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CN109300928B - Image sensor chip and image sensor device - Google Patents

Image sensor chip and image sensor device Download PDF

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Publication number
CN109300928B
CN109300928B CN201811191864.0A CN201811191864A CN109300928B CN 109300928 B CN109300928 B CN 109300928B CN 201811191864 A CN201811191864 A CN 201811191864A CN 109300928 B CN109300928 B CN 109300928B
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photosensitive
image sensor
sensor chip
electrically connected
unit
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CN109300928A (en
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戚务昌
林永辉
姜利
邓娟
咸杰
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Weihai Hualing Opto Electronics Co Ltd
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Weihai Hualing Opto Electronics Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/701Line sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors

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Abstract

本申请提供了一种图像传感器芯片和图像传感器装置。该图像传感器芯片包括多个光敏单元,多个光敏单元沿第一方向依次排列,且各光敏单元包括多个沿着第二方向依次排列的光敏器件,第一方向与第二方向垂直,第二方向为图像传感器芯片的主扫描方向,各光敏器件具有光敏接收区,任意两个光敏接收区的面积均相同且具有宽度相同的间隔,任意两个光敏单元中的任意两个光敏器件的光敏接收区的中心的连线与第一方向之间具有夹角θ,且0°<θ<180°。该图像传感器使得第二方向上检测点增加,从而提高了图像传感器芯片的分辨率,且该图像传感器芯片中的各光敏器件的光敏接收区的面积没有减小,进一步保证了感度的不下降。

The present application provides an image sensor chip and an image sensor device. The image sensor chip includes a plurality of photosensitive units, which are arranged in sequence along a first direction, and each photosensitive unit includes a plurality of photosensitive devices arranged in sequence along a second direction, the first direction is perpendicular to the second direction, the second direction is the main scanning direction of the image sensor chip, each photosensitive device has a photosensitive receiving area, the areas of any two photosensitive receiving areas are the same and have the same width interval, and the line connecting the centers of the photosensitive receiving areas of any two photosensitive devices in any two photosensitive units has an angle θ with the first direction, and 0°<θ<180°. The image sensor increases the number of detection points in the second direction, thereby improving the resolution of the image sensor chip, and the area of the photosensitive receiving area of each photosensitive device in the image sensor chip is not reduced, further ensuring that the sensitivity does not decrease.

Description

图像传感器芯片和图像传感器装置Image sensor chip and image sensor device

技术领域Technical Field

本申请涉及检测领域,具体而言,涉及一种图像传感器芯片和图像传感器装置。The present application relates to the field of detection, and in particular, to an image sensor chip and an image sensor device.

背景技术Background technique

作为图像读取装置中使用的接触式图像传感器装置一般具有多个线性图像传感器芯片,所述线性图像传感器芯片包括一行多个沿主扫描方向(芯片长度方向)排列的光敏二极管,光敏二极管用于接收外界光进行光电转换,并将光信号转换为电信号。各光敏二极管具有光敏接收区,根据分辨率大小的要求可以将光敏接收区设置成相应的大小。The contact image sensor device used in the image reading device generally has a plurality of linear image sensor chips, which include a row of a plurality of photodiodes arranged along the main scanning direction (the length direction of the chip), and the photodiodes are used to receive external light for photoelectric conversion and convert the light signal into an electrical signal. Each photodiode has a photosensitive receiving area, and the photosensitive receiving area can be set to a corresponding size according to the resolution requirement.

当分辨率提高时,长度相同的线性图像传感器芯片主扫描方向上的光敏二极管数量需要增加,不可避免的要减小光敏二极管光敏接收区的尺寸,在外部光强和光照时间一定的条件下,光敏接收区的减小意味着接收光量减小,产生的电荷减少,即输出电压(感度)也随之减小,难以准确识别图像。When the resolution increases, the number of photodiodes in the main scanning direction of the linear image sensor chip with the same length needs to be increased, and the size of the photosensitive receiving area of the photosensitive diode must inevitably be reduced. Under certain conditions of external light intensity and illumination time, the reduction in the photosensitive receiving area means a decrease in the amount of light received and the charge generated, that is, the output voltage (sensitivity) also decreases, making it difficult to accurately recognize the image.

目前,解决因分辨率提高而导致的感度降低的方法通常有两种,一种是将存储电容容量减小,但是存储电容容量减小后,相同的开关噪音加在容量小的电容上会产生较大的电压变化,导致芯片的抗噪能力减弱;另一种是增加后续放大电路倍数,但是增加后续放大电路倍数后,信号和噪声同时被放大,特别是不接收光时的暗输出偏差会增加,使得芯片暗输出特性变差。At present, there are usually two ways to solve the problem of reduced sensitivity caused by increased resolution. One is to reduce the capacity of the storage capacitor. However, after the storage capacitor capacity is reduced, the same switching noise added to the capacitor with small capacity will produce a large voltage change, resulting in a weakened chip's anti-noise ability. The other is to increase the subsequent amplification circuit multiple, but after increasing the subsequent amplification circuit multiple, the signal and noise are amplified at the same time, especially the dark output deviation when no light is received will increase, making the chip's dark output characteristics worse.

在背景技术部分中公开的以上信息只是用来加强对本文所描述技术的背景技术的理解,因此,背景技术中可能包含某些信息,这些信息对于本领域技术人员来说并未形成在本国已知的现有技术。The above information disclosed in the background technology section is only used to enhance the understanding of the background technology of the technology described in this article. Therefore, the background technology may contain certain information that does not form the prior art known in this country for those skilled in the art.

发明内容Summary of the invention

本申请的主要目的在于提供一种图像传感器芯片和图像传感器装置,以解决现有技术中的图像传感器芯片的分辨率提高时导致的感度下降的问题。The main purpose of the present application is to provide an image sensor chip and an image sensor device to solve the problem of decreased sensitivity caused by increased resolution of image sensor chips in the prior art.

为了实现上述目的,根据本申请的一个方面,提供了一种图像传感器芯片,该图像传感器芯片包括多个光敏单元,多个上述光敏单元沿第一方向依次排列,且各上述光敏单元包括多个沿着第二方向依次排列的光敏器件,上述第一方向与上述第二方向垂直,上述第二方向为上述图像传感器芯片的主扫描方向,各上述光敏器件具有光敏接收区,任意两个上述光敏接收区的面积均相同且具有宽度相同的间隔,任意两个上述光敏单元中的任意两个上述光敏器件的上述光敏接收区的中心的连线与第一方向之间具有夹角θ,且0°<θ<180°。In order to achieve the above-mentioned purpose, according to one aspect of the present application, an image sensor chip is provided, which includes a plurality of photosensitive units, wherein the plurality of photosensitive units are arranged in sequence along a first direction, and each of the photosensitive units includes a plurality of photosensitive devices arranged in sequence along a second direction, the first direction is perpendicular to the second direction, the second direction is the main scanning direction of the image sensor chip, each of the photosensitive devices has a photosensitive receiving area, any two of the photosensitive receiving areas have the same area and have a gap with the same width, and a line connecting the centers of the photosensitive receiving areas of any two of the photosensitive devices in any two of the photosensitive units has an angle θ with the first direction, and 0°<θ<180°.

进一步地,任意两个上述光敏接收区在第一平面上的投影形状均相同,上述第一平面与上述第一方向和上述第二方向分别平行。Furthermore, the projection shapes of any two of the above-mentioned photosensitive receiving areas on the first plane are the same, and the above-mentioned first plane is parallel to the above-mentioned first direction and the above-mentioned second direction respectively.

进一步地,上述光敏接收区在上述第一平面上的投影形状选自圆、正方形、长方形、椭圆与三角形中的任意一种。Furthermore, the projection shape of the photosensitive receiving area on the first plane is selected from any one of a circle, a square, a rectangle, an ellipse and a triangle.

进一步地,各上述光敏接收区在第二方向上的最大长度为L,任意相邻两个上述光敏单元中的上述光敏器件是一一对应的,且一一对应的两个上述光敏器件的上述光敏接收区的中心之间的间距在上述第二方向上的宽度为1/3L~2/3L,优选为1/2L。Furthermore, the maximum length of each of the above-mentioned photosensitive receiving areas in the second direction is L, the above-mentioned photosensitive devices in any two adjacent above-mentioned photosensitive units are one-to-one corresponding, and the distance between the centers of the above-mentioned photosensitive receiving areas of the two one-to-one corresponding photosensitive devices in the above-mentioned second direction is 1/3L to 2/3L, preferably 1/2L.

进一步地,各上述光敏单元中,任意相邻两个上述光敏接收区之间的间隔相同。Furthermore, in each of the above-mentioned photosensitive units, the intervals between any two adjacent photosensitive receiving areas are the same.

