CN108152358B - Plasma-mass spectrometry system and working method thereof - Google Patents
Plasma-mass spectrometry system and working method thereof Download PDFInfo
- Publication number
- CN108152358B CN108152358B CN201711490627.XA CN201711490627A CN108152358B CN 108152358 B CN108152358 B CN 108152358B CN 201711490627 A CN201711490627 A CN 201711490627A CN 108152358 B CN108152358 B CN 108152358B
- Authority
- CN
- China
- Prior art keywords
- ion
- valve
- plasma
- mass spectrometry
- spectrometry system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000918 plasma mass spectrometry Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000005070 sampling Methods 0.000 claims abstract description 24
- 150000002500 ions Chemical class 0.000 claims description 53
- 230000007935 neutral effect Effects 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract 1
- 210000002381 plasma Anatomy 0.000 description 16
- 238000004458 analytical method Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000112 cooling gas Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
- 206010010904 Convulsion Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000036461 convulsion Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Toxicology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
The invention provides a plasma-mass spectrometry system and a working method thereof, wherein the plasma-mass spectrometry system comprises a mass spectrometer and a vacuum unit; the outlet of the torch tube is vertically upwards; the sampling cone is arranged in the ion emergent direction of the torch tube; the first valve is arranged in the ion emergent direction and is positioned at the downstream of the sampling cone; the ion deflection unit is arranged in the ion emergent direction and is positioned at the downstream of the first valve, and after passing through the ion deflection unit, the ion deflection angle alpha is formed; the second valve is disposed in the ion direction deflected by the ion deflecting unit. The invention has the advantages of high detection precision and the like.
Description
Technical Field
The present invention relates to mass spectrometry, and more particularly to a plasma-mass spectrometry system and method of operation thereof.
Background
In ICP-MS analysis, the torch tube is horizontally placed, and a sampling cone is adopted to penetrate into plasma to intercept ions in the plasma and enter a mass spectrometer for mass analysis. Because the plasma power is very high, need adopt the air cooling system of water-cooled sampling awl and large-traffic convulsions to dispel the heat to plasma, sampling awl, so not only need very big flow cooling gas (argon) protect the torch pipe to avoid burning the torch pipe, the unavoidable plasma that can blow of air cooling system of large-traffic leads to the inside sampling channel of plasma to receive the influence of wind to produce the disturbance, leads to the analysis result to produce unnecessary fluctuation.
In addition, the interception cone which is penetrated into the plasma is also influenced by the high temperature of the plasma, the ion number acquired by ICP-MS is gradually changed along with the change of heating time, and the signal gradually deviates on the aspect of reflecting the performance together, so that the stability is poor.
Meanwhile, because the torch tube is horizontally placed, the upper space of the torch tube is naturally high in temperature and low in temperature, plasma is unevenly distributed, temperature distribution is also uneven, and the upper space of the torch tube is easily burnt out due to normal influence of thermodynamic.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a plasma-mass spectrometry system which eliminates the influence of neutral ions, has high ion transmission efficiency, short stability time, high analysis precision and good reliability.
A plasma-mass spectrometry system comprising a mass spectrometer, a vacuum unit; the plasma-mass spectrometry system further comprises:
a torch tube, an outlet of the torch tube being vertically upward;
the sampling cone is arranged in the ion emergent direction of the torch tube;
the first valve is arranged in the ion emergent direction and is positioned at the downstream of the sampling cone;
the ion deflection unit is arranged in the ion emergent direction and is positioned at the downstream of the first valve, and after passing through the ion deflection unit, the ion deflection unit deflects by an angle alpha;
and a second valve disposed in an ion direction deflected by the ion deflecting unit.
According to the above plasma-mass spectrometry system, preferably, the first valve and/or the second valve are/is a sliding valve.
According to the above plasma-mass spectrometry system, optionally, the sampling cone includes a first sampling cone and a second sampling cone sequentially disposed.
According to the plasma-mass spectrometry system described above, preferably, the angle α=pi/2.
According to the above plasma-mass spectrometry system, preferably, the ion deflection unit employs a deflection electric field.
