CN100492231C - Six degrees of freedom real-time active vibration control system based on DSP control card - Google Patents

Abstract

Six degrees of freedom real-time active vibration control system based on DSP control card, including: base, six degrees of freedom vibration reduction platform, charge amplifier and low-pass filter, power amplifier, signal conditioning circuit and DSP control card, six acceleration sensor detection The 6-way error signals transmitted from the interference source to the vibration reduction platform, these 6-way error signals pass through 6-way charge amplifiers and 6-way low-pass filters, and a total of 7 signals of disturbance signals from the interference source enter the DSP control card; DSP control The card controls two A/D converters to collect the 7-channel signals, and then performs real-time analysis and control calculation through its control algorithm, and outputs the 6-channel digital quantities to be controlled to the two D/A converters. After the digital signal is amplified by the 6-way power amplifier, it is provided to the six giant magnetostrictive actuators, so that the actuators produce corresponding elongation or contraction, detected by six acceleration sensors, and fed back to the DSP control card by the low-pass filter , so repeated, real-time active vibration control with six degrees of freedom is realized. The invention has the advantages of fast, real-time and high-precision control, and effectively improves the anti-interference ability of the system.

Description

Six degrees of freedom real-time active vibration control system based on DSP control card

technical field

The invention relates to a six-degree-of-freedom vibration control system, in particular to a six-degree-of-freedom real-time active vibration control system based on a DSP control card, which is used for micro-amplitude high-precision active vibration control.

Background technique

In some precision instruments in the industrial field, the control system has very high requirements on the stability of the base, such as semiconductor processing, precision optical instrument processing, etc. The vibration level of the base is required to be measured in microns for translation and micro-radians for rotation. On the basis of real-time measurement and real-time testing of the vibration input of the base and the response of the base platform, through the control algorithm provided by the computer and the giant magnetostrictive actuator, it can be used in the environment of low-frequency micro-amplitude vibration of the base. Hold steady. Most of the existing control systems are composed of industrial control machines, A/D and D/A cards, which are bulky, have poor anti-interference ability, and do not have real-time and fast control functions.

Contents of the invention

The technical problem of the present invention is to overcome the deficiencies of the prior art, provide a fast, real-time and high-precision control, and effectively improve the anti-interference ability of the system, a six-degree-of-freedom real-time active vibration control system based on a DSP control card.

The technical solution of the present invention: a six-degree-of-freedom real-time active vibration control system based on a DSP control card, which is characterized in that it includes: a base, a six-degree-of-freedom vibration damping platform, a charge amplifier and a low-pass filter, a power amplifier, and a signal conditioning circuit and DSP control card, the six-degree-of-freedom vibration-damping platform is located on the base, and the six acceleration sensors in the six-degree-of-freedom vibration-damping platform detect the 6-way error signals transmitted from the interference source to the vibration-damping platform, and the 6-way error signals pass through the 6-way charge amplifier and 6-way low-pass filter, and after the disturbance signal of the interference source passes through the low-pass filter, a total of 7-way signals enter the DSP control card; the DSP control card controls two A/D converters to collect these 7-way signals , and then conduct real-time analysis and control calculation through the control algorithm of the DSP control card, output the 6 digital quantities to be controlled to two D/A converters, convert them into 6 analog quantities and output them to the rear 6 low-pass filters After being amplified by the 6-way power amplifier, the 6-way analog quantity is provided to the six giant magnetostrictive actuators, so that the actuators can elongate or contract accordingly, and the upper plane of the platform Keep relatively stable, and then detect through six acceleration sensors, and then feed back to the DSP control card through a low-pass filter, and so on, so as to realize real-time active vibration control with six degrees of freedom.

Described DSP control card comprises DSP circuit, power management circuit, A/D converter, D/A conversion circuit, logic sequence control circuit, asynchronous serial port RS232 conversion circuit, power management circuit provides stable power supply circuit for DSP circuit, makes The DSP circuit can work normally; the A/D converter, which is connected with the DSP circuit, converts the input analog signal into a digital signal; the D/A conversion circuit, connected with the DSP circuit, converts the digital signal into an analog signal; logic Timing control CPLD circuit is connected with DSP circuit, A/D converter, D/A converter and bus transmitter and receiver respectively, and is used for logic timing control of A/D converter, D/A converter and bus transmitter and receiver ; The asynchronous serial port RS232 level conversion circuit is connected with the DSP circuit and the upper computer respectively, and is used to transmit the data to the upper computer.