进一步地,上述光敏单元有两个。Furthermore, there are two photosensitive units.

进一步地,上述图像传感器芯片还包括:控制单元,用于接收外部时钟信号和起始信号,且用于控制上述图像传感器芯片的工作;存储单元,包括多个存储器,各上述存储器与上述控制单元电连接,且上述存储器和上述光敏器件一一对应电连接,上述存储器用于存储对应的上述光敏器件得到的电压信号;移位单元,与各上述存储器和上述控制单元分别电连接,上述移位单元用于将上述存储器储存的上述电压信号依次输出;放大单元,与上述移位单元和上述控制单元分别电连接,上述放大单元用于将上述移位单元依次输出的上述电压信号进行放大。Furthermore, the above-mentioned image sensor chip also includes: a control unit, which is used to receive an external clock signal and a start signal, and is used to control the operation of the above-mentioned image sensor chip; a storage unit, which includes a plurality of memories, each of which is electrically connected to the above-mentioned control unit, and the above-mentioned memories are electrically connected to the above-mentioned photosensitive devices in a one-to-one correspondence, and the above-mentioned memories are used to store the voltage signals obtained by the corresponding photosensitive devices; a shift unit, which is electrically connected to each of the above-mentioned memories and the above-mentioned control unit respectively, and the above-mentioned shift unit is used to output the above-mentioned voltage signals stored in the above-mentioned memories in sequence; an amplification unit, which is electrically connected to the above-mentioned shift unit and the above-mentioned control unit respectively, and the above-mentioned amplification unit is used to amplify the above-mentioned voltage signals outputted in sequence by the above-mentioned shift units.

进一步地,各上述光敏单元还包括:多个第一复位开关,与上述光敏器件一一对应的电连接,用于对对应的上述光敏器件的输出电压进行复位;第一放大器,与上述光敏器件一一对应的电连接,且上述光敏器件的输出端分别与上述第一复位开关以及上述第一放大器电连接,上述第一放大器用于对对应的上述光敏器件的输出电压进行放大。Furthermore, each of the above-mentioned photosensitive units also includes: a plurality of first reset switches, which are electrically connected to the above-mentioned photosensitive devices one by one, and are used to reset the output voltage of the corresponding above-mentioned photosensitive devices; a first amplifier, which is electrically connected to the above-mentioned photosensitive devices one by one, and the output ends of the above-mentioned photosensitive devices are respectively electrically connected to the above-mentioned first reset switches and the above-mentioned first amplifiers, and the above-mentioned first amplifiers are used to amplify the output voltage of the corresponding above-mentioned photosensitive devices.

进一步地,上述存储单元还包括多个采样保持开关,上述采样保持开关一一对应电连接在上述第一放大器和上述存储器之间,且上述存储器通过上述采样保持开关与上述控制单元电连接。Furthermore, the storage unit further comprises a plurality of sample-and-hold switches, the sample-and-hold switches are electrically connected one-to-one between the first amplifier and the memory, and the memory is electrically connected to the control unit via the sample-and-hold switches.

进一步地,上述移位单元包括:多个信号接通开关,上述信号接通开关与上述存储器一一对应地电连接;移位寄存器,与上述控制单元以及各上述信号接通开关分别电连接,上述移位寄存器用于控制多个上述信号接通开关依次闭合;公共信号部,与各上述信号接通开关分别电连接,上述移位寄存器用于将上述存储器存储的上述电压信号依次输入到上述公共信号部上。Furthermore, the above-mentioned shift unit includes: a plurality of signal-on switches, which are electrically connected to the above-mentioned memories in a one-to-one correspondence; a shift register, which is electrically connected to the above-mentioned control unit and each of the above-mentioned signal-on switches, and the above-mentioned shift register is used to control the plurality of above-mentioned signal-on switches to be closed in sequence; and a common signal part, which is electrically connected to each of the above-mentioned signal-on switches, and the above-mentioned shift register is used to input the above-mentioned voltage signal stored in the above-mentioned memory into the above-mentioned common signal part in sequence.

进一步地,上述放大单元包括第二放大器,上述第二放大器与上述公共信号部电连接,上述第二放大器用于将公共信号部依次传输过来的上述电压信号依次放大。Furthermore, the amplification unit includes a second amplifier, the second amplifier is electrically connected to the common signal unit, and the second amplifier is used to sequentially amplify the voltage signals sequentially transmitted from the common signal unit.

进一步地,上述公共信号部由一个公共信号线或者多个公共信号线组成,当上述公共信号部由多个上述公共信号线组成时,上述放大单元包括多个上述第二放大器,且上述第二放大器与上述公共信号线一一对应电连接,上述公共信号线的数量与上述光敏单元的数量相同,且上述公共信号线对应与一个上述光敏单元连接的多个信号接通开关分别电连接。Furthermore, the common signal portion is composed of one common signal line or multiple common signal lines. When the common signal portion is composed of multiple common signal lines, the amplification unit includes multiple second amplifiers, and the second amplifiers are electrically connected to the common signal lines one by one. The number of the common signal lines is the same as the number of the photosensitive units, and the common signal lines are electrically connected to multiple signal-on switches connected to one of the photosensitive units.

进一步地,上述图像传感器芯片还包括第二复位开关,上述第二复位开关与上述公共信号部、上述第二放大器以及控制单元分别电连接,上述第二复位开关用于对上述公共信号部和上述第二放大器分别进行复位。Furthermore, the image sensor chip further includes a second reset switch, which is electrically connected to the common signal unit, the second amplifier and the control unit respectively, and is used to reset the common signal unit and the second amplifier respectively.

进一步地,上述光敏器件为光敏二极管,上述光敏二极管包括N型区、P型区、输入电极和输出电极,上述P型区与输入电极接触设置,且上述输入电极接地,上述N型区与输出电极接触设置,且上述输出电极与上述存储单元电连接。Furthermore, the above-mentioned photosensitive device is a photosensitive diode, which includes an N-type region, a P-type region, an input electrode and an output electrode. The above-mentioned P-type region is arranged in contact with the input electrode, and the above-mentioned input electrode is grounded. The above-mentioned N-type region is arranged in contact with the output electrode, and the above-mentioned output electrode is electrically connected to the above-mentioned storage unit.

进一步地,上述图像传感器芯片还包括基板,至少上述光敏单元位于上述基板的表面上。Furthermore, the image sensor chip further comprises a substrate, and at least the photosensitive unit is located on a surface of the substrate.

根据本申请的另一方面,提供了一种图像传感器装置,包括图像传感芯片,上述图像传感芯片包括图像传感芯片为任一种的上述图像传感芯片。According to another aspect of the present application, an image sensor device is provided, including an image sensor chip, wherein the image sensor chip includes any one of the above-mentioned image sensor chips.

应用本申请的技术方案,该图像传感器芯片相对现有技术来说,在第一方向上增加了光敏单元,且任意两个上述光敏单元中的任意两个上述光敏器件的上述光敏接收区的中心的连线与第一方向不平行,使得第二方向上检测点增加,从而提高了图像传感器芯片的分辨率,且该图像传感器芯片中的各光敏器件的光敏接收区的面积没有减小,进一步保证了感度的不下降。By applying the technical solution of the present application, the image sensor chip has an additional photosensitive unit in the first direction compared to the prior art, and a line connecting the centers of the photosensitive receiving areas of any two of the photosensitive devices in any two of the photosensitive units is not parallel to the first direction, so that the number of detection points in the second direction is increased, thereby improving the resolution of the image sensor chip, and the area of the photosensitive receiving area of each photosensitive device in the image sensor chip is not reduced, further ensuring that the sensitivity does not decrease.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

构成本申请的一部分的说明书附图用来提供对本申请的进一步理解,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。在附图中:The drawings constituting part of the present application are used to provide a further understanding of the present application. The illustrative embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

图1示出了根据本申请的图像传感器装置的实施例的结构示意图;FIG1 is a schematic structural diagram of an image sensor device according to an embodiment of the present application;

图2示出了本申请的实施例1中的图像传感器装置的结构示意图;FIG2 is a schematic diagram showing the structure of an image sensor device in Embodiment 1 of the present application;

图3示出了图2中的图像传感器装置的电路结构示意图;FIG3 is a schematic diagram showing a circuit structure of the image sensor device in FIG2 ;

图4示出了图3中的图像传感器装置的局部结构示意图;FIG4 is a schematic diagram showing a partial structure of the image sensor device in FIG3 ;

图5示出了本申请的实施例2中的图像传感器装置的结构示意图;FIG5 is a schematic diagram showing the structure of an image sensor device in Embodiment 2 of the present application;

图6示出了图5中的图像传感器装置的电路结构示意图;FIG6 is a schematic diagram showing a circuit structure of the image sensor device in FIG5 ;

图7示出了实施例1中的图像传感器装置的检测结果示意图;FIG7 is a schematic diagram showing the detection results of the image sensor device in Example 1;

图8示出了实施例2的图像传感器装置的检测结果示意图。FIG. 8 is a schematic diagram showing detection results of the image sensor device of Example 2. In FIG.

