CN108919472B - Multi-spectroscope high-sensitivity coaxial optical lens cone - Google Patents
Multi-spectroscope high-sensitivity coaxial optical lens cone Download PDFInfo
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- 238000003384 imaging method Methods 0.000 claims abstract description 53
- 238000001392 ultraviolet--visible--near infrared spectroscopy Methods 0.000 claims abstract description 35
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- G—PHYSICS
- G02—OPTICS
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- G02B21/00—Microscopes
- G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention provides a multi-spectroscope type high-sensitivity coaxial optical lens barrel which comprises a first multi-spectroscope cube (1), a reflective objective lens (2), a second multi-spectroscope cube (3), an off-axis reflector module (4) and an imaging module with an illumination function, wherein the first multi-spectroscope cube is provided with a first lens; a first multi-spectroscope cube (1) for reflecting laser light and transmitting spectrum; the second multi-spectroscope cube (3) is connected with the imaging module with the lighting function and used for observing and focusing laser, and is connected with the off-axis reflector module (4) and used for collecting spectrum signals. According to the invention, through the reflection type spectrum collection light path and lens switching, UV-VIS-NIR full spectrum analysis is realized in batches, the spectral signal loss is small, the spatial resolution is higher, and the ambient light and stray light are almost completely shielded. The invention solves the technical problems that the prior art is difficult to consider the UV-VIS-NIR full spectrum analysis, the high spatial resolution and the spectrum analysis sensitivity, the focusing of a system light path is difficult, and the system light path is easy to be interfered by ambient light.
Description
Technical Field
The invention relates to the technical field of laser spectrum analysis, in particular to a multi-spectroscope high-sensitivity coaxial optical lens barrel.
Background
The micro-area laser induced breakdown spectroscopy (micro laser-induced breakdown spectroscopy, abbreviated as micro LIBS) technology is based on an atomic emission spectroscopy analysis principle, a pulse laser beam is focused on the surface of a sample, micro-area substances are ablated to generate luminous plasmas, and the element components and the content of the micro-area substances are obtained through analyzing atomic, ion and molecular spectrums of the plasmas. The micro-area LIBS technology has the advantages of capability of analyzing all elements including hydrogen, capability of analyzing non-conductive and refractory materials, no need of vacuum, high analysis speed and the like, has the spatial resolution of 1-5 microns and the depth resolution of submicron level, and is a novel surface component analysis method with unique advantages.
The optical system is the main body and the core of the micro-area LIBS system and generally consists of three functional modules of micro-area optical imaging, laser micro-area focusing and micro-area spectrum analysis. The micro-area optical imaging module is an optical microscope with infinite barrel length, and has the functions of observing the surface of a sample and searching and aligning a micro-area to be analyzed. The laser micro-zone focusing module functions to ablate the micro-zone material to be analyzed and to excite the plasma. The micro-region spectrum analysis module is used for collecting spectrum signals of plasma radiation and sending the signals to the spectrometer for analysis through the optical fiber. The integrated design of the three modules is the key of the design of the micro-area LIBS optical system.
In the integrated design of the three modules, the integration of the micro-area optical imaging and the laser micro-area focusing module generally adopts a coaxial design, the two modules share the optical axis of the objective lens, and a 45-degree spectroscope is adopted behind the objective lens to separate the two light paths. The integration of the micro-region spectrum analysis module has two kinds of coaxial design and paraxial design. In the paraxial design, the micro-region spectrum analysis module is separated from the micro-region optical imaging and laser micro-region focusing module, and has an independent oblique incidence type light path. The paraxial design has the advantages that the spectrum collection light path is not limited by the light transmission range of the light splitter in the micro-area optical imaging and laser micro-area focusing module, is easy to design, and can work in the UV-VIS-NIR full spectrum range; the system has the defects that the system has space competition with a laser micro-area focusing module, so that the numerical aperture of the system is difficult to be large, the spatial resolution and the spectrum collection efficiency of the micro-area LIBS are affected, the paraxial light path is sensitive to vibration, and the system stability is general. In the coaxial design, a micro-area spectrum analysis module is integrated with a micro-area optical imaging and laser micro-area focusing module, the micro-area spectrum analysis module, the micro-area optical imaging and the laser micro-area focusing module share the optical axis of an objective, and two 45-degree spectroscopes are adopted behind the objective to separate the three optical paths one by one. Compared with a paraxial design, the coaxial design can use a larger numerical aperture objective lens, has high spatial resolution, strong light collecting power and good system stability, but the light transmission range of the micro-area spectrum analysis module is limited by two 45-degree spectroscopes and other optical lenses, and UV-VIS-NIR full spectrum analysis is difficult to achieve. Thus, the search solution improves the above drawbacks, which is advantageous in promoting the practical use of coaxial micro-domain LIBS.
The Chinese patent literature (CN 101782517A, 21 days of publication), discloses a laser probe micro-area component analyzer based on a double laser light source, which has the structure as follows: the fixed wavelength laser, the attenuator, the beam expander, the aperture diaphragm and the first half mirror are sequentially positioned on the same horizontal optical path, and the wavelength tunable laser is reflected to the first half mirror through the second total reflection mirror and then has the same optical path with the laser beam of the fixed wavelength laser. The fixed wavelength laser and the wavelength tunable laser can be placed up and down or in parallel, and the opening sequence and the time delay of the fixed wavelength laser and the wavelength tunable laser are controlled by a digital time delay generator. The plasma spectrum acquisition time from the optical fiber probe to the enhanced CCD after being received by the optical fiber probe and transmitted to the grating spectrometer through the optical fiber is also controlled by the digital delay generator. The laser probe instrument excited by the double laser light sources has the advantages of low detection limit, high element analysis precision, good element selectivity and stability and reliability. Can be used for accurate qualitative and accurate quantitative analysis of trace elements and trace elements in various substance micro-areas. But still have shortcomings. The design adopts a single total reflection mirror which is movably arranged to separate an optical imaging light path and a spectrum collecting light path, and can reflect all UV-VIS-NIR spectrums, but the focusing of a system light path is difficult because the imaging light path and the spectrum collecting light path cannot be used simultaneously and the focus position of the latter is corrected by utilizing the former; the fixed semi-transparent and semi-reflective mirror is adopted to separate a laser light path from a spectrum light path, transmit laser and reflect spectrum signals, and is limited by an optical coating principle, a single semi-transparent and semi-reflective mirror can reflect partial wave band spectrums only, so that UV-VIS-NIR full spectrum analysis is difficult to realize, the spectrum signal loss is as high as 50%, and the analysis sensitivity of a micro-area LIBS is affected.
The Chinese patent literature (CN 103267746A, publication day of 8 months of 2013) discloses a macroscopic and microcell integrated laser probe component analyzer which comprises a laser, a frequency doubling module, two cage cubes, two laser wavelength reflectors, an industrial camera, a spectrum collector, an objective lens converter, a focusing objective lens, a spectrometer and a computer. The front end of the laser light outlet is provided with a frequency doubling module, and the laser is connected with a computer electric signal. The invention can perform accurate qualitative analysis and higher-precision quantitative analysis on macro and micro-area components of the substance, and can realize rapid seamless switching between the macro and micro-area component analysis; and secondly, the equipment is in a modularized design, has a compact structure, and enhances the integration level of the equipment. In addition, the functions of the modules are independent, and the operation and maintenance are easy; finally, the modularized design of the light path enables a user to calibrate the light path before use conveniently and rapidly, time is saved, and meanwhile analysis accuracy is higher. However, the design of the optical path still has defects. The scheme disclosed in the document adopts a broadband reflector with a light-passing hole in the center to separate a laser light path and a spectrum light path, laser light is transmitted through the light-passing hole in the center of the broadband reflector, and spectrum signals are reflected to a spectrum collector through the broadband reflector. The scheme can realize UV-VIS-NIR full spectrum analysis, but because the aperture of the objective lens is generally smaller, and the illumination light path and the spectrum light path share one light passing hole, the loss of spectrum signal intensity is large, so that the spatial resolution of the micro-area LIBS is poor, and the spectrum collection efficiency is low. The other scheme disclosed in the document adopts a fixed dichroic mirror to separate a laser light path from a spectrum light path, and has high reflectivity only for a laser beam with certain wavelength, but has transmission characteristics for lasers with other wavelengths or spectrum signals, but because of the limitation of an optical coating principle, the bandwidth of a reflection band of the dichroic mirror is generally more than 50nm, and besides the reflection band is difficult to transmit all UV-VIS-NIR spectrums, so that UV-VIS-NIR full spectrum analysis cannot be realized.
