CN202920133U - Photic-driving double-shaft optical scanning probe - Google Patents
Photic-driving double-shaft optical scanning probe Download PDFInfo
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- CN202920133U CN202920133U CN 201220258457 CN201220258457U CN202920133U CN 202920133 U CN202920133 U CN 202920133U CN 201220258457 CN201220258457 CN 201220258457 CN 201220258457 U CN201220258457 U CN 201220258457U CN 202920133 U CN202920133 U CN 202920133U
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- movable lens
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- 230000003287 optical effect Effects 0.000 title claims abstract description 60
- 239000000523 sample Substances 0.000 title claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- 239000000835 fiber Substances 0.000 claims abstract description 10
- 238000005516 engineering process Methods 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000009977 dual effect Effects 0.000 claims 1
- 230000011664 signaling Effects 0.000 claims 1
- 238000012634 optical imaging Methods 0.000 abstract description 6
- 238000003384 imaging method Methods 0.000 abstract description 4
- 230000005693 optoelectronics Effects 0.000 abstract 4
- 210000004027 cell Anatomy 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 2
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- 238000006073 displacement reaction Methods 0.000 description 2
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- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920001206 natural gum Polymers 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
A photic-driving double-shaft optical scanning probe comprises a scanning micro mirror, a micro optoelectronic system and a silicon optical table, wherein the scanning micro mirror comprises micro actuators, plane springs and a movable lens. An output end of each micro actuator is connected with an input end of each plane spring. An output end of each plane spring is connected with an input end of the movable lens. Each device comprises one movable lens, four plane springs and four micro actuators, wherein the movable lens is connected with the four plane springs, and each plane spring is connected with one micro actuator. The micro optoelectronic system comprises a single-mode fiber, a self-focusing lens, two optical filters and two photocells. Incident beams are transmitted and focused through the micro optoelectronic system, and then are perpendicularly incident on an imaging object after being deflected by 90 degrees through the scanning micro mirror. The beams reflected by the imaging object are collected and transmitted to an external optical imaging system through the micro optoelectronic system after being deflected by 90 degrees through the scanning micro mirror.
Description
Technical field
This utility model relates to a kind of optical drive biaxial optical scan-probe, particularly adopts scanning micro-mirror based on photoelectric conversion technique as optical scanning device.
Background technology
Adopt the micro-optical scanning device of silicon micromachining technology manufacturing in optical scanning, optical imagery, there is very important application in the fields such as laser projection.Particularly in optics based endoscopic imaging field, the image probe that is integrated with the micro-optical scanning device can be at the pipeline of the various diameters of human body (such as blood vessel, digestive tract etc.) finish scanning in, combine with the optical imaging apparatus of outside, thereby obtain tissue two dimensional image or 3-D view.
Usually, the micro-optical scanning device all adopts aluminum or golden wire bonding technology to set up reliable and stable electrical connection between the pad of device surface and external metallization wire, thereby receives outside electric drive signal to finish scanning work.There is certain failure risk in the metal lead wire bonding technology.For some special applications, optics based endoscopic imaging described above is used, and the equipment in the human body of entering needs as much as possible simplified design so that better reliability and safety to be provided, and the further volume of reduction equipment.Because the micro-optical scanning device is used for optical scanning, must have the movable lens surface that laser beam projects the micro-optical scanning device, therefore the probability that adopts photoelectric conversion technique the portion of energy of incident laser light beam to be converted to the signal of telecommunication that drives the micro-optical scanning device is provided.
The utility model proposes a kind of optical drive biaxial optical scan-probe, particularly adopt optical drive scanning micro-mirror based on photoelectric conversion technique as optical scanning device.
The utility model content
The purpose of this utility model is to propose a kind of optical drive biaxial optical scan-probe, particularly adopts optical drive scanning micro-mirror based on photoelectric conversion technique as optical scanning device.
For achieving the above object, this utility model adopts technical scheme to be: it comprises scanning micro-mirror, low-light electric system and silicon optical table, and wherein scanning micro-mirror comprises microdrive, plane spring and movable lens.
