CN102507984A - Scanning probe microscopy and motion detection device thereof - Google Patents
Scanning probe microscopy and motion detection device thereof Download PDFInfo
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- CN102507984A CN102507984A CN2011103083816A CN201110308381A CN102507984A CN 102507984 A CN102507984 A CN 102507984A CN 2011103083816 A CN2011103083816 A CN 2011103083816A CN 201110308381 A CN201110308381 A CN 201110308381A CN 102507984 A CN102507984 A CN 102507984A
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- 238000001514 detection method Methods 0.000 title claims abstract description 63
- 238000004621 scanning probe microscopy Methods 0.000 title claims abstract description 27
- 239000013307 optical fiber Substances 0.000 claims abstract description 181
- 238000003032 molecular docking Methods 0.000 claims description 16
- 239000000835 fiber Substances 0.000 claims description 15
- 239000000523 sample Substances 0.000 description 24
- 230000003287 optical effect Effects 0.000 description 14
- 230000008901 benefit Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000004647 photon scanning tunneling microscopy Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a motion detection device and a scanning probe microscopy adopting the same. The motion detection device comprises a photoelectric sensor, a laser generator, a first reflector, a second reflector and an optical fiber or an optical fiber component having a first end and a second end, wherein laser from the laser generator is projected to the first end of the optical fiber or the optical fiber component through the first reflector; partial laser is emitted into the optical fiber or the optical fiber component through the first end, and partial layer is reflected to the second reflector and reflected by the second reflector; the laser emitted into the optical fiber or the optical fiber component is projected to a detection target through the second end of the optical fiber or the optical fiber component, and reflected back into the optical fiber or the optical fiber component through the detection target; and the laser reflected by the detection target is projected to the photoelectric sensor through the first end of the optical fiber or the optical fiber component. Therefore, the weak motion of the detection target can be detected by using the laser.
Description
[technical field]
The present invention relates to the microscope field, relate in particular to a kind of scanning probe microscopy (Scanning probe microscopy, SPM) and motion detection apparatus.
[background technology]
Scanning probe microscopy (Scanning probe microscopy; SPM) be that all mechanically scan the microscopical general designation that moves with the detection sample image with probe on sample, its image resolution depends primarily on the size (common scope in nanometer) of probe.Said scanning probe microscopy comprise atomic force microscope (atomic force microscope, AFM) and PSTM microscopes such as (scanning tunneling microscope are abbreviated as STM).
Atomic force microscope is a kind of analytical instrument that can be used to study the solid material surface structure that comprises insulator, its mainly comprise have have needle point (sharp tip) probe (probe) cantilever (cantilever), cantilever motion detection apparatus, monitor its motion backfeed loop, the piezoelectric scanner spare (Piezoelectric scanners) that sample scans, computer-controlled IMAQ, demonstration and disposal system are formed.The needle point of probe contacts with sample surfaces gently; Owing to have atomic weak co-acting force between most advanced and sophisticated atom of needle point and sample surfaces atom; Through when scanning, controlling the constant of this power, the cantilever that has needle point will be corresponding to the equipotential surface of acting force between needle point and sample surfaces atom in the surface direction undulatory motion perpendicular to sample.The cantilever motion detection apparatus can utilize like electrical method or optical meanss such as beam deflection method, interferometric method such as tunnel current detections, records the change in location of cantilever corresponding to the scanning each point, thereby can obtain the information of sample surfaces pattern.
Come the laser interferance method that utilizes in the existing scanning probe microscopy of brief account to detect the cantilever motion detection apparatus of the motion of cantilever once below in conjunction with Fig. 1.
The laser that laser generator 110 is launched arrives photo-coupler 120 through optical fiber 141; Said photo-coupler 120 is divided into two-way with said laser; Be designated as the first via laser and the second road laser respectively; Said photo-coupler 120 imports optical fiber 142 with first via laser, and the second road laser is imported optical fiber 143.The first via laser that gets into optical fiber 142 reflects at the end of optical fiber 142, returns said photo-coupler 120 along optical fiber 142 afterwards.The terminal back that gets into the second road laser output fiber 143 of optical fiber 143 is had the said optical fiber 143 of cantilever 150 reflected backs of probe 160; Return said photo-coupler 120 along said optical fiber 143 afterwards; Said photo-coupler 120 imports optical fiber 144 with the first via laser and the second road laser of reflected back, and the first via laser and the second road laser arrive photoelectric sensor 130 along said optical fiber 144 afterwards.Said photoelectric sensor 130 calculates the optical path difference of two-way laser according to the interference situation of the first via laser and the second road laser, and then can learn the motion conditions of said cantilever 150.