In summary, the defects of the existing micro-area LIBS coaxial optical system are mainly manifested in that the UV-VIS-NIR full spectrum analysis, high spatial resolution, high spectrum analysis sensitivity and difficult focusing of a system light path are difficult to be considered. In addition, the existing micro-area LIBS optical system is designed to mostly adopt an open optical path, so that ambient light easily enters an imaging detector and a spectrometer, and the weak light imaging and weak light detection capability of the system are affected.
Disclosure of Invention
The invention provides a multi-spectroscope type high-sensitivity coaxial optical lens barrel for solving the technical problems that the existing micro-area LIBS coaxial optical system is difficult to consider the full spectrum analysis of UV-VIS-NIR, high in spatial resolution and spectrum analysis sensitivity, difficult to focus a system light path and easy to be interfered by ambient light.
The multi-spectroscope high-sensitivity coaxial optical lens barrel is characterized in that: the system comprises a first multi-spectroscope cube, a reflective objective lens, a second multi-spectroscope cube, an off-axis reflector module and an imaging module with an illumination function; the reflective objective lens, the first multi-spectroscope cube and the second multi-spectroscope cube are sequentially connected along a vertical upward optical axis, and a light path channel penetrating the three is formed; the first multi-spectroscope cube comprises at least two switchable spectroscopes, and is used for reflecting incident laser to the reflective objective lens and transmitting light rays from the reflective objective lens to the second multi-spectroscope cube; the sum of the transmission bands of at least two spectroscopes in the first multi-spectroscope cube can completely cover the full spectrum range of UV-VIS-NIR; the second multi-spectroscope cube is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module is connected with the second multi-spectroscope cube and is positioned on the spectrum signal light path of the second multi-spectroscope and used for focusing spectrum signals and coupling the spectrum signals into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope and is positioned on the image signal light path of the second multi-spectroscope and used for illuminating and observing the surface of the sample.
The spectrum signal refers to a spectrum signal emitted by plasma excited by laser ablating a substance micro-area to be analyzed, the spectrum signal light path refers to a light path of the spectrum signal propagation, the light path starts from a reflection objective lens, passes through a first multi-spectroscope cube and a second multi-spectroscope cube in sequence, enters an off-axis reflector module and is communicated with an external optical fiber. The image signal light path refers to an illumination light ray and a light path transmitted by an anti-image signal formed after the illumination light ray is emitted by the surface of an object, wherein the light path starts from a reflective objective lens, passes through a first multi-spectroscope cube and a second multi-spectroscope cube in sequence, and enters an imaging module with an illumination function. The sum of the transmission bands of the at least two spectroscopes can completely cover the full spectral range of the UV-VIS-NIR, which means that the at least two spectroscopes are used in a separated mode, all spectral signals in the UV-VIS-NIR range can be transmitted to the second multi-spectroscope cube through the first multi-spectroscope cube, and then the full spectral range of the UV-VIS-NIR is collected and analyzed. The at least two switchable spectroscopes are optical elements capable of switching at least two spectroscopes rapidly, so that one spectroscope is located on an optical path and serves as a separation optical path.
Further, in the first multi-spectroscope cube, the first spectroscope is a laser dichroic mirror, and the second spectroscope is a laser beam splitter; the laser dichroic mirror and the laser beam splitter have equal optical thickness, and the coating films for effectively reflecting laser are positioned on one surface of the lens facing the incidence direction of the laser.
The laser dichroic mirror of the present invention has high reflectivity in the laser wavelength and the vicinity thereof, and has high transmittance in the remaining wavelength range, and is used as a main beam splitter. The laser beam splitter has the characteristics of partial reflection and partial transmission in the laser wavelength and the nearby range, and is generally used as a secondary spectroscope when the spectrum of a non-transmission area of the primary spectroscope needs to be analyzed. The sum of the laser beam splitter and the transmission band of the laser dichroic can completely cover the full spectrum range of UV-VIS-NIR. As described above, after the laser beam enters the first multi-beam splitter cube, the laser beam is reflected by the laser beam splitter or the laser dichroic mirror and enters the reflective objective lens; and the illumination light and the image signal are transmitted through a laser beam splitter or a laser dichroic mirror and then transmitted. And the laser beam splitter or the laser dichroic mirror is rapidly switched to enable one of the two to be positioned on the optical path, so that the transmission of the UV-VIS-NIR full spectrum signal to the second multi-spectroscope cube can be realized in a time-sharing and multiple times, and further the collection and analysis of the spectrum signal are carried out. Meanwhile, compared with the existing coaxial optical technology, the structure avoids the problems of poor signal transmittance and low analysis sensitivity of partial wave band spectrums, particularly ultraviolet spectrum.
Further, the second multi-spectroscope cube comprises at least two switchable optical lenses, wherein the first optical lens is a visible light beam splitter, one surface of the first optical lens facing the first multi-spectroscope cube is plated with a visible light beam splitting film, and the other surface of the first optical lens is plated with a visible light antireflection film; the second optical lens is a total reflection lens.
The visible light beam splitter has the characteristic of partial reflection and partial transmission in the visible light region; the total reflection mirror has the characteristic of high reflectivity in the UV-VIS-NIR spectral region. The two optical lenses can be rapidly switched, when microscopic optical imaging is carried out and the surface morphology of a sample is observed or the optical path is regulated, a visible light beam splitter is used, and an image signal is emitted from a second multi-spectroscope cube after passing through the visible light beam splitter along the vertical upward direction; when the spectrum analysis is carried out, the total reflection mirror is used, and the spectrum signal is reflected by the total reflection mirror and then emitted. At this time, the transmission light path of the second multi-spectroscope cube is an image signal light path, and the reflection light path is a spectrum signal light path, that is, the off-axis reflector module and the imaging module with illumination function are respectively positioned on the reflection light path and the transmission light path of the second multi-spectroscope cube.
Further, the total reflection mirror in the second multi-spectroscope cube can be replaced by a total transmission window mirror, and the optical thickness of the visible light beam splitter mirror is equal to that of the total transmission window mirror.
The full-transparent window mirror has the characteristic of high spectral transmittance in a spectral region of 190-1000 nm. The two optical lenses can be rapidly switched, when microscopic optical imaging is carried out and the surface morphology of a sample is observed or the optical path is regulated, a visible light beam splitter is used, and an image signal is reflected by the visible light beam splitter and enters an imaging module with an illumination function from a second multi-spectroscope cube; when the spectrum analysis is carried out, the full-transparent window mirror is used, and the spectrum signal enters the off-axis reflector module after being transmitted through the full-transparent window mirror. At this time, the reflected light path of the second multi-spectroscope cube is an image signal light path, and the transmitted light path is a spectrum signal light path, that is, the off-axis reflector module and the imaging module with illumination function are respectively located on the transmitted light path and the reflected light path of the second multi-spectroscope cube.
Further, the first multi-spectroscope cube and the second multi-spectroscope cube are both cube structures, the centers of the upper side face, the lower side face, the left side face and the right side face of the first multi-spectroscope cube are respectively provided with a light transmission hole, and the diagonal lines along the front side face and the rear side face of the first multi-spectroscope cube are also provided with optical guide rail plates; the optical guide rail plate is provided with an optical mounting surface; the optical mounting surface and the horizontal and vertical axes of the cube structure are provided with an included angle of 45 degrees; the optical mounting surface comprises at least two optical mounting positions for one-to-one mounting of at least two lenses; the optical guide rail plate is also used for enabling any one of the optical installation surfaces to be switched to the horizontal and vertical axial intersection point of the cube structure.
The invention can construct a light path channel through the light passing holes, more specifically, the light passing holes on the lower side surface of the first multi-spectroscope cube are communicated with the reflective objective lens, the upper side surface of the first multi-spectroscope cube is communicated with the light passing holes on the upper side surface of the second multi-spectroscope cube, and the light passing holes on the left side surface or the right side surface of the first multi-spectroscope can be used as laser light incidence holes for incidence of laser light. When two optical lenses in the second multi-spectroscope cube are a metal film total reflection lens and a visible light beam splitter lens, the light passing hole on the upper side surface of the second multi-spectroscope cube is used as an image signal outlet and is used for being communicated with an imaging module with an illumination function, and the light passing hole on the left or right side surface of the second multi-spectroscope cube is used as a spectrum signal outlet and is used for being communicated with an off-axis reflector module; when two optical lenses in the second multi-spectroscope cube are a full-transparent window lens and a visible light beam splitter lens, a light passing hole on the left side or the right side of the second multi-spectroscope cube is used as an image signal outlet and is used for being communicated with an imaging module with an illumination function, and a light passing hole on the upper side of the second multi-spectroscope cube is used as a spectrum signal outlet and is used for being communicated with an off-axis reflector module. Finally forming a laser incident light path comprising a first multi-spectroscope cube and a reflective objective lens; the system comprises a reflective objective lens, a first multi-spectroscope cube, a second multi-spectroscope cube and a spectrum signal light path of an off-axis reflector module; the system comprises a reflective objective lens, a first multi-spectroscope cube, a second multi-spectroscope cube, an image signal light path with an illumination function imaging module, and an objective lens optical axis shared by the three light paths. In the invention, the optical installation position on the intersection point of the horizontal and vertical axial directions of the cube structure in the optical installation surface can be defined as a working position, the rest optical installation positions are idle positions, and the working position and the idle position can be quickly interchanged by operating the movement of the optical guide rail plate. The lens in the optical installation position is specifically referred to as a spectroscope in the first multi-spectroscope cube, and is specifically referred to as an optical lens in the second multi-spectroscope cube. In the first multi-spectroscope cube, the optical guide rail plate is operated to move, so that the first spectroscope or the second spectroscope is positioned at a working position, and the spectroscope on the working position is positioned at the intersection point of a laser incident light path and an image signal light path and is used for separating the light paths; in the second multi-spectroscope cube, the optical guide rail plate is operated to move, so that the first optical lens or the second optical lens is positioned at a working position, and the optical lens at the working position is positioned at the intersection point of the spectrum signal light path and the image signal light path and is used for separating the light paths.
