CN105206729A - GaN-LED chip for improving light extraction efficiency - Google Patents
GaN-LED chip for improving light extraction efficiency Download PDFInfo
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- CN105206729A CN105206729A CN201510717801.4A CN201510717801A CN105206729A CN 105206729 A CN105206729 A CN 105206729A CN 201510717801 A CN201510717801 A CN 201510717801A CN 105206729 A CN105206729 A CN 105206729A
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- extraction efficiency
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- 238000000605 extraction Methods 0.000 title claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 239000011159 matrix material Substances 0.000 claims abstract description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/814—Bodies having reflecting means, e.g. semiconductor Bragg reflectors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
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- Led Devices (AREA)
Abstract
一种提升取光效率的GaN-LED芯片,涉及LED芯片的生产技术领域,包括设置在外延片上的芯片区域和切割道区域,其特征在于在所述切割道区域设置点阵排列的若干锥形台,各锥形台的底部连接在外延片的N-GaN层上,各锥形台具有能够将外延片的多量子阱层发出的侧向光反射至芯片正面的侧面。本发明通过在LED芯片切割道设计的锥形台,增加LED芯片侧出光的反射渠道,以此来增加LED芯片取光效率,使正向光的出光量增加,从而提升LED芯片亮度。本发明芯片区域的设计适用于现有的正装、倒装或垂直结构等。
A GaN-LED chip that improves light extraction efficiency, relates to the field of LED chip production technology, including a chip area and a dicing line area arranged on an epitaxial wafer, and is characterized in that several tapered cones arranged in a dot matrix are arranged in the dicing line area. The bottom of each conical mesa is connected to the N-GaN layer of the epitaxial wafer, and each conical mesa has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer of the epitaxial wafer to the front of the chip. The present invention increases the reflection channel of the side light output of the LED chip through the tapered platform designed on the LED chip cutting line, thereby increasing the light extraction efficiency of the LED chip, increasing the light output of the forward light, thereby improving the brightness of the LED chip. The design of the chip area of the present invention is applicable to the existing front-mount, flip-chip or vertical structures and the like.
Description
技术领域 technical field
本发明涉及LED芯片的生产技术领域。 The invention relates to the technical field of LED chip production.
背景技术 Background technique
为了提升LED的取光效率,从业人员提出在芯片切割道上设置点阵排列的若干锥形台的方式以增加测出光的反射。 In order to improve the light extraction efficiency of LEDs, practitioners propose a method of setting a number of tapered trusses arranged in a dot matrix on the chip dicing line to increase the reflection of the measured light.
现有切割道的方法是:GaN-LED外延片通过ICP刻蚀划分GaN-LED芯片,并在相邻的芯片之间形成切割道。由于现有生产切割道是直接将GaN-LED外延片上的部分P-GaN层、多量子阱层和N-GaN层进行平面化切割,即切割道为平面结构,并整体低于LED的有效发光层,如图1所示,因此从LED有效发光层发出的侧向光则没有被有效利用从正向反射出,造成取光效率不能有效提高。 The existing dicing method is as follows: GaN-LED epitaxial wafers are divided into GaN-LED chips by ICP etching, and dicing lines are formed between adjacent chips. Since the existing production dicing line is to directly planarize part of the P-GaN layer, the multi-quantum well layer and the N-GaN layer on the GaN-LED epitaxial wafer, that is, the dicing line is a planar structure, and the overall effective light emission of the LED is lower than that of the LED. layer, as shown in Figure 1, so the side light emitted from the effective light-emitting layer of the LED is not effectively utilized and reflected from the front, resulting in that the light extraction efficiency cannot be effectively improved.
发明内容 Contents of the invention
本发明目的是提出一种能克服以上现有技术方法缺陷的提升取光效率的GaN-LED芯片。 The purpose of the present invention is to propose a GaN-LED chip that can overcome the above defects of the prior art method and improve the light extraction efficiency.
本发明包括设置在外延片上的芯片区域和切割道区域,其特征在于在所述切割道区域设置点阵排列的若干锥形台,各锥形台的底部连接在外延片的N-GaN层上,各锥形台具有能够将外延片的多量子阱层发出的侧向光反射至芯片正面的侧面。 The present invention includes a chip area and a dicing lane area arranged on an epitaxial wafer, and is characterized in that a plurality of conical frustums arranged in a dot matrix are arranged in the dicing lane area, and the bottom of each conical frustum is connected to the N-GaN layer of the epitaxial wafer , each tapered mesa has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer of the epitaxial wafer to the front surface of the chip.
本发明通过在LED芯片切割道设计的锥形台,增加LED芯片侧出光的反射渠道,以此来增加LED芯片取光效率,使正向光的出光量增加,从而提升LED芯片亮度。 The present invention increases the reflection channel of the side light output of the LED chip through the tapered platform designed on the LED chip cutting line, thereby increasing the light extraction efficiency of the LED chip, increasing the light output of the forward light, thereby improving the brightness of the LED chip.
