CN102662234B - Light driving scanning micro-mirror - Google Patents
Light driving scanning micro-mirror Download PDFInfo
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- CN102662234B CN102662234B CN201210179790.5A CN201210179790A CN102662234B CN 102662234 B CN102662234 B CN 102662234B CN 201210179790 A CN201210179790 A CN 201210179790A CN 102662234 B CN102662234 B CN 102662234B
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- mirror
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Abstract
The invention provides a light driving scanning micro-mirror, comprising micro-drivers, plane springs, a movable lens and a light cell. Output ends of the micro-drivers are connected with input ends of the plane springs; output ends of the plane springs are connected with an input end of the movable lens; and an output end of the light cell is connected with input ends of the micro-drivers. Each light driving scanning micro-mirror comprises one movable lens, two plane springs, two micro-drives and one light cell; and the movable lens is connected with the two plane springs; each plane spring is connected with one micro-driver. The light driving scanning micro-mirror provided by the invention is manufactured by using a silicone micromachining technology, and the lens can be directly driven through a specific wave length in incidence laser to scan, so that a lead wire bonding process related to the traditional electric connection is avoided.
Description
Technical field
The present invention relates to a kind of mems device for optical scanning, particularly based on the optical drive principle of photoelectric conversion technique.
Background technology
Adopt the micro-optical scanning device of silicon micromachining technology manufacture in optical scanning, optical imagery, there is very important application in the fields such as laser projection.Particularly in optics based endoscopic imaging field, the image probe being integrated with micro-optical scanning device can at the pipeline of the various diameter of human body (as blood vessel, alimentary canal etc.) in complete scanning, combine with the optical imaging apparatus of outside, thus obtain tissue two dimensional image or 3-D view.
Usually, micro-optical scanning device all adopts aluminium or golden wire bonding technology to set up reliable and stable electrical connection between the pad and outer metallic conductors of device surface, thus receives outside electric drive signal to complete scanning work.There is certain failure risk in metal lead wire bonding technology.For some special applications, optics based endoscopic imaging described above application, the equipment entered in human body need as much as possible simplified design to provide better reliability and security, and the volume of reduction equipment further.Because micro-optical scanning device is used for optical scanning, the movable lens surface that laser beam projects micro-optical scanning device must be had, because herein is provided the possibility adopting photoelectric conversion technique the portion of energy of incident laser beam to be converted to the electric signal of driving micro-optical scanning device.
The present invention proposes a kind of mems device for optical scanning, particularly based on the optical drive principle of photoelectric conversion technique, the portion of energy of incident laser beam is converted to by adopting photoelectric conversion technique the electric signal driving micro-optical scanning device.Invention avoids the metal lead wire bond sequence of traditional requisite mems device, reduce volume further, further increase reliability and security.
Summary of the invention
The object of the invention is to propose a kind of optical drive scanning micro-mirror, based on the optical drive principle of photoelectric conversion technique.
For achieving the above object, the present invention adopts technical scheme to be: it comprises microdrive, plane spring, movable lens and photoelectric cell.The output terminal of microdrive is connected with the input end of plane spring, and the output terminal of plane spring is connected with the input end of movable lens, and photronic output terminal is connected with the input end of microdrive; Each device comprises 1 movable lens, 2 plane springs, 2 microdrives and 1 photoelectric cell, and movable lens is connected with 2 plane springs, and each plane spring is connected with 1 microdrive;
Described microdrive adopts micro-processing technology to make, based on electrothermal drive principle, by multilayer material, as silicon, and silicon dioxide, metal, the compositions such as metal oxide, are converted to mechanical deformation for the electric drive signal inputted outside by bimetallic effect;
Described plane spring adopts micro-processing technology to make, and by multilayer material, as silicon, the compositions such as silicon dioxide, for passing to movable lens by the displacement of microdrive one end;
Described movable lens adopts micro-processing technology to make, by multilayer material, as silicon, and the compositions such as silicon dioxide; The core of movable lens is the optical thin film deposited on silicon oxide substrates, and for reflecting the incident laser beam of specific wavelength, and the incident laser beam of transmission different wave length is on photoelectric cell;
Described photoelectric cell adopts micro-processing technology to make, by multilayer material, as silicon, and the compositions such as silicon dioxide; Photoelectric cell is positioned at the bottom of optical drive scanning micro-mirror, relative with movable lens, for receiving the incident laser beam of the specific wavelength through movable lens transmission, is translated into the electric signal for driving microdrive;
Principle of work of the present invention is such: incident laser beam is made up of the laser that two kinds of wavelength are different, and one is working laser, and another kind is driving laser.Working laser can be single-frequency laser or broadband Low coherence laser, depends on the requirement of optical imaging apparatus; Driving laser is single-frequency laser, and in its wavelength and optical drive scanning micro-mirror, photronic sensitive wave length matches.First incident laser beam projects on the movable lens of optical drive scanning micro-mirror, and incident angle is 45 ° to 90 °.The core of movable lens is the optical thin film deposited on silicon oxide substrates, for reflective operation laser, and transmission driving laser.Driving laser, through the optical thin film of movable lens, is radiated on the photoelectric cell below movable lens.Photoelectric cell, for receiving the driving laser through movable lens transmission, is translated into the electric signal for driving microdrive.Drive electric signal to make metal in microdrive or silicon heater produces heat, make the temperature of microdrive increase.Microdrive is that multilayer material is formed, and different materials has different thermal expansivity, and therefore along with temperature rises, microdrive deformation can occur, to the material curving that thermal expansivity is less.One end of microdrive is fixed on silicon chip, and the other end is connected on movable lens by plane spring.Under the effect of different amplitude electric drive signal, there is the deformation of different amplitude in microdrive, movable lens is vibrated, completes scanning.