In the above scheme, a laser anti-reflection window mirror may be installed in a horizontal side light-passing hole, such as a left side light-passing hole, of the first spectroscope cube, at this time, external laser may be incident from the left side light-passing hole of the first multi-spectroscope cube, after passing through the laser anti-reflection window mirror, reflected by the spectroscope in the first multi-spectroscope cube, and then vertically enter the reflective objective lens downwards; the generated spectrum signal is vertically upwards, becomes parallel light after passing through the reflective objective lens, enters the first multi-spectroscope cube, passes through the spectroscope and enters the second multi-spectroscope cube; after entering the second multi-spectroscope cube along the vertical upward direction, one part of the spectrum signals are reflected by the beam splitter and then exit along the horizontal direction, and the other part of the spectrum signals are transmitted by the beam splitter and then exit along the vertical upward direction. The basic structures of the first multi-spectroscope cube and the second multi-spectroscope cube may be the same.
Further, the off-axis reflector module is used for focusing the incident spectrum signal to a focus perpendicular to the incident direction, and light holes are arranged on the two side panels of the incident light direction and the emergent light direction; the emergent light direction light-passing hole is used for connecting and enabling the external optical fiber to be positioned at the focus, and the incident light direction light-passing hole is used for communicating the second multi-spectroscope cube;
The imaging module with the illumination function comprises a fixed spectroscope cube, an illumination device and an imaging device; the fixed spectroscope cube is of a cube structure, the centers of the upper side face, the lower side face, the left side face and the right side face of the fixed spectroscope cube are provided with light passing holes, and a visible light beam splitter is fixedly arranged between the front side face and the rear side face of the fixed spectroscope cube; the visible light beam splitter has 45-degree included angles with the upper side, the lower side, the left side and the right side of the fixed beam splitter cube, and has partial reflection and partial transmission characteristics in the visible light region; the visible light beam splitter is coated with a visible light beam splitting film on one surface facing the cube of the second multi-spectroscope, and a visible light antireflection film on the other surface; one of the transmission light path and the reflection light path of the fixed spectroscope cube is provided with an illumination device, and the other light path is provided with an imaging device; one light through hole of the fixed spectroscope cube is used for communicating with the second multi-spectroscope cube; the lighting device is used for providing a lighting source; the imaging device is used for observing the surface of the sample.
Further, an off-axis reflector plated with a total reflection film is arranged in the off-axis reflector module and used for focusing the spectrum signal to a focus perpendicular to the incidence direction, and a light transmission hole is formed in the center of the panel; 2 to 3 fine tuning knobs are arranged on the back of the off-axis reflector and used for focusing; the light-transmitting hole in the emergent light direction of the off-axis reflector module is in threaded connection with a closed metal sleeve, and the center of the tail end of the metal sleeve is provided with a standard optical fiber mounting hole; the center of the optical fiber mounting hole is positioned at the focus of the off-axis reflector and is used for connecting an external optical fiber;
The lighting device consists of a collecting lens tube, a light source mounting frame and a lighting source which are arranged along the same axis, and the lighting source is arranged in the center of the light source mounting frame; the imaging device consists of an optical filter, a sleeve lens, a camera mounting frame and a camera which are arranged along the same axis; the optical filter has high optical density to laser and high transmittance to visible light; the camera mounting frame is positioned at the focus of the sleeve lens and can displace along the optical axis of the sleeve lens, the tail part of the camera mounting frame is provided with a rotatable camera interface, and the camera is mounted on the interface.
Further, the off-axis reflector and the reflective objective lens have an optimal focal length ratio, the numerical value of which is equal to the ratio of the numerical aperture of the reflective objective lens to the numerical aperture of the external spectrometer.
Further, all light paths from the reflective objective lens to the illumination light source, the camera and the optical fiber mounting hole are in an opaque closed environment. Specifically, the end faces of the reflecting objective lens, the first multi-spectroscope cube, the second multi-spectroscope cube, the fixed spectroscope cube and the off-axis reflector module are closely connected, and unused light-transmitting holes of the first multi-spectroscope cube, the second multi-spectroscope cube and the fixed spectroscope cube are completely shielded by a standard threaded light-shielding cover; a first telescopic shading sleeve is sleeved between the sleeve lens and the camera mounting frame; a second telescopic shading sleeve is sleeved between the condensing lens tube and the light source mounting frame.
The invention has the advantages that all light paths are in an opaque closed environment, on one hand, ambient light and stray light can be prevented from entering the camera and the optical fiber mounting hole, a dark background environment is provided for micro-optical imaging and micro-spectral analysis, the weak light imaging and weak light detection capability of a micro-area LIBS system is improved, and on the other hand, dust can be shielded, and the dust can be prevented from entering the internal light path, and the optical devices are polluted and damaged.
Further, the optical guide rail plate of the second multi-spectroscope cube and the optical guide rail plate of the first multi-spectroscope cube have an included angle of 90 degrees; the visible light beam splitter installed in the second multi-spectroscope cube, the laser dichroic mirror installed in the first multi-spectroscope cube and the laser beam splitter have equal optical thickness.
Further, the visible light beam splitter of the fixed beam splitter cube, the laser dichroic mirror and the laser beam splitter which are arranged in the first multi-beam splitter cube have equal optical thickness; the visible light beam splitter of the fixed spectroscope cube and the optical guide rail plate of the first multi-spectroscope cube have an included angle of 90 degrees.
Further, the optical guide rail plate is of a sliding rail structure, and any spectroscope can be adjusted to a working position through one-dimensional sliding of the optical guide rail plate.
Further, the optical guide rail plate is of a rotating wheel structure, and any spectroscope can be adjusted to a working position through rotation of the optical guide rail plate.
Further, in order to solve the problems in the prior art, the present invention provides another multi-spectroscope high-sensitivity coaxial optical lens barrel, which is characterized in that: the system comprises a first multi-spectroscope cube, a reflective objective lens, a second multi-spectroscope cube, an off-axis reflector module and an imaging module with an illumination function; the reflective objective lens, the first multi-spectroscope cube and the second multi-spectroscope cube are sequentially connected along a vertical upward optical axis, and a light path channel penetrating the three is formed; the first multi-spectroscope cube comprises a laser beam splitter for reflecting the incident laser to the reflective objective lens and transmitting the light from the reflective objective lens to the second multi-spectroscope cube; the second multi-spectroscope cube is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module is connected with the second multi-spectroscope cube and is positioned on the spectrum signal light path of the second multi-spectroscope and used for focusing spectrum signals and coupling the spectrum signals into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope and is positioned on the image signal light path of the second multi-spectroscope and used for illuminating and observing the surface of the sample; the second multi-spectroscope cube comprises at least two switchable optical lenses, wherein the first optical lens is a visible light beam splitter, one surface of the first optical lens facing the first multi-spectroscope cube is plated with a visible light beam splitting film, and the other surface of the first optical lens is plated with a visible light antireflection film; the second optical lens is a total reflection lens; and the off-axis reflector module is internally provided with an off-axis reflector plated with a total reflection film and used for focusing the spectrum signal to a focus perpendicular to the incidence direction.