Generally speaking; Said laser generator 110 is fixed with photoelectric sensor 130; Not not removable or rotate and hold with cantilever 150 at the laser emitting that needs optical fiber 143 in some cases; So common optical fiber that needs the design extra length with the laser emitting that cooperates said optical fiber 143 terminal with the moving or rotation of cantilever 150, such design uses and is not very convenient.
For instance; Scanning probe microscopy can use with other microscopes (such as optical microscope) together; This microscope includes the probe turntable, has the object lens that optical microscope uses, the laser probe (the terminal and cantilever 150 of laser emitting that comprises optical fiber 143) of scanning probe microscopy on it.When using scanning probe microscopy; Can make the laser emitting end and the cantilever 150 of the optical fiber 143 of said scanning probe microscopy aim at sample stage by the rotating detector turntable; When using optical microscope, can make object lens of said optical microscope aim at sample stage by rotated detection head turntable.Because an end of optical fiber 143 is movably, the other end need be connected with photoelectric sensor 130 with fixing laser generator indirectly, and this is using very inconvenience.
If optical fiber 143 partitions are divided into two parts, a part is rotatable, and a part is fixing, and the two parts with optical fiber 143 are very difficult to the brigadier again so.As shown in Figure 2, optical fiber generally comprises fibre core 210 and the covering 220 that is enclosed in outside the fibre core 210, and the diameter of single-mode optics fibre core is 5 μ m～10 μ m usually.If hope two parts of optical fiber 143 are aimed at, so just need the two-part fibre core of optical fiber be aimed at, and the aligning diameter to be the fibre core of 5 μ m～10 μ m relatively be not easy to realize.In addition, do like this and also and outward introduced an optical interface, and this optical interface can cause extra interference noise.
Therefore, hope to propose a kind of new scanning probe microscopy and motion detection apparatus thereof.
[summary of the invention]
One of the object of the invention is to provide a kind of motion detection apparatus, and it can utilize laser to survey the faint motion of the detection of a target.
One of the object of the invention is to provide a kind of scanning probe microscopy that adopts motion detection apparatus, and said motion detection apparatus can utilize laser to survey the faint motion of cantilever.
In order to address the above problem; According to an aspect of the present invention; The invention provides a kind of motion detection apparatus, it comprises: photoelectric sensor, laser generator, first catoptron, second catoptron and comprise first end and the optical fiber or the optical fiber component of second end.Wherein projected first end of said optical fiber or optical fiber component via first catoptron from the laser of laser generator; Part laser is gone into said optical fiber or optical fiber component through first end-fire; Part laser is reflected onto said second catoptron and goes out via second mirror reflects; Second end of the laser of injecting said optical fiber or optical fiber component through said optical fiber or optical fiber component is projected to the detection of a target and by in said optical fiber of said detection of a target reflected back or the optical fiber component, is projected to said photoelectric sensor by first end of said detection of a target laser light reflected through said optical fiber or optical fiber component.
Further, inject part in the laser of said optical fiber, be projected to said photoelectric sensor by first end of the second end laser light reflected through said optical fiber by the reflection of second end of said optical fiber.
Further; First of said optical fiber or optical fiber component brings out the plane perpendicular to the sensitive surface place of said photoelectric sensor of the axle of the laser beam penetrated, and first of the said optical fiber or the optical fiber component that partly or entirely be positioned at of first catoptron and second catoptron brings out the laser beam of penetrating.
Further; First of said optical fiber or optical fiber component brings out the plane perpendicular to the sensitive surface place of said photoelectric sensor of the axle of the laser beam penetrated, and first catoptron and second catoptron are positioned at first of said optical fiber or optical fiber component and bring out outside the laser beam of penetrating.