The present invention is owing to have employed technique scheme, and tool has the following advantages:
1, the metal lead wire bond sequence of traditional requisite mems device is eliminated;
2, reduce device volume further, improve reliability and security.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is operating diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described: as shown in Figure 1-2, and it comprises microdrive 1, plane spring 2, movable lens 3 and photoelectric cell 4.The output terminal of microdrive 1 is connected with the input end of plane spring 2, and the output terminal of plane spring 2 is connected with the input end of movable lens 3, and the output terminal of photoelectric cell 4 is connected with the input end of microdrive 1; Each device comprises 1 movable lens, 3,2 plane springs, 2,2 microdrives 1 and 1 photoelectric cell 4, and movable lens 3 is connected with 2 plane springs 2, and each plane spring 2 is connected with 1 microdrive 1;
Described microdrive 1 adopts micro-processing technology to make, based on electrothermal drive principle, by multilayer material, as silicon, and silicon dioxide, metal, the compositions such as metal oxide, are converted to mechanical deformation for the electric drive signal inputted outside by bimetallic effect;
Described plane spring 2 adopts micro-processing technology to make, and by multilayer material, as silicon, the compositions such as silicon dioxide, for passing to movable lens 3 by the displacement of microdrive 1 one end;
Described movable lens 3 adopts micro-processing technology to make, by multilayer material, as silicon, and the compositions such as silicon dioxide; The core of movable lens 3 is the optical thin film deposited on silicon oxide substrates, and for reflecting the incident laser beam of specific wavelength, and the incident laser beam of transmission different wave length is on photoelectric cell 4;
Described photoelectric cell 4 adopts micro-processing technology to make, by multilayer material, as silicon, and the compositions such as silicon dioxide; Photoelectric cell is positioned at the bottom of optical drive scanning micro-mirror, relative with movable lens 3, for receiving the incident laser beam of the specific wavelength through movable lens 3 transmission, is translated into the electric signal for driving microdrive 1;
Principle of work of the present invention is such: first incident laser beam projects on the movable lens 3 of optical drive scanning micro-mirror, and incident angle is 45 ° to 90 °.The core of movable lens 3 is the optical thin film deposited on silicon oxide substrates, for reflective operation laser, and transmission driving laser.Driving laser, through the optical thin film of movable lens 3, is radiated on the photoelectric cell 4 below movable lens 3.Photoelectric cell 4, for receiving the driving laser through movable lens transmission, is translated into the electric signal for driving microdrive 1.Drive electric signal to make metal in microdrive 1 or silicon heater produces heat, make the temperature of microdrive 1 increase.Microdrive 1 is multilayer material formation, and different materials has different thermal expansivity, and therefore along with temperature rises, microdrive 1 deformation can occur, to the material curving that thermal expansivity is less.One end of microdrive 1 is fixed on silicon chip, and the other end is connected on movable lens 3 by plane spring 2.Under the effect of different amplitude electric drive signal, there is the deformation of different amplitude in microdrive 1, movable lens 3 vibrated, completes scanning.
The mechanical deflection angle of movable lens of the present invention is (0-45).