Described DSP control card comprises core board circuit and expansion board circuit, and the pin of core board joins with the socket of expansion board, makes the two become one: core board circuit comprises DSP circuit, power supply management circuit, and DSP circuit is connected with core respectively. Board power management circuit, synchronous dynamic random access memory and flash memory are connected; expansion board circuit includes two A/D converters, two D/A converters, logic timing control CPLD circuit, asynchronous serial port RS232 level conversion circuit And the expansion board power management circuit, the core board power management circuit provides a stable power supply circuit for the DSP circuit, so that the DSP circuit can work normally; through the pins and sockets between the core board and the expansion board, the A/D converter, and the DSP The circuit is connected to convert the input analog signal into a digital signal; the D/A converter is connected to the DSP circuit to convert the digital signal into an analog signal; the logic sequence control CPLD circuit is connected to the DSP circuit, A/D converter, The D/A converter is connected with the bus transmitter and receiver for logic sequence control of the A/D converter, D/A converter and bus transmitter and receiver; the asynchronous serial port RS232 level conversion circuit is connected with the DSP circuit and the host computer respectively It is used to transmit data to the host computer.

Compared with the prior art, the present invention has the advantages that: the damping function of the six-degree-of-freedom damping platform at a slight amplitude (micron level) and low frequency (10-100 Hz) can be realized by adopting a DSP-based control card; The volume of the main control equipment improves the anti-interference ability of the system, and the work is stable; the experiment proves that the vibration reduction effect reaches more than 95%. In addition, the DSP-based control card is used to digitize and integrate the hardware circuit, and the input voltage range can be switched to ±5V or ±10V, realizing a high-performance DSP control card circuit. In addition, the DSP of the present invention can also adopt a stacked structure, that is, the DSP circuit and other circuits are not on the same circuit board, and has the characteristics of strong interchangeability. According to actual control needs, only the core board or the expansion board can be replaced without replacing all of them. The circuit board is enough, especially easy to maintain.

Description of drawings

Fig. 1 is a block diagram of the present invention;

Fig. 2 is the block diagram of DSP control card circuit structure of the present invention;

Fig. 3 is a flow chart of the DSP control card work program of the present invention;

Fig. 4 is the block diagram of CPLD logic of the present invention, sequence control circuit;

Fig. 5 is that DSP chip of the present invention controls the logic sequence control figure of A/D converter, bus transmitter receiver by CPLD;

Fig. 6 is that DSP chip of the present invention controls the logic sequence control figure of D/A converter, bus transmitter receiver by CPLD;

Fig. 7 is a block diagram of the power management circuit of the present invention;

Fig. 8 is a schematic diagram of the asynchronous serial port RS232 conversion circuit of the present invention;

Fig. 9 is the functional block diagram of common adaptive filter LMS;

Fig. 10 is the LMS control schematic diagram of the present invention;

Fig. 11 is the flow chart of the LMS control algorithm of the present invention;

Figure 12 and Figure 13 are control effect diagrams of the present invention, wherein Figure 12 shows six error signals collected by A/D during the control process, and Figure 13 shows six control output quantities output by D/A during the control process.

Detailed ways

As shown in Figure 1, the present invention comprises: base, six-degree-of-freedom vibration-damping platform, charge amplifier and low-pass filter, power amplifier, signal conditioning circuit and DSP control card, and six-degree-of-freedom vibration-damping platform is positioned on the base, The six acceleration sensors in the six-degree-of-freedom vibration damping platform detect 6 error signals transmitted from the interference source to the vibration damping platform. The 6 error signals pass through the 6 charge amplifiers and 6 low-pass filters respectively, and After the disturbance signal passes through the low-pass filter, a total of 7 signals enter the DSP control card; the DSP control card controls two A/D converters to collect these 7 signals, and then performs real-time analysis and control calculation through the control algorithm of the DSP control card. Output the 6 channels of digital quantities to be controlled to two D/A converters, convert them into 6 channels of analog outputs, and send them to the rear 6 channels of low-pass filters to convert them into smooth analog outputs. The 6 channels of analog quantities are passed through After the 6-way power amplifier is amplified, it is provided to six giant magnetostrictive actuators, so that the actuators can elongate or contract accordingly, and the upper plane of the platform remains relatively stable. After being detected by six acceleration sensors, it passes through a low-pass filter. Feedback to the DSP control card, so repeated, so as to achieve real-time active vibration control of six degrees of freedom.

