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CN109100343A - The preparation method of tungsten oxide film - Google Patents

The preparation method of tungsten oxide film Download PDF

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Publication number
CN109100343A
CN109100343A CN201810707265.3A CN201810707265A CN109100343A CN 109100343 A CN109100343 A CN 109100343A CN 201810707265 A CN201810707265 A CN 201810707265A CN 109100343 A CN109100343 A CN 109100343A
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tungsten oxide
preparation
oxide film
solid
substrate
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CN201810707265.3A
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Chinese (zh)
Inventor
赵倩
张洪文
刘广强
蔡伟平
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Hefei Institutes of Physical Science of CAS
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Hefei Institutes of Physical Science of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N21/658Raman scattering enhancement Raman, e.g. surface plasmons

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  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

本发明公开了一种氧化钨薄膜的制备方法。它先将钨酸铵粉末退火,得到三氧化钨粉末,再将三氧化钨粉末和水混合,得到三氧化钨水溶液,之后,先向三氧化钨水溶液中加入硼氢化钠后反应0.5‑5h,得到反应液,再对反应液依次进行固液分离、洗涤和干燥的处理,得到粉末状中间产物,最后,先将粉末状中间产物分散于乙醇中,得到分散液,再将分散液涂敷于衬底上,制得目的产物。它有着工艺简便、安全和所需设备价廉的特点,使制得的目的产物极易于广泛地商业化应用于对罗丹明6G和3,3’‑二乙基硫代三碳菁碘化物的快速痕量检测。

The invention discloses a preparation method of a tungsten oxide thin film. It first anneals the ammonium tungstate powder to obtain tungsten trioxide powder, then mixes the tungsten trioxide powder and water to obtain a tungsten trioxide aqueous solution, and then adds sodium borohydride to the tungsten trioxide aqueous solution and reacts for 0.5‑5h. The reaction solution is obtained, and then the reaction solution is sequentially subjected to solid-liquid separation, washing and drying to obtain a powdery intermediate product. Finally, the powdery intermediate product is first dispersed in ethanol to obtain a dispersion, and then the dispersion is coated on On the substrate, the target product was obtained. It has the characteristics of simple process, safety and low cost of required equipment, which makes the obtained target product very easy to be widely commercialized and applied to rhodamine 6G and 3,3'-diethylthiotricarbocyanine iodide rapid trace detection.

