CN102747327A - Normal-pressure evaporation method, normal-pressure evaporation device and manufacturing equipment of anti-fouling film - Google Patents

Abstract

The invention relates to a normal-pressure evaporation method, a normal-pressure evaporation device and manufacturing equipment of an anti-fouling film. The atmospheric pressure evaporation method of the anti-fouling film comprises the following steps. A substrate is provided. An anti-fouling coating solution is subjected to an gasification step to form a plurality of anti-fouling vapor molecules. Depositing the anti-fouling vapor molecules on a surface of the substrate to form an anti-fouling film.

Description

Atmospheric pressure vapor deposition method, atmospheric pressure vapor deposition device and production equipment of antifouling thin film

technical field

The present invention relates to a method for manufacturing a film, and in particular to an Atmospheric Evaporation method, an Atmospheric Evaporation device and a manufacturing device for an Anti-smudge Film.

Background technique

With the popularity of portable electronic devices, in order to maintain their appearance, the protection requirements for the outer surface of such portable electronic devices are also increasing. At present, in order to protect the outer surface of these electronic devices, the most common method is to coat an antifouling film, such as an anti-fingerprint film, on the outer surface of the electronic device. For example, the surface of the touch screen of a very popular touch electronic device is usually covered with a layer of anti-fingerprint film, so that the screen surface still maintains good display quality and operational sensitivity.

Generally speaking, the surface of the anti-fouling film mostly has good anti-fouling properties, can prevent fingerprints from sticking, has a smooth touch, can be waterproof and oil-draining, and is transparent. In addition, the antifouling film needs to have high adhesion to the outer surface of the device it covers in order to prolong the service life of the antifouling film.

Currently, there are four main ways to coat antifouling films. The first method is the vacuum evaporation method, which is to heat the container containing the antifouling coating solution under the substrate in a vacuum chamber, so that the antifouling coating in it is vaporized and rises and adheres to the lower surface of the substrate. and then form a layer of antifouling film on the lower surface of the substrate. However, this method of coating needs to vacuumize the evaporation reaction chamber, so not only is the equipment expensive and the process time is long, resulting in poor productivity, but also this method is not suitable for the continuous surface of the substrate to be evaporated. conduct.

The second method is the dipping coating method, which is to immerse the substrate to be treated in the antifouling coating solution, and then take the substrate to be treated out of the antifouling coating solution, so that the antifouling coating can be coated on the surface of the substrate to be treated. However, for the coating of continuous substrates to be treated, the volume of equipment required by this method is quite large, so it is not suitable for application on continuous substrates to be treated.

The third way is spray coating (spray coating), which uses a spray device to directly spray the antifouling paint on the surface of the substrate to be treated, so as to form an antifouling film on the surface of the substrate to be treated. However, most of the coatings sprayed by the spraying device have just contacted the surface of the substrate to be treated before being vaporized, so the droplets sprayed by the spraying device will drop on the surface to be coated of the substrate, so the The uniformity of the antifouling film formed was poor.

The fourth way is brush coating (brush coating) method, which is to directly apply the antifouling paint on the surface of the substrate to be treated with a brush. However, such a coating method often produces repeated coatings on the adjacent parts of two adjacent painting areas, so the uniformity of the formed antifouling film is poor.

Therefore, there is an urgent need for a method and equipment for making an antifouling film, which can quickly and uniformly coat a large amount of antifouling coatings on the surface of the substrate to be treated.

Contents of the invention

Therefore, one aspect of the present invention is to provide an atmospheric pressure evaporation method for an antifouling film, which uses atmospheric pressure evaporation to coat the antifouling film, thus greatly increasing the production capacity of the antifouling film.

Another aspect of the present invention is to provide an atmospheric pressure evaporation method for an antifouling film, which can efficiently coat a continuous antifouling film on a substrate to be treated.

Another aspect of the present invention is to provide an atmospheric pressure evaporation method for an antifouling film, which can uniformly coat a large amount of antifouling coating on the surface of the substrate to be treated quickly and effectively.

Another aspect of the present invention is to provide a normal-pressure vapor deposition device and production equipment for an anti-fouling film, which can coat the anti-fouling film in a normal-pressure environment, so that the anti-fouling film on the substrate to be treated can be quickly coated. Coating of dirty films.

Another aspect of the present invention is to provide an atmospheric pressure evaporation device and production equipment for antifouling films, which can simultaneously coat a large number of substrates with antifouling films, thus greatly increasing the output of antifouling films.

Another aspect of the present invention is to provide an antifouling film atmospheric pressure evaporation device and manufacturing equipment, which can efficiently and uniformly coat the antifouling film on a continuous substrate.

