CN108845479B - A soft film replacement and nanoimprinting integrated device - Google Patents
A soft film replacement and nanoimprinting integrated device Download PDFInfo
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- 238000003860 storage Methods 0.000 claims abstract description 82
- 239000000463 material Substances 0.000 claims abstract description 36
- 239000002699 waste material Substances 0.000 claims abstract description 29
- 230000010076 replication Effects 0.000 claims description 19
- 230000007246 mechanism Effects 0.000 claims description 15
- 238000013519 translation Methods 0.000 claims description 15
- 238000004049 embossing Methods 0.000 claims description 14
- 238000003491 array Methods 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims 3
- 238000003475 lamination Methods 0.000 claims 1
- 238000012546 transfer Methods 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 description 36
- 230000009286 beneficial effect Effects 0.000 description 20
- 230000006872 improvement Effects 0.000 description 9
- 238000012545 processing Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 230000033764 rhythmic process Effects 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 1
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
本发明公开了一种软膜替换及纳米压印一体设备，包括软膜复制工位；压印工位，若干个独立的压印工位用于进行纳米压印，压印工位与软膜复制工位之间设有载盘存放区、软膜存放区；层叠架，压印工位设为两排，层叠架与其中一排压印工位齐平，层叠架上具备晶圆存放区、废品软膜存放区；取料机械手，设置在两排平行的压印工位中间，取料机械手将软膜存放区上的软膜与载盘存放区上的载盘配合，并将配合后软膜及载盘送入压印工位，取料机械手将晶圆在压印工位、晶圆存放区之间转移，同时也将压印工位上的废品软膜转移至层叠架上的废品软膜存放区。采用此发明实现新旧软膜替换，设备成本低，各部件间布局合理，运作效率高，降低人员工作强度。
The present invention discloses a soft film replacement and nano-imprinting integrated equipment, including a soft film copying station; an imprinting station, a plurality of independent imprinting stations are used for nano-imprinting, and a carrier storage area and a soft film storage area are provided between the imprinting station and the soft film copying station; a stacking rack, the imprinting stations are arranged in two rows, the stacking rack is flush with one of the rows of imprinting stations, and the stacking rack is provided with a wafer storage area and a waste soft film storage area; a material taking manipulator is arranged in the middle of the two parallel rows of imprinting stations, the material taking manipulator matches the soft film on the soft film storage area with the carrier on the carrier storage area, and sends the matched soft film and carrier into the imprinting station, the material taking manipulator transfers the wafer between the imprinting station and the wafer storage area, and also transfers the waste soft film on the imprinting station to the waste soft film storage area on the stacking rack. The invention is used to realize the replacement of old and new soft films, with low equipment cost, reasonable layout between various components, high operation efficiency, and reduced work intensity of personnel.
Description
技术领域Technical Field
本发明涉及纳米压印设备，具体涉及一种软膜替换及纳米压印一体设备。The invention relates to a nano-imprinting device, and in particular to a soft film replacement and nano-imprinting integrated device.
背景技术Background Art
纳米压印生产过程中会应用到软膜，软膜在整个过程中反复利用的，但是软膜也具备一定的使用寿命，如再压印50次或100次后其自身功能便不满足需求，需要用新的软膜进行替换，以保证压印的持续进行。Soft films are used in the nanoimprint production process. They are reused throughout the process, but they also have a certain service life. After 50 or 100 times of imprinting, their own functions will not meet the needs and they need to be replaced with new soft films to ensure the continuation of imprinting.
发明内容Summary of the invention
本发明要解决的问题在于提供一种软膜替换及纳米压印一体设备，实现新旧软膜替换，设备成本低，各部件间布局合理，运作效率高，降低人员工作强度。The problem to be solved by the present invention is to provide a soft film replacement and nanoimprinting integrated equipment to achieve the replacement of old and new soft films, with low equipment cost, reasonable layout between components, high operation efficiency and reduced work intensity of personnel.