其中,上述附图包括以下附图标记:The above drawings include the following reference numerals:

01、基板;10、光敏单元;100、光敏接收区;20、控制单元;30、存储单元;40、移位单元;50、第二复位开关;60、放大单元;70、工作单元;11、第一复位开关;12、光敏器件;13、第一放大器;31、采样保持开关;32、存储器;41、信号接通开关;42、移位寄存器;43、公共信号部;430、公共信号线;431、第一公共信号线;432、第二公共信号线;600、第二放大器。01. Substrate; 10. Photosensitive unit; 100. Photosensitive receiving area; 20. Control unit; 30. Storage unit; 40. Shift unit; 50. Second reset switch; 60. Amplifying unit; 70. Working unit; 11. First reset switch; 12. Photosensitive device; 13. First amplifier; 31. Sample and hold switch; 32. Memory; 41. Signal connection switch; 42. Shift register; 43. Common signal unit; 430. Common signal line; 431. First common signal line; 432. Second common signal line; 600. Second amplifier.

具体实施方式Detailed ways

应该指出,以下详细说明都是例示性的,旨在对本申请提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本申请所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed descriptions are illustrative and are intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which the present application belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本申请的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and/or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and/or combinations thereof.

应该理解的是,当元件(诸如层、膜、区域、或衬底)描述为在另一元件“上”时,该元件可直接在该另一元件上,或者也可存在中间元件。而且,在说明书以及权利要求书中,当描述有元件“连接”至另一元件时,该元件可“直接连接”至该另一元件,或者通过第三元件“连接”至该另一元件。It should be understood that when an element (such as a layer, film, region, or substrate) is described as being "on" another element, the element may be directly on the other element, or there may be intermediate elements. Moreover, in the specification and claims, when an element is described as being "connected" to another element, the element may be "directly connected" to the other element, or "connected" to the other element through a third element.

正如背景技术所介绍的,现有技术中的图像传感器芯片的分辨率的要求提高时,需要的光敏器件的数量变多,导致各光敏器件的光敏接收区的面积变小,从而使得光敏器件的感度下降,为了解决如上的技术问题,本申请提出了一种图像传感器芯片和图像传感器装置。As introduced in the background technology, when the resolution requirements of the image sensor chip in the prior art are increased, the number of photosensitive devices required increases, resulting in a smaller area of the photosensitive receiving area of each photosensitive device, thereby reducing the sensitivity of the photosensitive device. In order to solve the above technical problems, the present application proposes an image sensor chip and an image sensor device.

本申请的一种典型的实施方式中,提供了一种图像传感器芯片,如图1所示,该图像传感器芯片包括多个光敏单元10,多个上述光敏单元10沿第一方向依次排列,即所有的光敏单元沿第一方向依次排列,且各上述光敏单元10包括多个沿着第二方向依次排列的光敏器件12,上述第一方向与上述第二方向垂直,上述第二方向为上述图像传感器芯片的主扫描方向,第一方向就是待测物的移动方向,第二方向也是图像传感器芯片的长度方向,各上述光敏器件12具有光敏接收区100,用来接收外界光,接收到外界光的光敏器件进行光电转换,将光信号转换为电压信号。并且,任意两个上述光敏接收区100的面积均相同且具有宽度相同的间隔,即图像传感器芯片中的所有的光敏接收区的面积均相同,间隔在第二方向上的宽度均相同,这样就可以保证所有的光敏接收区接收到的光量是相同的,进一步保证了后续图像传感器装置可以得到准确的检测图像。任意两个上述光敏单元10中的任意两个上述光敏器件12的上述光敏接收区100的中心的连线与第一方向之间具有夹角θ,且0°<θ<180°,即连线不与第一方向平行,这样就使得第二方向上检测点的增多,从而提高了分辨率。In a typical embodiment of the present application, an image sensor chip is provided, as shown in FIG1 , the image sensor chip includes a plurality of photosensitive units 10, the plurality of photosensitive units 10 are arranged in sequence along a first direction, that is, all the photosensitive units are arranged in sequence along the first direction, and each of the photosensitive units 10 includes a plurality of photosensitive devices 12 arranged in sequence along a second direction, the first direction is perpendicular to the second direction, the second direction is the main scanning direction of the image sensor chip, the first direction is the moving direction of the object to be measured, and the second direction is also the length direction of the image sensor chip, each of the photosensitive devices 12 has a photosensitive receiving area 100 for receiving external light, and the photosensitive device receiving the external light performs photoelectric conversion to convert the light signal into a voltage signal. Moreover, the areas of any two of the photosensitive receiving areas 100 are the same and have the same width interval, that is, the areas of all the photosensitive receiving areas in the image sensor chip are the same, and the width of the interval in the second direction is the same, so that the amount of light received by all the photosensitive receiving areas is the same, and further ensures that the subsequent image sensor device can obtain an accurate detection image. There is an angle θ between the line connecting the centers of the photosensitive receiving areas 100 of any two of the photosensitive devices 12 in any two of the photosensitive units 10 and the first direction, and 0°<θ<180°, that is, the line is not parallel to the first direction, which increases the number of detection points in the second direction, thereby improving the resolution.

上述的图像传感器芯片相对现有技术来说,在第一方向上增加了光敏单元,且任意两个上述光敏单元10中的任意两个上述光敏器件12的上述光敏接收区100的中心的连线与第一方向不平行,使得第二方向上检测点增加,从而提高了图像传感器芯片的分辨率,且该图像传感器芯片中的各光敏器件的光敏接收区的面积没有减小,进一步保证了感度的不下降。Compared with the prior art, the above-mentioned image sensor chip has an additional photosensitive unit in the first direction, and the line connecting the centers of the above-mentioned photosensitive receiving areas 100 of any two of the above-mentioned photosensitive devices 12 in any two of the above-mentioned photosensitive units 10 is not parallel to the first direction, so that the detection points in the second direction are increased, thereby improving the resolution of the image sensor chip, and the area of the photosensitive receiving area of each photosensitive device in the image sensor chip is not reduced, further ensuring that the sensitivity does not decrease.

需要说明的是,本申请对多个光敏单元在第一方向上的间隔并不作出限定,二者之间的间隔越小,检测精度越高,但是由于光刻工艺的限制,二者之间的间隔现在还不可能做到很小。It should be noted that the present application does not limit the spacing between multiple photosensitive units in the first direction. The smaller the spacing between the two, the higher the detection accuracy. However, due to the limitations of the photolithography process, it is currently impossible to make the spacing between the two very small.

本申请的任意两个光敏接收区的形状可以相同,也可以不同(这里的不同包括部分不同与全部不同),只要面积相同就可以,本领域技术人员可以根据实际情况将任意光敏接收区设置为相同或者不同形状。The shapes of any two photosensitive receiving areas of the present application can be the same or different (the difference here includes partial difference and complete difference), as long as the areas are the same. Those skilled in the art can set any photosensitive receiving areas to the same or different shapes according to actual conditions.

为了简化图像传感器芯片的结构和工艺,本申请的一种实施例中,如图1所示,任意两个上述光敏接收区100在第一平面上的投影形状均相同,上述第一平面与上述第一方向和上述第二方向分别平行。In order to simplify the structure and process of the image sensor chip, in one embodiment of the present application, as shown in FIG. 1 , the projection shapes of any two of the above-mentioned photosensitive receiving areas 100 on the first plane are the same, and the above-mentioned first plane is parallel to the above-mentioned first direction and the above-mentioned second direction respectively.

本申请的光敏接收区在第一平面上的投影的形状可以选择现有技术中的任何形状,包括任何规则或者不规则的形状,本领域技术人员并可以根据实际情况将光敏接收区设置为合适的形状。The shape of the projection of the photosensitive receiving area of the present application on the first plane can be selected from any shape in the prior art, including any regular or irregular shape, and those skilled in the art can set the photosensitive receiving area to a suitable shape according to actual conditions.

