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CN105115939A - Tapered multimode interference-based high-sensitivity optical fiber methane sensing device - Google Patents

Tapered multimode interference-based high-sensitivity optical fiber methane sensing device Download PDF

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CN105115939A
CN105115939A CN201510451438.6A CN201510451438A CN105115939A CN 105115939 A CN105115939 A CN 105115939A CN 201510451438 A CN201510451438 A CN 201510451438A CN 105115939 A CN105115939 A CN 105115939A
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methane
optical fiber
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CN105115939B (en
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杨建春
王开武
周浪
车鑫
陈伟民
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Chongqing Kezhiyuan Technology Co ltd
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Abstract

一种基于锥形多模干涉的高灵敏度光纤甲烷传感装置,包括宽带光源、STMS结构的锥形多模涂覆多孔敏感薄膜的光纤传感器、测试气室、开关阀门、质量流量控制器、光谱分析仪和计算机。其中,STMS结构光纤传感器为单模光纤-多模光纤-单模光纤熔接后对多模光纤拉锥而成,锥形多模光纤外表面采用硅烷偶联剂预处理;敏感薄膜为含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷多孔甲烷敏感薄膜;当待测甲烷气体与多孔甲烷敏感薄膜作用时,敏感薄膜折射率快速改变,使传感器干涉谱特征波长λc移动,分析传感器与甲烷气体接触前后干涉谱特征波长移动量Δλc,即可获取待测甲烷气体浓度。本发明具有灵敏度高、响应速度快、选择性和稳定性好等特点。

A high-sensitivity optical fiber methane sensing device based on conical multimode interference, including a broadband light source, a conical multimode optical fiber sensor coated with a porous sensitive film of STMS structure, a test gas chamber, a switch valve, a mass flow controller, and a spectrometer analyzer and computer. Among them, the STMS structure optical fiber sensor is made of single-mode fiber-multi-mode fiber-single-mode fiber fusion and tapered multi-mode fiber. The outer surface of the tapered multi-mode fiber is pretreated with silane coupling agent; the sensitive film is a cage-shaped The α-hydrogen-ω-hydroxyl-polydimethylsiloxane porous methane sensitive film of molecule A; when the methane gas to be measured interacts with the porous methane sensitive film, the refractive index of the sensitive film changes rapidly, making the characteristic wavelength of the sensor interference spectrum λ c moves, analyzing the movement amount Δλ c of the characteristic wavelength of the interference spectrum before and after the sensor contacts with the methane gas, the concentration of the methane gas to be measured can be obtained. The invention has the characteristics of high sensitivity, fast response speed, good selectivity and stability, and the like.

Description

一种基于锥形多模干涉的高灵敏度光纤甲烷传感装置A high-sensitivity optical fiber methane sensing device based on cone-shaped multimode interference

技术领域technical field

本发明属于光纤传感技术领域,具体涉及一种获取甲烷浓度的锥形多模干涉的高灵敏度光纤甲烷传感方法及装置。The invention belongs to the technical field of optical fiber sensing, and in particular relates to a high-sensitivity optical fiber methane sensing method and device for obtaining methane concentration through conical multi-mode interference.

背景技术Background technique

随着光纤传感技术的快速发展,光纤气体传感器研究受到广泛关注,因其具有电绝缘性好、抗强电磁干扰、防爆、可远距离长期在线测量等特点而适宜恶劣环境中易燃易爆气体监测。With the rapid development of optical fiber sensing technology, the research of optical fiber gas sensor has received widespread attention. It is suitable for inflammable and explosive environments in harsh environments because of its good electrical insulation, anti-strong electromagnetic interference, explosion-proof, and long-distance long-term online measurement. Gas monitoring.

