CN104503302B - Precision motion control system and control method thereof - Google Patents
Precision motion control system and control method thereof Download PDFInfo
- Publication number
- CN104503302B CN104503302B CN201410692715.8A CN201410692715A CN104503302B CN 104503302 B CN104503302 B CN 104503302B CN 201410692715 A CN201410692715 A CN 201410692715A CN 104503302 B CN104503302 B CN 104503302B
- Authority
- CN
- China
- Prior art keywords
- module
- dsp processor
- host computer
- data
- screen display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control By Computers (AREA)
Abstract
The invention relates to a precision motion control system and a control method thereof. The system comprises a control core module, a sensor input module, a high-voltage driving output module, a multichannel signal acquisition module, an executor module, a controlled object and a host computer screen display module. The output end of the sensor input module is connected with the input end of the control core module through the multichannel data acquisition module; the output end of the control core module is connected with the input end of the high-voltage driving output module; the host computer screen display module is in bidirectional connection with the control core module; the output end of the high-voltage driving output module is connected with the input end of the executor module; the output end of the executor module is connected with the input end of the controlled object and drives the controlled object; and the output end of the controlled object is connected with the input end of the sensor input module.
Description
Technical field
The invention belongs to displacement data acquisition technique field, especially a kind of precise flange system and its method processed.
Background technology
With scientific and technical development, especially the developing rapidly, in the even sub- nano-scale of nanometer of MEMS technology
Motion and location control have become as possibility.This gives human knowledge and utilizes microcosmos, there is provided strong instrument.So-called
Nanometer displacement location technology refers to carry out essence to controlled object (micro Process instrument or micro- survey tool) in nano-precision grade
Close control, to meet its requirement to positioning precision, kinematic accuracy and precision stability, the processing realizing there is function of measuring and
Detection operation.The application of movement control technology mostly motion platform mechanism in a variety of manners or product realizing.Its application neck
Domain is ubiquitous, including almost all of high-tech area.
Control method based on single-chip microcomputer just occurred in the eighties in 20th century, but the occasion of application is mostly right
System operation required precision and the relatively low field of operating cost, the real-time of the calculating speed of service of single-chip microcomputer is poor, in closed loop
The motion of low speed point position is can be only applied to and to running orbit less demanding control occasion in control.
New DSP kinetic control system, using more advanced modular organization, can be with on-chip system (SOC), existing
The high performance process chip such as field programmable gate array (FPGA) and ARM combines, according to different application requirements, by simple
Increase or change module and coupling system programming it is possible to extension or modification system, promptly form a new data
Acquisition system, faster, precision is higher for its arithmetic speed, is widely used in field of precision movement control.
Content of the invention
It is an object of the invention in place of overcoming the deficiencies in the prior art, providing one kind can reach precise control system pair
On the premise of the requirement of control accuracy and speed, save cost and the cycle of early stage research and development, there is extensibility, ease for use simultaneously
Precise flange system and its method processed with stability.
The present invention solves its technical problem and takes technical scheme below to realize：
A kind of precise flange system, including control core module, sensor input module, high drive output mould
Block, multi-channel signal acquiring module, executor module, control target and host computer screen display module；Sensor inputs
The output end of module is connected to the input of control core module by multi-channel data acquisition module；Control core module defeated
Go out end to be connected with the input of high drive output module；Host computer screen display module is bi-directionally connected with control core module；
The output end of high drive output module is connected with the input of executor module；The output end connection of executor module is controlled
The input of object and driving control target；The output end of controlled device is connected with the input of sensor input module.
And, the control core in described control core module is DSP Processor, and it is by data processing module, control
Module and display module are all integrated in one piece of DSP Processor, the multi-channel signal acquiring with DSP Processor as core and process
System design, be divided into following functional module by the schematic diagram completing will be designed：Completed with DSP Processor for core
The collection of data, data processing and data storage, the host interface module being communicated with main frame；The confession of power supply is provided for system
Electric module；Carry out the analog-to-digital conversion module of signals collecting and the D/A converter module changing the data that DSP Processor was processed.