The invention also aims to provide a working method of the plasma-mass spectrometry system, and the aim of the invention is achieved by the following technical scheme:
the working method of the plasma-mass spectrometry system comprises the following steps:
(A1) After the torch tube ignites the plasma and moves to a set position, the first valve opens;
ions and neutral particles are emitted from the torch tube and vertically move upwards, sequentially pass through the sampling cone and the first valve and then enter the ion deflection unit, the ions are deflected in the ion deflection unit, and the neutral particles continue to move upwards according to the original movement direction;
(A2) Opening the second valve after the ion interface vacuum reaches the set value;
the deflected ions pass through the second valve and enter downstream;
(A3) The torch tube is closed and the first valve and the second valve are closed.
Compared with the prior art, the invention has the following beneficial effects:
1. compared with the traditional off-axis deflection, the 90-degree off-axis can completely eliminate the interference of central particles, the ion transmission efficiency is higher, and the ion transmission efficiency can be greatly improved by arranging a proper ion optical system in a 90-degree turning space;
2. the plasma design accords with the characteristic of automatic upward movement of hot gas, the upper space of the automatic plasma is uniform for the whole torch tube, the temperature concentration can not be caused at the part of the torch tube, the premature damage of the torch tube is caused, and the service life is prolonged;
3. the temperature on the vertical plasma torch tube will be lower, saving more on cooling gas consumption; the consumption of cooling gas can be reduced to below 10L/min in the conventional way, and the consumption of argon is reduced by one third;
4. the heat of the vertical torch tube is directly taken away by the water-cooling interface above, so that the heat source of the device is more concentrated, the heat is favorably discharged in a concentrated way, and the temperature rise in the whole machine is not caused;
5. the whole excitation of the vertically placed plasmas is more symmetrical, and the plasmas are more stable relative to the transverse placement, so that the analysis precision of the instrument is improved;
6. the two-stage valve is designed as a sliding valve, so that the vacuum of an ion optical system can be better ensured, the system vacuum can not be influenced during maintenance and adjustment of an ion optical interface, the vacuum establishment time is shortened, and the instrument stability time is reduced.
Drawings
The present disclosure will become more readily understood with reference to the accompanying drawings. As will be readily appreciated by those skilled in the art: the drawings are only for illustrating the technical scheme of the present invention and are not intended to limit the scope of the present invention. In the figure:
fig. 1 is a schematic diagram of a plasma-mass spectrometry system according to an embodiment of the present invention.
Detailed Description
Fig. 1 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. In order to teach the technical solution of the present invention, some conventional aspects have been simplified or omitted. Those skilled in the art will appreciate variations or alternatives derived from these embodiments that fall within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Thus, the invention is not limited to the following alternative embodiments, but only by the claims and their equivalents.
Examples
Fig. 1 schematically shows a schematic structure of a plasma-mass spectrometry system according to an embodiment of the present invention, as shown in fig. 1, the plasma-mass spectrometry system including:
a mass spectrometer and a vacuum unit; these are all prior art in the field, and the specific structure and operation are not described in detail herein;
a torch tube, an outlet of the torch tube being vertically upward;
the sampling cone is arranged in the ion emergent direction of the torch tube; the sampling cone comprises a first sampling cone and a second sampling cone which are sequentially arranged;
a first valve, such as a slide valve, disposed in the ion exit direction downstream of the sampling cone;
an ion deflection unit, such as an ion deflection electric field, disposed in the ion exit direction downstream of the first valve, through which ions are deflected by an angle α, such as an angle α=pi/2;
and a second valve, such as a sliding valve, disposed in an ion direction deflected by the ion deflecting unit.
The working method of the plasma-mass spectrometry system comprises the following steps:
(A1) After the torch tube ignites the plasma and moves to a set position, the first valve opens;
ions and neutral particles are emitted from the torch tube and vertically move upwards, sequentially pass through the sampling cone and the first valve and then enter the ion deflection unit, the ions are deflected in the ion deflection unit, and the neutral particles continue to move upwards according to the original movement direction;
(A2) Opening the second valve after the ion interface vacuum reaches the set value;
the deflected ions pass through the second valve and enter downstream;
(A3) The torch tube is closed and the first valve and the second valve are closed.
Claims (6)
1. A plasma-mass spectrometry system that improves service life, the plasma-mass spectrometry system comprising a mass spectrometer; the method is characterized in that: the plasma-mass spectrometry system further comprises:
a torch tube, an outlet of the torch tube being vertically upward;
the sampling cone is arranged in the ion emergent direction of the torch tube;
the first valve is arranged in the ion emergent direction and is positioned at the downstream of the sampling cone;
the ion deflection unit is arranged in the ion emergent direction and is positioned at the downstream of the first valve, and after passing through the ion deflection unit, the ion deflection unit deflects by an angle alpha;
and a second valve disposed in an ion direction deflected by the ion deflecting unit.
