CN105806414B - Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method - Google Patents
Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method Download PDFInfo
- Publication number
- CN105806414B CN105806414B CN201610264802.2A CN201610264802A CN105806414B CN 105806414 B CN105806414 B CN 105806414B CN 201610264802 A CN201610264802 A CN 201610264802A CN 105806414 B CN105806414 B CN 105806414B
- Authority
- CN
- China
- Prior art keywords
- mrow
- temperature
- msub
- humidity
- mtd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000000835 fiber Substances 0.000 claims abstract description 32
- 241001101998 Galium Species 0.000 claims abstract 9
- 235000014820 Galium aparine Nutrition 0.000 claims abstract 9
- 241000612118 Samolus valerandi Species 0.000 claims abstract 9
- 230000015572 biosynthetic process Effects 0.000 claims abstract 2
- 238000003466 welding Methods 0.000 claims abstract 2
- 230000008859 change Effects 0.000 claims description 23
- 238000001228 spectrum Methods 0.000 claims description 15
- 239000003292 glue Substances 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 238000013480 data collection Methods 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000005213 imbibition Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 14
- 238000005259 measurement Methods 0.000 abstract description 8
- 230000004044 response Effects 0.000 abstract description 7
- 241000736305 Marsilea quadrifolia Species 0.000 description 27
- 239000012790 adhesive layer Substances 0.000 description 13
- 238000001723 curing Methods 0.000 description 13
- 239000000853 adhesive Substances 0.000 description 11
- 230000001070 adhesive effect Effects 0.000 description 11
- 239000002131 composite material Substances 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000003848 UV Light-Curing Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
技术领域technical field
本发明属于光纤传感领域,特别涉及一种基于微结构光纤和紫外固化胶的光纤温湿度传感器及其解调方法。The invention belongs to the field of optical fiber sensing, in particular to an optical fiber temperature and humidity sensor based on microstructured optical fiber and ultraviolet curing glue and a demodulation method thereof.
背景技术Background technique
近年来,光纤传感技术的飞速发展得到了越来越广泛的关注,与传统的电学传感器相比,光纤传感器的灵敏度、动态测量范围、响应时间等传感参数都有很大的提升,且本身体积小重量轻,抗电磁干扰,易实现低成本远距离准分布式传感,因而广泛应用于农业仓储、机械制造、医药生产、航空航天和国防科技等领域。其中环境湿度,作为生产生活中最基本且重要的传感参量,对其进行精确解调已成为光纤传感研究领域的热点之一。In recent years, the rapid development of optical fiber sensing technology has attracted more and more attention. Compared with traditional electrical sensors, the sensing parameters of optical fiber sensors, such as sensitivity, dynamic measurement range, and response time, have been greatly improved, and It is small in size and light in weight, resistant to electromagnetic interference, and easy to realize low-cost long-distance quasi-distributed sensing, so it is widely used in agricultural storage, machinery manufacturing, pharmaceutical production, aerospace and national defense technology and other fields. Among them, ambient humidity, as the most basic and important sensing parameter in production and life, its accurate demodulation has become one of the hotspots in the field of optical fiber sensing research.
基于不同的结构,人们提出了多种光纤湿度传感器方案,如Sens.Actuators BChem.147,385–391(2010)和IEEE Sensors J,13(5),2026-2031(2013)这两篇文章所提出的,基于光纤干涉仪结构结合湿度膜材料的传感器设计方案,湿度膜材料折射率的变化,引起干涉仪干涉波长的漂移,从而解调出湿度信息;又如Appl.Opt.52(1),90-95(2012)和IEEE Photon.Tech.Lett.21(7),441-443(2009)所提出的分别基于湿度膜修饰的长周期光栅和倾斜光栅结构的湿度传感器,湿度膜材料折射率的变化,引起长周期光栅波长的漂移或者是倾斜光栅包层谐振模式的能量衰减,从而解调出湿度信息。但这些方案都基于透射光谱,同时存在较大的温度或者应力交叉敏感问题,限制了实际的应用领域,特别是分布式传感的可行性。另一方面,由于相对湿度是温度的函数,温度的改变会对湿度值产生较大影响,在实际应用场合,同时给出温度和湿度信息才有意义。因此实现对环境温度和湿度的同时测量,并易于分布式组网的光纤传感器方案显得尤为重要。Based on different structures, a variety of optical fiber humidity sensor schemes have been proposed, such as those proposed by Sens. , based on the optical fiber interferometer structure combined with the sensor design scheme of the humidity film material, the change of the refractive index of the humidity film material causes the drift of the interference wavelength of the interferometer, thereby demodulating the humidity information; another example is Appl.Opt.52(1), 90 -95(2012) and IEEE Photon.Tech.Lett.21(7), 441-443(2009) propose humidity sensors based on long-period grating and tilted grating structure modified by humidity film respectively, the refractive index of humidity film material The change causes the wavelength shift of the long-period grating or the energy attenuation of the resonant mode of the cladding of the tilted grating, so as to demodulate the humidity information. However, these schemes are all based on transmission spectra, and there is a large temperature or stress cross-sensitivity problem, which limits the practical application field, especially the feasibility of distributed sensing. On the other hand, since relative humidity is a function of temperature, changes in temperature will have a greater impact on the humidity value. In practical applications, it is meaningful to provide both temperature and humidity information. Therefore, it is particularly important to realize the simultaneous measurement of ambient temperature and humidity, and a fiber optic sensor solution that is easy to distribute and network.
