CN113789499A - Atomizing heating device for vacuum coating - Google Patents
Atomizing heating device for vacuum coating Download PDFInfo
- Publication number
- CN113789499A CN113789499A CN202111204825.1A CN202111204825A CN113789499A CN 113789499 A CN113789499 A CN 113789499A CN 202111204825 A CN202111204825 A CN 202111204825A CN 113789499 A CN113789499 A CN 113789499A
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- Prior art keywords
- atomizing
- heating
- heating device
- vacuum coating
- coating material
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides an atomizing and heating device for vacuum coating, which comprises an atomizing device for atomizing a liquid organic coating material and a heating device for vaporizing the atomized organic coating material, wherein the heating device comprises a heating box body communicated with the atomizing device and a heating assembly arranged on the heating box body and used for heating the heating box body, and a nozzle is arranged on one side of the heating box body. The invention adopts the structure to realize the atomization and vaporization processes of the liquid organic coating material, the vaporized organic coating material can be uniformly adhered and coated on the surface of the substrate, the film forming process is completed in a vacuum environment, the application range is wide, a thinner coating layer can be obtained, the requirement of a thick film can be met, the uniformity is easy to control, the efficiency is high, and a film with high uniformity and higher film performance can be obtained.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the field of vacuum coating, in particular to an atomizing and heating device for vacuum coating.
[ background of the invention ]
The conventional film preparation methods in a vacuum state include magnetron sputtering, evaporation, Plasma Enhanced Chemical Vapor Deposition (PECVD), and the like, and different film coating modes are selected according to the characteristics of raw materials. For some cases where the coating material is an organic liquid, the coating method in a vacuum state generally adopts a PECVD method, and some methods also adopt a method of directly coating the surface of the substrate in an atmospheric environment to prepare a thin film.
The film is prepared by adopting a PECVD mode in a vacuum state, and particularly when the film is coated on a flexible substrate, the preparation mode of the film has certain pollution to the interior of a box body (a vacuum chamber) and a transmission system, so that the substrate is damaged in the winding and walking process, and the relative efficiency of the substrate is reduced. In order to improve the efficiency, the thickness of one-time film forming needs to be increased, the number of PECVD sources is increased, so that the winding system of the equipment becomes complicated, the film is easy to wrinkle in the winding process, for the stacked film layers formed by different materials, the sources interfere with each other to different degrees, the trouble caused by solving the interference problem also causes the equipment to become large, the winding system becomes complicated, and the equipment processing difficulty increases steeply.
If the film layer is prepared in the atmosphere by a coating mode, the overall performance of the film layer cannot reach the performance of the film layer prepared in a vacuum state, and if the film layer is coated in the vacuum state, good film layer performance cannot be obtained, the cavity is seriously polluted, the efficiency is low, and an even and thin film layer cannot be obtained.
[ summary of the invention ]
The invention aims to provide an atomizing and heating device for vacuum coating, which has wide application range and high efficiency.
The purpose of the invention is realized as follows:
the utility model provides an atomizing heating device for vacuum coating, is including being used for carrying out atomizing device and being used for carrying out the heating device that vaporizes to the organic coating material after atomizing to liquid organic coating material, heating device include with the heating box that atomizing device is linked together with locate on the heating box and be used for right the heating box carries out the heating element who heats, one side of heating box is equipped with the spout.
The invention adopts the structure to realize the atomization and vaporization processes of the liquid organic coating material, the vaporized organic coating material can be uniformly adhered and coated on the surface of the substrate, the film forming process is completed in a vacuum environment, the application range is wide, a thinner coating layer can be obtained, the requirement of a thick film can be met, the uniformity is easy to control, the efficiency is high, and a film with high uniformity and higher film performance can be obtained. The substrate conveying device cools the substrate coated with the organic coating material, so that the organic coating material is cooled and formed on the substrate, and coating of the film is completed.
