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CN102391789B - A kind of preparation method of nano-diamond polishing liquid - Google Patents

A kind of preparation method of nano-diamond polishing liquid Download PDF

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CN102391789B
CN102391789B CN 201110244241 CN201110244241A CN102391789B CN 102391789 B CN102391789 B CN 102391789B CN 201110244241 CN201110244241 CN 201110244241 CN 201110244241 A CN201110244241 A CN 201110244241A CN 102391789 B CN102391789 B CN 102391789B
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CN102391789A (en
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翟海军
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HUNAN HAOZHI TECHNOLOGY Co Ltd
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Abstract

The invention discloses a method for preparing nano diamond polishing solution, which relates to the technical field of non-rare earth polishing material preparation, and comprises the following process steps: putting diamond micro powder, a grinding aid, a dispersing agent and deionized water into a ball mill, and carrying out wet ball milling to obtain initial slurry; adding deionized water into the initial slurry, and cleaning to obtain diamond dispersed slurry; adding concentrated acid liquor into the diamond dispersion slurry for acid treatment; cleaning the diamond dispersion slurry subjected to acid treatment, adding a dispersing agent, and grading to obtain the diamond dispersion slurry; the nano-diamond polishing solution prepared by the method is suitable for precision grinding and polishing of liquid crystal conductive glass, planar optical glass, optical spherical surfaces, optical lens glass, optical filters, filter windows and glass disc substrates, and is particularly suitable for grinding and polishing of soft spherical glass.

Description

一种纳米金刚石抛光液的制备方法A kind of preparation method of nano-diamond polishing liquid

技术领域 technical field

本发明涉及新材料技术领域中的非稀土抛光材料制备技术领域,应用于精密研磨和抛光技术领域,特别是一种纳米金刚石抛光液的制备方法。The invention relates to the technical field of preparation of non-rare earth polishing materials in the technical field of new materials, and is applied in the technical field of precision grinding and polishing, in particular to a preparation method of nano-diamond polishing liquid.