According to the above object of the present invention, a method for atmospheric pressure evaporation of an antifouling film is proposed, which includes the following steps. A substrate is provided. A gasification step is performed on an antifouling coating solution to form a plurality of antifouling vapor molecules. The antifouling vapor molecules are deposited on a surface of the aforementioned substrate to form an antifouling film.

According to an embodiment of the present invention, the above-mentioned antifouling paint solution includes an antifouling paint and a solvent, and the solvent includes a highly volatile liquid and/or water.

According to another embodiment of the present invention, the above-mentioned antifouling coating material includes fluorocarbon silicon hydrocarbon compounds, perfluorocarbon silicon hydrocarbon compounds, fluorocarbon silane hydrocarbon compounds, perfluorosilane hydrocarbon compounds, or perfluorosilicon compounds. Alkane ether compounds.

According to another embodiment of the present invention, the vapor pressure of the above-mentioned highly volatile liquid at normal temperature is greater than that of water, and the highly volatile liquid is selected from the group consisting of alcohols, ethers, alkanes, and ketones , Benzene, fluorine-containing alcohols, fluorine-containing ethers, fluorine-containing alkanes, fluorine-containing ketones, and fluorine-containing benzenes.

According to yet another embodiment of the present invention, the gasification step includes utilizing an atomizing component.

According to yet another embodiment of the present invention, before the vaporization step, the atmospheric pressure vapor deposition method of the anti-fouling film further includes cleaning and treating the surface of the substrate with a plasma, so as to form multiple layers on the surface of the substrate. These functional groups may include multiple hydroxyl functional groups, multiple nitrogen-hydrogen functional groups, and/or multiple dangling bonds.

According to yet another embodiment of the present invention, before the vaporization step, the atmospheric pressure vapor deposition method of the antifouling film further includes covering the substrate with a protective cover, and the vaporization step is performed in the protective cover.

According to yet another embodiment of the present invention, before the step of depositing the antifouling vapor molecules, the atmospheric pressure evaporation method of the above antifouling film further includes allowing the antifouling vapor molecules to convect in the protective cover.

According to the above object of the present invention, another atmospheric pressure evaporation device for antifouling thin film is proposed. The atmospheric pressure evaporation device of the antifouling film includes a conveying device and an atomizing device. The atomizing device includes at least one paint receiving device and at least one atomizing component. The transfer device is adapted to transfer at least one substrate. The aforementioned at least one paint receiving device is used for loading an antifouling paint solution. The aforementioned at least one atomizing component is arranged on the aforementioned at least one paint receiving device, and is used to vaporize the antifouling paint solution into a plurality of antifouling paint vapor molecules to be deposited on a surface of the aforementioned at least one substrate.

According to an embodiment of the present invention, the above-mentioned at least one atomization component includes an ultrasonic atomization vibration piece, a heated vapor deposition atomization component, a high-pressure gas injection component, or a nozzle atomization component.

According to another embodiment of the present invention, the above-mentioned at least one atomizing assembly is arranged on the upper part of the above-mentioned at least one paint receiving device, and the atomizing device further includes at least one paint conducting member, which is suitable for delivering the antifouling paint solution to the above-mentioned at least one atomization component.

According to another embodiment of the present invention, the anti-fouling thin film evaporation device further includes a protective cover adapted to cover the at least one substrate, at least one paint receiving device, and at least one atomizing component.

According to yet another embodiment of the present invention, the above-mentioned at least one paint receiving device includes a plurality of paint receiving devices, and at least one atomizing component including a single atomizing component is disposed on these paint receiving devices.

According to yet another embodiment of the present invention, the above-mentioned at least one paint receiving device includes a single paint receiving device, and the above-mentioned at least one atomizing component includes multiple atomizing components disposed on the paint receiving device.

According to the above-mentioned purpose of the present invention, an antifouling film manufacturing equipment is also proposed. The manufacturing equipment of the antifouling film includes a transmission device, a plasma device and an atmospheric pressure evaporation device. The conveying device is suitable for conveying at least one substrate. The plasma device is arranged above the conveying device and is suitable for performing a surface activation treatment on a surface of the aforementioned at least one substrate. The atmospheric pressure evaporation device is adjacent to the plasma device. The atmospheric pressure evaporation device includes an atomizing device, and the atomizing device includes at least one coating receiving device and at least one atomizing component. The at least one paint receiving device is used for loading an antifouling paint solution. The aforementioned at least one atomizing component is arranged on at least one paint receiving device to vaporize the antifouling paint solution into a plurality of antifouling paint vapor molecules, so that these antifouling paint vapor molecules are deposited on the aforementioned surface activation treated An antifouling film is formed on the surface of at least one substrate.

According to an embodiment of the present invention, the above plasma device is an atmospheric plasma device, a low pressure plasma device or an electromagnetically coupled plasma device.

