CN105932900B - A kind of biped driving off-resonance piezoelectric linear motor based on lever amplification - Google Patents
A kind of biped driving off-resonance piezoelectric linear motor based on lever amplification Download PDFInfo
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- H—ELECTRICITY
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- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Abstract
本发明公开了一种基于杠杆放大的双足驱动非共振压电直线电机,包括定子组合体、直线导轨、预紧装置、定子固定板和底板;定子组合体固定连接在定子固定板上,定子组合体的前端设有动子导轨,后端连接预紧装置;预紧装置内有预紧弹簧,定子组合体在预紧弹簧形变产生的压力作用下,前端与动子导轨保持接触;动子导轨、预紧装置及预紧装置均安装于底座上。定子组合体由定子结构体及叠层压电陶瓷、垫块、预紧螺钉组成。电机结构简单,体积小巧,便于安装。分别给四组叠层压电陶瓷施加一定的电信号,可以实现压电电机的直线运动。
The invention discloses a biped-driven non-resonant piezoelectric linear motor based on lever amplification, which comprises a stator assembly, a linear guide rail, a pre-tightening device, a stator fixing plate and a bottom plate; the stator assembly is fixedly connected to the stator fixing plate, and the stator The front end of the assembly is equipped with a mover guide rail, and the rear end is connected to a preload device; there is a preload spring in the preload device, and the front end of the stator assembly is kept in contact with the mover guide rail under the pressure generated by the deformation of the preload spring; the mover The guide rail, the pre-tensioning device and the pre-tensioning device are all installed on the base. The stator assembly is composed of a stator structure, laminated piezoelectric ceramics, pads, and pre-tightening screws. The structure of the motor is simple, the volume is small and exquisite, and it is easy to install. The linear motion of the piezoelectric motor can be realized by applying certain electrical signals to the four groups of laminated piezoelectric ceramics respectively.
Description
技术领域technical field
本发明属于压电精密制动应用技术领域,特别涉及一种基于杠杆放大的双足驱动非共振压电直线电机。The invention belongs to the technical field of piezoelectric precision braking applications, in particular to a biped-driven non-resonant piezoelectric linear motor based on lever amplification.
背景技术Background technique
压电直线电机是一种新型的直线作动机构,近几年发展迅速,引起了国内外研究人员的广泛关注,其利用了压电材料的逆压电效应,一般具有特定的结构形式。压电直线电机具有较高的推重比,易于微型化,能直接产生直线输出、结构简单、响应快、位置和速度控制精度高、无电磁干扰等优点,可以满足高新技术对精密定位技术的要求。当前,研究者们已经研发出种类繁多的压电直线电机,其中一些实现了商品化。Piezoelectric linear motor is a new type of linear actuator, which has developed rapidly in recent years and has attracted extensive attention from researchers at home and abroad. It uses the inverse piezoelectric effect of piezoelectric materials and generally has a specific structural form. Piezoelectric linear motors have a high thrust-to-weight ratio, are easy to miniaturize, can directly generate linear output, have simple structure, fast response, high position and speed control accuracy, and no electromagnetic interference, etc., which can meet the high-tech requirements for precision positioning technology . Currently, researchers have developed a wide variety of piezoelectric linear motors, some of which have been commercialized.
根据压电器件对驱动足激振方式的不同,压电直线电机可分为共振式和非共振式两种:共振式压电直线电机利用压电元件激发定子弹性体的共振,从而得到放大的变形,再由这种变形来驱动,主要有驻波型、行波型、声表面波型及模态复合型等;非共振式压电直线电机大都采用自身变形较大(可达微米级)的叠层式压电元件作为驱动元件,主要有直接驱动式、尺蠖原理式、位移放大式及惯性冲击式。Piezoelectric linear motors can be divided into two types: resonant type and non-resonant type according to the different excitation methods of piezoelectric devices for driving feet. Deformation, and then driven by this deformation, there are mainly standing wave type, traveling wave type, surface acoustic wave type and modal composite type, etc. Most of the non-resonant piezoelectric linear motors use their own large deformation (up to micron level) The stacked piezoelectric element is used as the driving element, mainly including direct drive type, inchworm principle type, displacement amplification type and inertial impact type.
