CN109429419A - A kind of novel medium barrier plasma generating device - Google Patents
A kind of novel medium barrier plasma generating device Download PDFInfo
- Publication number
- CN109429419A CN109429419A CN201710747289.7A CN201710747289A CN109429419A CN 109429419 A CN109429419 A CN 109429419A CN 201710747289 A CN201710747289 A CN 201710747289A CN 109429419 A CN109429419 A CN 109429419A
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- plasma
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- plate
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- 230000004888 barrier function Effects 0.000 title claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims abstract description 4
- 239000011248 coating agent Substances 0.000 claims abstract description 3
- 239000011888 foil Substances 0.000 claims abstract description 3
- 239000000203 mixture Substances 0.000 claims abstract 3
- 210000002381 plasma Anatomy 0.000 claims description 56
- 230000001012 protector Effects 0.000 claims description 6
- 206010037660 Pyrexia Diseases 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 claims description 3
- 230000006378 damage Effects 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 230000002146 bilateral effect Effects 0.000 claims 1
- 230000005611 electricity Effects 0.000 abstract description 8
- 238000010276 construction Methods 0.000 abstract 1
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000700605 Viruses Species 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The present invention provides a kind of novel medium barrier plasma generating devices, mould group is occurred by plasma, the three parts composition such as power module and protection circuit, using ceramics or glass as block media, the slab construction of hollow plate containing multiple aligned apertures can be used as gas passage, it is pasted with metal foil in the plane of plate or brushes conductive coating as electrode, muti-piece plate is pasted together in order just constitutes plasma generation mould group, after the high-voltage electricity or high-frequency current that power module generates access electrode by protection circuit, plasma will be eliminated in the aligned apertures in plate, when gas stream of pollution flows through gas passage, it will be purified by plasma.When protection circuit can prevent single flat plate from damaging, there is the case where overcurrent is burnt.
Description
Technical field
The present invention relates to the technical fields that medium barrier plasma occurs, after gas-liquid-solid three-state, plasma
It is known as the 4th state of substance, plasma has the electronics and charged particle of high activity, has very strong chemical reaction
Property.Plasma can mainly be generated by the methods of high voltagehigh frequency electric field, light, high temperature and high-energy ray.High voltagehigh frequency electricity
Field action is on medium, and low temperature plasma can be generated under atmospheric pressure by forming dielectric barrier discharge, these low-temperature plasmas
Body can be used to volatile organic compounds, vehicle exhaust and killing bacterium in purification air.
Background technique
In recent years, with the quickening of China's process of industrialization, the pollution conditions such as bring air, water body are increasingly tight therewith
Weight, plasma due to can produce ion live-wire particle and electronics with high activity, can efficiently with air, water body
In pollutant react, eliminate pollution, therefore, plasma-generating technologies are more and more widely paid attention to.
Dielectric barrier discharge (referred to as DBD) is usually operated under atmospheric pressure, be it is a kind of be convenient for people to use it is equal from
Daughter occurring mode, at least one electrode by dielectric overlay, this medium is referred to as block media in bipolar electrode, stops to be situated between
Gas between matter and another electrode ionizes under high voltage electric field effect, forms low temperature plasma, a large amount of generationizations
Active particle required for reacting is learned, the physical processes such as special light, heat, sound, electricity and chemical process, therefore medium are also accompanied by
Barrier discharge has very big application potential in field of environment engineering and disinfection and sterilization field, causes extensive attention.
Existing its electrode of medium barrier plasma generating device is mostly " line-tubular type " and " needle-is board-like "." line-pipe
Formula " mostly uses quartz glass tube or ceramic tube as block media, is equipped with electrode bar in tube center, is enclosed with electricity in pipe outer wall
Pole after adding high frequency, high-voltage electricity to two electrodes, a large amount of filament shape micro discharges will occur in tube wall, the air in pipe is electric
From formation plasma." needle-is board-like " mostly uses metal needle and metal plate as electrode, be covered on a metal plate glass or
Ceramics are used as block media, and after adding high frequency, high-voltage electricity to two electrodes, interelectrode air is ionized, and form plasma.