And, the DSP Processor in described control core module and host computer screen display module are transmitted by USB2.0
Agreement is bi-directionally connected；DSP Processor and multi-channel signal acquiring module, high drive output module are all by address bus and control
Bus processed is connected.
And, the external one piece of SDRAM memory of DSP Processor, has also accessed one piece of FLASH memory.
And, described host computer screen display module transmits commands to control core module, and control core module controls quilt
Control object, controlled device is by feedback position information transfer to host computer screen display module.
The step of the control method of above-mentioned precise flange system is：
(1), to electricity in described control system, host computer screen display module and DSP Processor load initialization program, enter
Initial phase；
(2) send initialization success command after the completion of DSP Processor initialization to host computer screen display module, Ran Houjin
Enter wait state；
(3) host computer screen display module sends movement instruction to DSP Processor, after DSP Processor accepts movement instruction,
Enter main circulating program；
(4) the positional information of current three axial directions of x, y, z is passed by sensor input module by multi-channel data acquisition module
It is defeated by DSP Processor, DSP Processor computing draws movement velocity and direction, and result is transferred to host computer screen display mould
Result is converted into analog signal output high drive module by D/A converter module by block simultaneously, drives high drive module
Output port；
(5) high drive module realizes micrometric displacement by driving executor module to control target；
(6) current location information and displacement are passed in real time by sensor input module by multi-channel data acquisition module
It is defeated by DSP Processor, and shows in host computer screen display module, wait the operation of host computer, be finished return main program.
And, step (1) with step (3) in, after system electrification, DSP Processor is to be shown by downloader and host computer screen
Show that module connects, host computer screen display module passes through downloader to DSP Processor transmission signal acquisition instructions, DSP Processor
Obtain signals collecting instruction, enabling signal gathers and the data collecting is stored in pre-assigned space.
And, step (1) in, when Initialize installation is carried out to system, close all of interrupt setting；Starting timer is
Capacitance sensor provides clock pulse signal it is ensured that capacitance sensor normal work；Start I2C program configures D/A converter, protects
Card program can be converted to the execution that analog signal drives actuator below in time after the completion of processing；And open EDMA interruption；Judge
Whether there is interruption, have interruption to enter interrupt service subroutine, complete reception, process and the transmission of data.
And, step (4) in, after program startup optimization, multi-channel data acquisition program is responsible for log-on data collection plate and is sticked into
The collection of row signal, signals collecting program is made up of McASP and EDMA two parts program, is passed through using McASP and EDMA link
EDMA interrupts completing the collection of signal data, and the data collecting is delivered to is analyzed in DSP Processor and processes,
In McASP initialization procedure, the collection of data and transmission are all the McASP serial line interfaces using, and it is each for sending and receiving part
From independent operating.
And, when configuring EDMA, after setting up correct channel link and parameter configuration, meet interrupt condition and enter interruption
Start with EDMA channel transmission data, when a receiving data completes, store data in default space etc. to be analyzed
With calling of processing routine, DSP Processor calls this above-mentioned collection data and data is analyzed, nurses one's health, filtering and be a series of
Algorithm computing after, then by EDMA channel transfer arrive McASP transmission serializer, number is sent to by McASP serial line interface
Weighted-voltage D/A converter PCM3168A carries out D/A converter module and becomes analog signal, enables to drive performer work below.
And, step (4) in, DSP Processor according to the computing mode that the feedback information of sensor input module is carried out is：
In real time result of calculation and objective result are compared tune by the ratio of PID closed loop control algorithm, integration and derivative module
Section, until meeting error requirements, then result is transferred to host computer screen display module.
And, the (5) described executor module of step is the Piezoelectric Driving executor module of nanopositioning stage, and high pressure drives
Dynamic model block realizes nanopositioning stage microbit by the Piezoelectric Driving executor module of this nanopositioning stage to control target
Move.
Advantages of the present invention and good effect are：
1st, the present invention is directed to nanometer displacement and locating platform, designs and develop a set of Signal acquiring and processing based on DSP
System, is capable of data acquisition, real-time processing and the output of multi-channel high-accuracy, and the data of output is converted to analog quantity
Performing module motion is driven to complete motion and the positioning of micro-displacement platform.Adopted for the signal of micro-nano displacement platform by the present invention
Collection and the scheme of processing system one practical feasibility of offer.