单模光纤(SMF)-锥形多模光纤(TMMF)-单模光纤(SMF)结构(STMS)是一种基于锥形多模光纤模式干涉机制的光纤结构,其是由一段多模光纤嵌入到一段标准单模光纤后将多模光纤拉锥而成。这种基于锥形光纤多模干涉的光纤传感器具有结构简单、成本低廉、灵敏度较高等优点,能通过波长调制而克服光波强度波动的影响,能够用于湿度、氢气、氨气、氧气等信息检测。目前,研究人员已先后研制了不同STMS结构的光纤传感器。王雪萍等[中国计量学院硕士学位论文,2014.3.1]提出一种涂覆聚乙烯醇(PVA)膜的拉锥光纤湿度传感器,其湿度敏感膜由多模光纤锥形区域在5%PVA水溶液中涂覆而成,湿度敏感膜的折射率会随外界环境湿度变化而改变,根据光功率变化获取湿度信息,在湿度35~90%RH范围内传感器最大灵敏度为0.251dB/%RH。JoelVillatoro等(SensorsandActuatorsB,2005,110:23~27;IEEESensorsJournal,2003,3(4):533~537)将钯涂覆到拉锥多模光纤表面形成高灵敏度氢气传感器,检测限0.3%,响应时间90秒。DavidMonzónHernández等(SensorsandActuatorsB,2010,151:219~222)则将光纤拉锥至5-10μm并以0.1埃/秒镀覆钯、金膜以形成可快速检测氢气的光纤传感器,其响应时间2秒。FuxingGu等(AdvancedOpticalMaterials,2014,2:189~196)也将单晶钯纳米线涂覆于锥形光纤传感器的作用区域,钯纳米线对氢气的检出限低至0.2%。D.RitheshRaj等(OpticsCommunications,2015,340:86~92)将纳米银颗粒、聚乙烯吡咯烷酮和聚醋酸乙烯酯涂覆于拉锥塑料光纤表面,评价不同纳米银质量分数(1.6,3.3和6.6%)的体系对氨气选择性。S.A.Ibrahim等(OpticsExpress,2015,23(3):2837-2845)则涂覆聚苯胺纳米纤维到锥形多模光纤传感区域以形成氨气传感器,响应和恢复时间分别为2.27、9.73min,重现性和可逆性好。RenataJarzebinska等(AnalyticalLetters,2012,45(10):1297~1309)提出静电自组装四-(4-磺苯基)卟啉(TSPP)和聚烯丙基胺盐酸盐(PAH)交替层到锥形光纤表面形成氨气传感器,其束腰直径10μm,响应时间100秒,恢复时间240秒。C.Pulido等(SensorsandActuatorsB,2013,184:64~69)提出将荧光团嵌入拉锥聚合物光纤形成光纤氧气传感器,利用氧气导致的荧光猝灭信号来测量氧气含量,响应时间28秒。RongshengChen等(PhysiologicalMeasurement,2013,34:N71~N81)也建立一个可检测人体呼吸的光纤传感体系,其原理是将混有聚合物的荧光团涂覆于拉锥光纤表面,氧气具有荧光猝灭特性,传感器响应时间150秒,可监测到每分钟60次的呼吸频率。陈达如等(ZL201110311888.7)公开了基于锥形光纤的布拉格光栅液压传感方法,传感系统包括宽带光源、光耦合器、光谱分析仪和锥形光纤的布拉格光栅,当锥形光纤的布拉格光栅置于待测液压环境中,通过测量锥形光纤布拉格光栅中心波长移动量获取施加在布拉格光栅上的液压。Single-mode fiber (SMF)-tapered multimode fiber (TMMF)-single-mode fiber (SMF) structure (STMS) is a fiber structure based on the mode interference mechanism of tapered multimode fiber, which is embedded by a section of multimode fiber It is made by tapering multimode fiber after reaching a section of standard single-mode fiber. This optical fiber sensor based on tapered optical fiber multimode interference has the advantages of simple structure, low cost, and high sensitivity. It can overcome the influence of light wave intensity fluctuations through wavelength modulation, and can be used for information detection such as humidity, hydrogen, ammonia, and oxygen. . At present, researchers have successively developed fiber optic sensors with different STMS structures. Wang Xueping et al [Master's degree thesis of China Jiji Institute, 2014.3.1] proposed a tapered optical fiber humidity sensor coated with polyvinyl alcohol (PVA) film, the humidity sensitive film is composed of multimode optical fiber tapered area in 5% PVA aqueous solution Coated, the refractive index of the humidity sensitive film will change with the humidity of the external environment, and the humidity information can be obtained according to the change of the optical power. The maximum sensitivity of the sensor is 0.251dB/%RH in the range of humidity 35-90%RH. Joel Villatoro et al. (Sensors and Actuators B, 2005, 110: 23-27; IEEE Sensors Journal, 2003, 3(4): 533-537) coated palladium on the surface of a tapered multimode fiber to form a highly sensitive hydrogen sensor with a detection limit of 0.3% and a response time of 90 seconds. David Monzón Hernández et al. (Sensors and Actuators B, 2010, 151: 219-222) tapered the optical fiber to 5-10 μm and plated palladium and gold films at 0.1 Å/s to form an optical fiber sensor that can quickly detect hydrogen, with a response time of 2 seconds. FuxingGu et al. (Advanced Optical Materials, 2014, 2:189-196) also coated single crystal palladium nanowires on the active area of the tapered optical fiber sensor, and the detection limit of palladium nanowires for hydrogen was as low as 0.2%. D.RitheshRaj et al. (OpticsCommunications, 2015, 340:86~92) coated nano-silver particles, polyvinylpyrrolidone and polyvinyl acetate on the surface of a tapered plastic optical fiber, and evaluated different nano-silver mass fractions (1.6, 3.3 and 6.6%) ) system is selective to ammonia. S.A.Ibrahim et al. (OpticsExpress, 2015, 23(3): 2837-2845) coated polyaniline nanofibers to the tapered multimode fiber sensing area to form an ammonia sensor, and the response and recovery times were 2.27 and 9.73 minutes, respectively. Good reproducibility and reversibility. RenataJarzebinska et al. (Analytical Letters, 2012, 45(10):1297~1309) proposed electrostatic self-assembly of alternating layers of tetra-(4-sulfophenyl)porphyrin (TSPP) and polyallylamine hydrochloride (PAH) into cones. The ammonia gas sensor is formed on the surface of the optical fiber with a beam waist diameter of 10 μm, a response time of 100 seconds, and a recovery time of 240 seconds. C. Pulido et al. (Sensors and Actuators B, 2013, 184:64-69) proposed to embed fluorophores into a tapered polymer fiber to form a fiber optic oxygen sensor, and use the fluorescence quenching signal caused by oxygen to measure the oxygen content, with a response time of 28 seconds. Rongsheng Chen et al. (PhysiologicalMeasurement, 2013, 34:N71~N81) also established an optical fiber sensing system that can detect human breathing. The principle is to coat the surface of the tapered optical fiber with a fluorophore mixed with a polymer, and oxygen has fluorescence quenching. Features, the sensor response time is 150 seconds, and the respiratory rate can be monitored up to 60 times per minute. Chen Daru et al. (ZL201110311888.7) disclosed a Bragg grating hydraulic sensing method based on a tapered fiber. The sensing system includes a broadband light source, an optical coupler, a spectrum analyzer and a Bragg grating of a tapered fiber. Placed in the hydraulic environment to be tested, the hydraulic pressure applied to the Bragg grating is obtained by measuring the shift of the center wavelength of the tapered fiber Bragg grating.

甲烷是矿井瓦斯主要成分(约占83~89%),是矿井安全监测的重点。笼形分子化合物(Cryptophanes)是迄今发现的唯一对甲烷具有直接光敏感响应的新型功能分子,能够与光纤传感技术结合形成高选择性的光纤甲烷敏感薄膜传感器,如倏逝波型、荧光透射型、模式滤光型、长周期光纤光栅型、光子晶体光纤型等甲烷传感器(SensorsandActuatorsB,2005,107(1):32~39;AnalyticaChimicaActa,2009,633(2):238~243;ChineseOpticsLetters,2010,8(5):482~484;OpticsExpress,2011,19(15):14696~14706)。分析表明,目前的研究工作主要是将笼形分子A或E掺入到聚硅氧烷或苯乙烯-丙烯腈材料中,并涂覆到塑料包层石英纤芯、纤芯失配型光纤或长周期光纤光栅上形成光纤甲烷传感器。但是,这些方法的敏感薄膜来源于笼形分子掺入聚硅氧烷、苯乙烯-丙烯腈树脂后涂覆而成,大部分笼形分子被包裹于薄膜材料内,易出现甲烷分子在这些薄膜材料中迁移阻力大和与笼形分子接触困难等问题,使传感器的响应速度较慢(2~5分钟)、灵敏度较低。Methane is the main component of mine gas (accounting for about 83-89%), and it is the focus of mine safety monitoring. Cage molecular compounds (Cryptophanes) are the only new functional molecules discovered so far that have a direct photosensitive response to methane, and can be combined with optical fiber sensing technology to form a highly selective optical fiber methane sensitive thin film sensor, such as evanescent wave mode, fluorescence transmission, etc. Type, mode filter type, long period fiber grating type, photonic crystal fiber type and other methane sensors (Sensors and Actuators B, 2005, 107 (1): 32 ~ 39; Analytica Chimica Acta, 2009, 633 (2): 238 ~ 243; Chinese Optics Letters, 2010 , 8(5):482~484; OpticsExpress, 2011, 19(15):14696~14706). The analysis shows that the current research work is mainly to incorporate the cage molecule A or E into polysiloxane or styrene-acrylonitrile materials, and to coat them on plastic-clad silica cores, core-mismatched optical fibers or A fiber optic methane sensor formed on a long period fiber grating. However, the sensitive films of these methods are derived from the coating of cage molecules mixed with polysiloxane and styrene-acrylonitrile resins. Most of the cage molecules are wrapped in the film materials, and methane molecules are prone to appear in these films. The problems of high migration resistance and difficulty in contact with cage molecules in the material make the response speed of the sensor slow (2 to 5 minutes) and low sensitivity.

可见,以上的技术都存在共同的问题,即笼形分子都不是直接裸露于甲烷气体中,由此影响笼形分子响应甲烷分子的能力,使得传感器灵敏度较低,有必要改变敏感薄膜结构。It can be seen that the above technologies all have a common problem, that is, the cage molecules are not directly exposed to methane gas, which affects the ability of the cage molecules to respond to methane molecules, making the sensor sensitivity low, and it is necessary to change the structure of the sensitive film.