According to another embodiment of the present invention, the above-mentioned atmospheric pressure evaporation device further includes a paint capacity sensor adapted to sense the amount of the antifouling paint solution loaded in the at least one paint receiving device.

It can be seen from the above-mentioned embodiments of the present invention that one advantage of the present invention is that the present invention uses atmospheric pressure evaporation to coat the anti-fouling film, so the procedure of stepping down and vacuuming is omitted, which can greatly reduce equipment costs and increase production capacity.

It can be seen from the above-mentioned embodiments of the present invention that another advantage of the present invention is that the present invention uses atmospheric pressure evaporation to coat the anti-fouling film, so the anti-fouling film on the continuous substrate to be treated can be carried out very efficiently. coating.

It can be seen from the embodiments of the present invention described above that another advantage of the present invention is that the present invention carries out the atomization and gasification of the antifouling paint solution in an atmospheric environment, so that a large amount of antifouling paint can be uniformly sprayed quickly and effectively. Apply to single or multiple surfaces of the substrate to be treated.

It can be seen from the above-mentioned embodiments of the present invention that another advantage of the present invention is that the atmospheric pressure evaporation device and production equipment of the antifouling film of the present invention can coat the antifouling film under the normal pressure environment, so it can be quickly The coating of the antifouling film of the substrate to be treated is carried out.

It can be seen from the embodiments of the present invention described above that another advantage of the present invention is that the atmospheric pressure vapor deposition device and production equipment of the antifouling film of the present invention can simultaneously coat a large number of antifouling films on substrates, thus greatly improving the performance of the antifouling film. Yield of antifouling film.

It can be seen from the above embodiments of the present invention that another advantage of the present invention is that the atmospheric pressure evaporation device and production equipment of the antifouling film of the present invention can efficiently and uniformly coat the antifouling film on the continuous substrate .

Description of drawings

In order to make the above and other objects, features, advantages and embodiments of the present invention more comprehensible, the accompanying drawings are described as follows:

1 is a schematic diagram illustrating an atomization device of an atmospheric pressure evaporation device for an antifouling film according to an embodiment of the present invention;

Fig. 2 is a schematic diagram illustrating the installation of the atmospheric pressure evaporation device for the antifouling film of Fig. 1;

FIG. 3 is a schematic diagram illustrating a manufacturing equipment of an antifouling film according to an embodiment of the present invention;

FIG. 4 is a flow chart illustrating an atmospheric pressure evaporation method for an antifouling film according to an embodiment of the present invention;

FIG. 5 is a schematic diagram illustrating an antifouling film deposited on a substrate at atmospheric pressure according to an embodiment of the present invention.

[Description of main component symbols]

100: Atmospheric vapor deposition device 102: Transmission device

102a: Transmission device 104: Carrying member

104a: Bearing component 106: Coating receiving device

108: Atomization component 110: Paint conduction component

112: Antifouling paint solution 114: Paint supply tank

116: Transmission tube 118: Protective cover

120: Substrate 122: Roller

124: Atomization device 126: Paint volume sensor

128: Convection device 130: Heater

132: reaction chamber 134: opening

136: Plasma device 138: Crafting equipment

140: Anti-fouling paint mist 142: Anti-fouling paint vapor molecules

144: Plasma 146: Surface

148: Supporting device 150: Antifouling film

152: Side 154: Surface

200: Method 202: Steps

204: Step 206: Step

208: Steps

Detailed ways

Please refer to FIG. 1 and FIG. 2 , wherein FIG. 1 is a schematic diagram illustrating an atomization device of an atmospheric pressure evaporation device for an antifouling film according to an embodiment of the present invention, and FIG. 2 is a schematic diagram illustrating the antifouling film in FIG. 1 Schematic diagram of the setup of the atmospheric pressure vapor deposition device for thin films. In this embodiment, as shown in FIG. 2 , the atmospheric pressure evaporation device 100 for the antifouling thin film mainly includes a conveying device 102 and an atomizing device 124 . In one embodiment, as shown in FIG. 1 , the atomizing device 124 includes one or more paint receiving devices 106 and one or more atomizing components 108 . The transport device 102 is used to transport one or more substrates 120 to be processed, as shown in FIG. 2 . In the embodiment shown in FIG. 2 , the transport device 102 may include a carrying member 104 , and the substrate 120 to be processed may be placed on the carrying member 104 and transported by the transport device 102 . Wherein, the substrate 120 may be, for example, a protective glass, a plastic substrate, a strengthened glass or a metal substrate.