2nd, the control core system of the present invention adopts DSP process chip, with DSP+FPGA+ARM tri- core control system phase
Than, have high accuracy, good stability, cost performance high, simple to operate the features such as, disclosure satisfy that what micro-displacement platform proposed leads to more
Road, high-precision data acquisition request.
3rd, the present invention pass through multi-channel data acquisition and processing system micro-displacement platform can realize three-D displacement movement and
Positioning, and one-dimensional, two-dimentional, three-dimensional displacement can be controlled as needed mobile and position, due to this data collecting system energy
Enough realize high-precision data acquisition, low cost, strong interference immunity, can be very good to control cost, micrometric displacement can be applied to
Platform is allowed to realize nano level positioning, is that China develops semiconductor manufacturing facility, flat panel display manufacturing apparatus, big further
Scale memory manufacturing equipment and the advanced manufacturing set industry such as Ultra-precision Turning and measurement, set up an exploitation nanometer displacement
Location technology and the basic platform of product, have important Research Significance.
Brief description
Fig. 1 is the overall structured flowchart of system in the present invention.
Fig. 2 is signal processing module collection and the processing system block diagram of the DSP Processor of the present invention；
Fig. 3 is the data processing structure block diagram with DSP Processor as core of the present invention.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings and by specific embodiment, and following examples are descriptive
, it is not determinate it is impossible to protection scope of the present invention is limited with this.
A kind of precise flange system, including control core module, sensor input module, high drive output mould
Block, multi-channel signal acquiring module, executor module, control target and host computer screen display module；Sensor inputs
The output end of module is connected to the input of control core module by multi-channel data acquisition module；Control core module defeated
Go out end to be connected with the input of high drive output module；Host computer screen display module is bi-directionally connected with control core module；
The output end of high drive output module is connected with the input of executor module；The output end connection of executor module is controlled
The input of object and driving control target；The output end of controlled device is connected with the input of sensor input module.
Wherein, the control core in described control core module is DSP Processor, and it is by data processing module, control
Module and display module are all integrated in one piece of DSP Processor, the multi-channel signal acquiring with DSP Processor as core and process
System design, be divided into following functional module by the schematic diagram completing will be designed：Completed with DSP Processor for core
The collection of data, data processing and data storage, the host interface module being communicated with main frame；The confession of power supply is provided for system
Electric module；Carry out the analog-to-digital conversion module of signals collecting and the D/A converter module changing the data that DSP Processor was processed.
DSP Processor in control core module and host computer screen display module pass through the two-way company of USB2.0 host-host protocol
Connect；DSP Processor is all connected with controlling bus by address bus with multi-channel signal acquiring module, high drive output module
Connect.
The external one piece of SDRAM memory of DSP Processor, has also accessed one piece of FLASH memory.
Described host computer screen display module transmits commands to control core module, and it is controlled right that control core module controls
As controlled device is by feedback position information transfer to host computer screen display module.