背景技术 Background technique

纳米金刚石兼具纳米材料和超硬材料的双重特性,其优异的机械、化学、光、电、热性能在磨合油、复合镀层、超精密抛光、化学/医学等领域有着广阔的应用前景。纳米金刚石颗粒单颗最粗粒径仅60nm,平均粒径为8~12nm,然而一般商业纳米金刚石平均粒径达到2μm以上,最粗达10μm,团聚度高达200~1000。团聚体的存在可能是由于爆轰的超高温高压形成的碳液滴在冷却过程中相互黏结在一起结晶而形成的硬团聚体,也可能由于爆轰产物的后处理干燥脱水过程中颗粒间形成氧桥键等形成的次硬团聚体。纳米金刚石的硬团聚体占据相当大的比例,且具有一定的织构倾向,因此相当难以解聚。硬团聚体制约着纳米金刚石的应用发展,使纳米金刚石的优异性能几乎丧失,因此硬团聚体的解聚是纳米金刚石应用需要解决的首要问题,也是纳米金刚石抛光液制备需要解决的重要问题。现有技术中,对纳米金刚石的硬团聚体的解聚,通常采用化学机械处理对纳米金刚石进行表面改性,在物理与化学试剂的协同作用下,通过调节颗粒表面的亲水疏水性能,实现在水中稳定分散的目的。中国专利(申请号200410022936.0)“一种水基纳米金刚石抛光液及其制造方法”,其主要成分包括:纳米金刚石、改性剂、分散剂与/或超分散剂、pH值调节剂、润湿调节剂、具有化学作用的添加剂及去离子水;其其制造方法主要包括:1.通过机械化学改性,将纳米金刚石的团聚体分散成平均粒度为20~100nm的小聚集体,2.除去悬浮液中的粗颗粒和其它杂质;3.添加调节工件与抛光液润湿特性的调节剂(润湿剂)、分散稳定剂、pH值调节剂、具有化学作用的添加剂及去离子水,超声或/和搅拌分散。又如中国专利(申请号200510030024.2)“水基金刚石抛光液及其制备方法”,该发明公开了一种水基金刚石抛光液,由下列重量份数的组分组成:特制的金刚石微粉:0.001-10、分散剂:0.02-4份、悬浮剂:0.01-5份、悬浮助剂:0.01-1份、PH调节剂:0.1-1.5份、防腐剂:0.1-0.5份、去离子水:60-99份;该发明制备的水基金刚石抛光液产品质量一致,稳定性好。Nanodiamond has the dual characteristics of both nanomaterials and superhard materials, and its excellent mechanical, chemical, optical, electrical, and thermal properties have broad application prospects in the fields of running-in oil, composite coating, ultra-precision polishing, chemistry/medicine, etc. The coarsest particle size of a single nano-diamond particle is only 60nm, and the average particle size is 8-12nm. However, the average particle size of commercial nano-diamond particles is above 2μm, the coarsest is 10μm, and the degree of agglomeration is as high as 200-1000. The existence of agglomerates may be due to the hard agglomerates formed by the carbon droplets formed by the detonation ultra-high temperature and high pressure during the cooling process, and may also be due to the formation of interparticles during the post-treatment drying and dehydration of detonation products. Secondary hard aggregates formed by oxygen bridge bonds, etc. The hard agglomerates of nanodiamonds occupy a considerable proportion and have a certain texture tendency, so it is quite difficult to disaggregate. Hard agglomerates restrict the application and development of nano-diamond, and almost lose the excellent performance of nano-diamond. Therefore, the deagglomeration of hard agglomerates is the primary problem to be solved in the application of nano-diamond, and it is also an important problem to be solved in the preparation of nano-diamond polishing solution. In the prior art, for the depolymerization of hard aggregates of nano-diamonds, chemical-mechanical treatment is usually used to modify the surface of nano-diamonds. Under the synergistic effect of physical and chemical reagents, the hydrophilic and hydrophobic properties of the particle surface are adjusted to achieve The purpose of stable dispersion in water. Chinese patent (application number 200410022936.0) "a water-based nano-diamond polishing liquid and its manufacturing method", its main components include: nano-diamond, modifier, dispersant and/or hyperdispersant, pH regulator, wetting Regulators, additives with chemical effects and deionized water; its manufacturing method mainly includes: 1. Through mechanochemical modification, the agglomerates of nano-diamonds are dispersed into small aggregates with an average particle size of 20-100nm; 2. Coarse particles and other impurities in the suspension; 3. Add regulators (wetting agents), dispersion stabilizers, pH value regulators, additives with chemical effects and deionized water to adjust the wetting characteristics of the workpiece and polishing fluid, ultrasonic Or/and stir to disperse. Another example is Chinese patent (application number 200510030024.2) "water-based diamond polishing liquid and preparation method thereof", which discloses a water-based diamond polishing liquid, which is composed of the following components in parts by weight: special diamond powder: 0.001- 10. Dispersant: 0.02-4 parts, suspending agent: 0.01-5 parts, suspension aid: 0.01-1 part, PH regulator: 0.1-1.5 parts, preservative: 0.1-0.5 parts, deionized water: 60- 99 parts; the water-based diamond polishing liquid prepared by the invention has consistent product quality and good stability.

发明内容 Contents of the invention

本发明所要解决的技术问题是提供一种既能够解决纳米金刚石的团聚问题、又能使其在水基中稳定悬浮、且工艺比较简单的纳米金刚石抛光液的制备方法。The technical problem to be solved by the present invention is to provide a method for preparing a nano-diamond polishing liquid that can not only solve the problem of nano-diamond agglomeration, but also enable it to be stably suspended in a water base, and has a relatively simple process.

本发明所采取的技术方案是发明一种纳米金刚石抛光液的制备方法,其工艺过程如下:The technical scheme that the present invention takes is to invent a kind of preparation method of nano-diamond polishing liquid, and its technological process is as follows:

A、按重量份额取粒径为0.1-1μm的金刚石微粉5-20份、助磨剂2-8份、分散剂2-8份、去离子水100份,置入球磨机内,以水为介质,进行湿法球磨,球磨时间为1~10小时,球磨机转速为200~500r/min,成为初始浆料;A. Take 5-20 parts of diamond powder with a particle size of 0.1-1 μm, 2-8 parts of grinding aid, 2-8 parts of dispersant, and 100 parts of deionized water by weight, and put them into a ball mill, using water as the medium , carry out wet ball milling, the ball milling time is 1-10 hours, the ball mill speed is 200-500r/min, and become the initial slurry;

B、再取600份重量份额的去离子水,加入到球磨机内的初始浆料中,清洗出金刚石分散浆料,备用;B, get the deionized water of 600 parts by weight again, join in the initial slurry in the ball mill, clean out the diamond dispersion slurry, standby;