Further; Said motion detection apparatus also includes the first carrying body that carries said photoelectric sensor, laser generator, first catoptron and second catoptron; With the second carrying body that carries said optical fiber or optical fiber component; Second carries body moves between docking location and non-docking location with respect to the first carrying body; When second carries body and is positioned at docking location, can be projected first end of said optical fiber or optical fiber component from the laser of laser generator via first catoptron, can be projected to said photoelectric sensor by the first end emitting laser of said optical fiber or optical fiber component; When the second carrying body is positioned at non-docking location, can not be projected first end of said optical fiber or optical fiber component via first catoptron from the laser of laser generator.
Further, the said detection of a target is a cantilever.
According to another aspect of the present invention; The invention provides a kind of scanning probe microscopy; It comprises motion detection apparatus, and said motion detection apparatus comprises: photoelectric sensor, laser generator, first catoptron, second catoptron and comprise first end and the optical fiber or the optical fiber component of second end.Wherein projected first end of said optical fiber or optical fiber component via first catoptron from the laser of laser generator; Part laser is gone into said optical fiber or optical fiber component through first end-fire; Part laser is reflected onto said second catoptron and goes out via second mirror reflects; Second end of the laser of injecting said optical fiber or optical fiber component through said optical fiber or optical fiber component is projected to the detection of a target and by in said optical fiber of said detection of a target reflected back or the optical fiber component, is projected to said photoelectric sensor by first end of said detection of a target laser light reflected through said optical fiber or optical fiber component.
Compared with prior art; The laser that penetrates from laser generator in the present invention is to go into said optical fiber or optical fiber component through first end-fire of said optical fiber or optical fiber component; And the laser of outgoing to photoelectric sensor also is first end from said optical fiber or optical fiber component; Reduce optical interface like this, reduced interference noise.
About other purposes of the present invention, characteristic and advantage will combine accompanying drawing in embodiment, to describe in detail below.
[description of drawings]
In conjunction with reference to accompanying drawing and ensuing detailed description, the present invention will be more readily understood, the structure member that wherein same Reference numeral is corresponding same, wherein:
Fig. 1 is the cantilever motion detection principle schematic of scanning probe microscopy of the prior art;
Fig. 2 is the structural representation of optical fiber of the prior art;
Fig. 3 is the cantilever motion detection apparatus structural representation in one embodiment in the scanning probe microscopy that can be used among the present invention; With
Fig. 4 is the synoptic diagram of an optical fiber component.
[embodiment]
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
Alleged here " embodiment " or " embodiment " are meant that special characteristic, structure or the characteristic relevant with said embodiment can be contained at least one implementation of the present invention at least.Different local in this manual " in one embodiment " that occur and nonessential all refer to same embodiment, must not be yet with other embodiment mutually exclusive separately or select embodiment.In addition, represent that the sequence of modules and revocable in method, process flow diagram or the functional block diagram of one or more embodiment refers to any particular order, also be not construed as limiting the invention.
Fig. 3 is cantilever motion detection apparatus 300 structural representation in one embodiment of the scanning probe microscopy among the present invention.Said cantilever motion detection apparatus 300 includes the first carrying body 310, is arranged at photoelectric sensor 320, laser generator 330, first catoptron 340 and second catoptron 350 in the said first carrying body 310, and it also includes with the first carrying body 310 relatively-movable second and carry bodies 360, is arranged at the optical fiber 370 in the said second carrying body 360.
Move the second carrying body 360 and can be in docking location so that the second carrying body 360 and first carries body 310.At this moment, the laser that laser generator 330 penetrates is via first end 371 of reflections propagate to said second optical fiber 370 of first catoptron 340, and part laser gets into said optical fiber 370 from said first end 371.In order to prevent not get into the laser effect motion detection of optical fiber 370, all the other laser are reflexed to second catoptron 350 by first end 371 and reflecting surface on every side thereof, by second catoptron 350 all the other laser-bounces extremely said first are carried outside the body 310.Get into second end 372 of the laser propagation of said optical fiber 370 to said optical fiber 370; The P1 of first that gets in the laser of said optical fiber 370 penetrates said second end 372; By the said optical fiber 370 of cantilever 380 reflected backs, the P1 of first of this reflected back is transmitted to said photoelectric sensor 320 via first end 371 of said optical fiber 370 subsequently afterwards.Get into second portion P2 in the laser of said optical fiber 370 by 372 reflections of said second end, the second portion P2 of this reflected back is transmitted to said photoelectric sensor 320 via first end 371 of said optical fiber 370 subsequently.