As shown in Fig. 2, described DSP control card comprises DSP circuit, power management circuit, A/D converter, D/A conversion circuit, logic sequence control circuit, asynchronous serial port RS232 conversion circuit, power management circuit provides DSP circuit A stable power supply circuit enables the DSP circuit to work normally; A/D converter, which connects with the DSP circuit, converts the input analog signal into a digital signal; D/A conversion circuit, connects with the DSP circuit, converts the digital signal Converted into analog signals; logic timing control CPLD circuit is connected with DSP circuit, A/D converter, D/A converter and bus transmitter and receiver respectively, for A/D converter, D/A converter and bus transmission Receiver's logic timing control; asynchronous serial port RS232 level conversion circuit is connected with DSP circuit and host computer respectively, and is used to transmit data to host computer.

In addition, the DSP control card of the present invention can also adopt a stacked structure, that is, the DSP circuit and other circuits are not on the same circuit board, and it mainly includes a core board circuit and an expansion board circuit, and the pins of the core board are connected with the sockets of the expansion board. , so that the two become one: the core board circuit includes a DSP circuit, a power management circuit, and the DSP circuit is connected to the core board power management circuit, synchronous dynamic random access memory and flash memory respectively; the expansion board circuit includes two A/D converters device, two D/A converters, logic timing control CPLD circuit, asynchronous serial port RS232 level conversion circuit and expansion board power management circuit, the core board power management circuit provides a stable power supply circuit for the DSP circuit, so that the DSP circuit can work normally ; Through the pins and sockets between the core board and the expansion board, the A/D converter is connected with the DSP circuit, and the input analog signal is converted into a digital signal; the D/A converter is connected with the DSP circuit, and the The digital signal is converted into an analog signal; the logic timing control CPLD circuit is connected with the DSP circuit, A/D converter, D/A converter and bus transmitter and receiver respectively, and is used for the A/D converter, D/A converter and The logic timing control of the bus transmitter and receiver; the asynchronous serial port RS232 level conversion circuit is connected with the DSP circuit and the upper computer respectively, and is used to transmit the data to the upper computer.

As shown in Figure 3, the working program flow of the DSP control card: (1) power on the DSP control card; (2) bootloader loading (copy the bootloader from the Flash ROM to address 0 of the memory); (3) DSP Chip initialization configuration, red and green indicator lights flashing; (4) Wait for the upper computer to modify parameters through serial port communication. The red and green indicator lights are on; (5) whether the control word for parameter modification is received: if received, go to the next step; if not received, return to (4); (6) enable the timer interrupt. The green indicator light is off, and the red indicator light is always on. Start to control with the LMS algorithm; (7) whether to receive the command word of abnormal exit: if received, return to (4), if not received, proceed to the next step; (8) interrupt arrival, run the LMS algorithm: A /D sampling, data processing, sending data to D/A; (9) comparing the processed data with relevant conditions: if the conditions are met, proceed to the next step, and the control is completed; if the conditions are not met, return to (7); (10) Turn off the timer interrupt. The red and green indicator lights are on; (11) Save data: through asynchronous serial communication, the data sampled by the A/D and the data sent to the D/A after processing are sent to the host computer; (12) The red and green indicator lights flash alternately , the system control process is completed.

The DSP circuit of the present invention comprises a DSP chip, a synchronous dynamic random access memory SDRAM, a flash memory Flash ROM and a clock circuit, the synchronous dynamic random access memory is used for storing data, and the flash memory is used for storing a starting program. The DSP chip used is the TMS320C6000 series of American TI Company, which has a super-long instruction word structure; the synchronous dynamic random access memory SDRAM adopts 4Banks×4M×16bits HY57V561620CT or HY57V561620CLT or HY57V561620CTP or HY57V561620CLTP series; the flash memory Flash ROM adopts 512K× 16bits MBM29LV800TE or MBM29LV800BE series. The technical indicators of the DSP control card of the present invention are: DSP chip operating frequency: 160MHz; sampling frequency: 1000Hz; input voltage range: ±5V; output voltage range: ±10V; asynchronous serial port baud rate: 115200bps; maximum current: 0.5A.

The A/D converter in the present invention needs two AD1 and AD2, and each A/D converter has a resolution of 12 bits, simultaneous conversion of four channels, and parallel data output, and its model can be AD7864AS. The D/A conversion circuit also needs two DA1 and DA2, each D/A has a resolution of 12 bits, four-channel voltage output, and parallel data input, and its chip model can be DAC8412; the bus receiver is used for different devices The level matching of the bus can control the direction of the data transmitted by the bus. Its model can be 74LV16245 series; the logic sequence control circuit uses a complex programmable logic device CPLD chip, and its model can be XC9500XL series. DSP chip and A/D converter data The pins are connected in parallel with the data pins of the D/A converter, and the complex programmable logic device CPLD performs logic such as enabling, converting, reading and writing control of the A/D converter, D/A converter and bus transceiver Timing control, as shown in Figure 4.