Claims (7)
1. an optical drive scanning micro-mirror, is characterized in that: it comprises microdrive, plane spring, movable lens and photoelectric cell; The output terminal of microdrive is connected with the input end of plane spring, and the output terminal of plane spring is connected with the input end of movable lens, and photronic output terminal is connected with the input end of microdrive; Each described optical drive scanning micro-mirror comprises the movable lens described in 1, the plane spring described in 2, the microdrive described in 2 and the photoelectric cell described in 1, each described movable lens is connected with the plane spring described in 2, and each described plane spring is connected with the microdrive described in 1; Described microdrive adopts micro-processing technology to make, and based on electrothermal drive principle, is made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide, metal, metal oxide, is converted to mechanical deformation for the electric drive signal inputted outside by bimetallic effect; Described plane spring adopts micro-processing technology to make, and be made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide, for the displacement of microdrive one end is passed to movable lens; Described movable lens adopts micro-processing technology to make, and be made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide.
2. a kind of optical drive scanning micro-mirror as claimed in claim 1, is characterized in that: described microdrive adopts micro-processing technology to make, based on electrothermal drive principle, be made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide, metal, metal oxide.
3. a kind of optical drive scanning micro-mirror as claimed in claim 1, is characterized in that: the mechanical deflection angle of described movable lens is 0-45 degree.
4. a kind of optical drive scanning micro-mirror as claimed in claim 1, is characterized in that: described plane spring adopts micro-processing technology to make, and be made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide.
5. a kind of optical drive scanning micro-mirror as claimed in claim 1, is characterized in that: described movable lens adopts micro-processing technology to make, and be made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide.
6. a kind of optical drive scanning micro-mirror as claimed in claim 1, is characterized in that: the core of described movable lens is the optical thin film deposited on silicon oxide substrates, reflection wavelength is 300-980 nanometer, and transmission peak wavelength is 1020-1550 nanometer.
7. a kind of optical drive scanning micro-mirror as claimed in claim 1, is characterized in that: described photoelectric cell adopts micro-processing technology to make, and be made up of multilayer material, wherein multilayer material comprises silicon, silicon dioxide; Photronic sensitive wave length is 1020-1550 nanometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210179790.5A CN102662234B (en) | 2012-06-04 | 2012-06-04 | Light driving scanning micro-mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210179790.5A CN102662234B (en) | 2012-06-04 | 2012-06-04 | Light driving scanning micro-mirror |
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| CN102662234A CN102662234A (en) | 2012-09-12 |
| CN102662234B true CN102662234B (en) | 2015-04-01 |
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| CN114699045B (en) * | 2022-03-24 | 2023-09-01 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
Citations (4)
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|---|---|---|---|---|
| CN101393105A (en) * | 2007-09-20 | 2009-03-25 | 富士胶片株式会社 | Optical scanning element, driving method for same, and optical scanning probe employing optical scanning element |
| CN101488724A (en) * | 2009-02-19 | 2009-07-22 | 上海交通大学 | Electric heating micro driver of multiple polymer composite material |
| CN101852917A (en) * | 2010-03-31 | 2010-10-06 | 重庆大学 | Large Angle Piezo Scanning Micromirror |
| CN202693906U (en) * | 2012-06-04 | 2013-01-23 | 凝辉(天津)科技有限责任公司 | Photic driving scanning micro-mirror |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100579868B1 (en) * | 2003-12-02 | 2006-05-15 | 삼성전자주식회사 | Micro Mirror and Manufacturing Method |
| JP4868923B2 (en) * | 2006-04-12 | 2012-02-01 | キヤノン株式会社 | Optical scanning apparatus and image forming apparatus |
| JP2008046591A (en) * | 2006-07-18 | 2008-02-28 | Ricoh Co Ltd | Method of producing contact part of actuator, actuator, optical system and image forming apparatus |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101393105A (en) * | 2007-09-20 | 2009-03-25 | 富士胶片株式会社 | Optical scanning element, driving method for same, and optical scanning probe employing optical scanning element |
| CN101488724A (en) * | 2009-02-19 | 2009-07-22 | 上海交通大学 | Electric heating micro driver of multiple polymer composite material |
| CN101852917A (en) * | 2010-03-31 | 2010-10-06 | 重庆大学 | Large Angle Piezo Scanning Micromirror |
| CN202693906U (en) * | 2012-06-04 | 2013-01-23 | 凝辉(天津)科技有限责任公司 | Photic driving scanning micro-mirror |
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