Said photoelectric sensor 320 detects the motion of said cantilever 380 according to the interference of P1 of first and second portion P2.Said cantilever 380 also can be regarded as the part of said cantilever motion detection apparatus 300.
Move the second carrying body 360 and can be in non-docking location so that the second carrying body 360 and first carries body 310; Can not inject said optical fiber 370 via said first catoptron, 340 laser light reflected this moment, and second end 372 of said optical fiber 370 can not aimed at said cantilever 380 yet.In other words, said optical fiber 370 has been rotated to non-docking location.
After from non-docking location the said second carrying body 360 being moved back to docking location once more, still can inject said optical fiber 370 via said first catoptron, 340 laser light reflected.Because the diameter of the laser beam that laser generator 330 produces is much larger than the diameter of the fibre core of said optical fiber; Diameter such as laser beam is about 100um; The diameter of the fibre core of optical fiber is about 5-10um; Realize than being easier at the fibre core of aiming at said optical fiber with laser beam like this, as long as laser beam can cover said fibre core and just can.
Because laser is to inject from first end 371 of said optical fiber 370, the laser that reflexes to said photoelectric sensor 320 also is that first end 371 from said optical fiber 370 penetrates.In one embodiment; As shown in Figure 3; The numerical aperture (Numerical Aperture) of first end 371 that partly or entirely is positioned at said optical fiber 370 of first catoptron 340 and second catoptron 350 can improve the impingement rate that is got into first end 371 of said optical fiber 370 by 340 reflections of first catoptron like this.The central axis of the fibre core of first end of said optical fiber 370 is basically perpendicular to the plane at the sensitive surface place of said photoelectric sensor 320.At this moment, first catoptron 340 and second catoptron, 350 meeting stop portions reflex to the laser of said photoelectric sensor 320 from first end 371 of said optical fiber 370.Usually, the diameter of the laser beam that the diameter of the induction area of photoelectric sensor 320 produces much larger than said laser generator 330 is about 2mm such as the diameter of induction area, and laser beam is about 100um.In a preferred embodiment; The diameter that is a bit larger tham laser beam that first catoptron 340 and second catoptron 350 can design gets final product; Their position can be provided with near said photoelectric sensor 320, the blocking reflected that such first catoptron 340 and second catoptron 350 can be the least possible is said photoelectric sensor 320 extremely.The light that first catoptron 340 and second catoptron 350 stop is less relatively, does not influence the detection of said photoelectric sensor 320.
In another alternate embodiments; First catoptron 340 and second catoptron 350 also can be positioned at the numerical aperture (Numerical Aperture) outer (not shown) of first end 371 of said optical fiber 370; Can alleviate the influence of incident laser like this, reduce noise shoot laser.
Said first carries body 310 and said second, and to carry body 360 are mechanical parts of said motion detection apparatus 300, and said photoelectric sensor 320, laser generator 330, first catoptron 340, second catoptron 350, optical fiber 370, cantilever 380 are photoelectricity parts of said motion detection apparatus 300.Said first carry body 310 if the position relation that can carry said photoelectric sensor 320, laser generator 330, first catoptron 340, second catoptron 350 and guarantee them can satisfy aforementioned about the light ray propagation description just passable.Same, second carries body 320 as long as can carry said optical fiber 370 and guarantee that its position relation can satisfy aforementioned relevant light ray propagation and describe just passable.
One of advantage, benefit or characteristics of cantilever motion detection apparatus 300 among the present invention are: the laser that penetrates from laser generator 330 is to inject said optical fiber 370 through first end 371 of said optical fiber 370; And also be that first end 371 from said optical fiber 370 penetrates to said photoelectric sensors from the laser of the second end reflected back of said cantilever 380 and said optical fiber 370; Reduce optical interface like this, reduced interference noise.In other words, the photoelectric sensor among the present invention 320 and laser generator 330 corresponding same optical fiber 370.
