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CN102891125B - 芯片封装结构及其制作方法 - Google Patents

芯片封装结构及其制作方法 Download PDF

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CN102891125B
CN102891125B CN201110270643.4A CN201110270643A CN102891125B CN 102891125 B CN102891125 B CN 102891125B CN 201110270643 A CN201110270643 A CN 201110270643A CN 102891125 B CN102891125 B CN 102891125B
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CN102891125A (zh
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潘玉堂
周世文
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Chipmos Technologies Inc
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Abstract

一种芯片封装结构,包括导线架、芯片、焊线与封装胶体。导线架包括芯片座、引脚与绝缘层。芯片座具有第一上、下表面,且包括芯片接合部与周缘部。芯片座于周缘部形成介于第一上表面与下表面间的第二上表面。引脚配置于芯片座周围。各引脚具有顶面与第一底面,且包括悬臂部与外接部。引脚于悬臂部形成介于顶面与第一底面间的第二底面,悬臂部与外接部连接且自外接部朝芯片座延伸。绝缘层位于周缘部的第二上表面上且连接悬臂部与芯片座。芯片配置于芯片接合部上。焊线分别电性连接芯片至悬臂部。封装胶体覆盖芯片、焊线、绝缘层与导线架。

Description

芯片封装结构及其制作方法
技术领域
本发明有关于一种半导体封装技术,且特别是有关于一种芯片封装结构及其制作方法。
背景技术
半导体封装技术包含有许多封装形态。随着芯片封装结构小型化以及薄化的趋势,发展出属于扁平封装系列的四方扁平无外引脚(quad flat no-lead,QFN)封装。在四方扁平无外引脚封装的工艺中,通常先将芯片配置于导线架中的芯片座上。然后,进行打线(wire bonding)工艺,使芯片通过多条焊线电性连接至导线架中的引脚。之后,通过封装胶体来覆盖芯片、焊线、与导线架。
一般来说,上述的引脚包括悬臂部,以使封装胶体可填充于悬臂部下方,帮助封装胶体与引脚紧密接合(mold lock),防止封装胶体与导线架剥离。然而,在上述的打线工艺中,引脚的悬臂部会因为下压力而上下晃动或变形,使得焊线无法有效地固接至引脚,因而容易自引脚脱落,造成电性接合不良或失效。此外,在封胶工艺中,引脚的悬臂部也容易因模流而偏移,导致引脚桥接及电性短路。
发明内容
本发明提供一种芯片封装结构,其在引脚与芯片座之间具有用以固接引脚的绝缘层。
本发明另提供一种芯片封装结构的制作方法,其可避免引脚在进行打线工艺时产生晃动。
本发明提出一种芯片封装结构,其包括导线架、芯片、多条焊线以及封装胶体。导线架包括芯片座、多个引脚以及绝缘层。芯片座具有第一上表面与下表面,且包括芯片接合部与周缘部。芯片座于周缘部形成介于芯片座的第一上表面与下表面之间的第二上表面。引脚配置于芯片座周围。各引脚具有顶面与第一底面,且包括悬臂部与外接部。引脚于悬臂部形成介于各引脚的顶面与第一底面之间的第二底面,而悬臂部与外接部连接且自外接部朝芯片座延伸。绝缘层位于周缘部的第二上表面上,且连接各引脚的悬臂部与芯片座。芯片配置于芯片接合部上。焊线分别电性连接芯片至悬臂部。封装胶体覆盖芯片、焊线、绝缘层与导线架。
依照本发明实施例所述的芯片封装结构,上述的绝缘层更局部形成于相邻的引脚的悬臂部之间。
依照本发明实施例所述的芯片封装结构,上述的绝缘层例如覆盖周缘部及部分封装胶体。
