CN112750677A - Inductively coupled plasma mass spectrometer with particle elimination function - Google Patents
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- CN112750677A CN112750677A CN202011614130.6A CN202011614130A CN112750677A CN 112750677 A CN112750677 A CN 112750677A CN 202011614130 A CN202011614130 A CN 202011614130A CN 112750677 A CN112750677 A CN 112750677A
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- 239000002245 particle Substances 0.000 title claims abstract description 32
- 238000009616 inductively coupled plasma Methods 0.000 title claims abstract description 26
- 230000008030 elimination Effects 0.000 title claims abstract description 24
- 238000003379 elimination reaction Methods 0.000 title claims abstract description 24
- 238000005070 sampling Methods 0.000 claims abstract description 56
- 150000002500 ions Chemical class 0.000 claims abstract description 31
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 230000037427 ion transport Effects 0.000 claims abstract description 6
- 230000017525 heat dissipation Effects 0.000 claims description 21
- 230000007246 mechanism Effects 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims description 2
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- 238000013461 design Methods 0.000 description 6
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- 238000013519 translation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000001819 mass spectrum Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- 230000005012 migration Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
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- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
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- 230000005855 radiation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
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Abstract
The invention provides an inductively coupled plasma mass spectrometer with a particle elimination function, which comprises a torch tube, a sampling cone and a vacuum cavity, wherein the torch tube is connected with the sampling cone; the ion deflection lens group is arranged in a first chamber of the vacuum chamber, and the ion transmission lens and the mass analyzer are arranged in a second chamber of the vacuum chamber; the shell is provided with a first through hole and a second through hole; the housing is disposed within the second chamber, the ion transport lens and mass analyzer being disposed within the housing; a chamber disposed on a lower side of the first chamber, the torch tube being vertically disposed within the chamber, the sampling cone being disposed within the chamber; ions emitted by the torch tube pass through a sampling cone and enter the first chamber, are deflected by the ion deflection lens group and then enter the second chamber, and sequentially pass through the first through hole, the transmission lens, the mass analyzer and the second through hole. The invention has the advantages of good working performance and the like.
Description
Technical Field
The invention relates to a mass spectrometer, in particular to an inductively coupled plasma mass spectrometer with a particle elimination function and a working method thereof.
Background
Quadrupole mass spectrometers are a commonly used high-end precision analytical instrument. In mass spectrometry, it is common to adjust ion beam deflection and focusing by electric fields (potentials) to achieve that ion beams of different incident energies fly at reasonable deflection angles. The traditional ion optical system design only focuses on guiding and focusing divergent ion beams and introducing mass spectra, and few people pay attention to the influence of photons and neutral ions on the transmission efficiency of the quadrupole rods.
An off-axis deflection lens is introduced into a quadrupole mass spectrometry system on the market at present to eliminate the interference of photons and neutral particles, no special means is adopted to eliminate the neutral particles, and only a molecular pump with enough pumping speed is used for ensuring the vacuum degree of the device. At present, no consideration is given to the influence of poor transmission efficiency and easy pollution of vacuum cavity devices on a quadrupole rod mass spectrum system caused by dispersion of neutral particles.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides the inductively coupled plasma mass spectrometer with the particle elimination function.
The purpose of the invention is realized by the following technical scheme:
the inductively coupled plasma mass spectrometer with the particle elimination function comprises a torch tube, a sampling cone and a vacuum cavity; the inductively coupled plasma mass spectrometer with particle elimination function further includes:
an ion deflection lens group disposed within a first chamber of the vacuum chamber, an ion transport lens and a mass analyzer disposed within a second chamber of the vacuum chamber;
a housing having a first through hole and a second through hole; the housing is disposed within the second chamber, the ion transport lens and mass analyzer being disposed within the housing;
a chamber disposed on a lower side of the first chamber, the torch tube being disposed vertically within the chamber, the sampling cone being disposed within the chamber; ions emitted by the torch tube pass through a sampling cone and enter the first chamber, are deflected by the ion deflection lens group and then enter the second chamber, and sequentially pass through the first through hole, the transmission lens, the mass analyzer and the second through hole.
Compared with the prior art, the invention has the beneficial effects that:
the shell blocks neutral particles generated by the ion deflection lens group and brought sample background gas particles, so that the transmission of the mass analyzer is not interfered by the neutral particles, and the stability and the sensitivity are improved.