发明内容:Invention content:

为了解决以上现有技术存在的问题,本发明提出了一种灵敏度高、响应速度快的多模干涉型光纤甲烷传感方法及装置,其传感过程是以含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷多孔薄膜作为甲烷敏感材料,涂覆于SMF-TMMF-SMF结构的锥形多模光纤传感区域,即可实现对甲烷气体高响应速度、高灵敏度、高选择性检测。In order to solve the above existing problems in the prior art, the present invention proposes a multi-mode interference optical fiber methane sensing method and device with high sensitivity and fast response speed. -ω-Hydroxy-polydimethylsiloxane porous film is used as a methane-sensitive material, and it is coated on the tapered multimode optical fiber sensing area of the SMF-TMMF-SMF structure, which can achieve high response speed and high sensitivity to methane gas , Highly selective detection.

为实现上述发明目的,本发明所采取的技术方案如下:For realizing above-mentioned purpose of the invention, the technical scheme that the present invention takes is as follows:

一种基于锥形多模干涉的高灵敏度光纤甲烷传感装置,包括宽带光源、单模光纤、SMF-TMMF-SMF结构的TMMF涂覆多孔敏感薄膜的光纤甲烷传感器、测试气室、开关阀门、质量流量控制器、光谱分析仪和计算机等构成。所述多模光纤MMF两端分别与单模光纤SMF熔接并进一步对多模光纤进行拉锥后形成SMF-TMMF-SMF结构,与TMMF相连的两端单模光纤SMF分别连接到宽带光源、光谱分析仪和计算机;光纤传感器位于测试气室内,测试气室有通入待测甲烷气体的进气口和出气口,进气口通过开关阀门连接控制待测甲烷气体的质量流量控制器。所述SMF-TMMF-SMF结构光纤传感器的锥形多模光纤外表面先采用硅烷偶联剂水溶液预处理再涂覆甲烷敏感薄膜。A high-sensitivity optical fiber methane sensing device based on conical multimode interference, including a broadband light source, a single-mode optical fiber, an optical fiber methane sensor with a TMMF of SMF-TMMF-SMF structure coated with a porous sensitive film, a test gas chamber, a switch valve, It consists of mass flow controller, spectrum analyzer and computer. The two ends of the multimode optical fiber MMF are respectively fused with the single-mode optical fiber SMF, and the multimode optical fiber is further tapered to form an SMF-TMMF-SMF structure, and the two ends of the single-mode optical fiber SMF connected with the TMMF are connected to the broadband light source, spectrum The analyzer and computer; the optical fiber sensor is located in the test gas chamber, the test gas chamber has an inlet and an outlet for the methane gas to be measured, and the gas inlet is connected to a mass flow controller for controlling the methane gas to be measured through a switch valve. The outer surface of the tapered multimode optical fiber of the SMF-TMMF-SMF structure optical fiber sensor is pretreated with a silane coupling agent aqueous solution and then coated with a methane sensitive film.

所述甲烷敏感薄膜是含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷多孔甲烷敏感薄膜,是首先将光学级α-氢-ω-羟基-聚二甲基硅氧烷、笼形分子A、致孔剂碳酸氢铵置于二氯甲烷与甲醇混合溶剂中,以2000转/分转速搅拌0.5小时后进一步超声混合均匀,然后自动提拉涂覆于锥形多模光纤传感区域,在温度90℃和真空度0.08MPa条件下脱出薄膜内二氯甲烷与甲醇混合溶剂以及热分解致孔剂碳酸氢铵,使形成的甲烷敏感薄膜多孔化,孔隙率为12~15%;试剂用量分别为笼形分子A600μmol,光学级α-氢-ω-羟基-聚二甲基硅氧烷1g,致孔剂碳酸氢铵0.1g,体积比5:1的二氯甲烷与甲醇混合溶剂12mL。The methane-sensitive film is an alpha-hydrogen-omega-hydroxyl-polydimethylsiloxane porous methane-sensitive film containing a cage molecule A, which is the first optical grade alpha-hydrogen-omega-hydroxyl-polydimethylsiloxane The oxane, the cage molecule A, and the porogen ammonium bicarbonate were placed in a mixed solvent of dichloromethane and methanol, stirred at a speed of 2000 rpm for 0.5 hours, then further ultrasonically mixed, and then automatically pulled and coated on the conical multi- In the mode optical fiber sensing area, under the conditions of temperature 90°C and vacuum degree 0.08MPa, the mixed solvent of dichloromethane and methanol in the film and the thermal decomposition porogen ammonium bicarbonate are released to make the formed methane-sensitive film porous, with a porosity of 12 ~15%; the amount of reagents is 600 μmol of cage molecule A, 1 g of optical grade α-hydrogen-ω-hydroxy-polydimethylsiloxane, 0.1 g of porogen ammonium bicarbonate, and dichloromethane with a volume ratio of 5:1 12mL mixed solvent with methanol.

本发明将笼形分子与光学树脂混合形成的敏感薄膜多孔化,通过热分解敏感薄膜内的致孔剂实现致密膜向多孔膜转变,敏感薄膜具有较高孔隙率,膜内裸露出的笼形分子数量显著提高;同时,还将敏感薄膜涂覆到锥形多模光纤表面并多孔化,利用甲烷分子扩散进入多孔敏感薄膜后折射率快速变化引起传感器透射干涉谱特征波长移动,当待测甲烷气体与锥形多模光纤外表面的多孔甲烷敏感薄膜作用时,敏感薄膜折射率快速改变,使传感器干涉谱特征波长移动,即可实现对甲烷气体高灵敏度、高响应速度、高选择性检测等目的。In the present invention, the sensitive film formed by mixing cage molecules and optical resins is made porous, and the transformation from a dense film to a porous film is realized by thermally decomposing the porogen in the sensitive film. The sensitive film has a relatively high porosity, and the exposed cages in the film The number of molecules is significantly increased; at the same time, the sensitive film is coated on the surface of the tapered multimode fiber and made porous, and the rapid change of the refractive index after the diffusion of methane molecules into the porous sensitive film causes the characteristic wavelength shift of the sensor transmission interference spectrum. When the methane to be measured When the gas interacts with the porous methane-sensitive film on the outer surface of the tapered multimode optical fiber, the refractive index of the sensitive film changes rapidly, which moves the characteristic wavelength of the sensor's interference spectrum, and can achieve high sensitivity, high response speed, and high selectivity for methane gas detection, etc. Purpose.

所述多模光纤拉锥前直径125μm,拉锥后束腰直径D为25~35μm。The diameter of the multimode optical fiber before tapering is 125 μm, and the beam waist diameter D after tapering is 25˜35 μm.

所述锥形多模光纤(传感区域)长度为L,其中拉锥长度LT为0.55~0.85mm;涂覆甲烷敏感膜至锥形光纤表面并多孔化,孔隙率12~15%,甲烷敏感膜折射率变化可显著影响透射干涉谱特征波长移动量,提高传感器灵敏度。The length of the tapered multimode optical fiber (sensing region) is L, wherein the tapered length LT is 0.55-0.85mm; the methane-sensitive film is coated on the surface of the tapered optical fiber and made porous, with a porosity of 12-15%. The change of the refractive index of the sensitive film can significantly affect the shift of the characteristic wavelength of the transmission interference spectrum and improve the sensitivity of the sensor.

所述锥形多模光纤外表面采用KH-550硅烷偶联剂(γ―氨丙基三乙氧基硅烷)的水溶液进行预处理,体积浓度为0.1%,处理时间10秒,以形成硅烷偶联剂纳米涂覆层,厚度仅为纳米级,用于改善甲烷敏感膜与光纤外表面的附着力。The outer surface of the tapered multimode optical fiber is pretreated with an aqueous solution of KH-550 silane coupling agent (γ-aminopropyltriethoxysilane), the volume concentration is 0.1%, and the treatment time is 10 seconds to form a silane coupling agent. The nano-coating layer of the joint agent has a thickness of only nanometers, and is used to improve the adhesion between the methane-sensitive film and the outer surface of the optical fiber.

