CN102778588B - Laser detecting device for high-speed atomic force microscope and detecting method thereof - Google Patents
Laser detecting device for high-speed atomic force microscope and detecting method thereof Download PDFInfo
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- CN102778588B CN102778588B CN201210245733.2A CN201210245733A CN102778588B CN 102778588 B CN102778588 B CN 102778588B CN 201210245733 A CN201210245733 A CN 201210245733A CN 102778588 B CN102778588 B CN 102778588B
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Abstract
本发明公开一种用于高速原子力显微镜的激光检测装置及其检测方法，涉及扫描探针显微成像技术领域。所述的检测方法为由激光器发射出的水平激光束，经分光棱镜反射后向下入射到非球面镜中，经过非球面镜聚焦到探针表面；经探针表面反射的光束再次经过非球面镜，经另一分光棱镜反射最终照射到位置灵敏度探测器上。基于该检测方法，本发明提供的激光检测装置主要包括：激光器固定压片、激光器支撑板、连接板、分光棱镜固定框架、非球面镜镜筒、分光棱镜压板等。采用本发明提供的检测装置，获得激光光斑尺寸小，可以达到16μm以内，比激光束光斑减小50%左右；用于高速原子力显微成像，具有调节容易、使用简单、抗干扰能力强等特点。
The invention discloses a laser detection device for a high-speed atomic force microscope and a detection method thereof, and relates to the technical field of scanning probe microscopic imaging. The detection method is that the horizontal laser beam emitted by the laser is reflected by the dichroic prism and then enters the aspheric mirror downward, and is focused on the surface of the probe through the aspheric mirror; the light beam reflected by the probe surface passes through the aspheric mirror again, Another dichroic prism reflects the final light onto a position-sensitive detector. Based on the detection method, the laser detection device provided by the present invention mainly includes: a laser fixed pressing plate, a laser supporting plate, a connecting plate, a beam splitting prism fixing frame, an aspheric lens barrel, a beam splitting prism pressing plate, and the like. Using the detection device provided by the present invention, the laser spot size is small, which can reach within 16 μm, which is about 50% smaller than the laser beam spot; it is used for high-speed atomic force microscopy imaging, and has the characteristics of easy adjustment, simple use, and strong anti-interference ability. .
Description
Technical field
The present invention relates to scan-probe micro-imaging technique field, particularly a kind of for high speed atomic force microscope coaxial-symmetrical expression laser detecting method and pick-up unit thereof, belong to scanning probe microscopy field.
Background technology
Along with scientific and technological development, the fields such as biology, chemistry, material and nanosecond science and technology in the urgent need to realizing the technology of fast detecting or high speed imaging on micro-nano-scale.Scanning probe microscopy (SPM) is the important tool of carrying out at present Nanometer Detection and Indication, can realize micro-nano-scale micro-imaging, detection and processing.
Atomic force microscope belongs to scanning probe microscopy family, be on scanning tunnel microscope basis, grow up, broad-spectrum microscopy apparatus.But the image taking speed of conventional atomic force microscope is very slow, range of application is very limited, and cannot observe the dynamic process of sample, for example: the detection of biological cell or molecule dynamic process etc.So the sweep velocity that how to improve conventional atomic force microscope becomes the focus that people pay close attention to and study always.
Improving one of afm scan speed critical problem is exactly the physical dimension that reduces micro-cantilever probe, improves its resonant frequency.In conventional atomic force microscope, general using laser deflection method is carried out the moving situation of detector probe, thereby obtains the height relief of sample surfaces.Fig. 1 has provided the ultimate principle of this detection method.By the laser beam of laser instrument 1 ' send, be irradiated to the probe 2 ' surface that is coated with golden film, after probe 2 ' reflection, be irradiated to the surface of position-sensitivity detector 3 ' (PSD), reach the object that detects sample surfaces height relief by detection laser hot spot in the variation of PSD3 ' surface location.In conventional atomic force microscope, if the laser facula size being irradiated on micro-cantilever probe is constant, in the time reducing the physical dimension of micro-cantilever, has unnecessary laser and walk around micro-cantilever, be irradiated to sample surfaces.This part laser after sample surfaces reflection, if be irradiated to the surface of position-sensitivity detector PSD, will be to AFM(atomic force microscope, Atomic Force Microscope) normal work impact.In order to use smaller szie micro-cantilever probe, realize high speed AFM imaging, must reduce the physical dimension of laser instrument hot spot.