The outfan of microdrive links to each other with the input of plane spring, and the outfan of plane spring links to each other with the input of movable lens; Each device comprises 1 movable lens, 4 plane springs and 4 microdrives, and movable lens links to each other with 4 plane springs, and each plane spring links to each other with 1 microdrive; The low-light electric system comprises single-mode fiber, GRIN Lens, 2 tablet filters and 2 light cells; The silicon optical table is used for calibration and fixing micro-optical systems, and provides electrical connection for scanning micro-mirror; Incident beam through the transmission of low-light electric system and focusing impinges perpendicularly on imageable target after scanning micro-mirror turn 90 degrees partially, collect and be transferred to external optical imaging system by the low-light electric system by the light beam that imageable target reflects after scanning micro-mirror turn 90 degrees partially.
Described microdrive adopts micro-processing technology to make, based on the electrothermal drive principle, by multilayer material, such as silicon, silicon dioxide, metal, the compositions such as metal-oxide are used for and will be converted to mechanical deformation by the bimetal leaf effect via the external drive signal that the light cell of low-light electric system is changed;
Described plane spring adopts micro-processing technology to make, and by multilayer material, such as silicon, the compositions such as silicon dioxide are used for the displacement of microdrive one end is passed to movable lens;
Described movable lens adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; The surface of movable lens is coated with high reflectivity film, is used for the incident laser light beam of reflection specific wavelength;
Adopt optics natural gum to connect between described single-mode fiber and the GRIN Lens;
Described optical filter is narrow band pass filter, is used for filtering out the laser of 2 different wave lengths from incident laser, and partially turn 90 degrees the light cell surface that is incident upon correspondence;
Described silicon optical table adopts micro-processing technology to make, and the surface is carved with the V-type groove and is used for calibration and fixing micro-optical systems, and it is to set up electrical connection between the light cell of the scanning micro-mirror of an end and the other end that there is metal wire on the surface.
Operation principle of the present utility model is such: the incident laser light beam is comprised of three kinds of different laser of wavelength, and a kind of is work laser, and two kinds is driving laser in addition.Work laser can for the low coherent laser of single-frequency laser or broadband, depend on the requirement of optical imaging apparatus; Driving laser is single-frequency laser, and 2 photronic different sensitive wave lengths are complementary in its wavelength and the low-light electric system.On the first optical filter that single-mode fiber and the GRIN Lens of incident laser light beam by the low-light electric system at first projects the low-light electric system.The direction of first optical filter becomes miter angle with the optical axis of incident laser.The driving laser of the first wavelength is vertically projected on the first light cell by first optical filter reflection 90 degree, and the driving laser of work laser and another kind of wavelength projects on the second tablet filter of low-light electric system after the transmission of first optical filter.The direction of the second tablet filter becomes miter angle with the optical axis of incident laser.The driving laser of the second wavelength is vertically projected on second light cell by the second tablet filter reflection 90 degree.Work laser projects on the movable lens of scanning micro-mirror after the second tablet filter transmission.2 light cells receive the driving laser of 2 kinds of wavelength, and are converted to for the signal of telecommunication that drives microdrive.Drive the signal of telecommunication and make metal or silicon heater in the microdrive produce heat, the temperature of microdrive is risen.Microdrive is that multilayer material consists of, and different materials has different thermal coefficient of expansions, and therefore along with temperature rises, deformation can occur microdrive, to the less material curving of thermal coefficient of expansion.One end of microdrive is fixed on the silicon chip, and the other end is connected on the movable lens by plane spring.Under the effect of different amplitude electric drive signals, the deformation of different amplitudes occurs in microdrive, makes the movable lens vibration, finishes scanning.
This utility model has following advantage owing to adopted technique scheme:
1, only keeps a single-mode fiber, need not many plain conductors;
2, simplify device structure, improved reliability and safety.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is incident beam 90-degree rotation sketch map.