为解决上述问题，本发明提供一种软膜替换及纳米压印一体设备，为达到上述目的，本发明解决其技术问题所采用的技术方案是；In order to solve the above problems, the present invention provides a soft film replacement and nanoimprinting integrated device. In order to achieve the above objectives, the technical solution adopted by the present invention to solve its technical problems is:
一种软膜替换及纳米压印一体设备，包括：软膜复制工位；压印工位，若干个独立的压印工位用于进行纳米压印，压印工位与软膜复制工位之间设有载盘存放区、软膜存放区；层叠架，压印工位设为两排，层叠架与其中一排压印工位齐平，层叠架上具备晶圆存放区、废品软膜存放区；取料机械手，设置在两排平行的压印工位中间，取料机械手将软膜存放区上的软膜与载盘存放区上的载盘配合，并将配合后软膜及载盘送入压印工位，取料机械手将晶圆在压印工位、晶圆存放区之间转移，同时也将压印工位上的废品软膜转移至层叠架上的废品软膜存放区。A soft film replacement and nano-imprinting integrated equipment comprises: a soft film copying station; an imprinting station, wherein a plurality of independent imprinting stations are used for nano-imprinting, and a carrier disc storage area and a soft film storage area are arranged between the imprinting station and the soft film copying station; a stacking rack, wherein the imprinting stations are arranged in two rows, the stacking rack is flush with one of the rows of imprinting stations, and the stacking rack is provided with a wafer storage area and a waste soft film storage area; a material fetching robot, which is arranged between the two parallel rows of imprinting stations, the material fetching robot matches the soft film on the soft film storage area with the carrier disc on the carrier disc storage area, and delivers the matched soft film and the carrier disc into the imprinting station, the material fetching robot transfers the wafer between the imprinting station and the wafer storage area, and also transfers the waste soft film on the imprinting station to the waste soft film storage area on the stacking rack.
采用上述技术方案的有益效果是：取料机械手本身是用来供晶圆转移的必不可少的部件，新旧软膜的替换也可以利用现有的取料机械手，设备改造成本低。人的操作空间与机械手通过层叠架隔离，安全性高，需要人员操作的工位被集中于一局部，使得人员站立在某处原地便可以操作所有工序，降低劳动强度，提高工作效率。压印工位排布方式合理、进一步缩减取料机械手的运行路程，提高效率，空间利用率高。废模存放区与晶圆存放区共用一个层叠架，物料集中、设备成本低。The beneficial effects of adopting the above technical solution are: the material retrieving robot itself is an indispensable component for wafer transfer, and the replacement of old and new soft films can also use the existing material retrieving robot, and the equipment modification cost is low. The human operating space is isolated from the robot by the stacking rack, which is highly safe. The workstations that require human operation are concentrated in one part, so that personnel can operate all processes while standing in one place, reducing labor intensity and improving work efficiency. The layout of the imprinting stations is reasonable, further reducing the running distance of the material retrieving robot, improving efficiency, and high space utilization. The waste mold storage area and the wafer storage area share a stacking rack, which concentrates materials and reduces equipment costs.
作为本发明的进一步改进，软膜复制工位由若干个独立矩形阵列的软膜复制工位构成，矩形阵列的软膜复制工位的中部设有脱膜机械手，脱膜机械手将软膜从软膜复制工位上脱离。As a further improvement of the present invention, the soft film replication station is composed of a plurality of independent rectangular arrays of soft film replication stations, and a film stripping robot is provided in the middle of the rectangular array of soft film replication stations to separate the soft film from the soft film replication station.
采用上述技术方案的有益效果是：脱膜机械手高效得对软膜进行拿取，提高效率，避免人工拿取的低效率与对软膜的损伤。The beneficial effect of adopting the above technical solution is that the film stripping robot can efficiently take the soft film, thereby improving efficiency and avoiding the low efficiency of manual taking and damage to the soft film.
