CN101531002A - Micro-nano working platform of four-dimensional mobile orthogonal structure - Google Patents

Abstract

The invention relates to a four-dimensional orthogonal structure micro-nano operating platform in the field of robot technology, comprising a base, a workbench, two P-4S branch chains, a piezoelectric ceramic driver and two PSS branch chains. The base and the workbench are connected by two P-4S branch chains and two P-SS branch chains. An elastic parallel plate moving pair is installed on the corresponding base of each branch chain, and each elastic parallel plate moving pair has its own A piezoelectric ceramic driver is set. In the X and Y directions driven by the single piezoelectric ceramic driver, the base and the worktable are respectively connected by a P-4S flexible branch chain. In the Z direction driven by the double piezoelectric ceramic driver, the base The seat and the workbench are connected by two PSS branch chains. The two PSS branch chains are parallel to each other and are respectively arranged along the perpendicular direction to the two P-4S branch chains. The symmetry axes of each group of branch chains at the initial position are perpendicular to each other. The invention has the advantages of simple structure, displacement decoupling and large bearing capacity, and can realize 4-degree-of-freedom fretting without friction, gap and high resolution.

Description

Four-dimensional Orthogonal Structure Micro-Nano Operation Bench

technical field

The invention relates to a device in the field of robot technology, in particular to a four-dimensional orthogonal structure micro-nano operating table.

Background technique

Parallel micro-manipulation robots have sub-micron to nano-level positioning accuracy, and have broad application prospects in precision machining, electronic packaging, optical fiber docking, biological and genetic engineering, material science, aerospace and other fields, and are famous scholars at home and abroad. topics of concern. Since Ellis first proposed the micro-manipulation robot driven by piezoelectric ceramics in 1962, the research of micro-manipulation robot has attracted the attention of scholars at home and abroad. In 1989, Hara and Sugimoto proposed and studied a micro-robot that replaced traditional hinges with flexible hinges; Stoughton designed a micro-robot consisting of two parallel mechanisms, each with six parallel mechanisms. Composed of piezoelectric components; Kallio in the Netherlands has developed a 3-DOF parallel micro-robot driven by a hydraulic drive system; Switzerland's Pernette et al. have designed a parallel 6-DOF micro-robot for positioning on inherited optical fiber negatives single-mode fiber. In China, Gao Feng et al. have developed a 6-DOF fully flexible parallel micro-manipulation robot using a piezoelectric ceramic driver, which is characterized by a 2-2-2 orthogonal structure composed of PSS branch chains. Liu Pingan and others have studied a three-degree-of-freedom parallel micro-manipulator with a two-translation and one-rotation structure. The main problems of these micro-robots are: some have complex structures, some are difficult to calibrate, and some are difficult to decouple displacement.

After searching the literature of the prior art, it was found that "The Motion Condition Design of the Asymmetrical Three-translation Parallel Mechanism" was published by Yang Qizhi et al. in the Journal of Agricultural Machinery, Vol. A new type of asymmetric three-translation parallel mechanism is designed based on the spiral theory. The disadvantage is that the structure is asymmetric, can not achieve isotropy, and is difficult to calibrate. And at present, the research on micro-robots is mainly focused on three-degree-of-freedom micro-robots and six-degree-of-freedom micro-robots, and there are few studies on micro-robots with four degrees of freedom and five degrees of freedom.

Contents of the invention

The purpose of the present invention is to provide a four-dimensional orthogonal structure micro-nano operating table, which has four degrees of freedom, and has the advantages of structural decoupling, high rigidity, strong bearing capacity, and no hysteresis. , truly realized the integrated design and production of the organization.

The present invention is achieved through the following technical solutions, the present invention includes a base, a workbench, two P-4S (1 moving pairs and 4 ball pairs) branch chains, piezoelectric ceramic drivers and two PSSs (1 moving vice and 2 ball vices) branch chain. The base and the workbench are connected by two P-4S branch chains and two P-SS branch chains composed of flexible hinges. An elastic parallel plate moving pair is arranged on the corresponding base of each branch chain and passes through The elastic spherical hinge is connected with the workbench. Each elastic parallel plate moving pair is equipped with a piezoelectric ceramic driver, and its axes are respectively parallel to the three coordinate axes of x, y and z, which respectively represent the straight line direction, horizontal line direction and vertical line direction. In the X and Y directions driven by the single piezoelectric ceramic driver, the base and the worktable are respectively connected by a P-4S flexible branch chain; in the Z direction driven by the double piezoelectric ceramic driver, the connection between the base and the worktable The two PSS branch chains are connected by two PSS branch chains, and the two PSS branch chains are parallel to each other and arranged along the direction perpendicular to the two P-4S branch chains. The symmetry axes of each group of branch chains at the initial position are perpendicular to each other. The worktable is driven by two P-4S branch chains and two PSS branch chains to realize movement along the X, Y and Z three-dimensional directions and orbiting along the Y axis.

Each P-4S branch chain includes: the first elastic parallel plate moving pair, the first connecting rod, the first spherical joint, the second spherical joint, the third spherical joint and the fourth spherical joint, the second connecting rod, the Three links, fourth link and fifth link. The first spherical joint, the second spherical joint, the third spherical joint, the fourth spherical joint, the first connecting rod, the second connecting rod, the third connecting rod and the workbench form a 4S mechanism. Each elastic 4S mechanism is connected with the workbench through the second ball joint and the third ball joint, and is connected with the first connecting rod through the first ball joint and the fourth ball joint. The elastic 4S mechanism is connected with the first elastic parallel plate moving pair through the first connecting rod, and the first elastic parallel plate moving pair is connected with the base through the fourth connecting rod and the fifth connecting rod.

Each PSS branch chain includes: a second elastic parallel plate moving pair, a fifth spherical joint, a sixth spherical joint, a sixth connecting rod, a seventh connecting rod and an eighth connecting rod. The fifth ball joint and the sixth ball joint are connected through the sixth connecting rod, and the sixth ball joint is directly connected with the moving pair of the second elastic parallel plate. The whole PSS branch chain is connected with the workbench through the fifth spherical joint, and connected with the base through the seventh connecting rod and the eighth connecting rod.

The entire mechanism body of the present invention is integrally cut from one piece of material, and four piezoelectric ceramic drivers are configured to drive the workbench through the P-4S branch chain and the PSS branch chain to realize three-dimensional movement and one-dimensional orbiting. The invention can realize three-dimensional movement and one-dimensional rotation without friction, gap, lubrication and hysteresis, and can be widely used in the fields of optical fiber docking, nano-imprinting, life and genetic engineering, micro-assembly and the like.

Description of drawings

Figure 1 is a schematic diagram of a four-dimensional orthogonal structure micro-nano operation table;

Fig. 2 is the structural diagram of P-4S branched chain;

Fig. 3 is the structural diagram of PSS branched chain;

In the figure: 1 is the base, 2 is the workbench, 3 is the P-4S branch chain, 4 is the piezoelectric ceramic driver, 5 is the PSS branch chain, 6 is the first connecting rod, 7 is the first ball joint, 8 is the The second connecting rod, 9 is the second spherical joint, 10 is the seventh connecting rod, 11 is the third spherical joint, 12 is the third connecting rod, 13 is the fourth spherical joint, 14 is the fourth connecting rod, 15 is the first Five connecting rods, 16 is the first elastic parallel plate moving pair, 17 is the eighth connecting rod, 18 is the fifth spherical joint, 19 is the sixth connecting rod, 20 is the sixth spherical joint, 21 is the second elastic parallel plate movement vice.

Detailed ways

The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: the present embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and processes are provided, but the protection scope of the present invention is not limited to the following implementations example.

As shown in Figure 1, it is an embodiment of the present invention. This four-dimensional orthogonal structure micro-nano operation table can realize three-dimensional movement and one-dimensional rotation. Station 2, two P-4S branches 3, piezo actuators 4 and two PSS branches 5. The base 1 and the workbench 2 are connected by two P-4S branch chains 3 and two P-SS branch chains 5 composed of flexible hinges, and an elastic parallel joint is directly processed on the corresponding base of each branch chain. The plate moving pair is connected with the workbench 2 through the integrally processed elastic ball joint. Each elastic parallel plate moving pair is equipped with a piezoelectric ceramic driver 4, and the driving direction of the piezoelectric ceramic driver 4 is always parallel to the axis direction of the coordinate system. In the X and Y directions driven by a piezoelectric ceramic driver 4, the base 1 and the worktable 2 are respectively connected by a P-4S flexible branch chain, and in the Z direction driven by two piezoelectric ceramic drivers 4 Above, the base 1 and the workbench 2 are connected by two PSS branch chains 5 . In the initial position, the axis directions of the two PSS branch chains 5 are parallel to the Z-axis of the orthogonal structure micro-nano operation table, and the axis directions of the two P-4S branch chains 3 are respectively parallel to the X and X axes of the orthogonal structure micro-nano operation table. The Y axes are parallel, and the axis directions of each group of branch chains are arranged perpendicular to each other. The symmetry axes of each group of branch chains at the initial position are perpendicular to each other.

As shown in FIG. 2 , it is a partial structural diagram of the P-4S branch chain 3 . Each P-4S branch chain 3 is composed of the following parts: the first elastic parallel plate moving pair 16, the first connecting rod 6, the first ball joint 7, the second ball joint 9, the third ball joint 11 and the fourth ball joint Hinge 13 and the second link 8, the third link 12, the fourth link 14 and the fifth link 15. The first spherical joint 7, the second spherical joint 9, the third spherical joint 11, the fourth spherical joint 13, the first connecting rod 6, the second connecting rod 8, the third connecting rod 12 and the workbench 2 form a 4S mechanism, each An elastic 4S mechanism is connected with the workbench 2 through the second ball joint 9 and the third ball joint 11 , and connected with the first connecting rod 6 through the first ball joint 7 and the fourth ball joint 13 . The elastic 4S mechanism is connected with the first elastic parallel plate moving pair 16 through the first connecting rod 6 , and the first elastic parallel plate moving pair 16 is connected with the base 1 through the fourth connecting rod 14 and the fifth connecting rod 15 .

