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CN105547480A - High-throughput birefringence interference imaging spectrum device - Google Patents

High-throughput birefringence interference imaging spectrum device Download PDF

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Publication number
CN105547480A
CN105547480A CN201510982227.5A CN201510982227A CN105547480A CN 105547480 A CN105547480 A CN 105547480A CN 201510982227 A CN201510982227 A CN 201510982227A CN 105547480 A CN105547480 A CN 105547480A
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light
prism
polarized light
linearly polarized
reflected
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CN105547480B (en
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李建欣
柏财勋
周建强
沈燕
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J3/453Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4537Devices with refractive scan

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Polarising Elements (AREA)

Abstract

本发明公开了一种高通量双折射干涉成像光谱装置,包括沿光路方向依次放置的前置成像物镜、准直物镜、组合起偏器、前置半波片、双折射剪切器、后置半波片、组合检偏器、后置成像物镜和探测器。所述组合起偏器和组合检偏器结构相同,包括第一偏振分光棱镜、第二偏振分光棱镜和直角棱镜,第一偏振分光棱镜和第二偏振分光棱镜的分光面相互垂直,直角棱镜的两个直角面镀制高反膜,直角棱镜的斜边与第一偏振分光棱镜的反射光出射面连接,与第二偏振分光棱镜反射光入射面连接。本发明相比于传统的双折射干涉成像光谱系统,光通量由原来的不足25%提高到80%以上。干涉信息的叠加提高了系统信噪比,有利于提高光谱复原精度。

The invention discloses a high-throughput birefringence interference imaging spectrum device, which comprises a front imaging objective lens, a collimating objective lens, a combined polarizer, a front half-wave plate, a birefringence shearer, and a rear imaging objective lens arranged in sequence along the optical path direction. A half-wave plate, a combined analyzer, a post-imaging objective lens and a detector are installed. The combined polarizer and the combined analyzer have the same structure, including a first polarizing beam splitting prism, a second polarizing beam splitting prism and a rectangular prism, the beam splitting planes of the first polarizing beam splitting prism and the second polarizing beam splitting prism are perpendicular to each other, the rectangular prism The two right-angle surfaces are coated with high-reflection film, and the hypotenuse of the right-angle prism is connected with the reflected light exit surface of the first polarization beam splitter prism, and is connected with the reflected light incident surface of the second polarization beam splitter prism. Compared with the traditional birefringence interference imaging spectroscopic system, the invention improves the luminous flux from less than 25% to more than 80%. The superposition of interference information improves the signal-to-noise ratio of the system, which is conducive to improving the accuracy of spectral restoration.

Description

High flux birefringence interference imaging spectral device
Technical field
The present invention relates to optical target sounding field, relate to a kind of high flux birefringence interference imaging spectral device.
Background technology
High light spectrum image-forming technology is interfered to obtain the interference light intensity information of imageable target by adding interferometer in imaging systems, Fourier transform is utilized to restore the multispectral datacube of imageable target, there is the advantage of high light flux, high spatial resolution and high spectral resolution, in fields such as remotely sensed image, resource exploration, environmental monitorings, there is very large application potential.
In recent years, both at home and abroad such high light spectrum image-forming technology is studied.Wherein, the people such as Israel Cabib have studied the high flux interference imaging spectral technology based on Sagnac interferometer, form interference signal on the detector by lateral shear thought.In such technical scheme, Sagnac interferometer needs the luminous flux losing at least half.The people such as Britain Harvey propose the technical scheme based on Wollaston prism interferometer device, the program is equally based on the thought of lateral shearing interference, due to the light beam shear property of birefringence device, system can realize linear light path structure, but the Sagnac interferometer scheme of light flux ratio also will reduce half.The people such as U.S. Horton propose the technical scheme based on Mach-Zehnder interferometer, form two staggered picture planes, receive formed interference signal by detector by angular shear thought.Such interferometer is called as " as flat interferometer ", its luminous flux phase and the Sagnac interferometer scheme of Israel Cabib similar.The people such as Germany Posselt propose the technical scheme based on Michelson interferometer, and utilize the thought that angular shear is interfered equally, do not need collimated light path structure, luminous flux utilization factor is same not as good as 25%.Studies in China personnel also conduct in-depth research relevant interference imaging method, propose the technical scheme differed from one another respectively, the birefringence mode inteference imaging spectrometer based on Savart prism that the people such as the pure people propose is opened comprising Xi'an Communications University, luminous flux is generally less than 25%, the therefore more difficult lifting of optical-mechanical system signal to noise ratio (S/N ratio).