C、对备用的金刚石分散浆料进行强力搅拌,且边搅拌边向金刚石分散浆料中加入0.5-200份重量份额的浓酸液,进行酸处理,时间为30-60分钟,温度为20~100℃;C. Stir the spare diamond dispersion slurry vigorously, and add 0.5-200 parts by weight of concentrated acid solution to the diamond dispersion slurry while stirring, and carry out acid treatment. The time is 30-60 minutes, and the temperature is 20~ 100°C;

D、将经过酸处理后的金刚石分散浆料采用离心沉降法清洗干净,再加入1-10份重量份额的分散剂,用0.1mo l/L的NaOH溶液调节pH值到9-10,然后进行分级,即可得到在水中具有高度悬浮稳定性的纳米金刚石抛光液,其中金刚石的重量百分含量为0.1~10、金刚石的粒径为10~100nm;D. Clean the diamond dispersion slurry after the acid treatment by centrifugal sedimentation method, then add 1-10 parts by weight of dispersant, adjust the pH value to 9-10 with 0.1mol/L NaOH solution, and then carry out Grading, the nano-diamond polishing liquid with high suspension stability in water can be obtained, wherein the weight percentage of diamond is 0.1-10, and the particle size of diamond is 10-100nm;

所述的助磨剂可以是油酸、三聚磷酸钠、聚乙二醇、十二烷基硫酸钠中的一种或二种或几种或全部的组合;当是其中的二种或几种或全部的组合时,各组份的用量为等份;Described grinding aid can be one or two or several or all combinations in oleic acid, sodium tripolyphosphate, polyethylene glycol, sodium lauryl sulfate; When a combination of one or all of them is used, the dosage of each component is an equal part;

所述的分散剂可以是六偏磷酸钠、三聚磷酸钠、OP-10、十二烷基硫酸钠、十六烷基三甲基溴化铵、TW-80中的一种或二种或几种或全部的组合;当是其中的二种或几种或全部的组合时,各组份的用量为等份;The dispersant can be one or two of sodium hexametaphosphate, sodium tripolyphosphate, OP-10, sodium lauryl sulfate, cetyltrimethylammonium bromide, TW-80 or A combination of several or all of them; when it is a combination of two or several or all of them, the amount of each component is an equal part;

所述的浓酸液可以是浓盐酸、浓硫酸、浓硝酸的一种或二种或三种的组合;当是其中的二种或三种的组合时,各组份的用量为等份。The concentrated acid solution can be concentrated hydrochloric acid, concentrated sulfuric acid, concentrated nitric acid or a combination of two or three; when it is a combination of two or three of them, the amount of each component is equal.

优选的金刚石微粉的粒径为0.3-0.5μm。The particle size of the preferred diamond micropowder is 0.3-0.5 μm.

优选的球磨时间为3~6小时。The preferred ball milling time is 3-6 hours.

最佳的球磨时间为5小时。The best ball milling time is 5 hours.

最佳的酸处理时的温度为70℃。The optimum acid treatment temperature is 70°C.

最佳的球磨机转速为300r/min。The best ball mill speed is 300r/min.

上述所用的重量份额单位,可以是克或千克或吨,也可以是其它的重量单位。The weight share unit used above may be gram, kilogram or ton, or other weight units.

本发明的纳米金刚石抛光液的制备方法,应用化学机械处理的方法,采用了球磨解团、酸洗除杂和分散分级三个主要步骤,工艺比较简单,既解决了纳米金刚石的团聚问题,又获得了纳米金刚石在水基中稳定悬浮的纳米金刚石抛光液。The preparation method of the nano-diamond polishing liquid of the present invention adopts the method of chemical mechanical treatment, and adopts three main steps of ball milling to disaggregate, pickling to remove impurities and dispersing and classifying. A nano-diamond polishing fluid in which nano-diamonds are stably suspended in a water base is obtained.

具体实施方式 Detailed ways

以下结合实施例,对本发明作进一步的说明。下面的说明是采用例举的方式,但本发明的保护范围不应局限于此。Below in conjunction with embodiment, the present invention will be further described. The following description is by way of example, but the protection scope of the present invention should not be limited thereto.

