CN104377987B - Clamping type piezoelectric motor - Google Patents
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- CN104377987B CN104377987B CN201410599861.6A CN201410599861A CN104377987B CN 104377987 B CN104377987 B CN 104377987B CN 201410599861 A CN201410599861 A CN 201410599861A CN 104377987 B CN104377987 B CN 104377987B
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Abstract
本发明公布了一种箝位式压电电机,所述电机由左到右依次为第一箝位单元,驱动单元和第二箝位单元,其中两个箝位单元由导轨和预压机构压紧固定于导轨上,两个箝位单元输出垂直于固定导轨方向的位移,驱动单元的输出平行于固定导轨方向的位移。本发明采用压电叠堆驱动,通过压电叠堆的收缩与伸长,实现第一箝位单元和第二箝位的单元驱动足与导轨的关系;通过动单元来实现整体机构在导轨方向上的移动。本发明在功能上除具有一般压电步进电机的特点外,还具有自锁功能,其导轨一端可以调节,降低了对电机的加工精度和装配精度的要求,且电机整个机构相当于一个整体,增加了运行的平稳性。
The invention discloses a clamping piezoelectric motor. The motor is sequentially composed of a first clamping unit, a driving unit and a second clamping unit from left to right, wherein the two clamping units are pressed by a guide rail and a pre-pressing mechanism. Tightly fixed on the guide rail, the two clamp units output the displacement perpendicular to the direction of the fixed guide rail, and the output of the drive unit is parallel to the direction of the fixed guide rail. The present invention adopts the piezoelectric stack drive, realizes the relationship between the first clamping unit and the second clamping unit driving foot and the guide rail through the shrinkage and elongation of the piezoelectric stack; on the move. In addition to the characteristics of the general piezoelectric stepping motor, the present invention also has a self-locking function, and one end of the guide rail can be adjusted, which reduces the requirements for the machining accuracy and assembly accuracy of the motor, and the whole mechanism of the motor is equivalent to a whole , increasing the smoothness of operation.
Description
技术领域technical field
本实用新型属于压电精密作动应用技术领域,尤其涉及一种箝位式压电直线电机。The utility model belongs to the technical field of piezoelectric precision actuation applications, in particular to a clamping piezoelectric linear motor.
背景技术Background technique
近年来,随着微/纳米技术的高速发展,众多工程和技术领域的研究都迫切的需要亚微米级、微/纳米级的超精密驱动。传统的步进电机功率—重量比低,而且电机高速运转后需要减速装置变速,致使传动系统复杂,结构累赘。随着科学技术的发展,人们研制出各种功能材料,其中,压电陶瓷(PZT)以其相对优越的性能使得压电精密作动器的研究得到了广泛关注,并在许多领域得到了应用。In recent years, with the rapid development of micro/nano technology, research in many engineering and technical fields urgently needs submicron and micro/nano ultra-precision drives. The traditional stepper motor has a low power-to-weight ratio, and after the motor runs at high speed, it needs a reduction device to change the speed, resulting in a complicated transmission system and a cumbersome structure. With the development of science and technology, various functional materials have been developed. Among them, piezoelectric ceramics (PZT) have attracted extensive attention in the research of piezoelectric precision actuators due to their relatively superior performance, and have been applied in many fields. .
目前,国内外对压电精密驱动器的研究已经取得了一定的进展,研发了各种各样的电机。其中尺蠖式压电驱动器利用仿生的原理,采用“箝位-驱动-箝位”的运动形式,具有分辨率高、输出力大、输出刚度大、无电磁干扰等优点,已经得到了国内外的广泛研究。At present, the research on piezoelectric precision drives at home and abroad has made some progress, and various motors have been developed. Among them, the inchworm piezoelectric actuator adopts the principle of bionics and adopts the motion form of "clamp-drive-clamp". It has the advantages of high resolution, large output force, large output rigidity, and no electromagnetic interference. It has been well received at home and abroad. Research extensively.
