CN102967972B - Capacitive touch array substrate and manufacturing method thereof and liquid crystal panel - Google Patents

Abstract

The invention discloses a capacitive touch array substrate, a manufacturing method and a liquid crystal panel, which are used to realize an IN-CELL touch screen, improve the structure of the touch screen, and simplify the process flow. The capacitive touch array substrate includes: a support body for supporting the color filter substrate, a first sensor, and a second sensor; the bottom end and the top end of the support body each have an electrode to form a capacitor; wherein, one end close to the color filter substrate is The top end is the bottom end; the first sensor is electrically connected to the electrode on the top end of the support body; the second sensor is electrically connected to the electrode at the bottom end of the support body.

Description

Capacitive touch array substrate and manufacturing method, liquid crystal panel

technical field

The invention relates to the fields of electronic technology and liquid crystal display, in particular to a capacitive touch array substrate and a manufacturing method.

Background technique

Compared with the conventional method of disposing the touch panel on the liquid crystal panel, the research of integrating the function of the touch panel with the liquid crystal panel is becoming more and more popular. The integration of the touch panel and the liquid crystal panel includes modes such as "In-cell (the touch structure is inside the liquid crystal box)" and "On-cell (the touch structure is on the liquid crystal box)". In-cell refers to the method of embedding touch panel functions into liquid crystal pixels. On-cell refers to the method of embedding the touch panel function between the color filter substrate and the polarizer.

External light is reflected between the upper surface of the on-cell liquid crystal panel and the lower surface of the touch panel, reducing visibility in bright environments such as outdoors. In-cell type LCD screens will not have this problem.

One type of In-cell is to deform the liquid crystal layer when the touch screen is pressed, changing the direction of the liquid crystal, thereby changing the capacitance to trigger the sensor. This solution has higher requirements on the liquid crystal layer. In addition, in order to change the direction of the liquid crystal layer, bumps are added on the inner side of the liquid crystal layer close to the color filter. However, the technical requirements for adding bumps are relatively high, and the process is difficult to realize.

Contents of the invention

Embodiments of the present invention provide a capacitive touch array substrate and a manufacturing method thereof, which are used to realize an IN-CELL touch screen, improve the structure of the touch screen, and simplify the process flow.

A capacitive touch array substrate, comprising: a support for supporting a color filter substrate, a first sensor, and a second sensor;

There is an electrode at the bottom and the top of the support to form a capacitor; the end close to the color filter substrate is the top, and the other end is the bottom;

The first sensor is electrically connected to the electrode on the top of the support body;

The second sensor is electrically connected to the electrodes at the bottom of the support.

Preferably, the support body is a columnar spacer.

Preferably, the first sensor is perpendicular to and does not intersect with the second sensor.

Further, there is a linear first sensor or a linear second sensor between every two adjacent sub-pixels.

Further, it also includes: a data line and a gate line; the linear first sensor is parallel to the data line and is on the same layer, and the linear second sensor is parallel to the gate line and is on the same layer.

Preferably, the bottom electrode and the top electrode are made of indium tin oxide (ITO).

A capacitive touch liquid crystal panel includes the above-mentioned capacitive touch array substrate.

A method of making a capacitive touch array substrate, comprising the following steps:

Fabricating data lines and a second sensor on the substrate, reserving the position of the support body on the second sensor;

An insulating layer is formed above the data line and the second sensor, and a via hole for connecting the second sensor and the support body is reserved on the insulating layer;

fabricating the first sensor while fabricating the grid lines;

making the first electrode on the second sensor;

Deposit a layer of resin material and form a support body through a patterning process;

making a second electrode on the support;

A conductive layer is deposited on the second electrode and on the first sensor to connect the second electrode and the first sensor.

In the embodiment of the present invention, two electrodes are added on the support body to form a capacitor, which is connected with the sensor to realize touch sensing. The structure needs to be exposed and etched once to the support body during production, while the existing IN cell technology generally uses the CELL box as a large capacitor, and the liquid crystal as the medium inside. When the thickness of the cell box is pressed, the cell gap and the liquid crystal It will deflect, liquid crystal will deflect, then its dielectric constant will change, then the cell gap and dielectric constant will change, the capacitance will change, and the touch point can be judged, but there must be very complicated circuits and sensor to judge. Therefore, compared with the IN-CELL type in the prior art, the process is obviously simpler, and there is no special requirement for the liquid crystal.