Summary of the invention
The object of the present invention is to provide a kind of high flux birefringence interference imaging spectral device, solve the technical matters that in traditional double refraction interference imaging spectral technology scheme, luminous flux loss is larger.
The technical solution realizing the object of the invention is: a kind of high flux birefringence interference imaging spectral device, comprise place successively along optical path direction preposition image-forming objective lens, collimator objective, the combination polarizer, preposition half-wave plate, birefringence clipper, rearmounted half-wave plate, combination analyzer, rearmounted image-forming objective lens and detector; All optical elements are contour relative to instrument base planar coaxial; The imaging surface of preposition image-forming objective lens overlaps with the front focal plane of collimator objective.
The described combination polarizer is identical with combination analyzer structure, comprise the first polarization splitting prism, the second polarization splitting prism and right-angle prism, first polarization splitting prism is mutually vertical with the light splitting surface of the second polarization splitting prism, two right-angle surface of right-angle prism are coated with high-reflecting film, the hypotenuse of right-angle prism is connected with the reflected light exit facet of the first polarization splitting prism, is connected with the second polarization splitting prism reflected light plane of incidence.
Incident beam from target is imaged in its image planes by preposition image-forming objective lens, subsequently through collimator objective, form collimated light beam, the combination polarizer is incided with collimated light beam form, equal, the orthogonal transmitted light of direction of vibration of intensity and reflected light is produced through the first polarization splitting prism, transmitted light through the second polarization splitting prism outgoing, is called radioparent polarized light again; Reflected light enters right-angle prism, after two right-angle surface reflect successively, enters the second polarization splitting prism, through the second polarization splitting prism light splitting surface outgoing, is called reflected ray polarized light; Two bunch polarized lights are through preposition half-wave plate, polarization direction rotates 45 °, radioparent polarized light is divided into after entering birefringence clipper that intensity is equal, the orthogonal two bunch polarized lights of direction of vibration, be called the first radioparent polarized light and the second radioparent polarized light, and the first radioparent polarized light and the second radioparent polarized light are laterally cut across incision; Reflected ray polarized light is divided into after entering birefringence clipper that intensity is equal, the orthogonal two bunch polarized lights of direction of vibration, be called the first reflected ray polarized light and the second reflected ray polarized light, and the first reflected ray polarized light and the second reflected ray polarized light are cut by Transverse Shear; Above-mentioned four bunch polarized lights are through rearmounted half-wave plate, and polarization direction all rotates 45 °; Four bunch polarized lights enter combination analyzer respectively, each bunch polarized light enters in combination analyzer, transmitted light and reflected light is produced respectively through the first polarization splitting prism light splitting surface, transmitted light is again through the second polarization splitting prism outgoing, reflected light enters right-angle prism, after two right-angle surface reflect successively, enter the second polarization splitting prism, through the second polarization splitting prism light splitting surface outgoing; Eight bunch polarized lights are after rearmounted image-forming objective lens, converge on detector target surface and produce four groups of interference information, be respectively the transmitted light that the first transmitted light and the second transmitted light produce in combination analyzer mutually to interfere, the reflected light that first transmitted light and the second transmitted light produce in combination analyzer is interfered mutually, the transmitted light that first reflected light and the second reflected light produce in combination analyzer is interfered mutually, and the reflected light that the first reflected light and the second reflected light produce in combination analyzer is interfered mutually; Four groups of interference information are modulated by identical optical path difference, and superposition together, and then obtain the interference image information of target by detector.
