CN106645097A - Optical path system for laser probe component analyzer - Google Patents

Abstract

The invention belongs to the related technical field of laser precision detection, and discloses an optical path system for a laser probe component analyzer. The optical path system includes a spectrum acquisition module and an imaging module. The optical path system further includes a laser control module, a laser monitoring module, and an illumination module, and the spectrum acquisition module, the laser control module, the laser monitoring module, the illumination module, and the imaging module are arranged coaxially. The laser control module is used to control laser energy and light spot; the laser monitoring module is used to monitor laser energy in real time; the spectrum acquisition module is used to collect plasma spectrum in real time; the lighting module is used to illuminate the surface of the sample to be tested, To ensure that the surface of the sample to be tested is clearly visible; the imaging module is used to image the surface of the sample to be tested. The optical path system simultaneously realizes stable spectral information collection and clear surface imaging.

Description

An optical path system for a laser probe component analyzer

technical field

The invention belongs to the technical field related to laser precision detection, and more specifically relates to an optical path system for a laser probe component analyzer.

Background technique

Laser probe, also known as laser-induced breakdown spectroscopy (LIBS for short), is a material composition analysis method. The laser probe uses a laser to ablate the surface of the sample to be tested to generate plasma, and then realizes the measurement of the material element composition by analyzing the plasma emission spectrum. In the process from scientific research to industrialization, laser probes need a mature optical path system, which can obtain sample surface imaging information while ensuring stable spectrum collection, so that users can collect in-situ information at specific positions on the sample surface, ensuring What you see is what you get.

At present, those skilled in the art have done some research, such as the patent whose publication number is CN103267746B, the patent whose publication number is CN101587074B, and the patent whose authorization announcement number is CN101587074B respectively disclose different laser probe analyzers. Laser probe analyzers integrate the functions of laser probe spectral analysis and coaxial sample surface imaging, which are typical examples of laser probe optical system. But all there is following deficiency in above-mentioned example:

1. There is no coaxial lighting device on the sample surface. For samples with smooth surface or dark color, especially in high-magnification imaging of microscopic analysis, it is difficult to ensure that the sample surface is clearly visible;

2. In the imaging system, the filtering of the laser light is not considered, and the laser light reflected on the sample surface during the coaxial imaging process can easily damage the imaging camera;

3. Without a real-time adjustment and monitoring system for laser energy, it is impossible to shape the laser spot to obtain a beam more suitable for the laser probe, and it is impossible to correct, adjust and monitor the laser energy fluctuation and attenuation effect in real time;

4. There is no laser filter in front of the spectrum collector, and the laser reflected from the sample surface is easy to damage the optical fiber collection head.

Contents of the invention

In view of the above defects or improvement needs of the prior art, the present invention provides an optical path system for a laser probe component analyzer, which integrates a laser control module, a laser monitoring module, a spectrum acquisition module, an illumination module and an imaging module5 One module can realize laser energy and spot control, laser energy real-time monitoring, plasma spectrum acquisition, sample surface illumination, sample surface imaging functions at the same time, realize simultaneous acquisition of stable spectral information and sample image information, and meet the needs of modern industrial applications; Among them, the five modules of laser control module, laser monitoring module, spectrum acquisition module, illumination module and imaging module are coaxial in the optical path, with compact structure, and multiple parts can realize multi-functional use. In addition, the optical path system provides laser protection for each component to improve the service life of the component.

In order to achieve the above object, the present invention provides a kind of optical path system for laser probe component analyzer, it comprises spectrum collection module and imaging module, it is characterized in that:

The optical path system also includes a laser control module, a laser monitoring module, and an illumination module, and the spectrum acquisition module, the laser control module, the laser monitoring module, the illumination module, and the imaging module are arranged coaxially;

The laser control module is used to control the laser energy and the light spot; the laser monitoring module is used to monitor the laser energy in real time, so that the laser control module can correct the laser energy fluctuation and attenuation effect in real time; the spectrum acquisition module is used to real-time The plasma spectrum is collected; the illumination module is used to illuminate the surface of the sample to be tested to ensure that the surface of the sample to be tested is clearly visible; the imaging module is used to image the surface of the sample to be tested.