本申请的一种具体的实施例中,上述光敏接收区100在上述第一平面上的投影形状选自圆、正方形、长方形、椭圆与三角形中的任意一种。如图1所示的图像传感器芯片中,上述光敏接收区100在上述第一平面上的投影形状为正方形。In a specific embodiment of the present application, the projection shape of the photosensitive receiving area 100 on the first plane is selected from any one of a circle, a square, a rectangle, an ellipse and a triangle. In the image sensor chip shown in FIG1 , the projection shape of the photosensitive receiving area 100 on the first plane is a square.

本申请的一种实施例中,各上述光敏接收区100在第二方向上的最大长度为L,任意相邻两个上述光敏单元10中的上述光敏器件12是一一对应的,且一一对应的两个上述光敏器件12的上述光敏接收区100的中心之间的间距在第二方向上的宽度为1/3L~2/3L之间,即相邻的两个光敏单元中的对应的两个光敏接收区错位设置,且错位1/3L~2/3L。这样可以进一步保证检测精度的提高。In one embodiment of the present application, the maximum length of each photosensitive receiving area 100 in the second direction is L, the photosensitive devices 12 in any two adjacent photosensitive units 10 are one-to-one corresponding, and the width of the spacing between the centers of the photosensitive receiving areas 100 of the two one-to-one corresponding photosensitive devices 12 in the second direction is between 1/3L and 2/3L, that is, the corresponding two photosensitive receiving areas in two adjacent photosensitive units are staggered, and the stagger is 1/3L to 2/3L. This can further ensure the improvement of detection accuracy.

本申请的一种具体的实施例中,如图2所示,一一对应的两个上述光敏器件12的上述光敏接收区100的中心之间的间距在第二方向上的宽度为1/2L。这样可以进一步提高检测精度。In a specific embodiment of the present application, as shown in FIG2 , the width of the distance between the centers of the photosensitive receiving areas 100 of the two corresponding photosensitive devices 12 in the second direction is 1/2L, which can further improve the detection accuracy.

为了进一步简化结构,简化工艺,本申请的一种实施例中,如图2所示,各上述光敏单元10中,任意相邻两个上述光敏接收区100之间的间隔相同。In order to further simplify the structure and the process, in one embodiment of the present application, as shown in FIG. 2 , in each of the photosensitive units 10 , the intervals between any two adjacent photosensitive receiving areas 100 are the same.

当然,本申请的上述任意两个光敏接收区之间的间隔可以不相同,本领域技术人员可以根据实际情况将任意两个光敏接收区之间的间隔设置为全部不相同,部分不相同或者全部相同。Of course, the intervals between any two photosensitive receiving areas mentioned above in the present application may be different, and those skilled in the art may set the intervals between any two photosensitive receiving areas to be completely different, partially different, or completely the same according to actual conditions.

一种具体的实施例中,如图2所示,上述光敏单元10仅有两个。这样的图像传感器芯片的结构更加简单,且能够保证该图像传感器芯片的分辨率为只有一个光敏单元的图像传感器芯片的两倍。例如采用仅有一个光敏单元的图像传感器芯片的分辨率为1200DPI,而该具有两个光敏单元的图像传感器芯片的分辨率为2400DPI。In a specific embodiment, as shown in FIG2 , there are only two photosensitive units 10. Such an image sensor chip has a simpler structure and can ensure that the resolution of the image sensor chip is twice that of an image sensor chip with only one photosensitive unit. For example, the resolution of an image sensor chip with only one photosensitive unit is 1200 DPI, while the resolution of the image sensor chip with two photosensitive units is 2400 DPI.

并且,通过将两个光敏单元中对应的光敏器件设置为合适的错位位置上,还能进一步保证更准确的实现高精度的检测。Furthermore, by setting the corresponding photosensitive devices in the two photosensitive units at appropriate offset positions, more accurate and high-precision detection can be further ensured.

本申请的另一种具体的实施例中,如图1上述图像传感器芯片还包括控制单元20、存储单元30、移位单元40和放大单元60。其中,控制单元20、用于接收外部时钟信号和起始信号,且用于控制上述图像传感器芯片的工作;存储单元30包括多个存储器32,各上述存储器32与上述控制单元20电连接,控制单元控制存储器的存储过程,上述存储器32用于存储对应的上述光敏器件12得到的电压信号;移位单元40与各上述存储器32和上述控制单元20分别电连接,上述移位单元40用于将上述存储器32储存的上述电压信号依次输出;放大单元60与上述移位单元40和上述控制单元20分别电连接,上述放大单元60用于将上述移位单元40依次输出的上述电压信号进行放大。该实施例中,通过设置控制单元、存储单元、移位单元和放大单元来对光敏器件产生的电信号依次进行处理,使得处理后的电信号能够得到准确的检测图像。In another specific embodiment of the present application, as shown in FIG1, the image sensor chip further includes a control unit 20, a storage unit 30, a shift unit 40 and an amplification unit 60. The control unit 20 is used to receive an external clock signal and a start signal, and is used to control the operation of the image sensor chip; the storage unit 30 includes a plurality of memories 32, each of which is electrically connected to the control unit 20, and the control unit controls the storage process of the memory, and the memory 32 is used to store the voltage signal obtained by the corresponding photosensitive device 12; the shift unit 40 is electrically connected to each of the memories 32 and the control unit 20, respectively, and the shift unit 40 is used to sequentially output the voltage signal stored in the memory 32; the amplification unit 60 is electrically connected to the shift unit 40 and the control unit 20, respectively, and the amplification unit 60 is used to amplify the voltage signal sequentially output by the shift unit 40. In this embodiment, the electrical signal generated by the photosensitive device is processed sequentially by setting the control unit, the storage unit, the shift unit and the amplification unit, so that the processed electrical signal can obtain an accurate detection image.

为了使得光敏单元得到准确的电压信号,且同时为了使得光敏单元输出的电压信号不是太小,如图3、图4和图6所示,本申请的一种实施例中,各上述光敏单元10还包括多个第一复位开关11和第一放大器13,第一复位开关11与上述光敏器件12一一对应的电连接,在光敏器件测试前,控制该第一复位开关闭合,该第一复位开关对对应的上述光敏器件12的输出电压进行复位,初始化光敏器件的输出电压,使得各光敏器件的输出电压均一致,避免了其他的外界因素对测试结果的影响,使得光敏器件的测试结果更加准确;第一放大器13与上述光敏器件12一一对应的电连接,且上述光敏器件12的输出端分别与上述第一复位开关11以及上述第一放大器电连接,上述第一放大器用于对对应的上述光敏器件12的输出电压进行放大。In order to enable the photosensitive unit to obtain an accurate voltage signal and at the same time to ensure that the voltage signal output by the photosensitive unit is not too small, as shown in Figures 3, 4 and 6, in an embodiment of the present application, each of the above-mentioned photosensitive units 10 also includes a plurality of first reset switches 11 and a first amplifier 13, and the first reset switch 11 is electrically connected to the above-mentioned photosensitive device 12 in a one-to-one manner. Before the photosensitive device is tested, the first reset switch is controlled to be closed, and the first reset switch resets the output voltage of the corresponding photosensitive device 12, initializes the output voltage of the photosensitive device, so that the output voltage of each photosensitive device is consistent, avoiding the influence of other external factors on the test result, and making the test result of the photosensitive device more accurate; the first amplifier 13 is electrically connected to the above-mentioned photosensitive device 12 in a one-to-one manner, and the output end of the above-mentioned photosensitive device 12 is electrically connected to the above-mentioned first reset switch 11 and the above-mentioned first amplifier respectively, and the above-mentioned first amplifier is used to amplify the output voltage of the corresponding photosensitive device 12.

本申请的再一种实施例中,如图3、图4和图6所示,上述存储单元30还包括多个采样保持开关31,上述采样保持开关31一一对应电连接在上述第一放大器13和上述存储器32之间,且上述存储器32通过上述采样保持开关31与上述控制单元20电连接。具体地,以图3、图4和图6所示的图像传感器芯片为例,来说明采样保持开关的工作过程,在控制单元控制各第一复位开关11对光敏器件12的输出电压进行初始化后,控制单元控制各第一复位开关11断开,并同时控制各采样保持开关31闭合,此时,光敏器件接收外界光,蓄积电荷,产生的电压信号,经过第一放大器13放大后,存储在存储器32中,然后控制单元控制采样保持开关31断开,这样所有存储器保存着采样保持开关31断开瞬间的存储电压。In another embodiment of the present application, as shown in FIG3, FIG4 and FIG6, the storage unit 30 further includes a plurality of sampling and holding switches 31, and the sampling and holding switches 31 are electrically connected between the first amplifier 13 and the memory 32 in a one-to-one correspondence, and the memory 32 is electrically connected to the control unit 20 through the sampling and holding switches 31. Specifically, taking the image sensor chip shown in FIG3, FIG4 and FIG6 as an example, the working process of the sampling and holding switch is explained. After the control unit controls each first reset switch 11 to initialize the output voltage of the photosensitive device 12, the control unit controls each first reset switch 11 to be disconnected, and simultaneously controls each sampling and holding switch 31 to be closed. At this time, the photosensitive device receives external light, accumulates charge, and generates a voltage signal, which is amplified by the first amplifier 13 and stored in the memory 32. Then the control unit controls the sampling and holding switch 31 to be disconnected, so that all memories store the stored voltage at the moment when the sampling and holding switch 31 is disconnected.

