CN102083760A - Scribing apparatus - Google Patents
Scribing apparatus Download PDFInfo
- Publication number
- CN102083760A CN102083760A CN2009801244710A CN200980124471A CN102083760A CN 102083760 A CN102083760 A CN 102083760A CN 2009801244710 A CN2009801244710 A CN 2009801244710A CN 200980124471 A CN200980124471 A CN 200980124471A CN 102083760 A CN102083760 A CN 102083760A
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- China
- Prior art keywords
- line
- mode
- liner agency
- adhesive substrates
- liquid crystal
- Prior art date
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- 239000000758 substrate Substances 0.000 claims abstract description 326
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 139
- 230000007246 mechanism Effects 0.000 claims abstract description 47
- 239000000853 adhesive Substances 0.000 claims description 96
- 230000001070 adhesive effect Effects 0.000 claims description 96
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 29
- 230000015572 biosynthetic process Effects 0.000 claims description 28
- 238000010521 absorption reaction Methods 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 15
- 239000007921 spray Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 abstract 1
- 238000011144 upstream manufacturing Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 6
- 230000032258 transport Effects 0.000 description 6
- 239000005357 flat glass Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004826 Synthetic adhesive Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
- B28D1/226—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles with plural scoring tools
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
- C03B33/076—Laminated glass comprising interlayers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mining & Mineral Resources (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Liquid Crystal (AREA)
Abstract
Provided is a scribing apparatus (1000), which can form scribing lines on two parts at the same time, on the front surface and the rear surface of a bonded substrate formed by bonding brittle substrates, and thus, can shorten a machining time required for cutting out a predetermined number of panel substrates from the bonded substrates, such as a liquid crystal mother panel. The scribing apparatus is provided with a fixed scribing mechanism, which is fixed on a base (301) and forms first scribe lines at the same time on the front surface and the rear surface of the bonded substrate; and a movable scribing mechanism, which is movably arranged on the base (401) and forms second scribe lines parallel to the first scribe lines at the same time on the front surface and the rear surface of the bonded substrate. The fixed scribing mechanism and the movable scribing mechanism are configured so that the first and the second scribe lines are formed at the same time and the distance between the first and the second scribe lines is adjusted by the distance between the both mechanisms.
Description
Technical field
The present invention relates to chalker, be particularly related to and be disposed at the processing line that the adhesive substrates that carries out forming from two pieces of brittle substrates are fitted cuts out the processing of a plurality of display panel substrates, the chalker that can carry out line (line) simultaneously at surface and its back side of this adhesive substrates to this adhesive substrates.
Background technology
In the past, the cutting of brittle bases such as sheet glass usually by ruling (line) along the line of cutting in its one side, was cut off this sheet glass along the line (line) that this line stroke is arranged then and was carried out.
But, the structure of the liquid crystal panel of liquid crystal indicator for two pieces of sheet glass are fitted and formed, therefore, under the situation that the adhesive substrates that this liquid crystal panel is formed from two pieces of sheet glass are fitted cuts out, need form line on the surface and the two sides, the back side of adhesive substrates.
In the past, to this adhesive substrates, carry out the processing that face ground of a face forms line, patent documentation 1 discloses a kind of processing line that uses at the cutting action of aforesaid adhesive substrates.
Below, utilize accompanying drawing that this patent documentation 1 disclosed processing line (liquid crystal panel cut-off rule) is specifically described.
Figure 11 is the skeleton diagram of existing liquid crystal panel cut-off rule 900, and Figure 12 is the stereographic map that expression constitutes the chalker 901 of this liquid crystal panel cut-off rule 900.
This chalker 901 possesses the worktable 905 that is used for mounting liquid crystal generatrix plate 908.This worktable 905 is set to, and can move along Y1 direction (prescribed direction parallel), and can rotate along θ 1 direction with the panel mounting surface, that is, and can be at the face internal rotation of the mounting surface that comprises worktable.The structure of liquid crystal generatrix plate 908 for two pieces of glass substrates are fitted mutually and formed.
Be provided with sliding freely in chalker 901 upper edge X1 directions (liquid crystal generatrix plate laterally) and be used at the scribe head 811 of mounting in the surface line of the glass substrate of two pieces of glass substrate upsides of the formation liquid crystal generatrix plate 908 of worktable 905 (below, be also referred to as A face side group plate).Scribe head 811 is equipped with chuck 806, is equipped with in the lower end of chuck 806 to be used for the cutter rotary cutter 804 that edge line preset lines S rules on liquid crystal generatrix plate 908.In addition, chalker 901 is provided with the electric motor 812 that is used for driving along the X1 direction scribe head 811.Chalker 901 possesses for the CCD photographic camera 929 of liquid crystal generatrix plate 908 location being discerned the alignment mark that is formed at liquid crystal generatrix plate, shows the watch-dog 930 by the alignment mark of CCD photographic camera 929 identifications.
Be provided with the shut-off device 902 of the A face side group plate cut-out that will draw wired liquid crystal generatrix plate 908 in the downstream side of this chalker 901.In addition, dispose chalker 901A in the downstream side of this shut-off device 902.Chalker 901A has the formation identical with chalker 901, goes up line with the substrate of the opposite side of A face side group plate (below, be also referred to as B face side group plate) in two pieces of glass substrates that constitute liquid crystal generatrix plate 908.In addition, dispose shut-off device 902A in the downstream side of this chalker 901A.This shut-off device 902A has the formation identical with shut-off device 902, and B face side group plate is cut off along the line that is formed at B face side group plate.
Then, the action to the processing line of cutting apart 900 that carries out adhesive substrates with this formation describes.
By not shown feeding machanism, make its A face side group plate be in upside ground mounting on the worktable 905 of chalker 901 liquid crystal generatrix plate 908.Chalker 901 utilizes cutter rotary cutter 804, forms line on the A face side group plate of the liquid crystal generatrix plate 908 on this worktable 905.
By chalker 901 on A face side group plate, be formed with the line S liquid crystal generatrix plate 908, overturn by not shown switching mechanism, make A face side group plate be in downside ground mounting in the worktable of shut-off device 902.Shut-off device 902 is cut apart the A face side group plate of liquid crystal generatrix plate 908 along line S.
The liquid crystal generatrix plate 908 of having been cut apart A face side group plate by shut-off device 902 is carried by not shown transfer mechanism, so that A face side group plate is in the worktable 905 of the mode mounting of downside in chalker 901A.Chalker 901A forms line by cutter rotary cutter 804 on B face side group plate.On B face side group plate, draw wired liquid crystal generatrix plate 908 by chalker 901A and overturn, make B face side group plate be in downside ground mounting on the worktable of shut-off device 902A by not shown switching mechanism.Shut-off device 902A is cut apart B face side group plate by push A face side group plate from the top along line.
To by bonding with seal bonding A face side group plate and the cutting blade unification of B face side group plate remove thereafter.
But, in the processing line 900 that above-mentioned available liquid crystal panel is cut apart, must be rule in face ground of 908 1 faces of liquid crystal generatrix plate and cut off, therefore, there is the problem that area also increases and so on that is provided with of long processing time and device.
Device as solving this problem for example, has patent documentation 1 and patent documentation 2 disclosed chalkers.
Figure 13 is the figure of these two disclosed chalkers of patent documentation of expression.
This chalker 950 have mounting liquid crystal generatrix plate 908 worktable 951, liquid crystal generatrix plate 908 is fixed in the fixed body 952 of worktable 951, a pair of cutter head 953 and 954 up and down, by above-mentioned a pair of cutter head, rule simultaneously in the surface of the liquid crystal generatrix plate 908 that is fixed in worktable 951 by fixed body 952 and the substrate at the back side.
In addition, patent documentation 1 discloses a kind of processing line, and this processing line possesses like this chalker that forms line on the substrate at the surface of adhesive substrates and the back side simultaneously.
Figure 14 is the vertical view of processing line 100 of the mother substrate of this patent documentation 1 disclosed liquid crystal panel.
This processing line 100 is with the mother substrate of liquid crystal panel, is about to two pieces of glass substrates processing line that the liquid crystal generatrix plate that forms cuts apart of fitting on liquid crystal panel.
This liquid crystal panel cut-off rule 100 possesses the loader 12 that the stock has liquid crystal generatrix plate 8.On liquid crystal panel cut-off rule 100, be provided with feed robot 13.Feed robot 13 attracts the stock one by one in the liquid crystal generatrix plate 8 of loader 12, and mounting is on transfer roller 14.The liquid crystal generatrix plate 8 of mounting on transfer roller 14 carried and located to the place ahead of processing line 100 (among Figure 14, right).
