CN105491775B - A kind of raising arc plasma generator operation stability and the method and apparatus in life-span - Google Patents
A kind of raising arc plasma generator operation stability and the method and apparatus in life-span Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
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- H05H1/26—Plasma torches
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Abstract
本发明涉及一种提高电弧等离子体发生器运行稳定性和寿命的方法和装置，该电弧等离子体发生器装置主要包括阴极、阳极、绝缘件和外套管。通过对电弧等离子体发生器电极表面进行特殊的镀膜处理，在电极表面制备高反应活性材料分散嵌入的复合材料涂层，促成电弧弧根的扩散型贴附，从而降低电弧等离子体发生器的电极烧蚀，提高运行稳定性和寿命。
The invention relates to a method and a device for improving the operation stability and service life of an arc plasma generator. The arc plasma generator device mainly includes a cathode, an anode, an insulating part and an outer casing. Through the special coating treatment on the electrode surface of the arc plasma generator, a composite material coating with highly reactive materials dispersed and embedded is prepared on the electrode surface, which promotes the diffusion type attachment of the arc root, thereby reducing the electrode of the arc plasma generator. Ablation, improving operational stability and longevity.
Description
技术领域technical field
本发明涉及一种提高电弧等离子体发生器运行稳定性和寿命的方法和装置。The invention relates to a method and a device for improving the operation stability and service life of an arc plasma generator.
背景技术Background technique
直流非转移式电弧等离子体发生器在工业制造、科学探索、环境保护、医疗卫生、国防安全等广阔的领域已有数十年的应用和研究历史。发生器的形式更是多种多样，从常用的最简单的仅有柱状阴极和管状阳极的结构、管弧、叠片式，到种类繁多的特殊结构。无论何种结构和用途以及功率等级的非转移式电弧，共同的特点是以气体放电电弧为电流通道连接阴极和阳极。在流动的氩、氮、氢、空气等气体或混合气中，在阴极和阳极之间产生放电电弧和加热工作气体，形成数千以至上万度的热等离子体射流。DC non-transferred arc plasma generators have decades of application and research history in a wide range of fields such as industrial manufacturing, scientific exploration, environmental protection, medical care, and national defense. There are various forms of generators, from the most commonly used structure with only cylindrical cathode and tubular anode, tube arc, laminated type, to a wide variety of special structures. Regardless of the structure, use and power level of the non-transferred arc, the common feature is that the gas discharge arc is used as the current channel to connect the cathode and the anode. In the flowing argon, nitrogen, hydrogen, air and other gases or mixed gases, a discharge arc is generated between the cathode and the anode and the working gas is heated to form a hot plasma jet of thousands or even tens of thousands of degrees.
电弧在电极表面贴附区的电流密度可能超过108A/m2，电极烧蚀引起的发生器寿命问题，一直是影响这类发生器高效使用、降低维护成本和技术要求、推向更广的长时间连续运行应用的瓶颈因素。同时，电极烧蚀产物的污染也限制了这类等离子体在精细组分材料的合成、风洞实验中材料热特性准确评估等领域的应用。因此，数十年来，各种减少电极烧蚀以提高等离子体发生器寿命的尝试从未间断。The current density of the arc in the electrode surface attachment area may exceed 10 8 A/m 2 , and the life of the generator caused by electrode ablation has always affected the efficient use of this type of generator, reducing maintenance costs and technical requirements, and promoting it to a wider range. The bottleneck factor of long-term continuous running applications. At the same time, the contamination of electrode ablation products also limits the application of this type of plasma in the synthesis of fine component materials and the accurate evaluation of material thermal properties in wind tunnel experiments. Therefore, various attempts to reduce electrode ablation to improve plasma generator lifetime have been carried out for decades.
工业应用上高效连续运转的大功率电弧等离子体发生器更需要高寿命低烧蚀的发生器。目前，在发生器在阴极和阳极之间夹入较长的中间段，拉大阴极与阳极之间的距离以提高电弧电压，使得在相同的电弧功率条件下降低电弧电流，以减少电极烧蚀。或同时采用多对电极组来分散电弧在电极表面的贴附，以降低贴附弧根的局域电流密度，减缓电极的局域恶性烧蚀。只是这种结构的热等离子体发生器结构复杂，维护耗费大，电源需要高电压设计。High-efficiency and continuous operation of high-power arc plasma generators in industrial applications requires generators with long life and low ablation. At present, a longer intermediate section is inserted between the cathode and the anode in the generator, and the distance between the cathode and the anode is increased to increase the arc voltage, so that the arc current can be reduced under the same arc power condition to reduce electrode ablation . Or use multiple pairs of electrode groups at the same time to disperse the attachment of the arc on the electrode surface, so as to reduce the local current density of the attached arc root and slow down the local malignant ablation of the electrode. It’s just that the structure of the thermal plasma generator with this structure is complicated, the maintenance cost is large, and the power supply needs a high-voltage design.