Further, the laser control module, the spectrum acquisition module, the lighting module and the imaging module have an objective lens in common; the laser control module, the laser monitoring module, the lighting module and the imaging module have a common It has a beam splitter; the laser control module and the imaging module share a laser reflector; the illumination module and the imaging module share a beam splitter.

Further, the laser control module also includes a laser, a laser beam expander, a harmonic beam splitter, a first laser window, a first laser absorber, a half-wave plate, a polarization beam splitter, a second laser window, a second A laser absorber, an optical gate, and an aperture; the first laser window is located between the harmonic beam splitter and the first laser absorber; the half-wave plate is located in front of the harmonic beam splitter; The second laser window is located between the polarizing beam splitter and the second laser absorber; the laser reflector is located between the aperture and the beam splitter; the objective lens is located between the splitter between the beam mirror and the sample to be tested.

Further, the half-wave plate is rotatable.

Further, the laser monitoring module further includes a first linear polarizer and a laser energy meter, and the first linear polarizer is located between the beam splitter and the laser energy meter.

Further, the spectrum acquisition module also includes a second linear polarizer, a fiber coupling mirror, a fiber connector, an optical fiber, and a spectrometer, and the second linear polarizer is located between the beam splitter and the fiber coupling mirror; the optical fiber The coupling mirror is connected to the optical fiber joint; the optical fiber is connected to the optical fiber joint and the spectrometer.

Further, the illumination module further includes an LED light source and an illumination collimation mirror, and the illumination collimation mirror is located in front of the LED light source.

Further, the imaging module further includes an eyepiece, a third linear polarizer and a camera, and the third linear polarizer is located in front of the camera.

Further, the laser control module, the spectrum acquisition module, the lighting module and the imaging module have an objective lens in common; the laser control module, the laser monitoring module, the lighting module and the imaging module have a common It has a beam splitter; the laser control module and the imaging module have a laser reflector; the lighting module and the imaging module have a beam splitter; the laser control module, the lighting module and the imaging module common with broadband mirrors.

Further, the laser control module also includes a laser, a laser beam expander, a harmonic beam splitter, a first laser window, a first laser absorber, a half-wave plate, a polarization beam splitter, a second laser window, a second A laser absorber, an optical gate, and an aperture; the first laser window is located between the first laser absorber and the harmonic beam splitter; the half-wave plate is located in front of the polarization beam splitter; the The second laser window is located between the polarization beam splitter and the second laser absorber; the objective lens is located between the beam splitter and the sample to be measured.

Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention provide an optical path system for a laser probe component analyzer, which integrates a laser control module, a laser monitoring module, and a spectrum acquisition module Five modules, namely, an illumination module and an imaging module, can realize laser energy and spot control, real-time monitoring of laser energy, plasma spectrum acquisition, sample surface illumination, and sample surface imaging functions at the same time, and achieve stable spectral information and sample image information at the same time. , to meet the needs of modern industrial applications; among them, the five modules of laser control module, laser monitoring module, spectrum acquisition module, illumination module and imaging module are coaxial in the optical path, compact in structure, and multiple parts can be used for multi-function. In addition, the optical path system provides laser protection for each component to improve the service life of the component.

Description of drawings

Fig. 1 is a schematic view of the use state of the optical system for the laser probe component analyzer provided by the first embodiment of the present invention.

Fig. 2 is a schematic view of the use state of the optical system for the laser component analyzer provided by the second embodiment of the present invention.