Also comprise diaphragm, the imaging surface of described preposition image-forming objective lens is provided with diaphragm; The optical axis direction of preposition half-wave plate and rearmounted half-wave plate and the angle in its incident light polarization direction are 22.5 °; The target surface of detector is positioned at the image planes position of rearmounted image-forming objective lens.
Described birefringence clipper is Savart clipper or two Wollaston clipper.
Compared with prior art, its advantage is in the present invention: (1), compared to traditional birefringence interference imaging spectrum system, luminous flux brings up to more than 80% by original less than 25%.
(2) superposition of interference information improves system signal noise ratio, is conducive to improving spectrum recovering precision.
Accompanying drawing explanation
Fig. 1 is the structural representation of high flux birefringence interference imaging spectral device of the present invention.
Fig. 2 is the structural representation of the combination polarizer of the present invention and combination analyzer.
Fig. 3 is birefringence clipper schematic diagram of the present invention, and wherein (a) is two Wollaston clipper schematic diagram, and (b) is Savart clipper schematic diagram.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Composition graphs 1 ~ Fig. 3, a kind of high flux birefringence interference imaging spectral device, comprise place successively along optical path direction preposition image-forming objective lens 1, collimator objective 2, the combination polarizer 3, preposition half-wave plate 4, birefringence clipper 5, rearmounted half-wave plate 6, combination analyzer 7, rearmounted image-forming objective lens 8 and detector 9; All optical elements are contour relative to instrument base planar coaxial; The imaging surface of preposition image-forming objective lens 1 overlaps with the front focal plane of collimator objective 2.
The described combination polarizer 3 is identical with combination analyzer 7 structure, comprise the first polarization splitting prism 11, second polarization splitting prism 12 and right-angle prism 13, first polarization splitting prism 11 is mutually vertical with the light splitting surface of the second polarization splitting prism 12, two right-angle surface of right-angle prism 13 are coated with high-reflecting film, the hypotenuse of right-angle prism 13 is connected with the reflected light exit facet of the first polarization splitting prism 11, is connected with the second polarization splitting prism 12 reflected light plane of incidence.
Also comprise diaphragm 10, the imaging surface of described preposition image-forming objective lens 1 is provided with diaphragm 10; The optical axis direction of preposition half-wave plate 4 and rearmounted half-wave plate 6 and the angle in its incident light polarization direction are 22.5 °; The target surface of detector 9 is positioned at the image planes position of rearmounted image-forming objective lens 8.
Described birefringence clipper 5 is Savart clipper or two Wollaston clipper.
