CN105097597B - A kind of system and method for automatic clearance WAT PM probe cards - Google Patents
A kind of system and method for automatic clearance WAT PM probe cards Download PDFInfo
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- CN105097597B CN105097597B CN201510460280.9A CN201510460280A CN105097597B CN 105097597 B CN105097597 B CN 105097597B CN 201510460280 A CN201510460280 A CN 201510460280A CN 105097597 B CN105097597 B CN 105097597B
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- 239000000523 sample Substances 0.000 title claims abstract description 111
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000007689 inspection Methods 0.000 claims abstract description 34
- 238000012545 processing Methods 0.000 claims description 38
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 4
- 238000012360 testing method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009897 systematic effect Effects 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000001467 acupuncture Methods 0.000 description 1
- 239000011111 cardboard Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a kind of system and method for automatic clearance WAT PM probe cards, system by establishing automatic clearance WAT PM probe cards, the data inspection result deposit database of PM probe cards can be captured in real time, and it can judge whether to let pass according to the setting value of each acceptance project in system, after items check value up to specification, system can be switched over to the state of the PM probe cards automatically, and the instruction of clearance can be sent by Inner email；It can effectively improve operating efficiency, reduce the time that PM probe cards are let pass, while decrease workload and the working time of engineer, the ratio of probe card up time is improved for long-range.
Description
Technical field
The present invention relates to semiconductor microelectronic to test application field, is visited more particularly, to a kind of automatic clearance WAT PM
The system and method for pin card.
Background technology
Semiconductor crystal wafer complete after, be packaged before, in order to ensure wafer yield and avoid encapsulation waste,
Need to carry out wafer acceptance testing (Wafer Acceptance Test, WAT) in manufacture of semiconductor.WAT probe card boards are wide
It is general for one of important tool for electrically being measured wafer, be to connect the test interface between WAT measuring instruments and wafer.
Its operation principle is by the detection welding pad on the probe and chip to be measured of the probe card (Probe Card) for connecting measuring instrument
(PAD) or salient pole directly contacts, and forms measuring loop, by probe to chip feed-in test signal to be measured and feedback chip
Signal, then conjunction measuring instrument filter out electrically bad chip with software control, realize automatic detection.Probe card includes
For the multiple probes contacted with test PAD.
Electrically measurement is an important monitoring step, is pricked using probe card on the metal PAD of feeler switch to be surveyed
Amount.However, with the increase of probe card pricking times, needle point can wear, aoxidize or pickup, contact of the needle point with PAD
Resistance increase will influence the accuracy electrically measured.Meanwhile if probe card needle point prick position on PAD occur it is unexpected inclined
Move, it will cause chip internal plain conductor short-circuit, the accuracy that meeting extreme influence measures.If probe card has exception, pin trace glues
When dirty or pin trace PAD is deflected away from, then test can be caused abnormal, or even prick bad wafer.Therefore, the quality of probe card situation can be direct
WAT test result is influenceed, it is necessary to carry out periodic maintenance (Periodic maintenance, PM) to probe card.
After WAT probe cards PM, WAT engineer needs many index of inspecting for acceptance, and includes RFID (radio frequency identification) jail
Solidity, the intact of pedestal, leakage (electric leakage), tip diameter, prober angle (probe angulation) etc..Items to be checked
After index is qualified, every data result of inspection be recorded into corresponding record list, hair mail (mail) notice MFG (systems
Make engineer) card can use.
In the inspection for the index that carries out an acceptance inspection, because the project to be checked is more, every data result of inspection is recorded
Take a significant amount of time to corresponding record list and modification needs (such as：Disposable release 4, which opens PM probe cards, to be needed to spend
5 hours, the wherein record of data and modification will spend 2 hours), it have impact on PM probe cards release (clearance) effect
Rate.
Designed for this it is a kind of can release WAT PM probe cards automatically system, to effectively improve operating efficiency, reduce
PM probe cards release time, the ratio of probe card up time is improved for long-range, is one and highly develops
Problem.
The content of the invention
It is an object of the invention to overcome drawbacks described above existing for prior art, there is provided a kind of automatic clearance WAT PM probes
The system and method for card, to effectively improve operating efficiency, reduce PM probe cards release time.
To achieve the above object, technical scheme is as follows：
A kind of system of automatic clearance WAT PM probe cards, including：
Memory module, by intact, the leakage of the fastness, pedestal that include radio frequency identification for WAT PM probe cards of acquisition
The data inspection result of every acceptance project including electricity, tip diameter, probe angulation is stored in database in real time；
Judge module, according to PM probe card items acceptance projects specification value set in advance is directed in system, to institute
State the accordance that each item data inspection result in database is carried out one by one to judge, and export judged result；
Processing module, according to the judged result, send the instruction whether let pass；Wherein, the processing module is in whole
Inspection data result value up to specification when, send the instruction of clearance, and for the inspection data of each value that falls short of specifications
As a result, the instruction not let pass is sent one by one.