In addition, processing line 100 possesses liquid crystal panel cutting device 1.
Figure 15 is used for stereographic map that this liquid crystal panel cutting device 1 is described, and Figure 16 is the stereographic map of the major portion of expression liquid crystal panel cutting device 1 shown in Figure 15.
Liquid crystal panel cutting device 1 possesses the worktable 5 of mounting from the liquid crystal generatrix plate 8 of above-mentioned transfer roller 14 supplies.Liquid crystal panel cutting device 1 is provided with absorption transfer mechanism 2.Absorption transfer mechanism 2 adsorbs the liquid crystal generatrix plate 8 that mounting is positioned transfer roller 14, and mounting is on worktable 5.Absorption transfer mechanism 2 has the guide 27 that is provided with along the horizontal direction shown in the arrow Y3.Guide 27 is provided with the arm that along continuous straight runs is provided with sliding freely, is provided with the absorption pad 25 that is provided with in order to adsorb liquid crystal generatrix plate 8 and is used for driving along the vertical direction the cylinder 26 of absorption pad 25 at the front end of arm.
As shown in figure 16, this liquid crystal panel cutting device 1 possesses the liner agency 4 that is used for line on liquid crystal generatrix plate 8.Liner agency 4 is disposed at the opposition side of transfer roller 14 with respect to worktable 5.Liner agency 4 has pair of posts 122 and 123.Be provided with a pair of tail rod 124 and 125 up and down between pair of posts 122 and 123, the liquid crystal generatrix plate of being carried from worktable 5 by absorption transfer mechanism 28 passes between these two tail rods 124 and 125.
Be provided with the line portion 102 that is used in the line of the surface of liquid crystal generatrix plate 8 sliding freely in tail rod 124 upper edge arrow X3 directions, on tail rod 125 to be provided with the line portion 103 that is used in the line of the back side of liquid crystal generatrix plate 8 sliding freely along arrow X3 direction with line portion 102 opposed modes.The electric motor 113 and 114 that is used for making respectively line portion 102 and 103 to slide along the direction of arrow X3 is installed on pillar 122.
In addition, above-mentioned liquid crystal panel cutting device 1 possesses the mechanism 31 of seizure.Catching mechanism 31 controls in the mode of an end of catching the liquid crystal generatrix plate 8 that leans out above worktable 5.Catching the direction from shown in the arrow 127 that mechanism 31 is provided with Figure 15 sees and is the roughly catcher 32 of Y word shape.Catcher 32 constitutes by the action of cylinder 33 switch freely, controls in the mode of an end of catching the liquid crystal generatrix plate 8 that leans out above worktable 5.Catcher 32 is pasted with a pair of cushion block 34 respectively in the position with the two sides butt of the liquid crystal generatrix plate 8 of being controlled.
In addition, as shown in figure 14, liquid crystal panel cut-off rule 100 possesses transfer roller 15.The liquid crystal generatrix plate 8A of the 1 row amount that transfer roller 15 will be split to form by liquid crystal panel cutting device 1 is transported to the position location in downstream and locatees.Transfer roller 15 is provided with rotary table 16.Rotary table 16 makes oriented liquid crystal generatrix plate 8A revolve and turn 90 degrees in the position location.
Liquid crystal panel division processing line 100 possesses liquid crystal panel cutting device 1A.Liquid crystal panel cutting device 1A except that lateral dimension than the above-mentioned liquid crystal panel cutting device 1 little this point, have the structure identical with liquid crystal panel cutting device 1.Thereby, the detailed description of omitting the formation of liquid crystal panel cutting device 1A.Liquid crystal panel cutting device 1A will rotate the 90 liquid crystal generatrix plate 8A that spend by rotary table 16 and be divided into liquid crystal panel 9.Move stockyard 18 by the liquid crystal panel 9 that liquid crystal panel cutting device 1A is split to form to by discharging robot 17.
Action to liquid crystal panel cut-off rule 100 with this formation describes.
When feed robot 13 attracts the stock and mounting on transfer roller 14 time one by one in the liquid crystal generatrix plate 8 of loader 12, mounting liquid crystal generatrix plate 8 the place aheads to liquid crystal panel cut-off rule 100 (among Fig. 1, right) on transfer roller 14 are carried and are located.
Figure 17 and Figure 18 are used for the front view that the action to existing liquid crystal panel cutting device 1 describes.
The absorption pad 25 that is arranged at the absorption transfer mechanism 2 of liquid crystal panel cutting device 1 attracts localized liquid crystal generatrix plate 8 on transfer roller 14, at the cutter rotary cutter 104 that is arranged at line portion 102 be arranged at mode between the cutter rotary cutter 105 of line portion 103, carry liquid crystal generatrix plate 8 from the position that worktable 5 leans out with default line preset lines S5 on liquid crystal generatrix plate 8 to an end of liquid crystal generatrix plate 8.Cutter rotary cutter 104 and 105 is all opposed on line preset lines S5.Worktable 5 attracts the liquid crystal generatrix plate of being carried 8 fixing.Be arranged at the catcher 32 of catching mechanism 31 and control an end of liquid crystal generatrix plate 8.
Cutter rotary cutter 104 and 105 is along line preset lines S5 line simultaneously on glass substrate 10A that constitutes liquid crystal generatrix plate 8 and 10B respectively.Cutter rotary cutter 104 when making cutter rotary cutter 104 and 105 respectively to glass substrate 10A and 10B feed and 105 the translational speed translational speed during than line hour, the impact in the time of can preventing because of feed produces defective at glass substrate 10A and 10B.
According to this cutter rotary cutter 104 and 105, can form the darker vertical crack of the inner surface that arrives glass substrate 10A and 10B.
Owing to formed the darker vertical crack that arrives the inner surface of glass substrate 10A and 10B along line preset lines S5 by cutter rotary cutter 104 and 105, as shown in figure 18, when the catcher 32 that makes an end of controlling liquid crystal generatrix plate 8 directly when right moves, can remove the section of cutting apart from liquid crystal generatrix plate 8 along formed line 63.
Then, transfer roller 15 will be transported to the position location in downstream by the liquid crystal generatrix plate 8A of catcher 32 mountings and locate.Rotary table 16 revolves the liquid crystal generatrix plate 8A that is positioned the position location and turn 90 degrees.Liquid crystal panel cutting device 1A by with the same action of action of above-mentioned liquid crystal panel cutting device 1,8A is divided into liquid crystal panel 9 with liquid crystal generatrix plate.Move stockyard 18 by the liquid crystal panel 9 that liquid crystal panel cutting device 1A is cut apart to by discharging robot 17.
In the processing line of this formation, absorption transfer mechanism 2 in the mode that is arranged at respectively between the cutter rotary cutter 104 and 105 of line portion 102 and 103, keeps carrying liquid crystal generatrix plate 8 with the line preset lines of liquid crystal generatrix plate 8.Cutter rotary cutter 104 and 105 will be cut apart by ruling along the line preset lines with the liquid crystal generatrix plate 8 of the mode of line preset lines between cutter rotary cutter 104 and 105 by 2 conveyings of absorption transfer mechanism.
Therefore, the liquid crystal generatrix plate two sides that is made of two pieces of glass substrates can be cut apart simultaneously, thus, can be shortened the process period that is used to cut apart liquid crystal generatrix plate, and can reduce significantly to be used to cut apart liquid crystal generatrix plate device area is set.
Patent documentation 1: the international brochure that discloses No. 02/057192
Patent documentation 2: the real public clear 59-22101 communique of Japan
But in the liquid crystal panel cut-off rule (processing line) 900 of reference Figure 14～Figure 18 explanation, though rule simultaneously at the surface and the back side of adhesive substrates, the surface of adhesive substrates and the line at the back side are that ground, a position, a position carries out.Therefore, has the problem that cuts out the needed long processing time of display panel substrate (liquid crystal panel) and so on of stated number from adhesive substrates.
Summary of the invention
The present invention finishes in order to solve above-mentioned existing issue point, its purpose is, a kind of chalker is provided, it can form line at two positions respectively simultaneously at the surface and the back side of the adhesive substrates that the brittle base applying is formed, thus, can shorten the needed process period of display panel substrate that cuts out stated number from the adhesive substrates of liquid crystal generatrix plate etc.
The invention provides a kind of chalker, on the adhesive substrates of the structure that brittle base is fitted, form line, chalker of the present invention is realized above-mentioned purpose in the following way, promptly, possess: fixing liner agency, it is fixedly set on the pedestal that is configured on the face of setting, forms first line simultaneously at the surface and the back side of this adhesive substrates; With movable liner agency, it is arranged on this pedestal movably, the surface and the back side at this adhesive substrates form second line parallel with this first line simultaneously, fixedly liner agency and movable liner agency constitute, form simultaneously this first and second the line, and the interval of this first and second line by this two mechanism leaving the distance regulate.