在非共振式压电直线电机中,直接驱动式电机直接利用压电元件的变形驱动,位置分辨率高,输出推力较大,但是行程较小;尺蠖原理式电机利用多个压电元件间的特定关系的交替驱动和箝位实现高精度步进,具有大行程,但是该种电机对加工精度要求很高,输出推力通常较小。In the non-resonant piezoelectric linear motor, the direct drive motor is directly driven by the deformation of the piezoelectric element, with high position resolution and large output thrust, but the stroke is small; the inchworm principle motor uses the vibration between multiple piezoelectric elements. The alternating driving and clamping in a specific relationship realizes high-precision stepping and has a large stroke, but this type of motor requires high machining accuracy, and the output thrust is usually small.
发明内容Contents of the invention
本发明所要解决的技术问题是:提供一种基于杠杆放大的双足驱动非共振压电直线电机,采用叠层压电陶瓷作为主要驱动元件,通过在定子组合体上合理布置叠层压电陶瓷的位置,利用杠杆机构与铰链机构实现叠层压电陶瓷的位移放大输出,使得该压电直线电机可输出较大的直线速度以及推力,理论上具有相等的双向输出性能,能产生较大的行程,精度高,稳定性好。解决了现有技术中由于叠层压电陶瓷输出位移较小,加工误差导致的电机输出稳定性较低等问题。The technical problem to be solved by the present invention is to provide a non-resonant piezoelectric linear motor driven by bipeds based on lever amplification, using laminated piezoelectric ceramics as the main driving element, and rationally arranging laminated piezoelectric ceramics on the stator assembly position, using the lever mechanism and the hinge mechanism to realize the displacement amplification output of the laminated piezoelectric ceramics, so that the piezoelectric linear motor can output a large linear speed and thrust, theoretically has equal bidirectional output performance, and can produce a large Travel, high precision, good stability. The problem of low motor output stability caused by machining errors due to small output displacement of laminated piezoelectric ceramics in the prior art is solved.
本发明为解决上述技术问题,采用如下技术方案:In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:
本发明的一种基于杠杆放大的双足驱动非共振压电直线电机,包括一个定子组合体、直线导轨、预紧装置、定子固定板和底板;所述定子组合体固定连接在定子固定板上,定子组合体的前端设有动子导轨,后端连接预紧装置;所述预紧装置内有预紧弹簧,子组合体在预紧弹簧形变产生的压力作用下,前端与动子导轨保持接触;所述动子导轨、预紧装置及定子固定板均安装于底座上A biped-driven non-resonance piezoelectric linear motor based on lever amplification of the present invention includes a stator assembly, a linear guide rail, a pretensioning device, a stator fixing plate and a bottom plate; the stator assembly is fixedly connected to the stator fixing plate , the front end of the stator assembly is provided with a mover guide rail, and the rear end is connected to a preload device; there is a preload spring in the preload device, and the front end of the stator assembly is kept in contact with the mover guide rail under the pressure generated by the deformation of the preload spring. Contact; the mover guide rail, pre-tensioning device and stator fixing plate are all installed on the base
所述定子组合体包括定子结构体、叠层压电陶瓷、垫块以及预紧螺钉;所述定子组合体包含两个驱动足,所述驱动足上下布置。The stator assembly includes a stator structure, laminated piezoelectric ceramics, pads and pre-tightening screws; the stator assembly includes two driving feet, and the driving feet are arranged up and down.
所述定子结构体分为定子主体以及定子安装板,所述定子主体和定子安装板之间通过平行四边形柔性铰链机构连接。The stator structure is divided into a stator main body and a stator mounting plate, and the stator main body and the stator mounting plate are connected by a parallelogram flexible hinge mechanism.
所述定子主体中有两组平行四边形柔性铰链机构,所述两组平行四边形柔性铰链机构串联布置并且所产生的位移互相垂直。There are two groups of parallelogram flexible hinge mechanisms in the stator body, the two groups of parallelogram flexible hinge mechanisms are arranged in series and the generated displacements are perpendicular to each other.
所述定子主体的L型外围的每个侧边上都有孔,螺钉穿过孔和平行四边形柔性铰链机构上的螺纹孔连接。There are holes on each side of the L-shaped periphery of the stator main body, and the screws pass through the holes and are connected with the threaded holes on the parallelogram flexible hinge mechanism.
所述的叠层压电陶瓷需要与两块半圆形的垫块配合安装,垫块的平面部分和叠层压电陶瓷接触,所述垫块的弧面部分和定子主体接触。The laminated piezoelectric ceramics need to be installed in cooperation with two semicircular pads, the flat part of the pads is in contact with the laminated piezoelectric ceramics, and the arc surface part of the pads is in contact with the main body of the stator.