发明内容Contents of the invention
本发明的目的在于：针对直流非转移式电弧等离子体发生器阳极烧蚀问题，提出一种可减少电极烧蚀、提高电弧等离子体发生器运行稳定性和寿命的方法和装置。The purpose of the present invention is to propose a method and device for reducing electrode ablation and improving the operation stability and life of the arc plasma generator for the anode ablation problem of the DC non-transferred arc plasma generator.
本发明提供一种降低电弧等离子体发生器电极烧蚀的方法，包括如下步骤：The invention provides a method for reducing electrode ablation of an arc plasma generator, comprising the following steps:
第一步，对电弧等离子体发生器的阳极进行表面镀膜处理，用于影响电弧贴附于电极表面的贴附反应能或分散微化贴附点，从而降低电极烧蚀；The first step is to carry out surface coating treatment on the anode of the arc plasma generator, which is used to affect the attachment reaction energy of the arc attached to the electrode surface or disperse the miniaturized attachment points, thereby reducing electrode ablation;
第二步，外电压激发阴极和阳极间产生电弧，所述电弧沿阴极到阳极方向传输；In the second step, the external voltage excites an arc between the cathode and the anode, and the arc is transmitted along the direction from the cathode to the anode;
第三步，所述电弧贴附进行过表面处理的阳极，电弧对阳极烧蚀减弱。In the third step, the arc is attached to the surface-treated anode, and the anode is weakened by the arc.
优选地，表面镀膜处理采用离子镀、磁控对靶溅射或热喷涂的方法。Preferably, the surface coating treatment adopts ion plating, magnetron target sputtering or thermal spraying.
优选地，所述表面镀膜处理为在阳极表面制备高反应活性材料分散嵌入的复合材料涂层。Preferably, the surface coating treatment is to prepare a composite material coating in which highly reactive materials are dispersed and embedded on the surface of the anode.
优选地，所述复合材料涂层为含铝、钛、锆、镁膜及其氧化物混合膜、多层多混合结构复合膜或过渡结构膜。Preferably, the composite material coating is a film containing aluminum, titanium, zirconium, magnesium and oxide mixed films, a multi-layer multi-mixed structure composite film or a transition structure film.
优选地，所述复合材料涂层为电导体，使在涂层内形成由自由表面连接电极基体的导电微通道。Preferably, the composite material coating is an electrical conductor, so that conductive microchannels connected to the electrode base by free surfaces are formed in the coating.
根据以上方法，本发明还提出一种提高运行稳定性的电弧等离子体发生器，其特征在于，包括：According to above method, the present invention also proposes a kind of arc plasma generator that improves running stability, it is characterized in that, comprises:
阴极；cathode;
阳极，设置在所述阴极电弧传输方向下游；an anode arranged downstream in the direction of transmission of the cathode arc;
涂层，附着在阳极表面，使阳极具有特定表面结构；Coating, attached to the surface of the anode, makes the anode have a specific surface structure;
绝缘件，所述绝缘件两端分别连接所述阴极和阳极；an insulator, the two ends of the insulator are respectively connected to the cathode and the anode;
外套管，包裹所述绝缘件和所述阳极连接组合体。an outer sleeve wrapping the insulating member and the anode connection assembly.
优选地，还包括：中间段设置在所述阴极和阳极之间。Preferably, it also includes: an intermediate section is arranged between the cathode and the anode.
优选地，所述涂层采用离子镀、磁控对靶溅射或热喷涂的方法附着在所述阳极表面。Preferably, the coating is attached to the surface of the anode by means of ion plating, magnetron target sputtering or thermal spraying.
优选地，所述涂层为高反应活性材料分散嵌入的复合材料涂层。Preferably, the coating is a composite material coating in which highly reactive materials are dispersed and embedded.
优选地，所述复合材料涂层为含铝、钛、锆、镁膜及其氧化物混合膜、多层多混合结构复合膜及过渡结构膜，并为导电体。Preferably, the composite material coating is a film containing aluminum, titanium, zirconium, magnesium and oxide mixed films, a multi-layer multi-mixed structure composite film and a transition structure film, and is an electrical conductor.
本发明的有益效果：Beneficial effects of the present invention:
按照实际应用气体的种类和流量以及工作条件，对发生器电极进行特殊的镀膜处理，提高了电弧等离子体发生器的运行稳定性和寿命。According to the type and flow rate of the actual application gas and the working conditions, the generator electrode is specially coated to improve the operation stability and life of the arc plasma generator.
附图说明Description of drawings
图1为本发明电弧等离子体发生器结构示意图；Fig. 1 is the structural representation of arc plasma generator of the present invention;
图2为图1中A区域放大图。Figure 2 is an enlarged view of area A in Figure 1 .