发明内容Contents of the invention
本发明的目的是针对现有光纤湿度传感技术中,缺乏有效的温湿度同时检测手段,并且分布式组网能力不强的不足,提供了一种基于微结构光纤和紫外固化胶的光纤温湿度传感器及利用快速傅里叶变换分析的传感解调方法。本发明具备集成度高,测量准确,灵敏度,响应速度快,抗电磁干扰等特点,不仅适于单点温湿度测量,也可实现多点准分布式温湿度监控。The purpose of the present invention is to provide an optical fiber temperature sensor based on micro-structured optical fiber and ultraviolet curing glue in view of the lack of effective simultaneous temperature and humidity detection means in the existing optical fiber humidity sensing technology, and the lack of distributed networking capabilities. Humidity sensor and sensor demodulation method using fast Fourier transform analysis. The invention has the characteristics of high integration, accurate measurement, sensitivity, fast response speed, anti-electromagnetic interference, etc. It is not only suitable for single-point temperature and humidity measurement, but also can realize multi-point quasi-distributed temperature and humidity monitoring.
本发明的目的是通过以下技术方案来实现的:一种光纤温湿度传感器,它主要由单模光纤、四叶草微结构光纤、紫外固化胶层三部分组成;四叶草微结构光纤一端与单模光纤熔接,熔接处形成第一反射面;四叶草微结构光纤另一端通过点胶并固化的方式制备紫外固化胶层,四叶草微结构光纤与紫外固化胶层之间形成第二反射面,紫外固化胶层与外界空气之间形成第三反射面,由三个反射面形成三个F-P腔结构;所述四叶草微结构光纤外径为125微米,光纤纤芯的内径为11微米,光纤纤芯的周围对称开有四个圆心角为85度,半径为64微米的扇形空气孔。The purpose of the present invention is achieved through the following technical solutions: a fiber optic temperature and humidity sensor, which is mainly composed of a single-mode optical fiber, a four-leaf clover microstructure optical fiber, and an ultraviolet curing adhesive layer; one end of the four-leaf clover microstructure optical fiber is connected to The single-mode optical fiber is welded, and the first reflection surface is formed at the fusion joint; the other end of the four-leaf clover microstructure fiber is prepared by dispensing and curing the UV-curable adhesive layer, and the second reflection surface is formed between the four-leaf clover microstructure optical fiber and the UV-curable adhesive layer. Reflective surface, the third reflective surface is formed between the ultraviolet curing adhesive layer and the outside air, and three F-P cavity structures are formed by three reflective surfaces; the outer diameter of the four-leaf clover microstructure optical fiber is 125 microns, and the inner diameter of the optical fiber core is 11 microns, four fan-shaped air holes with a central angle of 85 degrees and a radius of 64 microns are symmetrically opened around the fiber core.
一种含有上述光纤温湿度传感器的光纤温湿度传感系统,还包括宽谱光源、光谱仪、光纤耦合器、数据采集处理器和温湿度控制箱;光纤耦合器的两个分路端分别与宽谱光源和光谱仪进行连接,光纤耦合器的合路端与光纤温湿度传感器相连,光纤温湿度传感器置于温湿度控制箱中,进行温湿度测试;数据采集处理器与光谱仪相连。An optical fiber temperature and humidity sensing system containing the above optical fiber temperature and humidity sensor also includes a broadband light source, a spectrometer, an optical fiber coupler, a data acquisition processor, and a temperature and humidity control box; the two branch ends of the optical fiber coupler are respectively connected to the broadband The spectrum light source is connected to the spectrometer, the combined end of the fiber optic coupler is connected to the fiber optic temperature and humidity sensor, and the fiber optic temperature and humidity sensor is placed in the temperature and humidity control box for temperature and humidity testing; the data acquisition processor is connected to the spectrometer.