Description

The preparation method of tungsten oxide film
Technical field
The present invention relates to a kind of preparation method of film, especially a kind of preparation method of tungsten oxide film.
Background technique
Surface enhanced Raman scattering (SERS) technology, which refers to, is adsorbed on the tables such as the coarse noble metal gold, silver of Nano grade, copper Molecular Raman signal on face is obtained the phenomenon that greatly enlarging, because its have quickly, trace, lossless object is referred to Line identification etc. advantages and become powerful surface analysis tool, be widely used in electrochemistry, Surface Science, catalysis, medicine detection, The various fields such as biological food detection.Generally using noble metal nanometer material as Raman active substrate in SERS detection, preparation is high The key of the active noble metal Raman substrate of SERS is accurately to regulate and control the structure of noble metal nanometer material, and constructs There is the problems such as at high cost, time-consuming, complex process by the preparation process of structure-controllable SERS substrate.In addition, in actual inspection It surveys in application, the biocompatibility of noble metal is bad, and catalytic activity is high, be easy to cause the malformation of measured target molecule. To solve this problem, people have made some good tries and effort, as Chinese invention patent application CN106756853A in A kind of tungsten oxide substrate and preparation method thereof with Surface enhanced Raman scattering function that on May 31st, 2017 announces.The hair The tungsten oxide substrate recorded in bright patent application document is the thickness with hexagonal honeycomb shape nanostructure being overlying on substrate For the tungsten oxide film of 30-100nm;The nano aluminum bowl that preparation method is obtained using secondary or multiple anodic oxidation as substrate, Tungsten oxide nanometer thin film is prepared using magnetron sputtering method on substrate, then carries out oxygen content by making annealing treatment in hydrogen atmosphere Regulation, obtain product.Though this method can get the tungsten oxide substrate with Surface enhanced Raman scattering function, there is also Technical process is cumbersome, the equipment that uses is expensive, high-temperature hydrogen reduction method is uneconomical effectively and there is potential danger It is insufficient.
Summary of the invention
The technical problem to be solved in the present invention place in order to overcome the shortcomings in the prior art, provides a kind of simple process, peace Complete and the inexpensive tungsten oxide film of required equipment preparation method.
To solve technical problem of the invention, used technical solution is that the preparation method of tungsten oxide film includes liquid Steps are as follows for phase reduction method, especially completion:
Step 1, ammonium tungstate powder is first placed at 300-500 DEG C the 1-4h that anneals, obtains tungsten trioxide powder, according still further to three The weight ratio of tungsten oxide powder and water is that the ratio of 0.2-50:1-100 mixes the two, obtains tungstic acid aqueous solution;
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes sodium borohydride in tungstic acid aqueous solution Concentration remains 0.5-5mol/L, reacts 0.5-5h, obtains reaction solution, then reaction solution is successively separated by solid-liquid separation, wash and Dry processing obtains powdered intermediate product;
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid, then by dispersed liquid coating in substrate On, the tungsten oxide film that film thickness is 20-100 μm is made.
The further improvement of preparation method as tungsten oxide film:
Preferably, the partial size of ammonium tungstate powder is 0.1-10 μm.
Preferably, solid-liquid separation treatment is centrifuge separation, revolving speed 4000-6000r/min, time 5-10min.
Preferably, carrying out washing treatment is clear to solid progress 2-3 times isolated alternating using distilled water and ethyl alcohol It washes, separation solid is centrifuge separation when cleaning.
Preferably, it is dried as the solid after cleaning is placed at 50-70 DEG C and dries 12-24h.
Preferably, it applies as dipping, or spraying or spin coating.
Preferably, substrate is conductor substrate or semiconductor substrate or insulator substrates.
Beneficial effect compared with the existing technology is:
First, being characterized respectively using X-ray diffractometer and scanning electron microscope to purpose product obtained, simultaneously by its result In conjunction with preparation method it is found that purpose product is to be covered with tungsten oxide film on substrate;Wherein, the film thickness of tungsten oxide film is 20-100 μm。