The step of the control method of above-mentioned precise flange system is：
(1), to electricity in described control system, host computer screen display module and DSP Processor load initialization program, enter
Initial phase, when carrying out Initialize installation to system, closes all of interruption setting；Start timer to carry for capacitance sensor
For clock pulse signal it is ensured that capacitance sensor normal work；Start I2C program configuration D/A converter is it is ensured that program has been processed
Cheng Houneng is converted to the execution that analog signal drives actuator below in time；And open EDMA interruption；Determine whether to interrupt, have
Interrupt entering interrupt service subroutine, complete reception, process and the transmission of data；
(2) send initialization success command after the completion of DSP Processor initialization to host computer screen display module, Ran Houjin
Enter wait state；
(3) host computer screen display module sends movement instruction to DSP Processor, after DSP Processor accepts movement instruction,
Enter main circulating program；
(4) the positional information of current three axial directions of x, y, z is passed by sensor input module by multi-channel data acquisition module
It is defeated by DSP Processor, DSP Processor computing draws movement velocity and direction, and result is transferred to host computer screen display mould
Result is converted into analog signal output high drive module by D/A converter module by block simultaneously, drives high drive module
Output port, after program startup optimization, multi-channel data acquisition program is responsible for log-on data analog input card and is carried out adopting of signal
Collection, signals collecting program is made up of McASP and EDMA two parts program, has been interrupted by EDMA using McASP and EDMA link
Become the collection of signal data, and the data collecting is delivered to be analyzed in DSP Processor and process, DSP Processor according to
The computing mode that the feedback information of sensor input module is carried out is：By the ratio of PID closed loop control algorithm, integration and differential
Result of calculation and objective result are compared regulation by module in real time, until meeting error requirements, then result are transferred to
Position machine screen display module, in McASP initialization procedure, the collection of data and transmission are all the McASP serial line interfaces using,
Sending and receiving part is respective independent operating, when configuring EDMA, after setting up correct channel link and parameter configuration, full
Sufficient interrupt condition enters interruption and starts with EDMA channel transmission data, when a receiving data completes, stores data in pre-
If space in etc. calling with processing routine to be analyzed, DSP Processor call this above-mentioned collection data and data is analyzed,
After conditioning, filtering and a series of algorithm computing, then serializer is sent by EDMA channel transfer to McASP, by McASP
Serial line interface is sent to digital to analog converter PCM3168A to carry out D/A converter module and becomes analog signal, enable to drive after hold
Row device works.
(5) high drive module passes through to drive the Piezoelectric Driving executor module of nanopositioning stage real to control target
Existing nanopositioning stage micrometric displacement；
(6) current location information and displacement are passed in real time by sensor input module by multi-channel data acquisition module
It is defeated by DSP Processor, and shows in host computer screen display module, wait the operation of host computer, be finished return main program.
Below according to accompanying drawing, the detailed operation of this said system and its control method and mentality of designing are described：
As shown in figure 1, the whole design idea of this embodiment is exactly to be come with digital signal processor for core controller
Control microbit shifting movement and the positioning of micro-displacement platform.Set an initial value using host computer and be transferred to Digital Signal Processing
Device, is converted into analog signal by D/A converter module after digital signal processor processes, is transferred to micrometric displacement motion module,
Positioned by driver drives actuator motions, and current positional information is fed back to by Digital Signal Processing by a sensor
Device, forms the control system of a closed loop.Because digital signal processor cannot directly process analog signal, need a modulus
Modular converter converts analog signals into data signal, then by digital signal processor collection and and setting value contrasted until
To the desired value setting, actuator completes micrometric displacement motion positions task stop motion to actuator motions.
After system electrification, Initialize installation can be carried out to system first, and close all of interruption setting；Start timer
There is provided clock pulse signal for capacitance sensor it is ensured that capacitance sensor normal work；Start I2C program configures D/A converter,
Guarantee program can be converted to the execution that analog signal drives actuator below in time after the completion of processing；Start McASP program, open
Transceiver channel；Start EDMA program, set up the link passage of EDMA and McASP, and open EDMA and interrupt；In determining whether
Disconnected, there is interruption to enter interrupt service subroutine, complete reception, process and the transmission of data.
In order to ensure that dsp chip can normally run, initialization should be carried out to chip according to the demand of design first and set
Put.By Initialize installation, dsp chip completes the setting of register initial value, set up interrupt vector table and peripheral components are initial
Change configuration etc..In the present invention, the Initialize installation step of DSP is：
1) initialization of device control register, setting cpu clock is inputted using external clock, timer 1 and McASP0
The pin of multiplexing is set to McASP0 pin, and the pin of timer 0 and McASP0 multiplexing is set to timer 0 pin.
2) initialization interrupt vector setting.
3) initialization timer.
4) close global interrupt.
5) PLL setting and the setting of EMIF interface etc..
After program startup optimization, multi-channel data acquisition program is responsible for the collection that log-on data analog input card carries out signal.
Signals collecting program is made up of McASP and EDMA two parts program, interrupts completing letter by EDMA using McASP and EDMA link
The collection of number, and the data collecting is delivered to be analyzed in DSP and process.
