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CN105206729A - GaN-LED chip for improving light extraction efficiency - Google Patents

GaN-LED chip for improving light extraction efficiency Download PDF

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Publication number
CN105206729A
CN105206729A CN201510717801.4A CN201510717801A CN105206729A CN 105206729 A CN105206729 A CN 105206729A CN 201510717801 A CN201510717801 A CN 201510717801A CN 105206729 A CN105206729 A CN 105206729A
Authority
CN
China
Prior art keywords
led chip
chip
gan
epitaxial wafer
extraction efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510717801.4A
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Chinese (zh)
Inventor
陈亮
李俊贤
魏振东
刘英策
李小平
黄新茂
陈凯轩
张永
林志伟
姜伟
卓祥景
方天足
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen Changelight Co Ltd
Original Assignee
Xiamen Changelight Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen Changelight Co Ltd filed Critical Xiamen Changelight Co Ltd
Priority to CN201510717801.4A priority Critical patent/CN105206729A/en
Publication of CN105206729A publication Critical patent/CN105206729A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/814Bodies having reflecting means, e.g. semiconductor Bragg reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/819Bodies characterised by their shape, e.g. curved or truncated substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN

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  • Led Devices (AREA)

Abstract

一种提升取光效率的GaN-LED芯片,涉及LED芯片的生产技术领域,包括设置在外延片上的芯片区域和切割道区域,其特征在于在所述切割道区域设置点阵排列的若干锥形台,各锥形台的底部连接在外延片的N-GaN层上,各锥形台具有能够将外延片的多量子阱层发出的侧向光反射至芯片正面的侧面。本发明通过在LED芯片切割道设计的锥形台,增加LED芯片侧出光的反射渠道,以此来增加LED芯片取光效率,使正向光的出光量增加,从而提升LED芯片亮度。本发明芯片区域的设计适用于现有的正装、倒装或垂直结构等。

A GaN-LED chip that improves light extraction efficiency, relates to the field of LED chip production technology, including a chip area and a dicing line area arranged on an epitaxial wafer, and is characterized in that several tapered cones arranged in a dot matrix are arranged in the dicing line area. The bottom of each conical mesa is connected to the N-GaN layer of the epitaxial wafer, and each conical mesa has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer of the epitaxial wafer to the front of the chip. The present invention increases the reflection channel of the side light output of the LED chip through the tapered platform designed on the LED chip cutting line, thereby increasing the light extraction efficiency of the LED chip, increasing the light output of the forward light, thereby improving the brightness of the LED chip. The design of the chip area of the present invention is applicable to the existing front-mount, flip-chip or vertical structures and the like.

Description

一种提升取光效率的GaN-LED芯片A GaN-LED chip that improves light extraction efficiency

技术领域 technical field

本发明涉及LED芯片的生产技术领域。 The invention relates to the technical field of LED chip production.

背景技术 Background technique

为了提升LED的取光效率,从业人员提出在芯片切割道上设置点阵排列的若干锥形台的方式以增加测出光的反射。 In order to improve the light extraction efficiency of LEDs, practitioners propose a method of setting a number of tapered trusses arranged in a dot matrix on the chip dicing line to increase the reflection of the measured light.

现有切割道的方法是:GaN-LED外延片通过ICP刻蚀划分GaN-LED芯片,并在相邻的芯片之间形成切割道。由于现有生产切割道是直接将GaN-LED外延片上的部分P-GaN层、多量子阱层和N-GaN层进行平面化切割,即切割道为平面结构,并整体低于LED的有效发光层,如图1所示,因此从LED有效发光层发出的侧向光则没有被有效利用从正向反射出,造成取光效率不能有效提高。 The existing dicing method is as follows: GaN-LED epitaxial wafers are divided into GaN-LED chips by ICP etching, and dicing lines are formed between adjacent chips. Since the existing production dicing line is to directly planarize part of the P-GaN layer, the multi-quantum well layer and the N-GaN layer on the GaN-LED epitaxial wafer, that is, the dicing line is a planar structure, and the overall effective light emission of the LED is lower than that of the LED. layer, as shown in Figure 1, so the side light emitted from the effective light-emitting layer of the LED is not effectively utilized and reflected from the front, resulting in that the light extraction efficiency cannot be effectively improved.

发明内容 Contents of the invention

本发明目的是提出一种能克服以上现有技术方法缺陷的提升取光效率的GaN-LED芯片。 The purpose of the present invention is to propose a GaN-LED chip that can overcome the above defects of the prior art method and improve the light extraction efficiency.

本发明包括设置在外延片上的芯片区域和切割道区域,其特征在于在所述切割道区域设置点阵排列的若干锥形台,各锥形台的底部连接在外延片的N-GaN层上,各锥形台具有能够将外延片的多量子阱层发出的侧向光反射至芯片正面的侧面。 The present invention includes a chip area and a dicing lane area arranged on an epitaxial wafer, and is characterized in that a plurality of conical frustums arranged in a dot matrix are arranged in the dicing lane area, and the bottom of each conical frustum is connected to the N-GaN layer of the epitaxial wafer , each tapered mesa has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer of the epitaxial wafer to the front surface of the chip.

本发明通过在LED芯片切割道设计的锥形台,增加LED芯片侧出光的反射渠道,以此来增加LED芯片取光效率,使正向光的出光量增加,从而提升LED芯片亮度。 The present invention increases the reflection channel of the side light output of the LED chip through the tapered platform designed on the LED chip cutting line, thereby increasing the light extraction efficiency of the LED chip, increasing the light output of the forward light, thereby improving the brightness of the LED chip.

本发明芯片区域的设计适用于现有的正装、倒装或垂直结构等。 The design of the chip area of the present invention is applicable to the existing front-mount, flip-chip or vertical structures and the like.