As shown in Figure 5, the logic timing control process of the DSP chip controlling the two A/D converters and bus transceivers through the complex programmable logic device CPLD is as follows: CONVST of AD1 and AD2 is high-low-high, indicating The DSP chip notifies AD1 and AD2 that conversion is about to begin. AD1 and AD2 start to collect data when CONVST is stable at high level (two ADs are collected at the same time, so the actual time is only the conversion time of one AD), and complete the conversion from analog to digital. After the conversion is completed, the CS of AD1 changes from high to low, and the RD of AD1 goes through four levels—high-low-high. During the period when RD (AD1) is low, OE (16245) is low, and the conversion is complete. The amount of data appears on the data bus (the direction of the bus is from AD1 to the DSP chip), at this time the DSP chip can read the four data in sequence, and then CS(AD1), RD(AD1) and OE(16245) become high level. The same is true for AD2, just read three data. A total of seven data are read. One AD conversion is completed. CONVST, CS, and RD are all active low.

As shown in Figure 6, the logic timing control of the DSP chip controlling the two D/A converters and the bus transceiver through the CPLD is as follows: Since each DA outputs a channel (the program will determine which channel of which DA is output) , so one of the DAs is used to illustrate. The RESET of DA changes from high-low-high level, so that the output voltage of the four output channels of DA1 and DA2 is zero, which is only used after the program starts and the control is completed, and it is not operated during the program running. LDAC and CS are high-low, and DA starts a new analog output. At this time, R/W becomes low level. Before that, A0 and A1 should select which DA channel to output. During the period when R/W is low, the DSP chip writes the digital quantity to be output into the conversion register of DA through the data bus. After that, R/W, CS and LDAC become high level in turn. A DA conversion output is completed. LDAC, CS, and R/W are all active low.

As shown in Figure 7, the external power supply of the DSP control card of the present invention is +5V, and this +5V power supply directly provides +5V power supply for the A/D conversion device after the power socket; Convert +5V to ±15V to provide ±15V power for D/A converters and voltage reference devices of D/A converters; use LDO linear voltage regulator LM1086 to convert +5V to +3.3V for CPLD and bus transmission and reception The device provides +3.3V power; use the LDO linear voltage regulator TPS62046 to convert +5V into +3.3V, and provide +3.3V power for the DSP chip, synchronous dynamic random access memory and flash memory; use the LDO linear voltage regulator TPS62040 to convert +5V is converted into +1.2V, which is the +1.2V power supply for the DSP chip.

As shown in FIG. 8 , it is a schematic diagram of the asynchronous serial port RS232 conversion circuit of the present invention. When the DSP chip performs serial communication, it uses its multi-channel buffer serial port McBSP, which is a synchronous serial interface and does not support the Universal Asynchronous Receiver Receiver (UART) standard. However, through software settings, as long as the serial register on the DSP chip is simply changed, the asynchronous serial communication between the DSP chip and the host computer can be realized. The specific connection method is shown in the figure. Its McBSP data input DR and frame synchronization input FSR are connected to the UART transmission data line Tx, and the UART reception data line Rx is connected to the McBSP data output line DX.

As shown in FIG. 9 , the functional block diagram of the adaptive filter LMS illustrates that the number of delay units (N) is called a tap of the filter, and each delay unit is represented by a unit delay operator z ⁻¹ . In particular, when performing z ^-1 operation on x(k), the resulting output is x(k-1). w _i (k) is the tap weight, i=0, 1, . . . , N-1. k refers to a certain moment, then

The input vector is $x\left(k\right)=\left[\begin{array}{c}x\left(k\right)\\ x(k-1)\\ \text{\&Center Dot;}\\ \&Center\; Dot;\\ \&Center\; Dot;\\ x(k-N+1)\end{array}\right],$ The weight vector is $W\left(k\right)=\left[\begin{array}{c}{w}_0\left(k\right)\\ w_1\left(k\right)\\ \text{\·}\\ \·\\ \·\\ w_{N-1}\left(k\right)\end{array}\right]$

Where X(k) refers to the time series x(k), x(k-1), ..., x(k-N+1) is a vector composed of elements, and the weight vector W(k) refers to the tap weight w ₀ (k), w ₁ (k), ..., w _N-1 (k) is a vector.