" line-tubular type " is used for purification gas more, and " needle-is board-like " is chiefly used in handling solid and kills bacterial virus." line-tubular type " exists
It is fixed difficult, height, and the contact area ratio of gas and tube wall action of plasma region are required to central electrode installation accuracy
Smaller, purification efficiency is relatively low.Plasma generation is very high to pipe evenness of wall thickness, integrity demands, once there is thin and thick
It is uneven or cracked, short circuit will occur in fault location, form arc discharge, gently can not then generate plasma, it is heavy then burn
Destroying device.
Summary of the invention
The invention solves existing dielectric barrier discharge plasma generating devices, provide one kind
Novel medium barrier discharge plasma generating device, present invention reduces the requirement to electrode installation accuracy, gas flow is set
Count relatively easy, gas and the contact area in action of plasma region are bigger, prevent short circuit using protection circuit
And arc discharge, modular structure reduce the complexity of gas flow, improve the applicable model of plasma producing apparatus
It encloses.
To achieve the above object, the invention adopts the following technical scheme.The electrode of the present apparatus uses " board-to-board formula " electrode
Structure, two electrodes are tabular, and block media is using glass (containing quartz glass) or ceramic material, and glass is (containing quartzy glass
Glass) or ceramic material by squeeze or moulding by casting, become the plate 2 of hollow plate structure, have marshalling in plate 2
Through-hole, as gas passage 3, the shape of these through-holes can be rectangular, round, triangle or polygon, 2 upper and lower surface of plate
For smooth plane, it can be used for pasting sheet metal foil or the coating conductive coatings such as metal-containing powders or graphite form conductive strips 1,
These conductive strips 1 can be used as electrode.Conductive strips 1 are pasted or be coated with to every piece of plate 2 at least as electrode in a plane,
One face electrode of every piece of plate 2 connects the high-voltage end of power module 6, and the another side electrode of every piece of plate connects the low pressure of power module 6
End, one piece of plate 2 containing conductive strips 1 (electrode) can become plasma and module 101 occur, and multiple plasmas occur
Module 101 is arranged successively superposition, so that it may constitute plasma and mould group 102 occurs, connecing between module 101 occurs for plasma
Seam is closed using sealed insulation glue 4, and the conductive strips 1 for preventing plasma from occurring in module 101 are oxidized destruction, and can
To prevent high-voltage electricity from leaking electricity.
Plasma producing apparatus includes that mould group 102, protection circuit 7 and power module 6 etc., ion occur for plasma
Body occur module 101 conductive strips 1 according to spacing order by protect circuit 7 be connected respectively to power module 6 high-voltage end and
Low-pressure end.Protection circuit 7 is to be equipped with overcurrent protector 5 in circuit, and overcurrent protector 5 is by thermistor or bimetal leaf system
At, when some plasma occur module 101 there is discharge breakdown when, pass through this plasma occur module 101 electric current
It will sharply become larger, can also be become larger therewith by the electric current of its circuit branch accordingly, to cause thermistor or bimetallic
The fever of piece protector, and automatically cuts off the power supply of this module, it is this can be designed so that individual module breaks down after, not shadow
Other modules are rung to work on.Due to the dielectric-slab using the hollow plate structure for including aligned apertures, sent out in plasma
Gas passage 3 is formed in raw mould group 102, gas processed is can be convenient and flows through, after the energization of mould group 102 occurs for plasma, i.e.,
Dielectric barrier discharge phenomenon can be formed on plate 2, a large amount of high activity particle is generated in the gas flowed through, thus realization pair
The purification of gas or other reactions.
Detailed description of the invention
Fig. 1 is that module map occurs for plasma.
Fig. 2 is that mould group picture occurs for plasma.
Fig. 3 is plasma producing apparatus figure.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, right below in conjunction with drawings and examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, not
For limiting the present invention.