一种基于上述光纤温湿度传感系统的温湿度解调方法,该方法包括以下步骤:A temperature and humidity demodulation method based on the above-mentioned optical fiber temperature and humidity sensing system, the method comprises the following steps:
(1)开启宽谱光源,入射光经由光纤耦合器进入光纤温湿度传感器的双F-P腔结构,经由三个反射面,,依次反射后,再次经过光纤耦合器进入光谱仪接收端,产生干涉光谱信号,经过数据线被采集进入数据采集处理器,完成FFT过程,获得最终的频谱和相位信息:由第一反射面和第二反射面所形成的第一F-P腔的特征频率为ξ1、光波相位项为由第二反射面和第三反射面所形成的第二F-P腔的特征频率为ξ2、相位项为由第一反射面和第三反射面所形成的第三F-P腔的特征频率为ξ3、相位项为 (1) Turn on the wide-spectrum light source, and the incident light enters the double FP cavity structure of the fiber optic temperature and humidity sensor through the fiber coupler, passes through three reflecting surfaces, and after being reflected in turn, enters the receiving end of the spectrometer through the fiber coupler again to generate an interference spectrum signal , is collected by the data line and enters the data acquisition processor, completes the FFT process, and obtains the final spectrum and phase information: the characteristic frequency of the first FP cavity formed by the first reflective surface and the second reflective surface is ξ 1 , and the optical phase Item is The characteristic frequency of the second FP cavity formed by the second reflector and the third reflector is ξ 2 , and the phase term is The characteristic frequency of the third FP cavity formed by the first reflecting surface and the third reflecting surface is ξ 3 , and the phase term is
(2)由于紫外固化胶有吸水性,环境湿度的变化会引起紫外固化胶的膨胀或收缩,折射率减小或增大,从而使和发生变化;而环境温度的变化会同时引起光纤和紫外固化胶的膨胀或收缩,以及折射率的改变,从而引起和同时变化;通过数据采集处理器检测和的变化,根据以下公式,可以同时得到环境的湿度和温度信息:(2) Due to the water absorption of UV curing adhesive, the change of environmental humidity will cause the expansion or contraction of UV curing adhesive, and the refractive index will decrease or increase, so that with Changes; and changes in ambient temperature will simultaneously cause the expansion or contraction of the optical fiber and UV-curable adhesive, as well as changes in the refractive index, resulting in with Simultaneous change; detected by data acquisition processor with According to the following formula, the environmental humidity and temperature information can be obtained at the same time:
式中,kRH1和kRH3分别是和的湿度灵敏系数,kT1和kT3分别是和的温度灵敏系数,Δφ1和Δφ3分别是和的变化量。In the formula, k RH1 and k RH3 are respectively with The humidity sensitivity coefficient of k T1 and k T3 are respectively with The temperature sensitivity coefficients of , Δφ 1 and Δφ 3 are respectively with amount of change.
本发明与现有技术相比,具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
1、本发明提出的基于微结构光纤和紫外固化胶的温湿度传感器是光纤反射式结构,具有结构紧凑、体积小、抗电磁干扰等特点,尤其在大范围、远距离、恶劣环境下易于实现多点准分布式光纤传感。1. The temperature and humidity sensor based on microstructured optical fiber and ultraviolet curing glue proposed by the present invention is an optical fiber reflective structure, which has the characteristics of compact structure, small size, anti-electromagnetic interference, etc., and is easy to realize especially in large-scale, long-distance, and harsh environments Multi-point quasi-distributed optical fiber sensing.
2、本发明提出的温湿度解调方法是基于频率信息进行的,通过对光谱进行傅里叶变换得到相位信息,实现温湿度传感信息解调。与传统的光谱波长、强度等解调方法相比,具有更高的灵敏度,且对干涉式的准分布式传感而言,多个传感头的反射信息叠加后形成的光谱杂乱,很难提取波长、强度变化信息,而在频域中进行分析时,不同腔长对应的特征频率可以很容易分开和提取,方便传感信息的解调,优势明显。2. The temperature and humidity demodulation method proposed by the present invention is based on frequency information, and the phase information is obtained by performing Fourier transform on the spectrum, so as to realize the demodulation of temperature and humidity sensing information. Compared with traditional demodulation methods such as spectral wavelength and intensity, it has higher sensitivity, and for interferometric quasi-distributed sensing, the spectral clutter formed by the superposition of reflection information of multiple sensor heads is difficult Extract wavelength and intensity change information, and when analyzing in the frequency domain, the characteristic frequencies corresponding to different cavity lengths can be easily separated and extracted, which facilitates the demodulation of sensing information and has obvious advantages.
3、由于相对湿度是温度的函数,实际应用场合要给出某个温度下的湿度信息才有意义。本发明提出的基于微结构光纤和紫外固化胶的光纤温湿度传感器是双F-P腔结构,可以同时解调温度和湿度信息,从而可以满足实际应用层面对湿度的精确传感要求。3. Since relative humidity is a function of temperature, it is only meaningful to give humidity information at a certain temperature in practical applications. The optical fiber temperature and humidity sensor based on microstructure optical fiber and ultraviolet curing glue proposed by the present invention has a double F-P cavity structure, which can demodulate temperature and humidity information at the same time, so as to meet the precise sensing requirements for humidity at the practical application level.