实施例一:Embodiment one:

本实施例的制备工艺过程如下:The preparation process of the present embodiment is as follows:

A、按重量份额取粒径为0.5μm的市售金刚石微粉10克、聚乙二醇(助磨剂可采用油酸、三聚磷酸钠、聚乙二醇、十二烷基硫酸钠中的一种或二种或几种或全部的组合,本例采用聚乙二醇作助磨剂)5克、OP-10(分散剂可采用六偏磷酸钠、三聚磷酸钠、OP-10、十二烷基硫酸钠、十六烷基三甲基溴化铵、TW-80中的一种或二种或几种或全部的组合,本例采用OP-10作分散剂)5克、去离子水100克(即:100ml),置入高能球磨机的球磨罐中,以水为介质,进行湿法球磨,球磨时间为5小时,球磨机转速为300r/min,成为初始浆料;A, getting particle diameter by weight share is 10 grams of commercially available diamond micropowder of 0.5 μ m, polyethylene glycol (grinding aid can adopt oleic acid, sodium tripolyphosphate, polyethylene glycol, sodium lauryl sulfate One or two or several or all combinations, this example adopts polyethylene glycol as grinding aid) 5 grams, OP-10 (dispersant can adopt sodium hexametaphosphate, sodium tripolyphosphate, OP-10, Sodium lauryl sulfate, hexadecyltrimethylammonium bromide, TW-80 in one or two or a combination of several or all, this example uses OP-10 as a dispersant) 5 grams, to 100 grams (i.e.: 100ml) of ionized water is placed in the ball mill tank of the high-energy ball mill, and water is used as the medium to carry out wet ball milling. The ball milling time is 5 hours, and the ball mill rotating speed is 300r/min to become the initial slurry;

B、再取600克(即:600ml)去离子水,加入到球磨罐内的初始浆料中,清洗出金刚石分散浆料,备用;B, get 600 grams (that is: 600ml) deionized water again, join in the initial slurry in the ball mill jar, clean out the diamond dispersion slurry, set aside;

C、对备用的金刚石分散浆料进行强力搅拌,且边搅拌边向金刚石分散浆料中加入10克浓盐酸,进行酸处理,时间为30分钟,温度为70℃;C. Stir vigorously the spare diamond dispersion slurry, and add 10 grams of concentrated hydrochloric acid to the diamond dispersion slurry while stirring, and carry out acid treatment for 30 minutes at a temperature of 70°C;

D、将经过酸处理后的金刚石分散浆料采用离心沉降法清洗干净,再加入15克的三聚磷酸钠(分散剂可采用六偏磷酸钠、三聚磷酸钠、OP-10、十二烷基硫酸钠、十六烷基三甲基溴化铵、TW-80中的一种或二种或几种或全部的组合,本例采用三聚磷酸钠作分散剂),用0.1mol/L的NaOH溶液调节浆料的pH值到9,分级后得到金刚石的粒径为10~100nm的纳米金刚石抛光液。D. Clean the diamond dispersion slurry after the acid treatment by centrifugal sedimentation, then add 15 grams of sodium tripolyphosphate (the dispersant can be sodium hexametaphosphate, sodium tripolyphosphate, OP-10, dodecane Sodium sulfate, cetyltrimethylammonium bromide, TW-80, one or two or a combination of several or all, this example uses sodium tripolyphosphate as a dispersant), with 0.1mol/L NaOH solution to adjust the pH value of the slurry to 9, and obtain a nano-diamond polishing solution with a diamond particle size of 10-100 nm after classification.

实施例二:Embodiment two:

本实施例的制备工艺过程如下:The preparation process of the present embodiment is as follows:

A、按重量份额取粒径为0.5μm的市售金刚石微粉10克、聚乙二醇5克、OP-10 5克、去离子水100克(即:100ml),置入高能球磨机的球磨罐中,以水为介质,进行湿法球磨,球磨时间为5小时,球磨机转速为300r/min,成为初始浆料;A, get particle diameter by weight and be 10 grams of commercially available diamond micropowder of 0.5 μm, polyethylene glycol 5 grams, OP-10 5 grams, deionized water 100 grams (that is: 100ml), put into the ball mill jar of high-energy ball mill In the process, using water as the medium, carry out wet ball milling, the ball milling time is 5 hours, the ball mill speed is 300r/min, and become the initial slurry;

B、再取600克(即:600ml)去离子水,加入到球磨罐内的初始浆料中,清洗出金刚石分散浆料,备用;B, get 600 grams (that is: 600ml) deionized water again, join in the initial slurry in the ball mill jar, clean out the diamond dispersion slurry, set aside;