After DSP Processor has carried out analysis, conditioning, filtering and a series of algorithm computing to the data collecting, then
PCM3168A analog-digital converter is sent to by multi channel signals transmission program and carries out analog-to-digital conversion.Transmission program is also simultaneously
PCM3168A analog-digital converter undertakes the tasks such as clock configuration and register configuration.
DSP Processor sends use or McASP serial line interface, and utilizes the clock generator of McASP and frame same
Step generator provides the clock signal of normal work for PCM3168A.The connecing McASP when DSP carries out initial configuration
Receive and tranmitting data register configuration is for asynchronous work mode, receive and transmission can work independently from each other and not interfere with each other.
In order to occur without the phenomenon of loss of data when ensureing and sending, ensureing to meet PCM3168A's during configurable clock generator frequency
In the case of timing requirements, the speed that data transmission rate data receives must also be made to be consistent.And note sending formatting
Unit mask register configuration and send data bit stream data form register configuration it is ensured that receiving data form and send number
According to self-consistentency, in order to avoid making the data of output make a mistake.
When configuring the register of PCM3168A digital to analog converter using DSP Processor as main frame, PCM3168A digital-to-analogue turns
Parallel operation, as slave, after setting register parameters to be configured, detects I2Whether C bus hurries, and sets in slave if not being in a hurry
Need the address of configuration, and produce the condition starting to send data to start data transfer, the value write slave domestic demand setting
Will be in built-in address, in order to ensure that data can be completely written in slave subaddressing, time delay is waited for a period of time, and is sent completely
Produce stop condition afterwards and close I2C bus.
Due to PCM3168A be one eight passages output digital-to-analogue conversion device, and we only employ three therein defeated
Go out passage, in order to reduce chip power consumption reduce chip caloric value, during configuration register close PCM3168A ADC portion and
DAC portion useless.
Claims (5)
1. a kind of precise flange system, including control core module, sensor input module, high drive output module,
Multi-channel signal acquiring module, executor module, control target and host computer screen display module；Sensor input module
Output end be connected to the input of control core module by multi-channel signal acquiring module；The output end of control core module
It is connected with the input of high drive output module；Host computer screen display module is bi-directionally connected with control core module；High pressure
The output end driving output module is connected with the input of executor module；The output end of executor module connects control target
Input and drive control target；The output end of control target is connected with the input of sensor input module；
Control core in described control core module is DSP Processor, and it is by data processing module, control module and display
Module is all integrated in one piece of DSP Processor, and the multi-channel signal acquiring with DSP Processor as core is set with the system processing
Meter, is divided into following functional module by designing the schematic diagram completing：Adopting of data is completed for core with DSP Processor
Collection, data processing and data storage, the host interface module being communicated with main frame；The supply module of power supply is provided for system；
Carry out the analog-to-digital conversion module of signals collecting and the D/A converter module changing the data that DSP Processor was processed；
It is characterized in that：The control method of described precise flange system, its step is：
(1) to electricity in described control system, host computer screen display module and DSP Processor load initialization program, enter initial
The change stage；
When Initialize installation is carried out to system, close all of interruption setting；Starting timer provides clock for capacitance sensor
Pulse signal is it is ensured that capacitance sensor normal work；Start I2C program configuration D/A converter it is ensured that program process after the completion of energy
Be converted to the execution that analog signal drives actuator below in time；And open EDMA interruption；Determine whether interrupt, have interrupt into
Enter interrupt service subroutine, complete reception, process and the transmission of data, configure EDMA when, set up correct channel link and
After parameter configuration, meet interrupt condition entrance interruption and start with EDMA channel transmission data, when a receiving data completes, will
Data storage the calling with processing routine to be analyzed such as in default space, DSP Processor calls this above-mentioned collection data right
Data be analyzed, nurse one's health, filtering and a series of algorithm computing after, then by EDMA channel transfer arrive McASP send go here and there
Row device, is sent to digital to analog converter PCM3168A by McASP serial line interface and carries out D/A converter module and become analog signal, is allowed to
Performer work below can be driven；
(2) send initialization success command after the completion of DSP Processor initialization to host computer screen display module, subsequently into etc.