附图说明Description of drawings
图1是本发明中所使用的四叶草微结构光纤截面示意图;Fig. 1 is a schematic cross-sectional view of a four-leaf clover microstructure optical fiber used in the present invention;
图2是本发明的基于四叶草微结构光纤和紫外固化胶的光纤温湿度传感器的结构示意图;Fig. 2 is the structural representation of the optical fiber temperature and humidity sensor based on four-leaf clover microstructure optical fiber and ultraviolet curing glue of the present invention;
图3是本发明的温湿度传感系统示意图;Fig. 3 is a schematic diagram of the temperature and humidity sensing system of the present invention;
图4是基于本发明的传感器样品测试频谱图;Fig. 4 is based on the sensor sample test spectrogram of the present invention;
图5是基于图4中所用传感器样品的温湿度传感系统的湿度响应测量结果图;Fig. 5 is the humidity response measurement result figure of the temperature and humidity sensing system based on the sensor sample used in Fig. 4;
图6是基于图4中所用传感器样品的温湿度传感系统的温度响应测量结果图。Fig. 6 is a graph showing the temperature response measurement results of the temperature and humidity sensing system based on the sensor sample used in Fig. 4 .
具体实施方式detailed description
本发明是基于在普通单模光纤上熔接一段四叶草微结构光纤并在其后制备紫外固化胶层形成复合F-P腔的结构。其原理是由于不同湿度和温度会改变相应F-P腔的有效腔长,导致其中光波相位的变化,通过同时探测多个不同腔长对应特征频率下光波相位的变化量,联立求解可以解调出温度和湿度多参量信息。The invention is based on fusing a section of four-leaf clover microstructure optical fiber on the common single-mode optical fiber and then preparing an ultraviolet curing adhesive layer to form a composite F-P cavity structure. The principle is that different humidity and temperature will change the effective cavity length of the corresponding F-P cavity, resulting in the change of the light wave phase. By simultaneously detecting the change of the light wave phase at the characteristic frequency corresponding to multiple different cavity lengths, the simultaneous solution can demodulate the Temperature and humidity multi-parameter information.
具体来讲,本发明中所用的紫外固化胶具有吸水性,吸水后折射率变小,因此当外界湿度发生变化时,紫外固化胶单独形成的F-P腔、紫外固化胶和四叶草微结构光纤共同形成的复合F-P腔的有效腔长都会发生变化,对光谱傅里叶变换后,相应特征频率的相位量会随着湿度变化而变化;而四叶草微结构光纤所形成的F-P腔不受湿度变化影响,因此傅里叶变换后其对应特征频率的相位量将保持恒定。对于温度变化来讲,受材料的热膨胀效应和热光效应作用,三个F-P腔的有效腔长均会受到温度影响,因此傅里叶变换后其对应特征频率的相位量都会随着温度的变化而变化。由于不同材料的热膨胀系数和热光系数存在差异,不同F-P腔的温度响应也大不相同。因此任选两个F-P腔,通过对应的两个特征频率下相位对温度和湿度的不同响应,利用矩阵法就可以实现对环境温、湿度的同时监测。Specifically, the UV-curable adhesive used in the present invention has water absorption, and the refractive index becomes smaller after absorbing water. Therefore, when the external humidity changes, the F-P cavity, UV-curable adhesive and four-leaf clover microstructure optical fiber formed by the UV-curable adhesive alone will The effective cavity length of the composite F-P cavity formed together will change. After the Fourier transform of the spectrum, the phase quantity of the corresponding characteristic frequency will change with the change of humidity; while the F-P cavity formed by the four-leaf clover microstructure fiber is not affected. Humidity changes, so the phase quantity corresponding to the characteristic frequency will remain constant after Fourier transform. For temperature changes, the effective cavity lengths of the three F-P cavities will be affected by the temperature due to the thermal expansion effect and thermo-optic effect of the material, so the phase quantities corresponding to the characteristic frequencies will change with the temperature after Fourier transform And change. Due to the differences in thermal expansion coefficient and thermo-optic coefficient of different materials, the temperature response of different F-P cavities is also quite different. Therefore, two F-P cavities are selected, and the simultaneous monitoring of ambient temperature and humidity can be realized by using the matrix method through the different responses of the phase to temperature and humidity at the corresponding two characteristic frequencies.