Drawings
The disclosure of the present invention will become more readily understood with reference to the accompanying drawings. As is readily understood by those skilled in the art: these drawings are only for illustrating the technical solutions of the present invention and are not intended to limit the scope of the present invention. In the figure:
fig. 1 is a schematic structural diagram of an inductively coupled plasma mass spectrometer having a particle elimination function according to an embodiment of the present invention.
Detailed Description
Fig. 1 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. Some conventional aspects have been simplified or omitted for the purpose of teaching the present invention. Those skilled in the art will appreciate that variations or substitutions from these embodiments will be within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Thus, the present invention is not limited to the following alternative embodiments, but is only limited by the claims and their equivalents.
Example 1:
fig. 1 shows a schematic structural diagram of an inductively coupled plasma mass spectrometer with a particle elimination function according to an embodiment of the present invention, and as shown in fig. 1, the inductively coupled plasma mass spectrometer with a particle elimination function includes:
the sampling device comprises a torch tube 21, a sampling cone 22 and a vacuum cavity, wherein the vacuum cavity comprises a first chamber 11 and a second chamber 12 which are connected in series and are sequentially communicated;
an ion deflection lens group 23, the ion deflection lens group 23 being disposed within the first chamber 11 of the vacuum chamber, and an ion transport lens and a mass analyzer being disposed within the second chamber 12 of the vacuum chamber;
a housing 20, the housing 20 having a first through hole and a second through hole; the housing 20 is disposed within the second chamber 12, the ion transmission lens and mass analyser being disposed within the housing;
a chamber disposed on a lower side of the first chamber, the torch tube being disposed vertically within the chamber, the sampling cone being disposed within the chamber; ions emitted by the torch tube pass through a sampling cone and enter the first chamber, are deflected by the ion deflection lens group and then enter the second chamber, and sequentially pass through the first through hole, the transmission lens, the mass analyzer and the second through hole.
In order to realize the vertical arrangement of the torch tube, further, the inductively coupled plasma mass spectrometer with the particle elimination function further comprises:
the cavity is provided with a side door and a first side wall and a second side wall which are opposite in position, for example, the first side wall and the second side wall which are arranged in parallel are respectively provided with a guide rail, and the guide rails are provided with limiting parts; the torch tube is vertically disposed within the chamber;
the heat dissipation module is fixedly provided with the sampling cone, and the torch tube is positioned at the lower side of the sampling cone;
the two opposite sides of the bearing piece are positioned on the guide rails, and the heat dissipation module is arranged on the bearing piece; the upper side of the bearing piece is connected and sealed with the vacuum cavity; the extending direction of the guide rail is vertical to the central axis of the sampling cone;
the two ends of the sliding part are positioned on the guide rails, the bearing part is rotatably fixed on the sliding part, and the rotating shaft is perpendicular to the sliding part; make the sampling awl can slide on the guide rail along with bearing spare, and then pull out the cavity, and the upset of going around the pivot for the sampling awl is up, is convenient for develop work such as maintenance, dismantlement.
In order to ensure that the central axis of the cone hole of the sampling cone is vertically downward and the sealing between the sampling cone and the vacuum cavity is realized, the mass spectrometer further comprises:
the supporting pieces are respectively arranged in the two grooves in the bottom wall of each guide rail and extend out of the cavity; the supporting piece in the groove is not higher than the bottom wall of the guide rail;
the first side wall and the second side wall are respectively provided with a guide mechanism, and the supporting piece moves up and down in the guide mechanisms;
and the driving structure is used for driving the supporting piece outside the cavity to move up and down in the guide mechanism, so that the supporting piece inside the cavity supports the bearing piece to move up and down.
In order to push the sampling cone to vertically translate outside the chamber, further, the guide mechanism adopts a vertical guide groove, the first side wall and the second side wall are respectively provided with two guide grooves extending in the vertical direction, and the heights of the two vertical top walls are consistent; the support member passes through the guide groove.
In order to synchronously push the bearing piece to vertically translate, the central axis of the taper hole is ensured to be vertically downward, and further, the parts of the supporting pieces which are positioned in the two grooves and extend out of the cavity are connected.