所述多孔聚合物敏感薄膜为含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷甲烷敏感薄膜,该敏感薄膜仅对甲烷气体有响应,对氧气、氮气、二氧化碳、一氧化碳、硫化氢等非甲烷类气体几乎无响应,选择性好。The porous polymer sensitive film is an α-hydrogen-omega-hydroxyl-polydimethylsiloxane sensitive film containing a cage molecule A, and the sensitive film only responds to methane gas, and responds to oxygen, nitrogen, carbon dioxide, There is almost no response to non-methane gases such as carbon monoxide and hydrogen sulfide, and the selectivity is good.

所述含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷甲烷敏感薄膜为低折射率敏感材料,折射率1.41左右,韧性好。The α-hydrogen-ω-hydroxyl-polydimethylsiloxane-methane sensitive film containing the clathrate molecule A is a low-refractive-index sensitive material with a refractive index of about 1.41 and good toughness.

所述宽带光源采用中心波长1550nm的DL-CS5014A超辐射宽带光源SLD,带宽40nm。The broadband light source adopts DL-CS5014A super-radiation broadband light source SLD with a center wavelength of 1550nm and a bandwidth of 40nm.

所述光谱分析仪为600~1700nm波长范围的Agilent86140B光谱分析仪。The spectrum analyzer is an Agilent 86140B spectrum analyzer with a wavelength range of 600-1700nm.

所述传感器透射干涉谱特征波长移动量Δλc为传感器接触甲烷气体后、接触前第m级干涉峰特征波长之差。The shift amount Δλ c of the characteristic wavelength of the transmission interference spectrum of the sensor is the difference between the characteristic wavelength of the m-th order interference peak after the sensor is exposed to methane gas and before the exposure.

该传感装置的工作原理如下:The working principle of the sensing device is as follows:

当基模LP01的入射光由单模光纤(SMF)经SMF/锥形多模光纤(TMMF)熔接界面进入长度为L的TMMF中时,将会在TMMF中激发多个高阶模式LP0m,这些模式将以不同传播常数沿TMMF传播到束腰,进一步到达TMMF与输出端SMF熔接界面,与基模发生干涉重新进入SMF。对于被激发的LP0m高阶模而言,电场分量表示为:When the incident light of the fundamental mode LP 01 enters the TMMF with a length of L through the SMF/tapered multimode fiber (TMMF) fusion interface from the single-mode fiber (SMF), multiple higher-order modes LP 0m will be excited in the TMMF , these modes will propagate along the TMMF to the beam waist with different propagation constants, and further reach the fusion interface between the TMMF and the output SMF, interfere with the fundamental mode and re-enter the SMF. For the excited LP 0m higher order mode, the electric field component is expressed as:

EE. (( rr ,, zz )) == ΣΣ mm == 11 Mm cc mm EE. mm (( rr )) expexp (( iβiβ mm zz )) -- -- -- (( 11 ))

其中Em(r)和βm为电场分布和纵向m阶模式的传播常数,cm为SMF的LP01模激发到TMMF的LP0m模效率,可表示为:where E m (r) and β m are the electric field distribution and the propagation constant of the longitudinal m-order mode, and c m is the excitation efficiency of the LP 01 mode of the SMF to the LP 0m mode of the TMMF, which can be expressed as:

cc mm == ∫∫ 00 ∞∞ EE. sthe s (( rr )) EE. mm (( rr )) rr dd rr ∫∫ 00 ∞∞ || EE. sthe s (( rr )) || 22 rr dd rr ∫∫ 00 ∞∞ || EE. mm (( rr )) || 22 rr dd rr -- -- -- (( 22 ))

其中,Es(r)为SMF的LP01模场分布。Among them, E s (r) is the LP 01 mode field distribution of SMF.

TMMF中的LP0m高阶模的功率高低与耦合系数ηm密切相关,ηm表示式为ηm越大表明LP0m模具有更高的功率。在弱导近似条件下,TMMF中的高阶模式的纵向传播常数差可表示为:The power of the LP 0m high-order mode in TMMF is closely related to the coupling coefficient η m , and the expression of η m is Larger ηm indicates higher power of LP 0m mode. Under the weak derivative approximation, the difference in longitudinal propagation constants of higher-order modes in TMMF can be expressed as:

ββ mm -- ββ nno == μμ mm 22 -- μμ nno 22 22 kaka 22 nno TT -- -- -- (( 33 ))

其中:μm=π(m-1/4)和μn=π(n-1/4)是零阶贝塞尔函数的根;nT是TMMF折射率,a是多模光纤束腰半径,k=2π/λ是入射光的波数,脚标m和n对应着光的不同模式,m阶模和n阶模。这两个模式的光传播到z处的相位差是Δφmn=(βmn)z。当传感区域长度为L时,光传播到出射端TMMF/SMF界面时的相位差为:Among them: μ m = π(m-1/4) and μ n = π(n-1/4) are the roots of the zero-order Bessel function; n T is the TMMF refractive index, and a is the waist radius of the multimode fiber bundle , k=2π/λ is the wavenumber of the incident light, and the subscripts m and n correspond to different modes of light, m-order mode and n-order mode. The phase difference between the two modes of light propagating to z is Δφ mn =(β m −β n )z. When the length of the sensing area is L, the phase difference when the light propagates to the TMMF/SMF interface at the exit end is:

ΔφΔφ mm nno == (( ββ mm -- ββ nno )) LL == λλ (( μμ mm 22 -- μμ nno 22 )) 44 πaπa 22 nno TT ·· LL == NN ππ -- -- -- (( 44 ))

由式(4)可知,到达SMF的光传播距离为L,这些不同模式的光因相位不同而发生干涉,出现干涉增强和干涉减弱,干涉谱中有特征峰(波峰、波谷),相应的特征波长满足It can be known from formula (4) that the light propagation distance reaching the SMF is L, and the light of these different modes interferes due to the different phases, and the interference enhancement and interference weakening appear. There are characteristic peaks (peaks, troughs) in the interference spectrum, and the corresponding characteristic The wavelength satisfies

λλ cc == 88 nno cc oo aa 22 NN (( mm -- nno )) [[ 22 (( mm ++ nno )) -- 11 ]] LL (( mm >> nno )) -- -- -- (( 55 ))

式中:L为TMMF长度;N为正整数。In the formula: L is the length of TMMF; N is a positive integer.

当涂覆于TMMF外表面的多孔敏感膜与甲烷气体接触时,其折射率将发生快速改变,使TMMF中光的传播常数和模场分布变化,导致干涉谱特征波长λc发生移动。根据特征波长移动量Δλc大小,即可计算待测甲烷气体浓度。When the porous sensitive film coated on the outer surface of TMMF is in contact with methane gas, its refractive index will change rapidly, which will change the propagation constant and mode field distribution of light in TMMF, resulting in the shift of the characteristic wavelength λ c of the interference spectrum. According to the magnitude of the characteristic wavelength shift Δλ c , the concentration of the methane gas to be measured can be calculated.