Incident beam from target is imaged in its image planes by preposition image-forming objective lens 1, parasitic light is removed through diaphragm 10, subsequently through collimator objective 2, form collimated light beam, the combination polarizer 3 is incided with collimated light beam form, produce that intensity is equal through the first polarization splitting prism 11, the orthogonal transmitted light of direction of vibration and reflected light, transmitted light through the second polarization splitting prism 12 outgoing, is called radioparent polarized light again; Reflected light enters right-angle prism 13, after two right-angle surface reflect successively, enters the second polarization splitting prism 12, through the second polarization splitting prism 12 light splitting surface outgoing, is called reflected ray polarized light; Two bunch polarized lights are through preposition half-wave plate 4, polarization direction rotates 45 °, radioparent polarized light is divided into after entering birefringence clipper 5 that intensity is equal, the orthogonal two bunch polarized lights of direction of vibration, be called the first radioparent polarized light and the second radioparent polarized light, and the first radioparent polarized light and the second radioparent polarized light are laterally cut across incision; Reflected ray polarized light is divided into after entering birefringence clipper 5 that intensity is equal, the orthogonal two bunch polarized lights of direction of vibration, be called the first reflected ray polarized light and the second reflected ray polarized light, and the first reflected ray polarized light and the second reflected ray polarized light are cut by Transverse Shear; Above-mentioned four bunch polarized lights are through rearmounted half-wave plate 6, and polarization direction all rotates 45 °; Four bunch polarized lights enter combination analyzer 7 respectively, each bunch polarized light enters in combination analyzer 7, transmitted light and reflected light is produced respectively through the first polarization splitting prism 11 light splitting surface, transmitted light is again through the second polarization splitting prism 12 outgoing, reflected light enters right-angle prism 13, after two right-angle surface reflect successively, enter the second polarization splitting prism 12, through the second polarization splitting prism 12 light splitting surface outgoing; Eight bunch polarized lights are after rearmounted image-forming objective lens 6, converge on detector 9 target surface and produce four groups of interference information, the transmitted light being respectively the first transmitted light and the generation in combination analyzer 7 of the second transmitted light is interfered mutually, the reflected light that first transmitted light and the second transmitted light produce in combination analyzer 7 is interfered mutually, the transmitted light that first reflected light and the second reflected light produce in combination analyzer 7 is interfered mutually, and the reflected light that the first reflected light and the second reflected light produce in combination analyzer 7 is interfered mutually; Four groups of interference information are modulated by identical optical path difference, and superposition together, and then obtain the interference image information of target by detector 9.Can restore the spectral information of target after eventually passing Fourier transform process.
The present invention has two class interferential scanning modes, and the first kind is built-in scan mode, rotates or translation birefringence clipper 5; Equations of The Second Kind is entire scan mode, translation or rotate whole high flux birefringence interference imaging spectral device.Adopt this two kinds of interferential scanning modes, scanning device every translation distance, detector 9 gathers an interference information; After scanning completes, acquisition interference data cube, carries out to these interference signal data the spectral information that spectrum recovering process can obtain the detection of a target.
