Summary of the invention
The object of the invention is need in vacuum tank, carry out in order to solve existing plasma thruster experiment, change probe and need to close and restart vacuum system, elapsed time is long, and homogeneous experiment does not easily produce the problem of experimental error.And then provide a kind of can be at the multiprobe support of three-degree-of-freedom motion.
Technical scheme of the present invention is: a kind ofly can comprise at the multiprobe support of three-degree-of-freedom motion lifting platform, stepping motor, decelerator, aluminium alloy long slab, aluminium alloy sliding panel, aluminium alloy end plate, aluminium alloy wallboard, stainless steel driver plate, aluminum alloy roof plate, the first DC speed-reducing, bevel gear pair, fairlead, probe clamping plate, drive lead screw, the second DC speed-reducing and Duo Gen positioning screw rod
Stepping motor is fixedly mounted on lifting platform, lifting platform is bolted in vacuum tank, decelerator is arranged on lifting platform and by shaft coupling and is connected with stepping motor, aluminium alloy long slab is fixed on the output shaft of decelerator, aluminium alloy sliding panel is slidably arranged on aluminium alloy long slab, aluminium alloy end plate, aluminium alloy wallboard and stainless steel driver plate are vertically arranged on aluminium alloy sliding panel successively, DC speed-reducing is arranged on the aluminium alloy sliding panel away from aluminium alloy end plate one side, drive lead screw successively level is located in aluminium alloy end plate, aluminium alloy wallboard with on stainless steel driver plate and by shaft coupling, be connected with the second DC speed-reducing, many positioning screw rods successively level are located in aluminium alloy end plate, on aluminium alloy wallboard and stainless steel driver plate and be positioned at the surrounding of drive lead screw, aluminum alloy roof plate is arranged on the upper surface of aluminium alloy wallboard and stainless steel driver plate, fairlead is successively vertically through aluminum alloy roof plate, aluminium alloy sliding panel and aluminium alloy long slab, the first DC speed-reducing is arranged on aluminum alloy roof plate, between the first DC speed-reducing and fairlead, by bevel gear pair, be in transmission connection, the upper end of fairlead is provided with probe clamping plate.
The present invention compared with prior art has following effect:
1. to adopt aluminium alloy be material in the present invention, and quality is lighter, and cost is lower.
2. the present invention is placed on motor apart from plasma plume position far away, can protect work drive motor not to be subject to the corrosion of the plasma of high temperature, has also avoided the heat deposition of motor, has increased the working life of motor.
3. the present invention adopts revolving multiprobe platform, and the distance between the measuring point of each probe is longer, can reduce plasma sheath that multiprobe the produces interference effect to measurement result as far as possible, and the result accuracy of measurement is higher.
4. the present invention regulates the position of probe according to the position of the point that needs on space to measure, by control step motor, can make probe reach different angles, by controlling the first rotating speed DC speed-reducing, can make probe reach different radial location, by controlling the second rotating speed DC speed-reducing, can change dissimilar probe, can change easily the diverse location of probe and different probe type carries out many-side and measures comparatively accurately the plasma parameter of a tapered cross-section in space, avoided original replacing probe need to close and reopen the time that vacuum system consumes, resource, the experimental error that homogeneous experiment does not produce.
5. Three Degree Of Freedom of the present invention is achieved in that by controlling the motion of stepping motor on lifting platform, can realize probe support and vertically rotatablely move, and changes the scanning angle of probe; By controlling the motion of the direct current machine on turning arm, can realize along the rectilinear motion of brachium direction, change the distance between probe and plasma; By controlling the motion of the direct current machine on slide block, can realize rotatablely moving of probe platform, change different probe type.