依照本发明实施例所述的芯片封装结构,上述的周缘部的第二上表面与悬臂部的第二底面例如为共平面。
依照本发明实施例所述的芯片封装结构,上述的悬臂部的第二底面介于引脚的顶面与周缘部的第二上表面之间。
依照本发明实施例所述的芯片封装结构,上述的封装胶体例如暴露出外接部的底面。
本发明另提出一种芯片封装结构的制作方法,此方法是先提供金属层。然后,将金属层的第一上表面图案化,以定义出芯片接合部与多个引脚部,其中引脚部与芯片接合部之间具有间隙。接着,于间隙中形成绝缘层。而后,将金属层的第一下表面图案化,移除引脚部下方与绝缘层下方的部分金属层,以定义出多个引脚以及芯片座。芯片座与引脚构成导线架。芯片座具有芯片接合部与周缘部,芯片座于周缘部形成介于金属层的第一上表面与第一下表面之间的第二上表面。各引脚具有悬臂部与外接部,引脚于悬臂部形成介于金属层的第一上表面与第一下表面之间的第二下表面,而悬臂部与外接部连接且自外接部朝芯片座延伸。绝缘层位于周缘部的第二上表面上,且连接引脚的悬臂部与芯片座。继之,将芯片配置于芯片接合部上,且通过焊线电性连接芯片与悬臂部。之后,形成封装胶体,以覆盖芯片、焊线、绝缘层与导线架。
依照本发明实施例所述的芯片封装结构的制作方法,上述的绝缘层更局部形成于相邻的引脚的悬臂部之间。
依照本发明实施例所述的芯片封装结构的制作方法,上述的绝缘层例如覆盖周缘部及部分封装胶体。
依照本发明实施例所述的芯片封装结构的制作方法,上述的周缘部的第二上表面与悬臂部的第二下表面例如为共平面。
依照本发明实施例所述的芯片封装结构的制作方法,上述的悬臂部的第二下表面介于金属层的第一上表面与周缘部的第二上表面之间。
依照本发明实施例所述的芯片封装结构的制作方法,上述的封装胶体例如暴露出外接部的底面。
基于上述,本发明于引脚的悬臂部与芯片座之间形成绝缘层,使得悬臂部通过绝缘层而固接至周缘部,因此可以避免悬臂部在进行打线工艺的过程中因下压力而产生晃动造成焊线接合不良,且可避免因下压力而造成引脚变形。再者,也可以避免封胶工艺中因模流而造成引脚的悬臂部偏移的问题。
为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合所附附图作详细说明如下。
附图说明
图1A至图1D为依照本发明一实施例所绘示的芯片封装结构的制作方法的上视示意图。
图2A至图2D为依照图1A至图1D中的剖线I-I’所绘示的剖面示意图。
具体实施方式
图1A至图1D为依照本发明一实施例所绘示的芯片封装结构的制作方法的上视示意图。图2A至图2D为依照图1A至图1D中的剖线I-I’所绘示的剖面示意图。首先,请同时参照图1A与图2A,提供金属层100。金属层100具有第一上表面100a以及与第一上表面100a相对的第一下表面100b。金属层100例如为铜箔基板,其可用以制作出多个导线架。在本实施例中,仅以一个导线架示之。然后,将金属层100的第一上表面100a图案化,以定义出芯片接合部116a与多个引脚部104,其中引脚部104与芯片接合部116a之间具有间隙106,且相邻的引脚部104之间具有间隙108。在本实施例中,将金属层100的第一上表面100a图案化的方法例如是进行蚀刻工艺,以局部移除金属层100的上半部,以形成突出结构(芯片接合部116a与引脚部104)。
然后,请同时参照图1B与图2B,于间隙106中形成绝缘层110。绝缘层110的形成方法例如是先于间隙106中涂布绝缘材料,然后再将绝缘材料固化。此外,在涂布绝缘材料的过程中,部分绝缘材料也会被涂布至相邻的引脚部104之间的间隙108中,使得间隙108中邻近芯片接合部116a的区域亦形成有绝缘层110。上述的绝缘材料例如为聚亚酰胺(polyimide,PI)、防焊漆(solderresist/mask)、苯环丁烯(benzocyclobutene,BCB)或其它类似的材料。