In all drawings, the same reference numerals are used to denote the same elements or structures, wherein: 1. laser; 2. laser beam expander; 3. harmonic beam splitter; 4. first laser window; 5. 6. Half-wave plate; 7. Polarizing beam splitter; 8. Second laser window; 9. Second laser absorber; 10. Optical gate; 11. Aperture; 12. Laser mirror; 13. Beam splitter; 14. Objective lens; 15. Sample to be tested; 16. First linear polarizer; 17. Laser energy meter; 18. Second linear polarizer; 19. Fiber coupling mirror; 20. Fiber connector; 21. Optical fiber; 22. Spectrometer; 23. Beam splitter; 24. Illumination collimator; 25. LED light source; 26. Total reflection mirror; 27. Eyepiece; 28. Third linear polarizer; 29. Camera;

detailed description

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

Please refer to Fig. 1, the optical path system for the laser probe component analyzer provided by the first embodiment of the present invention, which includes a laser 1, a laser beam expander 2, a harmonic beam splitter 3, a first laser window 4, a second A laser absorber 5, a half-wave plate 6, a polarizing beam splitter 7, a second laser window 8, a second laser absorber 9, an optical gate 10, a diaphragm 11, a laser reflector 12, a beam splitter 13, and an objective lens 14 , sample to be tested 15, first linear polarizer 16, laser energy meter 17, second linear polarizer 18, fiber coupling mirror 19, fiber optic connector 20, optical fiber 21, spectrometer 22, beam splitter 23, illumination collimator mirror 24, LED The light source 25, the total reflection mirror 26, the eyepiece 27, the third linear polarizer 28 and the camera 29, the components mentioned above constitute the laser control module, the laser monitoring module, the spectrum acquisition module, the lighting module and the imaging module respectively. In this embodiment, the laser control module, the laser monitoring module, the spectrum acquisition module, the lighting module and the imaging module are arranged coaxially; the objective lens 14 is the laser control module, the The spectrum collection module, the lighting module and the imaging module are shared; the beam splitter 13 is shared by the laser control module, the laser monitoring module, the lighting module and the imaging module; the The laser reflector 12 is shared by the laser control module and the imaging module; the beam splitter 23 is shared by the lighting module and the imaging module.

The laser control module also includes the laser 1, the laser beam expander 2, the harmonic beam splitter 3, the first laser window 4, the first laser absorber 5, the half-wave sheet 6, the polarizing beam splitter 7, the second laser window 8, the second laser absorber 9, the shutter 10, and the diaphragm 11. The laser beam expander 2 is located between the laser 1 and the harmonic beam splitter 3; the first laser window 4 is located between the harmonic beam splitter 3 and the first laser absorber 5 Between; the half-wave plate 6 is located between the harmonic beam splitter 3 and the polarization beam splitter 7; the second laser window 8 is located between the polarization beam splitter 7 and the second laser absorption between the body 9; the shutter 10 is located between the polarizing beam splitter 7 and the diaphragm 11; the laser reflector 12 is located between the diaphragm 11 and the beam splitter 13; the The objective lens 14 is located between the beam splitter 13 and the sample 15 to be tested. In this embodiment, the laser 1 is a laser with a wavelength of 532 nm of the second harmonic of Nd:YAG.

The laser 1 is used to emit laser beams. After the laser beam is output from the laser 1, the laser beam expander 2 is used to expand the laser beam. The harmonic beam splitter 3 is used to transmit the laser beam expanded by the laser beam expander 2 to enter the optical path system. At the same time, the harmonic beam splitter 3 reflects the laser light with a wavelength of 1064nm transmitted through the first laser window 4 and absorbed by the first laser absorber 5 . The 532nm laser beam passing through the harmonic beam splitter 3 passes through the rotatable half-wave plate 6 to adjust the polarization direction, that is, to adjust the ratio of vertical polarization and horizontal polarization components. The vertically polarized component of the laser beam after being polarized by the half-wave plate 6 passes through the polarizing beam splitter 7, and the horizontally polarized component is reflected and transmitted through the second laser window 8 to be received by the second laser beam Absorber 9 absorbs. The optical gate 10 is arranged behind the polarizing beam splitter 7, and the optical gate 10 is used to control the on-off of the laser beam. The aperture 11 is arranged behind the shutter 10, and the aperture 11 is used to filter out the portion of the laser beam with large fluctuations in the periphery of the light spot. After the laser beam filtered by the aperture 11 is reflected by the laser reflector 12 and the beam splitter 13 in turn, it is focused on the surface of the sample 15 by the objective lens 14 to excite plasma body.