C、对备用的金刚石分散浆料进行强力搅拌,且边搅拌边向金刚石分散浆料中加入10克浓硫酸,进行酸处理,时间为30分钟,温度为70℃;C. Stir the spare diamond dispersion slurry vigorously, and add 10 grams of concentrated sulfuric acid to the diamond dispersion slurry while stirring, and carry out acid treatment for 30 minutes at a temperature of 70°C;

D、将经过酸处理后的金刚石分散浆料清洗干净(离心沉降法清洗),加入15克的三聚磷酸钠,用0.1mol/L的NaOH溶液调节浆料的pH值到9,分级后得到金刚石的粒径为10~100nm的纳米金刚石抛光液。D, the diamond dispersion slurry after the acid treatment is cleaned (centrifugal sedimentation method cleaning), adds 15 grams of sodium tripolyphosphate, adjusts the pH value of the slurry to 9 with the NaOH solution of 0.1mol/L, and obtains after classification The particle diameter of diamond is nano-diamond polishing liquid of 10-100nm.

实施例三:Embodiment three:

本实施例的制备工艺过程如下:The preparation process of the present embodiment is as follows:

A、按重量份额取粒径为0.5μm的市售金刚石微粉10克、聚乙二醇5克、OP-10 5克、去离子水100克(即:100ml),置入高能球磨机的球磨罐中,以水为介质,进行湿法球磨,球磨时间为5小时,球磨机转速为300r/min,成为初始浆料;A, get particle diameter by weight and be 10 grams of commercially available diamond micropowder of 0.5 μm, polyethylene glycol 5 grams, OP-10 5 grams, deionized water 100 grams (that is: 100ml), put into the ball mill jar of high-energy ball mill In the process, using water as the medium, carry out wet ball milling, the ball milling time is 5 hours, the ball mill speed is 300r/min, and become the initial slurry;

B、再取600克(即:600ml)去离子水,加入到球磨罐内的初始浆料中,清洗出金刚石分散浆料,备用;B, get 600 grams (that is: 600ml) deionized water again, join in the initial slurry in the ball mill jar, clean out the diamond dispersion slurry, set aside;

C、对备用的金刚石分散浆料进行强力搅拌,且边搅拌边向金刚石分散浆料中加入10克浓硝酸,进行酸处理,时间为30分钟,温度为70℃;C. Stir vigorously the spare diamond dispersion slurry, and add 10 grams of concentrated nitric acid to the diamond dispersion slurry while stirring, and carry out acid treatment for 30 minutes at a temperature of 70°C;

D、将经过酸处理后的金刚石分散浆料清洗干净(离心沉降法清洗),加入15克的三聚磷酸钠,用0.1mol/L的NaOH溶液调节浆料的pH值到9,分级后得到金刚石的粒径为10~100nm的纳米金刚石抛光液。D, the diamond dispersion slurry after the acid treatment is cleaned (centrifugal sedimentation method cleaning), adds 15 grams of sodium tripolyphosphate, adjusts the pH value of the slurry to 9 with the NaOH solution of 0.1mol/L, and obtains after classification The particle diameter of diamond is nano-diamond polishing liquid of 10-100nm.

应用本发明的纳米金刚石抛光液的制备方法,制备的纳米金刚石抛光液,适用于液晶导电玻璃、平面光学玻璃、光学球面、光学镜头玻璃、滤光片、滤波窗以及玻璃盘基片的精密研磨抛光,特别适用于软材质的球面玻璃的研磨抛光。Applying the preparation method of the nano-diamond polishing liquid of the present invention, the prepared nano-diamond polishing liquid is suitable for precision grinding of liquid crystal conductive glass, flat optical glass, optical sphere, optical lens glass, optical filter, filter window and glass disc substrate Polishing, especially suitable for grinding and polishing soft spherical glass.