本发明芯片区域的设计适用于现有的正装、倒装或垂直结构等。 The design of the chip area of the present invention is applicable to the existing front-mount, flip-chip or vertical structures and the like.
进一步地,本发明各锥形台由P-GaN层、多量子阱层和N-GaN层组成。 Further, each tapered frustum of the present invention is composed of a P-GaN layer, a multi-quantum well layer and an N-GaN layer.
附图说明 Description of drawings
图1为现有技术中具有切割道的GaN-LED芯片的断面结构示意图。 FIG. 1 is a schematic cross-sectional structure diagram of a GaN-LED chip with dicing lines in the prior art.
图2为本发明GaN-LED芯片的正面结构示意图。 FIG. 2 is a schematic diagram of the front structure of the GaN-LED chip of the present invention.
图3为图2中部分断面结构示意图。 FIG. 3 is a schematic diagram of a partial cross-sectional structure in FIG. 2 .
具体实施方式 Detailed ways
如图2、3所示,本发明是在处延片上制作若干芯片区域A和若干切割道区域B。处延片设有衬底1,在衬底1上依次生长U-GaN层2、N-GaN层3、多量子阱层4和P-GaN层5。 As shown in Figures 2 and 3, the present invention manufactures several chip areas A and several scribe line areas B on the wafer. A substrate 1 is provided on the epitaxial wafer, and a U-GaN layer 2 , an N-GaN layer 3 , a multi-quantum well layer 4 and a P-GaN layer 5 are grown sequentially on the substrate 1 .
在切割道区域B内设置点阵排列的若干锥形台C,各锥形台C的底部连接在处延片的N-GaN层3上,各锥形台C由P-GaN层、多量子阱层和N-GaN层组成。 A number of conical frustums C arranged in a dot matrix are set in the scribe area B. The bottom of each conical frustum C is connected to the N-GaN layer 3 of the extension sheet. Each conical frustum C is composed of a P-GaN layer, a multi-quantum well layer and N-GaN layer.
各锥形台C具有能够将多量子阱层4发出的侧向光反射至芯片正面的侧面。 Each conical mesa C has a side surface capable of reflecting the lateral light emitted by the multi-quantum well layer 4 to the front surface of the chip.
芯片制作工艺流程与现有的传统芯片制作工艺一致。唯一不同的是在切割道上放置图形,此项技术并不增加工艺复杂程度。 The chip manufacturing process is consistent with the existing traditional chip manufacturing process. The only difference is that graphics are placed on the dicing lanes, and this technology does not increase the complexity of the process.
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Citations (6)
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---|---|---|---|---|
US20010026567A1 (en) * | 1999-12-28 | 2001-10-04 | Tsuyoshi Kaneko | Surface emitting semiconductor laser and surface emitting semiconductor laser array |
US20010028062A1 (en) * | 2000-03-31 | 2001-10-11 | Toshiya Uemura | Light-emitting device using a group III nitride compound semiconductor and a method of manufacture |
CN1938869A (en) * | 2004-03-31 | 2007-03-28 | 日亚化学工业株式会社 | Nitride semiconductor light emitting element |
US20070228393A1 (en) * | 2006-03-31 | 2007-10-04 | Nichia Corporation | Light emitting device and fabrication method thereof |
CN101840968A (en) * | 2009-03-16 | 2010-09-22 | 先进开发光电股份有限公司 | A semiconductor optoelectronic element capable of improving light extraction rate and its manufacturing method |
CN102339922A (en) * | 2010-07-28 | 2012-02-01 | 展晶科技(深圳)有限公司 | Light-emitting diode and its manufacturing method |
-
2015
- 2015-10-30 CN CN201510717801.4A patent/CN105206729A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010026567A1 (en) * | 1999-12-28 | 2001-10-04 | Tsuyoshi Kaneko | Surface emitting semiconductor laser and surface emitting semiconductor laser array |
US20010028062A1 (en) * | 2000-03-31 | 2001-10-11 | Toshiya Uemura | Light-emitting device using a group III nitride compound semiconductor and a method of manufacture |
CN1938869A (en) * | 2004-03-31 | 2007-03-28 | 日亚化学工业株式会社 | Nitride semiconductor light emitting element |
US20070228393A1 (en) * | 2006-03-31 | 2007-10-04 | Nichia Corporation | Light emitting device and fabrication method thereof |
CN101840968A (en) * | 2009-03-16 | 2010-09-22 | 先进开发光电股份有限公司 | A semiconductor optoelectronic element capable of improving light extraction rate and its manufacturing method |
CN102339922A (en) * | 2010-07-28 | 2012-02-01 | 展晶科技(深圳)有限公司 | Light-emitting diode and its manufacturing method |
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