Preferably, the processing module includes Mailing List member, and by the Mailing List member with Inner email
Mode sends the instruction whether let pass.
Preferably, in addition to module is reset, before the processing module sends the instruction of clearance, by the bundle of the probe card
Pin number record is reset.
Preferably, in addition to handover module, after the replacement module resets the pricking times record of the probe card,
Before the processing module sends the instruction of clearance, the board state of the probe card is switched over.
A kind of method of automatic clearance WAT PM probe cards, including：
Using a memory module, by acquisition for WAT PM probe cards include the fastness of radio frequency identification, pedestal it is complete
The data inspection result of every acceptance project including good, electric leakage, tip diameter, probe angulation is stored in database in real time；
Using a judge module, according to for PM probe card items acceptance projects specification value set in advance, to institute
State the accordance that each item data inspection result in database is carried out one by one to judge, and export judged result；
Using a processing module, according to the judged result, the instruction whether let pass is sent；Wherein, in the inspection of whole
During data result value up to specification, the instruction of clearance is sent by the processing module, also, fall short of specifications for each
The inspection data result of value, the instruction not let pass is sent by the processing module one by one.
Preferably, by the Mailing List member of the processing module, send what is whether let pass in a manner of Inner email
Instruction.
Preferably, module is reset using one, before the processing module sends the instruction of clearance, by the bundle of the probe card
Pin number record is reset.
Preferably, using a handover module, after the replacement module resets the pricking times record of the probe card,
Before the processing module sends the instruction of clearance, the board state of the probe card is switched over.
It can be seen from the above technical proposal that system of the present invention by establishing automatic clearance WAT PM probe cards, can be real
When capture the data inspection result deposit databases of PM probe cards, and can be according to the setting of each acceptance project in system
Value judges whether to let pass, and after items check value up to specification, system can switch over to the state of the PM probe cards automatically,
And the instruction of clearance can be sent by Inner email.The present invention can effectively improve operating efficiency, reduce PM probe cards release
Time (the release times can save more than 40%), while workload and the working time of engineer are decreased, from long-range
For improve the ratio of probe card up time.
Brief description of the drawings
Fig. 1 is a kind of systematic schematic diagram of automatic clearance WAT PM probe cards of a preferred embodiment of the present invention；
Fig. 2 is a kind of method flow diagram of automatic clearance WAT PM probe cards of the present invention.
Embodiment
Below in conjunction with the accompanying drawings, the embodiment of the present invention is described in further detail.
In embodiment of the invention below, referring to Fig. 1, Fig. 1 is one kind of a preferred embodiment of the present invention
The systematic schematic diagram of automatic clearance WAT PM probe cards.As shown in figure 1, being directed to WAT PM probe cards, WAT engineer is needed to each
Item acceptance project is checked.WAT engineer inspection's product acceptance datas, it may include such as RFID's (radio frequency identification) is firm
Property, the intact of pedestal, leakage (electric leakage), tip diameter, prober angle (probe angulation) etc..
Existing mode be indices to be checked it is qualified after, every data result of inspection recorded accordingly
List is recorded, then sending out mail (mail) notice MFG (manufacturing engineer) cards can use.But due to the project to be checked compared with
It is more, by every data result of inspection recorded corresponding record list and modification needs take a significant amount of time (such as：Disposably
Release 4 opens PM probe cards and needs to spend 5 hours, and the wherein record of data and modification will spend 2 hours), influence
PM probe cards release (clearance) efficiency.
Therefore, can be by a kind of system of automatic clearance WAT PM probe cards of the present invention come automatic release (clearance)
WAT PM probe cards, to effectively improve operating efficiency, reduce PM probe cards release time.
A kind of system (the automatic release systems of probe card illustrated of automatic clearance WAT PM probe cards of the present invention
System), including memory module, judge module and processing module.Wherein, memory module is used for by real-time Grasp Modes, will obtain
(i.e. RFID fastness, the intact of pedestal, leakage, needle point are straight for WAT PM probe card items acceptances project
Footpath, prober angle etc.) data inspection result be stored in the database of respective record list in real time；Judge module is used for basis
In system for PM probe card items acceptance project specification set in advance (spec) value (such as PM cards leak electricity<0.5pA),
The accordance carried out to each item data inspection result in the database one by one judges, and exports judged result；Such as Fig. 1 institutes
It is when showing, such as meeting " pass ", and the accordance for carrying out next inspection result judges；It is " fail " when not meeting, and shows
Show that " Wait EE " (wait engineer's processing, if RFID installations are insecure, then need to re-start installation；If leakage
Electricity, then need PM again)；Processing module is used for the judged result made according to the judge module, sends the finger whether let pass
Order.