As shown in Figure 10, it is the LMS control schematic diagram of the present invention, and what AD collects is x(k) (for disturbance) and e0(k), e1(k), e2(k), e3(k), e4( k) and e5(k) (for error), a total of seven AD input channels, DA output is f0(k), f1(k), f2(k), f3(k), f4(k) and f5( k) (to control the output), a total of six DA output channels. Fig. 10 is a functional block diagram of implementing system identification function by applying six adaptive filter LMS algorithms. Similarly, because the specific control model of the entire system and actuators is unknown, six LMS algorithms are used to model the six actuators online and control the controlled system. Common multiple-input multiple-output systems generally have input-output coupling phenomena, namely: e0(k), e1(k), e2(k), e3(k), e4(k), e5(k) and f0(k) , f1(k), f2(k), f3(k), f4(k), f5(k) are not one-to-one correspondence, like f0(k) may be related to e0(k), e1(k), e2 (k), e3(k), e4(k), and e5(k) all have input-output relations, and the present invention solves this problem, decoupling the input-output of the system, so that e0(k), e1(k ), e2(k), e3(k), e4(k), e5(k) and f0(k), f1(k), f2(k), f3(k), f4(k), f5(k ) establishes a one-to-one correspondence. In this way, the present invention can use six single-input and single-output control methods for control, which is reflected in the flow of the control method, that is, the six LMS control algorithms control the corresponding actuators separately and independently.

As shown in Figure 11, the flow chart of the LMS control algorithm for adding, judging, sampling and interrupting in the present invention, the specific single-input and single-output LMS control algorithm is as follows: the basic flow of the specific six-input and six-output LMS control algorithm is similar to that of single-input and single-output, However, within 1ms, the DSP control card needs to complete six single-input and single-output calculations. The specific six-input and six-output LMS control algorithm is as follows:

As shown in Figures 12 and 13, they are control effect images of the present invention. The first 1000 sampling times (1 ms) did not apply the LMS control algorithm to the vibration isolation platform, which was used to compare the effect before and after applying the LMS control algorithm. Figure 12 shows the error signals e0(k), e1(k), e2(k), e3(k), e4(k) and e5(k) collected by A/D, which are sequentially compared with the first and second in the figure , 3, 4, 5 and 6 channel error signal image corresponding; Figure 13 is the control output of D/A output f0(k), f1(k), f2(k), f3(k), f4(k) and f5(k), corresponding to the control signal images of channels 1, 2, 3, 4, 5 and 6 in the figure in turn. Starting from the 1001st sampling time, in the same sampling time interval, the corresponding error signal e _i (k) and control output signal f _i (k) are completed in the same sampling period (i=0, 1, ..., 5), a total of 8000 samples were taken, and the actual control time was 7s. It can be seen from Figure 12 that the effect of applying LMS control algorithm and not applying LMS control algorithm is obvious.

Claims (9)