Treat state；
(3) host computer screen display module sends movement instruction to DSP Processor, after DSP Processor accepts movement instruction, enters
Main circulating program；
(4) the positional information of current three axial directions of x, y, z is given by sensor input module by multi-channel signal acquiring module transfer
DSP Processor, DSP Processor computing draws movement velocity and direction, and result is transferred to host computer screen display module, with
When result is converted into analog signal output high drive module by D/A converter module, drive the output of high drive module
Port；
After program startup optimization, multi-channel data acquisition program is responsible for the collection that log-on data analog input card carries out signal, signal
Capture program is made up of McASP and EDMA two parts program, interrupts completing signal number by EDMA using McASP and EDMA link
According to collection, and the data collecting is delivered to be analyzed in DSP Processor and process, in McASP initialization procedure, number
According to collection and send all be use McASP serial line interface, send and receive part be respective independent operating；
DSP Processor according to the computing mode that the feedback information of sensor input module is carried out is：By PID closed loop control algorithm
Ratio, integration and derivative module in real time result of calculation and objective result are compared regulation, until meeting error requirements,
Again result is transferred to host computer screen display module；
(5) high drive module realizes micrometric displacement by driving executor module to control target；
(6) current location information and displacement are transferred in real time by sensor input module by multi-channel signal acquiring module
DSP Processor, and show in host computer screen display module, wait the operation of host computer, be finished return main program；
Described step (1) with step (3) in, after system electrification, DSP Processor is by downloader and host computer screen display mould
Block connects, and host computer screen display module passes through downloader to DSP Processor transmission signal acquisition instructions, and DSP Processor obtains
Signals collecting instructs, and enabling signal gathers and the data collecting is stored in pre-assigned space.
2. precise flange system according to claim 1 it is characterised in that：DSP in described control core module
Processor and host computer screen display module are bi-directionally connected by USB2.0 host-host protocol；DSP Processor and multi channel signals are adopted
Collection module, high drive output module are all connected with controlling bus by address bus.
3. precise flange system according to claim 1 it is characterised in that：The external one piece of SDRAM of DSP Processor deposits
Reservoir, has also accessed one piece of FLASH memory.
4. precise flange system according to claim 1 it is characterised in that：Described host computer screen display module passes
Defeated order to control core module, control core module controls control target, and control target is by feedback position information transfer
To host computer screen display module.
5. described precise flange system according to claim 1 control method it is characterised in that：In step (5)
In, described executor module is the Piezoelectric Driving executor module of nanopositioning stage, and high drive module passes through this nanometer
The Piezoelectric Driving executor module of locating platform realizes nanopositioning stage micrometric displacement to control target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410692715.8A CN104503302B (en) | 2014-11-26 | 2014-11-26 | Precision motion control system and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410692715.8A CN104503302B (en) | 2014-11-26 | 2014-11-26 | Precision motion control system and control method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104503302A CN104503302A (en) | 2015-04-08 |
| CN104503302B true CN104503302B (en) | 2017-02-22 |
Family
ID=52944706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410692715.8A Active CN104503302B (en) | 2014-11-26 | 2014-11-26 | Precision motion control system and control method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104503302B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105589385B (en) * | 2016-01-29 | 2017-11-17 | 福州大学 | The driving control system and its implementation of three chip type polarization state encoders |
| CN110879532B (en) * | 2019-12-11 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Control system and design method |