The specific embodiment
The utility model is described in further detail below in conjunction with drawings and Examples: as shown in Figure 1, it comprises scanning micro-mirror 1, low-light electric system 2 and silicon optical table 3, and wherein scanning micro-mirror 1 comprises microdrive 1.1, plane spring 1.2 and movable lens 1.3.The outfan of microdrive 1.1 links to each other with the input of plane spring 1.2, and the outfan of plane spring 1.2 links to each other with the input of movable lens 1.3; Each device comprises 1 movable lens 1.3,4 plane springs 1.2 and 4 microdrives 1.1, and movable lens 1.3 links to each other with 4 plane springs 1.2, and each plane spring 1.2 links to each other with 1 microdrive 1.1; Low-light electric system 2 comprises single-mode fiber 2.1, GRIN Lens 2.2,2 tablet filters 2.3 and 2 light cells 2.4; Silicon optical table 3 is used for calibration and fixing micro-optical systems 2, and provides electrical connection for scanning micro-mirror 1; Incident beam through 2 transmission of low-light electric system and focusing impinges perpendicularly on imageable target after scanning micro-mirror 1 turn 90 degrees partially, collect and be transferred to external optical imaging system by low-light electric system 2 by the light beam that imageable target reflects after scanning micro-mirror 1 turn 90 degrees partially.
Described microdrive 1.1 adopts micro-processing technology to make, based on the electrothermal drive principle, by multilayer material, such as silicon, silicon dioxide, metal, the compositions such as metal-oxide are used for and will be converted to mechanical deformation by the bimetal leaf effect via the external drive signal that the light cell 2.4 of low-light electric system 2 is changed;
Described plane spring 1.2 adopts micro-processing technology to make, and by multilayer material, such as silicon, the compositions such as silicon dioxide are used for the displacement of microdrive 1.1 1 ends is passed to movable lens 1.3;
Described movable lens 1.3 adopts micro-processing technology to make, by multilayer material, and such as silicon, the compositions such as silicon dioxide; The optical thin film of the core of movable lens 1.3 for depositing in the silicon dioxide substrate, for the incident laser light beam of reflection specific wavelength, and the incident laser light beam of transmission different wave length is to light cell 2.4;
Adopt optics natural gum to connect between described single-mode fiber 2.1 and the GRIN Lens 2.2;
Described optical filter 2.3 is narrow band pass filter, is used for filtering out the laser of 2 different wave lengths from incident laser, and partially turn 90 degrees light cell 2.4 surfaces that are incident upon correspondence;
Described silicon optical table 3 adopts micro-processing technologies to make, and the surface is carved with the V-type groove and is used for calibration and fixing micro-optical systems, and it is to set up electrical connection between the light cell 2.4 of the scanning micro-mirror 1 of an end and the other end that there is metal wire on the surface.
Operation principle of the present utility model is such: the incident laser light beam is comprised of three kinds of different laser of wavelength, and a kind of is work laser, and two kinds is driving laser in addition.Work laser can for the low coherent laser of single-frequency laser or broadband, depend on the requirement of optical imaging apparatus; Driving laser is single-frequency laser, and the different sensitive wave lengths of 2 light cells 2.4 are complementary in its wavelength and the low-light electric system 2.On the first optical filter 2.3 that single-mode fiber 2.1 and the GRIN Lens 2.2 of incident laser light beam by low-light electric system 2 at first projects low-light electric system 2.The direction of first optical filter 2.3 becomes miter angle with the optical axis of incident laser.The driving laser of the first wavelength is by first optical filter 2.3 reflections 90 degree, be vertically projected on the first light cell 2.4, the driving laser of work laser and another kind of wavelength projects on the second tablet filter 2.3 of low-light electric system 2 after 2.3 transmissions of first optical filter.The direction of the second tablet filter 2.3 becomes miter angle with the optical axis of incident laser.The driving laser of the second wavelength is vertically projected on second light cell 2.4 by the second tablet filter 2.3 reflections 90 degree.Work laser projects on the movable lens 1.3 of scanning micro-mirror 1 after 2.4 transmissions of the second tablet filter.2 light cells 2.4 receive the driving laser of 2 kinds of wavelength, and are converted to for the signal of telecommunication that drives microdrive 1.1.Drive the signal of telecommunication and make metal or silicon heater in the microdrive 1.1 produce heat, the temperature of microdrive 1.1 is risen.Microdrive 1.1 consists of for multilayer material, and different materials has different thermal coefficient of expansions, and therefore along with temperature rises, deformation can occur microdrive 1.1, to the less material curving of thermal coefficient of expansion.One end of microdrive 1.1 is fixed on the silicon chip, and the other end is connected on the movable lens 1.3 by plane spring 1.2.Under the effect of different amplitude electric drive signals, the deformation of different amplitudes occurs in microdrive 1.1, makes movable lens 1.3 vibrations, finishes scanning.