Summary of the invention
The object of this invention is to provide a kind of laser detecting method for high speed atomic force microscope and pick-up unit thereof, to reduce the physical dimension of incident laser hot spot, for atomic force microscope high speed imaging.
Laser detecting method of the present invention is: the horizontal laser beam of being launched by laser instrument, after laser lens collimation, incide on Amici prism, and under Amici prism reflection is backward, incide in aspheric mirror, focus on detecting probe surface through aspheric mirror; Light beam through detecting probe surface reflection passes through aspheric mirror again, is finally irradiated on position-sensitivity detector through another Amici prism reflection.Like this, the spot diameter of laser beam after aspheric mirror focuses on reduces greatly, thereby obtains being less than the small size hot spot of lasing beam diameter.Based on this detection method, the structure composition of laser detector provided by the invention mainly comprises: laser instrument is fixed compressing tablet (1), laser instrument back up pad (2), web joint (3), Amici prism fixed frame (4), aspheric mirror lens barrel (5), Amici prism pressing plate (6), prime amplifier and PSD fixed head (7), two-dimensional adjustment platform A, B(8, 9), two-dimensional adjustment platform fixed mount (10), AFM probe carriage (11) and base plate (13), can also comprise probe carriage fixed head (12), the M3 fillet of screw (14) and two probe carriage fixation spring tabs (15).Laser instrument is fixed compressing tablet (1) and is connected with laser instrument back up pad (2), for fixed laser; Amici prism fixed mount (4) is connected with Amici prism pressing plate (6), for fixing Amici prism; It is upper that aspheric mirror lens barrel (5) and Amici prism fixed mount (4) are fixed on web joint (3) together, then this web joint (3) is fixed on to a two-dimensional adjustment platform A(8) on.Prime amplifier and PSD fixed head (7) are at another two-dimensional adjustment platform B(9) on, again this two-dimensional adjustment platform B(9) be fixed on the two-dimensional adjustment platform fixed mount (10) in left side described two-dimensional adjustment platform A(8) and two-dimensional adjustment platform B(9) be all fixed on base plate (13).High speed atomic force scan-probe frame fixed head is fixed on base plate (13).
The invention has the advantages that:
(1) adopt pick-up unit provided by the invention, obtain laser spot size little, can reach in 16 μ m, reduce 50% left and right than laser beam spot;
(2) whole pick-up unit provided by the invention can be arranged on existing atomic force microscope, for the imaging of high speed atomic force microscopy;
(3) simple, with low cost, the good operating stability of structure of the detecting device of the present invention;
(4) pick-up unit provided by the invention has the features such as easy, use is simple, antijamming capability is strong that regulate, can be for atomic force microscopy high speed imaging.
Brief description of the drawings
The conventional atomic force microscope probe of Fig. 1 detects light path principle figure;
The light path principle figure of Fig. 2 detection method of the present invention;
Fig. 3 of the present invention coaxial-symmetrical expression laser detector structural drawing;
In figure:
1 ', laser instrument; 2 ', probe; 3 ', PSD(position-sensitivity detector);
1 〞, laser instrument; 2 〞, Amici prism A; 3 〞 Amici prism B; 4 〞, aspheric mirror; 5 〞, probe;
6〞、PSD；
1, the fixing compressing tablet of laser instrument; 2, laser instrument back up pad; 3, web joint; 4, Amici prism fixed frame;
5, aspheric mirror lens barrel (upper and lower two parts); 6, Amici prism pressing plate; 7, prime amplifier and PSD fixed head;
8, two-dimensional adjustment platform A; 9, two-dimensional adjustment platform B; 10, two-dimensional adjustment platform fixed head; 11, probe carriage;
12, probe carriage fixed head; 13, base plate; 14, the M3 fillet of screw; 15, probe carriage fixation spring tab.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail;
The invention provides a kind of laser detecting method for high speed atomic force microscope, described method is: the laser beam of being launched by laser instrument 1 〞, after laser instrument collimating mirror collimation, is parallel to primary optical axis and focuses on probe 5 〞 surfaces through aspheric mirror 4 〞; Again pass through aspheric mirror 4 〞 through the light beam of probe 5 〞 surface reflections, reflex on position-sensitivity detector 6 〞.