The present invention is in above-mentioned chalker, preferably have support region and form mechanism, this support region forms mechanism between the formation position of second line of the formation position of first line of described fixedly liner agency and this movable liner agency and forming the support region that supports described adhesive substrates with leaving in the corresponding scope of distance of this first and second line.
The present invention is in above-mentioned chalker, preferably has supporting station, this supporting station is arranged between described fixedly liner agency and the described movable liner agency, support described adhesive substrates, this supporting station constitutes, preferably have a plurality of openings that form in the mode that takes place to suck airflow or spray airflow, when the conveying of this adhesive substrates, by this ejection airflow, support in the mode of on this supporting station, lifting this adhesive substrates, when the line of this adhesive substrates, this supporting station is fixed in this adhesive substrates absorption.
The present invention is in above-mentioned chalker, and described supporting station preferably comprises: the fixed support worktable is fixedly set in described pedestal near the mode the formation position that is positioned at described first line; With the movable support worktable, near the formation position that is positioned at described second line, and can be arranged at described pedestal with the mode that second liner agency together moves.
The present invention is in above-mentioned chalker, and described fixedly liner agency preferably has: the first upside line portion, and the mode of sliding with along continuous straight runs is installed on the described pedestal, by the slip of this horizontal direction, forms first line on the surface of described adhesive substrates; With the first downside line portion, to be installed on the described pedestal along the mode that same direction is slided opposed to each other with this first upside line portion, by with this unidirectional slip of first upside line portion, form first line at the back side of this adhesive substrates, described movable liner agency preferably has: the second upside line portion, the mode of sliding with along continuous straight runs is installed on the described pedestal, by the slip of this horizontal direction, forms second line on the surface of described adhesive substrates; With the second downside line portion, being installed on the described pedestal along the mode that same direction is slided opposed to each other with this second upside line portion, by with this unidirectional slip of second upside line portion, form second line at the back side of this adhesive substrates.
The present invention is in above-mentioned chalker, described fixedly liner agency preferably has: with opposed mode be installed on a pair of vertical pillar on the described pedestal, the mode of extending with along continuous straight runs is installed on a pair of guide stanchion first about between this vertical pillar in parallel to each other, the choosing of described first upside line quality award from the ministry has: the mode with the along continuous straight runs slip is installed on first upper cross of this first upside guide stanchion to slide unit; Be installed on the first upside wiping action parts of this first upper cross in the mode of vertically sliding to sliding part; Be installed on these first upside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter, the choosing of described first downside line quality award from the ministry has: the mode of sliding with along continuous straight runs be installed on this first downside guide stanchion the horizontal slide unit of first downside, with the mode of vertically sliding be installed on the horizontal sliding part of this first downside the first downside wiping action parts, be installed on these first upside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter.
The present invention is in above-mentioned chalker, described movable liner agency preferably has: a pair of moveable block that is provided with movably at this track segment of pair of guide rails parts upper edge that is installed in opposed mode on the described pedestal, be installed on a pair of vertically movable pillar of this each moveable block in opposed mode, the mode of extending with along continuous straight runs is installed on this vertically a pair of guide stanchion about in the of second of a movable intercolumniation in parallel to each other, the choosing of described second upside line quality award from the ministry has: the mode of sliding with along continuous straight runs is installed on second upper cross of this second upside guide stanchion to slide unit, be installed on the second upside wiping action parts of this second upper cross in the mode of vertically sliding to sliding part, be installed on these second upside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter, the choosing of described second downside line quality award from the ministry has: the mode of sliding with along continuous straight runs is installed on the horizontal slide unit of second downside of this second downside guide stanchion, be installed on the second downside wiping action parts of the horizontal sliding part of this second downside in the mode of vertically sliding, be installed on these second downside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter.
The present invention is in above-mentioned chalker, and described support region forms mechanism and is preferably, and has: the mode of extending with the mobile route along described movable liner agency disposes and has the mutual opposed a pair of guiding parts of part guide path; The a pair of chain part of installing movably along the part guide path of this each guiding parts; And, be installed on this a pair of chain part at certain intervals and support a plurality of roller supporting bars of a plurality of rollers, one end of this each chain part is fixed in this movable liner agency, to the other end of this each chain to apply certain tensile mode to this chain part to the prescribed direction application of force, this support region forms mechanism and constitutes, by moving of this movable liner agency, this chain part moves, roller by this a plurality of roller supporting bars supporting is haunted between described first and second liner agency, the support region that supports described adhesive substrates become and this first and second line between leave the corresponding width of distance.
The present invention is in above-mentioned chalker, and described adhesive substrates preferably has the fit mother substrate of rectangular shape that is used to cut out liquid crystal panel of the laminating structure that forms of two pieces of glass substrates.
Below, effect of the present invention is described.
In the present invention, possess and be fixedly set on the pedestal and the fixedly liner agency that forms first line simultaneously at the surface and the back side of adhesive substrates, be arranged on this pedestal movably and the movable liner agency that forms second line parallel simultaneously at the surface and the back side of this adhesive substrates with this first line, fixedly liner agency and movable liner agency constitute, form this first and second line simultaneously, and the interval of this first and second line is regulated by the distance of leaving of this two mechanism, therefore can form line simultaneously at two positions respectively at the surface and the back side of the adhesive substrates that the brittle base applying is formed, thus, can shorten the needed process period of display panel substrate that cuts out stated number from adhesive substrates such as liquid crystal generatrix plates.
In addition, in the present invention, have between the formation position of second line of the formation position of first line of described fixedly liner agency and described movable liner agency and with the corresponding scope of the distance of this first and second line in form the support region of the described adhesive substrates of supporting support region form mechanism, even therefore under the situation that has moved second liner agency, also can continue and suitably form the zone of supporting rectangular substrate.
In addition, in the present invention, has the supporting station that is arranged between described fixedly liner agency and the described movable liner agency and supports described adhesive substrates, this supporting station has a plurality of openings that form in the mode that takes place to suck airflow or spray airflow, be such structure: when the conveying of this adhesive substrates, by this ejection airflow, support in the mode of on this supporting station, this adhesive substrates being lifted, when the line of this adhesive substrates, this supporting station is fixed in this adhesive substrates absorption, therefore, when line, can when the conveying of this adhesive substrates, it be carried easily with the fixing adhesive substrates of the mode of good pan position.
The effect of invention
As mentioned above, according to the present invention, possess and be fixedly set on the pedestal and the fixedly liner agency that forms first line simultaneously at the surface and the back side of adhesive substrates, be arranged on this pedestal movably and the movable liner agency that forms second line parallel simultaneously at the surface and the back side of this adhesive substrates with this first line, fixedly liner agency and movable liner agency constitute, form this first and second line simultaneously, and the interval of this first and second line is regulated by the distance of leaving of this two mechanism, therefore, can form line simultaneously at two positions respectively at the surface and the back side of the adhesive substrates that the brittle base applying is formed, thus, can shorten the needed process period of display panel substrate that cuts out stated number from adhesive substrates such as liquid crystal mother substrates.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
(embodiment 1)
Fig. 1～Figure 10 is the figure that the substrate segmenting system to embodiment of the present invention 1 describes, Fig. 1 represents the processing line of brittle substrate of the substrate segmenting system of present embodiment 1, and Fig. 2 represents that this brittle substrate is the mother substrate Ms (figure (a)) of liquid crystal panel, the rectangular substrate Ts (figure (b)) that obtains from this mother substrate, and the base plate of liquid crystal panel Ps (figure (c)) that obtains from this rectangular substrate.In addition, Fig. 3 is the vertical view that expression is arranged at the chalker of above-mentioned processing line, and Fig. 4 represents the IV-IV line profile construction of chalker shown in Figure 3.In addition, Fig. 5 (a) is the figure that sees the chalker shown in Fig. 3 along the direction of arrow shown in the V-V line of Fig. 3, and Fig. 5 (b) is the figure of the movable line portion of this chalker of expression.
The substrate segmenting system 200 of this embodiment 1 comprises following processing line,, the adhesive substrates of the two pieces of brittle substrates of fitting is cut apart display panel substrate (base plate of liquid crystal panel) Ps that making liquid crystal panel etc. uses that is.