In another embodiment, as shown in FIG. 3 , the transmission device 102 a includes a bearing member 104 a and several rollers 122 , wherein the rollers 122 are disposed under the bearing member 104 a and can drive the bearing member 104 a. In yet other embodiments, the substrate can be a continuous substrate, and the conveying device can be a conveying device that drives the continuous substrate, for example, two sides that are supported on the front and rear sides of the atomizing device 124 and drive the continuous substrate forward. Rollers, where the substrate does not need to be carried by the conveyor belt.

Referring to FIG. 1 again, each paint receiving device 106 can be loaded with an antifouling paint solution 112 . Moreover, as shown in FIG. 2 , the paint receiving device 106 is disposed above the substrate 120 . The antifouling paint solution 112 may include an antifouling paint and a solvent. In one embodiment, the material of the antifouling coating may include fluorocarbon silicon compounds, perfluorocarbon silicon compounds, fluorocarbon silane compounds, perfluorosilane compounds, or perfluorosilane ether compounds . In addition, the solvent of the antifouling paint solution 112 may include, for example, a highly volatile liquid, water, or a mixture of a highly volatile liquid and water. The nature of the highly volatile solvent is a liquid at normal temperature, with a stable chemical structure, high volatility, low boiling point, transparent and colorless, and a liquid with no obvious harm to organisms. In a preferred embodiment, the vapor pressure of the highly volatile liquid at normal temperature is greater than that of water, and the highly volatile liquid can be selected from alcohols, ethers, alkanes, ketones, benzenes , a group consisting of fluorine-containing alcohols, fluorine-containing ethers, fluorine-containing alkanes, fluorine-containing ketones and fluorine-containing benzenes.

The atomizing assembly 108 is disposed on an upper part of one side of the paint receiving device 106 to facilitate atomizing the antifouling paint solution 112 on the substrate 120 . After being processed by the atomizing component 108, the antifouling paint solution 112 can be atomized into an antifouling paint mist, and then vaporized into antifouling paint vapor molecules due to the rapid volatilization of the solvent in the atomized solution. The atomization component 108 can be, for example, an ultrasonic atomization vibration plate, a heating evaporation atomization component, a high-pressure gas injection component, or a nozzle atomization component. In this embodiment, as shown in FIG. 1 and FIG. 2 , the atomization component 108 is an ultrasonic atomization vibrator.

In the embodiment shown in FIGS. 1 and 2 , the atomizing device 124 further includes at least one paint conducting member 110 . The paint conducting member 110 is connected between the antifouling paint solution 112 in the paint receiving device 106 and the atomizing component 108 , so as to transfer the antifouling paint solution 112 from the paint receiving device 106 to the atomizing component 108 . Paint transfer member 110 may be, for example, a tampon or a transfer tube. In another embodiment, the atomizing assembly 108 can be placed directly on the surface of the antifouling paint solution 112 , and the atomizing device 122 need not include the paint conducting member 110 in this case.

In the embodiment of FIG. 1 and FIG. 2 , the atomizing device 124 includes a plurality of paint receiving devices 106 , a plurality of atomizing components 108 and a plurality of paint conducting members 110 . In the atomizing device 124 , each paint receiving device 106 is correspondingly equipped with an atomizing assembly 108 and a paint conducting member 110 .

However, in another embodiment, the atomizing device may include a plurality of paint receiving devices and a single atomizing assembly disposed on the paint receiving devices. The antifouling paint solution loaded by these paint receiving devices can be sent to the atomizing assembly through the paint conducting member respectively. At this time, through this atomizing component, the antifouling paint solution loaded in all the paint receiving devices can be atomized.

In yet another embodiment, the atomizing device may include a single paint receiving device and a plurality of atomizing components, wherein the atomizing components are arranged on the paint receiving device. The antifouling paint solution loaded by the paint receiving device can be sent to all the atomizing components respectively through one or more paint conducting components. At this time, the antifouling paint solution loaded on the paint receiving device can be atomized through these atomizing components.

Please refer to FIG. 1 again, the atomizing device 124 can also include a paint supply tank 114 according to operational requirements, so as to supply the antifouling paint solution 112 to all the paint receiving devices 106 through the delivery pipe 116 connecting all the paint receiving devices 106 . In addition, in the atomizing device 124 , due to the principle of the connecting pipe, the liquid levels of the antifouling paint solution 112 in all the paint receiving devices 106 are substantially equal.

Therefore, in another embodiment, the atmospheric pressure evaporation device 100 can also be provided with a paint capacity sensor 126 in one of the paint receiving devices 106 according to actual needs, so as to sense the antifouling paint loaded in the paint receiving device 106. The amount of solution 122 is shown in FIG. 1 . The information on the quantity of the antifouling paint solution 122 monitored by the paint capacity sensor 126 can be directly displayed on a display unit on an outer surface of the atmospheric pressure evaporation device 100, or can be transmitted to the coating monitoring system by using a transmission line , for on-line staff to monitor the amount of the antifouling paint solution 122 in the paint receiving device 106 .