作为本发明的更进一步改进，脱模机械手为水平面内垂直设置的两个直线模组构成。As a further improvement of the present invention, the demoulding robot is composed of two linear modules vertically arranged in a horizontal plane.
采用上述技术方案的有益效果是：矩形阵列的软膜复制工位，对应一个XY方向由度设备来脱模，设备简单可靠。The beneficial effect of adopting the above technical solution is that the rectangular array of soft film replication stations corresponds to an XY direction and is demoulded by a degree device, and the equipment is simple and reliable.
作为本发明的又进一步改进，软膜复制工位与压印工位数量相同，均为六个。As a further improvement of the present invention, the number of the soft film replication stations and the embossing stations is the same, that is, six.
采用上述技术方案的有益效果是：六个的数量便于设备安排，其工作的节拍也适宜人员的工作强度。The beneficial effects of adopting the above technical solution are: the number of six is convenient for equipment arrangement, and the working rhythm is also suitable for the work intensity of personnel.
作为本发明的又进一步改进，晶圆存放区设在层叠架的上半段，并分为待加工晶圆存放区、成品晶圆存放区，废品软膜存放区设于层叠架的下半段。As a further improvement of the present invention, the wafer storage area is arranged in the upper half of the stacking frame and is divided into a storage area for wafers to be processed and a storage area for finished wafers. The waste soft film storage area is arranged in the lower half of the stacking frame.
采用上述技术方案的有益效果是：待加工晶圆存放区、成品晶圆的进出口相靠近，方便人员定点操作，晶圆设于上半段，也便于人员目视观察其数量与品质。The beneficial effects of adopting the above technical solution are: the storage area for wafers to be processed and the entrance and exit of finished wafers are close to each other, which is convenient for personnel to operate at fixed points. The wafers are arranged in the upper half, which is also convenient for personnel to visually observe their quantity and quality.
作为本发明的又进一步改进，层叠架的下半段的中部设有朝向两侧的红外线传感器，红外线传感器将废品软膜存放区左右对分。As a further improvement of the present invention, an infrared sensor facing both sides is provided in the middle of the lower half of the stacking frame, and the infrared sensor divides the waste soft film storage area into left and right halves.
采用上述技术方案的有益效果是：一处的外线传感器可以感知废品软膜存放区上两侧所有的废品软膜数量，设备成本低。The beneficial effect of adopting the above technical solution is that an external line sensor at one location can sense the quantity of all waste soft films on both sides of the waste soft film storage area, and the equipment cost is low.
作为本发明的又进一步改进，红外线传感器连接有蜂鸣报警器。As a further improvement of the present invention, the infrared sensor is connected to a buzzer alarm.
采用上述技术方案的有益效果是：一旦废品软膜存放区的废品软膜、待加工晶圆、成品晶圆达到最大存放量时便蜂鸣报，提醒人员拿取。The beneficial effect of adopting the above technical solution is that once the waste soft film, wafers to be processed and finished wafers in the waste soft film storage area reach the maximum storage capacity, a buzzer will sound to remind personnel to take them.
作为本发明的又进一步改进，取料机械手底部连接有水平往复平移机构，水平往复平移机构的运动方向与任意一排压印工位长度方向平行。As a further improvement of the present invention, a horizontal reciprocating translation mechanism is connected to the bottom of the material picking robot, and the movement direction of the horizontal reciprocating translation mechanism is parallel to the length direction of any row of imprinting stations.
采用上述技术方案的有益效果是：水平往复平移机构提高了取料机械手在水平某一方向上的移动范围与移动速度，提高了取料机械手的作业覆盖范围，水平往复平移机构与取料机械手的运动可以叠加，提高了取料机械手的工作效率。The beneficial effects of adopting the above technical solution are: the horizontal reciprocating translation mechanism increases the moving range and moving speed of the material retrieving robot in a certain horizontal direction, increases the operating coverage range of the material retrieving robot, and the movement of the horizontal reciprocating translation mechanism and the material retrieving robot can be superimposed, thereby improving the working efficiency of the material retrieving robot.