In addition, the adhesive substrates of two pieces of brittle substrates of applying comprises the adhesive substrates that glass substrate is fitted mutually of two-d display panels such as being used to form liquid crystal panel, Plasmia indicating panel, organic EL display panel, also comprise the adhesive substrates that glass substrate is fitted in the semiconductor device of silicon substrate, sapphire substrate etc., but, be that example describes with the mother substrate of liquid crystal panel at this.
This processing line (substrate segmenting system) 200 has: the mother substrate material loading 200a of portion supplies to the mother substrate Ms of liquid crystal panel on this processing line 200; Mother substrate cutting part 200b will be cut apart from the mother substrate Ms that the mother substrate material loading 200a of portion supplies with, and make rectangular substrate Ts; Rectangular substrate rotation delivery section 200c, the rectangular substrate Ts that this mother substrate cutting part 200b is cut apart revolves and turn 90 degrees, and is transported to the Ministry of worker that adds in downstream side.In addition, this processing line 200 has: rectangular substrate cutting part 200d, and will rotate the rectangular substrate Ts that delivery section 200c transports from rectangular substrate and cut apart, make base plate of liquid crystal panel Ps; Display panel substrate rotation delivery section 200e, the base plate of liquid crystal panel Ps that rectangular substrate cutting part 200d is made rotates, and is transported to the display panel substrate inspection 200f of portion in its downstream side.This display panel substrate inspection 200f of portion is a part of checking the dimensional precision etc. of the display panel substrate of being processed into by this processing line 200.
At this, mother substrate Ms shown in Fig. 2 (a) has laterally that promptly parallel with the throughput direction of processing line 200 direction of (the paper left and right directions of Fig. 2 (a)) size is of a size of 2500mm, vertically (the paper above-below direction of Fig. 2 (a)) size is that the lateral dimension of processing line 200 is the rectangular shape of 2200mm, Lm1～Lm6 is cut apart along line, is cut into three rectangular substrate Ts.In addition, the rectangular substrate Ts shown in Fig. 2 (b) is cut apart along line Lt1～Lt8, is cut into four display panel substrate Ps (with reference to Fig. 2 (c)).
In addition, above-mentioned rectangular substrate rotation delivery section 200c is the parts that above-mentioned rectangular substrate is carried in absorption.But it also can be to control the parts that the one end is carried above-mentioned rectangular substrate.
Below, the formation of each one of the processing line that constitutes present embodiment 1 is elaborated.
The above-mentioned mother substrate material loading 200a of portion comprises loader 12, the feed robot 13 that is equivalent to existing processing line 100 shown in Figure 14, the mechanism that reaches transfer roller 14, and the mother substrate Ms that is stored in the storage place of regulation is transported to above-mentioned mother substrate cutting part 200b.The cutting device 1 of above-mentioned mother substrate cutting part 200b and existing processing line 100 shown in Figure 14 is same, has the liner agency (liner agency 4 of Figure 15 and Figure 16) that the face side substrate and the rear side substrate of mother substrate are rule simultaneously.In addition, above-mentioned rectangular substrate rotation delivery section 200c comprises the mechanism of the seizure mechanism 31, transfer roller 15 and the rotary table 16 that are equivalent to existing processing line 100 shown in Figure 11, will be transported to rectangular substrate cutting part 200d from the rectangular substrate Ts that mother substrate Ms cuts out from mother substrate cutting part 200b by mother substrate cutting part 200b.
And, the rectangular substrate cutting part 200d of present embodiment 1 possesses chalker 1000, described chalker 1000 have with the cutting device 1A's of the existing processing line 100 of Figure 14～Figure 18 explanation, the liner agency that the liner agency 4 of line when ground, a position, position carries out the surface of brittle substrate and the back side is different, this chalker 1000 has the fixedly liner agency portion 300 that is disposed at rectangular substrate rotation delivery section 200c side (processing line upstream side), be disposed at the movable liner agency portion 400 of display panel substrate rotation delivery section 200e side (processing line downstream side), constitute can two the position side by side carry out line from face side and rear side to rectangular substrate Ts.
At first, fixing liner agency portion 300 is described.
Fixedly liner agency portion 300 has: be fixed in the face that the is provided with R of this chalker 1000 permanent seat 301, install and fix piece 310a and 310b, be fixed in opposed a pair of vertical pillar 311a and 311b on this each piece 310a and the 310b to separate a pair of part that opposed mode is installed on this permanent seat 301 with the corresponding predetermined distance of minor face size of above-mentioned rectangular substrate.In addition, between this opposed vertical pillar 311a and 311b, fixed guide pillar 320a and 320b are installed to be positioned at mode up and down abreast.Side in the processing line downstream side of these guide stanchion 320a and 320b is formed with guide path 321, guide path 321 at this upside guide stanchion 320a and downside guide stanchion 320b has been embedded in along this guide path upper cross that horizontal (that is, crossing the direction of processing line) slides between this two vertical pillar to slide unit 322a and the horizontal slide unit 322b of downside.In addition, though not shown, drive upper cross and constitute by the linear motor that is assembled in guide stanchion 320a and 320b etc. to the mechanism of slide unit 322a and the horizontal slide unit 322b of downside.
In addition, this upper cross on slide unit 322a with respect to this horizontal slide unit 322a vertically (vertical direction) mode of sliding upside wiping action parts 323a is installed, be fixed with scribe head 331 in the bottom of these wiping action parts 323a.Below this scribe head 331, chuck 332 is installed, in addition, maintains the cutter rotary cutter 333 of ruling in the downward mode of point of a knife along the line of rectangular substrate Ts at the front end of this chuck 332.Equally, on the horizontal slide unit 322b of above-mentioned downside with respect to this horizontal slide unit 322b vertically (vertical direction) mode of sliding downside wiping action parts 323b is installed, be fixed with scribe head 331 in the upper end of these wiping action parts 323b.At this chuck 332 is installed above the scribe head 331, in addition, the mode that makes progress with point of a knife at the front end of this chuck 332 maintains cutter rotary cutter 333.In addition, though not shown, drive upside wiping action parts 323a and downside wiping action parts 323b mechanism by being installed on upper cross to the electric motor of slide unit 322a and the horizontal slide unit 322b of downside and utilize the electric actuator of solenoid coil or utilize air pressure or hydraulic actuator etc. constitutes.
In addition, install and fix jury strut 341a and the 341b that the downstream side that is positioned at this vertical pillar 311a and 311b is installed on piece 310a and the 310b,, fixed support worktable 342 is installed by these jury struts 341a and 341b at above-mentioned part.Being configured to of this supporting table 342, has the opening that is formed at its surface and is used to carry out the ejection or the suction of air, the rectangular substrate that transports at upstream side from processing line add man-hour, this rectangular substrate is fixed in absorption, in addition, when the conveying of rectangular substrate, this rectangular substrate is floated slightly by airflow.In addition, at the upstream side of this supporting table 342 to dispose a plurality of supporting tables 343 that separate with these supporting table 342 opposed modes.In addition, these separate being configured to of supporting table 343, be fixed on this permanent seat 301 by the support unit (not shown) that is arranged on the permanent seat 301, same with said fixing supporting table 342, has the opening (not shown) that is formed at its surface and is used to carry out the ejection or the suction of air, the rectangular substrate that transports at upstream side from processing line add man-hour, this rectangular substrate is fixed in absorption, in addition, when the conveying of rectangular substrate, this rectangular substrate is floated slightly by airflow.
In addition, respectively separately the upstream side of supporting table 343 be provided with the frame parts 344 that roller 344a is installed along the throughput direction of rectangular substrate Ts.The following butt of this roller 344a and the rectangular substrate that is transferred, and support this rectangular substrate Ts.
At this, the fixedly liner agency of said fixing liner agency portion 300 is made of parts 310a, 310b, 311a, 311b, 320a, 320b, 322a, 322b, 323a, 323b, 331,332,333.
Then, movable liner agency portion 400 is described.
This movable liner agency portion 400 has: the permanent seat 401 that is fixed in the face that the is provided with R of this chalker 1000, opposed mode is installed on pair of guide rails parts 402a and the 402b on this permanent seat 401 with the corresponding predetermined distance of the lateral dimension of above-mentioned rectangular substrate TS to separate, with along this track segment movably a pair of part that is installed on this track segment 402a and the 402b of mode moveable block 410a and 410b are installed, be fixed in opposed a pair of vertically movable pillar 411a and 411b on this each piece 410a and the 410b.
