技术的进步将具有重要意义。The machinery manufacturing industry provides technical equipment for the entire national economy and is the material basis for national economic and social development and national defense construction. Its development level is an important symbol of the country's comprehensive strength. Cutting technology is the most widely used basic technology in the machinery manufacturing industry, and the advancement of cutting tool technology is the key to the rapid development of cutting technology. In recent years, in order to meet the new requirements for cutting tools such as dry cutting and high-speed cutting, the metal cutting tool industry is constantly trying to develop new wear-resistant tool materials, tool coatings and optimize the design of tool geometry. To a certain extent, it solves the bottleneck problem that restricts the development of cutting technology. Among these methods, the coating has the most extensive applicability, but the bonding problem between the coating and the base material has become a major factor restricting its performance, especially the transition layer of the bonding part of the coating and the tool base. Bonding performance is critical. To this end, the development of a new type of coated tool with high bonding strength will be of great significance to promote the expansion of the application range of coated tools and the advancement of cutting technology.

中国专利“申请号:201710532821.3”报道了AlNbCN多元梯度复合涂层刀具及其制备方法,该发明通过采用中频磁控溅射和多弧镀的复合方法在刀具基体表面依次沉积Ti过渡层、AlNbC过渡层、含氮量梯度渐变的AlNbCN涂层,该刀具具备较高的硬度和强度。中国专利“申请号:201710532803.5”报道了SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺,该发明通过非平衡磁控溅射和电弧离子镀的方法在刀具基体表面交替沉积所述两种复合涂层,该刀具具备良好的物理机械性能,可应用于多种金属材料的精加工和半精加工。The Chinese patent "Application No.: 201710532821.3" reports an AlNbCN multi-gradient composite coating tool and its preparation method. The invention uses a composite method of intermediate frequency magnetron sputtering and multi-arc plating to sequentially deposit a Ti transition layer and an AlNbC transition layer on the surface of the tool substrate. Layer, nitrogen content gradient AlNbCN coating, the tool has high hardness and strength. Chinese patent "Application No.: 201710532803.5" reports a SiNbC/SiNbCN laminated composite coating tool and its preparation process. The invention uses the methods of non-equilibrium magnetron sputtering and arc ion plating to alternately deposit the two composite coatings on the surface of the tool substrate. Coating, the tool has good physical and mechanical properties and can be used for finishing and semi-finishing of various metal materials.

发明内容SUMMARY OF THE INVENTION

发明目的:本发明的目的在于克服现有技术的不足,提供一种Hf-BHfN-BHfNC复合涂层刀具及其制备方法,进一步提高涂层膜基结合强度和镀膜的物理机械性能。Purpose of the invention: The purpose of the present invention is to overcome the deficiencies of the prior art, provide a Hf-BHfN-BHfNC composite coating tool and its preparation method, and further improve the bonding strength of the coating film base and the physical and mechanical properties of the coating.

技术方案:本发明的一种Hf-BHfN-BHfNC复合涂层刀具,刀具基体材料为高速钢材料,刀具涂层由内至外依次为Hf过渡层、BHfN硬涂层、BHfNC硬涂层。Technical scheme: In the Hf-BHfN-BHfNC composite coating tool of the present invention, the tool base material is high-speed steel material, and the tool coating is Hf transition layer, BHfN hard coating and BHfNC hard coating from inside to outside.

本发明的一种Hf-BHfN-BHfNC复合涂层刀具的制备方法如下:首先使用HfCl4电解液在高速钢刀具基体表面电镀沉积Hf过渡层,电解液浓度为5~10wt.%,阳极为金属铪材,电镀沉积过渡层厚度为0.2~0.5μm,将电镀沉积过渡层后的刀具放入真空加热炉中加热至300~500℃保温,促进铪元素与刀具基体材料的扩散,形成高结合强度的过渡层;采用磁控溅射的方法在过渡层表面沉积BHfN涂层,选用高纯度单质硼、单质铪作为射频靶材,通氮气和氩气的混合气体,氮气与氩气的质量分数占比为1:5,沉积气压0.6-1.0Pa,沉积BHfN涂层厚度达0.5~0.8μm;采用磁控溅射的方法在BHfN层表面沉积BHfNC涂层,选用碳化硼、单质铪作为射频靶材,通氮气和氩气的混合气体,沉积温度为350~450℃,沉积BHfNC涂层厚度达0.5~1.0μm。The preparation method of a Hf-BHfN-BHfNC composite coating tool of the present invention is as follows: first, an Hf transition layer is electroplated on the surface of a high - speed steel tool substrate by using an HfCl4 electrolyte, the electrolyte concentration is 5-10 wt.%, and the anode is a metal For hafnium material, the thickness of the electroplated transition layer is 0.2~0.5μm. Put the tool after electroplating transition layer into a vacuum heating furnace and heat it to 300~500℃ to keep warm to promote the diffusion of hafnium element and the base material of the tool to form high bonding strength The transition layer; the BHfN coating is deposited on the surface of the transition layer by magnetron sputtering, high-purity elemental boron and elemental hafnium are selected as RF targets, and a mixed gas of nitrogen and argon is passed through. The mass fraction of nitrogen and argon accounts for The ratio is 1:5, the deposition pressure is 0.6-1.0Pa, and the thickness of the deposited BHfN coating is 0.5-0.8 μm; the BHfNC coating is deposited on the surface of the BHfN layer by magnetron sputtering, and boron carbide and elemental hafnium are used as radio frequency targets. , a mixed gas of nitrogen and argon is passed through, the deposition temperature is 350-450° C., and the thickness of the deposited BHfNC coating reaches 0.5-1.0 μm.