2. The plasma-mass spectrometry system of claim 1, wherein: the first valve and/or the second valve adopts a sliding valve.
3. The plasma-mass spectrometry system of claim 1, wherein: the sampling cone comprises a first sampling cone and a second sampling cone which are sequentially arranged.
4. The plasma-mass spectrometry system of claim 1, wherein: angle α=pi/2.
5. The plasma-mass spectrometry system of claim 1, wherein: the ion deflection unit adopts a deflection electric field.
6. A method of operation of a plasma-mass spectrometry system according to any of claims 1-5, the method of operation being:
(A1) After the torch tube ignites the plasma and moves to a set position, the first valve opens;
ions and neutral particles are emitted from the torch tube and vertically move upwards, sequentially pass through the sampling cone and the first valve and then enter the ion deflection unit, the ions are deflected in the ion deflection unit, and the neutral particles continue to move upwards according to the original movement direction;
(A2) Opening the second valve after the ion interface vacuum reaches the set value;
the deflected ions pass through the second valve and enter downstream;
(A3) The torch tube is closed and the first valve and the second valve are closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711490627.XA CN108152358B (en) | 2017-12-30 | 2017-12-30 | Plasma-mass spectrometry system and working method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711490627.XA CN108152358B (en) | 2017-12-30 | 2017-12-30 | Plasma-mass spectrometry system and working method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108152358A CN108152358A (en) | 2018-06-12 |
| CN108152358B true CN108152358B (en) | 2024-02-02 |
Family
ID=62460249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711490627.XA Active CN108152358B (en) | 2017-12-30 | 2017-12-30 | Plasma-mass spectrometry system and working method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108152358B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112241132A (en) * | 2020-09-20 | 2021-01-19 | 杭州谱育科技发展有限公司 | Control device and method for scanning speed of quadrupole mass spectrometer |
| WO2022104448A1 (en) * | 2020-11-18 | 2022-05-27 | Kimia Analytics Inc. | Air-cooled interface for inductively coupled plasma mass spectrometer (icp-ms) |
| CN112863997B (en) * | 2020-12-31 | 2024-06-11 | 杭州谱育科技发展有限公司 | ICP-MS with particle elimination function |
| CN112750677A (en) * | 2020-12-31 | 2021-05-04 | 杭州谱育科技发展有限公司 | Inductively coupled plasma mass spectrometer with particle elimination function |
| CN113488371A (en) * | 2020-12-31 | 2021-10-08 | 杭州谱育科技发展有限公司 | Ion interface device and plasma-mass spectrometry system |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05325885A (en) * | 1992-05-26 | 1993-12-10 | Hitachi Ltd | Mass spectrometer |
| JP2000311650A (en) * | 1999-02-26 | 2000-11-07 | Hitachi Ltd | Plasma ion source mass spectrometer |
| CN2514344Y (en) * | 2001-12-27 | 2002-10-02 | 北京有色金属研究总院 | Induction coupled plasma mass spectrum sample feeding system |
| JP2004071470A (en) * | 2002-08-08 | 2004-03-04 | Yokogawa Analytical Systems Inc | Atmospheric pressure plasma ionizing source mass spectrometer |
| CN103269561A (en) * | 2013-05-15 | 2013-08-28 | 浙江大学 | Waveguide Direct Feed Microwave Plasma Torch Device |
| CN103456610A (en) * | 2013-08-21 | 2013-12-18 | 中国人民解放军国防科学技术大学 | SiC optical material processing device |
| CN103681204A (en) * | 2012-09-08 | 2014-03-26 | 复旦大学 | Ion transmission system for inductively coupled plasma mass spectrometry |
| CN104347343A (en) * | 2014-09-30 | 2015-02-11 | 聚光科技(杭州)股份有限公司 | Analysis device and method |
| CN206057248U (en) * | 2016-08-17 | 2017-03-29 | 东华理工大学 | A kind of mass spectrometer of utilization microwave plasma torch ionization source |