Second, using purpose product obtained as SERS active-substrate, through respectively to rhodamine 6G (R6G) and 3,3 '-two Ethylenebis dithiocarbamate tricarbocyanine iodide (DTTCI) carry out the test of multiple more batches under various concentration, when the concentration of measured object R6G Down to 10-6The concentration of mol/L, DTTCI are down to 10-6It when mol/L, remains to be effectively detected out, and its detection is consistent Property and repeatability in purpose product multiple spot and any point all very it is good.
Third, preparation method is simple, scientific, efficient.Purpose product has not only been made --- tungsten oxide film also makes its tool There is the function of Surface enhanced Raman scattering, more there is that simple process, safe and required equipment are inexpensive;And then make obtained Purpose product be extremely easy to widely commercial applications in rhodamine 6G and 3,3 '-diethyl sulfides for the quick of tricarbocyanine iodide Trace detection.
Detailed description of the invention
Fig. 1 is one of the result for using X-ray diffraction (XRD) instrument to be characterized purpose product made from preparation method. XRD spectra shows that the ingredient of purpose product is tungsten oxide.
Fig. 2 is to being attached with 10-6What the purpose product of the rhodamine 6G of mol/L was characterized using laser Raman spectrometer One of as a result.
Fig. 3 is to being attached with 10-6The knot that the purpose product of the DTTCI of mol/L is characterized using laser Raman spectrometer One of fruit.
Specific embodiment
Preferred embodiment of the invention is described in further detail with reference to the accompanying drawing.
It buys from market or is voluntarily made first:
Ammonium tungstate powder;
Sodium borohydride;
Distilled water;
Ethyl alcohol;
Conductor substrate, semiconductor substrate and insulator substrates as substrate.
Then:
Embodiment 1
The specific steps of preparation are as follows:
Step 1, ammonium tungstate powder is first placed at 300 DEG C the 4h that anneals;Wherein, the partial size of ammonium tungstate powder is 0.1 μm, is obtained To tungsten trioxide powder.The two is mixed according still further to the ratio that the weight ratio of tungsten trioxide powder and water is 0.2:100, obtains three Tungsten oxide aqueous solution.
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes sodium borohydride in tungstic acid aqueous solution Concentration remains 0.5mol/L, reacts 5h, obtains reaction solution.Reaction solution is successively separated by solid-liquid separation, is washed and is dried again Processing;Wherein, solid-liquid separation treatment is centrifuge separation, and revolving speed 4000r/min, time 10min, carrying out washing treatment is to use The alternating that distilled water and ethyl alcohol carry out 2 times to isolated solid is cleaned, and separation solid is centrifuge separation when cleaning, is done Dry processing is dried for 24 hours for the solid after cleaning to be placed at 50 DEG C, obtains powdered intermediate product.
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid.Again by dispersed liquid coating in substrate On;Wherein, it applies as spin coating, substrate is insulator substrates.It is made as shown in Figure 1, Figure 2 and tungsten oxide shown in the curve in Fig. 3 is thin Film.
Embodiment 2
The specific steps of preparation are as follows:
Step 1, ammonium tungstate powder is first placed at 350 DEG C the 3h that anneals;Wherein, the partial size of ammonium tungstate powder is 0.5 μm, is obtained To tungsten trioxide powder.The two is mixed according still further to the ratio that the weight ratio of tungsten trioxide powder and water is 1:75, obtains three oxygen Change tungsten aqueous solution.
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes sodium borohydride in tungstic acid aqueous solution Concentration remains 1mol/L, reacts 3.5h, obtains reaction solution.Reaction solution is successively separated by solid-liquid separation, is washed and is dried again Processing;Wherein, solid-liquid separation treatment is centrifuge separation, and revolving speed 4500r/min, time 8.75min, carrying out washing treatment is to make Clean with the alternating that distilled water and ethyl alcohol carry out 2 times to isolated solid, separation solid is to be centrifugated when cleaning, It is dried as the solid after cleaning is placed at 55 DEG C and dries 21h, obtains powdered intermediate product.
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid.Again by dispersed liquid coating in substrate On;Wherein, it applies as spin coating, substrate is insulator substrates.It is made as shown in Figure 1, Figure 2 and tungsten oxide shown in the curve in Fig. 3 is thin Film.
Embodiment 3
The specific steps of preparation are as follows:
Step 1, ammonium tungstate powder is first placed at 400 DEG C the 3h that anneals;Wherein, the partial size of ammonium tungstate powder is 1 μm, is obtained Tungsten trioxide powder.The two is mixed according still further to the ratio that the weight ratio of tungsten trioxide powder and water is 17:50, obtains three oxidations Tungsten aqueous solution.
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes sodium borohydride in tungstic acid aqueous solution Concentration remains 2.5mol/L, reacts 2.5h, obtains reaction solution.Reaction solution is successively separated by solid-liquid separation, is washed and is dried again Processing;Wherein, solid-liquid separation treatment is to be centrifugated, revolving speed 5000r/min, time 7.5min, and carrying out washing treatment is It is cleaned using the alternating that distilled water and ethyl alcohol carry out 3 times to isolated solid, separation solid is centrifugation point when cleaning From being dried as the solid after cleaning to be placed at 60 DEG C and dries 18h, obtain powdered intermediate product.
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid.Again by dispersed liquid coating in substrate On;Wherein, it applies as spin coating, substrate is insulator substrates.It is made as shown in Figure 1, Figure 2 and tungsten oxide shown in the curve in Fig. 3 is thin Film.
Embodiment 4
The specific steps of preparation are as follows:
Step 1, ammonium tungstate powder is first placed at 450 DEG C the 2h that anneals;Wherein, the partial size of ammonium tungstate powder is 5 μm, is obtained Tungsten trioxide powder.The two is mixed according still further to the ratio that the weight ratio of tungsten trioxide powder and water is 33:25, obtains three oxidations Tungsten aqueous solution.
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes sodium borohydride in tungstic acid aqueous solution Concentration remains 3.5mol/L, reacts 1h, obtains reaction solution.Reaction solution is successively separated by solid-liquid separation, is washed and is dried again Processing;Wherein, solid-liquid separation treatment is centrifuge separation, and revolving speed 5500r/min, time 6.25min, carrying out washing treatment is to make Clean with the alternating that distilled water and ethyl alcohol carry out 3 times to isolated solid, separation solid is to be centrifugated when cleaning, It is dried as the solid after cleaning is placed at 65 DEG C and dries 15h, obtains powdered intermediate product.
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid.Again by dispersed liquid coating in substrate On;Wherein, it applies as spin coating, substrate is insulator substrates.It is made as shown in Figure 1, Figure 2 and tungsten oxide shown in the curve in Fig. 3 is thin Film.
Embodiment 5
The specific steps of preparation are as follows:
Step 1, ammonium tungstate powder is first placed at 500 DEG C the 1h that anneals;Wherein, the partial size of ammonium tungstate powder is 10 μm, is obtained To tungsten trioxide powder.The two is mixed according still further to the ratio that the weight ratio of tungsten trioxide powder and water is 50:1, obtains three oxygen Change tungsten aqueous solution.
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes sodium borohydride in tungstic acid aqueous solution Concentration remains 5mol/L, reacts 0.5h, obtains reaction solution.Reaction solution is successively separated by solid-liquid separation, is washed and is dried again Processing;Wherein, solid-liquid separation treatment is centrifuge separation, and revolving speed 6000r/min, time 5min, carrying out washing treatment is to use The alternating that distilled water and ethyl alcohol carry out 3 times to isolated solid is cleaned, and separation solid is centrifuge separation when cleaning, is done Dry processing dries 12h for the solid after cleaning to be placed at 70 DEG C, obtains powdered intermediate product.
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid.Again by dispersed liquid coating in substrate On;Wherein, it applies as spin coating, substrate is insulator substrates.It is made as shown in Figure 1, Figure 2 and tungsten oxide shown in the curve in Fig. 3 is thin Film.
It selects dipping or the spraying in coating respectively again, and selects the conductor substrate or semiconductor as substrate respectively Substrate, repeat above-described embodiment 1-5, be equally made as shown in Figure 1, Figure 2 and Fig. 3 in curve shown in tungsten oxide film.
Obviously, those skilled in the art can to the preparation method of tungsten oxide film of the invention carry out it is various change and Modification is without departing from the spirit and scope of the present invention.If in this way, belonging to power of the present invention to these modifications and changes of the present invention Within the scope of benefit requirement and its equivalent technologies, then the present invention is also intended to include these modifications and variations.