Specific embodiment 1 illustrates the present embodiment in conjunction with Fig. 1, Fig. 2 and Fig. 3, and block media uses ceramic material, pottery
Ceramic material becomes the plate 2 of hollow plate structure, there is the perforation square hole of marshalling in plate 2 by extrusion forming, as
Gas passage 3,2 upper and lower surface of plate are smooth plane, paste stainless steel metal piece and form conductive strips 1, these conductive strips 1 are
It can be used as electrode, the plate for being attached to electrode just constitutes plasma and module 101 occurs, and module occurs for multiple plasmas
101 are sequentially overlapped, so that it may constitute plasma and mould group 102 occurs, the seam between plasma generation module 101 uses close
Envelope insulating cement 4 is closed, and the conductive strips 1 for preventing plasma from occurring in module 101 are oxidized destruction, and can prevent height
Piezoelectricity electric leakage.
Plasma producing apparatus includes that mould group 102, protection circuit 7 and power supply 6 etc., gas ions hair occur for plasma
The conductive strips 1 of raw module 101 are according to spacing order by protecting circuit 7 to be connected respectively to the high-voltage end and low-pressure end of power supply 6.It protects
Protection circuit 7 is to be equipped with thermistor in circuit as overcurrent protector 5, is put when module 101 occurs for some plasma
It when electrical breakdown, will sharply be become larger by the electric current that module 101 occurs for this plasma, circuit is protected by it accordingly
Branch current can also become larger therewith, to cause thermistor fever, and automatically cut off the power supply of this module, this design can
So that not influencing other modules after individual module breaks down and working on.
Claims (5)
1. a kind of novel medium barrier plasma generating device, it is characterised in that: the device includes: mould group occurs for plasma
102, by protection circuit 7 and plasma mould group occurs for the three parts composition such as power module 6 and protection circuit 7, power module 6
102 are connected, and mould group 102 occurs for plasma under the action of the high pressure or high-frequency current that power module 6 issues, and generate plasma
Body.
2. mould group 102 occurs for the plasma described in, it is characterised in that: mould group 102 occurs for plasma by several plasmas
The superposition bonding composition of module 101 occurs for body, each plasma occur the seam between module 101 using sealed insulation glue 4 into
Row closing prevents plasma from the conductive strips 1 in module 101 occur and is oxidized destruction and electric leakage, and module 101 occurs for plasma
Conductive strips 1 according to spacing order by protecting circuit 7 to be connected respectively to the high-voltage end and low-pressure end of power module 6.
3. module 101 occurs for the plasma described in, it is characterised in that: uses ceramics, quartz glass or heat resistant glass as it
Block media, structure are that the side of plate 2 or bilateral are provided with conduction with plate 2 of the aligned apertures as gas passage 3
After conductive strips 1 connect high pressure or high-frequency current, there is dielectric barrier discharge phenomenon in gas passage 3, forms plasma in band 1
Body can be such that the gas for flowing through gas passage is purified.
Conductive strips 1 described in 4., it is characterised in that: pasted using metal foil or conductive coating or brush plate upper face or
After lower face, conductive strips 1 are just constituted.