具体实施方式Detailed ways
本发明的基本思想是电弧等离子体发生器电极表面进行特殊的镀膜处理，在电极表面制备高反应活性材料分散嵌入的复合材料涂层，促成电弧弧根的扩散型贴附，从而降低电弧等离子体发生器的电极烧蚀，提高运行稳定性。The basic idea of the present invention is to carry out special coating treatment on the electrode surface of the arc plasma generator, prepare a composite material coating with highly reactive materials dispersed and embedded on the electrode surface, and promote the diffusion type attachment of the arc root, thereby reducing the arc plasma Electrode ablation of the generator improves operational stability.
图1给出一种降低电极烧蚀的电弧等离子体发生器，阴极1、中间段2、阳极3、绝缘件4和外套管5。中间段2设置在阴极1电弧传输方向下游；阳极3经过表面处理使阳极3具有特定表面结构；绝缘件4两端分别连接中间段2和阳极3；外套管5包裹中间段2、绝缘件4和阳极3连接组合体。此发生器还包括气路8和水冷通路9。气路8为发生器提供工作用气；水冷通路9用于冷却所述所述阳极3、阴极1和中间段2。图中还给出热等离子体射流6和扩散后的电弧弧根7。FIG. 1 shows an arc plasma generator for reducing electrode ablation, a cathode 1 , an intermediate section 2 , an anode 3 , an insulating member 4 and an outer sleeve 5 . The middle section 2 is arranged downstream of the arc transmission direction of the cathode 1; the anode 3 is surface-treated to make the anode 3 have a specific surface structure; the two ends of the insulator 4 are respectively connected to the middle section 2 and the anode 3; the outer sleeve 5 wraps the middle section 2 and the insulator 4 Connect the assembly with the anode 3. The generator also includes a gas path 8 and a water cooling path 9 . The gas path 8 provides working gas for the generator; the water cooling path 9 is used to cool the anode 3 , cathode 1 and middle section 2 . The hot plasma jet 6 and the diffused arc root 7 are also shown in the figure.
如果发生器不包括中间段时，气路8只设置在阴极1和阳极3之间。水冷通路9，用于冷却所述所述阳极3、阴极1。If the generator does not include an intermediate section, the gas path 8 is only provided between the cathode 1 and the anode 3 . The water cooling passage 9 is used for cooling the anode 3 and the cathode 1 .
外电压激发等离子体阴极1和阳极3间产生电弧；电弧从阴极1出发经过中间段2和绝缘件4向阳极3方向移动，最终电弧弧根7贴附阳极3。阳极3经过表面镀膜处理，在电极表面制备高反应活性材料分散嵌入的复合材料涂层31，促成电弧弧根的扩散型贴附，从而降低电弧等离子体发生器的电极烧蚀，提高运行稳定性。The external voltage excites the plasma to generate an arc between the cathode 1 and the anode 3; the arc starts from the cathode 1 and moves towards the anode 3 through the middle section 2 and the insulating member 4, and finally the arc root 7 is attached to the anode 3. The anode 3 has undergone surface coating treatment, and a composite material coating 31 with highly reactive materials dispersed and embedded is prepared on the electrode surface, which promotes the diffuse attachment of the arc root, thereby reducing the electrode ablation of the arc plasma generator and improving the operation stability .
如图2，对阳极做表面镀膜处理后，阳极表面涂层31的细致结构。表面镀膜处理采用离子镀、磁控对靶溅射或热喷涂的方法，在阳极表面制备高反应活性材料分散嵌入的复合材料涂层。复合材料涂层为含铝、钛、锆、镁膜及其氧化物混合膜、多层多混合结构复合膜或过渡结构膜。图2所示的复合材料涂层为电导体，在涂层31内形成由自由表面连接电极基体的导电微通道32。如此涂层31有效降低电弧对阳极3的烧蚀，提高了电弧等离子体发生器的运行稳定性和寿命As shown in FIG. 2 , the detailed structure of the surface coating 31 of the anode after the surface coating treatment is performed on the anode. The surface coating treatment adopts the method of ion plating, magnetron target sputtering or thermal spraying to prepare a composite coating with highly reactive materials dispersed and embedded on the surface of the anode. The composite material coating is a film containing aluminum, titanium, zirconium, magnesium and oxide mixed films, a multi-layer multi-mixed structure composite film or a transitional structure film. The composite material coating shown in FIG. 2 is an electrical conductor, and a conductive microchannel 32 is formed in the coating 31 to connect the electrode matrix with a free surface. In this way, the coating 31 effectively reduces the ablation of the anode 3 by the arc, and improves the operation stability and life of the arc plasma generator
以上所述仅为本发明的优选实施例而已，并不用于限制本发明，对于本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
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