申请号为201110058690.2的一个名称为“多足箝位式压电电机”公开了一种采用在两端安装辅助箝位机构的方法,解决了导轨加工和装配误差引起的导轨不平行和导轨面的局部不平等引起的电机卡死,或行走不畅的问题;但是其利用了多组驱动足且利用弹簧和叠堆来实现行走,结构复杂。The application number is 201110058690.2, which is called "Multi-leg Clamping Piezoelectric Motor", which discloses a method of installing auxiliary clamping mechanisms at both ends, which solves the problem of non-parallel guide rails and guide rail surfaces caused by guide rail processing and assembly errors. The problem of motor jamming or poor walking caused by local inequality; however, it uses multiple sets of driving feet and uses springs and stacks to achieve walking, and the structure is complex.
实用新型内容Utility model content
所要解决的技术问题:Technical problems to be solved:
本实用新型目的是针对现有技术存在的缺陷提供一种稳定性好、输出力大、效率高、寿命长、分辨率高、加工要求相对较低,应用范围更广的箝位式压电电机。The purpose of the utility model is to provide a clamp-type piezoelectric motor with good stability, large output force, high efficiency, long life, high resolution, relatively low processing requirements and wider application range in view of the defects of the existing technology. .
技术方案:Technical solutions:
为了实现以上功能,本实用新型提供了一种箝位式压电电机包括依次连接的第一箝位机构1、驱动机构、第二箝位机构11,所述箝位机构1和11套装在导轨内,其特征在于:所述箝位机构1和11采用了位移放大结构,其内部设有压电陶瓷叠堆3和10。In order to achieve the above functions, the utility model provides a clamping piezoelectric motor including a first clamping mechanism 1, a driving mechanism, and a second clamping mechanism 11 connected in sequence, and the clamping mechanisms 1 and 11 are set on the guide rail Inside, it is characterized in that: the clamping mechanisms 1 and 11 adopt a displacement amplification structure, and piezoelectric ceramic stacks 3 and 10 are arranged inside.
每个箝位机构在外部设有U型结构内部设有矩形框架,压电陶瓷叠堆3和10设置在矩形框架内,每组压电陶瓷叠堆3和10包括压电陶瓷片、支撑块以及拉簧,所述压电陶瓷叠堆支撑块紧挨着压电陶瓷叠堆压电陶瓷片,外侧的压电陶瓷叠堆支撑块分别通过螺钉固定在矩形框架的内表面,内侧的压电陶瓷叠堆支撑块连接在驱动单元上;所述压电陶瓷叠堆拉簧依次排列在压电陶瓷叠堆压电陶瓷片的外表面,用于预紧压电陶瓷叠堆压电陶瓷片。Each clamping mechanism has a U-shaped structure on the outside and a rectangular frame inside, and the piezoelectric ceramic stacks 3 and 10 are arranged in the rectangular frame, and each group of piezoelectric ceramic stacks 3 and 10 includes piezoelectric ceramic sheets and support blocks. And the extension spring, the piezoelectric ceramic stack support block is next to the piezoelectric ceramic stack piezoelectric ceramic sheet, the piezoelectric ceramic stack support blocks on the outside are respectively fixed on the inner surface of the rectangular frame by screws, and the piezoelectric ceramic stack support blocks on the inside are respectively fixed on the inner surface of the rectangular frame. The ceramic stack support block is connected to the drive unit; the piezoelectric ceramic stack tension springs are arranged in sequence on the outer surface of the piezoelectric ceramic stack piezoelectric ceramic sheets for pre-tightening the piezoelectric ceramic stack piezoelectric ceramic sheets.
所述驱动机构包括压电陶瓷片、支撑块、拉簧以及柔性足,所述驱动机构支撑块紧挨着驱动机构压电陶瓷片;所述驱动机构拉簧依次排列在驱动机构压电陶瓷片的外表面,用于预紧驱动机构压电陶瓷片;所述柔性足设置在驱动机构支撑块的外侧,与内侧的压电陶瓷叠堆支撑块固定连接。The drive mechanism includes a piezoelectric ceramic sheet, a support block, a tension spring and a flexible foot, and the drive mechanism support block is next to the drive mechanism piezoelectric ceramic sheet; the drive mechanism extension spring is arranged in sequence on the drive mechanism piezoelectric ceramic sheet The outer surface of the drive mechanism is used to pre-tighten the piezoelectric ceramic sheet; the flexible foot is arranged on the outer side of the drive mechanism support block, and is fixedly connected with the inner piezoelectric ceramic stack support block.
