CN103486413A - Three-freedom-degree decoupling large-stroke micro-positioning platform - Google Patents

Abstract

The invention provides a three-degree-of-freedom decoupling large-stroke micro-positioning platform, which includes a moving platform, a base, and three branch chains connecting the moving platform and the base with the same structure. Each branch chain includes a micro-displacement driver and a flexible moving pair. Two branches with the same structure and parallel axes, one end of each branch is connected to the moving platform, the other end is connected to the flexible moving pair, the fixed end of the micro-displacement driver is connected to the base, the driving end is connected to the flexible moving pair, and the moving platform Both the platform and the base are composed of three orthogonal flat plates, and the three branch chains connect the moving platform and the corresponding planes of the base in the form of orthogonal crossing, and form a parallel connection. The invention can realize decoupled three-dimensional movement, and can obtain larger stroke and higher resolution without introducing a displacement amplification mechanism. The overall structure is compact and has good mechanical transmission performance.

Description

Three-degree-of-freedom decoupling large-stroke micro-positioning platform

technical field

The invention belongs to the field of advanced manufacturing, and specifically relates to a three-degree-of-freedom decoupling large-stroke micro-positioning platform.

Background technique

Due to its high precision and high resolution, the micro-positioning platform based on flexible hinges has been widely used in atomic force microscopy, biological micromanipulation, micro-nano processing, MEMS assembly, optical fiber docking and calibration, etc.

For example, the Swiss Federal Institute of Technology has developed a 3-RPS flexible parallel micro-positioning platform for optical fiber docking, Japan’s TAMIO has developed a two-finger micro-manipulator based on the Stewart platform, and the University of Saskatchewan in Canada has developed a 3-RPS RRR planar micro-movement parallel robot, Harbin Institute of Technology developed a six-degree-of-freedom micro-robot based on the Stewart platform, and Beihang University proposed a series-parallel micro-motion mechanism for optical fiber docking. In patent documents with application numbers 201310166438, 201310156056, 201310145711, 201310103681, 00100198, and 200810079902, "Large stroke micro-drive precision two-dimensional workbench", "Large stroke two-dimensional nanometer workbench system with angle compensation function", " A two-dimensional parallel micro-motion platform driven by piezoelectric ceramics", "a flexible micro-positioning platform", "three-degree-of-freedom three-axis structure decoupling parallel micro-motion robot", "three-dimensional translational micro-manipulator". At present, the main problems of most micro-positioning platforms are that the structure is complex, the degrees of freedom of motion cannot be completely decoupled, the output displacement range is small, and the positioning accuracy is reduced due to the introduction of the amplification mechanism.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies of the prior art and provide a three-degree-of-freedom decoupled large-stroke micro-positioning platform with compact structure, large stroke, high motion resolution, and small cumulative error.

The three-degree-of-freedom decoupling large-stroke micro-positioning platform provided by the present invention includes a moving platform, a base, three branch chains connecting the moving platform and the base with the same structure, and three micro-displacement drivers, and each branch chain includes a micro-displacement driver , a flexible moving pair and two branches with the same structure and parallel axes, each branch is composed of two cylindrical flexible hinges at both ends and a rigid link in the middle, one end of each branch is connected with the moving platform, and the other end It is connected with the flexible moving pair, the fixed end of the micro-displacement driver is connected with the base, the driving end is connected with the flexible moving pair, the driving direction of the micro-displacement driver is along the direction of the branch axis, and the moving platform and the base are composed of three orthogonal flat plates The platform is opposite to the opening of the base), the plane defined by the axis of the third branch and the sixth branch that participates in the first branch chain is parallel to the top surface of the moving platform, and the second branch and the fourth branch that participate in the second branch chain The plane defined by the axis of the axis, and the plane defined by the axes of the first branch and the fifth branch participating in the formation of the third branch chain are respectively parallel to the two sides of the moving platform, and the three branch chains are connected to the moving platform in the form of an orthogonal intersection. Corresponds to the plane of the base and forms a parallel connection.