The mechanical deflection angle of movable lens described in the utility model is (0-45) degree.
Photronic sensitive wave length described in the utility model is (300-1550) nanometer.
Claims (8)
1. optical drive biaxial optical scan-probe, it is characterized in that: scanning micro-mirror, low-light electric system and silicon optical table, wherein scanning micro-mirror comprises microdrive, plane spring and movable lens, the outfan of microdrive links to each other with the input of plane spring, and the outfan of plane spring links to each other with the input of movable lens; Each device comprises 1 movable lens, 4 plane springs and 4 microdrives, and movable lens links to each other with 4 plane springs, and each plane spring links to each other with 1 microdrive; The low-light electric system comprises single-mode fiber, GRIN Lens, 2 tablet filters and 2 light cells; The silicon optical table is used for calibration and fixing micro-optical systems, and provides electrical connection for scanning micro-mirror.
2. a kind of optical drive biaxial optical scan-probe as claimed in claim 1 is characterized in that: described microdrive adopts micro-processing technology to make, based on the electrothermal drive principle.
3. a kind of optical drive biaxial optical scan-probe as claimed in claim 1, it is characterized in that: the mechanical deflection angle of described movable lens is the 0-45 degree.
4. a kind of optical drive biaxial optical scan-probe as claimed in claim 1 is characterized in that: described plane spring adopts micro-processing technology to make.
5. a kind of optical drive biaxial optical scan-probe as claimed in claim 1 is characterized in that: described movable lens adopts micro-processing technology to make, and one side is coated with high reflectance coating.
6. a kind of optical drive biaxial optical scan-probe as claimed in claim 1, it is characterized in that: described micro-optical systems comprises single-mode fiber, GRIN Lens, 2 tablet filters and 2 light cells.
7. a kind of optical drive biaxial optical scan-probe as claimed in claim 1, it is characterized in that: described photronic sensitive wave length is the 300-1550 nanometer.
8. a kind of optical drive biaxial optical scan-probe as claimed in claim 1, it is characterized in that: described silicon optical table adopts micro-processing technology to make, the V-type groove is carved with on the surface, and it is that the dual rotary micro mirror of an end and the external electrical of the other end drive foundation electrical connection between the signaling interface that there is metal wire on the surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220258457 CN202920133U (en) | 2012-06-04 | 2012-06-04 | Photic-driving double-shaft optical scanning probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220258457 CN202920133U (en) | 2012-06-04 | 2012-06-04 | Photic-driving double-shaft optical scanning probe |
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| Publication Number | Publication Date |
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| CN202920133U true CN202920133U (en) | 2013-05-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220258457 Expired - Fee Related CN202920133U (en) | 2012-06-04 | 2012-06-04 | Photic-driving double-shaft optical scanning probe |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102697483A (en) * | 2012-06-04 | 2012-10-03 | 凝辉(天津)科技有限责任公司 | Light-driven double-shaft optical scanning probe |
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2012
- 2012-06-04 CN CN 201220258457 patent/CN202920133U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102697483A (en) * | 2012-06-04 | 2012-10-03 | 凝辉(天津)科技有限责任公司 | Light-driven double-shaft optical scanning probe |
| CN102697483B (en) * | 2012-06-04 | 2014-07-09 | 凝辉(天津)科技有限责任公司 | Light-driven double-shaft optical scanning probe |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130508 Termination date: 20140604 |