Description of drawings

1 is a side sectional view of a capacitive touch array substrate in an embodiment of the present invention;

2 is a top view of a capacitive touch array substrate in an embodiment of the present invention;

Fig. 3 is a side sectional view of a support body in an embodiment of the present invention;

Fig. 4 is a flow chart of the method in the embodiment of the present invention.

Detailed ways

In the embodiment of the present invention, two electrodes are added on the support body to form a capacitor, which is connected with the sensor to realize touch sensing. The structure needs to be exposed and etched once to the support body during production. Compared with the IN-CELL type in the prior art, the process is obviously simpler, and there is no special requirement for the liquid crystal.

Referring to FIG. 1 and FIG. 2 , the capacitive touch array substrate in this embodiment includes: a support body 101 for supporting the color filter substrate, a first sensor 102 and a second sensor 103 .

The bottom and top of the support body 101 each have an electrode to form a capacitor, as shown in FIG. 3 ; wherein, one end close to the color filter substrate is the top end, and the other end is the bottom end. The first sensor 102 is electrically connected to the electrode 302 on the top of the support body 101 . The second sensor 103 is electrically connected to the electrode 301 at the bottom of the support body 101 .

Preferably, the support body 101 is a columnar spacer (Post Spacer, PS), on which a polymer material with relatively strong compression resistance can be plated. In this embodiment, the support body 101 is trapezoidal and located between four adjacent sub-pixels. The structure of the support body 101 is shown in FIG. 3 . After being powered on, the first sensor 102 senses the power of the second electrode 302 , and the second sensor 103 senses the power of the first electrode 301 . The change of the capacitance value is determined through the change of the electric quantity sensed by the first sensor 102 and the second sensor 103 , and then it is determined that a touch occurs.

In this embodiment, the first sensor 102 and the second sensor 103 are perpendicular and do not intersect. In order to determine the touch point more accurately, there is a linear first sensor 102 or a linear second sensor 103 between every two adjacent sub-pixels.

In this embodiment, the capacitive touch array substrate further includes: gate lines 104 and data lines 105 . To facilitate process implementation, the linear first sensor 102 is parallel to the gate line 104 and is on the same layer, and the linear second sensor 103 is parallel to the data line 105 and is on the same layer.

Preferably, the bottom electrode 301 and the top electrode 302 are made of indium tin oxide (Indium TinOxide, ITO). ITO thin film is an n-type semiconductor material with high electrical conductivity, high visible light transmittance, high mechanical hardness and good chemical stability. Other conductive materials are also suitable for this embodiment.

The capacitive touch array substrate in this embodiment can be applied in capacitive touch liquid crystal panels, and further applied in electronic products with touch screens.

In this embodiment, the structure of the capacitive touch array substrate is improved, and a process method for manufacturing the capacitive touch array substrate is provided below.

Referring to FIG. 4, the method flow for manufacturing a capacitive touch array substrate in this embodiment is as follows:

Step 401 : Fabricate the data line 105 on the substrate, and at the same time fabricate the second sensor 103 parallel to the data line 105 ; reserve the position of the support body 101 on the second sensor 103 .

That is, the second sensor 103 is arranged when the data line 105 is arranged, and the second sensor 103 is parallel to the data line 105 and located between two adjacent sub-pixels. The second sensor 103 and the data line 105 are formed by one MASK (mask) operation, and the position of the support body 101 is reserved during the MASK operation. Preferably, the second sensor 103 has a width of about 5 um and a thickness of 1800-3500 angstroms.

Step 402 : Form an insulating layer 106 above the data line 105 and the second sensor 103 . A via hole for connecting the second sensor 103 and the support body 101 is reserved on the insulating layer 106 .

Step 403 : Fabricate the first sensor 102 while fabricating the grid lines 104 . That is, when the grid line 104 is laid out, the first sensor 102 is arranged, and the first sensor 102 is parallel to the gate line 104 and located between two adjacent sub-pixels. The first sensor 102 and the gate line 104 are formed by one MASK (mask) operation. Preferably, the width of the first sensor 102 is about 5 um, and the thickness is between 1800-3500 angstroms.

In this embodiment, the bottom end of the support body 101 is circular, and the longitudinal section is trapezoidal. Therefore, a via hole is reserved on the first sensor 102. The via hole is in the same position as the via hole on the insulating layer 106, so that the subsequent The position of the via hole is used to fabricate the support body 101 . In this embodiment, the first electrode 301 is added, so preferably, the thickness of the insulating layer 106 is larger than the thickness of the insulating layer 106 in the array substrate of the prior art, and the thickness of the insulating layer 106 in this embodiment is 1800- Between 3500 Angstroms.

Step 404 : Fabricate the first electrode 301 on the second sensor 103 .

Step 405 : Deposit a layer of resin material, and form a support body 101 through a patterning process. The support body 101 is located at the position of the via hole and directly connected to the first electrode 301 .

Step 406 : Fabricate the second electrode 302 on the support body 101 .

Step 407 : depositing a conductive layer (Mo/Al) of several thousand angstroms on the second electrode 302 of the support body 101 and on the first sensor 102 to connect the second electrode 302 and the first sensor 102 .

In the embodiment of the present invention, two electrodes are added on the support body to form a capacitor, which is connected with the sensor to realize touch sensing. The structure needs to be exposed and etched once to the support body during production. Compared with the IN-CELL type in the prior art, the process is obviously simpler, and there is no special requirement for the liquid crystal.

In the above embodiments, only the manufacturing process of the touch part is specifically described, and the manufacturing process related to the TFT can be known from the prior art, and will not be described in detail here. Moreover, the above-mentioned embodiment takes the top-gate structure as an example, that is, the source-drain electrode layer (including the data line) is fabricated on the substrate first, and then the gate metal layer is fabricated; in the actual fabrication process, those skilled in the art may also The above scheme is equivalently extended to obtain a scheme suitable for the bottom gate structure.

Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and equivalent technologies thereof, the present invention also intends to include these modifications and variations.

Claims (7)

1. a capacitive touch array substrate, is characterized in that, comprising: for supporting the supporter of color membrane substrates, first sensor, the second sensor, data line and grid line;

Respectively there is an electrode on the bottom of supporter and top, form electric capacity; Wherein, be top near one end of color membrane substrates, the other end is bottom;

First sensor is electrically connected with the electrode on supporter top;

Second sensor is electrically connected with the electrode of supporter bottom;

Wherein, described first sensor is parallel with grid line and at same layer, and described second sensor is parallel with data line and at same layer.

2. capacitive touch array substrate as claimed in claim 1, it is characterized in that, described supporter is cylindrical spacer.

3. capacitive touch array substrate as claimed in claim 1, is characterized in that, first sensor and the second sensor vertical and non-intersect.

4. capacitive touch array substrate as claimed in claim 3, is characterized in that often having a linear first sensor or linear second sensor between adjacent two sub-pixs.

5. capacitive touch array substrate as claimed in claim 1, it is characterized in that, the material of the electrode of bottom and the electrode on top is tin indium oxide ITO.

6. a capacitance touch liquid crystal panel, is characterized in that, comprising: the capacitive touch array substrate according to any one of claim 1 to 5.

7. make a method for capacitive touch array substrate, it is characterized in that, comprise the following steps:

Substrate makes data line and the second sensor, described second sensor reserves the position of supporter, wherein, described second sensor is parallel with data line;

Above described data line and the second sensor, forming insulation course, this insulation course being reserved with the via hole for connecting described second sensor and supporter;

While making grid line, make first sensor, wherein, described first sensor is parallel with grid line;

Second sensor makes the first electrode;

Deposition one deck resin material, and form supporter by patterning processes;

Supporter makes the second electrode;

On the second electrode and on first sensor, deposit one deck conductive layer, in order to connect the second electrode and first sensor.