Compared with the prior art, the present invention has the following advantages: (1) Directly driven by a micro-displacement driver, the requirement of high precision and large stroke can be realized without introducing an amplification mechanism; (2) The three branch chains adopt the form of orthogonal crossing Arrangement reduces the volume of the mechanism and improves the mechanical transmission performance of the mechanism.

Description of drawings

Fig. 1 is a schematic diagram of the platform structure of the embodiment of the present invention.

Fig. 2 is a schematic diagram of the platform structure after removing the base in the embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a platform kinematic branch chain in an embodiment of the present invention.

In the figure: 1. Moving platform, 2. First branch, 3. Base, 4. Second branch, 5. Third branch, 6. First branch, 7. Second branch, 8. Third branch , 9, the fourth branch, 10, the fifth branch, 11, the sixth branch, 12, cylindrical flexible hinge, 13, rigid connecting rod, 14, flexible moving pair, 15, micro-displacement driver.

Detailed ways

The three-degree-of-freedom decoupling large-stroke micro-positioning platform provided by the present invention includes a moving platform 1, a base 3, three branch chains (2, 4 and 5) with the same structure connecting the moving platform 1 and the base 3, and three micro-displacement drivers 15. Each branch chain includes a micro-displacement driver 15, a flexible moving pair 14 and two branches with the same structure and axes parallel to each other. The three branch chains have a total of 6 branches, which are the first branch 6 and the second branch 7 , the third branch 8, the fourth branch 9, the fifth branch 10 and the sixth branch 11, each branch is composed of two cylindrical flexible hinges 12 at two ends and a rigid link 13 in the middle, one end of each branch is connected with The moving platform 1 is connected, and the other end is connected with the flexible moving pair 14, and the axes of the two branches are parallel to each other. The fixed end of the micro-displacement driver 15 is connected with the base 3, and the driving end is connected with the flexible moving pair 14. The driving of the micro-displacement driver 15 The direction is along the direction of the branch axis. Both the moving platform 1 and the base 3 are composed of three orthogonal flat plates (the openings of the moving platform and the base are opposite), which participate in the axes of the third branch 8 and the sixth branch 11 of the first branch chain 2. The determined plane is parallel to the top surface of the moving platform 1, and participates in the plane defined by the axes of the second branch 7 and the fourth branch 9 forming the second branch chain 4 and participates in forming the first branch 6 and the fourth branch 9 of the third branch chain 5. The planes defined by the axes of the fifth branch 10 are respectively parallel to the two sides of the moving platform 1, and the three branch chains connect the corresponding planes of the moving platform 1 and the base 3 in an orthogonal crossing form, and form a parallel connection.

Claims (1)

1. A three-degree-of-freedom decoupling large-stroke micro-positioning platform, comprising a moving platform (1), a base (3), connecting three branch chains with the same structure of the moving platform (1) and the base (3), characterized in that: Each branch chain includes a micro-displacement driver (15), a flexible moving pair (14) and two branches with the same structure and axes parallel to each other. Each branch is composed of two cylindrical flexible hinges (12) at both ends and the middle One end of each branch is connected with the moving platform (1), the other end is connected with the flexible moving pair (14), and the fixed end of the micro-displacement driver (15) is connected with the base (3). The driving end is connected with the flexible moving pair (14), the driving direction of the micro-displacement driver (15) is along the direction of the branch axis, and the moving platform (1) and the base (3) are composed of three orthogonal flat plates, participating in the formation of the first branch The plane defined by the axes of the third branch (8) and the sixth branch (11) of the chain (2) is parallel to the top surface of the moving platform (1), and participates in forming the second branch (7) of the second branch chain (4). ) and the plane defined by the axis of the fourth branch (9), and the plane defined by the axis of the first branch (6) and the fifth branch (10) participating in the formation of the third branch chain (5) are respectively related to the moving platform ( The two sides of 1) are parallel, and the three branch chains connect the moving platform (1) and the corresponding plane of the base (3) in the form of orthogonal crossing, and form a parallel connection.

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