作为本发明的又进一步改进，载盘存放区连接有传送带，传送带运行方向与载盘存放区、软膜存放区的连线方向平行。As a further improvement of the present invention, the carrier disc storage area is connected to a conveyor belt, and the running direction of the conveyor belt is parallel to the connecting direction of the carrier disc storage area and the soft film storage area.
采用上述技术方案的有益效果是：传送带保证载盘持续的供料，保证作业的连贯性。The beneficial effect of adopting the above technical solution is that the conveyor belt ensures continuous feeding of the carrier plate and ensures the continuity of the operation.
作为本发明的又进一步改进，软膜存放区位于水平往复平移机构与脱模机械手的连线上，传送带的长度方向与层叠架的长度方向垂直，层叠架与传送带之间不存在压印工位。As a further improvement of the present invention, the soft film storage area is located on the line connecting the horizontal reciprocating translation mechanism and the demoulding robot, the length direction of the conveyor belt is perpendicular to the length direction of the stacking rack, and there is no stamping station between the stacking rack and the conveyor belt.
采用上述技术方案的有益效果是：使得软膜从软膜复制工位被脱膜机械手放置到软膜存放区后，再经取料机械手取用时，两个机械手的无用运行路径均少，路线安排合理，提高效率。仅有层叠架、传送带偶尔需要人员配合作用，而这两者贴近并垂直，这样一个垂直相交的阴角正好为一个人员的站立工位，方便人员操作，人机工程优良。The beneficial effect of adopting the above technical solution is that after the soft film is placed in the soft film storage area by the film stripping robot from the soft film duplication station, and then taken by the material taking robot, the useless running paths of the two robots are reduced, the route arrangement is reasonable, and the efficiency is improved. Only the stacking rack and the conveyor belt occasionally need the cooperation of personnel, and the two are close and perpendicular, so that a vertically intersecting inner angle is just a standing station for a person, which is convenient for personnel operation and has excellent ergonomics.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
图1是本发明一种实施方式的俯视图；FIG1 is a top view of an embodiment of the present invention;
图2是本发明另一种实施方式的俯视图。FIG. 2 is a top view of another embodiment of the present invention.
1-软膜复制工位；2-脱膜机械手；3-载盘存放区；4-软膜存放区；5-取料机械手；6-压印工位；7-废品软膜；8-待加工晶圆存放区；9-成品晶圆存放区；10-层叠架；11-红外线传感器；12-水平往复平移机构；13-传送带。1-soft film replication station; 2-film stripping robot; 3-carrier storage area; 4-soft film storage area; 5-material picking robot; 6-imprinting station; 7-waste soft film; 8-wafer storage area for processing; 9-finished wafer storage area; 10-stacking rack; 11-infrared sensor; 12-horizontal reciprocating translation mechanism; 13-conveyor belt.
具体实施方式DETAILED DESCRIPTION
下面结合具体实施例，对本发明的内容做进一步的详细说明：The present invention is further described in detail below in conjunction with specific embodiments:
为了达到本发明的目的，一种软膜替换及纳米压印一体设备，包括：软膜复制工位1；压印工位6，若干个独立的压印工位1用于进行纳米压印，压印工位6与软膜复制工位1之间设有载盘存放区3、软膜存放区4；层叠架10，压印工位6设为两排，层叠架10与其中一排压印工位6齐平，层叠架10上具备晶圆存放区、废品软膜存放区；取料机械手5，设置在两排平行的压印工位6中间，取料机械手5将软膜存放区4上的软膜与载盘存放区3上的载盘配合，并将配合后软膜及载盘送入压印工位6，取料机械手5将晶圆在压印工位6、晶圆存放区之间转移，同时也将压印工位6上的废品软膜7转移至层叠架10上的废品软膜存放区。In order to achieve the purpose of the present invention, a soft film replacement and nano-imprinting integrated equipment includes: a soft film replication station 1; an imprinting station 6, a plurality of independent imprinting stations 1 are used for nano-imprinting, and a carrier storage area 3 and a soft film storage area 4 are provided between the imprinting station 6 and the soft film replication station 1; a stacking rack 10, the imprinting stations 6 are arranged in two rows, the stacking rack 10 is flush with one of the rows of imprinting stations 6, and the stacking rack 10 is provided with a wafer storage area and a waste soft film storage area; a material picking robot 5 is arranged between the two parallel rows of imprinting stations 6, the material picking robot 5 matches the soft film on the soft film storage area 4 with the carrier on the carrier storage area 3, and sends the matched soft film and the carrier into the imprinting station 6, the material picking robot 5 transfers the wafer between the imprinting station 6 and the wafer storage area, and also transfers the waste soft film 7 on the imprinting station 6 to the waste soft film storage area on the stacking rack 10.
