CN102353816A - Probe scanning atomic force microscope (AMF) - Google Patents
Probe scanning atomic force microscope (AMF) Download PDFInfo
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- CN102353816A CN102353816A CN2011102709339A CN201110270933A CN102353816A CN 102353816 A CN102353816 A CN 102353816A CN 2011102709339 A CN2011102709339 A CN 2011102709339A CN 201110270933 A CN201110270933 A CN 201110270933A CN 102353816 A CN102353816 A CN 102353816A
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- 239000000919 ceramic Substances 0.000 claims description 6
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- 238000013519 translation Methods 0.000 description 5
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Abstract
The invention discloses a probe scanning atomic force microscope (AMF). The AMF comprises a displacement platform and a probe base, wherein, the displacement platform moves along the XYZ directions for scanning and is fixedly equipped with a tracking lens and a micro-cantilever probe, the tracking lens is used for converging incident lights, the micro-cantilever probe is used for reflecting emergent lights of the tracking lens, and the top end of the micro-cantilever probe is always positioned at the focus of the tracking lens so that the emergent lights of the tracking lens are always converged at the same position on the micro-cantilever probe when the displacement platform moves; and the probe base is equipped with a converging lens and a position sensitive detector (PSD), and the converging lens is used for receiving and converging reflected lights of the micro-cantilever probe so that the centers of light spots formed by the emergent lights of the converging lens are always positioned at the same position on the PSD. The probe scanning AMF has the beneficial effects of realizing a planar scanning surface, eliminating the influence on the position of the light spot in the case of lateral movement of the probe during the scanning process, and reducing measurement errors.
Description
Technical field
The present invention relates to a kind of atomic force microscope, particularly relate to a kind of gauge head scanning type atomic force microscope.
Background technology
The invention of atomic force microscope has realized the measurement of nanoscale, has played important impetus for the development of nanometer technology.The gauge head of present most of atomic force microscopes adopts the optical lever method to measure the deflection of cantilever.The light beam that from laser instrument, sends by probe cantilever backside reflection to photodetector.During atomic force microscope work, the variation of the interaction force between the pattern that scan-probe and sample surfaces just rise and fall can cause the small deflection of semi-girder, and the amount of deflection that detects and note semi-girder can draw the microscopic appearance on sample surface.When cantilever bending was out of shape, the facula position on the detector also can correspondingly change, detector to the distance of cantilever greater than jib-length, so amplification is given birth in the sell of one's property of probe cantilever shape.
The atomic force microscope that early occurs adopts sample stage portable.Under this scan mode, gauge head is fixed, and sample and gauge head does relative motion through displacement platform band, and the sample that a shortcoming of this type probe is scanned need be placed on the piezoelectric scanner, thereby the shape and size of sample are limited to some extent.
Most atomic force gauge heads drive probe with piezoelectric ceramic tube and come scanning samples; But in this method because X, the displacement of Y direction are bendings through the piezoelectric ceramics tube realizes; Therefore actual X, the displacement of Y be not in one plane carry out but a curved surface, causing the laser focusing spot scan is curved surface.And the position of when scanning reflected light on detector can be moved, and produces measuring error.Though so this gauge head simplicity of design is not suitable for high-precision measurement.
Summary of the invention
The technical matters that the present invention solves is, a kind of gauge head scanning type atomic force microscope is provided, and makes that scanning plane is the plane, and simultaneously, the influence that when the elimination gauge head laterally moves in scanning process facula position is produced reduces measuring error.
For addressing the above problem, the invention discloses a kind of gauge head scanning type atomic force microscope, comprising:
The displacement platform; This displacement platform can move to scan in the XYZ direction; Be set with on this displacement platform and follow the tracks of lens and micro-cantilever probe, these tracking lens are used for incident light is converged, and this micro-cantilever probe reflects the emergent light of these tracking lens; This micro-cantilever probe is followed this displacement platform and is done flat scanning; The top of this micro-cantilever probe is positioned at the along of these tracking lens all the time, makes that when this displacement platform moved, the emergent light of these tracking lens converged in the same position on this micro-cantilever probe all the time; And
The gauge head pedestal; This gauge head pedestal is provided with plus lens and position sensitive detector; This plus lens is used to receive the reflected light of this micro-cantilever probe and converge, and makes the center of the hot spot that the emergent ray of this plus lens forms be positioned at the same position on the position sensitive detector all the time.