The atomization heating device for vacuum coating comprises a shell and an atomizer body, wherein the shell is arranged on one side of the heating device, the atomizer body is arranged in the shell, liquid interfaces and atomization nozzles are respectively arranged at two ends of the atomizer body, the liquid interfaces are used for introducing liquid organic coating materials for atomization of the atomizer body, the atomization nozzles stretch into the heating box and spray the atomized organic coating materials into the heating box, and a pressurizing connector for pressurizing is arranged on the atomizer body. The atomizer body can atomize the liquid organic coating material into tiny particles, and the pressurizing connector is connected with high-pressure air, so that the tiny particle-shaped liquid organic coating material is sprayed out through the atomizing nozzle and rapidly diffused in the heating device to improve the vaporization efficiency of the tiny particle-shaped liquid organic coating material in the heating device.
The shell comprises an outer shell and an inner shell, a first cooling space is formed between the outer shell and the inner shell, and a water-cooling inlet and a water-cooling outlet which are communicated with the first cooling space and cooling liquid are formed in the outer shell, so that the atomizing device is effectively cooled by water cooling, and the temperature of the atomizing device is prevented from being too high.
The atomizing and heating device for vacuum coating is characterized in that a second cooling space is arranged in the atomizer body, and an air cooling inlet and an air cooling outlet which are communicated with the second cooling space and cooling gas are arranged on the outer side of the atomizer body, so that the cooling effect of the atomizing device is further improved by air cooling, and the atomizing device can normally work at a lower temperature.
According to the atomizing and heating device for vacuum coating, the transverse flow guide baffle plates are arranged in the heating box body at vertical opposite intervals, so that the movement path of the organic coating material in the heating box body is prolonged, the organic coating material can be fully heated and vaporized in the heating box body, and in addition, the organic coating material can be sprayed out from the nozzles more uniformly after passing through the transverse flow guide baffle plates.
According to the atomizing and heating device for vacuum coating, the nozzle is arranged at the top of the heating box body, and the heating assembly consists of the aluminum alloy plate heaters arranged on the front side, the rear side, the left side, the right side and the bottom side of the heating box body, so that the temperature of the heating box body is ensured to be high enough and uniform.
According to the atomizing and heating device for vacuum coating, the nozzle adjusting plate capable of adjusting the width of the nozzle is arranged at the top of the heating box body, so that the optimal adhering and coating effect of the gaseous organic coating material is achieved.
According to the atomizing heating device for vacuum coating, the nozzle adjusting plate is provided with the guide inclined plane, so that the diffusion range of the gaseous organic coating material is increased to increase the range of the adhesion coating of the gaseous organic coating material.
According to the atomizing and heating device for vacuum coating, the isolation cover covers the outer side of the heating device, and the heat insulation plate is arranged between the isolation cover and the heating device, so that heat of the heating device is prevented from being diffused outwards, and the heat efficiency of the heating device is improved.
According to the atomizing and heating device for vacuum coating, the top edge of the isolation cover is provided with the air curtain vent hole communicated with the external high-pressure air source, and high-pressure air is sprayed towards the substrate through the air curtain vent hole, so that the annular closed air curtain is formed at the top edge of the isolation cover, gaseous organic coating materials are prevented from floating outwards, pollution to a vacuum chamber is reduced, and the atomizing and heating device is clean and environment-friendly.
[ description of the drawings ]
The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings, in which:
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a reference diagram illustrating the use state of the present invention;
FIG. 3 is a second schematic perspective view of the present invention;
FIG. 4 is an exploded view of the present invention;
FIG. 5 is a schematic cross-sectional view of an atomizing device according to the present invention;
FIG. 6 is a schematic perspective view of an atomizing device according to the present invention;
fig. 7 is a schematic structural diagram of the heating device of the present invention.