Described method can also adopt following mode, as shown in Figure 2, carry out coaxial-symmetrical expression laser detection: the horizontal laser beam of being launched by laser instrument 1 〞, after laser instrument collimating mirror collimation, incide on Amici prism A2 〞, after Amici prism A2 〞 reflection, be parallel to primary optical axis and incide downwards in aspheric mirror 4 〞, focus on probe 5 〞 surfaces through aspheric mirror 4 〞; Again pass through aspheric mirror 4 〞 through the light beam of probe 5 〞 surface reflections, be finally irradiated on position-sensitivity detector 6 〞 through another Amici prism B3 〞 reflection.In above-mentioned detection method, the line of the optical receiver point of described position-sensitivity detector 6 〞 and the light launching site of laser instrument 1 〞 is horizontal line, and the reflection ray that described position-sensitivity detector 6 〞 receive and the emergent ray of laser instrument 1 〞 are coaxial.
Based on above-mentioned laser detecting method, the present invention also provide a kind of coaxial-symmetrical expression laser detector, as shown in Figure 3, described pick-up unit comprises the fixing compressing tablet 1 of laser instrument and laser instrument back up pad 2, web joint 3, Amici prism fixed frame 4 and Amici prism pressing plate 6, aspheric mirror lens barrel 5, prime amplifier and PSD fixed head 7, two-dimensional adjustment platform A8 and two-dimensional adjustment platform B9, two-dimensional adjustment platform fixed head 10, probe carriage 11 and base plate 13, also comprises probe carriage fixed head 12, the M3 fillet of screw 14 and probe carriage fixation spring tab 15.Described coaxial-the concrete annexation of symmetrical expression laser detector is as follows:
embodiment:
Whole high speed atomic force microscope is coaxial-and the length of symmetrical expression laser detector is that 122mm, width are 90mm, are highly 72mm.The laser instrument length that this device uses is 47mm, and wherein, front end collimating part length is 18mm, diameter 17mm, and rear end length is 29mm, diameter 15mm.Amici prism A2 〞 and Amici prism B3 〞 are cube shaped, and length is 12.7mm, and reflection, transmittance are 1:1.Aspheric mirror 4 〞 models are the AL1815-A of Thorlabs company, and its diameter is 18mm, effective focal length 15mm, and numerical aperture NA is 0.534.The fixing compressing tablet 1 of laser instrument is fixed in laser instrument back up pad 2 by M3 screw; Laser instrument back up pad 2 is fixed on web joint 3 by two M2.5 screws; The length of Amici prism A2 〞 and Amici prism B3 〞 and the wide 30mm that is, be highly 18mm, and wherein Amici prism fixed frame 4 intermediate groove length are 28mm, and width is 14.8mm, and the degree of depth is 13mm.Two Amici prism A2 〞 two faces adjacent with Amici prism B3 〞, with black belt, prevent influencing each other of light; Two Amici prism A2 〞 and Amici prism B3 〞 both sides are all fixed on two thickness and are about on the hard plastic board of 1mm, and its mutual spacing is about 1mm, to use CCD(charge-coupled image sensor in the time carrying out optical path adjusting) observe.Amici prism pressing plate 6 is fixed convex lens above, in the time of optical path adjusting, coordinates CCD to observe.After two Amici prism A2 〞 and Amici prism B3 〞 fix, put into Amici prism fixed frame 4, then use M3 screw that Amici prism pressing plate 6 is fixed on Amici prism fixed frame 4.Aspheric mirror lens barrel 5 upper part length are 12mm, and intermediate throughholes diameter is 18mm.Wherein, band male thread portion length is 6mm, and internal diameter is 18mm, and external diameter is 23mm; Threaded section length is not 6mm, internal diameter 18mm, and external diameter is 25mm.Aspheric mirror lens barrel 5 end portion length are 14mm, external diameter 26mm.Wherein, band female thread portion internal diameter is 23mm, and length is 10mm, and fixing aspheric mirror 4 〞 part internal diameters are 18mm, and length is 3mm.After aspheric mirror lens barrel 5 end portions are threaded with upper part, adopt the M3 fillet of screw 14 to carry out reverse thread to the threaded portion of upper part and screw, in order to the relative position between fixing aspheric mirror lens barrel 5 end portions and upper part.The described M3 fillet of screw 14 length are 3mm, and external diameter is 26mm, and internal diameter is 23mm.Aspheric mirror 4 〞 are put into aspheric mirror lens barrel 5 end portions, aspheric mirror lens barrel 5 end portions are inner with M3 screw thread, by the fillet of screw, aspheric mirror 4 〞 are fixed, then, then further fix with the M3 fillet of screw 14 by upper and lower aspheric mirror lens barrel 5 two parts by M3 screw thread couple together.Amici prism framework 4, web joint 3 and aspheric mirror lens barrel 5 are fixed together with M3 screw.Left side prime amplifier and PSD fixed head 7 are fixed on two-dimensional adjustment platform B9 by two M2.5 screws, be used for receiving reflection laser, then with the screw of 4 M2.5, two-dimensional adjustment platform B9 is fixed on two-dimensional adjustment platform fixed head 10, finally two-dimensional adjustment platform fixed head 10 is fixed on base plate 13.With 4 M2.5 screws, web joint 3 is fixed to two-dimensional adjustment platform A8 upper, then two-dimensional adjustment platform A8 is fixed on base plate 13.Probe carriage 11 is fixed on probe carriage fixed head 12 with the screw of M2, and with two probe carriage fixation spring tabs 15 on base plate 13 by detachable probe carriage fixed head 12 being connected on base plate 13.The material of all parts is metallic aluminium.