When the focal length of this plus lens is 60mm; This plus lens is apart from this micro-cantilever probe 129mm; This plus lens is during apart from this position sensitive detector 203.74mm, and the center of the hot spot that the emergent ray of this plus lens forms is positioned at the center of position sensitive detector all the time.
The incident light of these tracking lens is a directional light.Also be provided with a right-angle prism on this gauge head pedestal, light is incident to this tracking lens after this right-angle prism reflection.This displacement platform is a piezoelectric ceramics displacement platform.These tracking lens be arranged on this micro-cantilever probe directly over, when this displacement platform moved, these tracking lens and this micro-cantilever probe were done as a wholely to move simultaneously.These tracking lens comprise first lens and second lens; The focal length of these first lens is f1; The focal length of these second lens is f2, and the focal length of this plus lens is f3, and the distance of the focus of the center of these second lens and these first lens is a1; The distance of this micro-cantilever probe and these second lens is a2,1/a1+1/a2=1/f2; The catoptrical central ray of this micro-cantilever probe and the primary optical axis of this plus lens intersect at the first joining A; The distance of this plus lens and this first joining A is b1; The distance of this position sensitive detector and this plus lens is b2,1/b1+1/b2=1/f3.
The invention also discloses a kind of gauge head scanning type atomic force microscope, comprising:
The displacement platform; This displacement platform can move to scan in the XYZ direction, is set with on this displacement platform to follow the tracks of lens and micro-cantilever probe, and these tracking lens are used for incident light is converged; This micro-cantilever probe reflects the emergent light of these tracking lens; The top of this micro-cantilever probe is positioned at the along of these tracking lens all the time, makes that when this displacement platform moved, the emergent light of these tracking lens converged in the same position on this micro-cantilever probe all the time;
The gauge head pedestal; This gauge head pedestal is provided with plus lens and position sensitive detector; This plus lens is used to receive the reflected light of this micro-cantilever probe and converge, and makes the center of the hot spot that the emergent ray of this plus lens forms be positioned at the same position on the position sensitive detector all the time; And
Signal processor, this position sensitive detector is exported corresponding photo-signal to this signal processor according to received hot spot, and this signal processor carries out signal Processing to draw out the microcosmic complexion of measured object.
Technique effect of the present invention is; Carry this micro-cantilever probe and follow the tracks of lens through transfer table movably, realized that scanning plane is the plane, and made that the scanning on XY direction and the Z direction is separated; Eliminated influencing each other between them, reduced restriction simultaneously the size of measured object.In addition, the micro-cantilever probe when the XY scanning direction, the invariant position of incident light focus point on the micro-cantilever probe, and the invariant position of hot spot on position sensitive detector, thus eliminated the error that the XY scanning direction causes.
Description of drawings
Figure 1A, 1B are depicted as the microscopical structural representation of gauge head scanning type atomic force of the present invention;
Shown in Figure 2 is the microscopical light path synoptic diagram of gauge head scanning type atomic force of the present invention;
Shown in Figure 3 is scanning light path principle figure of the present invention;
Shown in Figure 4 is gauge head design and assembly figure of the present invention;
Shown in Figure 5 is the microscopical structural representation of gauge head scanning type atomic force of the present invention.
Embodiment
Be depicted as the microscopical structural representation of gauge head scanning type atomic force of the present invention like Figure 1A, 1B.Gauge head scanning type atomic force microscope 100 comprises and can move realizing the displacement platform 3 to the scanning of measured object, and, the gauge head pedestal 8 that does not move.
This displacement platform 3 can move in three directions of XYZ, carries out the independent scanning of three directions.Be set with on this displacement platform 3 and follow the tracks of lens 4 and micro-cantilever probe 5.Micro-cantilever probe 5 has needle point and top.The needle point of micro-cantilever probe 5 is used for directly contacting the measured object (not shown).The relative position relation of following the tracks of lens 4 and micro-cantilever probe 5 is set to, and the top of this micro-cantilever probe is positioned at the along of these tracking lens all the time.When displacement platform 3 moves, follow the tracks of lens 4 and micro-cantilever probe 5 and do as a whole mobile simultaneously.Gauge head pedestal 8 is provided with light source 1, plus lens 6 and position sensitive detector 7.