The multi-spectroscope full-spectrum high-sensitivity coaxial optical lens barrel provided by the invention is provided with a spectroscope quick replacement device without dimming, the combination of the two spectroscopes is used for realizing the coverage of the UV-VIS-NIR full spectrum range, and the multi-spectroscope full-spectrum high-sensitivity coaxial optical lens barrel has high spectral transmittance in each wave band; the reflective type spectrum collection light path is formed by the reflective type objective lens and the off-axis reflecting mirror, the optical interface is few, the reflective type spectrum collection light path has high spectral reflectivity in the UV-VIS-NIR full spectral range, can carry out spectrum transmission with larger light transmittance, and is not influenced by chromatic aberration; the transmission rate of the spectrum signal is optimized by optimizing the focal length ratio of the off-axis reflector and the reflective objective lens and matching the numerical aperture of the external spectrometer; the multi-spectroscope type full-spectrum high-sensitivity coaxial optical lens barrel has the advantages that the light path is in a fully-closed environment, the interference of ambient light and stray light on optical imaging and spectral analysis is almost completely shielded, and the spectral analysis sensitivity is further improved. The combination of the measures enables the multi-spectroscope full-spectrum high-sensitivity coaxial optical lens barrel to have the full-spectrum analysis capability of UV-VIS-NIR and the high-spectrum analysis sensitivity. Meanwhile, the multi-spectroscope full-spectrum high-sensitivity coaxial optical lens barrel has high spatial resolution when being provided with a large-numerical aperture objective lens.
In summary, compared with the existing coaxial optical system for the micro-area LIBS, the coaxial optical system has the advantages of being capable of combining UV-VIS-NIR full spectrum analysis with high spatial resolution and spectrum analysis sensitivity, being convenient for focusing a system light path and being capable of avoiding interference by ambient light.
Drawings
Specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of a multi-beam splitter type high-sensitivity coaxial optical lens barrel according to the present invention;
FIG. 2 is a schematic view of a sliding track structure of an optical track board according to the present invention;
FIG. 3 is a schematic view of a wheel structure of an optical track plate according to the present invention;
FIG. 4 is a schematic view of another multi-beam splitter type high-sensitivity coaxial optical lens barrel according to the present invention;
In the figure: 1. the lens comprises a first multi-spectroscope cube, a 2-reflecting objective lens, a 3-second multi-spectroscope cube, a 4-off-axis reflector module, a 5-fixed spectroscope cube, a 6-collecting lens tube, a 7-light source mounting frame, a 8-illumination light source, a 9-optical filter, a 10-sleeve lens, a 11-camera mounting frame, a 12-camera, a 13-first telescopic shading sleeve and a 14-second telescopic shading sleeve.
Detailed Description
The following description of specific embodiments of the invention is further illustrated in the accompanying drawings, in which it is to be understood that the description of these embodiments is presented to aid in the understanding of the invention, and is not intended to limit the invention. In addition, technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1:
As shown in fig. 1 and 2, the multi-beam splitter type high-sensitivity coaxial optical lens barrel according to the present embodiment includes a first multi-beam splitter cube 1, a reflective objective lens 2, a second multi-beam splitter cube 3, an off-axis reflector module 4, and an imaging module with an illumination function; the reflective objective lens 2, the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 are sequentially connected along a vertical upward optical axis, and form a light path channel penetrating the three; the first multi-spectroscope cube 1 comprises at least two switchable spectroscopes, is used for reflecting incident laser to the reflective objective lens 2 and transmitting light rays from the reflective objective lens 2 to the second multi-spectroscope cube 3; the sum of the transmission bands of at least two spectroscopes in the first multi-spectroscope cube 1 can completely cover the full spectrum range of UV-VIS-NIR; the second multi-spectroscope cube 3 is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module 4 is connected with the second multi-spectroscope cube 3 and is positioned on a spectrum signal light path thereof and used for focusing spectrum signals and coupling the spectrum signals into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope cube 3 and is positioned on an image signal light path of the imaging module and used for illuminating and observing the surface of a sample.
The spectrum signal refers to a spectrum signal emitted by plasma excited by laser ablating a substance micro-area to be analyzed, and the spectrum signal light path refers to a light path of the spectrum signal propagation, wherein the light path starts from the reflecting objective lens 2, passes through the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 in sequence, enters the off-axis reflector module 4 and is communicated with an external optical fiber. The image signal light path refers to an illumination light ray and a light path transmitted by an image signal formed by the illumination light ray after the object surface is emitted, and the light path starts from the reflective objective lens 2, passes through the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 in sequence, and enters the imaging module with the illumination function. The sum of the transmission bands of the at least two spectroscopes can completely cover the full spectral range of the UV-VIS-NIR, which means that the at least two spectroscopes are used in a divided mode, all spectral signals in the UV-VIS-NIR range can be transmitted to the second multi-spectroscope cube 3 through the first multi-spectroscope cube 1, and then the full spectral range of the UV-VIS-NIR is collected and analyzed. The at least two switchable spectroscopes are optical elements capable of switching at least two spectroscopes rapidly, so that one spectroscope is located on an optical path and serves as a separation optical path.
In this embodiment, the laser may enter the reflective objective lens 2 from the horizontal direction of the first multi-beam splitter cube 1, after being reflected by the beam splitter, enter the second multi-beam splitter cube 3 through the vertical light path of the first multi-beam splitter cube 1, and ablate the substance micro-area to generate plasma, and the spectral signal of the plasma radiation is collected by the reflective objective lens 2, propagates in parallel light along the vertical upward direction, enters the first multi-beam splitter cube 1, and passes through the beam splitter; after the optical path separation is carried out in the second multi-spectroscope cube 3, the spectrum signals are conducted to the optical path where the off-axis reflector module 4 is located, and then the spectrum signals are collected and sent to an external spectrometer for analysis. The total light spectrum of the UV-VIS-NIR is completely covered by the sum of the transmission bands of at least two spectroscopes in the first multi-spectroscope cube 1, namely, the UV-VIS-NIR total light spectrum analysis can be completed by adjusting the spectroscopes of the first multi-spectroscope cube 1, meanwhile, the total light spectrum analysis is realized by adopting a time-sharing switching spectroscope, and the spatial resolution and the spectral signal intensity are not greatly lost by matching with the coaxial design, so that the luminous flux is high, the spectral coupling efficiency is high, and the spatial resolution and the spectral analysis sensitivity can be effectively ensured. The embodiment can realize the required three-module function of the micro-area LIBS optical system and also consider the full spectrum analysis of UV-VIS-NIR, the spatial resolution and the spectrum analysis sensitivity.
Embodiment 2:
on the basis of the above embodiment, embodiment 2 is proposed, as shown in fig. 1 and 2,
In the first multi-spectroscope cube 1, a first spectroscope is a laser dichroic mirror, and a second spectroscope is a laser beam splitter; the laser dichroic mirror and the laser beam splitter have equal optical thickness, and the coating films for effectively reflecting laser are positioned on one surface of the lens facing the incidence direction of the laser.
The laser dichroic mirror according to the present embodiment has a high reflectance in the laser wavelength and the vicinity thereof, and a high transmittance in the remaining wavelength range, and is used as a main dichroic mirror. The laser beam splitter has the characteristics of partial reflection and partial transmission in the laser wavelength and the nearby range, and is used as a secondary spectroscope when the spectrum of the area which can not be transmitted by the primary spectroscope needs to be analyzed. The sum of the laser beam splitter and the transmission band of the laser dichroic can completely cover the full spectrum range of UV-VIS-NIR. As described above, after the laser beam enters the first multi-beam splitter cube, it is reflected by the laser beam splitter or the laser dichroic mirror, enters the reflective objective lens 2, is focused on the sample surface by the reflective objective lens 2, and the ablated material generates plasma. The reflection spectrum (image signal) of the sample surface and the spectrum signal emitted by the plasma are collected by the reflection objective lens 2, enter the first multi-spectroscope cube 1 in the form of parallel light, and enter the second multi-spectroscope cube 3 through the laser dichroic mirror or the laser beam splitter. The laser beam splitter or the laser dichroic mirror can be switched rapidly to enable one of the two to be positioned on the light path, so that the transmission of the UV-VIS-NIR full spectrum signal to the second multi-spectroscope cube 3 can be realized in a time-sharing and multiple times, and further the collection and analysis of the spectrum signal can be carried out. Meanwhile, compared with the existing coaxial optical technology, the structure avoids the problems of poor signal transmittance and low analysis sensitivity of partial wave band spectrums, particularly ultraviolet spectrum.
In this embodiment, the optical thicknesses of the first beam splitter and the second beam splitter are equal, and the coating films for effectively reflecting the laser are both positioned on one surface of the lens facing the incident direction of the laser, and the exchange between the two surfaces does not affect the reflection light path and the transmission light path of the first multi-beam splitter cube 1. Typically, a first beam splitter is used; a second beam splitter is used when it is desired to analyze the low transmission region spectrum of the laser dichroic mirror.
The first multi-beam splitter cube 1 in this embodiment can be designed for ultraviolet wavelength lasers with wavelengths shorter than 400 nm.