In instrument regulation process, first open laser instrument, open CCD, regulate the position of CCD, until observe micro-cantilever.Regulate two-dimensional adjustment platform A8, laser facula is incided on micro-cantilever, then regulate the collimating part of laser instrument front end, regulate the collimation of shoot laser.Meanwhile, rotate aspheric mirror lens barrel 5 end portions, regulate the focus of aspheric mirror 4 〞, its focus is just dropped on micro-cantilever.In whole scanning process, regulate in real time two-dimensional adjustment platform A8, keep Laser Focusing point to drop on all the time on micro-cantilever.After optical path adjusting is good, it is circular that left end can observe the laser facula that incides PSD.Utilize the M3 fillet of screw 14 that upper and lower aspheric mirror lens barrel 5 two parts are fixed.After optical path adjusting is good, regulate two-dimensional adjustment platform B9, make outgoing laser facula just drop on the center of PSD.After this device is regulated, coordinate the piezoelectric ceramic tube of afm scan device, can realize scanning and the imaging of high speed atomic force microscope.Aforesaid way regulates the spot size obtaining to be less than 16 μ m.
In described pick-up unit, laser instrument and PSD lay respectively at the both sides of the primary optical axis of aspheric mirror 4 〞, and the collimation laser line sending in described laser instrument, with PSD receive reflection ray on same horizontal line, ensure that laser rays is coaxial and symmetrical, the pick-up unit forming like this, also referred to as coaxial-symmetrical expression pick-up unit, is conducive to layout and the layout of pick-up unit, and the vibration that can reduce to the full extent in scanning process may be on the impact of the precision of pick-up unit.
For described pick-up unit, laser instrument wherein and PSD can lay respectively at the top of Amici prism fixed frame 4, now can not adopt Amici prism, the laser of laser instrument transmitting after collimation directly the direction with the primary optical axis that is parallel to aspheric mirror incide on aspheric mirror, after aspheric mirror two lateral reflections, PSD receives flare.
For described pick-up unit, probe is in the position of probe carriage 11, at surface level 15 degree that tilt.Therefore, web joint 3 left part, the part being connected with Amici prism, axially be rotated counterclockwise 15 degree along incident laser, there is the inclination of 15 degree with surface level, to ensure that incident laser light beam is mutually vertical with cantilever in the axial direction, and then ensure to be irradiated to laser facula on cantilever for circular.
Claims (8)
1. for the laser detector of high speed atomic force microscope, it is characterized in that: comprise the fixing compressing tablet of laser instrument and laser instrument back up pad, web joint, aspheric mirror lens barrel, prime amplifier and PSD fixed head, two-dimensional adjustment platform A, two-dimensional adjustment platform B, two-dimensional adjustment platform fixed head, probe carriage and base plate; Laser instrument is placed in laser instrument back up pad, and is fixed with the fixing compressing tablet of laser instrument; Laser instrument back up pad is fixed on web joint; Aspheric mirror is placed and is fixed in the latter half of aspheric mirror lens barrel, and the first half of aspheric mirror lens barrel is fixed on the below of web joint, together with the first half of aspheric mirror lens barrel is passed through screw thread couple with the latter half; Web joint is fixed on above two-dimensional adjustment platform A, and two-dimensional adjustment platform A is fixed on the right-hand member of base plate; The fixing two-dimensional adjustment platform fixed head of left end of base plate, it is upper that prime amplifier and PSD fixed head are fixed on two-dimensional adjustment platform B, and two-dimensional adjustment platform B is fixed on two-dimensional adjustment platform fixed head; Aspheric mirror lens barrel below fixed and is placed on by AFM probe by probe carriage.