Operation logic of the present invention below is described.
Because displacement platform 3 can carry out independent scanning in three directions,, overcome the plane of scanning motion distortion that piezoelectric ceramic tube scanning causes in the prior art so can realize the scanning of micro-cantilever probe 5 in pure flat.In the process that displacement platform 3 moves in the XY plane, micro-cantilever probe 5 slides on the surface at measured object with moving of displacement platform 3.And follow the tracks of lens 4 be positioned at all the time micro-cantilever probe 5 directly over.Because light source 1 is fixedly installed on the gauge head pedestal 8; So the invariant position of the incident light that is sent is then when tracking lens 4 move with displacement platform 3; Variation has taken place in the position of following the tracks of on the lens in the incident light irradiation; See also the microscopical light path synoptic diagram of gauge head scanning type atomic force shown in Figure 2, solid line is the light path of displacement platform 3 when not being moved, and dotted line is the light path after being moved.When micro-cantilever probe 5 is moved to the right, though variation has taken place at the particular location of following the tracks of lens 4 surfaces in the incident light irradiation,, emergent light still converges in the along of following the tracks of lens 4, the just top of micro-cantilever probe 5.Make thus; No matter how micro-cantilever probe 5 moves; Light all can converge in the same position on this micro-cantilever probe 5, has avoided guaranteeing that owing to micro-cantilever probe 5 can't continue to receive the measuring error that light causes micro-cantilever probe 5 can planar move and scan.
In the flat scanning process of micro-cantilever probe 5, micro-cantilever probe 5 will continue the light that receives is reflected.Position sensitive detector 7 is arranged on the catoptrical regional extent that can receive micro-cantilever probe 5, and this reflected light forms hot spot on position sensitive detector 7, and spot size is less than position sensitive detector 7.When micro-cantilever probe 5 was in the initial position that translation and deflection do not take place, the center of position sensitive detector 7 overlapped with the flare center.Those skilled in the art can know, because micro-cantilever probe 5 is used to measure the microcosmic complexion, so its size is less; The skew of its position that can take place, angle etc. is all comparatively small, so, its catoptrical being limited in scope; And position sensitive detector 7 receives wider range relatively; Position sensitive detector 7 is arranged on the reflected light path of micro-cantilever probe 5, can realizes whole catoptrical reception, realize collection all hot spots to micro-cantilever probe 5.
Gauge head scanning type atomic force microscope is when work, and the motion state of probe comprises translation and deflection.Micro-cantilever probe 5 contacts with measured object; When finding out measured object when on the Z direction, having height fall; Acting force between probe tip and the measured object causes the cantilever bending deflection of micro-cantilever probe 5; Cause reflected light angular deflection, cause the spot center position on the position sensitive detector 7 to be moved, thereby the change in location that makes the angle of cantilever change through this spot center is detected.It is thus clear that; Because gauge head scanning type atomic force microscope detects through the spot center offset that the deflection to micro-cantilever probe 5 brings; And the microcosmic complexion of mensuration measured object, so the spot center offset that when 5 translations of micro-cantilever probe, takes place will produce false displacement signal; Become error, influence final accuracy of measurement.
When micro-cantilever probe 5 moves in the XY plane; Following the tracks of the angle of light that lens 4 converge in the top of this micro-cantilever probe 5 changes; The position that its reflected light is incident upon on the position sensitive detector 7 must change, and the center of the hot spot of its formation is inevitable different.Keep the center of hot spot constant when micro-cantilever probe 5 is moved in the XY plane, can address this problem through the plus lens 6 that is arranged between position sensitive detector 7 and the micro-cantilever probe 5, on the catoptrical light path.Plus lens 6 reflects the reflected light of micro-cantilever probe 5; Then when translation takes place in micro-cantilever probe 5; The spot center that its reflected light forms all appears at the same position of position sensitive detector 7; Then make skew takes place all spot center position situation all from the deflection of micro-cantilever probe, improve microscopical whole accuracy of measurement.