The laser monitoring module further includes a first linear polarizer 16 and a laser energy meter 17 , the first linear polarizer 16 is located between the beam splitter 13 and the laser energy meter 17 . The part of the laser beam passing through the beam splitter 13 is controlled by the first linear polarizer 16 to reach the laser energy range of the laser energy meter 17 . By monitoring the laser energy in real time, the laser energy information corresponding to each spectral signal can be obtained, and the spectral signal fluctuation correction is performed through computer spectral analysis software, and the energy adjustment is realized by adjusting the half-wave plate 6 to eliminate the laser energy attenuation effect.

The spectrum acquisition module also includes a second linear polarizer 18 , a fiber coupling mirror 19 , an optical fiber connector 20 , an optical fiber 21 and a spectrometer 22 . The light emitted by the surface plasmon of the sample to be measured 15 is collimated by the objective lens 14 and passes through the beam splitter 13 to reach the second linear polarizer 18, and the laser light reflected by the surface of the sample to be measured 15 Filter out at the second linear polarizer 18; the plasma optical signal can pass through the second linear polarizer 18, and be coupled into the optical fiber connector 20 through the fiber coupling mirror 19; coupled to the optical fiber connector The plasma light signal of 20 is transmitted through the optical fiber 21 to enter the spectrometer 22 .

The lighting module further includes the LED light source 25 and the lighting collimation mirror 24 , and the lighting collimation mirror 24 is located between the LED light source 25 and the beam splitter 23 . The light emitted by the LED light source 25 enters the coaxial optical path after being collimated by the illumination collimator 24 and reflected by the beam splitter 23 in turn, and then reflected by the beam splitter 13 and focused by the objective lens 14 in turn. The illumination is on the area to be measured on the surface of the sample 15 to be tested.

The imaging module also includes the total reflection mirror 26, the eyepiece 27, the third linear polarizer 28 and the camera 29, the total reflection mirror 26 is located between the eyepiece 27 and the beam splitter 23 , the third linear polarizer 28 is located between the eyepiece 27 and the camera 29 . The light reflected from the surface of the sample 15 to be tested is collimated by the objective lens 14 and reflected by the beam splitter 13 in turn, and then filtered by the laser reflector 12 to filter out most of the laser light with a wavelength of 532 nm. The light filtered by the laser reflector 12 passes through the beam splitter 23 and is reflected by the total reflection mirror 26 to reach the eyepiece 27 , and the eyepiece 27 images the light signal at the camera 29 . The third linear polarizer 28 is located between the eyepiece 27 and the camera 29 for filtering the remaining laser light.

Please refer to Fig. 2, the optical path system for the laser probe component analyzer provided by the second embodiment of the present invention, which includes a laser 1, a laser beam expander 2, a harmonic beam splitter 3, a first laser window 4, a second A laser absorber 5, a half-wave plate 6, a polarizing beam splitter 7, a second laser window 8, a second laser absorber 9, an optical gate 10, a diaphragm 11, a laser reflector 12, a beam splitter 13, and an objective lens 14 , sample to be tested 15, first linear polarizer 16, laser energy meter 17, second linear polarizer 18, fiber coupling mirror 19, fiber optic connector 20, optical fiber 21, spectrometer 22, beam splitter 23, illumination collimator mirror 24, LED A light source 25 , a total reflection mirror 26 , an eyepiece 27 , a third linear polarizer 28 , a camera 29 and a broadband reflection mirror 30 . The components mentioned above constitute a laser control module, a laser monitoring module, a spectrum acquisition module, an illumination module and an imaging module respectively.