Embodiment
Embodiment one: present embodiment is described in conjunction with Fig. 1-Fig. 3, the a kind of of present embodiment can comprise at the multiprobe support of three-degree-of-freedom motion lifting platform 1, stepping motor 2, decelerator 3, aluminium alloy long slab 4, aluminium alloy sliding panel 5, aluminium alloy end plate 6, aluminium alloy wallboard 7, stainless steel driver plate 8, aluminum alloy roof plate 9, the first DC speed-reducing 10, bevel gear pair 11, fairlead 12, probe clamping plate 13, drive lead screw 14, the second DC speed-reducing 16 and Duo Gen positioning screw rod 15
Stepping motor 2 is fixedly mounted on lifting platform 1, lifting platform 1 is bolted in vacuum tank, decelerator 3 is arranged on lifting platform 1 and by shaft coupling and is connected with stepping motor 2, aluminium alloy long slab 4 is fixed on the output shaft of decelerator 3, aluminium alloy sliding panel 5 is slidably arranged on aluminium alloy long slab 4, aluminium alloy end plate 6, aluminium alloy wallboard 7 and stainless steel driver plate 8 are vertically arranged on aluminium alloy sliding panel 5 successively, DC speed-reducing 10 is arranged on the aluminium alloy sliding panel 5 away from aluminium alloy end plate 6 one sides, drive lead screw 14 successively level is located in aluminium alloy end plate 6, aluminium alloy wallboard 7 with on stainless steel driver plate 8 and by shaft coupling, be connected with the second DC speed-reducing 16, many positioning screw rods 15 successively level are located in aluminium alloy end plate 6, on aluminium alloy wallboard 7 and stainless steel driver plate 8 and be positioned at the surrounding of drive lead screw 14, aluminum alloy roof plate 9 is arranged on the upper surface of aluminium alloy wallboard 7 and stainless steel driver plate 8, fairlead 12 is successively vertically through aluminum alloy roof plate 9, aluminium alloy sliding panel 5 and aluminium alloy long slab 4, the first DC speed-reducing 10 is arranged on aluminum alloy roof plate 9, between the first DC speed-reducing 10 and fairlead 12, by bevel gear pair 11, be in transmission connection, the upper end of fairlead 12 is provided with probe clamping plate 13.
The multi-connecting-rod mechanism of present embodiment lifting platform, is bolted the distance between two intersection points of control link, thereby by linkage, controls the height change of lifting platform.Be convenient to meet the adjustment of probe support in the vertical direction.
Present embodiment also comprises stepping motor fixed head, and the cross section of stepping motor fixed head is spill, and on both sides, thick place gets out two through holes respectively, is bolted and stepping motor and lifting platform upper table surface clamping engagement.Stepping motor, between stepping motor fixed head and lifting platform upper plate, is bolted on lifting platform by stepping motor fixed head, by regulating the height of lifting platform can allow probe reach suitable measuring height.
The stepper motor driver of present embodiment is arranged in the circuit outside vacuum tank, by the wire through vacuum tank, be connected with the stepping motor of vacuum tank inside, motion for control step motor, computer carries out circuit with stepper motor driver and is connected, by the output signal of the control program control step motor driver on computer, thus the motion of control step motor.In the rotating shaft of stepping motor, connect a shaft coupling, the power shaft of the other end connection reducer of this shaft coupling, is that whole probe support is along the rotation of the output shaft of decelerator by the axial rotation transmission of stepping motor.
The aluminium alloy long slab of present embodiment is bolted on the output shaft that is fixed on decelerator, along with the output shaft of decelerator rotates, DC speed-reducing location-plate is bolted the one end that is fixed on aluminium alloy long slab, be used for fixing the position of the first DC speed-reducing on aluminium alloy long slab, DC speed-reducing rear plate is bolted and is fixed on DC speed-reducing location-plate, direction is vertical with DC speed-reducing location-plate, and the first DC speed-reducing is fixed between DC speed-reducing rear plate and DC speed-reducing front plate.
The quantity of the positioning screw rod of present embodiment is many, preferred amount is 4,4 positioning screw rods are through four through holes on DC speed-reducing rear plate and DC speed-reducing front plate, by the fixing position of DC speed-reducing rear plate, the first DC speed-reducing and DC speed-reducing front plate of the blocking double nut before and after screwed in place screw mandrel.
In the rotating shaft of the first DC speed-reducing of present embodiment, connect another shaft coupling, the other end connection for transmission screw mandrel of this shaft coupling, drive lead screw is followed the first DC speed-reducing and is rotated, stainless steel driver plate coordinates with drive lead screw by middle screw thread, positioning screw rod is through four through holes on stainless steel driver plate, can guarantee that stainless steel driver plate does not rotate, therefore the rotation of drive lead screw can change into stainless steel driver plate moving forward and backward along aluminium alloy long slab, the bottom of stainless steel driver plate contacts with aluminium alloy long slab, can mutually slide.
The aluminum alloy roof plate of present embodiment is bolted and is fixed on stainless steel driver plate, direction is vertical with stainless steel driver plate, aluminum alloy roof plate, along with stainless steel driver plate moves forward and backward on aluminium alloy long slab, has through hole for placing stainless steel fairlead on aluminum alloy roof plate.
The aluminium alloy wallboard of present embodiment is bolted and is fixed on aluminum alloy roof plate, direction is vertical with aluminum alloy roof plate, parallel with stainless steel driver plate, following stainless steel driver plate moves forward and backward at aluminium alloy long slab, positioning screw rod is through four through holes on aluminium alloy wallboard, the bottom of aluminium alloy wallboard contacts with aluminium alloy long slab, can mutually slide.
The aluminium alloy sliding panel of present embodiment is bolted and is fixed on aluminium alloy wallboard and stainless steel driver plate, aluminium alloy sliding panel is Frictional Slipping on aluminium alloy long slab, for the position of stablizing probe capstan head, aluminium alloy sliding panel is made fillet with the place that aluminium alloy long slab contacts, and for fear of frictional force is excessive, causes stuck phenomenon.
One end of the aluminium alloy long slab of present embodiment is bolted direct current machine location-plate, and certain point in long slab is fixed by bolt and decelerator, and the other end is bolted aluminium alloy end plate location-plate.
The aluminium alloy end plate location-plate of present embodiment is bolted with aluminium alloy long slab to be fixed.
The aluminium alloy end plate of present embodiment is bolted with aluminium alloy end plate location-plate and fixes, direction is vertical with aluminium alloy end plate location-plate, positioning screw rod, through four through holes on aluminium alloy end plate, adopts pairs of anti-loose nut to coordinate in the rear and front end of aluminium alloy end plate to positioning screw rod.
Present embodiment on the positioning screw rod of DC speed-reducing front plate front portion, put stainless steel capillary, stainless steel capillary is through stainless steel driver plate and aluminium alloy wallboard, to aluminium alloy end plate rear end face place.
Another piece DC speed-reducing location-plate of present embodiment is bolted and is fixed on aluminum alloy roof plate.
The second DC speed-reducing rear plate of present embodiment is bolted and is fixed on DC speed-reducing location-plate, and direction is vertical with DC speed-reducing location-plate.
The second DC speed-reducing of present embodiment is fixed between DC speed-reducing rear plate and DC speed-reducing front plate.
The DC speed-reducing front fender of present embodiment is bolted on aluminum alloy roof plate, and protection the second DC speed-reducing is not subject to the corrosion of the plume applying plasma in the place ahead.
In the DC speed-reducing of present embodiment, baffle is bolted on DC speed-reducing front fender, and protection the second DC speed-reducing is not subject to the corrosion of the plume applying plasma of top.
The DC speed-reducing side baffle of present embodiment is bolted in DC speed-reducing on baffle, and protection the second DC speed-reducing is not subject to the corrosion of the plume applying plasma of both sides.
The stainless steel fairlead of present embodiment contacts cooperation by the through hole on aluminum alloy roof plate with aluminium alloy lead channels.
Centered by the probe lower plate of present embodiment with the cirque structure of boss, the inner ring surface of boss coordinates with the outer ring surface of stainless steel fairlead, the radial thickness of boss is 5mm, the axial width of boss is 10mm, on boss, attack screwed hole radially, by tighting a bolt, step up with stainless steel fairlead, the annulus at probe lower plate center is a counterbore, counterbore face coordinates with the upper surface of stainless steel fairlead, the internal diameter of counterbore face is identical with the internal diameter of stainless steel fairlead, and the external diameter of counterbore face is a bit larger tham the external diameter of stainless steel fairlead.
The probe lower plate of present embodiment is along being circumferentially evenly drilled with four axial through holes, and the through hole axial with four of same position on probe train wheel bridge coordinates clamping by screw bolt and nut.
The probe lower plate of present embodiment is along being circumferentially evenly drilled with four semicircle orifices radially, and on probe train wheel bridge, four of same position semicircle orifices radially will be clipped in two probes clampings between semicircle orifice.
The probe train wheel bridge of present embodiment is circular configuration, and center exists countersunk seat, and the diameter of countersunk seat is identical with the external diameter of counterbore face on probe lower plate, in this countersunk seat, facilitates deployment line.
The switch of present embodiment is positioned at outside vacuum tank, a plurality of switches are connected with the second DC speed-reducing with the first DC speed-reducing in vacuum tank by the wire through vacuum tank respectively, control being respectively rotated in the forward and reverse rotation of the first DC speed-reducing and the second DC speed-reducing.
The power supply of present embodiment is positioned at outside vacuum tank, and 24V power supply is connected by wire with switch.
Embodiment two: in conjunction with Fig. 1-Fig. 3, present embodiment is described, the multiprobe support of present embodiment also comprises aluminium-alloy pipe 17, and aluminium-alloy pipe 17 is fixedly mounted on the lower surface of aluminium alloy long slab 4.So arrange, avoid unnecessary line to be exposed in plasma plume and be burned.Other composition and annexation are identical with embodiment one.
Embodiment three: in conjunction with Fig. 1-Fig. 3, present embodiment is described, the shape of cross section of the aluminium-alloy pipe 17 of present embodiment is U-shaped.So arrange, two aluminium-alloy pipe location-plates of present embodiment are bolted, be fixed together with aluminium alloy long slab and DC speed-reducing location-plate, aluminium alloy end plate location-plate respectively, aluminium-alloy pipe location-plate be fixed on aluminium alloy long slab below, there is through hole at aluminium-alloy pipe location-plate center for U-shaped cross-sectional aluminum alloy pipe is installed.The U-shaped cross-sectional aluminum alloy pipe of present embodiment, through the through hole of aluminium-alloy pipe location-plate central authorities, is added and is fastened by bolt, and U-shaped cross-sectional aluminum alloy tube hub lead-in wire, avoids unnecessary line to be exposed in plasma plume and be burned.The aluminium alloy lead channels of present embodiment is connected by bolt and aluminium alloy wallboard is fixed, and one of them end face coordinates with aluminum alloy roof plate, and another end face enters U-shaped cross-sectional aluminum alloy pipe inside from the U-shaped breach of pipe side.Other composition and annexation are identical with embodiment one or two.
Embodiment four: present embodiment is described in conjunction with Fig. 1-Fig. 3, the lifting platform 1 of present embodiment comprises upper plate 1-1, lower plate 1-2 and multi-connecting-rod mechanism 1-3, upper plate 1-1 and lower plate 1-2 be arranged in parallel, between upper plate 1-1 and lower plate 1-2, by multi-connecting-rod mechanism 1-3, connect, lower plate 1-2 is bolted with vacuum tank and is fixedly connected with, and offers a plurality of through holes on upper plate 1-1.So arrange, be convenient to meet the adjustment of probe support in the vertical direction.。Other composition and annexation are identical with embodiment one or three.
Embodiment five: in conjunction with Fig. 1-Fig. 3, present embodiment is described, the gear ratio of the bevel gear pair 11 of present embodiment is 1:2.So arrange, in the 1:2 bevel gear of present embodiment, the bevel gear of the less number of teeth fastens in the rotating shaft of the second DC speed-reducing by bolt clip, this bevel gear is followed the rotating shaft of the second DC speed-reducing and rotates, in the 1:2 bevel gear of present embodiment, the bevel gear of the more number of teeth fastens on stainless steel fairlead by bolt clip, this bevel gear drives stainless steel fairlead to be rotated by supporting bevel gear driving, and the rotor shaft direction of two bevel gears is mutually vertical.Other composition and annexation are identical with embodiment one or four.
Although the present invention discloses as above with preferred embodiment; yet not of the present invention in order to limit; those skilled in the art can also do other variations in spirit of the present invention; and be applied in the NM field of the present invention; certainly, these variations of doing according to spirit of the present invention all should be included in the present invention's scope required for protection.