2. the laser detector for high speed atomic force microscope according to claim 1, it is characterized in that: described pick-up unit also comprises Amici prism fixed frame and Amici prism pressing plate, Amici prism A and Amici prism B are placed in the Amici prism fixed frame of horizontal laser light beam-emergence direction, be fixed with Amici prism pressing plate, described Amici prism fixed frame is also fixed on web joint, and is positioned at the top of aspheric mirror lens barrel.
3. the laser detector for high speed atomic force microscope according to claim 1 and 2, is characterized in that: described pick-up unit also comprises probe carriage fixed head, probe carriage fixation spring tab and base plate; Probe carriage is fixed on probe carriage fixed head, and probe carriage fixed head is connected on base plate by probe carriage fixation spring tab is detachable.
4. the laser detector for high speed atomic force microscope according to claim 1 and 2, it is characterized in that: upper and lower two parts of described aspheric mirror lens barrel by screw thread couple together after, the M3 fillet of screw is threaded on the external thread of described upper part.
5. the laser detector for high speed atomic force microscope according to claim 1, it is characterized in that: laser instrument and PSD lay respectively at the both sides of the primary optical axis of aspheric mirror, and the collimation laser line sending in described laser instrument, with PSD receive reflection ray on same horizontal line.
6. the laser detector for high speed atomic force microscope according to claim 2, is characterized in that: on described Amici prism pressing plate, be fixed with convex lens.
7. the laser detector for high speed atomic force microscope according to claim 2, is characterized in that: two Amici prism A two faces adjacent with Amici prism B are with black belt.
8. the laser detector for high speed atomic force microscope according to claim 1, is characterized in that: two-dimensional adjustment platform A is for regulating in the horizontal direction the position of laser facula; The adjusting of aspheric mirror focal length is to realize by changing the upper and lower two-part coupled threads of aspheric mirror lens barrel; Two-dimensional adjustment platform B in the vertical direction regulates the position of prime amplifier and position-sensitivity detector PSD, regulates the position of laser facula on PSD.
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| CN201210245733.2A CN102778588B (en) | 2012-07-16 | 2012-07-16 | Laser detecting device for high-speed atomic force microscope and detecting method thereof |
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| CN201210245733.2A CN102778588B (en) | 2012-07-16 | 2012-07-16 | Laser detecting device for high-speed atomic force microscope and detecting method thereof |
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| CN102778588B true CN102778588B (en) | 2014-06-18 |
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| CN111060719B (en) * | 2019-12-30 | 2024-11-12 | 仪晟科学仪器(嘉兴)有限公司 | Terahertz pulse beam extraction mechanism for terahertz near-field microscope |
| CN113687107A (en) * | 2021-09-10 | 2021-11-23 | 苏州光迈科技有限公司 | Atomic force microscope probe photo-thermal excitation detection device |
Citations (4)
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|---|---|---|---|---|
| US5440920A (en) * | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
| CN2617003Y (en) * | 2003-04-09 | 2004-05-19 | 浙江大学 | Horizontal atomic force microscope probe |
| CN1539074A (en) * | 2001-08-08 | 2004-10-20 | ���µ�����ҵ��ʽ���� | Displacement detection method, displacement detection device and correction method thereof, and recording device for master disk of information recording medium |
| US7249494B2 (en) * | 2005-06-06 | 2007-07-31 | Academia Sinica | Beam tracking system for scanning-probe type atomic force microscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212470A (en) * | 2007-03-27 | 2007-08-23 | Hitachi Ltd | Scanning probe microscope |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5440920A (en) * | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
| CN1539074A (en) * | 2001-08-08 | 2004-10-20 | ���µ�����ҵ��ʽ���� | Displacement detection method, displacement detection device and correction method thereof, and recording device for master disk of information recording medium |
| CN2617003Y (en) * | 2003-04-09 | 2004-05-19 | 浙江大学 | Horizontal atomic force microscope probe |
| US7249494B2 (en) * | 2005-06-06 | 2007-07-31 | Academia Sinica | Beam tracking system for scanning-probe type atomic force microscope |
Non-Patent Citations (1)
| Title |
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| JP特开2007-212470A 2007.08.23 |
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