根据多光束干涉理论,三个反射面1、2和3反射的总光强可以表述为:According to the multi-beam interference theory, the total light intensity reflected by the three reflective surfaces 1, 2 and 3 can be expressed as:
式(1)中,I1,I2,I3为三个反射面的反射光强,n1,n2分别为四叶草微结构光纤芯层模式有效折射率和紫外固化胶的折射率,分别为三个反射面位置光波的初始相位。对光谱图进行FFT变换,可以得到频域信息。由于有三个反射面,因此可形成三个FP腔,对应频域谱的三个特征频率:ξ1=2n1l,ξ2=2n2t,ξ3=ξ1+ξ2=2(n1l+n2t)。若用波数来进行代换,则三个特征频率所对应的相位项可以表示为:In formula (1), I 1 , I 2 , and I 3 are the reflected light intensities of the three reflective surfaces, n 1 , n 2 are the effective refractive index of the core mode of the four-leaf clover microstructure optical fiber and the refractive index of the UV-curable adhesive, respectively , are the initial phases of the light waves at the positions of the three reflectors, respectively. The frequency domain information can be obtained by performing FFT transformation on the spectrogram. Since there are three reflecting surfaces, three FP cavities can be formed, corresponding to the three characteristic frequencies of the frequency domain spectrum: ξ 1 =2n 1 l, ξ 2 =2n 2 t, ξ 3 =ξ 1 +ξ 2 =2(n 1 l+n 2 t). If wave number To perform substitution, the phase terms corresponding to the three eigenfrequencies can be expressed as:
对(1)式进行傅里叶变换,可得F(ξi)=∑An(ξi)δ(ξi),i=1,2,3。由于可知的范围是(-π,π),因此当相位达到-π或π时会发生2π的跳变,可通过(m为整数)进行相位展开(phase-unwrapped),保证相位随传感量的单调变化。Perform Fourier transform on formula (1), get F(ξ i )=∑A n (ξ i )δ(ξ i ), i=1,2,3. because It can be seen The range of is (-π, π), so when the phase reaches -π or π, a jump of 2π will occur, which can be passed (m is an integer) phase unwrapped (phase-unwrapped) is performed to ensure the monotonous change of the phase with the sensing quantity.
由于紫外固化胶和四叶草微结构光纤的长度和折射率都会随温度发生改变,当温度变化时,存在以下关系式:Since the length and refractive index of the UV-curable adhesive and the four-leaf clover microstructure fiber will change with temperature, when the temperature changes, the following relationship exists:
因而可分别得到Φ1,Φ2,Φ3的温度灵敏度kT1,kT2,kT3。Therefore, the temperature sensitivities k T1 , k T2 , and k T3 of Φ 1 , Φ 2 , and Φ 3 can be obtained respectively.
由于紫外固化胶有吸水性,对湿度敏感,当外界环境湿度改变时,紫外固化胶的腔长、折射率均发生改变;而四叶草光纤对湿度不敏感,腔长和折射率不随湿度变化,即则当湿度变化时,存在以下关系式:Because the UV curing adhesive has water absorption and is sensitive to humidity, when the humidity of the external environment changes, the cavity length and refractive index of the UV curing adhesive will change; while the four-leaf clover optical fiber is not sensitive to humidity, and the cavity length and refractive index will not change with the humidity. ,Right now Then when the humidity changes, the following relationship exists:
因此,由以上关系式可知,Φ1对湿度不敏感,即kRH1≈0,可利用它来解调环境温度信息;Φ2,Φ3都对湿度敏感,且湿度灵敏度相同,即kRH2=kRH3,两者任选其一都可用来解调环境湿度信息。Therefore, it can be seen from the above relationship that Φ 1 is not sensitive to humidity, that is, k RH1 ≈ 0, which can be used to demodulate the ambient temperature information; Φ 2 and Φ 3 are both sensitive to humidity, and the humidity sensitivity is the same, that is, k RH2 = k RH3 , either of them can be used to demodulate the ambient humidity information.
以Φ1,Φ3为例,两个相位变化量与湿度和温度变化存在以下矩阵关系:Taking Φ 1 and Φ 3 as examples, the two phase changes have the following matrix relationship with humidity and temperature changes:
通过对上述矩阵求解可以得到相应的湿度和温度变化:The corresponding humidity and temperature changes can be obtained by solving the above matrix:
从而实现对环境湿度和温度的同时监测。In this way, the simultaneous monitoring of the ambient humidity and temperature can be realized.
下面结合实施例及附图对本发明作进一步详细的描述,但本发明的实施方式不限于此。The present invention will be further described in detail below in conjunction with the embodiments and the accompanying drawings, but the embodiments of the present invention are not limited thereto.
附图1给出了本发明中所用的四叶草微结构光纤截面示意图。此种光纤的外径与普通单模光纤相同,均为125微米,光纤纤芯的内径为11微米。由于纤芯4的周围对称分布着四个圆心角85度,半径64微米的扇形空气孔5,因此命名此种特殊的微结构光纤为四叶草微结构光纤。Accompanying drawing 1 has provided the cross-section diagram of the four-leaf clover microstructure optical fiber used in the present invention. The outer diameter of this kind of fiber is the same as that of ordinary single-mode fiber, which is 125 microns, and the inner diameter of the fiber core is 11 microns. Since four fan-shaped air holes 5 with a central angle of 85 degrees and a radius of 64 microns are symmetrically distributed around the core 4, this special microstructured fiber is named as a four-leaf clover microstructured fiber.