采用上述技术方案的有益效果是：取料机械手本身是用来供晶圆转移的必不可少的部件，新旧软膜的替换也可以利用现有的取料机械手，设备改造成本低。人的操作空间与机械手通过层叠架隔离，安全性高，需要人员操作的工位被集中于一局部，使得人员站立在某处原地便可以操作所有工序，降低劳动强度，提高工作效率。压印工位排布方式合理、进一步缩减取料机械手的运行路程，提高效率，空间利用率高。废模存放区与晶圆存放区共用一个层叠架，物料集中、设备成本低。The beneficial effects of adopting the above technical solution are: the material retrieving robot itself is an indispensable component for wafer transfer, and the replacement of old and new soft films can also use the existing material retrieving robot, and the equipment modification cost is low. The human operating space is isolated from the robot by the stacking rack, which is highly safe. The workstations that require human operation are concentrated in one part, so that personnel can operate all processes while standing in one place, reducing labor intensity and improving work efficiency. The layout of the imprinting stations is reasonable, further reducing the running distance of the material retrieving robot, improving efficiency, and high space utilization. The waste mold storage area and the wafer storage area share a stacking rack, which concentrates materials and reduces equipment costs.
在本发明的另一些实施方式中，软膜复制工位1由若干个独立矩形阵列的软膜复制工位1构成，矩形阵列的软膜复制工位1的中部设有脱膜机械手2，脱膜机械手2将软膜从软膜复制工位1上脱离。In some other embodiments of the present invention, the soft film replication station 1 is composed of a plurality of independent rectangular arrays of soft film replication stations 1 , and a film stripping robot 2 is provided in the middle of the rectangular array of soft film replication stations 1 , and the film stripping robot 2 separates the soft film from the soft film replication station 1 .
软膜复制工位1批次之间具备供脱膜机械手2行走的间隙。There is a gap between batches of the soft film replication station 1 for the film stripping robot 2 to move.
采用上述技术方案的有益效果是：脱膜机械手高效得对软膜进行拿取，提高效率，避免人工拿取的低效率与对软膜的损伤。The beneficial effect of adopting the above technical solution is that the film stripping robot can efficiently take the soft film, thereby improving efficiency and avoiding the low efficiency of manual taking and damage to the soft film.
在本发明的另一些实施方式中，脱模机械手2为水平面内垂直设置的两个直线模组构成。脱膜机械手2同时还具备能够产生负压的真空吸盘。In some other embodiments of the present invention, the demoulding robot 2 is composed of two linear modules vertically arranged in a horizontal plane. The demoulding robot 2 also has a vacuum suction cup capable of generating negative pressure.
采用上述技术方案的有益效果是：矩形阵列的软膜复制工位，对应一个XY方向由度设备来脱模，设备简单可靠。The beneficial effect of adopting the above technical solution is that the rectangular array of soft film replication stations corresponds to an XY direction and is demoulded by a degree device, and the equipment is simple and reliable.