所述预紧装置包括预紧支撑块、预紧块、预紧弹簧、预紧顶块以及锁紧螺钉;所述预紧支撑块固定在底板上,预紧支撑板上有螺纹孔,用于与锁紧螺钉的配合,推动预紧顶块压缩预紧弹簧使得预紧块顶紧定子组合体,拧紧锁紧螺钉完成预紧力的施加。The pre-tightening device includes a pre-tightening support block, a pre-tightening block, a pre-tightening spring, a pre-tightening top block and a locking screw; the pre-tightening support block is fixed on the bottom plate, and there are threaded holes on the pre-tightening support plate for Cooperate with the locking screw, push the pre-tightening block to compress the pre-tightening spring so that the pre-tightening block presses against the stator assembly, and tighten the locking screw to complete the application of the pre-tightening force.
与现有技术相比,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
该双足驱动非共振压电直线电机中的压电元件采用压电叠堆,输出位移及输出力都较大,定位精度较高,结构工作在非共振模式下,不易受环境因素干扰,较采用压电陶瓷的共振电机更为稳定;The piezoelectric element in the biped-driven non-resonant piezoelectric linear motor adopts a piezoelectric stack, the output displacement and output force are large, and the positioning accuracy is high. The structure works in a non-resonant mode, which is not easily disturbed by environmental factors. Resonant motors using piezoelectric ceramics are more stable;
定子组合体结构小巧,上下分布的两个驱动足与动子导轨能够保持良好的接触状态;The structure of the stator assembly is small and exquisite, and the two driving feet distributed up and down can maintain a good contact state with the guide rail of the mover;
各部件结构简单,加工难度小,连接方便。The components are simple in structure, less difficult to process and convenient to connect.
附图说明Description of drawings
图1为压电直线电机的结构示意图;Fig. 1 is the structure diagram of piezoelectric linear motor;
图2为压电直线电机定子组合体部分的结构分解图;Fig. 2 is a structural exploded view of the stator assembly part of the piezoelectric linear motor;
图3为压电直线电机中预紧装置的结构分解图;Fig. 3 is an exploded view of the structure of the pretensioning device in the piezoelectric linear motor;
图4为压电直线电机在工作模式下的激励电压信号图;Fig. 4 is the excitation voltage signal diagram of the piezoelectric linear motor in the working mode;
图5为压电直线电机在一个周期内的运动机理图;Fig. 5 is a diagram of the motion mechanism of the piezoelectric linear motor in one cycle;
其中,图中的标识为:1-定子组合体;2-滑轨;3-底板;4-定子固定板;5-预紧装置Among them, the marks in the figure are: 1-stator assembly; 2-sliding rail; 3-bottom plate; 4-stator fixing plate; 5-pretensioning device
11-叠层压电陶瓷组;12-定子安装板;13-螺钉;14-定子主体。11-Laminated piezoelectric ceramic group; 12-Stator mounting plate; 13-Screws; 14-Stator main body.
51-螺钉;52-预紧块;53-预紧弹簧;54-预紧支撑板;55-预紧顶块;56-锁紧螺钉。51-screw; 52-pretension block; 53-pretension spring; 54-pretension support plate; 55-pretension top block; 56-locking screw.
具体实施方式Detailed ways
下面结合附图对本发明的技术方案进行详细说明:The technical scheme of the present invention is described in detail below in conjunction with accompanying drawing:
如图1所示,本发明所述的压电直线电机,由定子组合体1、滑轨2、底板3、定子固定板4、预紧装置5组成。定子组合体1在预紧装置5的作用下前端和滑轨2上的耐磨陶瓷条保持紧密接触,使得该电机具有断电自锁的功能;定子组合体1固定在定子固定板4上;定子固定板4以及预紧装置5均固定在底板3上。As shown in FIG. 1 , the piezoelectric linear motor according to the present invention is composed of a stator assembly 1 , a slide rail 2 , a bottom plate 3 , a stator fixing plate 4 , and a preloading device 5 . The front end of the stator assembly 1 is in close contact with the wear-resistant ceramic strip on the slide rail 2 under the action of the pre-tensioning device 5, so that the motor has the function of self-locking when power is off; the stator assembly 1 is fixed on the stator fixing plate 4; Both the stator fixing plate 4 and the pretensioning device 5 are fixed on the bottom plate 3 .