In order to guarantee that the center of flare is constant on the position sensitive detector 7 when micro-cantilever probe 5 scans in the XY plane, each parts in the light path need satisfy certain relation.Be illustrated in figure 3 as scanning light path principle figure of the present invention.Light is the central light beam of incident light among the figure, when 5 transversal scanning of micro-cantilever probe, follows the tracks of lens 4 and moves simultaneously, follows the tracks of lens 4 and comprises first lens, 41, the second lens 42, and focal length is respectively f1, f2.The distance of the focus of the center of second lens 42 and first lens 41 is a1.The distance of the micro-cantilever probe 5 and second lens 42 is a2.A1 and a2 satisfy 1/a1+1/a2=1/f2, and this position relation has guaranteed that focus always focuses on the same position of micro-cantilever probe 5, realizes Focus tracking.
Plus lens 6, position sensitive detector 7 and light source 1 are fixed on the gauge head pedestal.The primary optical axis of central ray and plus lens 6 intersects at the A point.Plus lens 6 is b1 with the distance that A is ordered, and the focal length of plus lens 6 is f3.Position sensitive detector 7 satisfies 1/b 1+1/b2=1/f3 with the distance b 2 of plus lens 6.This position relation has guaranteed that light beam just in time is incident on the center of position sensitive detector 7 after the converging of plus lens 6, thereby when having realized the gauge head translation, the invariant position of spot center on position sensitive detector 7.In the embodiment that more optimizes, show that through experiment this plus lens is placed on ad-hoc location, can make spot center remain on the center of position sensitive detector 7.This ad-hoc location is: the focal length of this plus lens 6 is 60mm; Being centered close on the straight line of the center of the top of micro-cantilever probe 5, plus lens 6, position sensitive detector 7; This plus lens 6 is apart from this micro-cantilever probe 129mm, and this plus lens is apart from this position sensitive detector 203.74mm.
In the embodiment that more optimizes, shown in Figure 1B, also be provided with a right-angle prism 2 on this gauge head pedestal 8, the light of light source is incident to this tracking lens 4 after these right-angle prism 2 reflections.
In the embodiment that more optimizes, first, second lens that these tracking lens 4 comprise are two convex lens, and they form lens combination.Because the matching requirements of lens combination are very strict, so two convex lens designs are as a whole, regulate difficulty to reduce.
In the embodiment that more optimizes, this displacement platform 3 is a piezoelectric ceramics displacement platform.The P-363.3CD displacement platform of for example German PI company, this displacement platform can be realized the self-movement on three directions of XYZ, thereby guarantees pure flat scanning of micro-cantilever probe 5.
Be illustrated in figure 4 as gauge head design and assembly figure, wherein showed the package assembly of transfer table 3.This transfer table 3 comprises a position adjusting mechanism 31 and a probe base 32.Probe base 32 integral hangings are followed the tracks of lens 4 and are arranged on this probe base 32 in a side of position adjusting mechanism 31.This position adjusting mechanism 31 is a two-way elastic body, can on the pairwise orthogonal direction, do the beat motion, thereby lens are followed the tracks of in drive and micro-cantilever probe 5 is done the position adjustment, change the incident light direction.
Be illustrated in figure 5 as the microscopical structural representation of gauge head scanning type atomic force of the present invention.Except that the part shown in Figure 1A; Further comprise signal processor 9; This position sensitive detector 7 is exported corresponding photo-signal to this signal processor 9 according to received hot spot, and this signal processor 9 carries out signal Processing to draw out the microcosmic complexion of measured object.Fig. 5 is also applicable to disclosed other embodiment of the present invention.
Technique effect of the present invention is; Carry this micro-cantilever probe and follow the tracks of lens through transfer table movably, realized that scanning plane is the plane, make that the scanning on XY direction and the Z direction is separated; Eliminated influencing each other between them, reduced restriction simultaneously the size of measured object.In addition, when the XY scanning direction, the invariant position of hot spot on position sensitive detector, thus eliminated the error that the XY scanning direction causes.