在所述U型结构的下表面开有孔,孔内设置有小球。Holes are opened on the lower surface of the U-shaped structure, and small balls are arranged in the holes.
在所述外侧的压电陶瓷叠堆支撑块与螺钉连接位置开有孔,孔内设置有小球。A hole is opened at the position where the outer piezoelectric ceramic stack support block is connected with the screw, and a small ball is arranged in the hole.
所述U型结构的两足作为驱动足,矩形框架四个角设计为椭圆柔性铰链,其两条长边与U型结构的两条长边也采用椭圆柔性铰链相连,通过其内部的压电叠堆伸长,使矩形结构两边距离伸长,从而使另外两边距离缩短,进而使U型结构两边距离收缩。The two feet of the U-shaped structure are used as driving feet, and the four corners of the rectangular frame are designed as elliptical flexible hinges. The two long sides of the U-shaped structure are also connected by elliptical flexible hinges. The stacking is elongated, so that the distance between the two sides of the rectangular structure is extended, so that the distance between the other two sides is shortened, and the distance between the two sides of the U-shaped structure is shortened.
有益效果:Beneficial effect:
本实用新型箝位式压电电机,其箝位机构具有放大作用。压电步进式精密驱动器在装配过程中,导轨两端的距离肯定是有误差,当导轨的这种不平行度大到致使导轨距离变化△L大于动子和导轨的间隙,动子就会出现卡住,或行走不畅,因为叠层压电堆在导轨内伸长有限的,只有几个微米,所以间隙是必须小于叠层压电堆的伸长量。本实用新型利用箝位机构使压电叠堆平行于导轨的位移转化为驱动足垂直于导轨的位移,通过其特定的结构,放大了压电叠堆的位移,从而一定程度上避免了电机卡死或行走不畅的现象;此外,箝位机构的一个驱动足加工了一个凹槽,并放置了一个塑料小球,从而使该驱动足在运动过程中的滑动摩擦转化为滚动摩擦,一定程度上使电机运行更加平稳。The clamping piezoelectric motor of the utility model has a clamping mechanism with an amplification effect. During the assembly process of the piezoelectric stepping precision driver, there must be an error in the distance between the two ends of the guide rail. When the non-parallelism of the guide rail is so large that the distance change △L of the guide rail is greater than the gap between the mover and the guide rail, the mover will appear. Stuck, or walking is not smooth, because the laminated piezoelectric stack has limited elongation in the guide rail, only a few microns, so the gap must be smaller than the elongation of the laminated piezoelectric stack. The utility model uses a clamping mechanism to convert the displacement of the piezoelectric stack parallel to the guide rail into the displacement of the driving foot perpendicular to the guide rail. Through its specific structure, the displacement of the piezoelectric stack is amplified, thereby avoiding the motor jam to a certain extent. In addition, a groove is processed on one of the driving feet of the clamping mechanism, and a small plastic ball is placed, so that the sliding friction of the driving foot during the movement is converted into rolling friction, to a certain extent Make the motor run more smoothly.
附图说明Description of drawings
下面结合附图和实施例对本实用新型进一步说明:Below in conjunction with accompanying drawing and embodiment the utility model is further described:
图1为本实用新型提供的箝位式压电电机的结构原理图;Fig. 1 is the structural schematic diagram of the clamp type piezoelectric motor provided by the utility model;
图2 为本实用新型提供的箝位式压电电机驱动所用的电源信号时序;Fig. 2 is the timing sequence of the power supply signal used for driving the clamped piezoelectric motor provided by the utility model;
图3 电机的运行过程,(a)是t1时刻电机状态,(b)是t2时刻电机状态,(c)是t3时刻电机状态,(d)是t4时刻电机状态,(e)是t5时刻电机状态。Figure 3 The running process of the motor, (a) is the state of the motor at time t1, (b) is the state of the motor at time t2, (c) is the state of the motor at time t3, (d) is the state of the motor at time t4, (e) is the state of the motor at time t5 state.