如图2定子结构图所示,定子组合体1包括叠层压电陶瓷组11、定子安装板12、螺钉13、定子主体14。定子主体14中有两组平行四边形柔性铰链机构,两组机构串联布置并且所产生的位移互相垂直。定子主体14为L型结构。定子结构体分为定子主体14以及定子安装板12,之间通过平行四边形柔性铰链机构连接来实现定子主体的微位移。定子固定板4与底板3使用螺钉固连,定子组合体1使用螺钉固定在定子固定板4上。As shown in the stator structure diagram of FIG. 2 , the stator assembly 1 includes a laminated piezoelectric ceramic group 11 , a stator mounting plate 12 , screws 13 , and a stator body 14 . There are two sets of parallelogram flexible hinge mechanisms in the stator main body 14, the two sets of mechanisms are arranged in series and the displacements generated are perpendicular to each other. The stator main body 14 is an L-shaped structure. The stator structure is divided into a stator main body 14 and a stator mounting plate 12, which are connected by a parallelogram flexible hinge mechanism to realize micro-displacement of the stator main body. The stator fixing plate 4 is fixed to the bottom plate 3 with screws, and the stator assembly 1 is fixed on the stator fixing plate 4 with screws.
四组叠层压电陶瓷组均安装于定子主体的L型外框与平行四边形柔性铰链机构之间;L型外围的每个侧边上都有孔,螺钉穿过孔和平行四边形柔性铰链机构上的螺纹孔连接,拧紧预紧螺钉可对叠层压电陶瓷组施加预紧力;平行四边形柔性铰链机构能减小定子顶端驱动足的旋转。Four stacked piezoelectric ceramic groups are installed between the L-shaped outer frame of the stator body and the parallelogram flexible hinge mechanism; there are holes on each side of the L-shaped periphery, and the screws pass through the holes and the parallelogram flexible hinge mechanism The threaded hole on the top is connected, and the pre-tightening screw can be tightened to apply a pre-tightening force to the laminated piezoelectric ceramic group; the parallelogram flexible hinge mechanism can reduce the rotation of the driving foot at the top of the stator.
如图3所示,预紧装置5包括螺钉51、预紧块52、预紧弹簧53、预紧支撑板54、预紧顶块55、锁紧螺钉56;预紧支撑板上有螺纹孔,用于与锁紧螺钉的配合,预紧弹簧套在预紧块的轴上,推动预紧顶块压缩预紧弹簧使得预紧块顶紧定子组合体,拧紧锁紧螺钉完成预紧力的施加。As shown in Figure 3, the pre-tightening device 5 comprises screw 51, pre-tightening block 52, pre-tightening spring 53, pre-tightening support plate 54, pre-tightening top block 55, locking screw 56; There are threaded holes on the pre-tightening support plate, It is used to cooperate with the locking screw. The pre-tightening spring is set on the shaft of the pre-tightening block, and the pre-tightening block is pushed to compress the pre-tightening spring so that the pre-tightening block presses against the stator assembly. Tighten the locking screw to complete the application of pre-tightening force .
图4所示为压电电机在工作模式下施加在四组叠层压电陶瓷11、12、21、22上的电压信号。图5所示为压电电机在一个周期内的工作机理图,其中原本上下布置的两组驱动单元为了方便表示在图中为左右放置。结合图4和图5,其中a(c2)表示t=0(t=T)的后一瞬间,b1表示t=T/2的前一瞬间,b2表示t=T/2的后一瞬间,c1表示t=T的前一瞬间。FIG. 4 shows the voltage signals applied to the four groups of laminated piezoelectric ceramics 11 , 12 , 21 , 22 by the piezoelectric motor in the working mode. Figure 5 shows the working mechanism diagram of the piezoelectric motor in one cycle, in which the two sets of driving units originally arranged up and down are placed left and right in the figure for convenience. Combining Figure 4 and Figure 5, where a (c2) represents the moment after t=0 (t=T), b1 represents the moment before t=T/2, b2 represents the moment after t=T/2, c1 represents the moment before t=T.