As shown in figure 1, as an optional embodiment, the processing module may include Mailing List member, and pass through
The Mailing List member sends the instruction whether let pass in a manner of Inner email (Mail)；For example, when that can not let pass (such as
Insecure or electric leakage is installed for RFID), Mail notice WAT engineers are sent out respectively and are handled again, when can let pass, send out Mail
Notice MFG and WAT engineers board can use.
As shown in figure 1, as an optional embodiment, the system of automatic clearance WAT PM probe cards may also include replacement
Module, before the processing module sends the instruction (sending out Mail notice MFG and WAT engineers) of clearance, by the probe card
Pricking times record reset, such as the pricking times in ICIL and are revised as zero at pricking times by record.
As shown in figure 1, as an optional embodiment, the system of automatic clearance WAT PM probe cards may also include switching
Module, after the replacement module resets the pricking times of probe card record, the processing module send the finger of clearance
Before order, the board state of the probe card is switched over, such as by the state of the PM probe cards by PM (periodic maintenance state)
Automatically switch to In use (state in use).
A kind of method of automatic clearance WAT PM probe cards of the present invention is described in detail below.Referring to Fig. 2, figure
2 be a kind of method flow diagram of automatic clearance WAT PM probe cards of the present invention.Let pass as shown in Fig. 2 one kind of the present invention is automatic
The method of WAT PM probe cards, including：
As shown in frame 01, using a memory module, by acquisition for WAT PM probe card items acceptance projects
Data inspection result is stored in database in real time.
Please refer to Fig. 1.The method of a kind of automatic clearance WAT PM probe cards of the present invention, using the invention described above
The systems of automatic clearance WAT PM probe cards a kind of implement, for example, being using an automatic clearance WAT PM probe cards
The memory module of system, by acquisition for WAT PM probe card items acceptances projects (i.e. RFID fastness, pedestal it is complete
Good, leakage, tip diameter, prober angle etc.) data inspection result be stored in database in real time.
As shown in frame 02, using a judge module, according to set in advance for PM probe card items acceptance projects
Specification value, the accordance carried out to each item data inspection result in the database one by one judges, and exports judged result.
Then, using the judge module of said system, according to being directed to PM probe card items acceptance projects in system
Specification (spec) value set in advance (such as the electric leakage of PM cards<0.5pA), each item data inspection result in the database is entered
The accordance of row one by one judges, and exports judged result.As shown in figure 1, being " pass " when for example meeting, and carry out next inspection
Come to an end fruit accordance judge；It is when not meeting " fail ", and show " Wait EE " (engineer's processing is waited, if
RFID installations are insecure, then need to re-start installation；If electric leakage, then need PM again).
As shown in frame 03, using a processing module, according to the judged result, the instruction whether let pass is sent.
Finally, using the processing module of said system, the judged result made according to the judge module, send whether
The instruction of clearance., can be by the Mailing List member of the processing module, with Inner email as an optional embodiment
(Mail) mode sends the instruction whether let pass；For example, when that can not let pass, hair Mail notice WAT engineers are carried out again
Processing, when can let pass, hair Mail notice MFG and WAT engineers boards can use.
As an optional embodiment, also using automatic clearance WAT PM probe cards system replacement module,
Before the processing module sends the instruction (sending out Mail notice MFG and WAT engineers) of clearance, by the acupuncture treatment of the probe card time
Number scale record is reset, such as records pricking times and the pricking times in ICIL are revised as into zero.
As an optional embodiment, also using automatic clearance WAT PM probe cards system handover module,
It is described reset module the pricking times of probe card record is reset after, before the processing module sends the instruction of clearance, will
The board state of the probe card is switched over, such as the state of the PM probe cards is automatically switched by PM (periodic maintenance state)
For In use (state in use).
As an optional embodiment, in the inspection data result of whole value up to specification, the processing can be passed through
The Mailing List member of module sends the instruction of clearance in a manner of Inner email, before, by the pricking times of the probe card
Record resets, is Inuse by the board state auto-switching of the probe card.Also, for each value that falls short of specifications
Data result is checked, can one by one be sent in a manner of Inner email the Mailing List member of the processing module and not let pass
Instruction；For example, insecure and electric leakage is installed for RFID, it is necessary to Mail notice WAT engineers be sent respectively, so as to WAT works
Journey Shi Zaici is targetedly reinstalled or PM processing again.