[ detailed description ] embodiments
The utility model provides an atomizing heating device for vacuum coating, is including being used for carrying out atomizing device 21 that atomizes liquid organic coating material and being used for carrying out the heating device 22 of vaporization to the organic coating material after atomizing, and heating device 22 includes heating box 221 that is linked together with atomizing device 21 and locates on heating box 221 and be used for carrying out the heating element 222 that heats heating box 221, and one side of heating box 221 is equipped with spout 2211.
The atomizer 21 comprises a housing 211 arranged on one side of the heating device 22 and an atomizer body 212 arranged in the housing 211, two ends of the atomizer body 212 are respectively provided with a liquid inlet 2121 and an atomizing nozzle 2122, the liquid inlet 2121 is used for introducing a liquid organic coating material for atomizing the atomizer body 212, the atomizing nozzle 2122 extends into the heating box 221 and sprays the atomized organic coating material into the heating box 221, and the atomizer body 212 is provided with a pressurizing joint 213 for pressurizing. The external pump drives the liquid organic coating material to be pumped into the atomizer body 212 through the liquid inlet 2121, the atomizer body 212 (preferably an ultrasonic atomizer) atomizes the pumped liquid organic coating material into tiny particles with a size of less than 20 μm, and the pressurizing connector 213 is connected to external high-pressure gas, so that the tiny particle-shaped liquid organic coating material is pressurized and sprayed out through the atomizing nozzle 2122 and rapidly diffused in the heating device 22 to improve the vaporization efficiency of the tiny particle-shaped liquid organic coating material in the heating device 22.
In order to realize water cooling to effectively cool down the atomizing device 21 and prevent the temperature thereof from being too high, the housing 211 includes an outer housing 2111 and an inner housing 2112, a first cooling space 2113 is formed between the outer housing 2111 and the inner housing 2112, and the outer housing 2111 is provided with a water cooling inlet 214 and a water cooling outlet 215 which are communicated with the first cooling space 2113 and the cooling liquid. External cooling liquid enters the first cooling space 2113 through the water-cooling inlet 214 and flows back from the water-cooling outlet 215, so that circulating water cooling is realized, and the normal operation of the atomizer body 21 at an ambient temperature below 80 ℃ is ensured.
In order to achieve air cooling to further improve the cooling effect on the atomization device 21, a second cooling space is provided in the atomizer body 212, and an air cooling inlet 216 and an air cooling outlet 217 which are communicated with the second cooling space and the cooling gas are provided outside the atomizer body 212. The atomizing device 21 can be protected from cooling by both water and air cooling.
In order to extend the movement path of the organic coating material in the heating box 221 and enable the organic coating material to be sufficiently heated and vaporized in the heating box 221, transverse diversion baffles 223 are arranged in the heating box 221 at vertically opposite intervals.
In order to ensure that the temperature of the heating box 221 is sufficiently high and uniform, the nozzle 2211 is disposed at the top of the heating box 221, and the heating assembly 222 is composed of aluminum alloy plate heaters disposed at the front, rear, left, right, and bottom sides of the heating box 221, so as to ensure that the temperature in the heating box 221 can reach a high temperature of 400 ℃.
In order to achieve the optimal adhesion and coating effects of the gaseous organic coating material, a nozzle adjusting plate 224 for adjusting the width of the nozzle 2211 is provided on the top of the heating chamber 221. To ensure sufficient coating pressure, the slit width between the two nozzle-adjusting plates 224 may be adjusted within a range of 0.5mm to 3 mm.
To increase the diffusion range of the gaseous organic coating material to increase the adhesion and coating range thereof, the nozzle adjusting plate 224 is provided with a guide slope 2241.
In order to prevent the heat of the heating device 22 from diffusing outward, a shielding cover 230 is covered outside the heating device 22, and a heat insulation board 2301 is disposed between the shielding cover 230 and the heating device 22.