如图3、图4和图6所示,本申请的一种具体的实施例中,上述存储器为存储电容。当然,本申请的存储器并不限于上述的存储电容,还可以是其他可以存储电压信号的存储器。As shown in Figures 3, 4 and 6, in a specific embodiment of the present application, the memory is a storage capacitor. Of course, the memory of the present application is not limited to the storage capacitor, but can also be other memories that can store voltage signals.

为了使得移位单元可以更好地控制上述存储器32储存的上述电压信号依次输出,本申请的一种实施例中,如图3、图4和图6所示,上述移位单元40包括多个信号接通开关41、移位寄存器42和公共信号部43。其中,上述信号接通开关41与上述存储器32一一对应地电连接;移位寄存器42与上述控制单元20以及各上述信号接通开关41分别电连接,上述移位寄存器42用于控制多个上述信号接通开关41依次闭合;公共信号部43与各上述信号接通开关41分别电连接,上述移位寄存器42用于将上述存储器32存储的上述电压信号依次输入到上述公共信号部43上。In order to enable the shift unit to better control the sequential output of the voltage signal stored in the memory 32, in one embodiment of the present application, as shown in FIG3, FIG4 and FIG6, the shift unit 40 includes a plurality of signal connection switches 41, a shift register 42 and a common signal unit 43. Among them, the signal connection switches 41 are electrically connected to the memory 32 in a one-to-one correspondence; the shift register 42 is electrically connected to the control unit 20 and each of the signal connection switches 41, and the shift register 42 is used to control the plurality of signal connection switches 41 to be closed in sequence; the common signal unit 43 is electrically connected to each of the signal connection switches 41, and the shift register 42 is used to input the voltage signal stored in the memory 32 to the common signal unit 43 in sequence.

本申请的又一种实施例中,如图3、图4和图6所示,上述放大单元60包括第二放大器600,上述第二放大器600与上述公共信号部43电连接,上述第二放大器600用于将公共信号部43依次传输过来的上述电压信号依次放大。In another embodiment of the present application, as shown in Figures 3, 4 and 6, the above-mentioned amplification unit 60 includes a second amplifier 600, and the above-mentioned second amplifier 600 is electrically connected to the above-mentioned common signal part 43, and the above-mentioned second amplifier 600 is used to sequentially amplify the above-mentioned voltage signals transmitted sequentially from the common signal part 43.

需要说明的是,本申请的第一放大器和第二放大器可以独立地选自现有技术中的任何一种放大器。本申请的一种具体的实施例中,上述第一放大器和第二放大器均为差分放大器,差分放大器具有两个输入端,分别为正输入端和负输入端,正输入端输入需要放大的电压信号,负输入端输入参考电压。It should be noted that the first amplifier and the second amplifier of the present application can be independently selected from any amplifier in the prior art. In a specific embodiment of the present application, the first amplifier and the second amplifier are both differential amplifiers, and the differential amplifier has two input terminals, namely a positive input terminal and a negative input terminal, the positive input terminal inputs a voltage signal to be amplified, and the negative input terminal inputs a reference voltage.

本申请的上述公共信号部43可以由一个公共信号线430组成,即仅具有一个公共信号线,如图3所示的实施例中,这样所有的存储器存储的电压信号依次传输到该公共信号线上。当然,上述公共信号部43可以由多个公共信号线430组成,如图6所示,上述放大单元60包括多个上述第二放大器600,且上述第二放大器600与上述公共信号线430一一对应电连接,上述公共信号线430的数量与上述光敏单元10的数量相同,且上述公共信号线430对应与一个上述光敏单元10连接的多个信号接通开关41分别电连接,即每个公共信号线仅与一个光敏单元连接的多个信号接通开关41分别电连接,这样一个公共信号线上的电压信号为该光敏单元对应的多个电压信号,每个第二放大器对应放大该光敏单元对应的电压信号。The common signal unit 43 of the present application can be composed of one common signal line 430, that is, it has only one common signal line. In the embodiment shown in FIG3 , all voltage signals stored in the memory are sequentially transmitted to the common signal line. Of course, the common signal unit 43 can be composed of multiple common signal lines 430. As shown in FIG6 , the amplification unit 60 includes multiple second amplifiers 600, and the second amplifiers 600 are electrically connected to the common signal lines 430 one by one. The number of the common signal lines 430 is the same as the number of the photosensitive units 10, and the common signal lines 430 are electrically connected to multiple signal-on switches 41 connected to one of the photosensitive units 10, that is, each common signal line is electrically connected to multiple signal-on switches 41 connected to only one photosensitive unit, so that the voltage signal on a common signal line is a plurality of voltage signals corresponding to the photosensitive unit, and each second amplifier amplifies the voltage signal corresponding to the photosensitive unit.

当然,当上述公共信号部43可以由多个公共信号线430组成时,具体公共信号线与光敏单元的对应关系并不限于上述的描述,还可以是将多个光敏单元分为几组,一组对应一个公共信号线,即某个或者每个公共信号线上的电压信号为多个光敏单元对应的多个电压信号,当然,不同公共信号线上不能对应同一个光敏单元的多个电压信号。本领域技术人员可以根据实际情况设置数量的公共信号线,并对应将合适数量的光敏单元的多个电压信号依次输入到该公共信号线上。Of course, when the common signal part 43 can be composed of a plurality of common signal lines 430, the specific correspondence between the common signal lines and the photosensitive units is not limited to the above description, and the plurality of photosensitive units can also be divided into several groups, one group corresponding to one common signal line, that is, the voltage signal on a certain or each common signal line is a plurality of voltage signals corresponding to the plurality of photosensitive units, and of course, different common signal lines cannot correspond to the plurality of voltage signals of the same photosensitive unit. Those skilled in the art can set the number of common signal lines according to the actual situation, and input the plurality of voltage signals of the appropriate number of photosensitive units into the common signal line in sequence.

为了进一步保证检测结果的准确性,本申请的一种实施例中,如图3、图4和图6所示,上述图像传感器芯片还包括第二复位开关50,上述第二复位开关50与上述公共信号部43、上述第二放大器600以及控制单元20分别电连接,上述第二复位开关50用于对上述公共信号部43和上述第二放大器600分别进行复位。具体地,控制单元在控制采样保持开关断开后,就控制第二复位开关闭合,对第二放大器和公共信号线进行复位,之后控制第二复位开关断开。In order to further ensure the accuracy of the detection results, in one embodiment of the present application, as shown in Figures 3, 4 and 6, the image sensor chip further includes a second reset switch 50, which is electrically connected to the common signal unit 43, the second amplifier 600 and the control unit 20, respectively, and is used to reset the common signal unit 43 and the second amplifier 600, respectively. Specifically, after the control unit controls the sample and hold switch to be disconnected, it controls the second reset switch to be closed, resets the second amplifier and the common signal line, and then controls the second reset switch to be disconnected.

本申请的光敏器件可以为现有技术中的任何光敏器件,比如光敏二极管和光敏三极管,本领域技术人员可以根据实际情况选择合适的光敏器件。The photosensitive device of the present application can be any photosensitive device in the prior art, such as a photosensitive diode and a photosensitive triode. Those skilled in the art can select a suitable photosensitive device according to actual conditions.

本申请的一种实施例中,如图4所示,上述光敏器件12为光敏二极管,上述光敏二极管包括N型区、P型区、输入电极和输出电极,上述P型区与输入电极接触设置,且上述输入电极接地,上述N型区与输出电极接触设置,且上述输出电极与上述存储单元电连接。光敏二极管结构简单,成本较低。In one embodiment of the present application, as shown in FIG4 , the photosensitive device 12 is a photodiode, which includes an N-type region, a P-type region, an input electrode and an output electrode, wherein the P-type region is in contact with the input electrode, and the input electrode is grounded, and the N-type region is in contact with the output electrode, and the output electrode is electrically connected to the storage unit. The photodiode has a simple structure and low cost.