Protection circuit 7 described in 5., it is characterised in that: be equipped with overcurrent protector 5 in circuit, overcurrent protector is thermistor
Or bimetal leaf, when discharge breakdown occurs in some plasma generation module 101, flowing through electric current can be excessive, causes on its route
Thermistor or bimetal leaf fever, the automatic power supply for reducing electric current or automatically cutting off this module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710747289.7A CN109429419A (en) | 2017-08-19 | 2017-08-19 | A kind of novel medium barrier plasma generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710747289.7A CN109429419A (en) | 2017-08-19 | 2017-08-19 | A kind of novel medium barrier plasma generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109429419A true CN109429419A (en) | 2019-03-05 |
Family
ID=65501798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710747289.7A Pending CN109429419A (en) | 2017-08-19 | 2017-08-19 | A kind of novel medium barrier plasma generating device |
Country Status (1)
| Country | Link |
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| CN (1) | CN109429419A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110433748A (en) * | 2019-08-24 | 2019-11-12 | 广东省水源美农业科技有限公司 | Reaction of low temperature plasma device |
| CN111494774A (en) * | 2020-04-14 | 2020-08-07 | 西安交通大学 | Plasma active gas humidifier |
| CN111935895A (en) * | 2020-07-17 | 2020-11-13 | 中国人民解放军空军工程大学 | Surface anti-arcing plasma generating device and generating method |
| CN112165758A (en) * | 2020-11-06 | 2021-01-01 | 河南先途等离子体科技有限公司 | Ceramic tube and preparation method thereof |
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|---|---|---|---|---|
| CN2104211U (en) * | 1991-11-07 | 1992-05-13 | 李教友 | Ozone generator with liquid medium |
| US20040208804A1 (en) * | 2001-08-25 | 2004-10-21 | Hall Stephen Ivor | Non-thermal plasma reactor |
| WO2004107394A2 (en) * | 2003-05-27 | 2004-12-09 | Matsushita Electric Works, Ltd. | Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method |
| CN1726078A (en) * | 2002-12-13 | 2006-01-25 | 蓝星株式会社 | Plasma reactor and electrode plate used in the same |
| US20060152163A1 (en) * | 2003-06-20 | 2006-07-13 | Ngk Insulators, Ltd. | Plasma generating electrode, plasma generation device, and exhaust gas purifying apparatus |
| CN101931207A (en) * | 2010-09-06 | 2010-12-29 | 深圳市万瑞和电子有限公司 | Restorable overcurrent protector and electronic product |
| CN201868168U (en) * | 2010-10-27 | 2011-06-15 | 兴勤（常州）电子有限公司 | Thermal resistor with positive temperature coefficient used for overcurrent protection |
| CN202538018U (en) * | 2012-03-24 | 2012-11-21 | 福州顺康环保科技开发有限公司 | Novel atmosphere plasma discharge device |
| CN105762762A (en) * | 2016-05-13 | 2016-07-13 | 深圳市槟城电子有限公司 | Circuit protection device |
| CN205730885U (en) * | 2016-06-28 | 2016-11-30 | 江苏莱仕达环保成套设备有限公司 | A kind of plasma foul waste gas cleaning equipment |
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2017
- 2017-08-19 CN CN201710747289.7A patent/CN109429419A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2104211U (en) * | 1991-11-07 | 1992-05-13 | 李教友 | Ozone generator with liquid medium |
| US20040208804A1 (en) * | 2001-08-25 | 2004-10-21 | Hall Stephen Ivor | Non-thermal plasma reactor |
| CN1726078A (en) * | 2002-12-13 | 2006-01-25 | 蓝星株式会社 | Plasma reactor and electrode plate used in the same |
| WO2004107394A2 (en) * | 2003-05-27 | 2004-12-09 | Matsushita Electric Works, Ltd. | Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method |
| US20060152163A1 (en) * | 2003-06-20 | 2006-07-13 | Ngk Insulators, Ltd. | Plasma generating electrode, plasma generation device, and exhaust gas purifying apparatus |
| CN101931207A (en) * | 2010-09-06 | 2010-12-29 | 深圳市万瑞和电子有限公司 | Restorable overcurrent protector and electronic product |
| CN201868168U (en) * | 2010-10-27 | 2011-06-15 | 兴勤（常州）电子有限公司 | Thermal resistor with positive temperature coefficient used for overcurrent protection |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110433748A (en) * | 2019-08-24 | 2019-11-12 | 广东省水源美农业科技有限公司 | Reaction of low temperature plasma device |
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| CN111494774A (en) * | 2020-04-14 | 2020-08-07 | 西安交通大学 | Plasma active gas humidifier |
| CN111935895A (en) * | 2020-07-17 | 2020-11-13 | 中国人民解放军空军工程大学 | Surface anti-arcing plasma generating device and generating method |
| CN112165758A (en) * | 2020-11-06 | 2021-01-01 | 河南先途等离子体科技有限公司 | Ceramic tube and preparation method thereof |
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Application publication date: 20190305 |