High flux birefringence interference imaging spectral apparatus and method of the present invention, utilize the optical characteristics of polarization splitting prism, add in interference system and combine (inspection) device partially, adopt the thought of " interference information superposition ", realize the light spectrum image-forming detection of system height throughput.The method has the advantage such as high s/n ratio and high light flux.The present invention is compared to traditional birefringence interference imaging spectrum system, and luminous flux brings up to more than 80% by original less than 25%.The superposition of interference information improves system signal noise ratio, is conducive to improving spectrum recovering precision.

Claims (5)

1.一种高通量双折射干涉成像光谱装置,其特征在于:包括沿光路方向依次放置的前置成像物镜(1)、准直物镜(2)、组合起偏器(3)、前置半波片(4)、双折射剪切器(5)、后置半波片(6)、组合检偏器(7)、后置成像物镜(8)和探测器(9);所有光学元件相对于仪器底座平面同轴等高;前置成像物镜(1)的成像面与准直物镜(2)的前焦面重合。1. A high-throughput birefringent interference imaging spectroscopic device, characterized in that: it includes a front imaging objective lens (1), a collimating objective lens (2), a combined polarizer (3), and a front imaging objective lens (1) placed sequentially along the optical path direction Half-wave plate (4), birefringent shearer (5), post half-wave plate (6), combined analyzer (7), post-imaging objective (8) and detector (9); all optical components The height is coaxial with respect to the base plane of the instrument; the imaging plane of the front imaging objective lens (1) coincides with the front focal plane of the collimating objective lens (2). 2.根据权利要求1所述的高通量双折射干涉成像光谱装置,其特征在于:所述组合起偏器(3)和组合检偏器(7)结构相同,包括第一偏振分光棱镜(11)、第二偏振分光棱镜(12)和直角棱镜(13),第一偏振分光棱镜(11)和第二偏振分光棱镜(12)的分光面相互垂直,直角棱镜(13)的两个直角面镀制高反膜,直角棱镜(13)的斜边与第一偏振分光棱镜(11)的反射光出射面连接,与第二偏振分光棱镜(12)反射光入射面连接。2. The high-throughput birefringent interference imaging spectroscopy device according to claim 1, characterized in that: the combined polarizer (3) and combined analyzer (7) are identical in structure, comprising a first polarizing beam splitter ( 11), the second polarizing beamsplitter prism (12) and right-angle prism (13), the beam-splitting planes of the first polarizing beam-splitting prism (11) and the second polarizing beam-splitting prism (12) are perpendicular to each other, two right-angled prisms (13) The surface is plated with a high-reflection film, and the hypotenuse of the right-angle prism (13) is connected with the reflected light exit surface of the first polarization beam splitter prism (11), and connected with the reflected light incident surface of the second polarization beam splitter prism (12). 3.根据权利要求2所述的高通量双折射干涉成像光谱装置,其特征在于:来自目标的入射光束通过前置成像物镜(1)成像在其像面上,随后经过准直物镜(2),形成准直光束,以准直光束形式入射到组合起偏器(3),经第一偏振分光棱镜(11)产生强度相等、振动方向互相垂直透射光和反射光,透射光再经过第二偏振分光棱镜(12)出射,称为透射线偏振光;反射光进入直角棱镜(13),在两个直角面依次反射后,进入第二偏振分光棱镜(12),经第二偏振分光棱镜(12)分光面出射,称为反射线偏振光;两束线偏振光经过前置半波片(4),偏振方向旋转45°,透射线偏振光进入双折射剪切器(5)后被分为强度相等、振动方向互相垂直两束线偏振光,称为第一透射线偏振光和第二透射线偏振光,且第一透射线偏振光和第二透射线偏振光被横向开剪切开;反射线偏振光进入双折射剪切器(5)后被分为强度相等、振动方向互相垂直两束线偏振光,称为第一反射线偏振光和第二反射线偏振光,且第一反射线偏振光和第二反射线偏振光被横向剪切开;上述四束线偏振光经过后置半波片(6),偏振方向均旋转45°;四束线偏振光分别进入组合检偏器(7),每一束线偏振光进入组合检偏器(7)中,经第一偏振分光棱镜(11)分光面分别产生透射光和反射光,透射光再经过第二偏振分光棱镜(12)出射,反射光进入直角棱镜(13),在两个直角面依次反射后,进入第二偏振分光棱镜(12),经第二偏振分光棱镜(12)分光面出射;八束线偏振光经过后置成像物镜(6)后,会聚于探测器(9)靶面上产生四组干涉信息,分别为第一透射光和第二透射光在组合检偏器(7)中产生的透射光相互干涉,第一透射光和第二透射光在组合检偏器(7)中产生的反射光相互干涉,第一反射光和第二反射光在组合检偏器(7)中产生的透射光相互干涉,第一反射光和第二反射光在组合检偏器(7)中产生的反射光相互干涉;四组干涉信息被相同的光程差调制,并叠加重合在一起,进而由探测器(9)获得目标的干涉图像信息。3. The high-throughput birefringent interference imaging spectroscopy device according to claim 2, characterized in that: the incident light beam from the target is imaged on its image plane by the front imaging objective lens (1), and then passed through the collimating objective lens (2) ) to form a collimated beam, which is incident on the combined polarizer (3) in the form of a collimated beam, and then passes through the first polarizing beam splitter (11) to generate transmitted light and reflected light with equal intensity and perpendicular vibration directions, and the transmitted light passes through the second Two polarization beam-splitting prisms (12) are emitted, which is called transmission line polarized light; the reflected light enters the rectangular prism (13), and after being reflected on two rectangular surfaces successively, enters the second polarization beam-splitting prism (12), and passes through the second polarization beam-splitting prism (12) The beam splitting surface exits, which is called reflected linearly polarized light; two beams of linearly polarized light pass through the front half-wave plate (4), the polarization