一种具体的实施例中,如图1、图2和图5所示,上述图像传感器芯片还包括基板01,至少上述光敏单元10位于上述基板01的表面上。In a specific embodiment, as shown in FIG. 1 , FIG. 2 and FIG. 5 , the image sensor chip further includes a substrate 01 , and at least the photosensitive unit 10 is located on the surface of the substrate 01 .

当然,当图像传感器芯片包括控制单元、存储单元、移位单元和放大单元时,这些单元也设置在基板上,如图1、图2和图5所示。Of course, when the image sensor chip includes a control unit, a storage unit, a shift unit, and an amplification unit, these units are also arranged on the substrate, as shown in FIGS. 1 , 2 , and 5 .

本申请的另一种典型的实施方式中,提供了一种图像传感器装置,该图像传感器装置包括上述的任一种图像传感器芯片。In another typical embodiment of the present application, an image sensor device is provided. The image sensor device includes any one of the above-mentioned image sensor chips.

上述的图像传感器装置由于包括上述的图像传感器芯片,使得其的分辨率较高,且图像更加准确。Since the image sensor device includes the image sensor chip, the image sensor device has a higher resolution and a more accurate image.

需要说明的是,本申请中为了方便示图,将一个第一复位开关11、光敏器件12、一个第一放大器13、一个采样保持开关31、一个存储器32和一个信号接通开关41作为一个整体在图3和图6中示出,并称作工作单元70,该工作单元的具体电路结构示意图为图4。It should be noted that, in the present application, for the convenience of illustration, a first reset switch 11, a photosensitive device 12, a first amplifier 13, a sample and hold switch 31, a memory 32 and a signal-on switch 41 are shown as a whole in Figures 3 and 6 and are referred to as a working unit 70. The specific circuit structure diagram of the working unit is shown in Figure 4.

为了使得本领域技术人员能够更加清楚地了解本申请的技术方案,以下将结合具体的实施例来说明本申请的技术方案。In order to enable those skilled in the art to more clearly understand the technical solution of the present application, the technical solution of the present application will be explained below in conjunction with specific embodiments.

实施例1Example 1

如图2所示,该实施例以普通600DPI所用光敏二极管光敏接收区大小和间隔实现主扫描方向1200DPI的功能。As shown in FIG. 2 , this embodiment realizes the function of 1200 DPI in the main scanning direction by using the size and interval of the photosensitive receiving area of the photosensitive diode used for ordinary 600 DPI.

如图2所示,该图像传感器芯片包括基板01、两个光敏单元10、控制单元20、存储单元30,移位单元40、第二复位开关50和放大单元60。两个光敏单元10、控制单元20、存储单元30,移位单元40、第二复位开关50和放大单元60均设置在基板01上,且两个光敏单元10沿着第一方向排列。As shown in Fig. 2, the image sensor chip includes a substrate 01, two photosensitive units 10, a control unit 20, a storage unit 30, a shift unit 40, a second reset switch 50 and an amplifying unit 60. The two photosensitive units 10, the control unit 20, the storage unit 30, the shift unit 40, the second reset switch 50 and the amplifying unit 60 are all arranged on the substrate 01, and the two photosensitive units 10 are arranged along the first direction.

各光敏单元包括多个沿着第二方向依次排列的光敏器件12、多个第一复位开关11以及多个第一放大器13。第一复位开关11的一端与上述光敏器件12一一对应的电连接,另一端与参考电压Vreset相连,Vreset为内部生成的基准电压。第一放大器13与上述光敏器件12一一对应的电连接,且光敏器件为光敏二极管,其P型区与输入电极接触设置,且上述输入电极接地,其N型区与输出电极接触设置,且上述输出电极分别与第一复位开关和第一放大器电连接。Each photosensitive unit includes a plurality of photosensitive devices 12 arranged in sequence along the second direction, a plurality of first reset switches 11, and a plurality of first amplifiers 13. One end of the first reset switch 11 is electrically connected to the photosensitive devices 12 in a one-to-one correspondence, and the other end is connected to a reference voltage Vreset, which is an internally generated reference voltage. The first amplifier 13 is electrically connected to the photosensitive devices 12 in a one-to-one correspondence, and the photosensitive devices are photosensitive diodes, whose P-type regions are arranged in contact with input electrodes, and the input electrodes are grounded, and whose N-type regions are arranged in contact with output electrodes, and the output electrodes are electrically connected to the first reset switches and the first amplifiers, respectively.

各光敏二极管包括光敏区域,且各个光敏区域在第一平面上的投影为正方形,且大小均相等,第一个光敏单元和第二个光敏单元的光敏接收区100的个数均为432个,每个光敏接收区100的长为40微米,宽为40微米,主扫描方向(第二方向)上相邻光敏接收区中心间隔42.3微米,第一个光敏单元的光敏接收区的中心线与第二个光敏单元的光敏接收区100的中心线相距42.3微米,且第二个光敏单元的第一个光敏接收区的中心与第一个光敏单元的第一个光敏接收区的中心在第二方向上错位21.15微米,该图像传感器芯片长18.3毫米,宽500微米。Each photosensitive diode includes a photosensitive area, and the projection of each photosensitive area on the first plane is a square and is equal in size. The number of photosensitive receiving areas 100 of the first photosensitive unit and the second photosensitive unit is 432, each photosensitive receiving area 100 is 40 microns long and 40 microns wide, and the centers of adjacent photosensitive receiving areas in the main scanning direction (second direction) are spaced 42.3 microns apart. The center line of the photosensitive receiving area of the first photosensitive unit is 42.3 microns away from the center line of the photosensitive receiving area 100 of the second photosensitive unit, and the center of the first photosensitive receiving area of the second photosensitive unit is offset by 21.15 microns from the center of the first photosensitive receiving area of the first photosensitive unit in the second direction. The image sensor chip is 18.3 mm long and 500 microns wide.

控制单元20为信号处理电路,主要设置有输入管脚SI和CLK,用来接收外部时钟信号和起始信号,负责整个图像传感器芯片的工作时序。The control unit 20 is a signal processing circuit, which is mainly provided with input pins SI and CLK for receiving external clock signals and start signals, and is responsible for the working timing of the entire image sensor chip.

存储单元30包括多个存储器32和多个采样保持开关31,上述采样保持开关31一一对应电连接在上述光敏器件12和上述存储器32之间,上述采样保持开关31还与上述控制单元20电连接,上述存储器32用于存储对应的上述光敏器件12得到的电压信号。The storage unit 30 includes multiple memories 32 and multiple sampling and holding switches 31. The sampling and holding switches 31 are electrically connected one by one between the photosensitive devices 12 and the memories 32. The sampling and holding switches 31 are also electrically connected to the control unit 20. The memories 32 are used to store the voltage signals obtained by the corresponding photosensitive devices 12.

上述移位单元40包括多个信号接通开关41、移位寄存器42和公共信号部43。其中,上述信号接通开关41与上述存储器32一一对应地电连接;移位寄存器42与上述控制单元20以及各上述信号接通开关41分别电连接,上述移位寄存器42用于控制多个上述信号接通开关41依次闭合;公共信号部43包括一个公共信号线430,该公共信号线430与各上述信号接通开关41分别电连接,上述移位寄存器42用于将上述存储器32存储的上述电压信号依次输入到上述公共信号部43上。The shift unit 40 includes a plurality of signal connection switches 41, a shift register 42 and a common signal unit 43. The signal connection switches 41 are electrically connected to the memory 32 in a one-to-one correspondence; the shift register 42 is electrically connected to the control unit 20 and each of the signal connection switches 41, and the shift register 42 is used to control the plurality of signal connection switches 41 to be closed in sequence; the common signal unit 43 includes a common signal line 430, and the common signal line 430 is electrically connected to each of the signal connection switches 41, and the shift register 42 is used to input the voltage signal stored in the memory 32 to the common signal unit 43 in sequence.

上述放大单元60包括第二放大器600,上述第二放大器600与上述公共信号部43电连接,上述第二放大器600用于将公共信号部43依次传输过来的上述电压信号依次放大。第二放大器600为差分放大电路,具有两个输入端和输出端,两个输入端分别为正输入端和负输入端,正输入端与公共信号线电连接,负输入端与参考电压VREF电连接,用于将公共信号线上电压信号与参考电压VREF的差值进行放大。The amplification unit 60 includes a second amplifier 600, which is electrically connected to the common signal unit 43. The second amplifier 600 is used to sequentially amplify the voltage signal sequentially transmitted from the common signal unit 43. The second amplifier 600 is a differential amplifier circuit, having two input terminals and an output terminal, the two input terminals are respectively a positive input terminal and a negative input terminal, the positive input terminal is electrically connected to the common signal line, and the negative input terminal is electrically connected to the reference voltage VREF, and is used to amplify the difference between the voltage signal on the common signal line and the reference voltage VREF.