To prevent the gaseous organic coating material from scattering outward and reduce the contamination of the vacuum chamber 100, the top edge of the shielding cover 230 is provided with an air curtain ventilation hole 2302 communicated with an external high pressure air source. External high pressure air is injected through the air curtain vents in the direction of the substrate 10, thereby forming an annular closed air curtain at the top edge of the cage 230.
When the vacuum coating device is used, the vacuumizing device 101 firstly vacuumizes the vacuum chamber 100, so that the coating process is carried out in a vacuum state. Then the atomizer 21 and the heater 22 are started to work, the external pump drives the liquid organic coating material to be pumped into the atomizer body 212 through the liquid inlet 2121, the atomizer body 212 atomizes the pumped liquid organic coating material into tiny particles with a size smaller than 20 μm, the pressurizing connector 213 is connected to external high-pressure gas to make the tiny particle-shaped liquid organic coating material pressurized and sprayed out through the atomizing nozzle 2122 and rapidly diffused in the heating box 221, at this time, the heating assembly 222 heats the heating box 221 to make the internal temperature reach a high temperature of 400 ℃, so that the tiny particle-shaped liquid organic coating material is rapidly vaporized in the heating box 221 and rapidly evaporated into gas molecules with pressure (the vaporized organic coating material has a high evaporation rate and a high efficiency), and is uniformly attached to the surface of the substrate 10 through the nozzle 2211 (the width of which is adjusted), the substrate transfer apparatus 1 cools the substrate 10, so that the gaseous organic coating material attached to the surface of the substrate 10 is liquefied and then solidified or is directly desublimated, and is thus formed on the substrate 10.
Claims (10)
1. The utility model provides an atomizing heating device for vacuum coating, its characterized in that is used for carrying out atomizing device (21) that atomizes to liquid organic coating material and is used for carrying out the heating device (22) that vaporizes to the organic coating material after atomizing, heating device (22) including with heating box (221) that atomizing device (21) are linked together with locate on heating box (221) and be used for right heating box (221) carry out the heating element (222) that heat, one side of heating box (221) is equipped with spout (2211).
2. The atomizing heating device for vacuum coating according to claim 1, wherein the atomizing device (21) comprises a housing (211) disposed on one side of the heating device (22) and an atomizer body (212) disposed in the housing (211), a liquid inlet (2121) and an atomizing nozzle (2122) are respectively disposed at two ends of the atomizer body (212), the liquid inlet (2121) is used for introducing a liquid organic coating material for atomizing the atomizer body (212), the atomizing nozzle (2122) extends into the heating box (221) and sprays the atomized organic coating material into the heating box (221), and a pressurizing connector (213) for pressurizing is disposed on the atomizer body (212).
3. The atomizing heating device for vacuum coating according to claim 2, wherein the housing (211) comprises an outer housing (2111) and an inner housing (2112), a first cooling space (2113) is formed between the outer housing (2111) and the inner housing (2112), and the outer housing (2111) is provided with a water-cooling inlet (214) and a water-cooling outlet (215) which are communicated with the first cooling space (2113) and the cooling liquid.
4. The atomizing heating device for vacuum coating according to claim 2 or 3, wherein a second cooling space is provided in said atomizer body (212), and an air-cooled inlet (216) and an air-cooled outlet (217) which are communicated with said second cooling space and with cooling gas are provided on the outside of said atomizer body (212).
5. The atomizing heating device for vacuum coating according to claim 1 or 5, wherein the heating box body (221) is provided with transverse flow guide baffles (223) at vertically opposite intervals.
6. The atomizing heating device for vacuum coating according to claim 5, wherein said nozzle 2211 is provided on the top of said heating chamber 221, and said heating unit 222 is composed of aluminum alloy plate heaters provided on the front, rear, left, right and bottom sides of said heating chamber 221.
7. The atomizing heating device for vacuum coating according to claim 6, wherein said heating cabinet (221) is provided at its top with a spout adjusting plate (224) capable of adjusting the width of said spout (2211).