Two of advantage, benefit or the characteristics of the cantilever motion detection apparatus 300 among the present invention are: second carries body 360 can carry body 310 repeated moving between docking location and non-docking location with respect to first; Because the mode that has adopted laser beam to aim at the fibre core of optical fiber; Make second to carry body 360 when moving to docking location, said laser beam can be aimed at the fibre core of said optical fiber easily.
Obviously, in other embodiments, said cantilever motion detection apparatus also can be not limited to the motion that detects cantilever, also can be used to detect the motion of other detections of a target, these other detections of a target can be as cantilever reflected illumination laser on it.
Enumerate an application example of scanning probe microscopy below with said cantilever motion detection apparatus 300.In this application example; A said scanning probe microscopy and an optical microscope use jointly; This microscope has a probe turntable; The probe that has the cantilever motion detection apparatus 300 that object lens that optical microscope uses and scanning probe microscopy use on it, wherein said probe can comprise and said second carry body 360, be arranged at said second optical fiber 370 and the cantilever 380 that carry in the body 360.When using scanning probe microscopy, can the rotating detector turntable make the aligning sample stage of the probe of said scanning probe microscopy, when using optical microscope, can make object lens of said optical microscope aim at sample stage by rotated detection head turntable.Like this, just realized two kinds microscopical shared.
Each module of other of said scanning probe microscopy or mechanism can adopt prior art, because these contents are not emphasis of the present invention, therefore omit these contents in the present invention.
In another embodiment; What the said second carrying body 360 also can be set up does not move with respect to the first carrying body 310; Existing cantilever motion detection apparatus shown in the still alternative Fig. 1 of this cantilever motion detection apparatus this moment; Itself and existing cantilever motion detection apparatus are a kind of parallel schemes, and they can realize the cantilever motion detection of scanning probe microscopy.In a further embodiment, the said second carrying body 360 can be one with the said first carrying body 310.
Said optical fiber 370 also can be replaced by the optical fiber component shown in Fig. 4 400.Said optical fiber component 400 comprises first optical fiber 410, photo-coupler 420, second optical fiber 430 and the 3rd optical fiber 440.One end 411 of first optical fiber 410 is corresponding to an end 441 of first end, 371, the three optical fiber 440 of said optical fiber 370 second end 372 corresponding to said optical fiber 370.The laser that is incident to first optical fiber 410 is divided into two-way via photo-coupler 420, wherein one the tunnel gets into second optical fiber 430, and another road gets into the 3rd optical fiber 440.To cantilever, the cantilever laser light reflected is carried out the 3rd optical fiber 440 through an end 441 of the 3rd optical fiber 440 to the laser that gets into the 3rd optical fiber 440 again via an end 441 outgoing of the 3rd optical fiber 440.The laser that gets into second optical fiber 430 reflects at its end.Get into first optical fiber 410 via the laser of second optical fiber, 430 reflected backs with via the laser of the 3rd optical fiber 440 reflected backs once more through photo-coupler 420, bring out through the laser incident of first optical fiber 410 afterwards and penetrate.
Preceding text have carried out the enough detailed description with certain singularity to the present invention.Under those of ordinary skill in the field should be appreciated that the description among the embodiment only is exemplary, under the prerequisite that does not depart from true spirit of the present invention and scope, make change and all should belong to protection scope of the present invention.Such as; The laser that laser generator 330 shown in Fig. 3 sends just arrives first catoptron 340 after can also passing through other catoptrons, can just be penetrated said first via other catoptron again through the laser after 350 reflections of second catoptron and carry body 310.The present invention's scope required for protection is limited described claims, rather than limit the foregoing description among the embodiment.