其中,1-第一箝位机构;2-支撑块;3、7-压电陶瓷叠堆;4-拉簧;5-导轨;6-柔性足;8-塑料小球;9-螺柱;10-第三压电叠堆;11-第二箝位机构。Among them, 1-first clamping mechanism; 2-support block; 3, 7-piezoelectric ceramic stack; 4-tension spring; 5-guide rail; 6-flexible foot; 8-plastic ball; 9-screw; 10 - the third piezoelectric stack; 11 - the second clamping mechanism.
具体实施方式detailed description
本实用新型提供一种箝位式压电电机,为使本实用新型的目的,技术方案及效果更加清楚,明确,以及参照附图并举实例对本实用新型进一步详细说明。应当理解,此处所描述的具体实施仅用以解释本实用新型,并不用于限定本实用新型。The utility model provides a clamping piezoelectric motor. In order to make the purpose, technical solution and effect of the utility model clearer and clearer, the utility model is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific implementation described here is only used to explain the utility model, and is not intended to limit the utility model.
如图1所示,一种箝位式压电电机包括依次连接的第一箝位机构1、驱动机构、第二箝位机构11,所述箝位机构1和11套装在导轨内,其特征在于:所述箝位机构1和11采用了位移放大结构,其内部设有压电陶瓷叠堆3和10。As shown in Figure 1, a clamping piezoelectric motor includes a first clamping mechanism 1, a driving mechanism, and a second clamping mechanism 11 connected in sequence, and the clamping mechanisms 1 and 11 are set in a guide rail, and its characteristics That is: the clamping mechanisms 1 and 11 adopt a displacement amplification structure, and piezoelectric ceramic stacks 3 and 10 are arranged inside.
每个箝位机构在外部设有U型结构内部设有矩形框架,电陶瓷叠堆2和10设置在矩形框架内,每组压电陶瓷叠堆3和10包括压电陶瓷片、支撑块2以及拉簧4,所述压电陶瓷叠堆支撑块2紧挨着压电陶瓷叠堆压电陶瓷片,外侧的压电陶瓷叠堆支撑块2分别通过螺钉固定在矩形框架的内表面,内侧的压电陶瓷叠堆支撑块2连接在驱动单元上;所述压电陶瓷叠堆拉簧4依次排列在压电陶瓷叠堆压电陶瓷片的外表面,用于预紧压电陶瓷叠堆压电陶瓷片。Each clamping mechanism has a U-shaped structure on the outside and a rectangular frame inside, and the electric ceramic stacks 2 and 10 are arranged in the rectangular frame, and each group of piezoelectric ceramic stacks 3 and 10 includes piezoelectric ceramic sheets and support blocks 2 And the extension spring 4, the piezoelectric ceramic stack support block 2 is next to the piezoelectric ceramic stack piezoelectric ceramic sheet, the piezoelectric ceramic stack support block 2 on the outside is respectively fixed on the inner surface of the rectangular frame by screws, and the inner side The piezoceramic stack support block 2 is connected to the drive unit; the piezoceramic stack tension springs 4 are arranged on the outer surface of the piezoceramic stack piezoceramic sheet in order for pre-tightening the piezoceramic stack Piezoelectric ceramic discs.
所述驱动机构包括压电陶瓷片、支撑块、拉簧以及柔性足6,所述驱动机构支撑块紧挨着驱动机构压电陶瓷片;所述驱动机构拉簧依次排列在驱动机构压电陶瓷片的外表面,用于预紧驱动机构压电陶瓷片;所述柔性足6设置在驱动机构支撑块的外侧,与内侧的压电陶瓷叠堆支撑块固定连接。The drive mechanism includes a piezoelectric ceramic sheet, a support block, a tension spring and a flexible foot 6, and the drive mechanism support block is next to the drive mechanism piezoelectric ceramic sheet; the drive mechanism extension spring is arranged in sequence on the drive mechanism piezoelectric ceramic The outer surface of the sheet is used to pre-tighten the piezoelectric ceramic sheet of the driving mechanism; the flexible foot 6 is arranged on the outer side of the supporting block of the driving mechanism, and is fixedly connected with the piezoelectric ceramic stack supporting block on the inner side.