8. The atomizing heating device for vacuum coating according to claim 7, wherein said nozzle regulating plate (224) is provided with a guide slope (2241).
9. The atomizing heating device for vacuum coating according to claim 1, wherein said heating device (22) is covered with a shielding cover (230) at the outside, and a heat insulating plate (2301) is provided between said shielding cover (230) and said heating device (22).
10. The atomizing heating device for vacuum coating according to claim 9, wherein the top edge of said shielding case (230) is provided with an air curtain ventilation hole (2302) communicating with an external high pressure air source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111204825.1A CN113789499A (en) | 2021-10-15 | 2021-10-15 | Atomizing heating device for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111204825.1A CN113789499A (en) | 2021-10-15 | 2021-10-15 | Atomizing heating device for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113789499A true CN113789499A (en) | 2021-12-14 |
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ID=78878129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111204825.1A Pending CN113789499A (en) | 2021-10-15 | 2021-10-15 | Atomizing heating device for vacuum coating |
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| Country | Link |
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| CN (1) | CN113789499A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116083882A (en) * | 2023-02-07 | 2023-05-09 | 深圳奥拦科技有限责任公司 | Atomizer and PECVD coating device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2539749Y (en) * | 2002-02-01 | 2003-03-12 | 浙江大学蓝星新材料技术有限公司 | Evaporator for chemical vapour-phase deposition proplastid |
| JP2005105414A (en) * | 2003-09-11 | 2005-04-21 | Shunji Murano | Linearly and uniformly discharging device, atomizing device, thin film deposition device, pattern forming device, three-dimensional forming device, and cleaning device |
| CN101680083A (en) * | 2007-05-14 | 2010-03-24 | 株式会社爱发科 | Film conveying device and winding-type vacuum film-forming method |
| CN102465281A (en) * | 2010-11-16 | 2012-05-23 | 财团法人工业技术研究院 | Film coating system and method and gas supply device used by same |
| CN203333750U (en) * | 2013-05-27 | 2013-12-11 | 深圳市生波尔机电设备有限公司 | Gas distribution device and vacuum magnetron sputtering coating equipment of gas distribution device |
| CN105441904A (en) * | 2014-06-18 | 2016-03-30 | 中微半导体设备(上海)有限公司 | Gas spray device, chemical vapor deposition device and method |
| CN213557959U (en) * | 2020-10-20 | 2021-06-29 | 唐山佐仑环保科技有限公司 | Steam coating machine |
-
2021
- 2021-10-15 CN CN202111204825.1A patent/CN113789499A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2539749Y (en) * | 2002-02-01 | 2003-03-12 | 浙江大学蓝星新材料技术有限公司 | Evaporator for chemical vapour-phase deposition proplastid |
| JP2005105414A (en) * | 2003-09-11 | 2005-04-21 | Shunji Murano | Linearly and uniformly discharging device, atomizing device, thin film deposition device, pattern forming device, three-dimensional forming device, and cleaning device |
| CN101680083A (en) * | 2007-05-14 | 2010-03-24 | 株式会社爱发科 | Film conveying device and winding-type vacuum film-forming method |
| CN102465281A (en) * | 2010-11-16 | 2012-05-23 | 财团法人工业技术研究院 | Film coating system and method and gas supply device used by same |
| CN203333750U (en) * | 2013-05-27 | 2013-12-11 | 深圳市生波尔机电设备有限公司 | Gas distribution device and vacuum magnetron sputtering coating equipment of gas distribution device |
| CN105441904A (en) * | 2014-06-18 | 2016-03-30 | 中微半导体设备(上海)有限公司 | Gas spray device, chemical vapor deposition device and method |
| CN213557959U (en) * | 2020-10-20 | 2021-06-29 | 唐山佐仑环保科技有限公司 | Steam coating machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116083882A (en) * | 2023-02-07 | 2023-05-09 | 深圳奥拦科技有限责任公司 | Atomizer and PECVD coating device |
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