Claims (6)

1.一种纳米金刚石抛光液的制备方法,其特征在于工艺过程如下:1. a preparation method of nano-diamond polishing liquid, is characterized in that technological process is as follows: A、按重量份额取粒径为0.1-1μm的金刚石微粉5-20份、助磨剂2-8份、分散剂2-8份、去离子水100份,置入球磨机内,以水为介质,进行湿法球磨,球磨时间为1~10小时,球磨机转速为200~500r/min,成为初始浆料;A. Take 5-20 parts of diamond powder with a particle size of 0.1-1 μm, 2-8 parts of grinding aid, 2-8 parts of dispersant, and 100 parts of deionized water by weight, and put them into a ball mill, using water as the medium , carry out wet ball milling, the ball milling time is 1-10 hours, the ball mill speed is 200-500r/min, and become the initial slurry; B、再取600份重量份额的去离子水,加入到球磨机内的初始浆料中,清洗出金刚石分散浆料,备用;B, get the deionized water of 600 parts by weight again, join in the initial slurry in the ball mill, clean out the diamond dispersion slurry, standby; C、对备用的金刚石分散浆料进行强力搅拌,且边搅拌边向金刚石分散浆料中加入0.5-200份重量份额的浓酸液,进行酸处理,时间为30-60分钟,温度为20~100℃;C. Stir the spare diamond dispersion slurry vigorously, and add 0.5-200 parts by weight of concentrated acid solution to the diamond dispersion slurry while stirring, and carry out acid treatment. The time is 30-60 minutes, and the temperature is 20~ 100°C; D、将经过酸处理后的金刚石分散浆料采用离心沉降法清洗干净,再加入1-10份重量份额的分散剂,用0.1mol/L的NaOH溶液调节pH值到9-10,然后进行分级,即可得到在水中具有高度悬浮稳定性的纳米金刚石抛光液,其中金刚石的重量百分含量为0.1~10、金刚石的粒径为10~100nm;D. Clean the diamond dispersion slurry after acid treatment by centrifugal sedimentation method, then add 1-10 parts by weight of dispersant, adjust the pH value to 9-10 with 0.1mol/L NaOH solution, and then classify , the nano-diamond polishing liquid with high suspension stability in water can be obtained, wherein the weight percentage of diamond is 0.1-10, and the particle size of diamond is 10-100nm; 所述的助磨剂是油酸、三聚磷酸钠、聚乙二醇、十二烷基硫酸钠中的一种或二种或几种或全部的组合;当是其中的二种或几种或全部的组合时,各组份的用量为等份;The grinding aid is a combination of one or two or several or all of oleic acid, sodium tripolyphosphate, polyethylene glycol, and sodium lauryl sulfate; when two or more of them or all combinations, the amount of each component is equal; 所述的分散剂是六偏磷酸钠、三聚磷酸钠、OP-10、十二烷基硫酸钠、十六烷基三甲基溴化铵、TW-80中的一种或二种或几种或全部的组合;当是其中的二种或几种或全部的组合时,各组份的用量为等份;The dispersant is one or two or more of sodium hexametaphosphate, sodium tripolyphosphate, OP-10, sodium lauryl sulfate, cetyltrimethylammonium bromide, TW-80 A combination of one or all of them; when it is a combination of two or more or all of them, the amount of each component is an equal part; 所述的浓酸液是浓盐酸、浓硫酸、浓硝酸的一种或二种或三种的组合;当是其中的二种或三种的组合时,各组份的用量为等份。The concentrated acid solution is one or a combination of two or three of concentrated hydrochloric acid, concentrated sulfuric acid, and concentrated nitric acid; when it is a combination of two or three of them, the amount of each component is equal. 2.根据权利要求1所述的纳米金刚石抛光液的制备方法,其特征在于:金刚石微粉的粒径为0.3-0.5μm。2. The preparation method of nano-diamond polishing liquid according to claim 1, characterized in that: the particle diameter of the diamond micropowder is 0.3-0.5 μm. 3.根据权利要求1所述的纳米金刚石抛光液的制备方法,其特征在于:球磨时间为3~6小时。3. The preparation method of nano-diamond polishing liquid according to claim 1, characterized in that: the ball milling time is 3 to 6 hours. 4.根据权利要求1或3所述的纳米金刚石抛光液的制备方法,其特征在于:球磨时间为5小时。4. The preparation method of the nano-diamond polishing liquid according to claim 1 or 3, characterized in that: the ball milling time is 5 hours. 5.根据权利要求1所述的纳米金刚石抛光液的制备方法,其特征在于:酸处理时的温度为70℃。5. The preparation method of nano-diamond polishing liquid according to claim 1, characterized in that: the temperature during acid treatment is 70°C. 6.根据权利要求1所述的纳米金刚石抛光液的制备方法,其特征在于:球磨机转速为300r/min。6. The preparation method of nano-diamond polishing liquid according to claim 1, characterized in that: the ball mill rotating speed is 300r/min.
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