Claims (10)
1. a gauge head scanning type atomic force microscope is characterized in that, comprising:
The displacement platform; This displacement platform can move to scan in the XYZ direction; Be set with on this displacement platform and follow the tracks of lens and micro-cantilever probe, this micro-cantilever probe is followed this displacement platform and is done flat scanning, and these tracking lens are used for incident light is converged; This micro-cantilever probe reflects the emergent light of these tracking lens; The top of this micro-cantilever probe is positioned at the along of these tracking lens all the time, makes that when this displacement platform moved, the emergent light of these tracking lens converged in the same position on this micro-cantilever probe all the time; And
The gauge head pedestal; This gauge head pedestal is provided with plus lens and position sensitive detector; This plus lens is used to receive the reflected light of this micro-cantilever probe and converge, and makes the center of the hot spot that the emergent ray of this plus lens forms be positioned at the same position on the position sensitive detector all the time.
2. gauge head scanning type atomic force microscope as claimed in claim 1; It is characterized in that; When the focal length of this plus lens is 60mm; This plus lens is apart from this micro-cantilever probe 129mm, and this plus lens is during apart from this position sensitive detector 203.74mm, and the center of the hot spot that the emergent ray of this plus lens forms is positioned at the center of position sensitive detector all the time.
3. gauge head scanning type atomic force microscope as claimed in claim 1 is characterized in that the incident light of these tracking lens is a directional light.
4. gauge head scanning type atomic force microscope as claimed in claim 3 is characterized in that, also is provided with a right-angle prism on this gauge head pedestal, and light is incident to this tracking lens after this right-angle prism reflection.
5. gauge head scanning type atomic force microscope as claimed in claim 1 is characterized in that, this displacement platform is a piezoelectric ceramics displacement platform.
6. gauge head scanning type atomic force microscope as claimed in claim 1 is characterized in that, these tracking lens be arranged on this micro-cantilever probe directly over, when this displacement platform moved, these tracking lens and this micro-cantilever probe were done as a wholely to move simultaneously.
7. gauge head scanning type atomic force microscope as claimed in claim 1 is characterized in that these tracking lens comprise first lens and second lens; The focal length of these first lens is f1; The focal length of these second lens is f2, and the focal length of this plus lens is f3, and the distance of the focus of the center of these second lens and these first lens is a1; The distance of this micro-cantilever probe and these second lens is a2,1/a1+1/a2=1/f2;
The catoptrical central ray of this micro-cantilever probe and the primary optical axis of this plus lens intersect at the first joining A; The distance of this plus lens and this first joining A is b1; The distance of this position sensitive detector and this plus lens is b2,1/b1+1/b2=1/f3.
8. a gauge head scanning type atomic force microscope is characterized in that, comprising:
The displacement platform; This displacement platform can move to scan in the XYZ direction, is set with on this displacement platform to follow the tracks of lens and micro-cantilever probe, and these tracking lens are used for incident light is converged; This micro-cantilever probe reflects the emergent light of these tracking lens; The top of this micro-cantilever probe is positioned at the along of these tracking lens all the time, makes that when this displacement platform moved, the emergent light of these tracking lens converged in the same position on this micro-cantilever probe all the time;
The gauge head pedestal; This gauge head pedestal is provided with plus lens and position sensitive detector; This plus lens is used to receive the reflected light of this micro-cantilever probe and converge, and makes the center of the hot spot that the emergent ray of this plus lens forms be positioned at the same position on the position sensitive detector all the time; And
Signal processor, this position sensitive detector is exported corresponding photo-signal to this signal processor according to received hot spot, and this signal processor carries out signal Processing to draw out the microcosmic complexion of measured object.
9. gauge head scanning type atomic force microscope as claimed in claim 8; It is characterized in that; When the focal length of this plus lens is 60mm; This plus lens is apart from this micro-cantilever probe 129mm, and this plus lens is during apart from this position sensitive detector 203.74mm, and the center of the hot spot that the emergent ray of this plus lens forms is positioned at the center of position sensitive detector all the time.
10. gauge head scanning type atomic force microscope as claimed in claim 8 is characterized in that these tracking lens comprise first lens and second lens; The focal length of these first lens is f1; The focal length of these second lens is f2, and the focal length of this plus lens is f3, and the distance of the focus of the center of these second lens and these first lens is a1; The distance of this micro-cantilever probe and these second lens is a2,1/a1+1/a2=1/f2;
The catoptrical central ray of this micro-cantilever probe and the primary optical axis of this plus lens intersect at the first joining A; The distance of this plus lens and this first joining A is b1; The distance of this position sensitive detector and this plus lens is b2,1/b1+1/b2=1/f3.
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Application publication date: 20120215 |