本发明具有灵敏度高、响应速度快、选择性和稳定性好等特点,具体优点如下:The present invention has the characteristics of high sensitivity, fast response speed, good selectivity and stability, and the specific advantages are as follows:

1.本发明直接熔接多模光纤与单模光纤SMF-28,然后将多模光纤拉锥形成锥形光纤,能够使多模光纤纤芯内传输的光在锥形处较多地进入锥形光纤/敏感薄膜界面形成倏逝波,极大地提高了传感器的灵敏度、检出限。1. The present invention directly fuses multimode optical fiber and single-mode optical fiber SMF-28, and then tapers the multimode optical fiber to form a tapered optical fiber, which can make the light transmitted in the multimode optical fiber core enter the tapered shape more The evanescent wave is formed at the interface of the optical fiber/sensitive film, which greatly improves the sensitivity and detection limit of the sensor.

2.本发明提出通过甲烷敏感薄膜多孔化实现裸露笼形分子的目的,通过控制敏感薄膜孔隙率12~15%可以较好地解决传感器灵敏度和响应速度提高等目的。其精选了原料,并采用最合适工艺条件,采用的甲烷敏感膜溶液由笼形分子A、光学级α-氢-ω-羟基-聚二甲基硅氧烷、致孔剂碳酸氢铵、二氯甲烷与甲醇混合溶剂高速搅拌及超声处理而成,溶液均匀,粘度易调节;在温度90℃和真空度0.08MPa条件下脱出薄膜内二氯甲烷与甲醇混合溶剂以及热分解致孔剂碳酸氢铵,从而使甲烷敏感薄膜多孔化,提高传感器响应速度。2. The present invention proposes to realize the purpose of exposing clathrate molecules by making the methane-sensitive film porous, and the purpose of improving sensor sensitivity and response speed can be better solved by controlling the porosity of the sensitive film to 12-15%. It selects raw materials and adopts the most suitable process conditions. The methane-sensitive membrane solution used is composed of cage molecule A, optical grade α-hydrogen-ω-hydroxyl-polydimethylsiloxane, porogen ammonium bicarbonate, It is produced by high-speed stirring and ultrasonic treatment of a mixed solvent of dichloromethane and methanol. The solution is uniform and the viscosity is easy to adjust. The mixed solvent of dichloromethane and methanol in the film and the thermal decomposition of carbonic acid, a porogen, are removed from the film under the conditions of a temperature of 90 ° C and a vacuum of 0.08 MPa. ammonium hydrogen, thereby making the methane-sensitive film porous and improving the response speed of the sensor.

3.本发明采用的甲烷敏感膜由笼形分子A、光学级α-氢-ω-羟基-聚二甲基硅氧烷组成,充分利用α-氢-ω-羟基-聚二甲基硅氧烷分子结构中的羟基(-OH)能够与笼形分子A结构中氧原子发生配位作用,比传统的笼形分子A与聚硅氧烷、苯乙烯-丙烯腈树脂等形成的甲烷敏感膜(SensorsandActuatorsB,2005,107(1):32~39;AnalyticaChimicaActa,2009,633(2):238~243;ZL200710093035.4;ZL201010593704.6)更均匀、稳定,膜层质量更高。3. The methane-sensitive membrane adopted in the present invention is composed of cage molecule A and optical grade α-hydrogen-ω-hydroxyl-polydimethylsiloxane, fully utilizing α-hydrogen-ω-hydroxyl-polydimethylsiloxane The hydroxyl group (-OH) in the alkane molecular structure can coordinate with the oxygen atom in the cage molecule A structure, which is more sensitive to methane than the traditional cage molecule A formed with polysiloxane, styrene-acrylonitrile resin, etc. (Sensors and Actuators B, 2005, 107 (1): 32-39; Analytica Chimica Acta, 2009, 633 (2): 238-243; ZL200710093035.4; ZL201010593704.6) More uniform, stable, and higher quality film.

4.为了增强甲烷敏感膜与锥形多模光纤表面的结合力,提出了锥形光纤表面进行γ―氨丙基三乙氧基硅烷偶联剂预处理,通过锥形光纤表面的羟基(-OH)与硅烷偶联剂的硅氧键(Si-O-)、硅氧键(Si-O-)与α-氢-ω-羟基-聚二甲基硅氧烷的羟基(-OH)之间分别发生相互作用,形成纳米级的涂覆层,实现甲烷敏感膜在锥形光纤表面附着力增强的目的。4. In order to enhance the binding force between the methane-sensitive film and the surface of the tapered multimode fiber, it is proposed to pretreat the surface of the tapered fiber with γ-aminopropyltriethoxysilane coupling agent, through the hydroxyl (- OH) and the silicon-oxygen bond (Si-O-) of the silane coupling agent, between the silicon-oxygen bond (Si-O-) and the hydroxyl group (-OH) of α-hydrogen-ω-hydroxyl-polydimethylsiloxane Interact with each other to form a nano-scale coating layer to achieve the purpose of enhancing the adhesion of the methane-sensitive film on the surface of the tapered optical fiber.

附图说明Description of drawings

图1是本发明基于锥形多模干涉的光纤甲烷传感装置结构示意图。Fig. 1 is a schematic diagram of the structure of the optical fiber methane sensing device based on the tapered multimode interference of the present invention.

图2是图1中基于锥形多模干涉的透射式光纤甲烷传感器结构示意图。Fig. 2 is a schematic structural diagram of the transmissive optical fiber methane sensor based on conical multimode interference in Fig. 1 .

具体实施方式Detailed ways

以下结合附图1和图2,本发明做进一步详细说明:Below in conjunction with accompanying drawing 1 and Fig. 2, the present invention is described in further detail:

参见图1,基于锥形多模干涉的光纤甲烷传感装置结构是将含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷敏感薄膜的锥形光纤甲烷传感器2的两端与单模光纤SMF-28连接在一起,并将传感器2装配到传感装置测试气室3内并密封。采用超辐射宽带光源SLD1连接到传感器2的输入端,传感器2输出端连接Agilent86140B光谱分析仪4,该光谱分析仪4通过GPIB接口连接线5与计算机6相接。测试气室3分别有一通入通出待测甲烷气体11的进气口7和出气口8,进气口7通过开关阀门9与控制待测甲烷气体11的质量流量控制器10连接。Referring to Figure 1, the structure of the optical fiber methane sensing device based on tapered multimode interference is to combine the tapered optical fiber methane sensor 2 of the α-hydrogen-ω-hydroxyl-polydimethylsiloxane sensitive film containing the cage molecule A Both ends are connected together with the single-mode optical fiber SMF-28, and the sensor 2 is assembled into the sensor device test air chamber 3 and sealed. The super-radiation broadband light source SLD1 is connected to the input end of the sensor 2, and the output end of the sensor 2 is connected to the Agilent86140B spectrum analyzer 4, and the spectrum analyzer 4 is connected to the computer 6 through the GPIB interface connection line 5. The test gas chamber 3 has an air inlet 7 and an air outlet 8 through which the methane gas 11 to be tested is connected.