Example 3:
On the basis of the above embodiment, embodiment 3 is proposed, as shown in fig. 1,
The second multi-spectroscope cube 3 comprises at least two switchable optical lenses, wherein the first optical lens is a visible light beam splitter, one surface of the first optical lens facing the first multi-spectroscope cube 1 is plated with a visible light beam splitting film, and the other surface of the first optical lens is plated with a visible light antireflection film; the second optical lens is an ultraviolet enhanced aluminum film total reflection lens.
The visible light beam splitter according to the embodiment has a partial reflection and partial transmission characteristic in the visible light region; the ultraviolet enhanced aluminum film total reflection mirror has the characteristic of high reflectivity in a UV-VIS-NIR spectral region. The two optical lenses can be rapidly switched, when microscopic optical imaging is carried out and the surface morphology of a sample is observed, a visible light beam splitter is used, and an image signal is emitted from the second multi-spectroscope cube 3 after passing through the visible light beam splitter along the vertical upward direction; when the spectrum analysis is carried out, a metal film total reflection mirror is used, and the spectrum signal is emitted after being reflected by the total reflection mirror. At this time, the transmission light path of the second multi-spectroscope cube 3 is an image signal light path, and the reflection light path is a spectrum signal light path, that is, the off-axis reflector module 4 and the imaging module with illumination function are respectively located on the reflection light path and the transmission light path of the second multi-spectroscope cube 3.
In this embodiment, the second optical lens is an ultraviolet-enhanced aluminum film total reflection lens, so that the coaxial LIBS optical system using the device can work in the ultraviolet spectrum range. When other total reflection mirrors are used, optical path separation in the UV-VIS-NIR spectral region can also be achieved.
Example 4:
On the basis of the above embodiment, embodiment 4 is proposed, as shown in fig. 2,
The ultraviolet enhancement aluminum film total reflection mirror in the second multi-spectroscope cube 3 can be replaced by a total transmission window mirror, and the optical thickness of the visible light beam splitter is equal to that of the total transmission window mirror.
The full-transparent window mirror in this embodiment has a characteristic of high spectral transmittance in the 190-1000 nm spectral region. The two optical lenses can be rapidly switched, when microscopic optical imaging is carried out and the surface morphology of a sample is observed, a visible light beam splitter is used, and an image signal is reflected by the visible light beam splitter and then enters an imaging module with an illumination function from a second multi-spectroscope cube 3; in the case of spectral analysis, a full-transparent window mirror is used, and the spectral signal is transmitted through the full-transparent window mirror and then enters the off-axis reflector module 4. At this time, the reflected light path of the second multi-spectroscope cube 3 is an image signal light path, and the transmitted light path is a spectrum signal light path, that is, the off-axis reflector module 4 and the imaging module with illumination function are respectively located on the transmitted light path and the reflected light path of the second multi-spectroscope cube 3.
Example 5:
Based on the above embodiments, embodiment 5 is provided, as shown in fig. 1 and fig. 2, the first multi-beam splitter cube 1 and the second multi-beam splitter cube 3 are both in a cube structure, the centers of the upper, lower, left and right sides of the first multi-beam splitter cube are all provided with light transmission holes, and optical guide rail plates are further arranged along the diagonal lines of the front and rear sides of the first multi-beam splitter cube; the optical guide rail plate is provided with an optical mounting surface; the optical mounting surface and the horizontal and vertical axes of the cube structure are provided with an included angle of 45 degrees; the optical mounting surface comprises at least two optical mounting positions for one-to-one mounting of at least two lenses; the optical guide rail plate is also used for enabling any one of the optical installation surfaces to be switched to the horizontal and vertical axial intersection point of the cube structure.
The implementation mode of the optical guide rail plate comprises, but is not limited to, a slide rail structure shown in fig. 3, and any spectroscope adjusting working position can be adjusted without optical path adjustment through one-dimensional sliding of the optical guide rail plate; the sliding structure can be manual or electric. The sliding rail structure has the advantages of simplicity and compactness.
In this embodiment, the light path channel is constructed through the light passing hole, more specifically, the light passing hole on the lower side of the first multi-beam splitter cube 1 is communicated with the reflective objective lens 2, the upper side is communicated with the light passing hole on the upper side of the second multi-beam splitter cube 3, and the light passing hole on the left side or the right side of the first multi-beam splitter can be used as a laser light incident hole for laser light incidence. When two optical lenses in the second multi-spectroscope cube 3 are a metal film total reflection lens and a visible light beam splitter lens, the light passing hole on the upper side surface of the second multi-spectroscope cube 3 is used as an image signal outlet and is used for being communicated with an imaging module with an illumination function, and the light passing hole on the left or right side surface of the second multi-spectroscope cube 3 is used as a spectrum signal outlet and is used for being communicated with the off-axis reflector module 4; when two optical lenses in the second multi-spectroscope cube 3 are a full-transparent window lens and a visible light beam splitter lens, a light passing hole on the left side or the right side of the second multi-spectroscope cube 3 is used as an image signal outlet and is used for being communicated with an imaging module with an illumination function, and a light passing hole on the upper side of the second multi-spectroscope cube 3 is used as a spectrum signal outlet and is used for being communicated with the off-axis reflector module 4. Finally forming a laser incident light path comprising a first multi-spectroscope cube 1 and a reflective objective lens 2; the system comprises a reflective objective lens 2, a first multi-spectroscope cube 1, a second multi-spectroscope cube 3 and a spectrum signal light path of an off-axis reflector module 4; the system comprises a reflective objective lens 2, a first multi-spectroscope cube 1, a second multi-spectroscope cube 3 and an image signal light path with an illumination function imaging module, wherein the three light paths share an objective lens optical axis. In this embodiment, the optical installation position located on the intersection point of the horizontal axis and the vertical axis of the cube structure in the optical installation surface may be defined as a working position, the rest optical installation positions are idle positions, and the working position and the idle position may be quickly interchanged by operating the movement of the optical guide rail plate. The lenses in the optical installation position are specifically referred to as spectroscopes in the first multi-spectroscope cube 1, and the lenses in the second multi-spectroscope cube 3. In the first multi-spectroscope cube 1, the optical guide rail plate is operated to move, so that the first spectroscope or the second spectroscope is positioned at a working position, and the spectroscope on the working position is positioned at the intersection point of a laser incident light path and an image signal light path and is used for separating light paths; in the second multi-spectroscope cube 3, the optical guide rail plate is operated to move, so that the first optical lens or the second optical lens is positioned at a working position, and the optical lens at the working position is positioned at the intersection point of the spectrum signal light path and the image signal light path and is used for separating the light paths.
In this embodiment, the horizontal side light-transmitting hole, such as the left side light-transmitting hole, of the first multi-beam splitter cube 1 may be provided with a laser anti-reflection window lens for blocking environmental dust from entering the lens barrel; at this time, external laser can enter from the left side light hole of the first multi-spectroscope cube 1, pass through the laser anti-reflection window mirror, and vertically enter the reflective objective lens 2 downwards after being reflected by the spectroscope in the first multi-spectroscope cube 1; the generated spectrum signal is vertically upwards, becomes parallel light after passing through the reflective objective lens 2, enters the first multi-spectroscope cube 1, passes through the spectroscope and enters the second multi-spectroscope cube 3; and after the spectrum signal enters the second multi-spectroscope cube 3 along the vertical upward direction, the optical path separation is carried out. The basic structures of the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 may be the same.
Example 6
On the basis of the above embodiment, embodiment 6 is proposed, as shown in fig. 1 and 2,
The off-axis reflector module 4 is used for focusing an incident spectrum signal to a focus perpendicular to an incident direction, and light holes are formed in two side panels of the incident light direction and the emergent light direction; the emergent light direction light-passing hole is used for connecting and enabling the external optical fiber to be positioned at the focus, and the incident light direction light-passing hole is used for communicating the second multi-spectroscope cube 3;
the imaging module with the illumination function comprises a fixed spectroscope cube 5, an illumination device and an imaging device; the fixed spectroscope cube 5 is of a cube structure, the centers of the upper side face, the lower side face, the left side face and the right side face of the fixed spectroscope cube are provided with light passing holes, and a visible light beam splitter is fixedly arranged between the front side face and the rear side face of the fixed spectroscope cube; the visible light beam splitter has an included angle of 45 degrees with the upper, lower, left and right sides of the fixed beam splitter cube 5, and has a partial reflection and partial transmission characteristic in the visible light region; the visible light beam splitter is coated with a visible light beam splitting film on one surface facing the second multi-spectroscope cube 3, and is coated with a visible light antireflection film on the other surface; one of the transmission light path and the reflection light path of the fixed spectroscope cube 5 is provided with an illumination device, and the other light path is provided with an imaging device; one light through hole of the fixed spectroscope cube 5 is used for communicating with the second multi-spectroscope cube 3; the lighting device is used for providing an illumination light source 8; the imaging device is used for observing the surface of the sample.