附图2给出了本发明的基于四叶草微结构光纤和紫外固化胶的光纤温湿度传感器的结构示意图,它主要由单模光纤1、四叶草微结构光纤2、紫外固化胶层3三部分组成。单模光纤1和四叶草光纤2利用光纤熔接机进行熔接,由于四叶草微结构光纤纤芯4的直径为11微米,与单模光纤芯层直径失配,因此此处形成一个第一反射面6。显微镜下,通过点胶的方式在四叶草微结构光纤2后端制备紫外固化胶层3,并在紫外固化灯下进行固化,形成四叶草微结构光纤2与紫外固化胶层3之间的第二反射面7,以及紫外固化胶层3与空气之间的第三反射面8。由三个反射面6,7,8形成的三个F-P腔结构,最终构成本发明的光纤F-P型温湿度传感器。Accompanying drawing 2 has provided the structural representation of the optical fiber temperature and humidity sensor based on four-leaf clover microstructure optical fiber and ultraviolet curing adhesive of the present invention, and it mainly consists of single-mode optical fiber 1, four-leaf clover microstructure optical fiber 2, ultraviolet curing adhesive layer 3 It consists of three parts. The single-mode optical fiber 1 and the four-leaf clover optical fiber 2 are fused by an optical fiber fusion splicer. Since the diameter of the four-leaf clover microstructure optical fiber core 4 is 11 microns, which does not match the diameter of the single-mode optical fiber core layer, a first reflective surface6. Under the microscope, a UV-curable adhesive layer 3 is prepared on the rear end of the four-leaf clover microstructured optical fiber 2 by dispensing, and cured under an ultraviolet curing lamp to form a gap between the four-leaf clover microstructured optical fiber 2 and the ultraviolet-cured adhesive layer 3 The second reflective surface 7, and the third reflective surface 8 between the UV-curable adhesive layer 3 and the air. The three F-P cavity structures formed by the three reflective surfaces 6, 7, 8 finally constitute the optical fiber F-P type temperature and humidity sensor of the present invention.
如附图3所示,利用上述光纤温湿度传感器13的温湿度传感系统包括宽谱光源10、光纤耦合器12、光谱仪11、数据采集处理器15以及温湿度控制箱14。首先将光纤耦合器12的两个分路端12-1,12-2分别与宽谱光源10和光谱仪11进行连接,再将光纤耦合器12的合路端12-3与光纤温湿度传感器13相连,最后将光纤温湿度传感器13放入温湿度控制箱14中,进行温湿度测试,再将光谱仪11接收到的光谱信息传输到数据采集处理器15中进行数据分析得到各F-P腔的温湿度灵敏度。As shown in FIG. 3 , the temperature and humidity sensing system using the fiber optic temperature and humidity sensor 13 includes a broadband light source 10 , an optical fiber coupler 12 , a spectrometer 11 , a data acquisition processor 15 and a temperature and humidity control box 14 . Firstly connect the two shunt ends 12-1 and 12-2 of the fiber coupler 12 with the broadband light source 10 and the spectrometer 11 respectively, and then connect the combiner end 12-3 of the fiber coupler 12 with the fiber optic temperature and humidity sensor 13 Connected, finally put the optical fiber temperature and humidity sensor 13 into the temperature and humidity control box 14, carry out the temperature and humidity test, and then transmit the spectral information received by the spectrometer 11 to the data acquisition processor 15 for data analysis to obtain the temperature and humidity of each F-P cavity sensitivity.
按上述的光纤温湿度传感器,四叶草微结构光纤2长度在150微米左右,紫外固化胶层3的厚度在几十微米量级,具体可根据对形成的复合F-P腔反射谱快速傅里叶变换(FFT)后空间频率的实际要求,通过调整四叶草微微结构光纤2的长度以及紫外固化胶层3的点胶厚度,来设计复合F-P腔的不同腔长比例。According to the above-mentioned optical fiber temperature and humidity sensor, the length of the four-leaf clover microstructure optical fiber 2 is about 150 microns, and the thickness of the ultraviolet curing adhesive layer 3 is on the order of tens of microns, which can be determined according to the fast Fourier transform of the reflection spectrum of the formed composite F-P cavity. According to the actual requirements of the spatial frequency after transformation (FFT), the different cavity length ratios of the composite F-P cavity are designed by adjusting the length of the four-leaf clover micro-structured optical fiber 2 and the dispensing thickness of the UV-cured adhesive layer 3 .