在所述U型结构的下表面开有孔,孔内设置有小球8。A hole is opened on the lower surface of the U-shaped structure, and a small ball 8 is arranged in the hole.
在所述外侧的压电陶瓷叠堆支撑块与螺钉连接位置开有孔,孔内设置有小球。A hole is opened at the position where the outer piezoelectric ceramic stack support block is connected with the screw, and a small ball is arranged in the hole.
所述U型结构的两足作为驱动足,矩形框架四个角设计为椭圆柔性铰链,其两条长边与U型结构的两条长边也采用椭圆柔性铰链相连,通过其内部的压电叠堆伸长,使矩形结构两边距离伸长,从而使另外两边距离缩短,进而使U型结构两边距离收缩。The two feet of the U-shaped structure are used as driving feet, and the four corners of the rectangular frame are designed as elliptical flexible hinges. The two long sides of the U-shaped structure are also connected by elliptical flexible hinges. The stacking is elongated, so that the distance between the two sides of the rectangular structure is extended, so that the distance between the other two sides is shortened, and the distance between the two sides of the U-shaped structure is shortened.
下面以直线动子在导轨内向右运动为例,介绍该驱动器的运动原理:初始时动子处于被预压导轨压紧状态→压电叠堆10通电伸长,第二箝位机构11脱离接触导轨→压电叠堆7伸长推动第二箝位机构11向右移动一个微位移→压电叠堆10断电回缩,第二箝位机构11接触导轨→压电叠堆3通电伸长,第一箝位机构1脱离接触导轨→压电叠堆7断电收缩,箝位机构1向右移动一个微位移→……如此循环,这样每一个循环向右移动一步。这样动子就可以一步一步向右沿导轨行走。从电机运行过程来看,始终有一个以上箝位机构接触导轨,在电机不同电时,两个箝位机构同时接触导轨,并都有一定的压力,所以电机具有自锁功能。Taking the linear mover moving to the right in the guide rail as an example, the motion principle of the actuator is introduced below: initially the mover is in the state of being pressed by the pre-pressed guide rail → the piezoelectric stack 10 is energized and elongated, and the second clamping mechanism 11 is out of contact Guide rail → Piezoelectric stack 7 elongates and pushes the second clamping mechanism 11 to move a small displacement to the right → Piezoelectric stack 10 is powered off and retracts, second clamping mechanism 11 contacts the guide rail → Piezoelectric stack 3 is energized and elongated , the first clamping mechanism 1 is out of contact with the guide rail → the piezoelectric stack 7 is powered off and shrinks, and the clamping mechanism 1 moves to the right by a slight displacement → ... and so on, so that each cycle moves one step to the right. Like this mover just can walk along guide rail to the right step by step. From the perspective of the motor running process, there is always more than one clamping mechanism touching the guide rail. When the motors have different voltages, the two clamping mechanisms contact the guide rail at the same time, and both have a certain pressure, so the motor has a self-locking function.
一般叠层压电堆直接输出的位移非常小,是微/纳米级,所以箝位机构中都采用了位移放大结构,利用箝位机构使压电叠堆平行于导轨的位移转化为驱动足垂直于导轨的位移,通过其特定的结构,放大了压电叠堆的位移,从而使得电机箝位单元的驱动足部分能够比较理想的实现推开导轨和脱离导轨的交替进行,一定程度上避免了电机卡死或行走不畅的现象。箝位机构的一个驱动足加工了一个凹槽,并放置了一个塑料小球,从而使该驱动足在运动过程中的滑动摩擦转化为滚动摩擦,一定程度上使电机运行更加平稳。Generally, the displacement of the direct output of the laminated piezoelectric stack is very small, which is at the micro/nano level, so the displacement amplification structure is used in the clamping mechanism, and the displacement of the piezoelectric stack parallel to the guide rail is converted into the vertical displacement of the driving foot by using the clamping mechanism. Due to the displacement of the guide rail, through its specific structure, the displacement of the piezoelectric stack is amplified, so that the driving foot part of the motor clamp unit can ideally realize the alternate process of pushing away from the guide rail and detaching from the guide rail, avoiding to a certain extent The phenomenon that the motor is stuck or the movement is not smooth. A driving foot of the clamp mechanism has a groove processed and a small plastic ball is placed, so that the sliding friction of the driving foot during movement is converted into rolling friction, which makes the motor run more smoothly to a certain extent.