In this embodiment, a plurality of atomizing devices 124 can be used to simultaneously apply an antifouling film to a plurality of substrates 120 on the conveying device 102, for example, a plurality of substrates arranged in rows, columns or arrays. of evaporation. In addition, since the antifouling film is coated under normal pressure in the present invention, a large amount of antifouling paint can be uniformly coated on the surface of the substrate 120 quickly and effectively.

Please refer to FIG. 2 again, in this embodiment, the atmospheric pressure evaporation device 100 may further include a protective cover 118 . The protective cover 118 covers part of the transport device 102 and can define a reaction chamber 132 with the carrying member 104 of the transport device 102 . In addition, the protective cover 118 covers the substrate 120 on the conveying device 102 , the paint receiving device 106 , the atomizing assembly 108 , and the paint conducting member 110 of the atomizing device 124 . It is worth noting that when the substrate is a continuous substrate, the protective cover and the substrate it covers can directly define the reaction chamber.

As shown in FIG. 2 , a sidewall of the protective cover 118 may have an opening 134 . The area of the opening 134 of the protective cover 118 can be slightly larger than the area of the side of the paint receiving device 106 , so that the atomizing device 124 can enter the reaction chamber 132 inside the protective cover 118 through the opening 134 of the protective cover 118 . As shown in FIG. 3 , a supporting device 148 may be provided in the reaction chamber 132 to support the atomizing device 124 .

In one embodiment, the atomizing device 124 may further include a heater 130 . The heater 130 is preferably disposed in the reaction chamber 132 , for example, on the protective cover 118 inside the reaction chamber 132 or on the transport device 102 . The heater 130 can heat the mist of the antifouling paint generated by the atomizing component 108, thereby accelerating the conversion of the mist of the antifouling paint into vapor molecules of the antifouling paint. For example, when the solvent of the antifouling paint solution 112 is a non-volatile liquid such as water, the heater 130 can be used to help the mist of the antifouling paint to transform into vapor molecules of the antifouling paint smoothly.

In yet another embodiment, according to process requirements, the atomization device 124 may further include a convection device 128 . Wherein, the convection device 128 can also be disposed in the reaction chamber 132 , for example, on the protective cover 118 inside the reaction chamber 132 or on the transmission device 102 . The convection device 128 allows the antifouling paint vapor molecules distributed in the reaction chamber 132 to spread more uniformly in the reaction chamber 132 before the antifouling paint vapor molecules are deposited on the substrate 120 . The arrangement of the convection device 128 not only makes the formed antifouling film more uniform, but also enables the atmospheric pressure evaporation device 100 to smoothly coat the antifouling film on each surface of the three-dimensional structure.

The atmospheric vapor deposition device of this embodiment can be used with a plasma device to coat the antifouling film. Please refer to FIG. 3 , which is a schematic diagram illustrating an antifouling film manufacturing equipment according to an embodiment of the present invention. The anti-fouling film manufacturing equipment 138 includes not only the atmospheric pressure evaporation device 100 but also a plasma device 136 . In a preferred embodiment, the atmospheric pressure evaporation device 100 and the plasma device 136 can share the transmission device 102a. However, in another embodiment, the atmospheric pressure evaporation device 100 and the plasma device 136 may also use different transfer devices to transfer the substrate to be processed. Wherein, the atmospheric pressure evaporation device 100 and the plasma device 136 are both disposed above the transmission device 102a. The atmospheric pressure evaporation device 100 is preferably disposed adjacent to the plasma device 136 , so that after the substrate 120 is treated by the plasma device 136 , the atmospheric pressure evaporation of the antifouling film can be performed immediately.

The plasma device 136 is used to generate plasma 144 and use the plasma 144 to clean and modify the surface of the substrate 120 to activate the surface of the substrate 120 . In one embodiment, after the surface of the substrate 120 is activated by the plasma 144 , several functional groups can be formed on the surface of the substrate 120 . In one example, the plasma device 136 can use a working gas such as nitrogen, argon, oxygen or air to generate the plasma 144 . After the surface treatment by the plasma 144 , the functional groups generated on the surface of the substrate 120 may include, for example, hydroxyl functional groups and/or nitrogen hydrogen functional groups. In one embodiment, the functional groups generated on the surface 146 of the substrate 120 further include dangling bonds, wherein the dangling bonds can form bonds with the anti-fouling vapor molecules 142 .

