CN108060456A - The Bridgman-Stockbarger method of beryllium aluminate crystal - Google Patents
The Bridgman-Stockbarger method of beryllium aluminate crystal Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims abstract description 97
- 238000000034 method Methods 0.000 title claims abstract description 44
- 229910052790 beryllium Inorganic materials 0.000 title claims abstract description 41
- -1 beryllium aluminate Chemical class 0.000 title claims abstract description 38
- 230000012010 growth Effects 0.000 claims abstract description 27
- 230000001681 protective effect Effects 0.000 claims abstract description 6
- 238000003746 solid phase reaction Methods 0.000 claims abstract description 5
- 238000010671 solid-state reaction Methods 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 claims abstract 2
- 238000005245 sintering Methods 0.000 claims abstract 2
- 238000005303 weighing Methods 0.000 claims abstract 2
- 150000002500 ions Chemical class 0.000 claims description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052593 corundum Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 3
- 229910009973 Ti2O3 Inorganic materials 0.000 claims description 2
- 238000011081 inoculation Methods 0.000 claims description 2
- GQUJEMVIKWQAEH-UHFFFAOYSA-N titanium(III) oxide Chemical compound O=[Ti]O[Ti]=O GQUJEMVIKWQAEH-UHFFFAOYSA-N 0.000 claims description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims 2
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 claims 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- 239000004411 aluminium Substances 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910000023 beryllium carbonate Inorganic materials 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 claims 1
- 238000010348 incorporation Methods 0.000 claims 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 1
- 230000034655 secondary growth Effects 0.000 claims 1
- 238000006467 substitution reaction Methods 0.000 claims 1
- 230000002194 synthesizing effect Effects 0.000 claims 1
- 239000002994 raw material Substances 0.000 abstract description 9
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 abstract description 3
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 10
- 239000000155 melt Substances 0.000 description 5
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 4
- 238000013475 authorization Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- QWVYNEUUYROOSZ-UHFFFAOYSA-N trioxido(oxo)vanadium;yttrium(3+) Chemical compound [Y+3].[O-][V]([O-])([O-])=O QWVYNEUUYROOSZ-UHFFFAOYSA-N 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/02—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method without using solvents
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
技术领域technical field
本发明涉及一种采用坩埚下降法生长铝酸铍晶体的方法,属于晶体生长技术领域。The invention relates to a method for growing beryllium aluminate crystals by using a crucible drop method, and belongs to the technical field of crystal growth.
背景技术Background technique
铝酸铍晶体(化学式为BeAl2O4),熔点1870℃,属于正交晶系,晶格常数BeAl2O4晶体是一种优良的激光基质晶体材料。激光基质晶体材料是激光技术发展的核心和基础,在激光技术发展的各个关键阶段均起了举足轻重的作用。现阶段,钇铝石榴石(YAG)、钒酸钇(YVO4)、蓝宝石(Al2O3)仍是最富盛名的激光基质晶体。BeAl2O4晶体是一种具有很大潜力的激光基质晶体材料,作为基质其物化性能超过了YAG晶体,掺铬的铝酸铍(Cr:BeAl2O4)激光晶体的激光特性超过了红宝石(Cr:Al2O3)激光晶体,但BeAl2O4晶体应用范围远没有YAG晶体广泛,这主要归结为:(1)BeAl2O4晶体的生长难度大,需要更加苛刻的工艺条件。由于BeAl2O4晶体的熔体具有很大的粘度,在生长过程中容易引起开裂,获得的晶体易出现散射点、色带、生长条纹、掺质离子浓度分布不均匀等一些列缺陷,这严重地影响了晶体的激光性能;(2)在生长BeAl2O4晶体时,由于原料中具有毒性很强的Be元素,在晶体生长过程中BeO挥发到环境中,会对科研人员的身体和环境造成很大危害,所以具有很大市场与经济效益的这种产品还未能得到商业化开发。Beryllium aluminate crystal (chemical formula BeAl 2 O 4 ), melting point 1870°C, belongs to orthorhombic crystal system, lattice constant BeAl 2 O 4 crystal is an excellent laser host crystal material. Laser matrix crystal materials are the core and foundation of laser technology development, and play a pivotal role in all key stages of laser technology development. At present, yttrium aluminum garnet (YAG), yttrium vanadate (YVO 4 ), and sapphire (Al 2 O 3 ) are still the most famous laser host crystals. BeAl 2 O 4 crystal is a laser host crystal material with great potential. As a host, its physical and chemical properties exceed that of YAG crystal, and the laser properties of chromium-doped beryllium aluminate (Cr:BeAl 2 O 4 ) laser crystal exceed that of ruby (Cr:Al 2 O 3 ) laser crystals, but the application range of BeAl 2 O 4 crystals is far less extensive than that of YAG crystals. This is mainly due to: (1) The growth of BeAl 2 O 4 crystals is difficult and requires more stringent process conditions. Because the melt of BeAl 2 O 4 crystal has a high viscosity, it is easy to cause cracks during the growth process, and the obtained crystal is prone to a series of defects such as scattering points, color bands, growth stripes, and uneven distribution of dopant ion concentration. Seriously affect the laser performance of the crystal; (2) When growing BeAl 2 O 4 crystal, due to the highly toxic Be element in the raw material, BeO volatilizes into the environment during the crystal growth process, which will harm the body and The environment causes great harm, so this product with great market and economic benefits has not been commercially developed.
中国专利(授权号CN1062318C和授权号CN101407402B)分别应用旋转温梯法和垂直静态温度梯度法成功的生长出宝石级别掺质BeAl2O4晶体,但是晶体质量还达不到激光晶体标准,使晶体受限于激光方面的应用。中国专利(公开号CN1824847A)采用变转速坩埚旋转提拉法生长Cr:BeAl2O4晶体,使用变转速坩埚旋转可以提高晶体熔体组分的均匀性,但生长的Cr:BeAl2O4晶体仍然无法完全解决晶体生长过程中的包裹物等缺陷,同时采用提拉法无法解决熔体中BeO的挥发这一技术难题。俄罗斯专利(RU2315134C1)采用泡生法生长铝酸铍晶体,但该方法周期较长,不利于工业化生产。Chinese patents (authorization number CN1062318C and authorization number CN101407402B) have successfully grown gem-level doped BeAl 2 O 4 crystals by using the rotating temperature gradient method and the vertical static temperature gradient method respectively, but the crystal quality is not up to the laser crystal standard, which makes the crystal limited. applications in lasers. The Chinese patent (publication number CN1824847A) adopts the variable speed crucible rotation pulling method to grow Cr:BeAl 2 O 4 crystals, and the use of variable speed crucible rotation can improve the uniformity of crystal melt components, but the grown Cr:BeAl 2 O 4 crystals Defects such as inclusions in the crystal growth process still cannot be completely solved, and the technical problem of volatilization of BeO in the melt cannot be solved by the pulling method. The Russian patent (RU2315134C1) uses the Kyropoulos method to grow beryllium aluminate crystals, but this method has a long period and is not conducive to industrial production.
传统的坩埚下降法生长晶体(如授权号CN101280456B和授权号CN10138940B)均不采用密闭坩埚的方式,这无法解决高毒性的挥发物挥发对人体和环境造成危害的难题。The traditional crucible drop method for growing crystals (such as authorization number CN101280456B and authorization number CN10138940B) does not use a closed crucible, which cannot solve the problem that highly toxic volatiles volatilize and cause harm to the human body and the environment.
发明内容Contents of the invention
本发明的目的在于克服上述现有技术的不足,提出一种BeAl2O4晶体的坩埚下降法生长方法,旋紧坩埚盖密封坩埚,可抑制熔体中BeO的挥发,使熔体更加均匀,得到的晶体激光性能优良;也避免了熔体中BeO挥发到坩埚外对人体和环境造成危害。并且可以同时生长一根或多根规格形状不同、结晶学方向不同的BeAl2O4晶体,提高了晶体的生长效率。The object of the present invention is to overcome above-mentioned deficiencies in the prior art, propose a kind of BeAl 2 O 4 crucible descending method growth method of crystal, tighten the crucible cover to seal the crucible, can suppress the volatilization of BeO in the melt, make the melt more uniform, The obtained crystal laser has excellent performance; it also prevents the BeO in the melt from volatilizing out of the crucible to cause harm to the human body and the environment. Moreover, one or more BeAl 2 O 4 crystals with different specifications, shapes and crystallographic directions can be grown simultaneously, which improves the crystal growth efficiency.
本发明的技术解决方案如下:Technical solution of the present invention is as follows:
铝酸铍晶体的坩埚下降法生长方法,其特点在于:该方法包括如下步骤:The crucible drop method growth method of beryllium aluminate crystal is characterized in that: the method comprises the following steps:
①初始原料Al2O3和BeO按照化学计量比Al2O3:BeO=1:1称料,混合均匀并压结成粉块;① The initial raw materials Al 2 O 3 and BeO are weighed according to the stoichiometric ratio Al 2 O 3 : BeO=1:1, mixed evenly and compacted into a powder block;
②所述的粉块在1200~1350℃炉温下预烧结8~12小时,经固相反应合成铝酸铍多晶组分;②The powder block is pre-sintered at a furnace temperature of 1200-1350°C for 8-12 hours, and the polycrystalline beryllium aluminate component is synthesized through a solid-state reaction;
③将固定取向的铝酸铍籽晶放入坩埚底部籽晶槽,然后将步骤②合成的铝酸铍多晶组分放入坩埚,并旋紧坩埚盖密封坩埚;③ put the beryllium aluminate seed crystal with fixed orientation into the seed crystal groove at the bottom of the crucible, then put the beryllium aluminate polycrystalline component synthesized in step ② into the crucible, and tighten the crucible lid to seal the crucible;
④将坩埚置于下降法生长炉中,抽真空,待真空度达到至少1×10-3Pa时,充入高纯Ar作为保护气氛;④ Put the crucible in the descending method growth furnace, evacuate it, and fill it with high-purity Ar as a protective atmosphere when the vacuum degree reaches at least 1×10 -3 Pa;
⑤升温使炉温控制在1870~1950℃,接种、生长,生长界面温度梯度控制在10~40℃/cm,坩埚下降速度控制在0.5~10mm/h。⑤Raise the temperature to control the furnace temperature at 1870-1950°C, control the temperature gradient of the growth interface at 10-40°C/cm for inoculation and growth, and control the falling speed of the crucible at 0.5-10mm/h.
进一步地,所述的铝酸铍晶体包含铝酸铍基质晶体及掺质铝酸铍(如掺入Cr3+、Ti4 +、V5+、Fe3+等离子)晶体。Further, the said beryllium aluminate crystals include beryllium aluminate matrix crystals and doped beryllium aluminate (eg doped with Cr 3+ , Ti 4 + , V 5+ , Fe 3+ plasma) crystals.
进一步地,所述的原料之一BeO可用Be(OH)2或是BeCO3取代,所述的掺杂离子(Cr3 +、Ti4+、V5+、Fe3+等)可以是这些离子的氧化物(如Cr2O3、Ti2O3、V2O5、Fe2O3等)或是碳酸盐和氢氧化物等,所有原料纯度均大于99.9%。Further, one of the raw materials, BeO, can be replaced by Be(OH) 2 or BeCO 3 , and the dopant ions (Cr 3 + , Ti 4+ , V 5+ , Fe 3+ , etc.) can be these ions Oxides (such as Cr 2 O 3 , Ti 2 O 3 , V 2 O 5 , Fe 2 O 3 , etc.) or carbonates and hydroxides, etc., and the purity of all raw materials is greater than 99.9%.
进一步地,所述坩埚可以是铱金坩埚、钼坩埚、钨坩埚等,坩埚配有坩埚盖。Further, the crucible may be iridium crucible, molybdenum crucible, tungsten crucible, etc., and the crucible is equipped with a crucible cover.
进一步地,坩埚可以是单孔或是多孔结构,坩埚形状可以是圆柱形、方柱形或其他多边形,生长的晶体形状取决于坩埚的形状,可一次生长一根铝酸铍晶体或是一次同时生长不同形状、不同尺寸铝酸铍晶体。Further, the crucible can be single hole or porous structure, the shape of the crucible can be cylindrical, square column or other polygonal shape, the shape of the grown crystal depends on the shape of the crucible, one beryllium aluminate crystal can be grown at a time or can be grown at the same time Beryllium aluminate crystals of different shapes and sizes are grown.
进一步地,所述的确定方向的铝酸铍籽晶可以是<001>、<010>或/和<100>方向籽晶,并且可以在同一炉内生长不同方向的铝酸铍晶体。Further, the beryllium aluminate seed crystals with a certain orientation can be <001>, <010> or/and <100> orientation seeds, and beryllium aluminate crystals with different orientations can be grown in the same furnace.
与现有技术相比,本发明具有的有益效果:Compared with the prior art, the present invention has the beneficial effects:
本发明与温梯法相比较,晶体生长过程中功率不变、温场更加稳定,可有效控制组分挥发,晶体完整性好、成品率高、晶体尺寸和外形更容易控制,固液界面温度梯度小可减少晶体开裂等。另外,该方法工艺设备简单、操作方便、能耗低,这些都有利于工业化生产。本发明与温梯法和泡生法生长BeAl2O4晶体相比,其优点列于表1。Compared with the temperature gradient method, the present invention has the same power and more stable temperature field during the crystal growth process, can effectively control component volatilization, has good crystal integrity, high yield, easier control of crystal size and shape, and solid-liquid interface temperature gradient. Small can reduce crystal cracking and so on. In addition, the method has simple process equipment, convenient operation and low energy consumption, all of which are beneficial to industrial production. Compared with the temperature gradient method and the Kyropoulos method for growing BeAl 2 O 4 crystals, the advantages of the present invention are listed in Table 1.
表1本发明与温梯法、泡生法生长BeAl2O4晶体的比较Table 1 The comparison between the present invention and the temperature gradient method and the Kyropoulos method of growing BeAl 2 O 4 crystals
具体实施方式Detailed ways
下面结合实施例对本发明作进一步说明,但不应以此限制本发明的保护范围。The present invention will be further described below in conjunction with embodiment, but should not limit protection scope of the present invention with this.
实施例1:将99.9%纯度的Al2O3和BeO按照化学计量比Al2O3:BeO=1:1称料,混合均匀、压块,在1200℃固相反应12小时合成多晶组分;然后选定取向<001>的BeAl2O4籽晶置于圆柱形钼坩埚底部籽晶槽中,再将合成的多晶组分装入坩埚,旋紧坩埚盖密封坩埚;将坩埚置于下降法晶体生长炉中,抽真空,待真空度达到1×10-3Pa时,充入高纯Ar作为保护气氛;升温至1900℃将坩埚内原料熔化并通过调整坩埚入炉位置使籽晶顶部熔融,生长界面温度梯度控制在40℃/cm左右,以1mm/h的速度下降坩埚进行晶体生长。可获得完整的、内部质量优良的圆柱状BeAl2O4晶体。Example 1: Al 2 O 3 and BeO with a purity of 99.9% were weighed according to the stoichiometric ratio Al 2 O 3 : BeO=1:1, mixed evenly, compacted, and solid-state reacted at 1200°C for 12 hours to synthesize a polycrystalline group Then select the BeAl 2 O 4 seed crystal with orientation <001> and place it in the seed crystal tank at the bottom of the cylindrical molybdenum crucible, then put the synthesized polycrystalline components into the crucible, tighten the crucible lid to seal the crucible; place the crucible In the descending method crystal growth furnace, vacuumize, and when the vacuum degree reaches 1×10 -3 Pa, fill high-purity Ar as a protective atmosphere; heat up to 1900°C to melt the raw materials in the crucible, and adjust the position of the crucible into the furnace to make the seeds The top of the crystal is melted, the temperature gradient of the growth interface is controlled at about 40°C/cm, and the crucible is lowered at a speed of 1mm/h for crystal growth. Complete cylindrical BeAl 2 O 4 crystals with good internal quality can be obtained.
实施例2:将99.9%纯度的Al2O3、BeO和Cr2O3按照化学计量比称料,混合均匀、压块。掺质Cr2O3及BeO和Al2O3的用量按照如下反应方程式计算:Example 2: Al 2 O 3 , BeO and Cr 2 O 3 with a purity of 99.9% were weighed according to the stoichiometric ratio, mixed uniformly, and compacted. The amount of dopant Cr 2 O 3 and BeO and Al 2 O 3 is calculated according to the following reaction equation:
(1-x)Al2O3+xCr2O3+BeO→BeAl2-xCrxO4(其中x为掺入Cr2O3的摩尔浓度)(1-x)Al 2 O 3 +xCr 2 O 3 +BeO→BeAl 2-x Cr x O 4 (where x is the molar concentration of Cr 2 O 3 doped)
将压结块在1350℃固相反应8小时合成多晶组分;然后选定取向<001>的BeAl2O4籽晶置于长方柱形钨坩埚底部籽晶槽中,再将合成的多晶组分装入坩埚,旋紧坩埚盖密封坩埚;将坩埚置于下降法晶体生长炉中,抽真空,待真空度达到1×10-3Pa时,充入高纯Ar作为保护气氛;升温至1950℃将坩埚内原料熔化并通过调整坩埚入炉位置使籽晶顶部熔融,生长界面温度梯度控制在20℃/cm左右,以10mm/h的速度下降坩埚进行晶体生长。可获得完整的、内部质量优良的长方柱状<001>方向掺Cr元素的BeAl2-xCrxO4激光晶体。The polycrystalline components were synthesized by solid-state reaction at 1350°C for 8 hours; then the BeAl 2 O 4 seed crystal with the selected orientation <001> was placed in the seed crystal tank at the bottom of the rectangular cylindrical tungsten crucible, and the synthesized Put the polycrystalline components into the crucible, tighten the crucible lid to seal the crucible; place the crucible in a down-flow method crystal growth furnace, vacuumize it, and fill it with high-purity Ar as a protective atmosphere when the vacuum degree reaches 1×10 -3 Pa; Raise the temperature to 1950°C to melt the raw materials in the crucible and melt the top of the seed crystal by adjusting the position of the crucible into the furnace. The temperature gradient of the growth interface is controlled at about 20°C/cm, and the crucible is lowered at a speed of 10mm/h for crystal growth. A complete rectangular columnar BeAl 2-x Cr x O 4 laser crystal doped with Cr elements in the <001> direction can be obtained with good internal quality.
实施例3:将99.9%纯度的Al2O3、BeO和Ti2O3按照化学计量比称料,混合均匀、压块。掺质Ti2O3及BeO和Al2O3的用量按照如下反应方程式计算:Example 3: Al 2 O 3 , BeO and Ti 2 O 3 with a purity of 99.9% were weighed according to the stoichiometric ratio, mixed uniformly, and compacted. The amount of dopant Ti2O3 , BeO and Al2O3 is calculated according to the following reaction equation :
(1-x)Al2O3+xTi2O3+BeO→BeAl2-xTixO4(其中x为掺入Ti2O3的摩尔浓度)(1-x)Al 2 O 3 +xTi 2 O 3 +BeO→BeAl 2-x Ti x O 4 (where x is the molar concentration of Ti 2 O 3 doped)
将压结块在1300℃固相反应10小时合成多晶组分;然后选定取向<010>和<001>的BeAl2O4籽晶各两根,分别置于钼坩埚底部籽晶槽中,坩埚采用四孔结构,其中两孔为圆柱形,另外两孔为长方柱形,再将合成的多晶组分装入坩埚,旋紧坩埚盖密封坩埚;将坩埚置于下降法晶体生长炉中,抽真空,待真空度达到1×10-3Pa时,充入高纯Ar作为保护气氛;升温至1910℃将坩埚内原料熔化并通过调整坩埚入炉位置使籽晶顶部熔融,生长界面温度梯度控制在15℃/cm左右,以5mm/h的速度下降坩埚进行晶体生长。可同时获得2根长方柱状、2根圆柱状完整的、内部质量优良的掺Ti的BeAl2-xTixO4激光晶体。The agglomerate was subjected to solid-state reaction at 1300°C for 10 hours to synthesize polycrystalline components; then two BeAl 2 O 4 seed crystals with orientation <010> and <001> were selected and placed in the seed crystal tank at the bottom of the molybdenum crucible respectively , the crucible adopts a four-hole structure, two of which are cylindrical, and the other two are rectangular columns, and then the synthesized polycrystalline components are put into the crucible, and the crucible lid is tightened to seal the crucible; the crucible is placed in the descending method of crystal growth Vacuumize the furnace, and when the vacuum reaches 1×10 -3 Pa, fill it with high-purity Ar as a protective atmosphere; heat up to 1910°C to melt the raw materials in the crucible, and adjust the position of the crucible into the furnace to melt the top of the seed crystal and grow The interface temperature gradient is controlled at about 15°C/cm, and the crucible is lowered at a speed of 5 mm/h for crystal growth. Two rectangular columns and two complete columns of Ti-doped BeAl 2-x Ti x O 4 laser crystals with excellent internal quality can be obtained at the same time.
最后需要说明的,以上所述仅为本发明的实施例,并非因此限制本发明的权利范围。显而易见,本领域技术人员所做出的对所述实施方式任何相关联的更改或变更,都不会超出本发明的构思和所附权利要求的保护范围。Finally, it should be noted that the above descriptions are only examples of the present invention, and are not intended to limit the scope of rights of the present invention. Apparently, any associated modifications or alterations to the embodiments made by those skilled in the art will not go beyond the concept of the present invention and the scope of protection of the appended claims.
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