有益效果:本发明通过结合电镀与磁控溅射的综合工艺方法在高速钢刀具表面沉积一种新型的Hf-BHfN-BHfNC复合涂层。相比现有的常规氮化钛基涂层,本发明的新型复合涂层具有更高的硬度,且金属铪作为过渡层相比传统的钛过渡层更为致密;相比现有的单一PVD镀膜方法,本发明的电镀结合热处理的过渡层制备工艺将有效促进过渡层元素与基体材料的扩散,显著增强涂层与基体的结合强度。本发明的一种Hf-BHfN-BHfNC复合涂层刀具可广泛应用于低硬度金属材料的切削加工,提高刀具使用寿命和切削加工效率。Beneficial effects: the present invention deposits a new type of Hf-BHfN-BHfNC composite coating on the surface of a high-speed steel tool by combining electroplating and magnetron sputtering. Compared with the existing conventional titanium nitride-based coating, the novel composite coating of the present invention has higher hardness, and the metal hafnium as a transition layer is denser than the traditional titanium transition layer; compared with the existing single PVD The coating method and the preparation process of the transition layer by electroplating combined with heat treatment of the present invention will effectively promote the diffusion of the transition layer elements and the matrix material, and significantly enhance the bonding strength of the coating and the matrix. The Hf-BHfN-BHfNC composite coating tool of the present invention can be widely used in the cutting of low-hardness metal materials, thereby improving the service life of the tool and the cutting efficiency.

附图说明Description of drawings

图1为本发明的Hf-BHfN-BHfNC复合涂层刀具的涂层结构示意图,其中:沿刀具基体向外,依次为Hf过渡层、BHfN层、BHfNC层。1 is a schematic view of the coating structure of the Hf-BHfN-BHfNC composite coating tool of the present invention, wherein: along the tool base outward, there are Hf transition layer, BHfN layer, and BHfNC layer in sequence.

具体实施方式Detailed ways

下面通过具体实施例对本发明作进一步详述,以下实施例只是描述性的,不是限定性的,不能以此限定本发明的保护范围。The present invention will be further described in detail below through specific examples. The following examples are only descriptive, not restrictive, and cannot limit the protection scope of the present invention.

实施例:Example:

一种Hf-BHfN-BHfNC复合涂层车削刀具,刀具基体材料为高速钢材料,刀具涂层由内至外依次为Hf过渡层、BHfN硬涂层、BHfNC硬涂层。An Hf-BHfN-BHfNC composite coating turning tool, the tool base material is high-speed steel material, and the tool coating is Hf transition layer, BHfN hard coating and BHfNC hard coating sequentially from inside to outside.

本发明的一种Hf-BHfN-BHfNC复合涂层车削刀具的制备方法如下:A preparation method of a Hf-BHfN-BHfNC composite coating turning tool of the present invention is as follows:

(1)前处理:将高速钢车刀的切削工作区域机械抛光处理,放入无水乙醇中超声清洗20min,真空烘干。(1) Pretreatment: mechanically polish the cutting working area of the high-speed steel turning tool, put it into anhydrous ethanol for ultrasonic cleaning for 20 minutes, and vacuum dry it.

(2)使用HfCl4电解液在清洗干燥处理后的高速钢刀具基体表面电镀沉积Hf过渡层,电解液浓度为10wt.%,阳极为金属铪材,电镀沉积过渡层厚度为0.4μm,将电镀沉积过渡层后的刀具放入真空加热炉中加热至500℃保温3h,促进铪元素与高速钢基体材料的扩散,形成高结合强度的Hf过渡层。(2) Hf transition layer was electroplated on the surface of the high-speed steel tool substrate after cleaning and drying by using HfCl4 electrolyte, the electrolyte concentration was 10wt.%, the anode was metal hafnium material, and the thickness of the electroplated transition layer was 0.4 μm. After the transition layer is deposited, the tool is placed in a vacuum heating furnace and heated to 500 °C for 3 hours to promote the diffusion of hafnium element and the high-speed steel matrix material to form a Hf transition layer with high bonding strength.