| CN207730704U (en) * | 2017-12-30 | 2018-08-14 | 杭州谱育科技发展有限公司 | Plasma-mass spectrometry system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2647255A1 (en) * | 2006-04-03 | 2007-10-11 | Applied Biosystems Inc. | Method and apparatus for providing ion barriers at the entrance and exit ends of a mass spectrometer |
-
2017
- 2017-12-30 CN CN201711490627.XA patent/CN108152358B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05325885A (en) * | 1992-05-26 | 1993-12-10 | Hitachi Ltd | Mass spectrometer |
| JP2000311650A (en) * | 1999-02-26 | 2000-11-07 | Hitachi Ltd | Plasma ion source mass spectrometer |
| CN2514344Y (en) * | 2001-12-27 | 2002-10-02 | 北京有色金属研究总院 | Induction coupled plasma mass spectrum sample feeding system |
| JP2004071470A (en) * | 2002-08-08 | 2004-03-04 | Yokogawa Analytical Systems Inc | Atmospheric pressure plasma ionizing source mass spectrometer |
| CN103681204A (en) * | 2012-09-08 | 2014-03-26 | 复旦大学 | Ion transmission system for inductively coupled plasma mass spectrometry |
| CN103269561A (en) * | 2013-05-15 | 2013-08-28 | 浙江大学 | Waveguide Direct Feed Microwave Plasma Torch Device |
| CN103456610A (en) * | 2013-08-21 | 2013-12-18 | 中国人民解放军国防科学技术大学 | SiC optical material processing device |
| CN104347343A (en) * | 2014-09-30 | 2015-02-11 | 聚光科技(杭州)股份有限公司 | Analysis device and method |
| CN206057248U (en) * | 2016-08-17 | 2017-03-29 | 东华理工大学 | A kind of mass spectrometer of utilization microwave plasma torch ionization source |
| CN207730704U (en) * | 2017-12-30 | 2018-08-14 | 杭州谱育科技发展有限公司 | Plasma-mass spectrometry system |
Non-Patent Citations (4)
| Title |
|---|
| A highly efficient sample introduction system for interfacing microfluidic chips with ICP-MS;Gareth Pearson et al;Journal of Analytical Atomic Spectrometry(第22期);第657-662页 * |
| A.R.戴特等.《电感耦合等离子体质谱分析的应用》.北京：原子能出版社,1998,第6页. * |
| 李华昌等.《化验师问答》.北京：冶金工业出版社,2006,第112页. * |
| 水平式炬管电感耦合等离子体发射光谱仪的应用;郝金女, 李顺利;现代仪器(01);第23-27页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108152358A (en) | 2018-06-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108152358B (en) | Plasma-mass spectrometry system and working method thereof | |
| CN104134604B (en) | A kind of field emitting electronic source electron beam emitting performance evaluating apparatus and evaluating method thereof | |
| CN207730704U (en) | Plasma-mass spectrometry system | |
| CN107004551B (en) | Ionization apparatus and mass spectrograph comprising ionization apparatus | |
| CN102679352B (en) | Flat-flame nozzle with automatic ignition and flame detection device | |
| KR102388642B1 (en) | Apparatus and method for analyzing evolved gas | |
| CN201813579U (en) | Electronic gun for electron beam melting furnace | |
| US2349822A (en) | Lamp sealing apparatus | |
| KR20140001125A (en) | Icp apparatus, spectrometer and mass spectrometer | |
| CN102263004B (en) | Inductively coupled plasma ion source gas protection device | |
| CN104576289B (en) | A kind of icp mses of adjustable vacuum pressure | |
| CN105848396A (en) | Device using hollow cathode to adjust ion energy | |
| CN109187496B (en) | Atomic emission spectrum analysis device based on electrothermal evaporation and tip discharge | |
| CN104362065A (en) | Large-caliber parallel beam ion source used for ion beam etcher | |
| CN106322433A (en) | Microwave plasma acting cavity capable of achieving automatic ignition | |
| CN108181374A (en) | The method of work of plasma-mass spectrometry system | |
| CN203134750U (en) | 600kW gas discharge electron gun | |
| CN201444140U (en) | Schlieren apparatus light source system | |
| CN202561754U (en) | Flat-flame burning nozzle with automatic-ignition and flame-detection device | |
| CN206639774U (en) | Ion gun | |
| CN208684775U (en) | A kind of linear plasma pipette tips | |
| CN202332785U (en) | Heating device for ion sources | |
| CN201910394U (en) | High-power electron gun | |
| CN202692053U (en) | Air distribution and flame stabilization device for flat flame burner | |
| CN112750678B (en) | Inductively coupled plasma mass spectrometer based on vertical torch and working method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |