CN112530229A - Space plasma parameter diagnosis device based on four-degree-of-freedom motion mechanism - Google Patents
Space plasma parameter diagnosis device based on four-degree-of-freedom motion mechanism Download PDFInfo
- Publication number
- CN112530229A CN112530229A CN202011614725.1A CN202011614725A CN112530229A CN 112530229 A CN112530229 A CN 112530229A CN 202011614725 A CN202011614725 A CN 202011614725A CN 112530229 A CN112530229 A CN 112530229A
- Authority
- CN
- China
- Prior art keywords
- degree
- motion mechanism
- probe
- freedom motion
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
- G09B9/00—Simulators for teaching or training purposes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Business, Economics & Management (AREA)
- Physics & Mathematics (AREA)
- Educational Administration (AREA)
- Educational Technology (AREA)
- General Physics & Mathematics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism, which comprises a probe array, the four-degree-of-freedom motion mechanism and a fixed frame, wherein: the four-degree-of-freedom motion mechanism is of a four-axis structure and comprises two X axes, a Y axis and a Z axis, and each axis is provided with a linear motion module; the probe array is arranged on a Z axis of the four-degree-of-freedom motion mechanism and can rotate for 90 degrees around an X axis; the fixed frame consists of a welding fixed plate, a support column, a vertical adjusting mechanism, a horizontal adjusting mechanism and a reference plate; the four-degree-of-freedom motion mechanism is fixed on the reference plate through a bottom plate of an X shaft, a Y shaft is fixed on a sliding block of the X shaft, and a Z shaft is fixed on the sliding block of the Y shaft. According to the invention, through the combination of the probe array and the four-degree-of-freedom motion mechanism, the large-scale, arrayed and multidimensional diagnosis of plasma parameters is realized, and technical support is provided for the physical research of the near-earth space plasma.
Description
Technical Field
The invention relates to a simulation device of a near-earth space plasma environment, in particular to a space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism.
Background
In order to study the basic physical process of the near-earth space plasma, a common method is to construct a large-scale experimental device to perform simulation study on the ground. In a space plasma environment simulation device, plasma diagnosis plays a very important role, and only when large-scale, high-resolution and high-precision plasma parameter diagnosis is obtained, the state of the plasma can be accurately represented and related physical phenomena can be researched. Among the numerous diagnostic modalities, probe diagnosis is the most fundamental diagnostic modality that can diagnose physical quantities such as density, temperature, magnetic induction, and the like of plasma, and has high spatial resolution. However, in the device for simulating the environment of the near-earth space plasma, the space scale of the plasma is large, the configuration of the magnetic field is complex, and the conventional probe diagnosis system with small scale, single space point and single dimension (for the magnetic probe) cannot meet the requirements of ground simulation physical experiments, and is more unfavorable for the research of the basic physical process of the near-earth space plasma. Meanwhile, the probe movement mechanism works in vacuum, magnetic field and plasma environments, and the problems that the movement of the platform, the influence of the magnetic field and eddy current on a motor in the movement mechanism, the impact of plasma on the movement mechanism and the like in the vacuum environment need to be solved. In addition, a large number of magnet coils are installed in the near-earth space plasma simulation device, the movement supporting mechanism of the magnet coils is connected with the vacuum chamber, and the electromagnetic force of the magnet coils is transmitted to the vacuum chamber through the movement supporting mechanism, so that the vacuum chamber is deformed. In order to ensure the movement accuracy of the probe moving mechanism, the influence of the deformation of the vacuum chamber on the probe moving mechanism is reduced. Therefore, it is necessary to provide a probe diagnosis method for a near-earth space plasma environment simulation apparatus, which can implement large-scale, arrayed, and multi-dimensional (for magnetic probes) plasma parameter diagnosis, and avoid the influence of complex environments such as vacuum, magnetic field, and plasma on the probe motion mechanism.
Disclosure of Invention
In order to realize large-scale, arrayed and multi-dimensional (aiming at a magnetic probe) plasma parameter diagnosis and simultaneously avoid the influence of complex environments such as vacuum, magnetic field and plasma on a probe motion mechanism, the invention provides a space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism.
The purpose of the invention is realized by the following technical scheme:
a space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism comprises a probe array, the four-degree-of-freedom motion mechanism and a fixed frame, wherein:
the four-degree-of-freedom motion mechanism is of a four-axis structure and comprises two X axes, a Y axis and a Z axis, the two X axes are connected through a cross rod, and each axis is provided with a linear motion module;
the probe array is arranged on a Z axis of the four-degree-of-freedom motion mechanism and can rotate for 90 degrees around an X axis;
the fixed frame consists of a welding fixed plate, a support column, a vertical adjusting mechanism, a horizontal adjusting mechanism and a reference plate;
dampers are arranged on any two support columns of the fixed frame;
the lower end of the support column is fixed on the welding fixing plate, the upper end of the support column is provided with a vertical adjusting mechanism, the upper end of the vertical adjusting mechanism is provided with a horizontal adjusting mechanism, and the reference plate is installed on the horizontal adjusting mechanism;
the four-degree-of-freedom motion mechanism is fixed on the reference plate through a bottom plate of an X shaft, a Y shaft is fixed on a sliding block of the X shaft, and a Z shaft is fixed on the sliding block of the Y shaft.
Compared with the prior art, the invention has the following advantages:
1) compared with the prior art, the method realizes large-scale, arrayed and multi-dimensional (aiming at the magnetic probe) diagnosis of plasma parameters and provides technical support for physical research of the near-earth space plasma through the combination of the probe array and the four-degree-of-freedom motion mechanism.
2) The probe array can be conveniently replaced, so that the probe system based on the four-degree-of-freedom motion mechanism has high expandability and can adapt to different diagnosis tasks.
3) The four-freedom-degree motion mechanism of the probe is provided with a horizontal and vertical adjusting mechanism, so that the levelness and the verticality of a probe system can be ensured. The problem of bombardment of plasma on a probe movement mechanism is solved, and the precision of data measurement is further ensured.
4) The eddy current on the moving mechanism under the magnetic field environment has no influence on the normal movement of the motor, and the induced current generated by the magnetic field in the coil in the motor can not cause the motor fault.
5) The deformation of the vacuum tank body in the vacuum and non-vacuum states does not influence the movement precision of the probe movement mechanism, and the device designed by the invention has good stability.
Drawings
FIG. 1 is a schematic diagram of four axes of a motion mechanism;
FIG. 2 is a schematic diagram of the X-axis and the position of the limit switch;
FIG. 3 is a schematic diagram of the Y-axis and the position of the limit switch;
FIG. 4 is a schematic diagram of the Y-axis and the position of the limit switch;
FIG. 5 illustrates the range of motion of the motion mechanism within the spatial plasma simulator;
FIG. 6 is a schematic view of a stationary frame;
FIG. 7 is a schematic view of the installation of the probe moving mechanism in the space plasma simulator;
FIG. 8 is group A probes;
FIG. 9 is group B probes;
FIG. 10 is a diagram of a high resolution magnetic probe location map;
FIG. 11 is a diagram of a standard resolving magnetic probe location map;
in the figure: 1-sliding block, 2-X axis I, 3-screw rod, 4-support column II, 5-Z axis, 6-probe, 7-Y axis, 8-X axis II, 9-insulating block II, 10-cross rod II, 11-limit switch II, 12-guide rail, 13-bottom plate, 14-aluminum profile, 15-datum plate, 16-welding fixing plate, 17-damper, 18-horizontal adjusting mechanism, 19-support column I, 20-vertical adjusting mechanism, 21-motor, 22-limit switch I, 23-cross rod I, 24-insulating block I, 25-base I, 26-base II, 27-motor I, 28-motor II and 29-support column.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
The invention provides a space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism, which adopts a probe array to diagnose the parameters of plasma, and comprises the probe array, the four-degree-of-freedom motion mechanism and a fixed frame, as shown in figures 1-4, wherein:
the four-degree-of-freedom motion mechanism is of a four-axis structure and comprises two X axes, a Y axis and a Z axis, wherein: the two X axes are connected through a cross rod I and a cross rod II, the cross rod I and the cross rod II are connected with a bottom plate of the X axes, and an insulating block is arranged at the connecting part; each shaft is provided with a linear motion module, each linear motion module comprises a guide rail, a screw rod, a motor, a sliding block and the like, the sliding block slides on the guide rail through the motion of the screw rod, a limit switch is arranged on the guide rail so as to ensure the precision of the starting point of the stroke of the sliding block and protect a motion mechanism, one end of the screw rod is provided with the motor, and a metal cover with high magnetic permeability is arranged outside the motor; the four-degree-of-freedom motion mechanism can move in the three directions of an X axis, a Y axis and a Z axis and has X, Y, Z translational degrees of freedom in three directions;
the probe array is arranged on a Z axis of the four-degree-of-freedom motion mechanism and can rotate for 90 degrees around an X axis;
fixed frame comprises welding fixed plate, support column, vertical adjustment mechanism, horizontal adjustment mechanism and benchmark board, wherein: dampers are arranged on any two support columns of the fixed frame; the lower end of the support column is fixed on the welding fixing plate, the upper end of the support column is provided with a vertical adjusting mechanism, the upper end of the vertical adjusting mechanism is provided with a horizontal adjusting mechanism, and the reference plate is installed on the horizontal adjusting mechanism; the welding fixing plate is welded on the inner side of the vacuum chamber of the plasma simulator.
The four-degree-of-freedom motion mechanism is fixed on the reference plate through a bottom plate of an X shaft, a Y shaft is fixed on a sliding block of the X shaft, and a Z shaft is fixed on the sliding block of the Y shaft.
In order to ensure the positioning precision of the motion mechanism, the four-freedom motion mechanism is installed according to the following method:
(1) finding the horizontal position and the vertical position by using a laser tracker;
(2) butt welding the welding fixing plate and the plasma simulation device;
(3) before installation, the X-axis bottom plate and the reference plate are assembled and locked, and then the upper plane and the lower plane are machined, so that the flatness and the parallelism are guaranteed.
Example (b):
(1) the four-degree-of-freedom motion mechanism is designed into a four-axis structure, as shown in fig. 1, in order to ensure the precision of a stroke starting point and protect the four-axis motion mechanism, limit switches are installed on each linear motion module, each axis is provided with two limits, as shown in fig. 2, 3 and 4, and in each figure, the starting point and the end point of motion are respectively arranged from left to right. The movement range of the movement mechanism in the X direction is 1100 mm, the movement range of the movement mechanism in the Y direction is 600 mm, and the movement range of the movement mechanism in the Z direction is 2400 mm, and as shown in FIG. 5, the movement range of the movement mechanism in the space plasma simulation device is schematically shown. The probe array is installed on the Z axis of the motion mechanism and can rotate 90 degrees. The positioning precision of the motion mechanism is 0.2 mm, and the angular positioning deviation is less than 10 minutes.
(2) Design of a fixed frame: the moving mechanism is suspended inside the plasma simulator by a fixed frame, as shown in fig. 6. The vertical adjusting mechanism and the horizontal adjusting mechanism are used for adjusting the levelness and the verticality of the probe system.
(3) As shown in FIG. 7, the fixed position of the moving mechanism needs to avoid the opening of the vacuum chamber of the space plasma simulator and the moving area of the components in the device, and can ensure that the probe moves in the area of 1100 mm × 2400 mm × 600 mm. The mounting surface should keep perpendicular with ground, uses the welding fixed plate to make the supporting legs, guarantees to weld firmly, reduces the deformation.
(4) 5 probes form a group of probe arrays, the interval between every two probes is 60 mm, A, B two groups of probe arrays are total, and a group of probes (A or B is installed according to requirements) are installed on the probe moving mechanism. Wherein, the two groups below the group A probe array are high-resolution magnetic probes, and the three groups above are standard resolution magnetic probes; the two groups above the B group probe array are high resolution magnetic probes, and the three groups below the B group probe array are standard resolution magnetic probes. The layout of the A-group and B-group magnetic probe arrays is shown in FIGS. 8 and 9, respectively.