参见图2,锥形光纤甲烷传感器2包含有SMF-28单模光纤21、锥形多模光纤22、甲烷敏感薄膜23。制作传感器需将多模光纤两端与单模光纤熔接,采用拉锥机将多模光纤拉制成为锥形结构,锥形多模光纤(传感区域)长度为L,其中拉锥长度LT为0.55~0.85mm,束腰直径D为25~35μm。锥形多模光纤表面涂覆含笼形分子A、碳酸氢铵的α-氢-ω-羟基-聚二甲基硅氧烷敏感薄膜的方法为自动提拉法;涂膜后的传感器在温度90℃、真空度0.08MPa条件下脱出二氯甲烷与甲醇混合溶剂以及热分解致孔剂碳酸氢铵,使甲烷敏感薄膜多孔化,孔隙率12~15%。多模光纤为ThorlabsAFS105/125Y梯度折射率MMF(纤芯直径105μm,包层直径125μm),长度42mm;单模光纤采用康宁SMF-28光纤,其纤芯直径9μm左右,包层直径125μm。Referring to FIG. 2 , the tapered optical fiber methane sensor 2 includes a SMF-28 single-mode optical fiber 21 , a tapered multimode optical fiber 22 , and a methane sensitive film 23 . To make the sensor, the two ends of the multimode fiber need to be fused with the single-mode fiber, and the multimode fiber is drawn into a tapered structure by using a taper machine. The length of the tapered multimode fiber (sensing area) is L, and the length of the taper is L T is 0.55-0.85mm, and the beam waist diameter D is 25-35μm. The method of coating the surface of the tapered multimode optical fiber containing the α-hydrogen-ω-hydroxyl-polydimethylsiloxane sensitive film containing the cage molecule A and ammonium bicarbonate is the automatic pulling method; At 90°C and a vacuum of 0.08MPa, the mixed solvent of dichloromethane and methanol and the thermal decomposition of ammonium bicarbonate, a porogen, are removed to make the methane-sensitive film porous, with a porosity of 12-15%. The multimode fiber is Thorlabs AFS105/125Y gradient index MMF (core diameter 105 μm, cladding diameter 125 μm), length 42 mm; single mode fiber is Corning SMF-28 fiber, the core diameter is about 9 μm, and the cladding diameter is 125 μm.

基于锥形多模干涉的光纤甲烷传感器的制备过程包括熔接形成SMF-MMF-SMF结构、拉锥形成SMF-TMMF-SMF结构、TMMF锥形区域涂覆甲烷敏感膜和甲烷敏感膜多孔化:The preparation process of optical fiber methane sensor based on tapered multimode interference includes welding to form SMF-MMF-SMF structure, tapering to form SMF-TMMF-SMF structure, TMMF tapered area coated with methane sensitive film and methane sensitive film porous:

(1)分别取两段单模光纤SMF-28和一段多模光纤MMF(包层直径均为125μm),采用光纤剥线钳去掉这两种类型光纤的涂覆层,用无水乙醇清洗后用光纤切割刀切割形成平整端面,经光纤熔接机自动模式熔接,切割MMF使其长度为42mm,形成SMF-MMF-SMF结构。(1) Take two sections of single-mode optical fiber SMF-28 and one section of multi-mode optical fiber MMF (both cladding diameters are 125 μm), use optical fiber strippers to remove the coating layers of these two types of optical fibers, and clean them with absolute ethanol Cut with an optical fiber cleaver to form a flat end face, and then use the automatic mode fusion of an optical fiber fusion splicer to cut the MMF to a length of 42mm to form a SMF-MMF-SMF structure.

(2)将熔接形成SMF-MMF-SMF结构的光纤置于熔融拉锥机上,CO2激光器在10.6μm处功率30W,通过三维调节架使加热区域位于MMF中间。调节CO2激光器功率15W,通过硒化锌(ZnSe)柱状透镜控制CO2激光束直径150μm,MMF加热区域熔融并被与MMF相连的SMF上3克砝码恒定张力拉伸,即可形成拉锥长度LT为0.55~0.85mm,束腰直径D为25~35μm的SMF-TMMF-SMF结构锥形光纤。(2) Place the optical fiber fused to form the SMF-MMF-SMF structure on a fusion tapered machine, the power of the CO 2 laser is 30W at 10.6 μm, and the heating area is located in the middle of the MMF through a three-dimensional adjustment frame. Adjust the power of the CO2 laser to 15W, and control the diameter of the CO2 laser beam to 150 μm through a zinc selenide (ZnSe) cylindrical lens. The MMF heating area is melted and stretched by a constant tension of 3 grams of weight on the SMF connected to the MMF to form a tapered SMF-TMMF-SMF tapered optical fiber with a length LT of 0.55-0.85 mm and a beam waist diameter D of 25-35 μm.

(3)将SMF-TMMF-SMF结构锥形光纤的锥形区域浸入质量比0.1%十二烷基苯磺酸钠、5%氢氧化钠的水溶液中,温度60℃,时间30分钟,蒸馏水清洗;将除油脱脂的锥形区域浸入体积比20%氢氟酸水溶液中室温粗化5分钟,取出后用蒸馏水彻底清洗;浸入体积比0.1%KH-550硅烷偶联剂的水溶液中10秒,即可在光纤外表面形成纳米级硅烷偶联剂涂覆层,可显著改善甲烷敏感膜与光纤表面附着力。(3) Immerse the tapered area of the SMF-TMMF-SMF structured tapered optical fiber in an aqueous solution with a mass ratio of 0.1% sodium dodecylbenzenesulfonate and 5% sodium hydroxide at a temperature of 60°C for 30 minutes and wash with distilled water ; Immerse the degreased and degreased conical area in a volume ratio of 20% hydrofluoric acid aqueous solution for 5 minutes at room temperature, take it out and wash it thoroughly with distilled water; immerse it in an aqueous solution of 0.1% volume ratio KH-550 silane coupling agent for 10 seconds, A nanoscale silane coupling agent coating layer can be formed on the outer surface of the optical fiber, which can significantly improve the adhesion between the methane-sensitive film and the surface of the optical fiber.

(4)敏感甲烷的涂覆液配制,取笼形分子A600μmol,光学级α-氢-ω-羟基-聚二甲基硅氧烷1g(分子量4200,密度0.98g/mL,折射率1.41),碳酸氢铵致孔剂0.1g,二氯甲烷与甲醇混合溶剂(体积比5:1)12mL,用高速搅拌器搅拌30分钟,搅拌速度2000转/分,进一步超声混合均匀后,形成均匀透明溶液。(4) Prepare the coating liquid sensitive to methane, take 600 μmol of cage molecule A, 1 g of optical grade α-hydrogen-ω-hydroxyl-polydimethylsiloxane (molecular weight 4200, density 0.98g/mL, refractive index 1.41), Ammonium bicarbonate porogen 0.1g, mixed solvent of dichloromethane and methanol (volume ratio 5:1) 12mL, stirred with a high-speed stirrer for 30 minutes, stirring speed 2000 rpm, after further ultrasonic mixing, a uniform transparent solution was formed .

(5)将涂覆硅烷偶联剂的SMF-TMMF-SMF结构锥形光纤置于自动提拉机上,将TMMF浸入敏感甲烷的涂覆液中,在自动模式下(静置时间3分钟,提拉速度10~30厘米/小时)采用自动提拉机提拉形成均匀的厚度0.2~0.5μm的甲烷敏感薄膜,最后在温度90℃、真空度0.08MPa、时间1小时条件下脱出薄膜内二氯甲烷与甲醇混合溶剂以及热分解致孔剂碳酸氢铵,使甲烷敏感薄膜多孔化,孔隙率12~15%。(5) Place the SMF-TMMF-SMF structure tapered optical fiber coated with silane coupling agent on the automatic pulling machine, TMMF is immersed in the coating solution of sensitive methane, under automatic mode (standstill time 3 minutes, lift Pulling speed 10-30 cm/hour) using an automatic pulling machine to form a methane-sensitive film with a uniform thickness of 0.2-0.5 μm, and finally release the dichloride in the film under the conditions of temperature 90 ° C, vacuum degree 0.08 MPa, and time 1 hour. The mixed solvent of methane and methanol and the pyrolysis porogen ammonium bicarbonate make the methane-sensitive film porous, with a porosity of 12-15%.