接着,请同时参照图1C与图2C,将金属层100的第一下表面100b图案化,移除引脚部104下方与绝缘层110下方的部分金属层100,以定义出构成导线架112的多个引脚114以及芯片座116,其中引脚114位于芯片座116的周围。在本实施例中,将金属层100的第一下表面100b图案化的方法例如是进行蚀刻工艺,以局部移除金属层100的下半部。更具体而言,绝缘层110下方以及引脚部104下方的部份金属层100是以半蚀刻方式移除直至绝缘层110显露出。金属层100的第一下表面100b完成图案化后,引脚114具有悬臂部114a与外接部114b。悬臂部114a为在后续进行打线工艺时焊线连接的部分,而外接部114b则为后续所形成的芯片封装结构电性连接至外部组件的部分。芯片座116除了具有芯片接合部116a之外,还包含周缘部116b。芯片接合部116a为后续进行芯片接合工艺时供芯片配置于其上的部分。
进一步说,在将金属层100的第一下表面100b图案化之后,芯片座116于周缘部116b的上端会形成一第一凹部117a,使芯片接合部116a的厚度大于周缘部116b的厚度,且引脚114于悬臂部114a的下端形成一第二凹部117b,使外接部114b的厚度大于悬臂部114a的厚度。更具体而言,第一凹部117a使芯片座116于周缘部116b形成介于金属层100的第一上表面100a与第一下表面100b之间的第二上表面119a,而第二凹部117b使引脚114于悬臂部114a形成介于第一上表面100a与第一下表面100b之间的第二下表面119b。此外,悬臂部114a连接外接部114b且自外接部114b朝芯片座116延伸。绝缘层110位于悬臂部114a与芯片接合部116a之间,并位于周缘部116b的第二上表面119a上。如此一来,通过绝缘层110,悬臂部114a可固定连接至芯片座116的周缘部116b。此外,由于绝缘层110亦位于相邻的悬臂部114a之间,因此可以更有效地防止悬臂部114a在后续工艺中因外力而产生晃动、变形或偏移。
此外,在本实施例中,在将金属层100的第一下表面100b图案化之后,所形成的引脚114的顶面以及芯片座116的芯片接合部116a的上表面即为金属层100的第一上表面100a,而引脚114的外接部114b的底面即为金属层100的第一下表面100b。引脚114的顶面、芯片接合部116a的上表面及绝缘层110的上表面为共平面,而周缘部116b的第二上表面119a与悬臂部114a的第二下表面119b为共平面。于其它实施例中,悬臂部114a的第二下表面119b可以介于金属层100的第一上表面100a与周缘部116b的第二上表面119a之间。
之后,请同时参照图1D与图2D,将芯片118配置于芯片接合部116a上。此外,在将芯片118配置于芯片接合部116a上之前,先于芯片接合部116a或芯片118的背面上形成黏着层120,以使芯片118稳固地设置于芯片接合部116a上。然后,进行打线工艺,形成多条焊线122分别电性连接芯片118至悬臂部114a。在进行打线工艺的过程中,由于悬臂部114a已通过绝缘层110而固接至芯片座116的周缘部116b,因此可以避免悬臂部114a因打线时的下压力而产生晃动或变形的问题,使得焊线122可以牢固地与引脚114接合而不至脱落。此外,在本实施例中,位于相邻的悬臂部114a之间亦形成有绝缘层110,因此可以更有效地防止悬臂部114a在打线工艺或后续的封胶工艺中产生晃动、变形或偏移。
请继续参照图1D与图2D,在形成焊线122之后,形成封装胶体124,以覆盖芯片118、焊线122、绝缘层110与导线架112。封装胶体124也会填充于引脚114的第二凹部117b中,使封装胶体124与导线架112更紧密接合。之后,因金属层100实际上是可形成多个导线架112,因此还需进行切割工艺,以形成多个芯片封装结构10。在本实施例中,绝缘层110覆盖周缘部116b及部分封装胶体124。此外,封装胶体124暴露出外接部114b与芯片座116的底面,使得芯片封装结构10可通过显露的外接部114b的底面而电性连接至外部组件(例如印刷电路板),也可透过暴露的芯片座116的底面进行散热。于其它实施例中,封装胶体124可不暴露出芯片座116的底面,即封装胶体124亦覆盖住芯片座116的底面。
虽然本发明已以实施例揭露如上,然其并非用以限定本发明,任何所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作些许的更动与润饰,故本发明的保护范围当视后附的权利要求所界定者为准。