进一步地,本发明各锥形台由P-GaN层、多量子阱层和N-GaN层组成。 Further, each tapered frustum of the present invention is composed of a P-GaN layer, a multi-quantum well layer and an N-GaN layer.

附图说明 Description of drawings

图1为现有技术中具有切割道的GaN-LED芯片的断面结构示意图。 FIG. 1 is a schematic cross-sectional structure diagram of a GaN-LED chip with dicing lines in the prior art.

图2为本发明GaN-LED芯片的正面结构示意图。 FIG. 2 is a schematic diagram of the front structure of the GaN-LED chip of the present invention.

图3为图2中部分断面结构示意图。 FIG. 3 is a schematic diagram of a partial cross-sectional structure in FIG. 2 .

具体实施方式 Detailed ways

如图2、3所示,本发明是在处延片上制作若干芯片区域A和若干切割道区域B。处延片设有衬底1,在衬底1上依次生长U-GaN层2、N-GaN层3、多量子阱层4和P-GaN层5。 As shown in Figures 2 and 3, the present invention manufactures several chip areas A and several scribe line areas B on the wafer. A substrate 1 is provided on the epitaxial wafer, and a U-GaN layer 2 , an N-GaN layer 3 , a multi-quantum well layer 4 and a P-GaN layer 5 are grown sequentially on the substrate 1 .

在切割道区域B内设置点阵排列的若干锥形台C,各锥形台C的底部连接在处延片的N-GaN层3上,各锥形台C由P-GaN层、多量子阱层和N-GaN层组成。 A number of conical frustums C arranged in a dot matrix are set in the scribe area B. The bottom of each conical frustum C is connected to the N-GaN layer 3 of the extension sheet. Each conical frustum C is composed of a P-GaN layer, a multi-quantum well layer and N-GaN layer.

各锥形台C具有能够将多量子阱层4发出的侧向光反射至芯片正面的侧面。 Each conical mesa C has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer 4 to the front surface of the chip.

芯片制作工艺流程与现有的传统芯片制作工艺一致。唯一不同的是在切割道上放置图形,此项技术并不增加工艺复杂程度。 The chip manufacturing process is consistent with the existing traditional chip manufacturing process. The only difference is that graphics are placed on the dicing lanes, and this technology does not increase the complexity of the process.

Claims (2)

1.一种提升取光效率的GaN-LED芯片,包括设置在外延片上的芯片区域和切割道区域,其特征在于在所述切割道区域设置点阵排列的若干锥形台,各锥形台的底部连接在外延片的N-GaN层上,各锥形台具有能够将外延片的多量子阱层发出的侧向光反射至芯片正面的侧面。 1. A GaN-LED chip for improving light extraction efficiency, comprising a chip area and a dicing road area arranged on an epitaxial wafer, characterized in that a number of tapered trusses arranged in a dot matrix are set in the dicing road area, each tapered pedestal The bottom of each is connected to the N-GaN layer of the epitaxial wafer, and each tapered platform has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer of the epitaxial wafer to the front of the chip. 2.根据权利要求1所述制作方法,其特征在于各锥形台由P-GaN层、多量子阱层和N-GaN层组成。 2. The manufacturing method according to claim 1, wherein each truncated cone is composed of a P-GaN layer, a multi-quantum well layer and an N-GaN layer.
CN201510717801.4A 2015-10-30 2015-10-30 GaN-LED chip for improving light extraction efficiency Pending CN105206729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510717801.4A CN105206729A (en) 2015-10-30 2015-10-30 GaN-LED chip for improving light extraction efficiency

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510717801.4A CN105206729A (en) 2015-10-30 2015-10-30 GaN-LED chip for improving light extraction efficiency

Publications (1)

Publication Number Publication Date
CN105206729A true CN105206729A (en) 2015-12-30

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Country Status (1)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010026567A1 (en) * 1999-12-28 2001-10-04 Tsuyoshi Kaneko Surface emitting semiconductor laser and surface emitting semiconductor laser array
US20010028062A1 (en) * 2000-03-31 2001-10-11 Toshiya Uemura Light-emitting device using a group III nitride compound semiconductor and a method of manufacture
CN1938869A (en) * 2004-03-31 2007-03-28 日亚化学工业株式会社 Nitride semiconductor light emitting element
US20070228393A1 (en) * 2006-03-31 2007-10-04 Nichia Corporation Light emitting device and fabrication method thereof
CN101840968A (en) * 2009-03-16 2010-09-22 先进开发光电股份有限公司 A semiconductor optoelectronic element capable of improving light extraction rate and its manufacturing method
CN102339922A (en) * 2010-07-28 2012-02-01 展晶科技(深圳)有限公司 Light-emitting diode and its manufacturing method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010026567A1 (en) * 1999-12-28 2001-10-04 Tsuyoshi Kaneko Surface emitting semiconductor laser and surface emitting semiconductor laser array
US20010028062A1 (en) * 2000-03-31 2001-10-11 Toshiya Uemura Light-emitting device using a group III nitride compound semiconductor and a method of manufacture
CN1938869A (en) * 2004-03-31 2007-03-28 日亚化学工业株式会社 Nitride semiconductor light emitting element
US20070228393A1 (en) * 2006-03-31 2007-10-04 Nichia Corporation Light emitting device and fabrication method thereof
CN101840968A (en) * 2009-03-16 2010-09-22 先进开发光电股份有限公司 A semiconductor optoelectronic element capable of improving light extraction rate and its manufacturing method
CN102339922A (en) * 2010-07-28 2012-02-01 展晶科技(深圳)有限公司 Light-emitting diode and its manufacturing method

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Application publication date: 20151230

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