上述第二复位开关50与上述公共信号线430、上述第二放大器600以及控制单元20分别电连接,上述第二复位开关50用于对上述公共信号部43和上述第二放大器600分别进行复位,复位为参考电压VREF,VREF为外部提供的基准电压。The second reset switch 50 is electrically connected to the common signal line 430, the second amplifier 600 and the control unit 20, respectively, and is used to reset the common signal unit 43 and the second amplifier 600, respectively, to a reference voltage VREF, where VREF is a reference voltage provided externally.

图像传感器芯片按如下时序进行工作,信号处理电路侦测到起始脉冲信号SI到来后,将所有第一复位开关11闭合,初始化光敏二极管的输出电压为Vreset。然后,控制所有第一复位开关11断开,同时控制所有采样保持开关31闭合,此时光敏二极管接收外界光,蓄积电荷,产生的电压被各像素单元的第一放大器13放大后,存储在作为存储器32的存储电容中。The image sensor chip works according to the following timing sequence. After the signal processing circuit detects the arrival of the start pulse signal SI, it closes all the first reset switches 11 to initialize the output voltage of the photodiode to Vreset. Then, it controls all the first reset switches 11 to be disconnected, and controls all the sample and hold switches 31 to be closed. At this time, the photodiode receives external light, accumulates charges, and the generated voltage is amplified by the first amplifier 13 of each pixel unit and stored in the storage capacitor serving as the memory 32.

然后,信号处理电路控制所有采样保持开关31断开,这样所有采样保持开关31断开瞬间的第一放大器的电压。之后,信号处理电路控制第二复位开关50接通后断开,对公共信号线430和第二放大器600进行复位;移位寄存器42依次控制各信号接通开关41依次闭合,将存储器32的电压依次输送到公共信号线430上进行放大。Then, the signal processing circuit controls all the sample-hold switches 31 to be turned off, so that the voltage of the first amplifier at the moment when all the sample-hold switches 31 are turned off. After that, the signal processing circuit controls the second reset switch 50 to be turned on and then turned off, and the common signal line 430 and the second amplifier 600 are reset; the shift register 42 controls each signal connection switch 41 to be closed in sequence, and the voltage of the memory 32 is sequentially transmitted to the common signal line 430 for amplification.

输出时序如图7所示,SIG端口依次输出第一个光敏单元的第一个光敏器件对应放大后的电压信号,第二个光敏单元的第一个光敏器件对应放大后的电压信号,第一个光敏单元的第二个光敏器件对应放大后的电压信号,第二个光敏单元的第二个光敏器件对应放大后的电压信号,直到第864个电压信号输出完毕。这样就以600DPI时的光敏接收区大小,实现了在18.3毫米长度上输出864个像素点电压,将864个像素点的电压作为一行数据,即可达到1200DPI的分辨率。由于每个光敏二极管的光敏接收区大小为600DPI时的大小,所以在实现主扫描方向上1200DPI的同时,对应的感度保持不变。The output timing is shown in Figure 7. The SIG port sequentially outputs the amplified voltage signal corresponding to the first photosensitive device of the first photosensitive unit, the amplified voltage signal corresponding to the first photosensitive device of the second photosensitive unit, the amplified voltage signal corresponding to the second photosensitive device of the first photosensitive unit, and the amplified voltage signal corresponding to the second photosensitive device of the second photosensitive unit, until the 864th voltage signal is output. In this way, with the size of the photosensitive receiving area at 600DPI, the output of 864 pixel voltages on a length of 18.3 mm is achieved. The voltage of 864 pixels is used as a line of data to achieve a resolution of 1200DPI. Since the size of the photosensitive receiving area of each photodiode is the size at 600DPI, the corresponding sensitivity remains unchanged while achieving 1200DPI in the main scanning direction.

实施例2Example 2

该实施例中的图像传感器芯片的结构与实施例1的基本相同,如图6所示,该实施例与实施例1的不同之处在于:The structure of the image sensor chip in this embodiment is substantially the same as that in Embodiment 1, as shown in FIG6 . The difference between this embodiment and Embodiment 1 is that:

如图6所示,公共信号部由两个公共信号线430组成,分别为第一公共信号线431和第二公共信号线432,各公共信号线430对应一个光敏单元,移位寄存器42同时控制两个光敏单元的放大后的电信号依次与对应的公共信号线430的连接。放大单元由两个第二放大器600组成,分别放大两个公共信号线430上的电压,由移位寄存器42控制并行地从输出引脚SIG1和SIG2输出。其电路框图如图6所示,第一个光敏单元的各信号经过第一放大器放大后的432个电压信号依次输入到第一公共信号线431上,且第一公共信号线431与一个第二放大器600的正输入端相连;第二个光敏单元的各信号经过第一放大器放大后的432个电压信号依次输入到第二公共信号线432上,且第二公共信号线432与一个第二放大器600的正输入端相连。两个第二放大器600的负输入端均与参考电压VREF相连接,第二复位开关50的一端分别与第一公共信号线431以及第二公共信号线432相连,一端与两个第二放大器600的负输入端分别相连。As shown in FIG6 , the common signal part is composed of two common signal lines 430, namely, a first common signal line 431 and a second common signal line 432. Each common signal line 430 corresponds to a photosensitive unit. The shift register 42 simultaneously controls the connection of the amplified electrical signals of the two photosensitive units with the corresponding common signal lines 430 in sequence. The amplification unit is composed of two second amplifiers 600, which amplify the voltages on the two common signal lines 430 respectively and are controlled by the shift register 42 to be outputted from the output pins SIG1 and SIG2 in parallel. The circuit block diagram is shown in FIG6 . After the signals of the first photosensitive unit are amplified by the first amplifier, the 432 voltage signals are sequentially inputted to the first common signal line 431, and the first common signal line 431 is connected to the positive input terminal of a second amplifier 600; after the signals of the second photosensitive unit are amplified by the first amplifier, the 432 voltage signals are sequentially inputted to the second common signal line 432, and the second common signal line 432 is connected to the positive input terminal of a second amplifier 600. The negative input terminals of the two second amplifiers 600 are connected to the reference voltage VREF. One end of the second reset switch 50 is respectively connected to the first common signal line 431 and the second common signal line 432 , and the other end is respectively connected to the negative input terminals of the two second amplifiers 600 .

该图像传感器芯片的工作流程如下:图像传感器芯片按如下时序进行工作,信号处理电路侦测到起始脉冲信号SI到来后,将所有第一复位开关11闭合,初始化光敏二极管的输出电压为Vreset。然后,控制所有第一复位开关11断开,同时控制所有采样保持开关31闭合,此时光敏二极管接收外界光,蓄积电荷,产生的电压被各像素单元的第一放大器13放大后,存储在作为存储器32的存储电容中。The working process of the image sensor chip is as follows: the image sensor chip works according to the following timing sequence. After the signal processing circuit detects the arrival of the start pulse signal SI, it closes all the first reset switches 11 to initialize the output voltage of the photodiode to Vreset. Then, all the first reset switches 11 are controlled to be disconnected, and all the sample and hold switches 31 are controlled to be closed. At this time, the photodiode receives external light, accumulates charges, and the generated voltage is amplified by the first amplifier 13 of each pixel unit and stored in the storage capacitor as the memory 32.

然后,信号处理电路控制所有采样保持开关31断开,这样所有采样保持开关31断开瞬间的第一放大器的电压。之后,信号处理电路控制第二复位开关50接通后断开,对两个公共信号线430和两个第二放大器600分别进行复位;移位寄存器42同时控制两个光敏单元的信号接通开关41依次闭合,将第一个光敏单元对应的432个电压信号依次送到第一公共信号线431上,由一个第二放大器600放大输出,将第二个光敏单元对应的432个电压信号依次送到第二公共信号线432上,由另一个第二放大器600放大输出,其输出时序如图8所示,SIG1端口依次输出第一个光敏单元的432个电压信号,SIG2端口依次输出第二个光敏单元的432个电压信号。这样就以分辨率600DPI时的光敏接收区大小,实现主扫描方向上1200DPI分辨率的效果,对应的感度不变,而且由于是两排并行同时输出,相同的驱动时钟频率条件下,扫描时间也减小,可应用于快速读取的场合。Then, the signal processing circuit controls all the sample-hold switches 31 to be disconnected, so that the voltage of the first amplifier at the moment when all the sample-hold switches 31 are disconnected is reduced. After that, the signal processing circuit controls the second reset switch 50 to be turned on and then turned off, and the two common signal lines 430 and the two second amplifiers 600 are reset respectively; the shift register 42 simultaneously controls the signal connection switches 41 of the two photosensitive units to be closed in sequence, and the 432 voltage signals corresponding to the first photosensitive unit are sent to the first common signal line 431 in sequence, and amplified and output by a second amplifier 600, and the 432 voltage signals corresponding to the second photosensitive unit are sent to the second common signal line 432 in sequence, and amplified and output by another second amplifier 600. The output timing is shown in FIG8 , and the SIG1 port sequentially outputs the 432 voltage signals of the first photosensitive unit, and the SIG2 port sequentially outputs the 432 voltage signals of the second photosensitive unit. In this way, the resolution of 1200DPI in the main scanning direction can be achieved with the size of the photosensitive receiving area at a resolution of 600DPI. The corresponding sensitivity remains unchanged, and because two rows are output in parallel at the same time, the scanning time is also reduced under the same driving clock frequency conditions, which can be used in situations where fast reading is required.