The layout of the measurement point positions of each piece of high-resolution magnetic probe is shown in FIG. 10. Wherein, 4 (one dimension measurement) measurement points with 2 mm intervals are arranged in the middle, 3 (three dimension measurement) measurement points with 10 mm intervals, 1 (three dimension measurement) measurement point with 20 mm intervals and 1 (three dimension measurement) measurement point with 30 mm intervals are respectively arranged on two sides. The total number of the measurement points is 14, one dimension measurement point is 4, and the number of the three dimension measurement points is 10.
The layout of the measurement point positions of each standard resolution magnetic probe is shown in fig. 11. Wherein, 6 measurement point locations (three dimension measurement) with an interval of 10 mm are arranged in the middle, 1 measurement point location (three dimension measurement) with an interval of 20 mm and 1 measurement point location (three dimension measurement) with an interval of 30 mm are respectively arranged on two sides. The total number of the measurement points is 10, all the measurement points are three-dimensional measurement points, and each measurement point can measure a three-dimensional magnetic field signal.
(5) The installation method comprises the following steps: before butt welding of a welding fixing plate and a space plasma simulation device, a laser tracker is used for finding horizontal and vertical positions, pins are punched for welding, and the welding surface is cooled in the welding process so as to reduce deformation of the welding surface. The vertical adjusting mechanisms are all adjusted by M16 fine-tooth screws. Before installation, the X-axis bottom plate, the aluminum profile and the reference plate are assembled and locked, and then the upper plane and the lower plane are processed, so that the flatness and the parallelism are guaranteed.
Claims (7)
1. A spatial plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism is characterized by comprising a probe array, the four-degree-of-freedom motion mechanism and a fixed frame, wherein:
the four-degree-of-freedom motion mechanism is of a four-axis structure and comprises two X axes, a Y axis and a Z axis, the two X axes are connected through a cross rod, and each axis is provided with a linear motion module;
the probe array is arranged on a Z axis of the four-degree-of-freedom motion mechanism and can rotate for 90 degrees around an X axis;
the fixed frame consists of a welding fixed plate, support columns, a vertical adjusting mechanism, a horizontal adjusting mechanism and a reference plate, wherein dampers are arranged on any two support columns of the fixed frame, the lower ends of the support columns are fixed on the welding fixed plate, the vertical adjusting mechanism is arranged at the upper ends of the support columns, the horizontal adjusting mechanism is arranged at the upper ends of the vertical adjusting mechanisms, and the reference plate is arranged on the horizontal adjusting mechanism;
the four-degree-of-freedom motion mechanism is fixed on the reference plate through a bottom plate of an X shaft, a Y shaft is fixed on a sliding block of the X shaft, and a Z shaft is fixed on the sliding block of the Y shaft.
2. The spatial plasma parameter diagnosis device based on the four-degree-of-freedom motion mechanism as claimed in claim 1, wherein the linear motion module is composed of a guide rail, a lead screw, a motor and a slider, the slider slides on the guide rail through the motion of the lead screw, a limit switch is installed on the guide rail, and the motor is installed at one end of the lead screw.
3. The spatial plasma parameter diagnosis device based on four-degree-of-freedom motion mechanism as claimed in claim 2, wherein the motor is externally provided with a metal cover with high magnetic permeability.
4. The apparatus according to claim 1, wherein the probe array comprises 5 probes, each probe has a spacing of 60 mm, and there are A, B probe arrays, and the probe moving mechanism is provided with one probe.
5. The spatial plasma parameter diagnosis device based on four-degree-of-freedom motion mechanism according to claim 4, wherein the lower two groups of the group A probe array are high resolution magnetic probes, and the upper three groups are standard resolution magnetic probes; the two groups above the B group probe array are high resolution magnetic probes, and the three groups below the B group probe array are standard resolution magnetic probes.