In summary, system of the present invention by establishing automatic clearance WAT PM probe cards, can capture PM probes in real time
The data inspection result deposit database of card, and can judge whether to put according to the setting value of each acceptance project in system
OK, after items check value up to specification, system can switch over to the state of the PM probe cards automatically, and can pass through inside
Mail sends the instruction of clearance.The present invention can effectively improve operating efficiency, reduce PM probe cards release time
(the release times can save more than 40%), while decrease workload and the working time of engineer, carry for long-range
The high ratio of probe card up time.
Above-described is only the preferred embodiments of the present invention, the embodiment and the patent guarantor for being not used to the limitation present invention
Scope, therefore the equivalent structure change that every specification and accompanying drawing content with the present invention is made are protected, similarly should be included in
In protection scope of the present invention.
Claims (8)
- A kind of 1. system of automatic clearance WAT PM probe cards, it is characterised in that including：Memory module, by acquisition for fastness of the WAT PM probe cards including radio frequency identification, the intact of pedestal, electric leakage, pin The data inspection result of every acceptance project including sharp diameter, probe angulation is stored in database in real time；Judge module, according to PM probe card items acceptance projects specification value set in advance is directed in system, to the number The accordance carried out one by one according to each item data inspection result in storehouse judges, and exports judged result；Processing module, according to the judged result, send the instruction whether let pass；Wherein, inspection of the processing module in whole When looking into data result value up to specification, the instruction of clearance is sent, and for the inspection data result of each value that falls short of specifications, The instruction not let pass is sent one by one.
- 2. the system of automatic clearance WAT PM probe cards according to claim 1, it is characterised in that the processing module bag Mailing List member is included, and the instruction whether let pass is sent in a manner of Inner email the Mailing List member.
- 3. the system of automatic clearance WAT PM probe cards according to claim 1 or 2, it is characterised in that also include resetting Module, before the processing module sends the instruction of clearance, the pricking times of the probe card are recorded and reset.
- 4. the system of automatic clearance WAT PM probe cards according to claim 3, it is characterised in that also include switching mould Block, after the replacement module resets the pricking times of probe card record, the processing module send the instruction of clearance Before, the board state of the probe card is switched over.
- A kind of 5. method of automatic clearance WAT PM probe cards, it is characterised in that including：Using a memory module, by intact, the leakage of the fastness, pedestal that include radio frequency identification for WAT PM probe cards of acquisition The data inspection result of every acceptance project including electricity, tip diameter, probe angulation is stored in database in real time；Using a judge module, according to for PM probe card items acceptance projects specification value set in advance, to the number The accordance carried out one by one according to each item data inspection result in storehouse judges, and exports judged result；Using a processing module, according to the judged result, the instruction whether let pass is sent；Wherein, in the inspection data of whole As a result during value up to specification, the instruction of clearance is sent by the processing module, also, for each value that falls short of specifications Data result is checked, the instruction not let pass is sent by the processing module one by one.
- 6. the method for automatic clearance WAT PM probe cards according to claim 5, it is characterised in that pass through the processing mould The Mailing List member of block, sends the instruction whether let pass in a manner of Inner email.
- 7. the method for the automatic clearance WAT PM probe cards according to claim 5 or 6, it is characterised in that reset using one Module, before the processing module sends the instruction of clearance, the pricking times of the probe card are recorded and reset.
- 8. the method for automatic clearance WAT PM probe cards according to claim 7, it is characterised in that utilize all mold changings Block, after the replacement module resets the pricking times of probe card record, the processing module send the instruction of clearance Before, the board state of the probe card is switched over.
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| CN201510460280.9A CN105097597B (en) | 2015-07-30 | 2015-07-30 | A kind of system and method for automatic clearance WAT PM probe cards |
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| CN105097597B true CN105097597B (en) | 2018-02-27 |
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| CN110504000B (en) * | 2019-08-26 | 2021-04-13 | 上海华力集成电路制造有限公司 | Method for identifying probe card information of wafer-level test tester |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336256A (en) * | 2013-06-26 | 2013-10-02 | 上海华力微电子有限公司 | WAT probe card intelligent processing system and method |
| CN104101855A (en) * | 2014-07-24 | 2014-10-15 | 上海华力微电子有限公司 | Probe card electric leakage monitoring method and probe card electric leakage monitoring system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH04249335A (en) * | 1991-02-05 | 1992-09-04 | Matsushita Electron Corp | Probe inspection system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103336256A (en) * | 2013-06-26 | 2013-10-02 | 上海华力微电子有限公司 | WAT probe card intelligent processing system and method |
| CN104101855A (en) * | 2014-07-24 | 2014-10-15 | 上海华力微电子有限公司 | Probe card electric leakage monitoring method and probe card electric leakage monitoring system |
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