1. A six-degree-of-freedom real-time active vibration control system based on a DSP control card, characterized in that it includes: a base, a six-degree-of-freedom vibration damping platform, a charge amplifier and a low-pass filter, a power amplifier, a signal conditioning circuit and a DSP control card, The six-degree-of-freedom vibration-damping platform is located on the base, and the six acceleration sensors in the six-degree-of-freedom vibration-damping platform detect the 6-way error signals transmitted from the interference source to the vibration-damping platform. The 6-way error signals pass through the 6-way charge amplifier and the 6-way low-pass filter, and after the disturbance signal of the interference source passes through the low-pass filter, a total of 7-way signals enter the DSP control card; the DSP control card controls two A/D converters to collect these 7-way signals, and then controls them through the DSP The LMS control algorithm of the card performs real-time analysis and control calculation, outputs the 6 digital quantities to be controlled to two D/A converters, converts them into 6 analog quantities and outputs them to the rear 6 low-pass filters, and converts them into Smooth analog output, the 6-channel analog output is amplified by 6-channel power amplifiers, and then provided to six giant magnetostrictive actuators, so that the actuators can elongate or contract accordingly, and the upper plane of the platform remains relatively stable. Then it is detected by six acceleration sensors, and then fed back to the DSP control card through a low-pass filter, so repeated, so as to realize real-time active vibration control with six degrees of freedom; the described LMS control algorithm is: (1) Initialization of control program variables: determine the number of taps of the filter, initialize the 6-way iteration step size, initialize each element in the 6-way filter weight coefficient vector, initialize each element in the 6-way input vector, and initialize 6 Each element in the road output vector; (2) Whether the interrupt is coming: if not, then wait there, if there is, then enter step (3) in the interrupt service routine; (3) Interrupt service routine: j=0, (a) A/D collects the interference signal of the current moment of data and the error signal of the j road; According to the current data collection, the algorithm carries out the following operations to the j road signal: update the input vector, Update the filter coefficients, calculate the output of the j-th filter, and output the j-th control quantity by D/A; j is accumulated; if j is less than 6, the program returns to (a) to continue execution, otherwise, the interrupt service routine ends; (4) Whether the set number of cycles is reached: if the number of cycles is not reached, transfer to step (2). If the number of cycles is reached, the control algorithm is terminated and the control is completed. 2. The six-degree-of-freedom real-time active vibration control system based on the DSP control card according to claim 1, characterized in that: the DSP control card includes a DSP circuit, a power management circuit, an A/D converter, a D/A Conversion circuit, logic timing control circuit, asynchronous serial port RS232 conversion circuit, power management circuit provides stable power supply circuit for DSP circuit, so that DSP circuit can work normally; A/D converter, which connects with DSP circuit, converts the input analog The signal is converted into a digital signal; the D/A conversion circuit is connected with the DSP circuit to convert the digital signal into an analog signal; the logic timing control CPLD circuit is respectively connected with the DSP circuit, the A/D converter, the D/A converter and the bus. The receiver is connected for the logic timing control of the A/D converter, D/A converter and bus transmitter receiver; the asynchronous serial port RS232 level conversion circuit is respectively connected with the DSP circuit and the host computer for data transmission to the upper computer. 3. The six-degree-of-freedom real-time active vibration control system based on the DSP control card according to claim 1, characterized in that: the DSP control card includes a core board circuit and an expansion board circuit, the pins of the core board and the expansion board The sockets are connected to make the two become one: the core board circuit includes DSP circuit, power management circuit, and the DSP circuit is connected with the core board power management circuit, synchronous dynamic random access memory and flash memory respectively; the expansion board circuit includes two A/D converter, two D/A converters, logic timing control CPLD circuit, asynchronous serial port RS232 level conversion circuit and expansion board power management circuit, the core board power management circuit provides a stable power supply circuit for the DSP circuit, so that the DSP The circuit can work normally; through the pins and sockets between the core board and the expansion board, the A/D converter is connected to the DSP circuit to convert the input analog signal into a digital signal; the D/A converter is connected to the DSP circuit Connected to convert the digital signal into an analog signal; the logic sequence control CPLD circuit is respectively connected with the DSP circuit, A/D converter, D/A converter and bus transmitter receiver for the A/D converter, D/ The logic sequence control of the A converter and the bus transmitter and receiver; the asynchronous serial port RS232 level conversion circuit is connected with the DSP circuit and the upper computer respectively, and is used to transmit the data to the upper computer. 4. The six-degree-of-freedom real-time active vibration control system based on the DSP control card according to claim 2 or 3, characterized in that: the DSP circuit includes a DSP chip, a synchronous dynamic random access memory SDRAM, and a flash memory Flash ROM And the clock circuit, the synchronous dynamic random access memory is used to store data, and the flash memory is used to store the startup program. 5. The six-degree-of-freedom real-time active vibration control system based on DSP control card according to claim 4, characterized in that: said DSP chip is TMS320C6000 series of American TI Company, which has a super long instruction word structure. 6. The six-degree-of-freedom real-time active vibration control system based on DSP control card according to claim 4, characterized in that: the synchronous dynamic RAM model is 4Banks×4M×16bits HY57V561620CT or HY57V561620CLT or HY57V561620CTP or HY57V561620CLTP series, the flash memory model is 512K×16bits MBM29LV800TE or MBM29LV800BE series. 7. The six-degree-of-freedom real-time active vibration control system based on the DSP control card according to claim 2 or 3, characterized in that: the A/D converter has a resolution of 12 bits, four-channel simultaneous conversion, and parallel data output. 8. The six-degree-of-freedom real-time active vibration control system based on DSP control card according to claim 2 or 3, characterized in that: the D/A converter has a resolution of 12 bits, four-channel voltage output, parallel data enter. 9. The six-degree-of-freedom real-time active vibration control system based on DSP control card according to claim 2 or 3, characterized in that: the logic sequence control circuit is realized by CPLD chip XC9500XL series.

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