Claims (12)

1.一种芯片封装结构,包括:
一导线架,包括:
一芯片座,具有一第一上表面与一下表面,且包括一芯片接合部与一周缘部,该芯片座于该周缘部形成介于该第一上表面与该下表面之间的一第二上表面;
多个引脚,配置于该芯片座周围,各该引脚具有一顶面与一第一底面,且包括一悬臂部与一外接部,该引脚于该悬臂部形成介于该顶面与该第一底面之间的一第二底面,该悬臂部与该外接部连接且自该外接部朝该芯片座延伸;以及
一绝缘层,位于该周缘部的该第二上表面上,且连接所述多个引脚的所述多个悬臂部与该芯片座;
一芯片,配置于该芯片接合部上;
多条焊线,分别电性连接该芯片至所述多个悬臂部;以及
一封装胶体,覆盖该芯片、所述多个焊线、该绝缘层与该导线架,其中各该引脚与该芯片接合部之间具有一第一间隙,而相邻的两个所述多个引脚之间具有一第二间隙,该绝缘层填满该第一间隙,而该绝缘层与该封装胶体填满该第二间隙。
2.如权利要求1所述的芯片封装结构,其特征在于,该绝缘层更局部形成于相邻的所述多个引脚的所述多个悬臂部之间。
3.如权利要求1所述的芯片封装结构,其特征在于,该绝缘层覆盖该周缘部及部分该封装胶体。
4.如权利要求1所述的芯片封装结构,其特征在于,该周缘部的该第二上表面与所述多个悬臂部的该第二底面为共平面。
5.如权利要求1所述的芯片封装结构,其特征在于,所述多个悬臂部的该第二底面介于所述多个引脚的该顶面与该周缘部的该第二上表面之间。
6.如权利要求1所述的芯片封装结构,其特征在于,该封装胶体暴露出所述多个外接部的底面。
7.一种芯片封装结构的制作方法,包括:
提供一金属层,该金属层具有一第一上表面与一第一下表面;
图案化该金属层的该第一上表面,以定义出一芯片接合部与多个引脚部;
形成一绝缘层于所述多个引脚部与该芯片接合部之间;
图案化该金属层的该第一下表面,移除所述多个引脚部下方与该绝缘层下方的部分该金属层,以定义出多个引脚以及一芯片座,该芯片座与所述多个引脚构成一导线架,其中该芯片座具有该芯片接合部与一周缘部,该芯片座于该周缘部形成介于该金属层的该第一上表面与该第一下表面之间的一第二上表面,各该引脚具有一悬臂部与一外接部,该引脚于该悬臂部形成介于该金属层的该第一上表面与该第一下表面之间的一第二下表面,该悬臂部与该外接部连接且自该外接部朝该芯片座延伸,该绝缘层位于该周缘部的该第二上表面上,且连接所述多个悬臂部与该芯片座;
将一芯片配置于该芯片接合部上,且通过多条焊线电性连接该芯片与所述多个悬臂部;以及
形成一封装胶体,以覆盖该芯片、所述多个焊线、该绝缘层与该导线架,其中各该引脚与该芯片接合部之间具有一第一间隙,而相邻的两个所述多个引脚之间具有一第二间隙,该绝缘层填满该第一间隙,而该绝缘层与该封装胶体填满该第二间隙。
8.如权利要求7所述的芯片封装结构的制作方法,其特征在于,该绝缘层更局部形成于相邻的所述多个引脚的悬臂部之间。
9.如权利要求7所述的芯片封装结构的制作方法,其特征在于,该绝缘层覆盖该周缘部及部分该封装胶体。
10.如权利要求7所述的芯片封装结构的制作方法,其特征在于,该周缘部的该第二上表面与所述多个悬臂部的该第二下表面为共平面。
11.如权利要求7所述的芯片封装结构的制作方法,其特征在于,所述多个悬臂部的该第二下表面介于该金属层的该第一上表面与该周缘部的该第二上表面之间。
12.如权利要求7所述的芯片封装结构的制作方法,其特征在于,该封装胶体暴露出所述多个外接部的底面。
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