At this, in the both end sides of above-mentioned track segment 402a, on this track segment 402a, dispose parts of bearings 412a and the 413a of the rotatably mounted spindle unit 414a that disposes in parallelly, the electric motor 415a that makes this spindle unit 414a rotation is installed on the parts of bearings 412a in downstream side.In addition, this spindle unit 414a is formed with screw thread on its surface, connects to dispose part installation moveable block 410a.In addition, this 414a screws togather with the nut part (not shown) that the mode that moves on above-mentioned track segment 402a with the above-mentioned part installation moveable block 411a by its rotation is installed on the inside of this moveable block 410a.In addition, the both end sides of above-mentioned track segment 402b and dispose parts of bearings 412b and the 413b of the rotatably mounted spindle unit 414b that disposes on this track segment 402b is equipped with the electric motor 415b that makes this spindle unit 414b rotation in parallelly on the parts of bearings 412b in downstream side.In addition, this spindle unit 414b is formed with screw thread on its surface, connects to dispose part installation moveable block 411b.In addition, this 414b screws togather with the nut part (not shown) that the mode that moves on above-mentioned track segment 402b with the above-mentioned part installation moveable block 411b by its rotation is installed on the inside of this moveable block 411b.
In addition, between this opposed vertically movable pillar 411a and 411b, movable guide stanchion 420a and 420b are installed to be positioned at mode up and down abreast.Side at the processing line upstream side of these guide stanchion 420a and 420b is formed with guide path 421, guide path 421 at this upper movable guide stanchion 420a and lower movable guide stanchion 420b has been embedded in along this guide path upper cross that horizontal (that is, crossing the direction of processing line) slides between this two vertically movable pillar to slide unit 422a and the horizontal slide unit 422b of downside.In addition, though not shown, drive upper cross and constitute by the linear motor that is assembled in guide stanchion 420a and 420b etc. to the mechanism of slide unit 422a and the horizontal slide unit 422b of downside.
In addition, this upper cross on slide unit 422a with respect to this horizontal slide unit 422a vertically (vertical direction) mode of sliding upside wiping action parts 423a is installed, be fixed with scribe head 431 in the bottom of these wiping action parts 423a.Below this scribe head 431, chuck 432 is installed, in addition, maintains cutter rotary cutter 433 in the downward mode of point of a knife at the front end of this chuck 432.Similarly, on the horizontal slide unit 422b of above-mentioned downside with respect to this horizontal slide unit 422b vertically (vertical direction) mode of sliding downside wiping action parts 423b is installed, be fixed with scribe head 431 in the upper end of these wiping action parts 423b.At this chuck 432 is installed above the scribe head 431, in addition, the mode that makes progress with point of a knife at the front end of this chuck 432 maintains cutter rotary cutter 433.In addition, though not shown, the mechanism that drives upside wiping action parts 423a and downside wiping action parts 423b is by being installed on upper cross to the electric motor of slide unit 422a and the horizontal slide unit 422b of downside and utilize the electric actuator of solenoid coil or utilize air pressure or hydraulic actuator etc. constitutes.
In addition, at above-mentioned part moveable block 410a and 410b are installed and lateral struts 441 are installed in the mode of the upstream side that is positioned at this vertical pillar 411a and 411b and in mode across these pieces 410a and 410b, middle body in this lateral struts 441 is equipped with a pair of longitudinal supporting pillar 451a and 451b in opposed mode, with above-mentioned part the together mobile mode of moveable block to be installed movable support worktable 442 is installed on this a pair of longitudinal supporting pillar.Being configured to of this movable support worktable 442, has the opening that is formed at its surface and is used to carry out the ejection or the suction of air, the rectangular substrate that transports at upstream side from processing line add man-hour, this rectangular substrate is fixed in absorption, in addition, when the conveying of rectangular substrate, this rectangular substrate is floated slightly by airflow.In addition, be positioned with in the downstream side of this movable support worktable 442 along the lateral margin of this movable support worktable 442 move be installed on up and down horizontal slide unit 422a and the scribe head 431 of 422b.
At this, the movable liner agency of above-mentioned movable liner agency portion 400 is made of parts 410a, 410b, 411a, 411b, 420a, 420b, 422a, 422b, 423a, 423b, 431,432,433.
In addition, inboard at above-mentioned track segment 402a and 402b, mode with the roughly intermediary height location that is positioned at upper movable guide stanchion 420a and lower movable guide stanchion 420b, be provided with a pair of guiding parts 460a and 460b abreast with this track segment 402a and 402b, this guiding parts 460a and 460b are installed on guiding parts bearer frame 461a and 461b respectively.The downstream side of these guiding parts bearer frame 461a and 461b is by vertical anchor post 462a that is installed on permanent seat 401 and 462b supporting, and the upstream side of above-mentioned guiding parts bearer frame 461a and 461b is by vertical anchor post 463a that is installed on permanent seat 401 and 463b supporting.
And, by carriage 464a and 464b sprocket wheel 465a and 465b are installed rotatably at the upstream side end face of above-mentioned guiding parts bearer frame 461a and 461b.In addition, with above-mentioned sprocket wheel 465a and the opposed mode of 465b, by carriage 466a and 466b sprocket wheel 467a and 467b are installed rotatably at the upstream side end face of said fixing pedestal 401.
Up and down hanging with a chain 470a on opposed pair of sprocket 465a and the 467a at these, the end of this chain 470a is linked to the hydraulic pressure that is arranged in the permanent seat 401 or the piston rod 481a of pneumatic cylinder 480a.In addition, same with above-mentioned chain 470a up and down hanging with another chain 470b on opposed pair of sprocket 465b and the 467b, the end of this chain 470b is linked to the hydraulic pressure that is arranged in the permanent seat 401 or the piston rod 481b of pneumatic cylinder 480b (with reference to Fig. 5).
And, on a pair of chain 470a and 470b, roller supporting bar 491 is installed at certain intervals in mode across these two chains, on each roller supporting bar 491, roller 493 rotatably is installed by carriage 494.
At this, nearest supporting bar 491 in above-mentioned a plurality of roller supporting bar 491, that be positioned at above-mentioned lateral struts 441 is linked to a pair of vertical jury strut 451a that is installed on the above-mentioned lateral struts 441 and the upper end of 451b by a pair of binding sheet 483a and 483b, in addition, be fixed with the other end of above-mentioned a pair of chain 470a and 470b at the two ends of the nearest supporting bar 491 that is positioned at this lateral struts 441.
And the end of above-mentioned a pair of chain 470a and 470b is by connected piston rod 481a and the 481b direction application of force to drawing chain, constantly to chain 467a and the additional certain force of strain of 467b.
In addition, be positioned at the roller that is installed on roller supporting bar 491 493 on above-mentioned guiding parts 460a and 460b top, butt below the rectangular substrate Ts that transports with upstream side from this chalker 1000 forms the supporting surface (support region) of this rectangular substrate of supporting Ts.
Then, action is described.
In this processing line (substrate segmenting system) 200, when supplying to the mother substrate Ms of liquid crystal panel on this processing line 200 by the mother substrate material loading 200a of portion, the mother substrate Ms that supplies with from the mother substrate material loading 200a of portion is cut apart with mother substrate cutting part 200b and is made rectangular substrate Ts.At this, the mother substrate Ms shown in Fig. 2 (a) is cut apart along line LM1～LM6, is cut into three rectangular substrate Ts.
The rectangular substrate Ts that this mother substrate cutting part 200b is cut apart revolves by rectangular substrate rotation delivery section 200c and to turn 90 degrees, and is transported to the rectangular substrate cutting part 200d in downstream side.In this processing line 200, cut apart by rectangular substrate cutting part 200d from the rectangular substrate Ts that rectangular substrate rotation delivery section 200c transports, make base plate of liquid crystal panel Ps.At this, the rectangular substrate Ts shown in Fig. 2 (b) is cut apart along line Lt1～Lt8, is cut into four base plate of liquid crystal panel Ps (with reference to Fig. 2 (c)).
The base plate of liquid crystal panel Ps that this rectangular substrate cutting part 200d makes, 200e rotates by panel rotation delivery section, and is transported to the display panel substrate inspection 200f of portion in its downstream side.At this display panel substrate inspection 200f of portion, check the dimensional precision of the display panel substrate Ps that this processing line 200 is made etc.
Below, the action of each one of the processing line that constitutes present embodiment 1 is elaborated.
The above-mentioned mother substrate material loading 200a of portion comprises loader 12, the feed robot 13 that is equivalent to existing processing line 100 shown in Figure 14, the mechanism that reaches transfer roller 14, at this mother substrate material loading 200a of portion, the mother substrate Ms that is stored in the storage place of regulation is transported to above-mentioned mother substrate cutting part 200b.
At above-mentioned mother substrate cutting part 200b, with the cutting device 1 of existing processing line 100 shown in Figure 14 similarly, on the face side substrate of mother substrate and rear side substrate, form line simultaneously.
In addition, above-mentioned rectangular substrate rotation delivery section 200c comprises the mechanism of the seizure mechanism 31, transfer roller 15 and the rotary table 16 that are equivalent to existing processing line 100 shown in Figure 14, is transported to rectangular substrate cutting part 200d from the rectangular substrate Ts that mother substrate Ms cuts out from mother substrate cutting part 200b by mother substrate cutting part 200b.
And, the rectangular substrate cutting part 200d of present embodiment 1 possesses chalker 1000, described chalker 1000 have with the different liner agency of the liner agency cutting device 1A of the existing processing line 100 of Figure 14～Figure 18 explanation, line when ground, a position, a position carries out the surface of brittle substrate and the back side 4, in this chalker 1000, utilize fixedly liner agency and movably liner agency, the line from face side and rear side to rectangular substrate TS is carried out at two positions simultaneously.
At first, utilize Fig. 3, Fig. 4, Fig. 6 and Fig. 7, the action of regulating the distance between fixing liner agency and the movable liner agency is described.
The adjusting of this distance is carried out according to the size of the base plate of liquid crystal panel Ps that the rectangular substrate from line cuts out, and particularly, based on the size of base plate of liquid crystal panel Ps, promptly carry out at the interval of ruling between Lt1 and the Lt2.In addition, the interval of the interval of the interval of line Lt3 and Lt4, line Lt5 and Lt6, line Lt7 and Lt8 equates it is self-evident with the interval of ruling between Lt1 and the Lt2.
For example, Fig. 6 and Fig. 7 be expressed as the scribe head 331 that strengthens fixing liner agency 300 and movably the scribe head 431 of liner agency 400 the interval and moveable block 410a and 410b are moved to the state on paper right side from Fig. 3 and position shown in Figure 4.The moving through of this moveable block 410a and 410b rotates turning axle 414a and 414b by electric motor 415a and 415b to carry out.
At this moment, by moving of moveable block 410a and 410b, move to right via the parts 441 banded roller supporting bars 491 of moveable block, thus, chain part 470a and 470b stretch to the paper right side.This result is, roller supporting bar 491 also appears between the scribe head 431 of the scribe head 331 of fixing liner agency and movable liner agency, thus, between the scribe head 431 of the scribe head 331 of fixing liner agency and movable liner agency, form corresponding with the size of the base plate of liquid crystal panel Ps that will make from rectangular substrate Ts, be the needed substrate supporting of supporting rectangular substrate zone.
Like this, after the distance between the scribe head 431 of the scribe head 331 of having regulated fixing liner agency and movable liner agency, carry out the line of rectangular substrate Ts again.
Fig. 8, Fig. 9 and Figure 10 are the figure that this line action is described, and in these figure, have represented the action of the scribe head 431 of movable liner agency especially, but fixedly the action of the scribe head 331 of liner agency is also same fully.
At first, in movable liner agency, as shown by arrows, the cutter chuck of wiping action parts 423a up and down and 423b scribe head 431 separately longitudinally move to can with the surface of rectangular substrate Ts and the position of back side butt (Fig. 9 (a) and (b)).At this moment, in fixing liner agency, as shown in Figure 8, the cutter chuck of wiping action parts 323a up and down and 323b scribe head 331 separately longitudinally move to can with the surface of rectangular substrate Ts and the position of back side butt.
Thereafter, as shown by arrows, movably the wiping action parts 423a up and down of liner agency and 423b while are along rectangular substrate Ts laterally mobile (Fig. 8, Figure 10 (a) reach (b)).At this moment, fixedly the wiping action parts 323a up and down of liner agency and 323b also with the wiping action parts 423a of movable liner agency and 423b similarly, laterally moving along rectangular substrate Ts simultaneously.Thus, for example, the line that forms surface and rear side simultaneously in Lt1 and the position shown in the Lt2 of Fig. 2 of rectangular substrate Ts (b).
Thereafter, at rectangular substrate cutting part 200d, the rectangular substrate Ts that has been formed line by above-mentioned chalker 1000 is cut apart by the cutting device (not shown) at its rear portion, forms base plate of liquid crystal panel Ps.This base plate of liquid crystal panel Ps is transported to the display panel substrate inspection 200f of portion by display panel substrate rotation delivery section 200e.
Like this, in present embodiment 1, in the chalker 1000 that constitutes rectangular substrate cutting part 200d, possess: be fixedly set on the pedestal and and paste the surface of synthetic adhesive substrates and the fixedly liner agency that the back side forms first line simultaneously at brittle bases such as mother substrate Ms with liquid crystal panel, be arranged on this pedestal movably and the movable liner agency that forms second line parallel simultaneously at the surface and the back side of this adhesive substrates with this first line, fixedly liner agency and movable liner agency constitute in the interval that forms this first and second line and this first and second line simultaneously mode that distance regulates of leaving by this two mechanism with this, therefore the surface and the back side of the adhesive substrates that can form at the applying brittle base form line simultaneously at two positions respectively, thus, can shorten the needed process period of base plate of liquid crystal panel Ps that cuts out stated number from the adhesive substrates such as mother substrate of liquid crystal panel.
In addition, in this embodiment 1, in above-mentioned chalker 1000, have by parts 470a, 470b, 491, the support region that 493 grades constitute forms mechanism, described support region forms mechanism between the formation position of the formation position of fixedly first line of liner agency and movably second line of liner agency, and with the corresponding scope of the distance of this first and second line in, form the support region of the above-mentioned adhesive substrates of supporting (rectangular substrate Ts), even therefore under the situation that moves second liner agency, also can continue and suitably form the zone of supporting rectangular substrate.
In addition, in this embodiment 1, in above-mentioned chalker 1000, have and be arranged between fixing liner agency and the movable liner agency and as the fixed support worktable 342 and the movable support worktable 442 of the supporting station of supporting adhesive substrates, these two supporting tables are made as following formation, promptly, have a plurality of openings that form in the mode that takes place to suck airflow or spray airflow, when the conveying of this adhesive substrates, by this ejection airflow, support this two supporting tables in the mode of on this supporting table, lifting this adhesive substrates, when the line of this adhesive substrates, this supporting table is fixed in this adhesive substrates absorption, therefore, when line, rectangular substrate can be fixed in the mode of good pan position, when the conveying of rectangular substrate, can easily form its conveying.
Particularly, downstream side in the scribe area of said fixing liner agency, the fixed support worktable 342 of the above-mentioned adhesive substrates of supporting is set near this scribe area, in addition, upstream side setting in this scribe area separates supporting table 343, reaching this fixed support worktable 342 separately, supporting table 343 is made as following structure, promptly, have a plurality of openings that form in the mode that takes place to suck airflow or spray airflow, when the conveying of this adhesive substrates, by this ejection airflow, support this fixed support worktable 342 and separate supporting table 343 in the mode of on this supporting table, lifting this adhesive substrates, when the line of this adhesive substrates, this supporting table is fixed in this adhesive substrates absorption, therefore rectangular substrate can be securely fixed near the fixedly line of liner agency its scribe area.In addition, downstream side in the scribe area of movable liner agency, the movable support worktable 442 of supporting adhesive substrates is set near this scribe area, this movable support worktable 442 is made as following structure, promptly, have a plurality of openings to take place sucking airflow or to spray the formation of airflow, when the conveying of this adhesive substrates, by this ejection airflow, support this movable support worktable 442 in the mode of on this supporting station, lifting this adhesive substrates, when the line of this adhesive substrates, this movable support platform is fixed in this adhesive substrates absorption, therefore, adhesive substrates can be firmly fixed at and carry out the line of movable liner agency near the scribe area.
In addition, in present embodiment 1, as the substrate segmenting system, the chalker of having represented on rectangular substrate, to form line be made as at two positions of rectangular substrate and on its surface and the back side form the formation of line simultaneously, but this substrate segmenting system also can be made as the chalker that forms line on mother substrate at two positions of mother substrate and on its surface and the back side form the formation of line simultaneously, this substrate segmenting system is made as embodiment 2 describes.
(embodiment 2)
The substrate segmenting system of this embodiment 2 uses the chalker of formation of Fig. 3～shown in Figure 5 as the mother substrate cutting part 200b of the substrate segmenting system of embodiment 1.
Like this, in present embodiment 2, also in the chalker of mother substrate, possess: be fixedly set on the pedestal and the fixedly liner agency that forms first line simultaneously at the surface and the back side of mother substrate, be arranged on this pedestal movably and the movable liner agency that forms second line parallel simultaneously at the surface and the back side of this mother substrate with this first line, with this fixedly liner agency and movable liner agency to form this first and second line simultaneously and to regulate the mode at the interval of this first and second line and constitute by the distance of leaving of this two mechanism, the adhesive substrates that therefore can form at the applying brittle base is that the surface and the back side of mother substrate forms line simultaneously at two positions respectively, thus, can shorten the needed process period of rectangular substrate Ts that cuts out stated number from the adhesive substrates such as mother substrate Ms of liquid crystal panel.
In addition, in above-mentioned embodiment 2, represented that the mother substrate cutting part 200b of substrate segmenting system and rectangular substrate cutting part 200d both sides use the chalker of the formation of Fig. 3～shown in Figure 5, but the aforesaid substrate segmenting system also only mother substrate cutting part 200b use the chalker of the formation of Fig. 3～shown in Figure 5.
As mentioned above, the present invention that utilized preferred embodiment of the present invention illustration does not make an explanation but the present invention really wants to be defined in this embodiment.The present invention will explain that its scope is understandable by claims.Can be according to the present invention concrete record preferred embodiment of those skilled in the art, and based on record of the present invention and technology general knowledge, the scope of implementing equivalence is understandable.Its content of the patent documentation of quoting in this specification sheets self is same with the content that is recorded in this specification sheets particularly, and its content will be understandable as the reference of this specification sheets is quoted.
Utilizability on the industry
The present invention is being disposed at the processing line that carries out cutting out from the adhesive substrates that two pieces of brittle substrates applyings are formed the processing of a plurality of display panel substrates, and the field that can carry out the chalker of line (line) simultaneously at surface and its back side of this adhesive substrates to this adhesive substrates, the surface and the back side of the adhesive substrates that can form at the applying brittle base form line simultaneously at two positions respectively, thus, can shorten the needed process period of display panel substrate that cuts out stated number from the adhesive substrates such as mother substrate of liquid crystal panel.
Description of drawings
Fig. 1 is the figure that the substrate segmenting system to embodiment of the present invention 1 describes, and represents the processing line of the brittle substrate of this substrate segmenting system;
Fig. 2 is the figure that the brittle substrate that the substrate segmenting system of above-mentioned embodiment 1 is processed is described; The mother substrate of the liquid crystal panel that Fig. 2 (a) expression is made of this brittle substrate; The rectangular substrate of Fig. 2 (b) expression by obtaining cutting apart of this mother substrate; The base plate of liquid crystal panel of Fig. 2 (c) expression by obtaining cutting apart of this rectangular substrate;
Fig. 3 is the vertical view that the substrate segmenting system to above-mentioned embodiment 1 describes, and represents the chalker that is arranged at processing line of this system;
Fig. 4 is the figure that the substrate segmenting system to above-mentioned embodiment 1 describes, and represents the IV-IV line profile construction of chalker shown in Figure 3;
Fig. 5 is the figure that the substrate segmenting system to above-mentioned embodiment 1 describes; Fig. 5 (a) is the figure that sees the chalker shown in Fig. 3 along the direction of arrow shown in the V-V line of Fig. 3; Fig. 5 (b) is the figure of the movable line portion of this chalker of expression;
Fig. 6 is the vertical view that the action to the chalker that is arranged at processing line of the substrate segmenting system of above-mentioned embodiment 1 describes, the state when the expression along continuous straight runs has moved the movable liner agency of chalker shown in Figure 3;
Fig. 7 is the VI-VI line sectional view of Fig. 6 of describing of the action to the chalker that is arranged at processing line of the substrate segmenting system of above-mentioned embodiment 1, the state when the movable liner agency of chalker shown in Figure 4 has been moved in expression;
Fig. 8 is the figure of the part of the IV-IV line section that is equivalent to Fig. 3 that describes of the action to the chalker that is arranged at processing line of the substrate segmenting system of above-mentioned embodiment 1, the state when expression makes the scribe head of chalker shown in Figure 4 move to the position that adhesive substrates (rectangular substrate) is rule;
Fig. 9 (a) and (b) be the figure that the action to the chalker of the substrate segmenting system of above-mentioned embodiment 1 describes represents that the scribe head of movable line portion moves to the situation of scribing position;
Figure 10 (a) and (b) be the figure that the action to the chalker of the substrate segmenting system of above-mentioned embodiment 1 describes represents the situation that the scribe head of movable line portion is rule on adhesive substrates;
Figure 11 is the skeleton diagram that available liquid crystal panel cut-off rule is described, expression patent documentation 1 disclosed liquid crystal panel cut-off rule;
Figure 12 is the stereographic map that expression constitutes the chalker of available liquid crystal panel cut-off rule shown in Figure 11;
Figure 13 is the synoptic diagram that existing another chalker is described, expression patent documentation 1 and 2 disclosed chalkers;
Figure 14 is the vertical view that the liquid crystal panel cut-off rule (patent documentation 1) that possesses as available liquid crystal panel cut-off rule at the surface of the adhesive substrates that forms that two pieces of brittle substrates are fitted and the liner agency of ruling simultaneously in the back side is described;
Figure 15 is used for stereographic map that the available liquid crystal panel cutting device that possesses the liner agency of ruling simultaneously at the surface and the back side of adhesive substrates is described;
Figure 16 is the stereographic map of the major portion of expression available liquid crystal panel cutting device shown in Figure 15;
Figure 17 is the front view that the line of available liquid crystal panel cutting device shown in Figure 15 action is described.
Figure 18 is the front view that the cut-out of available liquid crystal panel cutting device shown in Figure 15 action is described.
Nomenclature
200 processing lines (substrate segmenting system)
200a mother substrate material loading portion
200b mother substrate cutting part
200c rectangular substrate rotation delivery section
200d rectangular substrate cutting part
200e display panel substrate rotation delivery section
200f display panel substrate inspection portion
300 fixing liner agencies
301,401 permanent seats
310a, 310b part install and fix piece
311a, 311b vertical pillar
320a, 420a upside guide stanchion
320b, 420b downside guide stanchion
321,421 guide paths
The 322a upper cross is to slide unit
The horizontal slide unit of 322b downside
323a upside wiping action parts
323b downside wiping action parts
331,431 scribe heads
332,432 chucks
333,433 cutter rotary cutters
341a, 341b aiding support
342 fixed support worktable
343 separate supporting table
344 frame parts
The 344a roller
400 movable liner agencies
402a, 402b track segment
410a, 410b part are installed moveable block
The vertically movable pillar of 411a, 411b
412a, 412b, 413a, 413b parts of bearings
414a, 414b spindle unit
442 movable support worktable
460a, 460b guiding parts
461a, 461b guiding parts bearer frame
462a, 462b, the vertical anchor post of 463a, 463b
464a, 464b, 466a, 466b, 494 carriages
465a, 465b, 467a, 467b sprocket wheel
470a, 470b chain
491 roller supporting bars
493 rollers
1000 chalkers
LM1～LM6, Lt1～Lt8 line
Ms mother substrate (adhesive substrates)
The Ts rectangular substrate
Ps display panel substrate (liquid crystal panel)
R is provided with face
Claims (9)
1. a chalker forms line on the adhesive substrates of the structure that brittle base is fitted, and wherein, possesses:
Fixedly liner agency is fixedly set on the pedestal that is configured on the face of setting, forms first line simultaneously at the surface and the back side of this adhesive substrates; With
Movable liner agency is arranged on this pedestal movably, forms second line parallel with this first line simultaneously at the surface and the back side of this adhesive substrates,
Should be fixedly liner agency and movable liner agency constitute, form this first and second line and the interval of this first and second line leaving simultaneously by this two mechanism apart from regulating.
2. chalker as claimed in claim 1, wherein, have support region and form mechanism, this support region forms mechanism between the formation position of second line of the formation position of first line of described fixedly liner agency and this movable liner agency and forming the support region that supports described adhesive substrates with leaving in the corresponding scope of distance of this first and second line.
3. chalker as claimed in claim 2, wherein,
Have supporting station, this supporting station is arranged between described fixedly liner agency and the described movable liner agency, supports described adhesive substrates,
This supporting station constitutes, have a plurality of openings that form in the mode that takes place to suck airflow or spray airflow, when the conveying of this adhesive substrates, by this ejection airflow, support in the mode of on this supporting station, lifting this adhesive substrates, when the line of this adhesive substrates, this supporting station is fixed in this adhesive substrates absorption.
4. chalker as claimed in claim 3, wherein,
Described supporting station comprises:
The fixed support worktable is fixedly set in described pedestal near the mode the formation position that is positioned at described first line; With
The movable support worktable near the formation position that is positioned at described second line, and can be arranged at described pedestal with the mode that described second liner agency together moves.