In this embodiment, a replaceable off-axis reflector is installed inside the off-axis reflector module 4 to focus the parallel incident spectrum signal to a focal point in a direction perpendicular to the off-axis reflector, and then the spectrum signal is transmitted to an external optical fiber through a horizontal and vertical optical path formed by the internal light passing hole of the off-axis reflector module, and enters an external spectrum analyzer. When in use, the coaxial optical lens barrel needs to be externally connected with an optical fiber and a spectrometer. After being collected by the reflecting objective lens 2, the plasma spectrum signals respectively pass through the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 in the form of parallel light, enter the off-axis reflector module 4, are reflected by the off-axis reflector and focused to the focus position, are coupled into an external optical fiber, and are sent into the spectrometer for analysis. The imaging module with the illumination function realizes the coaxial design of illumination and observation through the internal light path and the visible light beam splitter.
Example 7:
On the basis of the above embodiment, embodiment 7 is proposed, as shown in fig. 1 and 2,
An off-axis reflector plated with an ultraviolet enhancement aluminum film is arranged in the off-axis reflector module 4 and used for focusing a spectrum signal to a focus perpendicular to the incidence direction, and a light transmission hole of the off-axis reflector module is arranged in the center of the panel; 2 to 3 fine tuning knobs are arranged on the back of the off-axis reflector and used for focusing; the light-transmitting hole in the emergent light direction of the off-axis reflector module 4 is in threaded connection with a closed metal sleeve, and the center of the tail end of the metal sleeve is provided with a standard optical fiber mounting hole; the center of the optical fiber mounting hole is positioned at the focus of the off-axis reflector and is used for connecting an external optical fiber;
The lighting device consists of a collecting lens tube 6, a light source mounting frame 7 and a lighting source 8 which are arranged along the same axis, and the lighting source 8 is arranged at the center of the light source mounting frame 7; the imaging device consists of an optical filter 9, a sleeve lens 10, a camera mounting frame 11 and a camera 12 which are arranged along the same axis; the optical filter 9 has high optical density for laser and high transmission for visible light; the camera mounting frame 11 is located at the focus of the sleeve lens 10 and is displaceable along the optical axis of the sleeve lens 10, and the tail part thereof is provided with a rotatable camera interface, on which the camera 12 is mounted.
In this embodiment, the light emitted by the illumination light source 8 is focused by the condenser tube 6, and then is focused to the surface of the sample to form visible light spots through the fixed beam splitter cube 5, the second multi-beam splitter cube 3, the first multi-beam splitter cube 1 and the reflective objective lens 2; the visible spot may also indicate the focal position while illuminating the sample surface. In the imaging device, the camera mount 11 is located at the focus of the sleeve lens 10, and can be precisely displaced along the optical axis of the sleeve lens 10, so that the image of the sample surface can be accurately imaged on the photosensitive surface of the camera 12. The light reflected by the surface of the sample is collected by the reflective objective lens 2, and then is focused to the camera 12 through the sleeve lens 10 after passing through the first multi-spectroscope cube 1, the second multi-spectroscope cube 3, the fixed spectroscope cube 5 and the optical filter 9 in the form of parallel light. At this time, the illumination device and the imaging device can be respectively installed on the reflection light path and the transmission light path of the fixed spectroscope cube 5.
In this embodiment, the fine tuning knob at the rear of the off-axis reflector is used for precisely adjusting the inclination angle of the off-axis reflector and realizing precise adjustment of the focusing position.
In this embodiment, the reflection type objective lens 2 with an ultraviolet-enhanced aluminum film coating film is preferable.
In this embodiment, the multi-spectroscope full-spectrum high-sensitivity coaxial optical lens barrel can be divided into three functional modules of laser micro-area focusing, spectrum collection analysis and micro-optical imaging according to functions. The laser micro-zone focusing module comprises a first multi-spectroscope cube 1 and a reflective objective lens 2; the spectrum collection and analysis module comprises a second multi-spectroscope cube 3 and an off-axis reflector cube 4; the microscopic optical imaging module comprises a fixed spectroscope cube 5, a collecting lens tube 6, a light source mounting frame 7, an illumination light source 8, an optical filter 9, a sleeve lens 10, a camera mounting frame 11 and a camera 12. The reflective objective lens 2 is shared by three large modules. The focusing of the laser micro-area is separated from the optical axes of the other two large modules at the beam splitter installed at the center of the first multi-beam splitter cube 1 at 45 degrees, the laser is positioned in a reflection light path, and the spectrum signal and the image signal are positioned in a transmission light path. The optical axis of the spectral collection analysis and microscopic optical imaging module is separated at an optical lens mounted at 45 degrees in the center of the second multi-spectroscope cube (3).
In the embodiment, a reflective spectrum collection light path is formed by the reflective objective lens 2 and the off-axis reflecting mirror, so that the optical interface is few, the reflective spectrum collection light path has high spectral reflectivity in the UV-VIS-NIR full spectral range, and is not influenced by chromatic aberration; and meanwhile, an off-axis reflector plated with an ultraviolet enhancement aluminum film is selected, the off-axis reflector has high reflectivity in the range of more than 190-1100nm, and the optical path formed by the combination of the ultraviolet enhancement aluminum film total reflection mirror or the total transmission window mirror in the second multi-spectroscope cube 3 and the two block spectroscopes in the first multi-spectroscope cube 1 can transmit the spectrum in the range of more than 190-1100nm, so that the coaxial LIBS system can work in the ultraviolet region and has higher light transmission efficiency.
Example 8:
on the basis of the above embodiment, embodiment 8 is proposed, as shown in fig. 1 and 2,
The off-axis mirror and the reflective objective lens 2 have an optimal focal length ratio, the numerical value of which is equal to the ratio of the numerical aperture of the reflective objective lens 2 to the numerical aperture of the external spectrometer.
The multi-spectroscope type full-spectrum high-sensitivity coaxial optical lens barrel disclosed by the invention is used by being externally connected with an optical fiber and being connected with a spectrometer. In general, the numerical aperture NAo of the reflective objective lens 2 is larger than the receivable numerical aperture NAs of the spectrometer. If no numerical aperture matching is performed, a portion of the spectrum signal collected by the reflective objective lens 2 may not be received by the external spectrometer due to the excessive incident angle, resulting in transmission loss. The optimal focal length ratio of the off-axis reflector to the reflective objective lens 2 is equal to the ratio of the numerical aperture of the reflective objective lens 2 to the numerical aperture of the external spectrometer, at the moment, the maximum aperture angle of the spectrum signal output by the off-axis reflector is exactly equal to the maximum receivable aperture angle of the external spectrometer, and the spectrum signal output by the off-axis reflector module 4 is almost completely received by the external spectrometer effectively, so that the spectrum transmission rate is optimal.
Example 9:
On the basis of the above embodiment, embodiment 9 is proposed, as shown in fig. 1 and 2,
All light paths from the reflective objective lens 2 to the illumination light source 8, the camera 12 and the optical fiber mounting hole are in an opaque closed environment.
Specifically, in the embodiment, the end surfaces of the reflective objective lens 2, the first multi-spectroscope cube 1, the second multi-spectroscope cube 3, the fixed-type spectroscope cube 5 and the off-axis reflector module 4 are closely connected, and the unused light-passing holes of the first multi-spectroscope cube 1, the second multi-spectroscope cube 3 and the fixed-type spectroscope cube 5 are completely shielded by a standard threaded light-shielding cover; a first telescopic shading sleeve 13 is sleeved between the sleeve lens 10 and the camera mounting frame 11; a second telescopic shading sleeve 14 is sleeved between the condensing lens tube 6 and the light source mounting frame 7.
In this embodiment, all the light paths from the reflective objective lens 2 to the illumination source 8, the camera 12, and the off-axis reflector module 4 are in an opaque closed environment. The end faces of the reflective objective lens 2, the first multi-spectroscope cube 1, the second multi-spectroscope cube 3, the fixed spectroscope cube 5 and the off-axis reflector module 4 are tightly connected, and the unused light passing holes of the first multi-spectroscope cube 1, the second multi-spectroscope cube 3 and the fixed spectroscope cube 5 are completely shielded by a standard threaded light shielding cover. All light paths are in an opaque closed environment, so that on one hand, ambient light and stray light can be prevented from entering the camera 12 and the optical fiber mounting hole, a dark background environment is provided for micro-optical imaging and micro-spectral analysis, the weak light imaging and weak light detection capability of the micro-area LIBS system is improved, and on the other hand, dust can be shielded, and the dust is prevented from entering an internal light path, so that the optical lenses are polluted and damaged.