实施例:Example:
对某一传感样品进行温湿度测试,通过对得到的反射光谱进行傅里叶变换得到附图4所示的频域谱信息,三个F-P腔对应三个特征频率,由于特征频率的大小正比于F-P腔长,因此三个谱峰从左到右依次对应紫外固化胶层3、四叶草微结构光纤2和复合F-P腔(紫外固化胶层3的长度小于四叶草微结构光纤2的长度)。任选两个峰的相位信息作为温湿度解调的依据,此处以后两个峰为例。Conduct temperature and humidity tests on a sensing sample, and obtain the frequency domain spectrum information shown in Figure 4 by Fourier transforming the obtained reflection spectrum. The three F-P cavities correspond to three characteristic frequencies. Since the magnitude of the characteristic frequencies is proportional to Because of the length of the F-P cavity, the three spectral peaks correspond to the UV-cured adhesive layer 3, the four-leaf clover microstructured optical fiber 2 and the composite F-P cavity from left to right (the length of the ultraviolet-cured adhesive layer 3 is less than that of the four-leaf clover microstructured optical fiber 2 length). The phase information of the two peaks is optional as the basis for temperature and humidity demodulation, here the last two peaks are taken as an example.
利用温湿度控制箱保持环境温度在21℃,以5%为调节单位,将相对湿度从15%逐渐提高至90%,分别记录每个湿度下的光谱信息,并进行傅里叶变换,得到附图5所示的两个F-P腔的相位变化,通过对绘制的相位-温度曲线进行直线拟合,并计算直线斜率可知四叶草微结构光纤F-P腔相位的湿度灵敏度kRH1≈0,复合F-P腔相位的湿度灵敏度kRH3=0.025rad/%RH。Use the temperature and humidity control box to keep the ambient temperature at 21°C, and gradually increase the relative humidity from 15% to 90% with 5% as the adjustment unit, record the spectral information at each humidity, and perform Fourier transform to obtain the attached The phase change of the two FP cavities shown in Figure 5, by fitting the drawn phase-temperature curve with a straight line, and calculating the slope of the line, it can be known that the humidity sensitivity k RH1 ≈ 0 of the phase of the four-leaf clover microstructure fiber FP cavity, the compound FP The humidity sensitivity of the cavity phase k RH3 = 0.025 rad/%RH.
利用温湿度控制箱保持环境湿度在30%,以5℃为调节单位,将温度从30℃逐渐提高至55℃,分别记录每个温度下的光谱信息,并进行傅里叶变换,得到附图6所示的两个F-P腔的相位变化,通过对绘制的相位-温度曲线进行直线拟合,并计算直线斜率可知四叶草微结构光纤F-P腔相位的温度灵敏度kT1=0.018rad/℃,复合F-P腔相位的温度灵敏度kT3=0.065rad/℃。Use the temperature and humidity control box to keep the ambient humidity at 30%, and gradually increase the temperature from 30°C to 55°C with 5°C as the adjustment unit, record the spectral information at each temperature respectively, and perform Fourier transform to obtain the attached drawing For the phase changes of the two FP cavities shown in 6, by fitting the drawn phase-temperature curve with a straight line, and calculating the slope of the line, it can be known that the temperature sensitivity of the phase of the four-leaf clover microstructure fiber FP cavity k T1 = 0.018rad/℃, The temperature sensitivity of the composite FP cavity phase k T3 =0.065rad/°C.
最后,将这两个F-P腔的四个温湿度灵敏度代入(12)式中,通过相位变化,求解如下矩阵式(13)就可以实现对环境湿度和温度的同时解调:Finally, the four temperature and humidity sensitivities of the two F-P cavities are substituted into Equation (12), and the following matrix Equation (13) can be solved through phase change to realize simultaneous demodulation of ambient humidity and temperature:
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610264802.2A CN105806414B (en) | 2016-04-26 | 2016-04-26 | Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610264802.2A CN105806414B (en) | 2016-04-26 | 2016-04-26 | Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105806414A CN105806414A (en) | 2016-07-27 |
CN105806414B true CN105806414B (en) | 2017-10-31 |
Family
ID=56458524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610264802.2A Expired - Fee Related CN105806414B (en) | 2016-04-26 | 2016-04-26 | Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105806414B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109142277B (en) * | 2018-07-16 | 2021-05-14 | 哈尔滨工程大学 | Optical fiber humidity sensor combined with spider egg-wrapped silk and manufacturing method |
CN109580035B (en) * | 2018-12-05 | 2020-08-18 | 天津大学 | Sapphire fiber high temperature sensor with high fringe visibility and its temperature measurement method |
DE202019004415U1 (en) * | 2019-10-28 | 2019-11-06 | K.W.H. Ciclosport Vertriebs GmbH | sensor device |
CN111999263B (en) * | 2020-07-10 | 2022-10-04 | 之江实验室 | Mesoscale micro-nano optical fiber humidity sensor |
CN114705229A (en) * | 2022-03-29 | 2022-07-05 | 深圳市联创杰科技有限公司 | A substrate-tunable optical fiber FP composite temperature and humidity sensor chip based on sensitive materials |
CN117433587B (en) * | 2023-12-14 | 2024-03-19 | 江苏南方通信科技有限公司 | Symmetrical-structure multi-parameter weak grating sensing optical cable, sensing system and measuring method |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7167622B2 (en) * | 2004-04-08 | 2007-01-23 | Omniguide, Inc. | Photonic crystal fibers and medical systems including photonic crystal fibers |