6. The spatial plasma parameter diagnosis device based on the four-degree-of-freedom motion mechanism as claimed in claim 5, wherein 4 measurement points with 2 mm interval are provided in the middle of the high resolution magnetic probe, 3 measurement points with 10 mm interval, 1 measurement point with 20 mm interval and 1 measurement point with 30 mm interval are provided on both sides of the high resolution magnetic probe.
7. The spatial plasma parameter diagnosis device based on the four-degree-of-freedom motion mechanism as claimed in claim 5, wherein 6 measurement points with an interval of 10 mm are arranged in the middle of the standard resolution magnetic probe, 1 measurement point with an interval of 20 mm and 1 measurement point with an interval of 30 mm are respectively arranged on both sides of the standard resolution magnetic probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011614725.1A CN112530229B (en) | 2020-12-30 | 2020-12-30 | A space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011614725.1A CN112530229B (en) | 2020-12-30 | 2020-12-30 | A space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112530229A true CN112530229A (en) | 2021-03-19 |
| CN112530229B CN112530229B (en) | 2022-05-31 |
Family
ID=74977550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011614725.1A Active CN112530229B (en) | 2020-12-30 | 2020-12-30 | A space plasma parameter diagnosis device based on a four-degree-of-freedom motion mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112530229B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113671221A (en) * | 2021-08-17 | 2021-11-19 | 中国科学院合肥物质科学研究院 | An externally driven two-dimensional probe system suitable for various types of plasma vacuum chambers |
| CN114401578A (en) * | 2021-12-10 | 2022-04-26 | 西安电子科技大学 | A probe position calibration method, system, storage medium, device and application |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163186A (en) * | 1992-09-25 | 1994-06-10 | Mitsubishi Heavy Ind Ltd | Plasma measuring probe |
| JP2009087790A (en) * | 2007-09-29 | 2009-04-23 | Tokyo Electron Ltd | Device and method for measuring electron density, and storage medium |
| CN102540127A (en) * | 2012-01-05 | 2012-07-04 | 北京东方计量测试研究所 | Calibration platform for space potential detector of low-orbit spacecraft |
| CN103777152A (en) * | 2014-02-19 | 2014-05-07 | 清华大学 | Alternating magnetic field three-dimensional distribution measuring device |
| CN104135811A (en) * | 2014-08-13 | 2014-11-05 | 哈尔滨工业大学 | Multi-probe support capable of moving at three freedom degrees |
| CN206876098U (en) * | 2017-05-09 | 2018-01-12 | 青岛得意设计制造有限公司 | A kind of detection means of bend glass |
| CN109541504A (en) * | 2018-07-02 | 2019-03-29 | 哈尔滨工业大学 | A kind of good magnetic field measurement system and method drawn in clean refined device plasma channel |
| CN110618443A (en) * | 2019-08-26 | 2019-12-27 | 北京控制工程研究所 | Plasma thruster steady-state ion flow field measuring device and measuring method |
| US20200124641A1 (en) * | 2017-06-23 | 2020-04-23 | Tokyo Electron Limited | Probe device and needle trace transcription method |
| CN111537926A (en) * | 2020-05-20 | 2020-08-14 | 河北工业大学 | A measurement system and measurement method suitable for multi-scenario space magnetic field |
-
2020
- 2020-12-30 CN CN202011614725.1A patent/CN112530229B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06163186A (en) * | 1992-09-25 | 1994-06-10 | Mitsubishi Heavy Ind Ltd | Plasma measuring probe |
| JP2009087790A (en) * | 2007-09-29 | 2009-04-23 | Tokyo Electron Ltd | Device and method for measuring electron density, and storage medium |
| CN102540127A (en) * | 2012-01-05 | 2012-07-04 | 北京东方计量测试研究所 | Calibration platform for space potential detector of low-orbit spacecraft |
| CN103777152A (en) * | 2014-02-19 | 2014-05-07 | 清华大学 | Alternating magnetic field three-dimensional distribution measuring device |
| CN104135811A (en) * | 2014-08-13 | 2014-11-05 | 哈尔滨工业大学 | Multi-probe support capable of moving at three freedom degrees |