Example 10:
on the basis of the above embodiment, embodiment 10 is proposed, as shown in fig. 1 and 2,
The optical guide rail plate of the second multi-spectroscope cube 3 and the optical guide rail plate of the first multi-spectroscope cube 1 have an included angle of 90 degrees; the visible light beam splitter installed in the second multi-beam splitter cube 3 has the same optical thickness as the laser dichroic mirror and the laser beam splitter installed in the first multi-beam splitter cube 1.
The structure of the embodiment can offset the offset of the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 to the optical axis of the transmitted light.
Example 11:
On the basis of the above embodiment, embodiment 11 is proposed, as shown in fig. 1 and 2,
The visible light beam splitter of the fixed beam splitter cube 5 has the same optical thickness as the laser dichroic mirror and the laser beam splitter which are arranged in the first multi-beam splitter cube 1; the visible light beam splitter of the fixed beam splitter cube 5 has an included angle of 90 degrees with the optical guide rail plate of the first multi-beam splitter cube 1.
The structure of the embodiment can offset the offset of the first multi-beam splitter cube 1 and the fixed beam splitter cube 5 to the optical axis of the transmitted light.
Example 12:
Based on the above embodiments, embodiment 12 is provided, as shown in fig. 4, the optical guide rail plate has a rotating wheel structure, and any beam splitter can be adjusted to the working position by rotating the optical guide rail plate.
In this embodiment, the optical guide rail plate is of a rotating wheel structure, and is characterized in that at least two lenses are equidistantly distributed on a circumference and can rotate around a circle center, and by rotating the rotating wheel, the lenses at the working position can be quickly replaced without optical path adjustment; the rotating wheel structure has higher replacement speed; the rotating wheel structure can be manual or electric.
Example 13:
as shown in fig. 1, the multi-beam splitter type high-sensitivity coaxial optical lens barrel according to the present embodiment includes a first multi-beam splitter cube 1, a reflective objective lens 2, a second multi-beam splitter cube 3, an off-axis reflector module 4, and an imaging module with an illumination function; the reflective objective lens 2, the first multi-spectroscope cube 1 and the second multi-spectroscope cube 3 are sequentially connected along a vertical upward optical axis, and form a light path channel penetrating the three; the first multi-spectroscope cube 1 comprises at least one spectroscope for reflecting the incident laser to the reflective objective lens 2 and transmitting the light from the reflective objective lens 2 to the second multi-spectroscope cube 3; the second multi-spectroscope cube 3 is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module 4 is connected with the second multi-spectroscope cube 3, is positioned on a second multi-spectroscope spectrum signal light path, and is used for focusing spectrum signals and coupling the spectrum signals into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope and is positioned on the image signal light path of the second multi-spectroscope and used for illuminating and observing the surface of the sample; the second multi-spectroscope cube 3 comprises at least two switchable optical lenses, wherein the first optical lens is a visible light beam splitter, one surface of the first optical lens facing the first multi-spectroscope cube 1 is plated with a visible light beam splitting film, and the other surface of the first optical lens is plated with a visible light antireflection film; the second optical lens is a total reflection lens; the off-axis reflector module 4 is internally provided with an off-axis reflector plated with a total reflection film and is used for focusing the spectrum signal to a focus perpendicular to the incidence direction.
At least one beam splitter included in the first multi-beam splitter cube 1 in this embodiment may be selected as at least one laser beam splitter. The working principle is as follows: when laser can enter from the horizontal direction of the first multi-spectroscope cube 1, after being reflected by the laser beam splitter, the laser enters the reflective objective lens 2 vertically downwards, plasma is generated in an ablated substance micro area, a spectrum signal of the plasma radiation is collected by the reflective objective lens 2, propagates in a parallel light form along the vertically upwards direction, enters the first multi-spectroscope cube 1, passes through the laser beam splitter, passes through a vertical light path of the first multi-spectroscope cube 1 and enters the second multi-spectroscope cube 3; after the optical path separation is carried out in the second multi-spectroscope cube 3, the spectrum signals are conducted to the optical path where the off-axis reflector module 4 is located, and then the spectrum signals are collected and sent to an external spectrometer for analysis. When an ultraviolet wavelength laser with a wavelength shorter than 400 nm is used for incidence, the laser beam splitter in the first multi-beam splitter cube 1 can transmit near full-band signal spectrum. The design of the second multi-spectroscope cube 3, the reflective objective lens and the off-axis reflector is matched, the whole light path can transmit spectrum signals close to the range of UV-VIS-NIR, the spatial resolution is not limited, the spectrum signal intensity cannot be greatly lost, the luminous flux is large, the spectrum coupling efficiency is high, the spatial resolution and the spectrum analysis sensitivity can be effectively ensured, meanwhile, the light path separation of the second multi-spectroscope cube 3 is utilized, the spectrum signal light path and the image signal light path can be utilized in a time-sharing manner, and the spectrum collection and the light path focusing are realized conveniently. The embodiment can realize the required three-module function of the micro-area LIBS optical system and also consider the full spectrum analysis of UV-VIS-NIR, the spatial resolution and the spectrum analysis sensitivity.
All the non-explicitly defined parts in this embodiment are identical with the relevant definitions in embodiment 1 and embodiment 2.
Claims (11)
1. A multi-spectroscope high-sensitivity coaxial optical lens barrel, characterized in that: the system comprises a first multi-spectroscope cube (1), a reflective objective lens (2), a second multi-spectroscope cube (3), an off-axis reflector module (4) and an imaging module with an illumination function; the reflective objective lens (2), the first multi-spectroscope cube (1) and the second multi-spectroscope cube (3) are sequentially connected along a vertical upward optical axis, and an optical path channel penetrating the three is formed; the first multi-spectroscope cube (1) comprises at least two switchable spectroscopes, is used for reflecting the incident laser to the reflective objective lens (2) and transmitting the light rays from the reflective objective lens (2) to the second multi-spectroscope cube (3); the sum of the transmission bands of at least two spectroscopes in the first multi-spectroscope cube (1) can completely cover the full spectral range of UV-VIS-NIR; the second multi-spectroscope cube (3) is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module (4) is connected with the second multi-spectroscope cube (3) and positioned on a spectrum signal light path thereof and is used for focusing spectrum signals and coupling the spectrum signals into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope cube (3) and is positioned on the image signal light path of the imaging module and used for illuminating and observing the surface of a sample.
2. The multi-beam splitter type high-sensitivity coaxial optical lens barrel according to claim 1, wherein: in the first multi-spectroscope cube (1), a first spectroscope is a laser dichroic mirror, and a second spectroscope is a laser beam splitter; the laser dichroic mirror and the laser beam splitter have equal optical thickness, and the coating films for effectively reflecting laser are positioned on one surface of the lens facing the incidence direction of the laser.
3. A multi-beam splitter type high sensitivity coaxial optical lens barrel according to claim 1 or 2, wherein: the second multi-spectroscope cube (3) comprises at least two switchable optical lenses, wherein the first optical lens is a visible light beam splitter, one surface of the first optical lens, which faces the first multi-spectroscope cube (1), is plated with a visible light beam splitting film, and the other surface of the first optical lens is plated with a visible light antireflection film; the second optical lens is a full-reflecting mirror or a full-transparent window mirror; the optical thickness of the visible light beam splitter is equal to that of the full-transparent window mirror.
4.A multi-beam splitter type high sensitivity coaxial optical lens barrel according to claim 3, wherein: the first multi-spectroscope cube (1) and the second multi-spectroscope cube (3) are of cube structures, the centers of the upper side face, the lower side face, the left side face and the right side face of the first multi-spectroscope cube are provided with light passing holes, and the diagonal lines along the front side face and the rear side face of the first multi-spectroscope cube are also provided with optical guide rail plates; the optical guide rail plate is provided with an optical mounting surface; the optical mounting surface and the horizontal and vertical axes of the cube structure are provided with an included angle of 45 degrees; the optical mounting surface comprises at least two optical mounting positions for one-to-one mounting of at least two lenses; the optical guide rail plate is also used for enabling any one optical installation position in the optical installation surface to be switched to the intersection point of the horizontal axis and the vertical axis of the cube structure.
5. The multi-beam splitter type high-sensitivity coaxial optical lens barrel according to claim 4, wherein: the optical guide rail plate of the second multi-spectroscope cube (3) and the optical guide rail plate of the first multi-spectroscope cube (1) have an included angle of 90 degrees; the visible light beam splitter installed in the second multi-beam splitter cube (3) has equal optical thickness with the laser dichroic mirror and the laser beam splitter installed in the first multi-beam splitter cube (1).