5. chalker as claimed in claim 3, wherein,
Described fixedly liner agency has:
The first upside line portion, the mode of sliding with along continuous straight runs is installed on the described pedestal, by the slip of this horizontal direction, forms first line on the surface of described adhesive substrates; With
The first downside line portion, being installed on the described pedestal along the mode that same direction is slided opposed to each other with this first upside line portion, by with this unidirectional slip of first upside line portion, form first line at the back side of this adhesive substrates,
Described movable liner agency has:
The second upside line portion, the mode of sliding with along continuous straight runs is installed on the described pedestal, by the slip of this horizontal direction, forms second line on the surface of described adhesive substrates; With
The second downside line portion, being installed on the described pedestal along the mode that same direction is slided opposed to each other with this second upside line portion, by with this unidirectional slip of second upside line portion, form second line at the back side of this adhesive substrates.
6. chalker as claimed in claim 5, wherein,
Described fixedly liner agency has: with opposed mode be installed on a pair of vertical pillar on the described pedestal, the mode of extending with along continuous straight runs is installed on a pair of guide stanchion about in the of first between this vertical pillar in parallel to each other,
The described first upside line portion has: first upper cross that the mode of sliding with along continuous straight runs is installed on this first upside guide stanchion to slide unit, with the mode of vertically sliding be installed on this first upper cross to the first upside wiping action parts of sliding part, be installed on these first upside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter
The described first downside line portion has: the mode of sliding with along continuous straight runs be installed on this first downside guide stanchion the horizontal slide unit of first downside, with the mode of vertically sliding be installed on the horizontal sliding part of this first downside the first downside wiping action parts, be installed on these first downside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter.
7. chalker as claimed in claim 5, wherein,
Described movable liner agency has: a pair of moveable block that is provided with movably at this track segment of pair of guide rails parts upper edge that is installed in opposed mode on the described pedestal, with opposed mode be installed on a pair of vertically movable pillar of this each moveable block, the mode of extending with along continuous straight runs is installed on this vertically a pair of guide stanchion about in the of second of a movable intercolumniation in parallel to each other
The described second upside line portion has: second upper cross that the mode of sliding with along continuous straight runs is installed on this second upside guide stanchion to slide unit, with the mode of vertically sliding be installed on this second upper cross to the second upside wiping action parts of sliding part, be installed on these second upside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter
The described second downside line portion has: the mode of sliding with along continuous straight runs be installed on this second downside guide stanchion the horizontal slide unit of second downside, with the mode of vertically sliding be installed on the horizontal sliding part of this second downside the second downside wiping action parts, be installed on these second downside wiping action parts and have the scribe head of the chuck that keeps the cutter rotary cutter.
8. chalker as claimed in claim 2, wherein,
Described support region forms mechanism,
Have: the mutual opposed a pair of guiding parts that disposes and have the part guide path in the mode of extending along the mobile route of described movable liner agency;
The a pair of chain part of installing movably along the part guide path of this each guiding parts; And
Be installed on this a pair of chain part at certain intervals and support a plurality of roller supporting bars of a plurality of rollers,
One end of this each chain part is fixed in this movable liner agency, to the other end of this each chain applying certain tensile mode to this chain part to the prescribed direction application of force,
This support region forms mechanism and constitutes,
By moving of this movable liner agency, this chain part moves, roller by this a plurality of roller supporting bars supporting is haunted between described first and second liner agency, the support region that supports described adhesive substrates become and this first and second line between leave the corresponding size of distance.
9. chalker as claimed in claim 1, wherein,
Described adhesive substrates is the mother substrate with rectangular shape laminating structure that two pieces of glass substrates are fitted, that be used to cut out liquid crystal panel.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-166612 | 2008-06-25 | ||
| JP2008166612 | 2008-06-25 | ||
| PCT/JP2009/061400 WO2009157440A1 (en) | 2008-06-25 | 2009-06-23 | Scribing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102083760A true CN102083760A (en) | 2011-06-01 |
| CN102083760B CN102083760B (en) | 2014-01-08 |
Family
ID=41444506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980124471.0A Expired - Fee Related CN102083760B (en) | 2008-06-25 | 2009-06-23 | Scribing apparatus |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5280442B2 (en) |
| KR (1) | KR101220859B1 (en) |
| CN (1) | CN102083760B (en) |
| TW (1) | TW201008887A (en) |
| WO (1) | WO2009157440A1 (en) |
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| CN104803592A (en) * | 2014-01-29 | 2015-07-29 | 三星钻石工业股份有限公司 | Scoring device for brittle substrate |
| CN104803591A (en) * | 2014-01-29 | 2015-07-29 | 三星钻石工业股份有限公司 | Scribing apparatus |
| CN105985012A (en) * | 2015-03-16 | 2016-10-05 | 塔工程有限公司 | Scribing apparatus |
| CN108202420A (en) * | 2017-12-29 | 2018-06-26 | 廊坊京磁精密材料有限公司 | Save the multi-line cutting method of material |
| CN108218212A (en) * | 2016-12-14 | 2018-06-29 | 塔工程有限公司 | Substrate dividing apparatus |
| CN108218213A (en) * | 2016-12-14 | 2018-06-29 | 塔工程有限公司 | Cutter for substrate |
| CN109824261A (en) * | 2017-11-23 | 2019-05-31 | 塔工程有限公司 | Cutter for substrate and method for dividing substrate |
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| KR101730553B1 (en) * | 2010-09-29 | 2017-04-27 | 엘지디스플레이 주식회사 | Apparatus for conveying substrate |
| JP5160628B2 (en) * | 2010-12-13 | 2013-03-13 | 三星ダイヤモンド工業株式会社 | Method for dividing bonded substrates |
| JP5156085B2 (en) * | 2010-12-13 | 2013-03-06 | 三星ダイヤモンド工業株式会社 | Method for dividing bonded substrates |
| TWI462885B (en) * | 2010-12-13 | 2014-12-01 | Mitsuboshi Diamond Ind Co Ltd | Method of breaking the substrate |
| JP5161952B2 (en) * | 2010-12-13 | 2013-03-13 | 三星ダイヤモンド工業株式会社 | Method for dividing bonded substrates |
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| JP5639634B2 (en) * | 2012-12-11 | 2014-12-10 | 三星ダイヤモンド工業株式会社 | Substrate cutting system |
| JP2013189020A (en) * | 2013-06-17 | 2013-09-26 | Mitsuboshi Diamond Industrial Co Ltd | Scribing apparatus |
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| KR20210021194A (en) * | 2019-08-14 | 2021-02-25 | 주식회사 탑 엔지니어링 | Method of controlling scribing apparatus |
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- 2009-06-23 CN CN200980124471.0A patent/CN102083760B/en not_active Expired - Fee Related
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Cited By (10)
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| CN104803592A (en) * | 2014-01-29 | 2015-07-29 | 三星钻石工业股份有限公司 | Scoring device for brittle substrate |
| CN104803591A (en) * | 2014-01-29 | 2015-07-29 | 三星钻石工业股份有限公司 | Scribing apparatus |
| CN104803592B (en) * | 2014-01-29 | 2018-10-19 | 三星钻石工业股份有限公司 | The scoring device of brittle material substrate |
| CN104803591B (en) * | 2014-01-29 | 2018-10-26 | 三星钻石工业股份有限公司 | Scoring device |
| CN105985012A (en) * | 2015-03-16 | 2016-10-05 | 塔工程有限公司 | Scribing apparatus |
| CN108218212A (en) * | 2016-12-14 | 2018-06-29 | 塔工程有限公司 | Substrate dividing apparatus |
| CN108218213A (en) * | 2016-12-14 | 2018-06-29 | 塔工程有限公司 | Cutter for substrate |
| CN109824261A (en) * | 2017-11-23 | 2019-05-31 | 塔工程有限公司 | Cutter for substrate and method for dividing substrate |
| CN109824261B (en) * | 2017-11-23 | 2022-12-02 | 塔工程有限公司 | Substrate cutting device and substrate cutting method |
| CN108202420A (en) * | 2017-12-29 | 2018-06-26 | 廊坊京磁精密材料有限公司 | Save the multi-line cutting method of material |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009157440A1 (en) | 2009-12-30 |
| CN102083760B (en) | 2014-01-08 |
| JPWO2009157440A1 (en) | 2011-12-15 |
| JP5280442B2 (en) | 2013-09-04 |
| TW201008887A (en) | 2010-03-01 |
| KR20110031340A (en) | 2011-03-25 |
| TWI369339B (en) | 2012-08-01 |
| KR101220859B1 (en) | 2013-01-10 |
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