(3)采用磁控溅射的方法在过渡层表面沉积BHfN涂层,选用高纯度单质硼、单质铪作为射频靶材,通氮气和氩气的混合气体,氮气与氩气的质量分数占比为1:5,沉积气压0.8Pa,沉积BHfN涂层厚度达0.6μm。(3) The BHfN coating is deposited on the surface of the transition layer by magnetron sputtering, high-purity elemental boron and elemental hafnium are selected as radio frequency targets, and a mixture of nitrogen and argon is passed through, and the mass fraction of nitrogen and argon is proportional to is 1:5, the deposition pressure is 0.8Pa, and the thickness of the deposited BHfN coating reaches 0.6μm.

(4)采用磁控溅射的方法在BHfN层表面沉积BHfNC涂层,选用碳化硼、单质铪作为射频靶材,通氮气和氩气的混合气体,沉积温度为400℃,沉积BHfNC涂层厚度达0.8μm,完成本涂层刀具的制备。(4) The BHfNC coating was deposited on the surface of the BHfN layer by the method of magnetron sputtering. Boron carbide and elemental hafnium were used as the radio frequency target, and the mixed gas of nitrogen and argon was passed through, and the deposition temperature was 400 °C to deposit the thickness of the BHfNC coating. Up to 0.8μm, the preparation of the coating tool is completed.

Claims (4)

1.一种Hf-BHfN-BHfNC复合涂层刀具,其特征在于:刀具基体材料为高速钢材料,涂层由内至外依次为Hf过渡层、BHfN硬涂层、BHfNC硬涂层;该复合涂层刀具是通过如下方法制备:采用电镀的方法在高速钢刀具基体表面沉积Hf元素,并热处理促进Hf元素与基体材料的扩散,形成高结合强度的过渡层;采用磁控溅射的方法在过渡层表面分别依次沉积BHfN涂层和BHfNC涂层。1. a Hf-BHfN-BHfNC composite coating cutter, it is characterized in that: cutter matrix material is high-speed steel material, and coating is successively Hf transition layer, BHfN hard coating, BHfNC hard coating from inside to outside; The coated tool is prepared by the following methods: depositing Hf element on the surface of the high-speed steel tool substrate by electroplating, and heat treatment to promote the diffusion of Hf element and the substrate material to form a transition layer with high bonding strength; using magnetron sputtering method in A BHfN coating and a BHfNC coating were deposited on the surface of the transition layer, respectively. 2.根据权利要求1所述的Hf-BHfN-BHfNC复合涂层刀具,其特征在于:过渡层电解沉积使用的电解液为HfCl4电解液,浓度为5~10wt.%,阳极为金属铪材,电镀沉积过渡层厚度为0.2~0.5μm;过渡层热处理在真空加热炉中加热保温实施,加热保持温度在300~500℃。2. Hf-BHfN-BHfNC composite coating tool according to claim 1, is characterized in that: the electrolyte that transition layer electrolytic deposition uses is HfCl4 electrolyte, the concentration is 5 ~10wt.%, and the anode is metal hafnium material , the thickness of the electroplated transition layer is 0.2-0.5 μm; the heat treatment of the transition layer is carried out in a vacuum heating furnace by heating and maintaining, and the heating and maintaining temperature is 300-500 °C. 3.根据权利要求1所述的Hf-BHfN-BHfNC复合涂层刀具,其特征在于:BHfN涂层的制备选用高纯度单质硼、单质铪作为射频靶材,通氮气和氩气的混合气体,氮气与氩气的质量分数占比为1:5,沉积气压0.6-1.0Pa,沉积BHfN涂层厚度达0.5~0.8μm。3. Hf-BHfN-BHfNC composite coating cutter according to claim 1, is characterized in that: the preparation of BHfN coating selects high-purity elemental boron, elemental hafnium as radio frequency target material, and the mixed gas of logical nitrogen and argon, The mass fraction ratio of nitrogen and argon is 1:5, the deposition pressure is 0.6-1.0Pa, and the thickness of the deposited BHfN coating is 0.5-0.8μm. 4.根据权利要求1所述的Hf-BHfN-BHfNC复合涂层刀具,其特征在于:BHfNC涂层的制备选用碳化硼、单质铪作为射频靶材,通氮气和氩气的混合气体,沉积温度为350~450℃,沉积BHfNC涂层厚度达0.5~1.0μm。4. Hf-BHfN-BHfNC composite coating cutter according to claim 1, it is characterized in that: the preparation of BHfNC coating selects boron carbide, elemental hafnium as radio frequency target material for use, the mixed gas of logical nitrogen and argon, deposition temperature When the temperature is 350-450 °C, the thickness of the deposited BHfNC coating reaches 0.5-1.0 μm.
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