驱动单元没有采用放大结构,直接用叠堆输出位移。两个压电陶瓷叠堆机构一端分别在两个箝位单元的矩形结构内通过螺钉顶住,另一端分别与驱动单元通过螺柱连接。The drive unit does not use an amplification structure, and directly uses the stack to output displacement. One end of the two piezoelectric ceramic stacking mechanisms is supported by a screw in the rectangular structure of the two clamping units, and the other end is respectively connected to the driving unit by a stud.
在相应的叠层压电堆上施加有一定时序关系的矩形信号,如图2,压电叠堆3、7、10分别对应图2中的信号1、信号2、信号3,图中给出了两个周期的信号,t0到T是信号的一个周期,图3 所示是图2 中标定的时刻对应的电机状态。信号经过放大后可激励叠层压电堆的伸缩,从而使得箝位机构和驱动单元以一定的时序差运动,从而形成动子沿导轨方向的伸缩行走。A rectangular signal with a certain timing relationship is applied to the corresponding laminated piezoelectric stack, as shown in Figure 2, piezoelectric stacks 3, 7, and 10 respectively correspond to signal 1, signal 2, and signal 3 in Figure 2, and the figure shows Two periods of the signal, t0 to T is a period of the signal, Figure 3 shows the state of the motor corresponding to the moment marked in Figure 2. After the signal is amplified, it can stimulate the expansion and contraction of the laminated piezoelectric stack, so that the clamping mechanism and the drive unit move with a certain timing difference, thereby forming the telescopic walking of the mover along the direction of the guide rail.
可以理解的是,对本领域普通技术人员来说,可以根据本实用新型的技术方案及其实用新型构思加以等同替换或改变,而所有这些改变或替换都应属于本实用新型所附的权利要求的保护范围。It can be understood that those skilled in the art can make equivalent replacements or changes according to the technical solution of the utility model and its utility model concept, and all these changes or replacements should belong to the appended claims of the utility model protected range.
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WO2004030196A2 (en) * | 2002-09-27 | 2004-04-08 | University Of Waterloo | Micro-positioning device |
CN102136811A (en) * | 2011-03-11 | 2011-07-27 | 南京航空航天大学 | Multi-pin clamping type piezoelectric motor |
CN103001531A (en) * | 2012-11-20 | 2013-03-27 | 西安交通大学 | Unimorph stack large displacement actuator |
CN103326614A (en) * | 2013-05-28 | 2013-09-25 | 西安交通大学 | Stepping type actuator driven by double piezoelectric stacks |
CN204316374U (en) * | 2014-10-31 | 2015-05-06 | 南京航空航天大学 | A kind of clamp formula piezoelectric motor |
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WO2004030196A2 (en) * | 2002-09-27 | 2004-04-08 | University Of Waterloo | Micro-positioning device |
CN102136811A (en) * | 2011-03-11 | 2011-07-27 | 南京航空航天大学 | Multi-pin clamping type piezoelectric motor |
CN103001531A (en) * | 2012-11-20 | 2013-03-27 | 西安交通大学 | Unimorph stack large displacement actuator |
CN103326614A (en) * | 2013-05-28 | 2013-09-25 | 西安交通大学 | Stepping type actuator driven by double piezoelectric stacks |
CN204316374U (en) * | 2014-10-31 | 2015-05-06 | 南京航空航天大学 | A kind of clamp formula piezoelectric motor |
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