In order to reduce the structural complexity and improve the reliability, further, the driving mechanism comprises:
the rotating arm rotates around a rotating shaft, and the rotating shaft is fixed on the first side wall and the second side wall respectively; the middle part of the rotating arm supports a supporting part outside the cavity;
a power unit driving the rotary arm to rotate in forward and reverse directions around a rotation axis.
In order to improve the heat dissipation capability, the heat dissipation module is a water cooling module, and the side surface adjacent to the torch tube is provided with grooves distributed along the radial direction.
In order to effectively dissipate heat and reduce the influence on flame, the first side wall is provided with a first gas outlet, the second side wall is provided with a second gas outlet, the central axis of the first gas outlet and the central axis of the second gas outlet are collinear, and a coil penetrating through the torch tube is symmetrically arranged on two sides of the coil.
The inductively coupled plasma mass spectrometer with the particle elimination function of the embodiment has the following working modes:
the bearing piece descends to separate the bearing piece from the vacuum cavity and moves downwards to the guide rail; opening the side door;
the bearing piece is pulled outwards, the sliding piece and the bearing piece slide on the guide rail, and the heat dissipation module is pulled out of the cavity;
the heat dissipation module is rotated, the sampling cone overturns, so that the sampling cone faces upwards, and maintenance and disassembly are facilitated.
In order to ensure that the central axis of the sampling cone hole is vertical and the sealing between the sampling cone and the vacuum cavity is ensured, further, the separation mode is as follows:
and the driving mechanism works, the support piece for supporting the bearing piece in the chamber moves downwards, the bearing piece moves downwards and is supported by the guide rail, and the support piece in the chamber moves downwards into the groove in the bottom wall of the guide rail and is lower than the bottom wall of the guide rail.
In order to control the ascending and descending of the carrier (sampling cone) outside the chamber, further, the driving mechanism works in the following way:
the power unit drives the rotating arms outside the first side wall and the second side wall to rotate downwards, the supporting piece supported by the rotating arms and positioned outside the cavity moves downwards in the guide mechanism, and the supporting piece positioned in the cavity moves downwards along with the supporting piece.
Example 2:
an application example of the inductively coupled plasma mass spectrometer having the particle eliminating function according to embodiment 1 of the present invention.
In this application example, as shown in fig. 1, the mass spectrometer includes a vacuum chamber, the horizontally disposed vacuum chamber is divided into a first chamber 11, a second chamber 12, and a third chamber 13 connected in series and in communication, an ion deflection lens group 23 is disposed in the first chamber 11, a first transfer lens 24, a first mass analyzer 25, a second transfer lens 26, a collision reaction cell 27, and a third transfer lens 28 are sequentially disposed in the second chamber 12, and a second mass analyzer 29 is disposed in the third chamber 13;
a housing 20, wherein the housing 20 has a first through hole and a second through hole, is disposed in the second chamber 12, and is made of plastic; the first transmission lens 24, the first mass analyzer 25 are disposed within the housing 20; the central axes of the first through hole, the first transmission lens and the second through hole are collinear;
the cavity is arranged at the lower side of the first cavity, the cavity is of a cylindrical structure and is provided with a first side wall and a second side wall which are opposite and parallel, and the side door is arranged on the front side wall of the cavity; the first side wall and the second side wall are provided with horizontal guide rails which extend forwards and backwards and have the same height, specifically, slide ways are adopted, the end parts of the guide rails are provided with limiting parts, such as steps, so that the sliding parts are prevented from further sliding inwards, and the sampling cone is ensured to be positioned on the upper side of the torch tube which is vertically arranged; the first side wall and the second side wall are respectively provided with a gas outlet, the central axes of the two gas outlets are collinear, and both the gas outlets penetrate through the coil of the torch tube and have the same height with the coil;
the heat dissipation module is a disc-shaped water cooling module, the center of the heat dissipation module is of a cylindrical structure with internal threads, and the heat dissipation module is provided with an annular step; the sampling cone is arranged on the annular step; a compression ring with an external thread matched with the internal thread compresses the sampling cone; the heat dissipation module is fixed on the bearing piece, the end part of the bearing piece is fixed on the sliding piece through a rotating shaft, and the rotating shaft is perpendicular to the extending direction of the sliding piece and parallel to the extending direction of the guide rail, so that the bearing piece rotates around the rotating shaft, and the downward heat dissipation module can be turned upwards; the sliding parts are arranged on the guide rails of the first side wall and the second side wall and slide along the guide rails, and the distance between the end parts of the two sliding parts is equal to the distance between the first side wall and the second side wall; the end parts of the bearing parts, which are adjacent to the first side wall and the second side wall, are arranged on the guide rail, so that the central axis of the sampling cone is vertical;
the sampling cone comprises a first part and a second part, the distance between the inner diameter and the outer diameter of the first part becomes larger gradually along the direction of the central axis of the first part, the tip of the first part is provided with a through hole, and the diameter of the through hole is 0.2-2 mm; the second part is cylindrical and is arranged on one side of the first part far away from the tip; the second part is connected with the first part, the inner diameter of the second part is larger than the diameter of the through hole, and ions pass through the through hole and enter the first part, then pass through the second part and finally enter the vacuum cavity; the inner diameter of the second part is 1-100mm, the thickness is 0.1-10mm, and the length is 1-100 mm;
the bottom walls of the guide rails on the first side wall and the second side wall are respectively provided with two grooves which are positioned at the lower sides of the end parts of the bearing parts arranged on the guide rails, which are adjacent to the first side wall and the second side wall, the two supporting parts are positioned in the grooves and penetrate through the two vertical guide grooves of the side walls, the two supporting parts are connected together outside the chamber, and the bottom ends of the supporting parts outside the chamber are fixed with bearings; the top walls of the two grooves are consistent in height, and the bottom walls of the two grooves are consistent in height, so that when the two supporting pieces are positioned in the guide rail grooves, the parts of the supporting pieces penetrating through the guide grooves are positioned at the bottom walls, the central axes of the sampling cones are vertical, and the sliding of the sliding pieces on the guide rails cannot be hindered; when the part of the supporting piece passing through the guide groove is positioned on the top wall, the heights of the tops of the two supporting pieces positioned on the inner side of the side wall of the chamber are consistent, so that the heat dissipation module is kept horizontal, namely the central axis of the sampling cone is kept vertical; the width of the part of the support member passing through the guide slot is consistent with that of the guide slot, so that the support member is prevented from horizontally translating;
rotating shafts are arranged on the outer walls of the first side wall and the second side wall, one end of a rotating arm rotates around the rotating shafts in the positive direction and the positive direction, and the bearing is arranged in a groove in the middle of the rotating arm; the power unit adopts the cylinder, sets up the downside of the other end of rotor arm, drive the rotor arm is around axis of rotation forward and direction rotation: when rotating in the forward direction, the bearing converts the rotation of the rotating arm into a vertical translation of the support without a horizontal translation; the support piece in the groove of the bottom wall of the guide rail moves upwards, and the end parts of the support bearing piece respectively adjacent to the first side wall and the second side wall vertically move upwards, so that the upper end of the bearing piece and a vacuum chamber with the ion deflection lens group are sealed, and the central axis of the sampling cone is always vertical.
An inelastic voltage contact mounted on the upper side of the carrier,
a vacuum elastic voltage contact installed at the lower side of the vacuum chamber
The main control board is arranged on the upper side of the vacuum cavity, conducts voltage through the vacuum electrode, and loads the voltage onto the vacuum elastic voltage contact in a wiring mode inside the vacuum cavity; the interface and the extraction lens are conducted by applying voltage, and are not interfered by the radiation of the ion source.
The working process of the inductively coupled plasma mass spectrometer with the particle elimination function comprises the installation and maintenance of a sampling cone and the analysis of a sample;
the sampling cone is installed as follows:
the bearing piece is turned over for a circle around the rotating shaft in the positive direction, the heat dissipation module faces upwards, and the sampling cone is installed;
the bearing piece is reversely turned for a circle around the rotating shaft, the heat dissipation module and the sampling cone face upwards, the bearing piece is pushed inwards, the sliding piece and the end part of the bearing piece slide inwards on the guide rail and are finally blocked by the step, and at the moment, the end part of the bearing piece sliding on the guide rail is positioned on the upper side of the supporting piece of the bottom wall of the guide rail;
closing the side door;
outside the cavity, the air cylinder pushes against the other end of the rotating arm to move upwards, the supporting pieces connected together outside the cavity are pushed to vertically move upwards in the guide groove, the supporting pieces inside the cavity support the end part of the bearing piece to move upwards until the supporting pieces move to the top wall of the guide groove, at the moment, the upper end of the bearing piece and the vacuum cavity are sealed, and the central axis of the sampling cone is vertical; the bearing piece is tightly connected with the vacuum cavity, and the inelastic voltage contact is conducted with the vacuum elastic voltage contact; applying a voltage to the interface and the extraction lens;
the maintenance of the sampling cone is as follows:
the cylinder drives the other end of the rotating arm to move downwards, the supporting piece moves downwards vertically, the bearing piece is separated from the vacuum cavity, and the inelastic voltage contact is not conducted with the vacuum elastic voltage contact;
the supporting piece in the cavity moves downwards into the guide rail comparison groove, and the end part of the bearing piece falls back onto the guide rail;
opening a side door, and pulling out the bearing piece outwards;
the bearing piece is positioned outside the cavity and rotates for a circle around the rotating shaft, so that the heat dissipation module and the sampling cone face upwards, and the sampling cone is maintained;
in sample analysis;
the sample is ionized by the flame of the torch tube, then passes through the through hole of the sampling cone and just enters the first part, and then enters the second part; the second part is arranged to inhibit ion divergence;
when the second part is applied with a positive voltage, ions are focused; when a negative voltage is applied, ions are accelerated;
the ions emitted from the chamber enter the ion deflection lens group 23 of the first chamber 11, deflect 90 degrees and then enter the second chamber 12, and sequentially pass through the first through hole, the first transmission lens 24, the first mass analyzer 25 and the second through hole; within the first chamber, photons and neutral ions that enter the first chamber with ions strike a top wall of the first chamber due to inertia; due to the effect of the shell, the central ions are difficult to enter the shell through the first through hole, so that neutral particles are prevented from entering the downstream.
The technical obstacles encountered when the torch tube is adjusted from horizontal to vertical are solved, so that the torch tube is really adjusted from the traditional horizontal arrangement to the vertical arrangement, and the technical effects are correspondingly achieved;
1. the sensitivity is high and the stability is good;
the torch tube is vertically arranged, correspondingly, the sampling cone is supported by the support piece, and the central axis of the cone hole faces downwards, so that the roundness of the cone hole is ensured to be unchanged, the ion passing capacity of the cone hole is not attenuated, and the high sensitivity and stability of mass spectrometry are ensured;
the torch tube is vertically designed, the heat is concentrated, and no loss exists, so that the solvent removing effect is higher than that of a horizontal torch design under the same power compared with that of the horizontal torch;
the design of the second part in the sampling cone inhibits ion divergence and improves the working performance of the mass spectrum;
2. the operation cost is low;
the torch tube is vertically designed, ignition is carried out until flame is stable, and then a sample is continuously analyzed, so that the consumption of Ar gas is reduced by 35% compared with an ICP mass spectrometer designed by a horizontal torch, and the operation cost is obviously reduced;
3. the service life is long;
the torch tube is vertically designed, so that the torch tube is vertically upward, Ar airflow is vertically and spirally upward, flame is vertically upward, heat is upward, and the heating degree of the conical opening is the same; under the action of a heat dissipation module with a large heat dissipation area (radial groove design), the temperature of the sampling cone is uniformly distributed, so that the situation that the sampling cone is scrapped due to overhigh local temperature is avoided, and the service life of the sampling cone is correspondingly prolonged;
4. the installation and the maintenance are convenient;
the push-pull design of a heat dissipation module (sampling cone) is utilized, so that the sampling cone can conveniently enter and exit the cavity; the sampling cone is turned over up and down by utilizing the design during rotation, and the maintenance workload is obviously reduced and the working efficiency is improved by utilizing the installation and the disassembly;
5. the structure is simple, and the reliability is good;
the driving mechanism outside the cavity is used for driving the supporting piece to vertically translate so as to drive the bearing piece in the cavity to vertically translate, a driving mechanism does not need to be arranged in the cavity, and the volume of the cavity and the complexity of arrangement of components in the cavity are reduced;
the rotating arm, the power unit (such as a cylinder), the supporting piece and the guide mechanism are combined into a whole, so that the vertical translation of the supporting piece is realized, and the device is safe and reliable;
the bottom mounting of support piece is on the bearing, and the bearing setting is in the recess of rotor arm for the horizontal migration of support piece can not be brought in the rotation of rotor arm, has avoided the horizontal migration completely to guide mechanism and support piece's damage, and the good reliability, and makes support piece only have vertical translation.
Example 3:
an application example of the inductively coupled plasma mass spectrometer having the particle elimination function according to embodiment 1 of the present invention is different from embodiment 2 in that:
the sampling cone adopts a double-cone structure, and a second part is arranged at the downstream of the double-cone structure, and the second part is of a cylindrical structure.
Claims (8)
1. The inductively coupled plasma mass spectrometer with the particle elimination function comprises a torch tube, a sampling cone and a vacuum cavity; the inductively coupled plasma mass spectrometer with the particle elimination function further includes:
an ion deflection lens group disposed within a first chamber of the vacuum chamber, an ion transport lens and a mass analyzer disposed within a second chamber of the vacuum chamber;
a housing having a first through hole and a second through hole; the housing is disposed within the second chamber, the ion transport lens and mass analyzer being disposed within the housing;
a chamber disposed on a lower side of the first chamber, the torch tube being disposed vertically within the chamber, the sampling cone being disposed within the chamber; ions emitted by the torch tube pass through a sampling cone and enter the first chamber, are deflected by the ion deflection lens group and then enter the second chamber, and sequentially pass through the first through hole, the transmission lens, the mass analyzer and the second through hole.
2. The inductively coupled plasma mass spectrometer with particle elimination as recited in claim 1, wherein the inductively coupled plasma mass spectrometer with particle elimination further comprises:
the cavity is provided with a side door, a first side wall and a second side wall which are opposite in position, the first side wall and the second side wall are respectively provided with a guide rail, and the guide rails are provided with limiting parts; the torch tube is vertically disposed within the chamber;
the heat dissipation module is fixedly provided with the sampling cone, and the torch tube is positioned at the lower side of the sampling cone;
the two opposite sides of the bearing piece are positioned on the guide rails, and the heat dissipation module is arranged on the bearing piece; the upper side of the bearing piece is connected and sealed with the vacuum cavity; the extending direction of the guide rail is vertical to the central axis of the sampling cone;
the two ends of the sliding part are positioned on the guide rails, the bearing part is rotatably fixed on the sliding part, and the rotating shaft is perpendicular to the sliding part.
3. The inductively coupled plasma mass spectrometer with particle elimination as recited in claim 2, wherein the mass spectrometer further comprises:
the supporting pieces are respectively arranged in the two grooves in the bottom wall of each guide rail and extend out of the cavity; the supporting piece in the groove is not higher than the bottom wall of the guide rail;
the first side wall and the second side wall are respectively provided with a guide mechanism, and the supporting piece moves up and down in the guide mechanisms;
and the driving structure is used for driving the supporting piece outside the cavity to move up and down in the guide mechanism, so that the supporting piece inside the cavity supports the bearing piece to move up and down.
4. The inductively coupled plasma mass spectrometer with particle elimination according to claim 3, wherein the guide mechanism employs vertical guide grooves, the first side wall and the second side wall respectively have two guide grooves extending in the vertical direction, and the two vertical top walls have the same height; the support member passes through the guide groove.
5. The inductively coupled plasma mass spectrometer with particle elimination as recited in claim 4, wherein the portions of the supports in the two grooves that extend outside the chamber are connected.
6. The inductively coupled plasma mass spectrometer with particle elimination as recited in claim 5, wherein the drive mechanism comprises:
the rotating arm rotates around a rotating shaft, and the rotating shaft is fixed on the first side wall and the second side wall respectively; the middle part of the rotating arm supports a supporting part outside the cavity;
a power unit driving the rotary arm to rotate in forward and reverse directions around a rotation axis.
7. The inductively coupled plasma mass spectrometer with particle elimination as recited in claim 2, wherein the heat dissipation module is a water cooling module, and the side surface adjacent to the torch has grooves distributed along the radial direction.
8. The inductively coupled plasma mass spectrometer with particle elimination of claim 2, wherein the first sidewall has a first gas outlet and the second sidewall has a second gas outlet, the central axis of the first gas outlet and the central axis of the second gas outlet being collinear and passing through the coil of the torch tube.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113514316A (en) * | 2021-06-15 | 2021-10-19 | 杭州谱育科技发展有限公司 | Particulate matter detection method with silicon detection function |
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