CN107818934A - A kind of device of double-pendulum arms correcting working table - Google Patents

Abstract

The invention discloses a device for correcting a workbench with double swing arms, which is characterized in that it comprises a coring part, a correction part, a fine pendulum part and a control part; the coring part, the correction part and the fine pendulum part are respectively connected with the control part. The invention realizes high-precision displacement correction, high-precision rotation correction, high-precision position rearrangement, and high-speed precise positioning of semiconductor equipment; reduces the design, manufacture, use, and maintenance costs of semiconductor equipment, improves the operating speed of equipment, and improves Improve IC production and manufacturing efficiency; realize the precise and high-speed operation requirements of semiconductor equipment to pick and place chips.

Description

A device for correcting workbench with double swing arms

technical field

The invention belongs to the field of semiconductor processing and manufacturing, in particular to a device for correcting a workbench with double swing arms.

Background technique

The back-end packaging process of integrated circuit IC manufacturing, semiconductor equipment runs through the entire packaging process, including incoming inspection Wafer IQC (Incoming Quality Control), surface mount SMT (Surface Mounted Technology), chip paste Die Attach, wire bonding Wire Bond, etc. . The double-swing arm calibration table device re-sorts the inspected wafers with high precision, completes the film-to-film or film-to-module chip rearrangement, and realizes high-precision wafer placement and high-precision bonding of semiconductor wafers. A new Fan-out package form of WLP (Wafer Level Package).

There are two techniques available:

1. Three-axis linkage welding arm + single calibration camera + double positioning camera + double X-Y workbench, as shown in Figure 3:

When the device moves the wafer film-to-film, the calibration camera is used to complete the detection and calibration data calculation of the wafer, and the rearrangement of the wafer is completed through the movement and rotation of the three-axis linkage welding arm.

The device can meet the work requirements, but due to its high requirements for the action and precision of mechanical components, it causes complex design and maintenance of mechanical components, high equipment manufacturing and maintenance costs, slow equipment use and movement speed, and low industrial production efficiency. .

2. Single swing arm + double positioning camera + double X-Y workbench, as shown in Figure 4:

This device is an original invention. When film-to-film moves wafers, it adopts the single swing arm-dual positioning camera mode, and the dual positioning cameras collect images. After image data processing, the single swing arm completes the wafer rearrangement and film pairing. The movement and positioning action of the membrane.

Its technical defects are: due to the uneven viscosity of the blue film or UV film used on the semiconductor wafer, the stretching deformation of the film is uneven, which may easily cause displacement or rotation of the chip when it is removed from the film, and the position after the shift is placed is not accurate.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies of the prior art and provide a device for correcting the worktable with double swing arms, which realizes high-precision displacement correction, high-precision rotation correction, high-precision position rearrangement, and high-speed precise swing of semiconductor equipment. The device uses high-precision components, and through simple mechanical design, it realizes the high-precision, high-speed pick-up, calibration, pick-and-place work requirements of the chip, reduces the design, manufacture, use, and maintenance costs of semiconductor equipment, and improves the equipment. The operating speed improves IC production and manufacturing efficiency; the device simplifies the design of mechanical parts, and through correct adjustment and matching the vacuum suction and release time of each part, the precise and high-speed chip pick-and-place action requirements of semiconductor equipment are realized. .

The technical scheme that realizes the object of the present invention is:

A device for correcting a workbench with double swing arms comprises a coring part, a correction part, a fine pendulum part and a control part; the coring part, the correction part and the fine pendulum part are respectively connected with the control part.

The control part is a control system.

The coring part includes a first positioning camera, a first swing arm, and a first X-Y worktable; the first positioning camera is arranged directly above the first X-Y workbench; the first swing arm is connected to the first X-Y worktable Connection; the first positioning camera, the first swing arm, and the first X-Y worktable are respectively connected to the control system of the control part.

The correction part includes a correction camera and an X-Y-θ correction workbench; the correction camera is arranged directly above the X-Y-θ correction workbench; the correction camera and the X-Y-θ correction workbench are respectively connected to the control system of the control part; the X-Y The -θ correction table is also connected with the first swing arm of the coring section.

The X-Y-θ correction table is provided with a θ motor, the calibration camera is arranged directly above the θ motor, and the θ motor can rotate on the X-Y-θ correction table.

The fine swing part includes a second positioning camera, a second swing arm, and a second X-Y worktable; the second positioning camera is arranged directly above the second X-Y worktable; the second swing arm is connected to the second X-Y worktable Connection; the second positioning camera, the second swing arm, and the second X-Y workbench are respectively connected to the control system of the control part; the second swing arm is also connected to the X-Y-θ correction workbench of the correction part.

For the X-Y-θ calibration table, second swing arm, and second X-Y table, according to the target accuracy requirements, X-Y-θ calibration table, second swing arm, and second X-Y table with different precisions are selected respectively.

Said precision includes high, medium and low precision.

The coring part, correction part and fine pendulum part are respectively connected with the control part, through the operation and control of the control system, correction actions such as chip correction and rotation are realized, and the information is displayed on the display of the control system.

Beneficial effects: the present invention provides a device for correcting workbenches with double swing arms, which realizes high-precision displacement correction, high-precision rotation correction, high-precision position rearrangement, and high-speed precise positioning of semiconductor equipment; The design, manufacture, use, and maintenance costs of the equipment have increased the operating speed of the equipment, improved the efficiency of IC production and manufacturing, and realized the work requirements of high-precision, high-speed pick-up, calibration, and pick-and-place chips for semiconductor equipment. The device re-sorts the semiconductor wafers that meet the standards with high precision, and completes the chip rearrangement of film-to-film or film-to-module.

Description of drawings

Fig. 1 is a structural block diagram of a device for correcting a workbench with double swing arms of the present invention;

Fig. 2 is the working schematic diagram of the device of a kind of double swing arm correction workbench of the present invention;

Figure 3 is a three-axis linkage welding arm + single calibration camera + double positioning camera + double X-Y table;

Figure 4 is a single swing arm + double positioning camera + double X-Y workbench;

In Figure 1, 1. Coring part 1-1. First positioning camera 1-2. First swing arm 1-3. First X-Y table 2. Correction part 2-1. Correction camera 2-2. X-Y- θ correction table 2-3. θ motor 3. Fine pendulum part 3-1. Second positioning camera 3-2. Second swing arm 3-3. Second X-Y table 4. Control part 4-1. Control system .

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited thereto.

Example:

As shown in Figure 1, a device for correcting a workbench with double swing arms includes a coring part 1, a correction part 2, a fine pendulum part 3, and a control part 4; the coring part 1, the correction part 2, and the fine pendulum part 3 are respectively Connect with control section 4.

The control part 4 is a control system 4-1.

The coring part 1 includes a first positioning camera 1-1, a first swing arm 1-2, and a first X-Y table 1-3; the first positioning camera 1-1 is set on the first X-Y table 1- directly above 3; the first swing arm 1-2 is connected with the first X-Y table 1-3; the first positioning camera 1-1, the first swing arm 1-2, and the first X-Y table 1-3 are respectively connected to The control system 4-1 of the control section 4 is connected.

The correction part 2 includes a correction camera 2-1, an X-Y-θ correction workbench 2-2; the correction camera 2-1 is arranged directly above the X-Y-θ correction workbench 2-2; the correction camera 2-1, The X-Y-θ correction table 2-2 is respectively connected with the control system 4-1 of the control part 4; the X-Y-θ correction table 2-2 is also connected with the first swing arm 1-2 of the coring part 1.

The X-Y-θ correction table is provided with a θ motor 2-3, the correction camera 2-1 is arranged directly above the θ motor 2-3, and the θ motor 2-3 can be placed on the X-Y-θ correction table 2-2 up spin.

The fine swing part 3 includes a second positioning camera 3-1, a second swing arm 3-2, and a second X-Y worktable 3-3; the second positioning camera 3-1 is arranged on the second X-Y worktable 3- 3 directly above; the second swing arm 3-2 is connected with the second X-Y workbench 3-3; the second positioning camera 3-1, the second swing arm 3-2, and the second X-Y workbench 3-3 are respectively connected to The control system 4-1 of the control part 4 is connected; the second swing arm 3-2 is also connected with the X-Y-θ correction table 2-2 of the correction part 2.

The X-Y-θ correction workbench 2-2, the second swing arm 3-2, and the second X-Y workbench 3-3, according to the target accuracy requirements, respectively select different precision X-Y-θ correction workbenches 2-2, The second swing arm 3-2, the second X-Y workbench 3-3.

Said precision includes high, medium and low precision.

The coring part 1, correction part 2, and fine pendulum part 3 are respectively connected to the control part 4, and through the calculation and control of the control system 4-1, corrective actions such as chip correction and rotation are realized, and in the control system 4-1 The display will display the information.

Device workflow of the present invention is as follows:

As shown in Figure 2, the work flow starts from the coring part 1 of the device, and the chip is put into the first X-Y workbench 1-3, and the control system 4-1 collects the image coordinate data of the chip by processing the first positioning camera 1-1 , control the first X-Y table 1-3 to move to the coordinate origin of the first swing arm 1-2; the control system 4-1 processes the data, and controls the first swing arm 1-2 to move to the first X-Y table 1-3 Prepare to pick up the chip; the control system 4-1 correctly adjusts the vacuum suction and release time of the suction nozzle of the first swing arm 1-2 to complete the chip pickup.

The control system 4-1 calculates the target positioning of the chip through the calibration camera 2-1 and the X-Y-θ calibration table 2-2 of the calibration part 2, controls the first swing arm 1-2 to complete the 180° rotation, and sends the chip to the calibration The X-Y-θ calibration of part 2 is on the θ motor 2-3 in the center of the workbench 2-2; the first swing arm 1-2 is reset, and the camera 2-1 is corrected to collect the coordinate displacement, deflection and other parameters of the chip, and the control system 4-1 Process the data, control the X-Y-θ correction workbench 2-2 to adjust the coordinates of the X-axis and Y-axis and the rotation adjustment of the θ angle, and complete the precise correction of the chip coordinates.

The control system 4-1 controls the second swing arm 3-2 to complete the 180° rotation, correctly adjusts the vacuum suction and release time of the second swing arm 3-2 suction nozzle and the X-Y-θ correction table 2-2, and moves the chip from X-Y- The θ correction table 2-2 is accurately sucked to the second swing arm 3-2; the control system 4-1 calculates the target coordinates of the chip through the image data collected by the second positioning camera 3-1, and controls the second X-Y table 3-3 Accurately adjust the target positioning of the chip, and wait for the target chip to be picked and placed; the control system 4-1 controls the second swing arm 3-2 to complete the 180° rotation, and sends the calibrated chip to the new film or the second X-Y workbench 3-3 In the new module, the high-precision and high-speed rearrangement function of the chip is realized.

Claims (8)

1. A device for correcting a workbench with double swing arms is characterized in that it comprises a coring part, a correction part, a fine pendulum part, and a control part; the coring part, a correction part, and a fine pendulum part are respectively connected with the control part. 2. A device for correcting a workbench with a double swing arm according to claim 1, wherein the control part is a control system. 3. The device for correcting a workbench with double swing arms according to claim 1, wherein the coring part includes a first positioning camera, a first swing arm, and a first X-Y workbench; The positioning camera is set directly above the first X-Y workbench; the first swing arm is connected to the first X-Y workbench; the first positioning camera, the first swing arm, and the first X-Y workbench are respectively connected to the control system of the control part. 4. A device for correcting a workbench with double swing arms according to claim 1, wherein the correction part includes a correction camera and an X-Y-θ correction workbench; the correction camera is set at the X-Y-θ correction work directly above the table; the correction camera and the X-Y-θ correction table are respectively connected to the control system of the control part; the X-Y-θ correction table is also connected to the first swing arm of the coring part. 5 . The device for correcting a workbench with double swing arms according to claim 4 , wherein the X-Y-θ correction workbench is provided with a θ motor, and the calibration camera is arranged directly above the θ motor. 6 . 6. A device for correcting a workbench with a double swing arm according to claim 1, wherein the fine swing part includes a second positioning camera, a second swing arm, and a second X-Y workbench; The positioning camera is arranged directly above the second X-Y workbench; the second swing arm is connected to the second X-Y workbench; the second positioning camera, the second swing arm, and the second X-Y workbench are respectively connected to the control system of the control part; The second swing arm is also connected with the X-Y-θ correction table of the correction part. 7. The device for correcting a workbench with double swing arms according to claim 1, characterized in that, the X-Y-θ correction workbench, the second swing arm, and the second X-Y workbench, according to the target accuracy requirements, Select X-Y-θ correction table, second swing arm, and second X-Y table with different precision respectively. 8. A device for correcting a workbench with double swing arms according to claim 1, wherein the coring part, the correction part, and the fine pendulum part are respectively connected to the control part, and are calculated and controlled by the control system. Realize correction actions such as chip correction and rotation, and display the information on the display of the control system.