Claims (7)
1. motion detection apparatus is characterized in that it comprises: photoelectric sensor, laser generator, first catoptron, second catoptron and comprise first end and the optical fiber or the optical fiber component of second end,
Wherein projected first end of said optical fiber or optical fiber component via first catoptron from the laser of laser generator; Part laser is gone into said optical fiber or optical fiber component through first end-fire; Part laser is reflected onto said second catoptron and goes out via second mirror reflects
Second end of the laser of injecting said optical fiber or optical fiber component through said optical fiber or optical fiber component is projected to the detection of a target and by in said optical fiber of said detection of a target reflected back or the optical fiber component, is projected to said photoelectric sensor by first end of said detection of a target laser light reflected through said optical fiber or optical fiber component.
2. motion detection apparatus according to claim 1 is characterized in that, injects part in the laser of said optical fiber by the reflection of second end of said optical fiber, is projected to said photoelectric sensor by first end of the second end laser light reflected through said optical fiber.
3. motion detection apparatus according to claim 1; It is characterized in that; The central axis of the fibre core of first end of said optical fiber or optical fiber component is basically perpendicular to the plane at the sensitive surface place of said photoelectric sensor, the numerical aperture of first end that partly or entirely is positioned at said optical fiber or optical fiber component of first catoptron and second catoptron.
4. motion detection apparatus according to claim 1; It is characterized in that; The central axis of the fibre core of first end of said optical fiber or optical fiber component is basically perpendicular to the plane at the sensitive surface place of said photoelectric sensor, and first catoptron and second catoptron are positioned at outside the numerical aperture of first end of said optical fiber or optical fiber component.
5. according to the arbitrary described motion detection apparatus of claim 1-4; It is characterized in that; It also includes and carries the second carrying body that first of said photoelectric sensor, laser generator, first catoptron and second catoptron carries body and carry said optical fiber or optical fiber component
Second carries body moves between docking location and non-docking location with respect to the first carrying body; When the second carrying body is positioned at docking location; Can be projected first end of said optical fiber or optical fiber component via first catoptron from the laser of laser generator; The first end emitting laser by said optical fiber or optical fiber component can be projected to said photoelectric sensor; When the second carrying body is positioned at non-docking location, can not be projected first end of said optical fiber or optical fiber component via first catoptron from the laser of laser generator.
6. according to the arbitrary described motion detection apparatus of claim 1-4, it is characterized in that the said detection of a target is a cantilever.
7. a scanning probe microscopy is characterized in that, it comprises arbitrary described motion detection apparatus like claim 1-6.
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| CN 201110308381 CN102507984B (en) | 2011-10-12 | 2011-10-12 | Scanning probe microscopy and motion detection device thereof |
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| CN 201110308381 CN102507984B (en) | 2011-10-12 | 2011-10-12 | Scanning probe microscopy and motion detection device thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nanomechanical detection system in ultra-low temperature environment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5324935A (en) * | 1992-05-08 | 1994-06-28 | Seiko Instruments Inc. | Scanning probe microscope having a directional coupler and a Z-direction distance adjusting piezoelectric element |
| JPH09329607A (en) * | 1996-06-12 | 1997-12-22 | Olympus Optical Co Ltd | Three-dimensional force ct microscope |
| JPH1144693A (en) * | 1997-07-25 | 1999-02-16 | Agency Of Ind Science & Technol | Method and apparatus for measurement of position of probe chip in near-field optical microscope and control device therefor |
| CN2816805Y (en) * | 2004-12-30 | 2006-09-13 | 中国科学院电工研究所 | Biochemical sensor |
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2011
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5324935A (en) * | 1992-05-08 | 1994-06-28 | Seiko Instruments Inc. | Scanning probe microscope having a directional coupler and a Z-direction distance adjusting piezoelectric element |
| JPH09329607A (en) * | 1996-06-12 | 1997-12-22 | Olympus Optical Co Ltd | Three-dimensional force ct microscope |
| JPH1144693A (en) * | 1997-07-25 | 1999-02-16 | Agency Of Ind Science & Technol | Method and apparatus for measurement of position of probe chip in near-field optical microscope and control device therefor |
| CN2816805Y (en) * | 2004-12-30 | 2006-09-13 | 中国科学院电工研究所 | Biochemical sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111811939A (en) * | 2020-07-21 | 2020-10-23 | 上海交通大学 | High-precision nanomechanical detection system in ultra-low temperature environment |
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