将涂覆甲烷敏感薄膜的SMF-TMMF-SMF结构的光纤甲烷传感器装配于测试气室中。当待测甲烷气体经质量流量控制器、测试气室进气口进入并与TMMF表面的多孔甲烷敏感薄膜发生作用,敏感膜折射率快速改变;而敏感膜折射率的变化,将直接改变传感器透射干涉谱特征波长λc。采用光谱分析仪检测干涉谱特征波长的移动情况,分析传感器与甲烷气体接触前后干涉谱特征波长移动量Δλc,即可获取待测甲烷气体浓度。A fiber-optic methane sensor with a structure of SMF-TMMF-SMF coated with a methane-sensitive film was assembled in the test chamber. When the methane gas to be measured enters through the mass flow controller and the air inlet of the test chamber and interacts with the porous methane sensitive film on the surface of TMMF, the refractive index of the sensitive film changes rapidly; and the change of the refractive index of the sensitive film will directly change the sensor’s transmission. The characteristic wavelength λ c of the interference spectrum. Use a spectrum analyzer to detect the movement of the characteristic wavelength of the interference spectrum, and analyze the movement of the characteristic wavelength of the interference spectrum Δλ c before and after the sensor is in contact with the methane gas to obtain the concentration of the methane gas to be measured.

实施例1:将一段多模光纤MMF与两段单模光纤SMF-28熔接形成SMF-MMF-SMF结构,多模光纤长度42mm,多模光纤拉锥后锥形区域0.68mm,束腰直径30μm;锥形区域表面预涂覆硅烷偶联剂纳米覆盖层后,再沿锥形光纤表面涂覆厚度为350nm的含笼形分子A的α-氢-ω-羟基-聚二甲基硅氧烷甲烷敏感薄膜并多孔化。以浓度为0~3.5%(v/v)的甲烷标准气体为对象,分别与光纤表面的敏感薄膜发生作用,透射干涉谱特征波长随甲烷气体浓度增加而向短波长方向移动,且透射干涉谱1550nm附近波谷特征波长移动量Δλc与甲烷浓度c之间呈线性相关,其线性回归方程为:Example 1: A section of multimode fiber MMF and two sections of single-mode fiber SMF-28 are fused to form a SMF-MMF-SMF structure, the length of the multimode fiber is 42 mm, the tapered area of the multimode fiber after tapering is 0.68 mm, and the beam waist diameter is 30 μm ; After the surface of the tapered area is pre-coated with a silane coupling agent nano-covering layer, the surface of the tapered optical fiber is coated with α-hydrogen-ω-hydroxyl-polydimethylsiloxane containing cage molecule A with a thickness of 350nm Methane-sensitive membranes are porous. Taking methane standard gas with a concentration of 0-3.5% (v/v) as the object, it interacts with the sensitive film on the surface of the optical fiber respectively. The characteristic wavelength of the transmission interference spectrum moves to the short wavelength direction with the increase of the methane gas concentration, and the transmission interference spectrum There is a linear correlation between the trough characteristic wavelength shift Δλc near 1550nm and the methane concentration c , and the linear regression equation is:

Δλc=kc+bΔλ c =kc+b

式中c为待测甲烷气体浓度,Δλc为传感器透射干涉谱波谷特征波长移动量,k为斜率,b为截距。In the formula, c is the concentration of methane gas to be measured, Δλ c is the movement of the characteristic wavelength of the trough of the sensor transmission interference spectrum, k is the slope, and b is the intercept.

实验中采用已知浓度为0、0.1、0.5、1.0、1.5、2.0、2.5、3.0、3.5%(v/v)的甲烷标准气体分别进行检测。对于某一个甲烷浓度,根据透射干涉谱波谷特征波长的变化,能够获取甲烷气体通入前后波长移动量Δλc,对应不同浓度瓦斯标准气体的透射干涉谱波谷特征波长移动量Δλc分别为0、0.40、0.80、1.20、1.60、1.90、2.40、2.92、3.30nm,其线性回归方程为:Δλc=0.8825c+0.2307,相关系数R2=0.9903,即线性回归方程中k、b分别为0.8825、0.2307。In the experiment, methane standard gases with known concentrations of 0, 0.1, 0.5, 1.0, 1.5, 2.0, 2.5, 3.0, and 3.5% (v/v) were used for detection respectively. For a certain methane concentration, according to the change of the characteristic wavelength of the trough of the transmission interference spectrum, the wavelength shift Δλ c before and after the introduction of methane gas can be obtained . 0.40, 0.80, 1.20, 1.60, 1.90, 2.40, 2.92, 3.30nm, the linear regression equation is: Δλ c =0.8825c+0.2307, the correlation coefficient R 2 =0.9903, that is, k and b in the linear regression equation are 0.8825, 0.2307.

当待测甲烷气体与该传感器接触后,透射干涉谱波谷特征波长移动量Δλc为1.82nm,可计算出待测甲烷气体浓度c=1.80%,其响应时间41秒,恢复时间43秒。When the methane gas to be measured is in contact with the sensor, the trough characteristic wavelength shift of the transmission interference spectrum Δλ c is 1.82nm, the concentration of the methane gas to be measured can be calculated as c=1.80%, the response time is 41 seconds, and the recovery time is 43 seconds.

实施例2:实验采用锥形区域0.55mm,束腰直径25μm、敏感膜厚度380nm的锥形光纤甲烷传感器,并以已知浓度为0、0.1、0.5、1.0、1.5、2.0、2.5、3.0、3.5%(v/v)的甲烷标准气体进行检测,相应透射干涉谱波谷特征波长随甲烷气体浓度增加而向短波长方向移动,其干涉谱波谷特征波长移动量Δλc分别为0、0.42、0.82、1.24、1.62、2.02、2.48、3.02、3.48nm,线性回归方程为:Δλc=0.9246c+0.2293,相关系数R2=0.9916,即线性回归方程中k、b分别为0.9242、0.2293。Embodiment 2: The experiment adopts the tapered optical fiber methane sensor with tapered region 0.55mm, beam waist diameter 25μm, sensitive film thickness 380nm, and with known concentration of 0, 0.1, 0.5, 1.0, 1.5, 2.0, 2.5, 3.0, 3.5% (v/v) methane standard gas is used for detection, and the characteristic wavelength of the trough of the corresponding transmission interference spectrum moves to the short wavelength direction with the increase of the methane gas concentration, and the movement amount of the characteristic wavelength of the trough of the interference spectrum Δλ c is 0, 0.42, 0.82 respectively . _

当待测甲烷气体与该传感器接触后,透射干涉谱波谷特征波长移动量Δλc为1.54nm,可计算出待测甲烷气体浓度c=1.42%,其响应时间36秒,解吸时间38秒。When the methane gas to be measured is in contact with the sensor, the trough characteristic wavelength shift of the transmission interference spectrum Δλ c is 1.54nm, the concentration of the methane gas to be measured can be calculated as c=1.42%, the response time is 36 seconds, and the desorption time is 38 seconds.