In one embodiment, the plasma device 136 may be, for example, an atmospheric plasma device, a low-pressure plasma device, or an electromagnetically coupled plasma device, to generate atmospheric plasma or low-pressure plasma to clean and modify the surface of the substrate 120 . Wherein, the atmospheric plasma may be, for example, plasma jet or plasma torch or wide-width atmospheric plasma (dielectric barrier discharge; DBD or atmospheric glow discharge), and the low-pressure plasma may be, for example, vacuum plasma. However, it is worth noting that, in order to cooperate with the consistency of subsequent atmospheric vapor deposition, it is preferable to use atmospheric plasma to clean and activate the surface of the substrate 120 in this embodiment, so as to shorten the process time.

Please refer to FIG. 4 , which is a flowchart illustrating an atmospheric pressure evaporation method for an antifouling film according to an embodiment of the present invention. In this embodiment, the normal-pressure evaporation of the antifouling film can be performed in the manufacturing equipment 138 of the embodiment shown in FIG. 3 above. As shown in FIG. 4 , in this embodiment, the atmospheric pressure evaporation method 200 of an antifouling film may firstly provide a substrate 120 as described in step 202 .

In one embodiment, when step 202 is performed to provide the substrate 120, one or more substrates 120 may be disposed on the transfer device 102a. In the embodiment shown in FIG. 3, the substrate 120 is arranged on the carrier member 104a of the transport device 102a. In some other embodiments, when the substrate is a continuous substrate, the substrate can be transported by a conveying device (such as a roller) that drives the continuous substrate, and does not need to be carried by the supporting member 104a at this time.

In this embodiment, when coating the antifouling film 150 (please refer to FIG. 5 first), the plasma device 136 can be selectively used to generate the plasma 144 as described in step 204 of FIG. 4 according to the process requirements. , and use the plasma 144 to clean and modify the surface 146 of the substrate 120 , so as to activate the surface 146 of the substrate 120 . In one embodiment, after the surface 146 of the substrate 120 is activated by the plasma 144 , several functional groups can be formed on the surface 146 of the substrate 120 .

After the surface treatment step 204 of the substrate 120 is completed, step 206 is performed immediately. In one embodiment, when step 206 is performed, the atomizing device 124 may first be disposed above the surface 146 of the substrate 120, and the substrate 120 is covered by the protective cover 118, so that the protective cover 118 and the transmission device 102a The carrier member defines a reaction chamber 132 . Next, as shown in FIG. 3 , in the atmospheric environment, the antifouling coating solution 112 is atomized above the surface 146 of the substrate 120 inside the reaction chamber 132 by means of the atomizing device 124 to form Antifouling Paint Mist 140.

When the atomization component 108 of the atomization device 124 is used for atomization, the antifouling paint with larger molecules can be driven by the highly volatile solvent, which is conducive to atomizing the antifouling paint solution 112 and transforming it into an antifouling paint mist 140. Subsequently, due to the rapid volatilization of the solvent in the antifouling paint mist 140 components, it is vaporized into antifouling paint vapor molecules 142 .

In some other embodiments, the heater 130 shown in FIG. 2 can also be used to heat the antifouling paint mist 140 formed by the atomizing device 124 to accelerate the conversion of the antifouling paint mist 140 into antifouling paint vapor molecules 142 . For example, when the solvent of the antifouling paint solution 112 is a non-volatile liquid such as water, the heater 130 can be used to help the antifouling paint mist 140 transform into the antifouling paint vapor molecules 142 .

After the antifouling paint solution 112 is atomized or vaporized in the reaction chamber 132 , the formed antifouling paint mist 140 is dispersed in the reaction chamber 132 . As described in step 208 of Fig. 4, since the solvent in the antifouling paint mist 140 is volatile, and the molecules of the antifouling paint are heavier, the antifouling paint mist 140 dispersed in the reaction chamber 132 will evaporate after the solvent volatilizes. Vaporized into anti-fouling paint vapor molecules 142 , which fall down and deposit on the surface 146 of the substrate 120 , and then form an anti-fouling film 150 on the surface 146 of the substrate 120 , as shown in FIG. 5 .

In a preferred embodiment of the present invention, since the surface 146 of the substrate 120 is activated to generate functional groups, the antifouling paint molecules in the antifouling paint mist 140 will adhere to the substrate 120 in an anisotropic manner. The surface 146 of the substrate 120 and a condensation reaction (CondensationReaction) occurs with the functional groups on the surface 146 of the substrate 120 . Therefore, the formed antifouling film 150 has strong adhesion to the surface 146 of the substrate 120 .

In another embodiment of the present invention, the convection device 128 can also be selectively installed in the reaction chamber 132 before the deposition of the antifouling paint vapor molecules 142 according to the requirements of the process, and the convection device 128 can be used to make the The antifouling paint vapor molecules 142 are more evenly dispersed in the reaction chamber 132 . At this time, if the surface 154 and/or side 152 of the substrate 120 are not completely attached to the carrier member 104a, the antifouling paint vapor molecules 142 can be simultaneously deposited on the surface 146, the surface 154 and/or the side 152 of the substrate 120 , and further coat the antifouling film 150 on the surface 146 , the surface 154 and/or the side surface 152 of the substrate 120 . By coating the antifouling film 150 , the surface 146 , the surface 154 and/or the side surface 152 of the substrate 120 can have functions of hydrophobicity, oil repellency and oil resistance.