Claims (7)

1. a kind of preparation method of tungsten oxide film, including liquid phase reduction, it is characterised in that steps are as follows for completion:
Step 1, ammonium tungstate powder is first placed at 300-500 DEG C the 1-4h that anneals, obtains tungsten trioxide powder, according still further to three oxidations The weight ratio of tungsten powder and water is that the ratio of 0.2-50:1-100 mixes the two, obtains tungstic acid aqueous solution;
Step 2, sodium borohydride first is added into tungstic acid aqueous solution, makes concentration of the sodium borohydride in tungstic acid aqueous solution 0.5-5mol/L is remained, 0.5-5h is reacted, obtains reaction solution, then reaction solution is successively separated by solid-liquid separation, is washed and is dried Processing, obtain powdered intermediate product;
Step 3, it first disperses powdered intermediate product in ethyl alcohol, obtains dispersion liquid, then dispersed liquid coating is made on substrate Obtain the tungsten oxide film that film thickness is 20-100 μm.
2. the preparation method of tungsten oxide film according to claim 1, it is characterized in that the partial size of ammonium tungstate powder is 0.1- 10μm。
3. the preparation method of tungsten oxide film according to claim 1, it is characterized in that solid-liquid separation treatment is centrifuge separation, Its revolving speed is 4000-6000r/min, time 5-10min.
4. the preparation method of tungsten oxide film according to claim 1, it is characterized in that carrying out washing treatment be using distilled water and The alternating that ethyl alcohol carries out 2-3 time to isolated solid is cleaned, and separation solid is to be centrifugated when cleaning.
5. the preparation method of tungsten oxide film according to claim 1, it is characterized in that being dried is consolidating after cleaning State object, which is placed at 50-70 DEG C, dries 12-24h.
6. the preparation method of tungsten oxide film according to claim 1, it is characterized in that coating is dipping, or spraying, or rotation It applies.
7. the preparation method of tungsten oxide film according to claim 1, it is characterized in that substrate is conductor substrate or semiconductor Substrate or insulator substrates.
CN201810707265.3A 2018-07-02 2018-07-02 The preparation method of tungsten oxide film Pending CN109100343A (en)

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Citations (9)

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Publication number Priority date Publication date Assignee Title
CN1613777A (en) * 2004-11-11 2005-05-11 北京科技大学 Preparation for nanometer anhydrous wolframic acid powder
CN1745149A (en) * 2003-10-20 2006-03-08 住友金属矿山株式会社 Infrared shielding material microparticle dispersion, infrared shield, process for producing infrared shielding material microparticle, and infrared shielding material microparticle
CN101261905A (en) * 2008-01-30 2008-09-10 西安理工大学 A method for making WCu-CeO2 contact header material
CN101381106A (en) * 2007-09-05 2009-03-11 西南交通大学 Method for preparing nanometer tungsten trioxide powder
US20110155974A1 (en) * 2009-12-29 2011-06-30 Taiwan Textile Research Institute Near Infrared Absorbing Agent and Near Infrared Absorbing Film
CN102211789A (en) * 2010-04-08 2011-10-12 中国科学院合肥物质科学研究院 Method for preparing tungsten trioxide nano material
CN106739597A (en) * 2016-12-31 2017-05-31 武汉理工大学 A kind of all print multifunctional transparent film and preparation method thereof
CN107200357A (en) * 2016-03-18 2017-09-26 纳琳威纳米科技(上海)有限公司 A kind of heat insulation nano powder and its production and use
US10584202B2 (en) * 2014-04-14 2020-03-10 Toray Industries, Inc Photovoltaic element

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1745149A (en) * 2003-10-20 2006-03-08 住友金属矿山株式会社 Infrared shielding material microparticle dispersion, infrared shield, process for producing infrared shielding material microparticle, and infrared shielding material microparticle
CN1613777A (en) * 2004-11-11 2005-05-11 北京科技大学 Preparation for nanometer anhydrous wolframic acid powder
CN101381106A (en) * 2007-09-05 2009-03-11 西南交通大学 Method for preparing nanometer tungsten trioxide powder
CN101261905A (en) * 2008-01-30 2008-09-10 西安理工大学 A method for making WCu-CeO2 contact header material
US20110155974A1 (en) * 2009-12-29 2011-06-30 Taiwan Textile Research Institute Near Infrared Absorbing Agent and Near Infrared Absorbing Film
CN102211789A (en) * 2010-04-08 2011-10-12 中国科学院合肥物质科学研究院 Method for preparing tungsten trioxide nano material
US10584202B2 (en) * 2014-04-14 2020-03-10 Toray Industries, Inc Photovoltaic element
CN107200357A (en) * 2016-03-18 2017-09-26 纳琳威纳米科技(上海)有限公司 A kind of heat insulation nano powder and its production and use
CN106739597A (en) * 2016-12-31 2017-05-31 武汉理工大学 A kind of all print multifunctional transparent film and preparation method thereof

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Application publication date: 20181228