In this embodiment, the laser control module, the laser monitoring module, the spectrum acquisition module, the lighting module and the imaging module are arranged coaxially; the objective lens 14 is the laser control module, the The spectrum acquisition module, the lighting module and the imaging module are shared; the beam splitter 13 is shared by the laser control module, the laser monitoring module, the lighting module and the imaging module; the The laser reflector 12 is shared by the laser control module and the imaging module; the beam splitter 23 is shared by the illumination module and the imaging module; the broadband reflector 30 is shared by the laser control module and the imaging module. The lighting module and the imaging module are shared.

The laser control module also includes the laser 1, the laser beam expander 2, the harmonic beam splitter 3, the first laser window 4, the first laser absorber 5, the half-wave sheet 6 , the polarizing beam splitter 7 , the second laser window 8 , the second laser absorber 9 , the shutter 10 and the diaphragm 11 . In this embodiment, the laser 1 is a laser with a wavelength of 355 nm of the third harmonic of Nd:YAG.

The laser beam expander 2 is located between the laser 1 and the aperture 11 , and the shutter 10 is located between the aperture 11 and the harmonic beam splitter 3 . The first laser window 4 is located between the first laser absorber 5 and the harmonic beam splitter 3 . The half-wave plate 6 is located between the harmonic beam splitter 3 and the polarization beam splitter 7 . The second laser window 8 is located between the polarizing beam splitter 7 and the second laser absorber 9 . The laser reflector 12 is located between the polarization beam splitter 7 and the broadband reflector 30 . The beam splitter 13 is located between the broadband mirror 30 and the objective lens 14 . The objective lens 14 is located between the beam splitter 13 and the sample 15 to be tested.

The laser 1 is used to emit laser beams. After the laser beam is output from the laser 1, the laser beam expander 2 is used to expand the laser beam. The aperture 11 is used to filter out the part with larger fluctuations in the periphery of the laser spot after the laser beam expander 2 expands the beam. The shutter 10 is used to control the on-off of the laser beam passing through the laser beam expander 2 . The harmonic beam splitter 3 is used to transmit the laser beam with a wavelength of 355nm in the laser beam passing through the optical gate 10 to enter the optical path system. The reflected laser light passes through the first laser window 4 and is absorbed by the first laser absorber 5 . The 355nm laser beam passing through the harmonic beam splitter 3 passes through the rotatable half-wave plate 6 to adjust the polarization direction, that is, to adjust the ratio of vertical polarization and horizontal polarization components. The vertically polarized component of the laser beam after being polarized by the half-wave plate 6 passes through the polarizing beam splitter 7, and the horizontally polarized component is reflected and transmitted through the second laser window 8 to be received by the second laser beam. Absorber 9 absorbs. The laser beam passing through the polarizing beam splitter 7 is sequentially reflected by the laser mirror 12, the broadband mirror 30 and the beam splitter 13, and then focused on the sample 15 by the objective lens 14 on the surface to generate plasma.

The laser monitoring module further includes a first linear polarizer 16 and a laser energy meter 17 , the first linear polarizer 16 is located between the beam splitter 13 and the laser energy meter 17 . The part of the laser beam passing through the beam splitter 13 is controlled by the first linear polarizer 16 to reach the laser energy range of the laser energy meter 17 . By monitoring the laser energy in real time, the laser energy information corresponding to each spectral signal can be obtained, and the spectral signal fluctuation correction is performed through computer spectral analysis software, and the energy adjustment is realized by adjusting the half-wave plate 6 to eliminate the laser energy attenuation effect.

The spectrum acquisition module also includes a second linear polarizer 18 , a fiber coupling mirror 19 , an optical fiber connector 20 , an optical fiber 21 and a spectrometer 22 . The second linear polarizer 18 is located between the beam splitter 13 and the fiber coupling mirror 19, the fiber connector 20 is located between the fiber coupling mirror 19 and the optical fiber 21, and the optical fiber 21 is connected to the The spectrometer 22 and the optical fiber connector 20. The light emitted by the surface plasmon of the sample to be measured 15 is collimated by the objective lens 14 and passes through the beam splitter 13 to reach the second linear polarizer 18, and the laser light reflected by the surface of the sample to be measured 15 Filter out at the second linear polarizer 18; the plasma optical signal can pass through the second linear polarizer 18, and be coupled into the optical fiber connector 20 through the fiber coupling mirror 19; coupled to the optical fiber connector The plasma light signal of 20 is transmitted through the optical fiber 21 to enter the spectrometer 22 .