In this embodiment, the vapor deposition equipment composed of a plurality of atomizing devices 124 can be used to simultaneously vapor-deposit the antifouling film on a plurality of substrates 120, such as substrates arranged in rows, columns or arrays. . In addition, since the antifouling film 150 is coated under normal pressure in the present invention, a large amount of antifouling paint can be uniformly coated on the surface 146 of the substrate 120 quickly and effectively.

In addition, a feature of an embodiment of the present invention is that the atomization of the antifouling coating solution is carried out above the substrate to be treated, so the spraying direction of the atomized antifouling coating solution is not directly towards the substrate to be treated. In this way, the antifouling coating solution can vaporize more clearly before it comes into contact with the substrate surface to be treated. Therefore, the generation of fog droplets on the surface of the substrate can be avoided, thereby improving the coating uniformity of the antifouling film.

In other embodiments of the invention, the atomization of the antifouling coating solution can also be carried out in other areas than above the substrate to be treated. For example, the antifouling paint solution can be atomized under the substrate to be treated, and then the conduit can be used to guide the antifouling paint mist. Through the conduit, the antifouling paint vapor molecules converted from the antifouling paint mist during the conduction process can be guided to the area where the antifouling film needs to be coated on the substrate, and then the antifouling film is formed on the desired area of the substrate.

It can be seen from the above-mentioned embodiments of the present invention that one advantage of the present invention is that the present invention uses atmospheric pressure evaporation to coat the anti-fouling film, so the procedure of stepping down and vacuuming is omitted, which can greatly reduce equipment costs and increase production capacity.

It can be seen from the above-mentioned embodiments of the present invention that another advantage of the present invention is that the present invention uses atmospheric pressure evaporation to coat the anti-fouling film, so the anti-fouling film on the continuous substrate to be treated can be carried out very efficiently. coating.

It can be seen from the embodiments of the present invention described above that another advantage of the present invention is that the present invention carries out the atomization and gasification of the antifouling paint solution in an atmospheric environment, so that a large amount of antifouling paint can be uniformly sprayed quickly and effectively. Apply to single or multiple surfaces of the substrate to be treated.

It can be seen from the above-mentioned embodiments of the present invention that another advantage of the present invention is that the atmospheric pressure evaporation device and production equipment of the antifouling film of the present invention can coat the antifouling film under the normal pressure environment, so it can be quickly The coating of the antifouling film of the substrate to be treated is carried out.

It can be seen from the embodiments of the present invention described above that another advantage of the present invention is that the atmospheric pressure vapor deposition device and production equipment of the antifouling film of the present invention can simultaneously coat a large number of antifouling films on substrates, thus greatly improving the performance of the antifouling film. Yield of antifouling film.

It can be seen from the above embodiments of the present invention that another advantage of the present invention is that the atmospheric pressure evaporation device and production equipment of the antifouling film of the present invention can efficiently and uniformly coat the antifouling film on the continuous substrate .

Although the present invention has been disclosed above with the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in this technical field can make various modifications and changes without departing from the spirit and scope of the present invention. Modification, therefore, the protection scope of the present invention should be determined by the scope defined by the appended claims.

Claims (20)