实施例3:采用锥形区域0.76mm,束腰直径32μm、敏感膜厚度330nm的锥形光纤甲烷传感器,并以已知浓度为0、0.1、0.5、1.0、1.5、2.0、2.5、3.0、3.5%(v/v)的甲烷标准气体进行检测,相应透射干涉谱波谷特征波长随甲烷气体浓度增加而向短波长方向移动,其干涉谱波谷特征波长移动量Δλc分别为0、0.42、0.88、1.24、1.72、2.16、2.32、3.04、3.46nm,线性回归方程为:Δλc=0.9115c+0.2654,相关系数R2=0.9846,即线性回归方程中k、b分别为0.9115、0.2654。Embodiment 3: adopt the tapered optical fiber methane sensor of tapered area 0.76mm, beam waist diameter 32 μ m, sensitive film thickness 330nm, and with known concentration 0,0.1,0.5,1.0,1.5,2.0,2.5,3.0,3.5 % (v/v) methane standard gas for detection, the corresponding transmission interference spectrum trough characteristic wavelength moves to the short wavelength direction with the increase of methane gas concentration, and the interferometric spectrum trough characteristic wavelength shift Δλ c is 0, 0.42, 0.88, 1.24, 1.72, 2.16, 2.32, 3.04, 3.46nm, the linear regression equation is: Δλ c =0.9115c+0.2654, the correlation coefficient R 2 =0.9846, that is, k and b in the linear regression equation are 0.9115 and 0.2654 respectively.

当待测甲烷气体与该传感器接触后,透射干涉谱波谷特征波长移动量Δλc为3.18nm,可计算出待测甲烷气体浓度c=3.20%,其响应时间39秒,解吸时间43秒。When the methane gas to be measured is in contact with the sensor, the trough characteristic wavelength shift of the transmission interference spectrum Δλ c is 3.18nm, the concentration c of the methane gas to be measured can be calculated to be 3.20%, the response time is 39 seconds, and the desorption time is 43 seconds.

实施例4:采用锥形区域0.85mm,束腰直径35μm、敏感膜厚度430nm的锥形光纤甲烷传感器,并以已知浓度为0、0.1、0.5、1.0、1.5、2.0、2.5、3.0、3.5%(v/v)的甲烷标准气体进行检测,相应透射干涉谱波谷特征波长随甲烷气体浓度增加而向短波长方向移动,其干涉谱波谷特征波长移动量Δλc分别为0、0.48、0.88、1.26、1.82、2.28、2.32、3.26、3.58nm,线性回归方程为:Δλc=0.9496c+0.2767,相关系数R2=0.9783,即线性回归方程中k、b分别为0.9496、0.2767。Embodiment 4: adopt the tapered optical fiber methane sensor of tapered region 0.85mm, beam waist diameter 35 μm, sensitive film thickness 430nm, and with known concentration 0,0.1,0.5,1.0,1.5,2.0,2.5,3.0,3.5 % (v/v) methane standard gas for detection, the corresponding transmission interference spectrum trough characteristic wavelength moves to the short wavelength direction with the increase of methane gas concentration, and the interferometric spectrum trough characteristic wavelength shift Δλ c is 0, 0.48, 0.88, 1.26, 1.82, 2.28, 2.32, 3.26, 3.58nm, the linear regression equation is: Δλ c =0.9496c+0.2767, the correlation coefficient R 2 =0.9783, that is, k and b in the linear regression equation are 0.9496 and 0.2767 respectively.

当待测甲烷气体与该传感器接触后,透射干涉谱波谷特征波长移动量Δλc为0.96nm,可计算出待测甲烷气体浓度c=0.72%,其响应时间32秒,解吸时间35秒。When the methane gas to be measured is in contact with the sensor, the trough characteristic wavelength shift of the transmission interference spectrum Δλ c is 0.96nm, the concentration of the methane gas to be measured can be calculated as c=0.72%, the response time is 32 seconds, and the desorption time is 35 seconds.

Claims (4)

1., based on the high sensitivity optical fiber methane sensing device that tapered multimode is interfered, comprise wideband light source, methane optical fiber sensor, test air chamber, controlled valve, mass flow controller, spectroanalysis instrument and computing machine; Described wideband light source connecting fiber methane transducer, the interference signal of methane optical fiber sensor connects spectroanalysis instrument and computing machine through single-mode fiber; Described methane optical fiber sensor is positioned at test air chamber, and test air chamber has the air intake opening and gas outlet that pass into methane gas to be measured, and air intake opening is by the mass flow controller of controlled valve connection control methane gas to be measured;
It is characterized in that: described methane optical fiber sensor draws cone to form to multimode optical fiber by after multimode optical fiber two ends welding single-mode fiber further;
Described multimode optical fiber draws cone length L tbe 0.55 ~ 0.85mm, beam waist diameter D is 25 ~ 35 μm; Tapered multimode fiber outside surface adopts the pre-service of KH-550 silane coupling agent aqueous solution to form silane coupling agent nanometer coat, KH-550 silane coupling agent aqueous liquid volume concentrations is 0.1%, 10 seconds processing times, coat thickness is nanoscale, apply porous methane sensitive thin film again, improve methane sensitive membrane and tapered multimode fiber outside surface adhesion; Described porous methane sensitive thin film is the alpha-hydro-omega-hydroxy-poly dimethyl siloxane porous methane sensitive thin film containing cage molecule A, its thickness 200 ~ 300nm; Described porous methane sensitive thin film first optical grade alpha-hydro-omega-hydroxy-poly dimethyl siloxane, cage molecule A, pore-foaming agent ammonium bicarbonate is placed in methylene chloride and methanol mixed solvent, ultrasonicly further after stirring 0.5 hour with 2000 revs/min of rotating speeds to mix, then lift is coated on tapered multimode fiber sensitive zones automatically, methylene chloride and methanol mixed solvent and thermal decomposition pore-foaming agent ammonium bicarbonate in film is deviate under temperature 90 DEG C and vacuum tightness 0.08MPa condition, make the methane sensitive thin film porous of formation, porosity is 12 ~ 15%; Reagent dosage is respectively cage molecule A600 μm ol, optical grade alpha-hydro-omega-hydroxy-poly dimethyl siloxane 1g, the methylene chloride of pore-foaming agent ammonium bicarbonate 0.1g, volume ratio 5:1 and methanol mixed solvent 12mL;
Described wideband light source adopts the superradiance wideband light source SLD of centre wavelength 1550nm, bandwidth 40nm.
2. high sensitivity optical fiber methane sensing device of interfering based on tapered multimode according to claim 1, it is characterized in that: the described alpha-hydro-omega-hydroxy-poly dimethyl siloxane methane sensitive thin film containing cage molecule A is low-refraction porous sensitive material, refractive index about 1.41, porosity 12 ~ 15%.
3. according to claim 1 and 2 based on tapered multimode interfere high sensitivity optical fiber methane sensing device, it is characterized in that: described multimode optical fiber two ends all with single-mode fiber SMF-28 welding.
4. high sensitivity optical fiber methane sensing device of interfering based on tapered multimode according to claim 1 and 2, is characterized in that: described spectroanalysis instrument is the spectroanalysis instrument of 600 ~ 1700nm wavelength coverage.
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