CN100449341C (en) * | 2007-02-07 | 2009-01-07 | 南开大学 | Selective filling method and judging alignment system for microstructure optical fiber |
JP5662151B2 (en) * | 2007-09-26 | 2015-01-28 | イムラ アメリカ インコーポレイテッド | Glass large core optical fiber |
CN101216577A (en) * | 2007-12-28 | 2008-07-09 | 武汉光迅科技股份有限公司 | Photon crystal optical fibre coupling method and its coupling apparatus |
CN101957227B (en) * | 2010-10-22 | 2012-01-04 | 南京信息工程大学 | Photonic crystal fiber optic liquid level sensor and sensing system formed by same |
CN102262062B (en) * | 2011-04-26 | 2012-11-14 | 浙江大学 | Microstructure fiber Bragg grating gas sensor and detection device |
CN104345046A (en) * | 2013-08-03 | 2015-02-11 | 重庆绿色智能技术研究院 | Optical fiber interferometer, optical fiber sensor and production method thereof |
US10267999B2 (en) * | 2014-03-31 | 2019-04-23 | Koninklijke Philips N.V. | Optical connector for sterile applications |
CN104596559B (en) * | 2015-01-21 | 2017-08-01 | 哈尔滨工业大学深圳研究生院 | A Fiber Optic F‑P Multifunctional Sensor Based on Microporous Optical Reflective Diaphragm |
CN205067340U (en) * | 2015-10-27 | 2016-03-02 | 中国计量学院 | Sensing system of detection ring border humidity |
-
2016
- 2016-04-26 CN CN201610264802.2A patent/CN105806414B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN105806414A (en) | 2016-07-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105806414B (en) | Optical fiber Temperature Humidity Sensor, temperature and humidity sensing system and humiture demodulation method | |
Zhao et al. | Femtosecond laser-inscribed fiber-optic sensor for seawater salinity and temperature measurements | |
Zhao et al. | Relative humidity sensor based on hollow core fiber filled with GQDs-PVA | |
CN206618529U (en) | A kind of simple reflective interference-type optical fiber baroceptor | |
Tong et al. | Surface plasmon resonance optical fiber sensor for relative humidity detection without temperature crosstalk | |
CN113029381B (en) | High Precision Temperature Sensor Based on Quartz Tube Encapsulating PDMS Cavity and Air Cavity | |
CN116105778B (en) | A Fiber Optic Sensing System for Synchronous Measurement of Temperature and Salt | |
Kong et al. | Micro-lab on tip: High-performance dual-channel surface plasmon resonance sensor integrated on fiber-optic end facet | |
CN102410990A (en) | High-sensitivity micro-nano optical fiber refractive index sensor and preparation method thereof | |
CN111077080A (en) | Optical fiber Mach-Zehnder interference humidity sensor based on graphene oxide sensitization | |
Arrizabalaga et al. | Miniature interferometric humidity sensor based on an off-center polymer cap onto optical fiber facet | |
CN108195411A (en) | The Microstructure Sensor of fiber F-P cavity cascade FBG is inscribed based on femtosecond | |
Bian et al. | A novel optical fiber Mach–Zehnder interferometer based on the calcium alginate hydrogel film for humidity sensing | |
CN111337060A (en) | Hybrid sensor based on vernier effect of parallel structure and manufacturing method thereof | |
CN102435348A (en) | High-Q optical microcavity-based temperature sensor and distributed type temperature sensing network | |
CN108195493A (en) | One kind is based on PCF Mach-Zehnder interferometers(MZI)Highly sensitive stress sensing device | |
Wang et al. | High sensitivity relative humidity sensor based on two parallel-connected Fabry–Perot interferometers and Vernier effect | |
He et al. | Discriminative measurement for temperature and humidity using hollow-core Fabry-Perot interferometer | |
CN116147676B (en) | An optical fiber sensor and measurement method for simultaneous measurement of temperature, salt, and depth | |
CN111928880B (en) | Mach-Zehnder Interferometric Fiber and Its Sensor Based on Surface Plasmon Effect | |
Cuando-Espitia et al. | Dual-point refractive index measurements using coupled seven-core fibers | |
Wang et al. | Relative humidity sensor based on cascaded Fabry-Perot interferometers and Vernier effect | |
Yang et al. | Micro displacement sensor with cascaded micro fiber Sagnac ring based on Vernier effect | |
Lokman et al. | Tapered fiber coated with hydroxyethyl cellulose/polyvinylidene fluoride composite for relative humidity sensor | |
Dang et al. | Sensing performance improvement of resonating sensors based on knotting micro/nanofibers: A review |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171031 Termination date: 20210426 |
|
CF01 | Termination of patent right due to non-payment of annual fee |