As shown in FIG. 3 , it is a partial structural diagram of the PSS branch chain 5 . Each PSS branch chain 5 is composed of the following parts: the second elastic parallel plate moving pair 21, the fifth spherical joint 18, the sixth spherical joint 20, the sixth connecting rod 19, the seventh connecting rod 10 and the eighth connecting rod 17 , the fifth ball joint 18 and the sixth ball joint 20 are connected through the sixth connecting rod 19, and the sixth ball joint 20 is directly connected with the second elastic parallel plate moving pair 21. The entire PSS branch chain 5 is connected with the workbench 2 through the fifth ball joint 18 , and connected with the base 1 through the seventh connecting rod 10 and the eighth connecting rod 17 .

In this embodiment, each piezoceramic driver is in a half-stroke state to determine the initial zero point when power is applied, and it is only necessary to increase or decrease the voltage of the piezoceramic driver in the corresponding direction when it is necessary to move in the positive and negative directions. When performing calibration, the theoretical travel in each direction can be calculated by geometric method, and then compensated by ANSYS finite element analysis and actual measurement. When the two parallel PSS branch chains have the same displacement along the axis Z direction, the micro-motion mechanism can move along the Z direction, and when the two parallel PSS branch chains have different displacements along the axis Z direction , it is possible to simultaneously generate rotation around the Y axis and movement along the Z axis or pure rotation around the Y axis. Since the two mutually perpendicular P-4S branch chains lack a degree of freedom to rotate around the normal of the plane where the 4S mechanism is located, the micro-nano console can only move along the X, Y, and Z directions and move along the Y direction. shaft rotation. This kind of micro-nano operating table realizes the integrated design and manufacture of the mechanism, and has the advantages of simple structure, decoupling of displacement, no gap, no need for lubrication, and large bearing capacity.

Claims (3)

1, a kind of micro-nano working platform of four-dimensional mobile orthogonal structure, it is characterized in that comprising pedestal, workbench, two P-4S side chains, piezoelectric ceramic actuator and two PSS side chains, link to each other with two P-SS side chains by two P-4S side chains that constitute by flexible hinge between pedestal and the workbench, on the corresponding pedestal of each side chain, respectively be provided with an elasticity parallel-plate moving sets, each elasticity parallel-plate moving sets respectively is provided with a piezoelectric ceramic actuator, on X and Y direction that single piezoelectric ceramic actuator drives, be connected by the flexible side chain of a P-4S respectively between pedestal and the workbench, on the Z of double piezoelectric ceramic driver drives direction, be connected by two PSS side chains between pedestal and the workbench, two PSS side chains be parallel to each other and respectively along and the perpendicular direction of two P-4S side chains arrange that the axis of symmetry that initial position is respectively organized side chain is vertical mutually.

2, micro-nano working platform of four-dimensional mobile orthogonal structure according to claim 1, it is characterized in that, described P-4S side chain, each P-4S side chain comprises: the first elasticity parallel-plate moving sets, first connecting rod, first ball pivot, second ball pivot, the 3rd ball pivot and the 4th ball pivot, first connecting rod, second connecting rod, the 4th connecting rod and the 5th connecting rod, first ball pivot wherein, second ball pivot, the 3rd ball pivot and the 4th ball pivot and first connecting rod, second connecting rod, third connecting rod and workbench are formed 4S mechanism, each elasticity 4S mechanism links to each other with workbench by second ball pivot and the 3rd ball pivot, and link by first ball pivot and the 4th ball pivot and first connecting rod, elasticity 4S mechanism links to each other by first connecting rod with the first elasticity parallel-plate moving sets, and the first elasticity parallel-plate moving sets links to each other with pedestal with the 5th connecting rod by the 4th connecting rod.

3, micro-nano working platform of four-dimensional mobile orthogonal structure according to claim 1, it is characterized in that, described each PSS side chain comprises: the second elasticity parallel-plate moving sets, the 5th ball pivot, the 6th ball pivot, the 6th connecting rod, seven-link assembly and the 8th connecting rod, wherein link to each other by the 6th connecting rod between the 5th ball pivot and the 6th ball pivot, the 6th ball pivot directly links to each other with the second elasticity parallel-plate moving sets, whole PSS side chain links to each other with workbench by the 5th ball pivot, and links to each other with pedestal with the 8th connecting rod by seven-link assembly.

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