a时刻,左边驱动单元的叠层压电陶瓷组12上加高电平为A的方波信号,其在y轴正方向伸长,顶端顶紧动子,右边驱动单元的陶瓷组21上的电压由A均匀下降,顶端向x轴负方向移动;At time a, a square wave signal with a high level of A is added to the stacked piezoelectric ceramic group 12 of the left drive unit, which elongates in the positive direction of the y-axis, and the top end is pressed against the mover, and the ceramic group 21 of the right drive unit The voltage drops uniformly from A, and the top moves to the negative direction of the x-axis;
b1时刻,左边驱动单元的叠层压电陶瓷组12升压至A,滑轨在驱动足的作用下向x轴正方向移动一段距离,右边驱动单元的叠层压电陶瓷组21电压降为0,顶端回到初始位置;At time b1, the voltage of the stacked piezoelectric ceramic group 12 of the left drive unit is boosted to A, the slide rail moves a certain distance in the positive direction of the x-axis under the action of the driving foot, and the voltage drop of the stacked piezoelectric ceramic group 21 of the right drive unit is 0, the top returns to the initial position;
b2时刻,叠层压电陶瓷组12上的电压变为0,左边驱动单元顶端缩回,右边驱动单元的叠层压电陶瓷组22上的电压为A,顶端顶紧动子;At moment b2, the voltage on the laminated piezoelectric ceramic group 12 becomes 0, the top of the left drive unit retracts, the voltage on the laminated piezoelectric ceramic group 22 of the right drive unit is A, and the top pushes against the mover;
c1时刻,叠层压电陶瓷组11上的电压降为0,左边驱动单元顶端回到初始位置,右边驱动单元的叠层压电陶瓷组21上的电压匀速增大到A,滑轨在驱动足的作用下向x轴正方向移动一段距离。 At time c1, the voltage drop on the laminated piezoelectric ceramic group 11 is 0, the top of the left drive unit returns to the initial position, the voltage on the laminated piezoelectric ceramic group 21 of the right drive unit increases to A at a constant speed, and the slide rail is driving Move a certain distance in the positive direction of the x-axis under the action of the feet.
基于对本发明优选实施方式的描述,应该清楚,由所附的权利要求书所限定的本发明并不仅仅局限于上面说明书中所阐述的特定细节,未脱离本发明宗旨或范围的对本发明的许多显而易见的改变同样可能达到本发明的目的。Based on the description of the preferred embodiments of the present invention, it should be clear that the present invention defined by the appended claims is not limited to the specific details set forth in the description above, and there are many aspects of the present invention that do not depart from the spirit or scope of the present invention. Obvious changes are also possible to achieve the object of the present invention.
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CN106787935B (en) * | 2016-12-16 | 2019-04-09 | 南京航空航天大学 | An inertial non-resonant bipedal piezoelectric linear actuator |
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CN109921680B (en) * | 2019-04-25 | 2020-06-02 | 宁波大学 | Variable-pretightening-force stick-slip inertia linear driver |
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CN114077031B (en) * | 2020-08-12 | 2023-03-10 | 华为技术有限公司 | Ultrasonic piezoelectric motor, camera module and electronic equipment |
CN112436754B (en) * | 2020-11-16 | 2022-05-17 | 中国科学技术大学 | Ultra-low temperature and low heat dissipation precision piezoelectric ceramic turntable |
CN112737401B (en) * | 2020-12-30 | 2024-06-07 | 华侨大学 | Alternate rowing type piezoelectric linear motor |
CN113206615B (en) * | 2021-04-26 | 2022-06-28 | 天津大学 | Inchworm type linear driver with static self-locking function |
CN115242121B (en) * | 2022-08-05 | 2023-02-28 | 吉林大学 | Piezoelectric stepping actuator based on synchronous double-foot drive |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20100137321A (en) * | 2009-06-22 | 2010-12-30 | 윤만순 | Dome-shaped linear piezo motor |
CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro-nano scale stick-slip inertial drive platform |
CN103427704A (en) * | 2013-07-31 | 2013-12-04 | 南京航空航天大学 | Double-foot driving piezoelectric linear motor and electric excitation mode |
CN104942377A (en) * | 2015-07-07 | 2015-09-30 | 长春工业大学 | Ellipse vibration cutting auxiliary device based on three-piezoelectric driving |
CN205051600U (en) * | 2015-07-17 | 2016-02-24 | 南京航空航天大学 | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor |
-
2016
- 2016-06-15 CN CN201610418321.2A patent/CN105932900B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20100137321A (en) * | 2009-06-22 | 2010-12-30 | 윤만순 | Dome-shaped linear piezo motor |
CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro-nano scale stick-slip inertial drive platform |
CN103427704A (en) * | 2013-07-31 | 2013-12-04 | 南京航空航天大学 | Double-foot driving piezoelectric linear motor and electric excitation mode |
CN104942377A (en) * | 2015-07-07 | 2015-09-30 | 长春工业大学 | Ellipse vibration cutting auxiliary device based on three-piezoelectric driving |
CN205051600U (en) * | 2015-07-17 | 2016-02-24 | 南京航空航天大学 | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor |
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