本申请的上述两个实施例在主扫描方向上的分辨率提高一倍时,仍采用低分辨率时光敏接收区的大小,在不降低感度的同时,又能保证信噪比和暗输出与低分辨率一致。采用两排像素单元同时输出的方案,还可提高扫描速度,适用于高速扫描的场合。When the resolution in the main scanning direction of the above two embodiments of the present application is doubled, the size of the photosensitive receiving area is still used at low resolution, and the signal-to-noise ratio and dark output are guaranteed to be consistent with low resolution without reducing the sensitivity. The solution of two rows of pixel units outputting simultaneously can also increase the scanning speed, which is suitable for high-speed scanning occasions.

从以上的描述中,可以看出,本申请上述的实施例实现了如下技术效果:From the above description, it can be seen that the above embodiments of the present application achieve the following technical effects:

1)、本申请的图像传感器芯片相对现有技术来说,在第一方向上增加了光敏单元,且任意两个上述光敏单元中的任意两个上述光敏器件的上述光敏接收区的中心的连线与第一方向不平行,使得检测点增加,从而提高了图像传感器芯片的分辨率,且该图像传感器芯片中的各光敏器件的光敏接收区的面积没有减小,进一步保证了感度的不下降。1) Compared with the prior art, the image sensor chip of the present application has an additional photosensitive unit in the first direction, and the line connecting the centers of the photosensitive receiving areas of any two of the photosensitive devices in any two of the photosensitive units is not parallel to the first direction, so that the number of detection points is increased, thereby improving the resolution of the image sensor chip, and the area of the photosensitive receiving area of each photosensitive device in the image sensor chip is not reduced, further ensuring that the sensitivity does not decrease.

2)、本申请的图像传感器装置由于包括上述的图像传感器芯片,使得其的分辨率较高,且图像更加准确。2) Since the image sensor device of the present application includes the above-mentioned image sensor chip, its resolution is higher and the image is more accurate.

以上所述仅为本申请的优选实施例而已,并不用于限制本申请,对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的保护范围之内。The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (14)

1. An image sensor chip, characterized in that the image sensor chip comprises a plurality of photosensitive units (10), the plurality of photosensitive units (10) are sequentially arranged along a first direction, each photosensitive unit (10) comprises a plurality of photosensitive devices (12) sequentially arranged along a second direction, the first direction is perpendicular to the second direction, the second direction is a main scanning direction of the image sensor chip, each photosensitive device (12) is provided with a photosensitive receiving area (100), any two photosensitive receiving areas (100) have the same area and have the same interval of width, an included angle theta is formed between a connecting line of centers of the photosensitive receiving areas (100) of any two photosensitive units (10) and the first direction, and the included angle theta is 0 degrees < theta <180 degrees;
The projection shapes of any two photosensitive receiving areas (100) on a first plane are the same, and the first plane is parallel to the first direction and the second direction respectively;
The maximum length of each photosensitive receiving area (100) in the second direction is L, the photosensitive devices (12) in any two adjacent photosensitive units (10) are in one-to-one correspondence, and the width of the space between the centers of the photosensitive receiving areas (100) of the two photosensitive devices (12) in one-to-one correspondence in the second direction is 1/3L-2/3L;
in each photosensitive unit (10), the interval between any two adjacent photosensitive receiving areas (100) is the same.
2. The image sensor chip according to claim 1, wherein the projection shape of the photosensitive receiving area (100) on the first plane is selected from any one of a circle, a square, a rectangle, an ellipse, and a triangle.
3. The image sensor chip according to claim 1, characterized in that a width of a pitch between centers of the photosensitive receiving areas (100) of two of the photosensitive devices (12) in one-to-one correspondence in the second direction is 1/2L.
4. The image sensor chip according to claim 1, characterized in that there are two of the photosensitive cells (10).
5. The image sensor chip of any one of claims 1 to 4, further comprising:
A control unit (20) for receiving an external clock signal and a start signal and for controlling the operation of the image sensor chip;
The storage unit (30) comprises a plurality of memories (32), each memory (32) is electrically connected with the control unit (20), the memories (32) are electrically connected with the photosensitive devices (12) in a one-to-one correspondence manner, and the memories (32) are used for storing voltage signals obtained by the corresponding photosensitive devices (12);
A shift unit (40) electrically connected to each of the memories (32) and the control unit (20), the shift unit (40) being configured to sequentially output the voltage signals stored in the memories (32);
And an amplifying unit (60) electrically connected to the shifting unit (40) and the control unit (20), wherein the amplifying unit (60) is configured to amplify the voltage signals sequentially output from the shifting unit (40).
6. The image sensor chip of claim 5, wherein each of the photosensitive cells (10) further comprises:
the first reset switches (11) are electrically connected with the photosensitive devices (12) in a one-to-one correspondence manner and are used for resetting the output voltage of the corresponding photosensitive devices (12);
the first amplifiers (13) are electrically connected with the photosensitive devices (12) in a one-to-one correspondence manner, the output ends of the photosensitive devices (12) are respectively electrically connected with the first reset switches (11) and the first amplifiers, and the first amplifiers are used for amplifying the output voltages of the corresponding photosensitive devices (12).
7. The image sensor chip according to claim 6, wherein the memory unit (30) further comprises a plurality of sample-and-hold switches (31), the sample-and-hold switches (31) are electrically connected between the first amplifier (13) and the memory (32) in a one-to-one correspondence, and the memory (32) is electrically connected with the control unit (20) through the sample-and-hold switches (31).
8. The image sensor chip according to claim 5, wherein the shift unit (40) comprises:
A plurality of signal-on switches (41), the signal-on switches (41) being electrically connected in one-to-one correspondence with the memories (32);
A shift register (42) electrically connected to the control unit (20) and each of the signal-on switches (41), the shift register (42) being configured to control a plurality of the signal-on switches (41) to be sequentially closed;
and a common signal section (43) electrically connected to each of the signal-on switches (41), wherein the shift register (42) is configured to sequentially input the voltage signals stored in the memory (32) to the common signal section (43).
9. The image sensor chip according to claim 8, wherein the amplifying unit (60) includes a second amplifier (600), the second amplifier (600) being electrically connected to the common signal section (43), the second amplifier (600) being configured to sequentially amplify the voltage signals sequentially transmitted from the common signal section (43).
10. The image sensor chip according to claim 9, wherein the common signal section (43) is composed of one common signal line (430) or a plurality of common signal lines (430), the amplifying unit (60) includes a plurality of the second amplifiers (600) when the common signal section (43) is composed of a plurality of the common signal lines (430), and the second amplifiers (600) are electrically connected to the common signal lines (430) in one-to-one correspondence, the number of the common signal lines (430) is the same as the number of the photosensitive units (10), and the common signal lines (430) are electrically connected to a plurality of signal on switches (41) connected to one of the photosensitive units (10), respectively.
11. The image sensor chip according to claim 9, further comprising a second reset switch (50), the second reset switch (50) being electrically connected to the common signal section (43), the second amplifier (600) and the control unit (20), respectively, the second reset switch (50) being configured to reset the common signal section (43) and the second amplifier (600), respectively.
12. The image sensor chip of claim 5, wherein the photosensitive device (12) is a photodiode, the photodiode includes an N-type region, a P-type region, an input electrode, and an output electrode, the P-type region is disposed in contact with the input electrode and the input electrode is grounded, the N-type region is disposed in contact with the output electrode, and the output electrode is electrically connected to the memory cell.
13. The image sensor chip according to claim 1, further comprising a substrate (01), at least the photosensitive unit (10) being located on a surface of the substrate (01).
14. An image sensor device comprising an image sensing chip, characterized in that the image sensing chip comprises an image sensing chip as claimed in any one of claims 1 to 13.
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