| CN113485200A (en) * | 2021-07-30 | 2021-10-08 | 蔚来汽车科技(安徽)有限公司 | Control apparatus, method, mobile equipment and storage medium for electronic device |
| CN118348832A (en) * | 2024-04-17 | 2024-07-16 | 重庆科创水处理设备有限公司 | Flow control system and method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0447571A (en) * | 1990-06-15 | 1992-02-17 | Hitachi Ltd | magnetic disk device |
| JP2000292157A (en) * | 1999-04-02 | 2000-10-20 | Kuroda Precision Ind Ltd | Measuring method of surface shape of thin plate |
| CN100495119C (en) * | 2007-10-31 | 2009-06-03 | 大连海事大学 | Three-point dynamic laser collimation system |
| CN201773112U (en) * | 2010-07-27 | 2011-03-23 | 苏州海兹思纳米科技有限公司 | Relocation system of AFM |
| KR101104629B1 (en) * | 2011-11-03 | 2012-01-12 | (주)케이엠넷 | Creep Measurement System for Evaluation of Physical Properties of Specimen |
| CN103336146A (en) * | 2013-06-24 | 2013-10-02 | 苏州海兹思纳米科技有限公司 | Sample moving platform based on piezoceramic scanner and control method thereof |
| CN103546060B (en) * | 2013-11-04 | 2016-11-02 | 兰州大学 | A Nano Manipulator High Voltage Control Power Supply System |
| CN103926800B (en) * | 2014-03-27 | 2015-11-25 | 中国科学院长春光学精密机械与物理研究所 | The circuit structure that a kind of photoetching projection objective lens micrometric displacement controls |
-
2014
- 2014-11-26 CN CN201410692715.8A patent/CN104503302B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104503302A (en) | 2015-04-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104503302B (en) | Precision motion control system and control method thereof | |
| WO2015106582A1 (en) | Dsp/fpga-based dynamically-configurable tool intelligent controller, and control method | |
| CN102591250B (en) | Dual-CPU (central processing unit) combined type motion controller | |
| CN105242640A (en) | Novel high-speed and high-precision multi-axis servo motion controller circuit | |
| CN102806683A (en) | Special PCI (Peripheral Component Interconnect)-based hydraulic machine motion control method and controller | |
| CN105680735A (en) | ARM processor-based four-axis servo motor motion control card and method | |
| CN102520689A (en) | Embedded controller based on Godson processor and FPGA (Field Programmable Gate Array) technology | |
| CN104898466B (en) | A communication control circuit of a laser tracker | |
| CN202995403U (en) | Portable data acquisition instrument based on embedded operation system | |
| CN201478881U (en) | Power controller based on SOPC | |
| CN203070045U (en) | Embedded numerical control motion control platform used for multi-spindle machine tool | |
| CN208588917U (en) | An industrial robot motion controller based on ARM+DSP+FPGA | |
| CN105353670A (en) | Embedded motion controller of humanoid robot | |
| CN103984349B (en) | SOPC-based spatial rope-tied robot control system and method | |
| CN100441483C (en) | An Integrated Magnetic Suspension Control Moment Gyro Control Platform | |
| CN101718985B (en) | EPA bus and Profibus-DP bus conversion adapter | |
| CN103064477B (en) | Method for designing server motherboard | |
| CN104816635A (en) | Automobile dashboard and implementation method thereof | |
| CN100492231C (en) | Six degrees of freedom real-time active vibration control system based on DSP control card | |
| CN102536203A (en) | Handheld type condition monitoring and fault diagnosing system orienting to oil field injection-production equipment | |
| Yu et al. | Development of ARM-based embedded system for robot applications | |
| CN207359076U (en) | A kind of robot control system and robot | |
| CN101169659A (en) | Control system integrated test set | |
| CN202195978U (en) | A fully automatic material testing machine measurement and control device | |
| CN102841556B (en) | Low speed Full-automatic spot gluing machine people servo controller in a kind of diaxon |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20170117 Address after: 301700 Tianjin Fuyuan Wuqing Development Zone on the north side of business headquarters base building C21 Applicant after: Three precision control (Tianjin) Technology Co., Ltd. Address before: 300399 Tianjin City, Dongli Development Zone Dongli two weft Road No. 22 East Timor ancient Park Building No. 7 1 Applicant before: Tianjin Sanjing Precision Instruments Co., Ltd. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170330 Address after: 301700 Tianjin City, Wuqing Fuyuan Road on the north side of business headquarters base building C21 Patentee after: Three British precision control (Tianjin) instrument equipment Co., Ltd. Address before: 301700 Tianjin Fuyuan Wuqing Development Zone on the north side of business headquarters base building C21 Patentee before: Three precision control (Tianjin) Technology Co., Ltd. |
|
| TR01 | Transfer of patent right |