The lighting module also includes the lighting collimating mirror 24 , the LED light source 25 and the total reflection mirror 26 . The illumination collimating mirror 24 is located between the LED light source 25 and the total reflection mirror 26 , and the total reflection mirror 26 is located between the beam splitter 23 and the illumination collimation mirror 24 . The light emitted by the LED light source 25 enters the coaxial optical path after being collimated by the illumination collimating mirror 24, reflected by the total reflection mirror 26 and transmitted by the beam splitter 23, and then passes through the broadband reflector in turn. 30 and the beam splitter 13 reflect, the objective lens 14 focuses and then illuminates the area to be measured on the surface of the sample 15 to be measured.

The imaging module also includes the eyepiece 27, the third linear polarizer 28 and the camera 29, the third linear polarizer 28 is located between the eyepiece 27 and the beam splitter 23, and the eyepiece 27 is located between the third linear polarizer 28 and the camera 29 . The light reflected from the surface of the sample 15 to be tested is collimated by the objective lens 14, reflected by the beam splitter 13 and reflected by the broadband reflector 30 in sequence, and then filtered by the laser reflector 12 with a wavelength of 355nm laser. After the light filtered by the laser reflector 12 is reflected by the beam splitter 23, the light reaches the eyepiece 27 after the remaining laser light is filtered by the third linear polarizer 28, and the eyepiece 27 converts the light The signal is imaged at said camera 29 .

In this embodiment, multiple parts can be used for multiple functions, such as: ① the function of the objective lens 14 in the laser control module is to focus the laser spot, and the function in the spectrum acquisition module is to parallelize the light emission of the plasma, The function of the illumination module is to focus the illumination light on the required area of the sample to be measured, and the function of the objective lens in the microscope in the imaging module; ② the function of the laser reflector 12 in the laser control module is to focus the laser The light beam is reflected with high efficiency, and the effect in the imaging module is to filter out the laser light reflected by the sample surface to prevent damage to the camera; ③ the effect of the beam splitter 13 in the laser control module is to reflect the laser beam, and in the laser measurement module The function is to obtain part of the laser beam for measurement, the function in the illumination module is to reflect the illumination light to the sample surface, and the function in the imaging module is to reflect the sample surface light to the camera.

In this embodiment, the optical path system provides laser protection for each component. For example, in the laser control module, laser windows are set in front of the two laser absorbers to prevent particles from being ablated by the laser on the surface of the absorber from floating and adhering. On the mirror; ②In the spectrum acquisition module, a linear polarizer is set in front of the fiber coupling mirror to prevent the laser reflected from the sample surface from being focused by the fiber coupling mirror and damage the fiber joint; ③In the imaging module, the light on the surface of the sample to be measured first passes through the laser The mirror filters out most of the laser light, and the remaining laser light is filtered out by a linear polarizer to protect the camera.

The optical path system for a laser probe component analyzer provided by the present invention integrates five modules of a laser control module, a laser monitoring module, a spectrum acquisition module, an illumination module and an imaging module, and can simultaneously realize laser energy and spot control, laser Energy real-time monitoring, plasma spectrum acquisition, sample surface illumination, sample surface imaging functions, to achieve simultaneous acquisition of stable spectral information and sample image information, to meet the needs of modern industrial applications; including laser control module, laser monitoring module, spectrum acquisition module, The five modules of the illumination module and the imaging module are coaxial in the optical path, and the structure is compact, and multiple parts can be used for multiple functions. In addition, the optical path system provides laser protection for each component to improve the service life of the component.

It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.