6. A multi-beam splitter type high sensitivity coaxial optical lens barrel according to claim 4 or 5, wherein: the off-axis reflector module (4) is used for focusing the spectrum signal to a focus perpendicular to the incident direction, and light through holes are formed in the two side panels of the incident light direction and the emergent light direction; the emergent light direction light-passing hole is used for connecting and enabling an external optical fiber to be positioned at the focus, and the incident light direction light-passing hole is used for communicating a second multi-spectroscope cube (3); the imaging module with the illumination function comprises a fixed spectroscope cube (5), an illumination device and an imaging device; the fixed spectroscope cube (5) is of a cube structure, the centers of the upper side face, the lower side face, the left side face and the right side face of the fixed spectroscope cube are provided with light passing holes, and a visible light beam splitter is fixedly arranged between the front side face and the rear side face of the fixed spectroscope cube; the visible light beam splitter and the upper, lower, left and right sides of the fixed beam splitter cube (5) have 45-degree included angles, and have partial reflection and partial transmission characteristics in the visible light region; one side of the visible light beam splitter, facing the second multi-spectroscope cube (3), is plated with a visible light beam splitting film, and the other side is plated with a visible light antireflection film; one of the transmission light path and the reflection light path of the fixed spectroscope cube (5) is provided with an illumination device, and the other light path is provided with an imaging device; one light-transmitting hole of the fixed spectroscope cube (5) is used for communicating with the second multi-spectroscope cube (3); the lighting device is used for providing a lighting source (8); the imaging device is used for observing the surface of the sample.
7. The multi-beam splitter type high-sensitivity coaxial optical lens barrel according to claim 6, wherein: the visible light beam splitter of the fixed beam splitter cube (5) has equal optical thickness with the laser dichroic mirror and the laser beam splitter which are arranged in the first multi-beam splitter cube (1); the visible light beam splitter of the fixed beam splitter cube (5) forms an included angle of 90 degrees with the optical guide rail plate of the first multi-beam splitter cube (1).
8. The multi-beam splitter type high-sensitivity coaxial optical barrel according to claim 7, wherein: an off-axis reflector plated with a total reflection film is arranged in the off-axis reflector module (4) and used for focusing a spectrum signal to a focus perpendicular to the incidence direction, and a light transmission hole of the off-axis reflector is arranged in the center of each panel; 2 to 3 fine tuning knobs are arranged on the back of the off-axis reflector and used for focusing; the off-axis reflector module (4) is characterized in that a closed metal sleeve is screwed at a light-passing hole in the emergent light direction, and a standard optical fiber mounting hole is formed in the center of the tail end of the metal sleeve; the center of the optical fiber mounting hole is positioned at the focus of the off-axis reflector; the lighting device consists of a collecting lens tube (6), a light source mounting frame (7) and a lighting source (8) which are arranged along the same axis, and the lighting source (8) is arranged at the center of the light source mounting frame (7); the imaging device consists of an optical filter (9), a sleeve lens (10), a camera mounting frame (11) and a camera (12) which are arranged along the same axis; the optical filter (9) has high optical density for laser and high transmission for visible light; the camera mounting frame (11) is positioned at the focus of the sleeve lens (10) and can be displaced along the optical axis of the sleeve lens (10), the tail part of the camera mounting frame is provided with a rotatable camera interface, and the camera (12) is mounted on the interface.
9. The multi-beam splitter type high-sensitivity coaxial optical lens barrel according to claim 8, wherein: the off-axis reflector and the reflective objective lens (2) have an optimal focal length ratio, and the numerical value of the optimal focal length ratio is equal to the ratio of the numerical aperture of the reflective objective lens (2) to the numerical aperture of the external spectrometer.
10. A multi-beam splitter type high sensitivity coaxial optical lens barrel according to claim 8 or 9, wherein: all light paths from the reflective objective lens (2) to the illumination light source (8), the camera (12) and the optical fiber mounting hole are in an opaque closed environment.
11. A multi-spectroscope high-sensitivity coaxial optical lens barrel, characterized in that: the system comprises a first multi-spectroscope cube (1), a reflective objective lens (2), a second multi-spectroscope cube (3), an off-axis reflector module (4) and an imaging module with an illumination function; the reflective objective lens (2), the first multi-spectroscope cube (1) and the second multi-spectroscope cube (3) are sequentially connected along a vertical upward optical axis, and an optical path channel penetrating the three is formed; the first multi-spectroscope cube (1) comprises a laser beam splitter for reflecting the incident laser to the reflective objective lens (2) and transmitting the light from the reflective objective lens (2) to the second multi-spectroscope cube (3); the second multi-spectroscope cube (3) is used for separating a spectrum signal light path and an image signal light path; the off-axis reflector module (4) is connected with the second multi-spectroscope cube (3), is positioned on a second multi-spectroscope spectrum signal light path, is used for focusing spectrum signals and is coupled into an external optical fiber; the imaging module with the illumination function is connected with the second multi-spectroscope and is positioned on the image signal light path of the second multi-spectroscope and used for illuminating and observing the surface of the sample; the second multi-spectroscope cube (3) comprises at least two switchable optical lenses, wherein the first optical lens is a visible light beam splitter, one surface of the first optical lens, which faces the first multi-spectroscope cube (1), is plated with a visible light beam splitting film, and the other surface of the first optical lens is plated with a visible light antireflection film; the second optical lens is a total reflection lens; and the off-axis reflector module (4) is internally provided with an off-axis reflector plated with a total reflection film and is used for focusing the spectrum signal to a focus perpendicular to the incidence direction.
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| CN113640219B (en) * | 2021-07-13 | 2024-02-27 | 中国科学院半导体研究所 | Linkage switching device for excitation light, beam splitter and optical filter of spectrometer |
| CN114235696B (en) * | 2021-12-17 | 2024-06-28 | 清华大学 | Device for measuring optical properties of material micro-areas |
| CN114660047B (en) * | 2022-03-15 | 2023-10-27 | 中国工程物理研究院材料研究所 | Full spectrum coaxial optical lens cone |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267746A (en) * | 2013-04-23 | 2013-08-28 | 武汉新瑞达激光工程有限责任公司 | A macro- and micro-area integrated laser probe composition analyzer |
| CN105699363A (en) * | 2016-03-24 | 2016-06-22 | 北京理工大学 | Method for enhancing laser-induced breakdown spectroscopy intensity |
| CN106596511A (en) * | 2016-12-27 | 2017-04-26 | 南京先进激光技术研究院 | Reflection type coaxial structure laser-induced breakdown spectroscopy analysis device |
| CN209198757U (en) * | 2018-09-11 | 2019-08-02 | 中国工程物理研究院材料研究所 | A kind of more light splitting mirror high sensitivity axis optical lens barrels |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11326205A (en) * | 1998-05-08 | 1999-11-26 | Mitsubishi Heavy Ind Ltd | Laser breakdown spectroscopic analyzer |
| JP4169396B2 (en) * | 1998-07-14 | 2008-10-22 | オリンパス株式会社 | Scanning laser microscope |
| JP3686898B2 (en) * | 2003-01-09 | 2005-08-24 | 独立行政法人理化学研究所 | Fluorescence energy transfer analyzer |
| CN101587074B (en) * | 2009-06-23 | 2011-04-20 | 华中科技大学 | Component analyzer for laser probe micro-area |
| JP2012237714A (en) * | 2011-05-13 | 2012-12-06 | Sony Corp | Nonlinear raman spectroscopic apparatus, microspectroscopic apparatus, and microspectroscopic imaging apparatus |
| CN103163111B (en) * | 2013-02-25 | 2015-11-04 | 天津大学 | A combined fluorescence mesoscopic imaging and OCT early cervical cancer detection system |
| CN103197485B (en) * | 2013-03-04 | 2015-09-30 | 山西大学 | Electric field driven graphene oxide electro transfer produces method and the device of light pulse |
| WO2016092161A1 (en) * | 2014-12-09 | 2016-06-16 | Bioaxial Sas | Optical measuring device and process |
-
2018
- 2018-09-11 CN CN201811055454.3A patent/CN108919472B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267746A (en) * | 2013-04-23 | 2013-08-28 | 武汉新瑞达激光工程有限责任公司 | A macro- and micro-area integrated laser probe composition analyzer |
| CN105699363A (en) * | 2016-03-24 | 2016-06-22 | 北京理工大学 | Method for enhancing laser-induced breakdown spectroscopy intensity |
| CN106596511A (en) * | 2016-12-27 | 2017-04-26 | 南京先进激光技术研究院 | Reflection type coaxial structure laser-induced breakdown spectroscopy analysis device |
| CN209198757U (en) * | 2018-09-11 | 2019-08-02 | 中国工程物理研究院材料研究所 | A kind of more light splitting mirror high sensitivity axis optical lens barrels |
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