在本发明的另一些实施方式中，软膜复制工位1与压印工位6数量相同，均为六个。In some other embodiments of the present invention, the number of the soft film replication stations 1 and the number of the embossing stations 6 are the same, that is, six.
软膜复制工位1为两排，每排各三个；压印工位6为为两排，一排四个，另一个与层叠架10齐平的一排仅有两个；压印工位6每两个为一组压印模块。The soft film replication stations 1 are divided into two rows, each with three stations; the embossing stations 6 are divided into two rows, each with four stations, and the other row flush with the stacking frame 10 has only two stations; each two embossing stations 6 form a group of embossing modules.
采用上述技术方案的有益效果是：六个的数量便于设备安排，其工作的节拍也适宜人员的工作强度。The beneficial effects of adopting the above technical solution are: the number of six is convenient for equipment arrangement, and the working rhythm is also suitable for the work intensity of personnel.
在本发明的另一些实施方式中，晶圆存放区设在层叠架10的上半段，并分为待加工晶圆存放区8、成品晶圆存放区9，废品软膜存放区设于层叠架10的下半段。In some other embodiments of the present invention, the wafer storage area is located in the upper half of the stacking rack 10 and is divided into a wafer storage area 8 for processing and a finished wafer storage area 9 . The waste soft film storage area is located in the lower half of the stacking rack 10 .
晶圆存放区共有四处空间共叠放晶圆，其中同一侧两处为待加工晶圆存放区8，另一侧两处为成品晶圆存放区9。待加工晶圆存放区8、成品晶圆存放区9均是竖向堆叠晶圆，每个晶圆之间有层叠架10的隔板分离，每个晶圆之间存在竖向的间隙。There are four spaces in the wafer storage area for stacking wafers, two of which are for processing wafer storage areas 8 on the same side, and two on the other side are for finished wafer storage areas 9. Both the processing wafer storage area 8 and the finished wafer storage area 9 are for vertically stacking wafers, each wafer is separated by a partition of a stacking rack 10, and there is a vertical gap between each wafer.
采用上述技术方案的有益效果是：待加工晶圆存放区、成品晶圆的进出口相靠近，方便人员定点操作，晶圆设于上半段，也便于人员目视观察其数量与品质。The beneficial effects of adopting the above technical solution are: the storage area for wafers to be processed and the entrance and exit of finished wafers are close to each other, which is convenient for personnel to operate at fixed points. The wafers are arranged in the upper half, which is also convenient for personnel to visually observe their quantity and quality.
在本发明的另一些实施方式中，层叠架10的下半段的中部设有朝向两侧的红外线传感器11，红外线传感器11将废品软膜存放区左右对分。In some other embodiments of the present invention, an infrared sensor 11 facing both sides is provided in the middle of the lower half of the stacking rack 10, and the infrared sensor 11 divides the waste soft film storage area into left and right halves.
采用上述技术方案的有益效果是：一处的外线传感器可以感知废品软膜存放区上两侧所有的废品软膜数量，设备成本低。The beneficial effect of adopting the above technical solution is that an external line sensor at one location can sense the quantity of all waste soft films on both sides of the waste soft film storage area, and the equipment cost is low.
在本发明的另一些实施方式中，红外线传感器11连接有蜂鸣报警器。In some other embodiments of the present invention, the infrared sensor 11 is connected to a buzzer alarm.
蜂鸣报警器还可以连接取料机械手5的电源，控制其通断电。The buzzer alarm can also be connected to the power supply of the material taking manipulator 5 to control its power on and off.
采用上述技术方案的有益效果是：一旦废品软膜存放区的废品软膜、待加工晶圆、成品晶圆达到最大存放量时便蜂鸣报，提醒人员拿取。The beneficial effect of adopting the above technical solution is that once the waste soft film, wafers to be processed and finished wafers in the waste soft film storage area reach the maximum storage capacity, a buzzer will sound to remind personnel to take them.