1. an atmospheric pressure vapor deposition method for antifouling film, is characterized in that, comprises: providing a substrate; performing a gasification step on an antifouling coating solution to form a plurality of antifouling vapor molecules; and The antifouling vapor molecules are deposited on a surface of the substrate to form the antifouling film. 2. The atmospheric pressure evaporation method of antifouling film according to claim 1, wherein the antifouling coating solution comprises an antifouling coating and a solvent, and the solvent comprises a highly volatile liquid and/or water . 3. The atmospheric pressure evaporation method of antifouling film according to claim 2, is characterized in that, the material of this antifouling coating comprises fluorocarbon silicon compound, perfluorocarbon silicon compound, fluorocarbon silane Compounds, perfluorosilane hydrocarbon compounds, or perfluorosilane ether compounds. 4. The atmospheric pressure vapor deposition method of antifouling film according to claim 2, characterized in that, the vapor pressure of the highly volatile liquid at normal temperature is larger than the vapor pressure of water, and the highly volatile liquid is selected from In a group consisting of alcohols, ethers, alkanes, ketones, benzenes, fluorine-containing alcohols, fluorine-containing ethers, fluorine-containing alkanes, fluorine-containing ketones and fluorine-containing benzenes ethnic group. 5. The atmospheric pressure vapor deposition method of anti-fouling film according to claim 1, characterized in that, the gasification step comprises utilizing an atomizing assembly, and the atomizing assembly comprises an ultrasonic atomizing assembly, a heating vapor deposition Atomization assembly, a high pressure gas injection assembly, or a nozzle atomization assembly. 6. The atmospheric pressure vapor deposition method of antifouling film according to claim 1, characterized in that, before the gasification step, it also includes utilizing a plasma to clean and treat the surface of the substrate, so that the surface of the substrate is cleaned and treated. A plurality of functional groups are formed on the surface of the substrate, and the functional groups include a plurality of hydroxyl functional groups, a plurality of nitrogen-hydrogen functional groups, and/or a plurality of dangling bonds. 7. The atmospheric pressure evaporation method of anti-fouling film according to claim 1, characterized in that, before the gasification step, it also includes utilizing a protective cover to cover the substrate, and the gasification step is in carried out in the protective cover. 8. The atmospheric pressure evaporation method for anti-fouling film according to claim 7, characterized in that, before the step of depositing the anti-fouling vapor molecules, it also includes convecting the anti-fouling vapor molecules in the protective cover . 9. An atmospheric pressure evaporation device for an antifouling film, characterized in that it comprises: a transport device adapted to transport at least one substrate; and An atomizing device, comprising: at least one paint receiving device for loading an antifouling paint solution; and At least one atomizing component is arranged on the at least one paint receiving device for vaporizing the antifouling paint solution into a plurality of antifouling paint vapor molecules to be deposited on a surface of the at least one substrate. 10. The atmospheric pressure evaporation device for antifouling film according to claim 9, characterized in that, the at least one atomization component comprises an ultrasonic atomization vibration piece, a heating evaporation atomization component, a high-pressure gas injection components, or a nozzle atomization component. 11. The atmospheric pressure evaporation device for anti-fouling film according to claim 9, characterized in that, the at least one atomizing assembly is arranged on the upper part of the at least one paint receiving device, and the atomizing device also includes at least one A paint conducting member adapted to deliver the antifouling paint solution to the at least one atomizing component. 12. The atmospheric pressure evaporation device for anti-fouling film according to claim 9, further comprising a protective cover suitable for covering the at least one base material, the at least one coating receiving device, and the at least one coating receiving device. An atomization component. 13. The atmospheric pressure evaporation device of antifouling film according to claim 9, characterized in that, the at least one paint receiving device comprises a plurality of paint receiving devices, and the at least one atomizing component comprises a single atomizing component arranged on These coatings are carried on the device. 14. The atmospheric pressure evaporation device for anti-fouling film according to claim 9, characterized in that, the at least one paint receiving device comprises a single paint receiving device, and the at least one atomizing component comprises a plurality of atomizing components arranged on The paint takes over the device. 15. An antifouling film production equipment, characterized in that it comprises: a transport device adapted to transport at least one substrate; a plasma device disposed above the transfer device and adapted to perform a surface activation treatment on a surface of the at least one substrate; and An atmospheric pressure vapor deposition device adjacent to the plasma device, wherein the atmospheric pressure vapor deposition device includes an atomization device, and the atomization device includes: at least one paint receiving device for loading an antifouling paint solution; and At least one atomizing component is arranged on the at least one paint receiving device, and is used to vaporize the antifouling paint solution into a plurality of paint vapor molecules, so that the paint vapor molecules are deposited on the at least one surface after the surface activation treatment. An antifouling film is formed on the surface of a substrate. 16. The manufacturing equipment of antifouling film according to claim 15, characterized in that, the plasma device is an atmospheric plasma device, a low-pressure plasma device or an electromagnetically coupled plasma device. 17. The manufacturing equipment of anti-fouling film according to claim 15, characterized in that, the at least one atomization component comprises an ultrasonic atomization vibrator, a heated vapor deposition atomization component, a high-pressure gas injection component, or A nozzle atomizing assembly. 18. The manufacturing equipment of antifouling film according to claim 15, characterized in that, the at least one paint receiving device comprises a plurality of paint receiving devices, and the at least one atomizing component comprises a single atomizing component arranged on the paint on the receiving device. 19. The manufacturing equipment of antifouling film according to claim 15, characterized in that, the at least one paint receiving device comprises a single paint receiving device, and the at least one atomizing component comprises a plurality of atomizing components arranged on the paint receiving device on the device. 20. The manufacturing equipment of anti-fouling film according to claim 15, characterized in that, the atmospheric pressure evaporation device further comprises a paint capacity sensor adapted to sense the anti-fouling film loaded in the at least one paint receiving device. Amount of coating solution.

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