direction is rotated by 45°, and the transmitted linearly polarized light enters the birefringent shearer (5) and is It is divided into two beams of linearly polarized light with equal intensity and perpendicular to each other in vibration direction, called the first transmitted linearly polarized light and the second transmitted linearly polarized light, and the first transmitted linearly polarized light and the second transmitted linearly polarized light are cut transversely open; the reflected linearly polarized light enters the birefringent shearer (5) and is divided into two beams of linearly polarized light with equal intensity and perpendicular vibration directions, called the first reflected linearly polarized light and the second reflected linearly polarized light, and the second reflected linearly polarized light The first reflected linearly polarized light and the second reflected linearly polarized light are transversely cut; the above four beams of linearly polarized light pass through the rear half-wave plate (6), and the polarization direction is rotated by 45°; the four beams of linearly polarized light respectively enter the combined detector Polarizer (7), each beam of linearly polarized light enters the combination analyzer (7), generates transmitted light and reflected light respectively through the light-splitting surface of the first polarizing beam splitting prism (11), and the transmitted light passes through the second polarizing beam splitting prism (12) exit, the reflected light enters the right-angle prism (13), after two right-angle surfaces are reflected successively, enters the second polarizing beam-splitting prism (12), exits through the second polarizing beam-splitting prism (12) beam-splitting surface; eight beams of linearly polarized light After passing through the rear imaging objective lens (6), it converges on the target surface of the detector (9) to generate four sets of interference information, which are respectively the transmitted light generated by the first transmitted light and the second transmitted light in the combined analyzer (7) Mutual interference, the reflected light produced by the first transmitted light and the second transmitted light in the combined analyzer (7) interferes with each other, and the transmitted light produced by the first reflected light and the second reflected light in the combined analyzer (7) Mutual interference, the reflected light generated by the first reflected light and the second reflected light in the combined analyzer (7) interferes with each other; the four groups of interference information are modulated by the same optical path difference, and superimposed and overlapped together, and then detected by the detector (9) Obtain the interference image information of the target. 4.根据权利要求1所述的高通量双折射干涉成像光谱装置,其特征在于:还包括光阑(10),所述前置成像物镜(1)的成像面上设有光阑(10);前置半波片(4)和后置半波片(6)的光轴方向与其入射光偏振方向的夹角为22.5°;探测器(9)的靶面位于后置成像物镜(8)的像面位置。4. The high-throughput birefringence interference imaging spectroscopy device according to claim 1, characterized in that: it also includes a diaphragm (10), and the imaging surface of the front imaging objective lens (1) is provided with a diaphragm (10 ); the angle between the optical axis direction of the front half-wave plate (4) and the rear half-wave plate (6) and its incident light polarization direction is 22.5 °; the target surface of the detector (9) is located at the rear imaging objective lens (8 ) image plane position. 5.根据权利要求1所述的高通量双折射干涉成像光谱装置,其特征在于:所述双折射剪切器(5)为Savart剪切器或双Wollaston剪切器。5. The high-throughput birefringent interference imaging spectroscopy device according to claim 1, characterized in that: the birefringent shear (5) is a Savart shear or a double Wollaston shear.
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CN108593105A (en) * 2017-12-14 2018-09-28 南京理工大学 The Hyperspectral imaging devices and its imaging method of birefringent polarizing interference-type
CN110987186A (en) * 2019-11-21 2020-04-10 中国科学院西安光学精密机械研究所 Birefringent interferometer adjusting device and method based on optical path difference indication
CN111307761A (en) * 2019-11-21 2020-06-19 中国科学院西安光学精密机械研究所 Hyperspectral imaging device based on bispectral stack interference
TWI818606B (en) * 2022-06-29 2023-10-11 中國鋼鐵股份有限公司 System and method for monitoring temperature of carbon brick of furnace
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