在本发明的另一些实施方式中，取料机械手5底部连接有水平往复平移机构12，水平往复平移机构12的运动方向与任意一排压印工位6长度方向平行。In some other embodiments of the present invention, a horizontal reciprocating translation mechanism 12 is connected to the bottom of the material picking robot 5 , and the movement direction of the horizontal reciprocating translation mechanism 12 is parallel to the length direction of any row of imprinting stations 6 .
水平往复平移机构12可以是一个水平直线模组，取料机械手5本身为六轴机械手。The horizontal reciprocating translation mechanism 12 can be a horizontal linear module, and the material taking robot 5 itself is a six-axis robot.
采用上述技术方案的有益效果是：水平往复平移机构提高了取料机械手在水平某一方向上的移动范围与移动速度，提高了取料机械手的作业覆盖范围，水平往复平移机构与取料机械手的运动可以叠加，提高了取料机械手的工作效率。The beneficial effects of adopting the above technical solution are: the horizontal reciprocating translation mechanism increases the moving range and moving speed of the material retrieving robot in a certain horizontal direction, increases the operating coverage range of the material retrieving robot, and the movement of the horizontal reciprocating translation mechanism and the material retrieving robot can be superimposed, thereby improving the working efficiency of the material retrieving robot.
在本发明的另一些实施方式中，如图2所示，载盘存放区3连接有传送带13，传送带13运行方向与载盘存放区3、软膜存放区4的连线方向平行。In some other embodiments of the present invention, as shown in FIG. 2 , the tray storage area 3 is connected to a conveyor belt 13 , and the running direction of the conveyor belt 13 is parallel to the connecting direction of the tray storage area 3 and the soft film storage area 4 .
采用上述技术方案的有益效果是：传送带保证载盘持续的供料，保证作业的连贯性。The beneficial effect of adopting the above technical solution is that the conveyor belt ensures continuous feeding of the carrier plate and ensures the continuity of the operation.
在本发明的另一些实施方式中，软膜存放区4位于水平往复平移机构12与脱模机械手2的连线上，传送带13的长度方向与层叠架10的长度方向垂直，层叠架10与传送带13之间不存在压印工位。In other embodiments of the present invention, the soft film storage area 4 is located on the connecting line of the horizontal reciprocating translation mechanism 12 and the demolding robot 2, the length direction of the conveyor belt 13 is perpendicular to the length direction of the stacking rack 10, and there is no stamping station between the stacking rack 10 and the conveyor belt 13.
采用上述技术方案的有益效果是：使得软膜从软膜复制工位被脱膜机械手放置到软膜存放区后，再经取料机械手取用时，两个机械手的无用运行路径均少，路线安排合理，提高效率。仅有层叠架、传送带偶尔需要人员配合作用，而这两者贴近并垂直，这样一个垂直相交的阴角正好为一个人员的站立工位，方便人员操作，人机工程优良。The beneficial effect of adopting the above technical solution is that after the soft film is placed in the soft film storage area by the film stripping robot from the soft film duplication station, and then taken by the material taking robot, the useless running paths of the two robots are reduced, the route arrangement is reasonable, and the efficiency is improved. Only the stacking rack and the conveyor belt occasionally need the cooperation of personnel, and the two are close and perpendicular, so that a vertically intersecting inner angle is just a standing station for a person, which is convenient for personnel operation and has excellent ergonomics.
上述实施例只为说明本发明的技术构思及特点，其目的在于让熟悉此项技术的人士能够了解本发明的内容并加以实施，并不能以此限制本发明的保护范围，凡根据本发明精神实质所作的等效变化或修饰，都应涵盖在本发明的保护范围内。The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. They cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.
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| CN208421515U (en) * | 2018-05-28 | 2019-01-22 | 苏州光舵微纳科技股份有限公司 | A kind of replacement of mantle and nano impression integrated equipment |
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| CN208421515U (en) * | 2018-05-28 | 2019-01-22 | 苏州光舵微纳科技股份有限公司 | A kind of replacement of mantle and nano impression integrated equipment |
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