Claims (10)

1. An optical path system for a laser probe component analyzer, comprising a spectrum acquisition module and an imaging module, characterized in that: The optical path system also includes a laser control module, a laser monitoring module, and an illumination module, and the spectrum acquisition module, the laser control module, the laser monitoring module, the illumination module, and the imaging module are arranged coaxially; The laser control module is used to control the laser energy and the light spot; the laser monitoring module is used to monitor the laser energy in real time, so that the laser control module can correct the laser energy fluctuation and attenuation effect in real time; the spectrum acquisition module is used to real-time The plasma spectrum is collected; the illumination module is used to illuminate the surface of the sample to be tested to ensure that the surface of the sample to be tested is clearly visible; the imaging module is used to image the surface of the sample to be tested. 2. the optical path system for laser probe composition analyzer as claimed in claim 1, is characterized in that: described laser control module, described spectrum collection module, described lighting module and described imaging module have objective lens jointly; The laser control module, the laser monitoring module, the lighting module and the imaging module have a beam splitter; the laser control module and the imaging module have a laser reflector; the lighting module and the imaging module The imaging modules have a beam splitter in common. 3. The optical path system for the laser probe component analyzer as claimed in claim 2, characterized in that: the laser control module also includes a laser, a laser beam expander, a harmonic beam splitter, a first laser window, The first laser absorber, half-wave plate, polarizing beam splitter, second laser window, second laser absorber, shutter and aperture; the first laser window is located at the harmonic beam splitter and the second laser between a laser absorber; the half-wave plate is located in front of the polarizing beam splitter; the second laser window is located between the polarizing beam splitter and the second laser absorber; the objective lens is located in the polarizing beam splitter between the beam splitter and the sample to be tested. 4. The optical path system for a laser probe component analyzer according to claim 3, wherein the half-wave plate is rotatable. 5. The optical path system for a laser probe component analyzer as claimed in claim 3, wherein the laser monitoring module further comprises a first linear polarizer and a laser energy meter, and the first linear polarizer is located at between the beam splitter and the laser energy meter. 6. the optical path system that is used for laser probe component analyzer as claimed in claim 3, is characterized in that: described spectrum acquisition module also comprises second linear polarizer, fiber coupling mirror, optical fiber connector, optical fiber and spectrometer, described The second linear polarizer is located between the beam splitter and the optical coupling mirror; the fiber coupling mirror is connected to the optical fiber connector; the optical fiber is connected to the optical fiber connector and the spectrometer. 7. The optical path system for a laser probe component analyzer as claimed in claim 3, wherein the illumination module further comprises an LED light source and an illumination collimation mirror, and the illumination collimation mirror is positioned at the LED light source ahead. 8. The optical path system for a laser probe component analyzer as claimed in claim 3, wherein: the imaging module also includes an eyepiece, a third linear polarizer and a camera, and the third linear polarizer is positioned at the camera ahead. 9. The optical path system for a laser probe component analyzer as claimed in claim 1, wherein the laser control module, the spectrum acquisition module, the illumination module and the imaging module have an objective lens in common; The laser control module, the laser monitoring module, the lighting module and the imaging module have a beam splitter; the laser control module and the imaging module have a laser reflector; the lighting module and the imaging module The imaging module has a beam splitter in common; the laser control module, the lighting module and the imaging module have a broadband reflector in common. 10. The optical path system for a laser probe component analyzer as claimed in claim 9, wherein the laser control module further comprises a laser, a laser beam expander, a harmonic beam splitter, a first laser window, The first laser absorber, half-wave plate, polarizing beam splitter, second laser window, second laser absorber, shutter and aperture; the first laser window is located at the first laser absorber and the harmonic between the wave splitters; the half-wave plate is located in front of the harmonic beam splitter; the second laser window is located between the polarization beam splitter and the second laser absorber; the laser reflection The mirror is located between the polarization beam splitter and the broadband mirror; the beam splitter is located between the broadband mirror and the objective lens; the objective lens is located between the beam splitter and the sample to be measured between.