| CN206876098U (en) * | 2017-05-09 | 2018-01-12 | 青岛得意设计制造有限公司 | A kind of detection means of bend glass |
| US20200124641A1 (en) * | 2017-06-23 | 2020-04-23 | Tokyo Electron Limited | Probe device and needle trace transcription method |
| CN109541504A (en) * | 2018-07-02 | 2019-03-29 | 哈尔滨工业大学 | A kind of good magnetic field measurement system and method drawn in clean refined device plasma channel |
| CN110618443A (en) * | 2019-08-26 | 2019-12-27 | 北京控制工程研究所 | Plasma thruster steady-state ion flow field measuring device and measuring method |
| CN111537926A (en) * | 2020-05-20 | 2020-08-14 | 河北工业大学 | A measurement system and measurement method suitable for multi-scenario space magnetic field |
Non-Patent Citations (2)
| Title |
|---|
| ILYA SHESTERIKOV: "The three-dimensional positioning system at the VINETA.II experiment—a multipurpose tool for in situ plasma diagnostics", 《JOURNAL OF INSTRUMENTATION》, vol. 12, no. 8, 31 August 2017 (2017-08-31), XP020318554, DOI: 10.1088/1748-0221/12/08/T08001 * |
| 张文兰: "时间分辨等离子体探针诊断技术的研究", 《中国优秀硕士学位论文全文数据库（基础科学辑）》, no. 7, 15 July 2015 (2015-07-15), pages 005 - 139 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113671221A (en) * | 2021-08-17 | 2021-11-19 | 中国科学院合肥物质科学研究院 | An externally driven two-dimensional probe system suitable for various types of plasma vacuum chambers |
| CN114401578A (en) * | 2021-12-10 | 2022-04-26 | 西安电子科技大学 | A probe position calibration method, system, storage medium, device and application |
| CN114401578B (en) * | 2021-12-10 | 2023-01-20 | 西安电子科技大学 | Position calibration method and system of probe, storage medium, equipment and application |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112530229B (en) | 2022-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103208867B (en) | Magnet unit, magnet array, magnetic levitation planar motor and lithographic device using magnetic levitation planar motor | |
| KR100283784B1 (en) | Wafer stage with reference surface | |
| CN112530229A (en) | Space plasma parameter diagnosis device based on four-degree-of-freedom motion mechanism | |
| JP6452782B2 (en) | Linear stage for reflection electron beam lithography | |
| KR102245707B1 (en) | Positioning device in gantry type of construction | |
| CN109421003B (en) | Positioning device in frame structure | |
| CN102490020A (en) | Simple precision displacement platform | |
| CN112525449B (en) | Orthogonal configuration six-degree-of-freedom vibration simulation system and method for all-vertical actuator | |
| JPH07218591A (en) | Open-frame-gate type probe searching system | |
| CN111551329B (en) | Two-stage Stewart mechanism parallel configuration six-degree-of-freedom vibration excitation system | |
| US20200176217A1 (en) | Stage apparatus and charged particle beam apparatus | |
| CN103543612B (en) | A kind of moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform | |
| KR20180043804A (en) | Stage device and probe device | |
| CN114858042A (en) | Automatic device and method for checking accuracy of plumb line system | |
| CN102620691A (en) | Measurement system for fault surface morphology of earthquake fault zone rock | |
| CN109116274B (en) | Four-degree-of-freedom magnetic field testing device | |
| Leão et al. | Magnet alignment on a common girder: development of a length artefact for measurement accuracy improvement | |
| CN210165929U (en) | Measuring machine | |
| Durand et al. | Main achievements of the PACMAN project for the alignment at micrometric scale of accelerator components | |
| Xiaohong et al. | Design of double PSDs mounting plate on the tracing measurement system | |
| EP3577750B1 (en) | Planar positioning device | |
| Tolstykh et al. | Planar stage for precision motion applications | |
| CN114510085B (en) | Piezoelectric driving multi-degree-of-freedom optical space positioning device, method and system | |
| JP2015046331A (en) | Stage device and charged particle beam device | |
| CN115371555B (en) | Large-stroke high-precision shape and position error measuring instrument based on frame type laser measurement reference |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |